Pipe replacing device and pipe replacing robot

By designing a tube replacement device and a tube replacement robot, the problem of difficult replacement of quartz tubes in diffusion furnaces was solved, realizing automated replacement, reducing the burden and cost of manual operation, and extending the service life of quartz tubes.

CN223604364UActive Publication Date: 2025-11-28SUZHOU UNION INTELLIGENT TECH CO LTD
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Patent Information

Application Number
CN202422932550.9
Authority / Receiving Office
CN · China
Patent Type
Utility models(China)
Current Assignee / Owner
Filing Date
2024-11-29
Publication Date
2025-11-28
Estimated Expiration
2034-11-29

AI Technical Summary

Technical Problem

In existing technologies, replacing the quartz tube in a diffusion furnace is difficult, labor-intensive, inefficient, poses high safety risks, and incurs high labor costs, and it is also easy to damage the quartz tube.

Method used

A tube-changing device was designed, including a lifting mechanism, a tube-changing mechanism, and a clamping assembly. The device achieves automatic docking of quartz tubes through angle and position adjustment, and utilizes a tube-changing robot for automatic replacement of quartz tubes.

Benefits of technology

It enables automated replacement of quartz tubes, reduces the burden of manual operation, reduces labor costs, reduces damage to quartz tubes, and improves work efficiency and service life.

✦ Generated by Eureka AI based on patent content.

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Patent Text Reader

Abstract

The utility model relates to a pipe replacing device and a pipe replacing robot. The pipe replacing mechanism comprises a first plate body connected with the output end of the lifting mechanism, a second plate body rotationally connected to the first plate body, a clamping assembly movably connected with the second plate body and used for clamping a pipe to be replaced, and a position adjusting assembly connected with the second plate body and the clamping assembly. Through the arrangement, the burden of manual operation is greatly reduced, the number of workers is reduced, the working efficiency is improved, meanwhile, damage possibly caused to the quartz tube in the quartz tube replacing process is reduced, the service life of the quartz tube is prolonged, and the using effect of the quartz tube is improved.
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Description

TECHNICAL FIELD

[0001] The utility model relates to the field of tube changing equipment, especially to a tube changing device and tube changing robot. BACKGROUND

[0002] In a photovoltaic cell production workshop, quartz tubes on the diffusion process need to be cleaned and replaced regularly, which is a key link to ensure production efficiency and product quality. Figure 1 As shown in the figure, due to the compact design of the diffusion furnace 1, the space at the docking interface 11 of the diffusion furnace is extremely small, and the operation surface height provided by the diffusion port 11 varies from 400mm to 4500mm. The quartz tubes used in the diffusion furnace are generally more than 4 meters long and weigh more than 100kg. Since the quartz tubes are made of a material that is easily broken, this poses great difficulties for the replacement of the quartz tubes.

[0003] Currently, the main way to replace the quartz tubes of the diffusion furnace is manual operation, which requires 8-10 people to manually cooperate every time the quartz tubes are replaced. First, the old quartz tubes in the diffusion furnace are removed, and then the new tubes are lifted into the narrow docking interface 11 of the diffusion furnace and manually pushed into the diffusion furnace 1. The entire operation takes 3-4 hours, which is labor-intensive and requires 8-10 people in the production workshop to be dedicated to tube replacement, resulting in high labor costs. The above-mentioned quartz tube replacement method has the following problems: first, the labor intensity of manual operation is high, the efficiency is low, and there is a certain safety risk; second, the labor cost is high, which is not conducive to the long-term development of the enterprise; third, during the replacement of the quartz tubes, the docking interface is small in size, and manual adjustment of the docking is easy to cause damage to the fragile quartz tubes, affecting their service life and use effect. CONTENT OF THE UTILITY MODEL

[0004] Therefore, the utility model solves the problem of the quartz tubes of the diffusion furnace being difficult to replace in the prior art, and provides a tube changing device and tube changing robot.

