Double-layer ultrahigh vacuum cavity integrating heating and heat shielding functions

Abstract

The utility model discloses a double-layer ultrahigh vacuum cavity integrating heating and heat shielding functions, which comprises a shell and an inner container which are nested, a closed cavity is formed between the shell and the inner container, heating parts and a heat shielding layer are arranged in the closed cavity, the heating parts are uniformly arranged on the outer side wall of the inner container, and the heat shielding layer is arranged on the outer side wall of the inner container. The heating part is arranged in the shell and connected with an external power pack to heat and bake the inner container, and the heat shielding layer is arranged on the inner side wall of the shell to reduce heat loss. The efficient baking device has the advantages of being compact in structure, high in stability, high in heating efficiency and the like, and the efficient baking requirement of a complex cavity is met.

Description

TECHNICAL FIELD

[0001] The utility model relates to the technical field of superhigh vacuum cavity baking, specifically relates to a double -layer superhigh vacuum cavity of integrated heating and heat shielding function. BACKGROUND

[0002] The baking of a superhigh vacuum cavity is to remove gas molecules (mainly water vapor) and pollutants adsorbed on the inner surface of the cavity to meet the requirements of a superhigh vacuum (UHV, usually below 10E-7Pa) environment. Before the cavity reaches UHV, it must go through a strict cleaning and baking process.

[0003] A superhigh vacuum cavity is usually made of stainless steel (such as 304, 316L), which has good high-temperature resistance and low outgassing rate, helping to reduce pollution during high-temperature baking. The cavity usually uses metal seals (such as CF flanges) or elastic seals (such as O-rings). Among them, the metal seal can withstand high-temperature baking, but the elastic seal (such as rubber material) is sensitive to high temperature and needs special protection or to be removed before baking. The surface of the cavity will adsorb a layer of water vapor molecules in the atmospheric environment, which can easily be precipitated at low vacuum, forming pollution and hindering the achievement of higher vacuum. Heating the cavity to 150℃-300℃ can accelerate the desorption of water vapor and other adsorbed substances from the inner surface of the cavity, which can be pumped away by a vacuum pump to achieve cleaning and degassing.

[0004] Currently, the baking of a superhigh vacuum cavity usually adopts two ways: baking cover or wrapping heating band.

[0005] The technical limitations of the baking cover method mainly include:

[0006] (1) Complex structure requirement: the baking cover needs to be tailored according to the shape and size of the cavity, especially for complex-shaped cavities, the cover body design and processing are more difficult, increasing the production cost and time.

[0007] (2) Difficulty in controlling high-temperature uniformity: although the overall heating of the baking cover is relatively uniform, if there are heat-sensitive components inside the cavity, local heat insulation protection is still needed, which increases the complexity of design and operation.

[0008] (3) Time-consuming disassembly and assembly of non-bakeable components: many components inside the cavity cannot withstand high temperatures and need to be disassembled and assembled after baking, which is tedious and time-consuming.

[0009] (4) Low thermal efficiency: there may be a lot of heat loss during the heating process of the baking cover, especially in the case of poor thermal insulation performance or large environmental temperature difference, which further prolongs the baking time.

[0010] The technical limitations of the heating band method include:

[0011] (1) Local overheating phenomenon: the contact area between the heating band and the cavity surface is limited, the heat conduction efficiency is limited, the heating effect is easy to concentrate in the contact area, which leads to local temperature too high and damages sensitive components.

[0012] (2) Thermal diffusion is uneven: the heating band relies on the thermal conductivity of the cavity material to achieve heat diffusion. If the thermal conductivity of the cavity material is poor (such as low thermal conductivity of stainless steel), it will cause uneven surface temperature distribution.

[0013] (3) Water vapor and pollution control problem: the formation and evaporation of water vapor on the surface of the cavity is affected by the surface temperature and the environmental humidity, the existing heating band method cannot effectively control the uniformity of the surface temperature and the water vapor evaporation path, which leads to surface pollution.

[0014] (4) Material compatibility problem: in high temperature environment, the heating band material may react chemically or physically deform (such as expansion or aging) with the material of the cavity or cavity components, affecting the service life and performance of the equipment.

[0015] (5) Since the heating band is an open baking method, it cannot be heat cycled or heat isolated, heat is lost, and high temperature baking is difficult to achieve. Utility model content

[0016] The technical problem to be solved by the utility model is to solve the problems of uneven heating, low heating efficiency, short service life of heating components and complex operation in the existing super-high vacuum cavity baking technology, and to provide a double-layer super-high vacuum cavity integrated with heating and heat shielding functions, which is compact in structure, high in stability and long in service life.

[0017] In order to solve the above technical problems, the utility model adopts the technical scheme that:

[0018] A double-layer super-high vacuum cavity integrated with heating and heat shielding functions, comprising an outer shell and an inner container arranged in a nested manner, a closed cavity is formed between the outer shell and the inner container, a heating component and a heat shielding layer are arranged in the closed cavity, the heating component is uniformly arranged on the outer side wall of the inner container, and the heating component is connected with an external power supply group to realize heating and baking of the inner container, and the heat shielding layer is arranged on the inner side wall of the outer shell to reduce heat loss.

[0019] As a further improvement of the utility model, the outer shell side is provided with an angle valve interface, and the angle valve interface is communicated with the closed cavity, and the angle valve interface is connected to an external vacuum pump truck group to realize that the closed cavity forms a super-high vacuum environment.

[0020] As a further improvement of the utility model, the outer shell side is further provided with a power supply interface to realize the connection between the heating component and the external power supply group.

[0021] As a further improvement of the utility model, the closed cavity is further provided with a thermocouple group, and the shell side is further provided with a thermocouple wiring port, which is used for connecting the thermocouple group to an external power supply group.

[0022] As a further improvement of the utility model, the utility model further includes an external intelligent temperature control device, which is used for receiving temperature signals transmitted by the thermocouple group and controlling the external power supply group to adjust power according to the temperature signals.

[0023] As a further improvement of the utility model, the heating component is a heating wire or a heating plate or an infrared heater.

[0024] As a further improvement of the utility model, the heating plate is a metal heating plate or a ceramic heating plate.

[0025] As a further improvement of the utility model, the heating wire is prepared from metal tungsten or metal tantalum.

[0026] As a further improvement of the utility model, the heat shielding layer is a tantalum cover or an aluminum alloy or a quartz glass cover or a platinum gold cover or a titanium alloy cover.

[0027] As a further improvement of the utility model, the closed cavity is filled with inert gas.

[0028] Compared with the prior art, the utility model has the advantages that:

[0029] The double-layer ultrahigh vacuum cavity integrating the heating and heat shielding functions of the utility model is formed by embedding the shell and the inner container to form a double-layer cavity structure, and a closed cavity is formed between the shell and the inner container, and a heating component and a heat shielding layer are arranged in the closed cavity; specifically, the heating component is uniformly arranged on the outer side wall of the inner container, which avoids local overheating or temperature deficiency, ensures the heating uniformity of the whole cavity, improves the heating efficiency and shortens the baking time, and the heat shielding layer is arranged on the inner side wall of the shell, which not only effectively prevents heat leakage, but also improves the energy utilization efficiency and further improves the energy efficiency of the heating process. The double-layer ultrahigh vacuum cavity of the utility model not only greatly improves the working efficiency and stability of the equipment, but also significantly reduces energy waste and equipment maintenance cost, solves the technical problems of low heating efficiency, uneven heating, complex operation, surface pollution, short service life of the heating component and high energy consumption in the traditional ultrahigh vacuum cavity baking mode, and has strong technical advantages and practical application prospect. BRIEF DESCRIPTION OF DRAWINGS

[0030] Figure 1 It is a structure principle schematic view of the double-layer baking device in the embodiment of the utility model;

[0031] Figure 2The flow chart of the intelligent temperature control in the embodiment of the utility model is shown.

[0032] Legend: 1, power interface; 2, thermocouple connection port; 3, shell; 4, inner container; 5, angle valve interface; 6, closed cavity; 7, heating component; 8, heat shield layer; 9, thermocouple group. DETAILED DESCRIPTION

[0033] The utility model will be further described below in combination with the drawings and specific preferred embodiments, but it does not limit the protection scope of the utility model.

[0034] In the description of the utility model, it is understood that the orientation or positional relationship indicated by the terms "side", "center", "longitudinal", "transverse", "length", "width", "thickness", "upper", "lower", "front", "rear", "left", "right", "vertical", "horizontal", "top", "bottom", "inner", "outer", "clockwise", "counterclockwise", "axial", "radial", "circumferential" is based on the orientation or positional relationship shown in the drawings, and is only for the convenience of describing the utility model and simplifying the description, and therefore cannot be understood as indicating or implying that the indicated device or element must have a particular orientation, be constructed and operated in a particular orientation, and therefore cannot be understood as limiting the utility model.

[0035] In addition, the terms "first" and "second" are only for the purpose of description, and cannot be understood as indicating or implying relative importance or implicitly indicating the number of indicated technical features, so that the features limited by "first" and "second" can explicitly or implicitly include one or more features, and in the description of the utility model, the meaning of "multiple" is two or more, unless otherwise specifically limited.