[0005] To solve the above technical problems, the utility model provides a tube changing device, which comprises:

[0006] a lifting mechanism;

[0007] a tube changing mechanism, comprising a first plate body connected to the output end of the lifting mechanism, a second plate body rotatably connected to the first plate body, a clamping assembly movably connected to the second plate body and used for clamping a tube to be replaced, an angle adjusting assembly connecting the first plate body and the second plate body, and a position adjusting assembly connecting the second plate body and the clamping assembly; the angle adjusting assembly is arranged to drive the second plate body to rotate horizontally for angle adjustment; and the position adjusting assembly is arranged to drive the clamping assembly to move horizontally in the first horizontal direction for position adjustment.

[0008] In an embodiment of the utility model, the angle adjusting assembly comprises: a first rotary drive arranged on the second plate body, a first eccentric wheel connected to the output end of the first rotary drive, a first cam arranged on the first eccentric wheel, and a first drive plate fixedly connected to the first plate body; a first waist-shaped hole adapted to the first cam is formed on the first drive plate.

[0009] In an embodiment of the utility model, the position adjusting assembly comprises: a second rotary drive arranged on the second plate body, a second eccentric wheel connected to the output end of the second rotary drive, a second cam arranged on the second eccentric wheel, a second drive plate fixedly connected to the clamping assembly, and a sliding pair arranged between the second plate body and the clamping assembly; a second waist-shaped hole adapted to the second cam is formed on the second drive plate.

[0010] In an embodiment of the utility model, the clamping assembly comprises: a frame body movably connected to the second plate body, at least two clamping units rotatably connected to the frame body, and a clamping drive unit mounted on the frame body; the two clamping units are symmetrically arranged along a first horizontal direction and form a clamping space therebetween; the clamping drive unit is connected to the clamping units to drive the two clamping units to rotate relative to each other to adjust the size of the clamping space.

[0011] In an embodiment of the utility model, the frame body comprises: a first support frame movably connected to the second plate body, and a second support frame arranged at both ends of the first support frame along a second horizontal direction; each second support frame is formed with two first hinge positions along the first horizontal direction, and one clamping unit is hingedly connected to each first hinge position.

[0012] In an embodiment of the utility model, the second support frame is formed with a second hinge position hingedly connected to the clamping drive unit; the clamping drive unit comprises two linear drive units symmetrically arranged along the first horizontal direction; one end of the linear drive unit is hingedly connected to the second support frame at the second hinge position, and the other end of the linear drive unit is hingedly connected to the clamping unit on the corresponding side.

[0013] In an embodiment of the utility model, the clamping unit comprises a clamping arm hingedly connected to the second support frame at the first hinge position, and a clamping piece hingedly connected to one end of the clamping arm; the other end of the clamping arm is hingedly connected to the linear drive unit, and a limiting slot is formed in the end portion of the linear drive unit; the clamping piece is provided with a limiting pin matched with the limiting slot at the end portion close to the linear drive unit, and an arc-shaped clamping portion is arranged on the inner side of the clamping piece.

[0014] In one embodiment of the utility model, still include the support piece of installation in second support frame, the both ends of support piece form the connecting portion of second support frame connection, the middle part of support piece is folded and gives way to the side away from the clamping space and forms the give way portion.

[0015] In one embodiment of the utility model, the lifting mechanism is set as a scissor lifting mechanism.

[0016] The utility model discloses a tube changing robot, including:

[0017] Mobile chassis;

[0018] The tube changing device, and the lifting mechanism in the tube changing device is arranged in the mobile chassis.

[0019] Compared with the prior art, the above technical scheme of the utility model has the following advantages:

[0020] The tube changing device can adjust the position relative to the interface in the horizontal direction, adjust the angle and coaxial with the interface, and then accurately butt-joint with the diffusion furnace tube, so that the automatic replacement of the quartz tube can be realized, thereby greatly reducing the burden of manual operation and labor cost. While improving work efficiency, the damage to the quartz tube during the replacement process is reduced, thereby prolonging the service life and use effect. BRIEF DESCRIPTION OF DRAWINGS

[0021] In order to make the content of the utility model more easily understood, the utility model is further explained in detail below according to the specific embodiments of the utility model and in combination with the drawings, wherein

[0022] Figure 1 It is a schematic diagram of the existing diffusion furnace and its interface;

[0023] Figure 2 It is a structure schematic view of the tube changing robot of the utility model;

[0024] Figure 3 It is a side view of the tube changing robot of the utility model;

[0025] Figure 4 It is a structure schematic of the tube changing device of the utility model Figure 1 ;

[0026] Figure 5 It is a structure schematic of the tube changing device of the utility model Figure 2 ;

[0027] Figure 6 It is an enlarged view of A in the utility model Figure 5 ;

[0028] Figure 7 is the structural schematic view of the angle adjusting assembly and the position adjusting assembly of the utility model;

[0029] Figure 8 is the structural schematic view of the utility model Figure 7 is the enlarged view of B in the utility model;

[0030] Figure 9 is the position schematic view of the second plate body and the angle adjusting assembly and the position adjusting assembly of the utility model;

[0031] Figure 10 is the structural schematic view of the clamping assembly of the utility model;

[0032] Figure 11 is the structural schematic view of the support of the utility model.

[0033] Description of the drawings of the utility model: 1, diffusion furnace;11, butt joint;

[0034] 2, lifting mechanism;21, lifting driving part;22, four connecting rods;23, sliding chute;24, sliding block;25, fixed pin shaft;

[0035] 3, to be replaced pipe;

[0036] 4, pipe changing mechanism;41, angle adjusting assembly;411, first rotary driving part;412, first eccentric wheel;413, first cam;414, first speed reducer;415, first waist type hole;

[0037] 42, position adjusting assembly;421, second rotary driving part;422, second eccentric wheel;423, second cam;424, second speed reducer;425, second waist type hole;

[0038] 43, first plate body;431, first driving plate;44, second plate body;441, second driving plate;

[0039] 45, rotary bearing;46, sliding rail;47, sliding block;

[0040] 5, clamping assembly;51, frame body;511, first support frame;512, second support frame;513, support;514, retreat part;515, connecting part;516, first hinged position;517, second hinged position;518, first pin shaft;519, second pin shaft;520, third hinged position;52, linear driving part;53, clamping unit;531, clamping part;532, clamping arm;533, limiting groove;534, limiting pin;

[0041] 6, moving base plate. Specific implementation

[0042] The present invention will be further described below with reference to the accompanying drawings and specific embodiments, so that those skilled in the art can better understand and implement the present invention. However, the embodiments are not intended to limit the present invention.

[0043] Example 1

[0044] In this embodiment, with Figure 2 Based on this, the direction of the X-axis is defined as the first horizontal direction, the direction of the Y-axis as the second horizontal direction, the direction of the Z-axis as the vertical direction, and the plane containing the X-axis and Y-axis as the horizontal plane.

[0045] Reference Figure 2 As shown, this utility model provides a tube-changing robot for replacing quartz tubes in a diffusion furnace 1 via interface 11. The tube-changing robot includes a tube-changing device and a mobile chassis 6. The mobile chassis 6 can be an AMR (Autonomous Mobile Robot). By integrating an automatic lifting device on top of the AMR, the quartz tubes can be automatically moved, reducing the burden of manual operation and improving work efficiency.

[0046] The tube replacement device includes a lifting mechanism 2, which is mounted on a movable chassis 6. The movable chassis 6 drives the lifting mechanism 2 to move to the diffusion furnace 1 where the tube is to be replaced.

[0047] The lifting mechanism 2 is configured as either a scissor lift mechanism 2 or a mast lift mechanism 2, wherein:

[0048] (1) Scissor lift

[0049] The scissor lift mechanism 2 is composed of four links 22 forming a parallelogram. The state of the parallelogram of the four links 22 mechanism is changed by the hydraulic cylinder, thereby realizing the change of vertical height. Moreover, the load capacity parameter of this structure has a wide range of design options.