[0036] EMBODIMENT

[0037] As Figure 1 shown, the double-layer ultra-high vacuum cavity integrating heating and heat shielding functions of the utility model comprises a nested shell 3 and an inner container 4, a closed cavity 6 is formed between the shell 3 and the inner container 4, a heating component 7 and a heat shield layer 8 are arranged in the closed cavity 6, the heating component 7 is uniformly arranged on the outer side wall of the inner container 4, and the heating component 7 is connected with an external power supply group to realize heating and roasting of the inner container 4, and the heat shield layer 8 is arranged on the inner side wall of the shell 3 to reduce heat loss.

[0038] In this embodiment, the double-cavity design and the uniformly distributed heating components 7 on the inner side can achieve uniform heating of the cavity, avoiding the problem of local overheating or overcooling in the heating band method. Moreover, the design of the uniformly distributed heating components 7 on the outer wall of the inner container 4 reduces temperature fluctuations, allowing the entire cavity to reach the target temperature more quickly, thereby shortening the baking cycle and improving work efficiency. Since there is no need to disassemble non-bakeable components or build a complex baking cover, the baking process is simplified, reducing labor and time investment.

[0039] As shown in Figure 1 , the side of the shell 3 is provided with an angle valve interface 5, which is in communication with the sealed cavity 6, and the angle valve interface 5 is connected to an external vacuum pump truck group to form an ultra-high vacuum environment in the sealed cavity 6. By adopting a double-cavity design, the heating components 7 are uniformly distributed in the interlayer, and the sealed cavity 6 is evacuated to a vacuum state. The vacuum environment reduces the contact between the heating components 7 and oxygen in the air, thereby significantly reducing the occurrence of oxidation reactions, prolonging the service life of the heating components 7, reducing the frequency of maintenance and the cost of replacing components, and reducing the overall operating cost of the equipment. At the same time, the vacuum environment can reduce heat conduction and heat radiation loss, improving heat concentration.

[0040] As shown in Figure 1 , the side of the shell 3 is also provided with a power interface 1 to connect the heating components 7 to an external power supply group.

[0041] In this embodiment, the sealed cavity 6 is also provided with a thermocouple group, and the side of the shell 3 is also provided with a thermocouple connection port 2 for connecting the thermocouple group 9 to an external power supply group. As shown in Figure 1 , the thermocouple group 9 is uniformly distributed on the heat shield layer 8 to achieve uniform temperature measurement.

[0042] In this embodiment, an external intelligent temperature control device is also included, which is used to receive temperature signals transmitted by the thermocouple group 9 and control the external power supply group to adjust power according to the temperature signals. Specifically, the intelligent temperature control device can use a PLC intelligent temperature control system, which has the characteristics of simple principle, convenient operation, and precise control. By installing a multi-point thermocouple group 9 on the inner wall surface of the shell 3, the intelligent temperature control system can monitor temperature data in real time to ensure that the temperature of each part is within the ideal range. According to the actual temperature, the system will automatically adjust the heating power to avoid temperature fluctuations and local overheating. The automatic adjustment function of the temperature control system ensures the accuracy of temperature control, avoids errors caused by manual adjustment, and ensures the reliability and efficiency of the heating process.

[0043] In this embodiment, the heating component 7 is a heating wire. The heating wire is heated by resistance heating, and the heat is directly transmitted to the inside of the cavity, and the gas (such as water vapor and other impurities) in the cavity is desorbed, and is pumped away by the vacuum pump to obtain ultra-high vacuum (UHV). The material used for the heating wire can be a high-temperature-resistant and non-oxidizable metal (such as tungsten or tantalum), which ensures its stability at high temperature and long-term use.

[0044] In other embodiments, the heating component 7 can also use a heating plate or an infrared heater. The heating plate can be a metal heating plate or a ceramic heating plate. The heating plate can be in direct contact with the outer wall of the inner container 4 and provide heat. Alternatively, an infrared heater is used to heat the inside of the cavity by infrared radiation. The heating effect can be controlled by adjusting the infrared heating wavelength and intensity.

[0045] In this embodiment, the heat shielding layer 8 is a tantalum cover. Through the reflection of the tantalum cover, the influence of the external environmental temperature change on the heating effect inside the cavity is reduced, and the stability of the system is improved.

[0046] In other embodiments, the heat shielding layer 8 can also be an aluminum alloy cover or a quartz glass cover or a platinum gold cover or a titanium alloy cover. By using high-temperature-resistant materials to make the heat shielding layer 8, the heat reflection effect is achieved, thereby reducing heat loss and improving thermal efficiency.