[0050] like Figures 2-3 As shown, the scissor lift structure adopts a parallel four-bar linkage 22 mechanism. For different lifting heights, various standard connecting sections can be used for lifting design. Based on the arrangement of hydraulic cylinder, electric cylinder, rigid chain, and segmented screw, it can be arranged at an angle, or both ends can be fixed to the bottom of the connecting rod, with one connecting rod fixed and the other end able to move horizontally to achieve synchronous lifting.

[0051] Figure 2 and Figure 3 The scissor fork structure shown adopts a linkage hinge structure and uses an electro-hydraulic rod as the lifting drive 21 for lifting. Under the thrust of the hydraulic rod, the bottom fixed pin 25 only rotates, and the sliding block 24 at the end of the linkage moves along the slide groove 23, which causes the linkage to start to stand up, thereby driving the entire mechanism to lift upward and increasing the stroke.

[0052] In the embodiment, the lifting mechanism 2 is preferably a scissor lifting mechanism 2, and the free end of the lifting mechanism 2 is provided with two groups of lifting plates arranged at intervals.

[0053] (2), mast type

[0054] It includes double mast type and single mast type, the double mast type elevator is made of high strength material, the whole machine is extremely light in weight, and it is very convenient to push and go up and down the building, and can pass through the general hall. It can enter and exit the elevator at will. It has low power consumption, no noise, no pollution, and does not damage the ground during work. It can be used for wall operation. Two groups of mast support operation platform synchronous lifting, with excellent work stability; the whole lifting type guardrail device has good strength, can greatly reduce the height of the whole machine during transportation, and is very convenient to assemble and disassemble. It can be equipped with a gantry frame; it has the same convenient and flexible mobility as the single mast type platform, and has good load capacity.

[0055] As shown in Figure 4 , Figure 5 , the pipe changing device further comprises a pipe changing mechanism 4, and the pipe changing mechanism 4 comprises a first plate body 43 connected with the output end of the lifting mechanism 2. The first plate body 43 comprises a first main plate and a first driving plate 431 connected between the first main plate, and the first main plate is two and is arranged across the lifting plate. The two first main plates and the first driving plate 431 are detachably arranged or integrally arranged. The first plate body 43 is rotationally connected with a second plate body 44. Specifically, a rotary bearing 45 is arranged between the first plate body 43 and the second plate body 44, and the side of the rotary bearing 45 close to the first plate body 43 is arranged between the two first main plates. The first plate body 43 and the second plate body 44 are rotationally connected through the rotary bearing 45.

[0056] As shown in Figure 7 , Figure 9 and Figure 10 , the second plate body 44 is movably connected with a clamping assembly 5 for clamping the pipe to be replaced 3. The clamping assembly 5 comprises a frame body 51 movably connected with the second plate body 44. The frame body 51 comprises a first support frame 511 movably connected with the second plate body 44. The first support frame 511 is of a frame structure, and the two ends of the first support frame 511 along the second horizontal direction are provided with second support frames 512. Each second support frame 512 is formed with two first hinge positions 516 along the first horizontal direction. The first hinge position 516 is provided with a first pin shaft 518, and one clamping unit 53 is correspondingly hinged at each first hinge position 516, so that the clamping unit 53 can rotate around the first hinge position 516 through the first pin shaft 518.

[0057] As shown in Figure 10As shown, in order to drive the clamping units 53, the clamping assembly 5 further comprises a clamping driving unit connected with the clamping units 53 to drive the relative rotation of the two clamping units 53 to adjust the size of the clamping space. The second support frame 512 is formed with a second hinge position 517 hinged with the clamping driving unit. The clamping driving unit comprises two linear driving members 52 symmetrically arranged along the first horizontal direction, which can be any one of a pneumatic cylinder, a linear motor and an oil cylinder. The second hinge position 517 is provided with a second pin shaft 519 (not shown in the figure), one end of the linear driving member 52 is hinged with the second support frame 512 through the second pin shaft 519, and the other end of the linear driving member 52 is provided with a third hinge position 520 and hinged with the clamping unit 53 on the corresponding side.

[0058] Continuing to refer to the embodiment as shown in Figure 10 As shown, the two clamping units 53 are symmetrically arranged along the first horizontal direction and form a clamping space therebetween. The clamping unit 53 comprises a clamping arm 532 hinged with the second support frame 512 at the first hinge position 516, the middle of the clamping arm 532 is hingedly connected to the first hinge position 516 through the first pin shaft 518, one end of the clamping arm 532 is hingedly connected with a clamping piece 531, since the tube to be replaced 3 is generally a fragile quartz tube, the material of the clamping piece 531 is an elastic material such as rubber, plastic or a low-hardness material, the other end of the clamping arm 532 is hingedly connected with the linear driving member 52, the linear driving member 52 drives the clamping arm 532 to rotate around the first hinge position, so that the two clamping units 53 are close to or away from each other, and the end of the clamping arm 532 close to the linear driving member 52 is provided with a limiting slot 533. The end of the clamping piece 531 close to the linear driving member 52 is provided with a limiting pin 534 matched with the limiting slot 533, the limiting slot 533 can be an arc-shaped slot, the width of the arc-shaped slot is not less than the limiting pin 534, and the center of the arc-shaped slot is the rotation center of the clamping piece 531. In order to optimize the structure of the clamping arm 532 and reduce the weight, the limiting slot 533 is a trapezoidal slot, the area of the trapezoidal slot covers the arc-shaped slot, and the size close to the end of the clamping arm 532 is smaller. At the same time, by setting the limiting slot 533 as a trapezoidal slot with the upper part wider than the lower part, the clamping part has different rotation amplitudes at different heights of the cam. Specifically, the clamping piece 531 has the largest angle adjustment range when the height of the cam is at the uppermost position in the trapezoidal slot, and the clamping piece 531 has the smallest angle adjustment range when the height of the cam is at the lowermost position in the trapezoidal slot, and the angle adjustment range between the largest angle adjustment range and the smallest angle adjustment range can be set arbitrarily.

[0059] Continuing to refer to the embodiment as shown in Figure 10As shown, as a preferred embodiment, the inner side of the clamping piece 531 is provided with an arc-shaped clamping part having a concave structure, which clamps and limits the to-be-replaced pipe 3 through the concave structure and the part extending inward at both ends of the arc-shaped clamping part, so as to prevent the to-be-replaced pipe 3 from falling off. The clamping piece 531 is connected to the clamping arm 532 through rotation within the limiting slot 533 by the limiting pin 534, so as to be limited within a certain angle. When the clamping arm 532 drives the clamping piece 531 to clamp the to-be-replaced pipe 3, the clamping piece 531 can be adaptively rotated to fit the surface of the to-be-replaced pipe 3 according to the shape of the pipe, so that the clamping assembly 5 can be adapted to to-be-replaced pipes 3 of different shapes, not only circular pipes, but also elliptical and square pipes. When clamping a special-shaped pipe, the upper side of the clamping part abuts against the special-shaped pipe, the clamping part rotates to make the upper side outward and the lower side inward, the concave structure avoids the possible protruding part of the special-shaped pipe, and the lower side of the clamping part supports the special-shaped pipe.