[0047] In this embodiment, inert gas can also be filled into the sealed cavity 6 through the angle valve interface 5 to achieve uniform heating of the cavity. Gas heating can uniformly transmit heat to all parts of the cavity through fluid dynamics, avoiding the problems of uneven heat conduction and local overheating in traditional heating methods.

[0048] As shown in Figure 2 The process of intelligent temperature control in this embodiment includes:

[0049] Step S1, the power supply group outputs power to electrify the heating wire.

[0050] Step S2, the heating wire generates heat after being electrified.

[0051] Step S3, when the heating wire releases heat, the thermocouple group measures the temperature in real time and feeds back the temperature signal to the intelligent temperature control system.

[0052] Step S4, the intelligent temperature control system receives the temperature signal from the thermocouple group, adjusts and sends a control signal to the power supply group according to the user-set baking temperature, to realize real-time power adjustment.

[0053] In the double-layer cavity structure, the thermocouple group monitors the cavity temperature in real time and feeds back data to the intelligent temperature control system, and the system accurately controls the current and power of the inner wall heating wire by dynamically adjusting the power output of the power supply. In this way, not only the stability of the cavity surface temperature can be ensured, but also the uniformity of the temperature distribution can be maintained during the entire heating process, significantly improving the roasting efficiency and reliability.

[0054] The preferred embodiments of the present application are described above, the protection scope of the present application is not limited to the above-mentioned embodiments, any technical solutions falling within the idea of the present application shall fall within the protection scope of the present application. It should be noted that for ordinary skilled in the art, some improvements and decorations without departing from the principles of the present application can also be considered as the protection scope of the present application.

Claims

1. A double-layer ultrahigh vacuum chamber integrated with heating and thermal shielding functions, characterized in that, The application relates to a vacuum oven, which comprises a nested outer shell (3) and inner container (4), a closed cavity (6) is formed between the outer shell (3) and the inner container (4), a heating component (7) and a heat shielding layer (8) are arranged in the closed cavity (6), the heating component (7) is uniformly arranged on the outer side wall of the inner container (4), the heating component (7) is connected with an external power supply group to realize heating and roasting of the inner container (4), and the heat shielding layer (8) is arranged on the inner side wall of the outer shell (3) to reduce heat loss.

2. The dual-layer ultrahigh vacuum chamber integrated with heating and thermal shielding functions according to claim 1, wherein, An angle valve interface (5) is arranged on the side of the outer shell (3) and communicates with the closed cavity (6), the angle valve interface (5) is connected with an external vacuum pump vehicle group to realize formation of an ultrahigh vacuum environment in the closed cavity (6).

3. The dual-layer ultrahigh vacuum chamber integrated with heating and thermal shielding functions according to claim 2, wherein, A power supply interface (1) is further arranged on the side of the outer shell (3) to realize connection of the heating component (7) with the external power supply group.

4. The dual-layer ultrahigh vacuum chamber integrated with heating and thermal shielding functions according to claim 3, wherein, A thermocouple group (9) is further arranged in the closed cavity (6), and a thermocouple wiring port (2) is further arranged on the side of the outer shell (3), the thermocouple wiring port (2) is used for connecting the thermocouple group (9) with an external power supply group.

5. The integrated heating and thermal shielding dual-layer ultrahigh vacuum chamber of claim 4, wherein, An external intelligent temperature control device is further arranged, the intelligent temperature control device is used for receiving a temperature signal transmitted by the thermocouple group (9) and controlling the external power supply group to adjust power according to the temperature signal.

6. The double-layer ultrahigh vacuum chamber integrated with heating and thermal shielding functions according to any one of claims 1 to 5, characterized in that, The heating component (7) is a heating wire, a heating plate or an infrared heater.

7. The integrated heating and thermal shielding dual-layer ultrahigh vacuum chamber of claim 6, wherein, The heating plate is a metal heating plate or a ceramic heating plate.

8. The dual-layer ultrahigh vacuum chamber integrated with heating and thermal shielding functions according to claim 6, wherein, The heating wire is prepared from metal tungsten or metal tantalum.

9. The double-layer ultrahigh vacuum chamber integrated with heating and thermal shielding functions according to any one of claims 1 to 5, characterized in that, The heat shielding layer (8) is a tantalum cover, an aluminum alloy cover, a quartz glass cover, a platinum gold cover or a titanium alloy cover.

10. The double-layer ultrahigh vacuum chamber integrated with heating and thermal shielding functions according to any one of claims 1 to 5, characterized in that, The closed cavity (6) is filled with inert gas.

Images