[0060] As shown in Figure 11 In order to improve the structural strength of the clamping assembly 5, the second support frame 512 is further provided with a support piece 513, the two ends of the support piece 513 form a connecting part 515 connected with the second support frame 512. When clamping the to-be-replaced pipe 3, the lower side of the clamping arm 532 is subjected to the reaction force of the pipe body outward, so that the upper end of the clamping arm 532 has a tendency to rotate inward, and the clamping arms 532 on both sides of the second support frame 512 will extrude the second support piece 513 inward. The second support piece 513 is provided to support the two sides of the second support frame 512 to prevent the second support piece 513 from being deformed, so as to provide greater clamping force. The connecting part 515 is arranged along the third vertical direction, and a strip-shaped slot is formed in the connecting part 515 along the third vertical direction. The support piece 513 is fixed to the second support frame 512 by penetrating the strip-shaped slot with a bolt or a pin and locking the second support frame 512, so as to adjust the position of the support piece 513 up and down, adapt to to-be-replaced pipes 3 of different sizes and specifications. Further, the middle part of the support piece 513 is bent away from the clamping space to form a retreat part 514, which avoids the to-be-replaced pipe 3 to prevent the support piece 513 from interfering with clamping.

[0061] As shown in Figure 5 and Figure 6As shown, in order to push the to-be-replaced pipe 3 into the butt joint 11, the to-be-replaced pipe 3 and the butt joint 11 need to be coaxially butt jointed by angle adjustment of the butt clamping assembly 5, therefore, the angle adjustment assembly 41 is connected between the first plate body 43 and the second plate body 44, the angle adjustment assembly 41 is arranged to drive the second plate body 44 to rotate horizontally to adjust the angle, the angle adjustment assembly 41 comprises a first rotary drive 411 arranged on the second plate body 44, the first rotary drive 411 is a rotary motor or a rotary cylinder, and the like, but is not limited thereto, an output end of the first rotary drive 411 is connected with a first eccentric wheel 412 through a first speed reducer 414, the first eccentric wheel 412 is provided with a first cam 413, the first plate body 43 is fixedly connected with a first driving plate 431 arranged along a second horizontal direction, the first driving plate 431 is provided with a first waist-shaped hole 415 adapted to the first cam 413, the first waist-shaped hole 415 is arranged along the first horizontal direction, when the first eccentric wheel 412 is driven to rotate by the first rotary drive 411, the first cam 413 installed on the first eccentric wheel 412 has a circumferential motion trend along with the rotation of the first eccentric wheel 412, so that the first cam 413 contacts the inner wall of the first waist-shaped hole 415 and exerts a force, since the rotation of the first eccentric wheel 412 is limited by the first waist-shaped hole 415, the first cam 413 generates a force along the second horizontal direction on the inner wall of the first waist-shaped hole 415, so that the first plate body 43 and the second plate body 44 are relatively rotated.

[0062] As shown in Figure 7 and Figure 8 the second plate body 44 and the clamping assembly 5 are connected with the position adjustment assembly 42, the position adjustment assembly 42 is arranged to drive the clamping assembly 5 to move horizontally along the first horizontal direction to adjust the position, the position adjustment assembly 42 comprises a second rotary drive 421 arranged on the second plate body 44, the second rotary drive 421 is a rotary motor or a rotary cylinder, and the like, but is not limited thereto, an output end of the second rotary drive 421 is connected with a second eccentric wheel 422 through a second speed reducer 424, the second eccentric wheel 422 is provided with a second cam 423, the clamping assembly 5 is fixedly connected with a second driving plate 441 arranged along the first horizontal direction, the second driving plate 441 is provided with a second waist-shaped hole 425 adapted to the second cam 423, the second waist-shaped hole 425 is arranged along the second horizontal direction, when the second eccentric wheel 422 is driven to rotate by the second rotary drive 421, the second cam 423 installed on the second eccentric wheel 422 has a circumferential motion trend along with the rotation of the second eccentric wheel 422, so that the second cam 423 contacts the inner wall of the second waist-shaped hole 425 and exerts a pushing force, since the rotation of the second eccentric wheel 422 is limited by the shape of the second waist-shaped hole 425 itself, the second cam 423 generates a force along the first horizontal direction on the inner wall of the second waist-shaped hole 425, so that the first plate body 43 and the second plate body 44 are relatively moved.

[0063] As Figure 9 shown, in order to make the first plate body 43 and the second plate body 44 active connection, the second plate body 44 and the clamping assembly 5 are provided with a sliding pair, the sliding pair includes a sliding block 47 provided on the second plate body 44 and a sliding rail 46 provided on the clamping assembly 5 and in sliding connection with the sliding block 47, the sliding rail 46 is arranged above the first support frame 511 in the first horizontal direction, and the clamping assembly 5 is connected to the second plate body 44 through the sliding block 47 and the sliding rail 46.

[0064] Embodiment 2

[0065] This embodiment mainly describes a use method of a diffusion tube replacement robot, and the specific steps are as follows:

[0066] Step one: prepare an AMR (autonomous mobile robot) and two automatic lifting machines. The model of the AMR is FLex-1000, and the model of the automatic lifting machine is HY-100, which is arranged on both sides of the AMR. Both devices have high carrying capacity and stable operation performance, which can meet the carrying demand of quartz tubes. The maximum lifting height of the automatic lifting machine is 5 meters, the maximum load is 200 kilograms, the lifting speed is 0.5 meters per second, and the two automatic lifting machines are lifted synchronously, which can ensure the safe carrying of the quartz tube.

[0067] Step two: a fixed protection device is designed above and inside of the two automatic lifting machines, the length of the device is 1 meter, the width is 1 meter, the depth is 1.5 meters, and the material is special steel with high temperature resistance and corrosion resistance, which can facilitate the pushing of the quartz tube along the chute 23 into the diffusion furnace 1 tube.

[0068] Step three: the AMR automatically drives to the diffusion furnace 1 docking position, the automatic lifting machine aligns the clamping assembly 5 device with the diffusion furnace 1 tube, and the tube replacement mechanism 4 accurately aligns the tube to be replaced 3 with the diffusion furnace 1 port. The old quartz tube is pushed out of the diffusion furnace 1 tube by hand, pushed into the fixed protection device and automatically clamped.

[0069] Step four: the AMR automatically carries the old quartz tube back to the storage room, and at the same time, the new quartz tube is moved to the diffusion furnace 1 docking position by the AMR.

[0070] Step five: the new quartz tube is lifted to the appropriate operation height by the lifting device, the circular docking hole is accurately aligned with the diffusion furnace 1 tube port by the tube replacement mechanism 4, and then the new quartz tube is pushed into the diffusion furnace 1 tube by hand.

[0071] Step six: repeat steps three, four and five until all the quartz tubes are replaced.

[0072] The utility model discloses a kind of tube replacement devices, including lifting mechanism 2.Tube replacement mechanism 4, including the first plate body 43 being connected with the output end of lifting mechanism 2, the second plate body 44 being rotatably connected to the first plate body 43, the clamping assembly 5 being movably connected with the second plate body 44 and being used for clamping the pipe 3 to be replaced, the angle adjusting assembly 41 being connected the first plate body 43 and the second plate body 44, and the position adjusting assembly 42 being connected the second plate body 44 and the clamping assembly 5.The angle adjusting assembly 41 is arranged as the drive second plate body 44 horizontal rotation to carry out angle adjustment.The position adjusting assembly 42 is arranged as the drive clamping assembly 5 along first horizontal direction transverse to carry out position adjustment.Through above steps, it can be adjusted in horizontal plane direction relative interface, angle can also be adjusted and coaxial with interface, further with diffusion furnace tube carries out accurate butt joint, can effectively realize the automatic replacement of quartz tube, to greatly reduce the burden of manual operation and reduce labor cost.Working efficiency is improved, and the damage that can be caused to quartz tube in the process of replacing quartz tube is reduced, to prolong its service life and use effect.

[0073] Obviously, the above embodiments are only examples for clearly illustrating, not the limitation of the embodiments. For ordinary skilled in the art, on the basis of the above description, other different forms of changes or variations can also be made. Here, all the embodiments need not and cannot be exhausted. The obvious changes or variations derived therefrom are still within the scope of the utility model.

Claims

1. A pipe-changing device, characterized in that, include: Lifting mechanism (2); The tube-changing mechanism (4) includes a first plate (43) connected to the output end of the lifting mechanism (2), a second plate (44) rotatably connected to the first plate (43), a clamping assembly (5) movably connected to the second plate (44) and used for clamping the tube (3) to be replaced, an angle adjustment assembly (41) connecting the first plate (43) and the second plate (44), and a position adjustment assembly (42) connecting the second plate (44) and the clamping assembly (5); the angle adjustment assembly (41) is configured to drive the second plate (44) to rotate horizontally for angle adjustment; the position adjustment assembly (42) is configured to drive the clamping assembly (5) to move laterally along a first horizontal direction for position adjustment.

2. The pipe-changing device according to claim 1, characterized in that, The angle adjustment assembly (41) includes: a first rotary drive (411) disposed on the second plate (44), a first eccentric wheel (412) connected to the output end of the first rotary drive (411), a first cam (413) disposed on the first eccentric wheel (412), and a first drive plate (416) fixedly connected to the first plate (43); the first drive plate (416) is provided with a first waist-shaped hole (415) adapted to the first cam (413).

3. The pipe-changing device according to claim 1, characterized in that, The position adjustment assembly (42) includes: a second rotary drive member (421) disposed on the second plate (44), a second eccentric wheel (422) connected to the output end of the second rotary drive member (421), a second cam (423) disposed on the second eccentric wheel (422), a second drive plate (426) fixedly connected to the clamping assembly (5), and a sliding pair disposed between the second plate (44) and the clamping assembly (5); the second drive plate (426) is provided with a second waist-shaped hole (425) adapted to the second cam (423).

4. The pipe-changing device according to claim 1, characterized in that, The clamping assembly (5) includes: a frame (51) movably connected to the second plate (44), at least two clamping units (53) rotatably connected to the frame (51), and a clamping drive unit mounted on the frame (51); the two clamping units (53) are symmetrically arranged along a first horizontal direction and form a clamping space between them; the clamping drive unit is connected to the clamping units (53) to drive the two clamping units (53) to rotate relative to each other to adjust the size of the clamping space.

5. The pipe-changing device according to claim 4, characterized in that, The frame (51) includes: a first support frame (511) movably connected to the second plate (44), and a second support frame (512) disposed at both ends of the first support frame (511) along the second horizontal direction; each second support frame (512) has two first hinge positions (516) formed along the first horizontal direction, and a clamping unit (53) is hinged to each first hinge position (516).

6. The pipe-changing device according to claim 5, characterized in that, The second support frame (512) has a second hinge position (517) that is hinged to the clamping drive unit; the clamping drive unit includes two linear drive members (52) symmetrically arranged along the first horizontal direction; one end of the linear drive member (52) is hinged to the second support frame (512) at the second hinge position (517), and the other end of the linear drive member (52) is hinged to the clamping unit on the corresponding side.

7. The pipe-changing device according to claim 6, characterized in that, The clamping unit (53) includes a clamping arm (532) hinged to the second support frame (512) at the first hinge position (516), and a clamping member (531) hinged to one end of the clamping arm (532); the other end of the clamping arm (532) is hinged to the linear drive member (52), and a limit groove (533) is opened at the end of the clamping arm (532) away from the linear drive member (52); a limit pin (534) that cooperates with the limit groove (533) is provided at the end of the clamping member (531) near the linear drive member (52), and an arc-shaped clamping part is provided on the inner side of the clamping member (531).

8. The pipe-changing device according to claim 5, characterized in that, It also includes a support member (513) installed on the second support frame (512); the two ends of the support member (513) form connecting portions (515) that connect to the second support frame (512), and the middle part of the support member (513) is bent and recessed to the side away from the clamping space to form a recessed portion (514).

9. The pipe-changing device according to claim 1, characterized in that, The lifting mechanism (2) is configured as a scissor lift mechanism (2).

10. A tube-changing robot, characterized in that, include: Mobile chassis (6); The pipe-changing device as described in any one of claims 1-9; The lifting mechanism (2) in the pipe changing device is mounted on the mobile chassis (6).