Multi-hole cleaning device of cutting machine

Abstract

The utility model discloses a cutting machine multi-hole cleaning device which comprises a base and a frame body arranged on the base, a blade is movably connected to the frame body, and a supporting frame is further connected to the base. The inner side of the supporting frame is connected with a first connecting pipe and a second connecting pipe. The connecting pipe I is connected with a water outlet pipe I; the connecting pipe II is connected with a water outlet pipe II; water outlets of the multiple first water outlet pipes and the multiple second water outlet pipes face the cutting direction; the connecting pipe II is arc-shaped; the connecting pipe II is connected with a connecting block; the connecting block is connected with a rotating rod; the two ends of the rotating rod are rotationally connected with the supporting frame. The second connecting pipe is rotationally connected with the supporting frame through a rotating rod. The base is connected with the first connecting pipe and the second connecting pipe, the first connecting pipe and the second connecting pipe are provided with the multiple water outlet pipes, and the water outlet pipes all face the cutting side, so that the cleaning area of the surface of a wafer is increased, and silicon powder is prevented from remaining on the surface of the wafer.

Description

TECHNICAL FIELD

[0001] The utility model relates to wafer cutting technical field especially relates to a cutting machine multi -hole cleaning device. BACKGROUND

[0002] The cutting machine is the equipment for cutting wafer in semiconductor industry, and the cutting is carried out to the wafer in the form of high-speed rotation of blade impact to complete the segmentation between the crystal grains, and a large amount of silicon powder is generated in the cutting process, which needs to be washed clean by pure water, the wafer surface cleaning of the existing cutting process uses single-hole cleaning nozzle, and a large amount of silicon powder is generated in the cutting process of the blade, which is dispersed and covers the entire wafer surface in the moving process of cutting, and the single-hole cleaning nozzle in actual operation can not make the cleaning effect be poor, and the silicon powder is left on the wafer surface. SUMMARY

[0003] The utility model discloses a cutting machine multi -hole cleaning device can solve the problems in the prior art.

[0004] In order to achieve the above-mentioned purpose, the utility model adopts the following technical scheme:

[0005] A cutting machine multi -hole cleaning device, including base and setting on the base frame, the frame is movably connected with the blade, and the base is also connected with the support frame, the support frame is connected with the connecting pipe no.

[0006] Preferably, the rotating rod is fixedly connected with a gear one, the gear one is connected with a gear two that is engaged, the gear two is rotatably connected with the support frame through a shaft rod and is connected with a handle, and the gear one and the gear two are driven to rotate simultaneously through the handle.

[0007] Preferably, the support frame is movably connected with a clamping block, the clamping block is arc-shaped and matched with the upper end of the gear two, and the lower end of the clamping block is provided with a clamping tooth, and the gear two is fixed through the clamping block.

[0008] Preferably, the upper end of the clamping block is connected with a limiting block through a rod piece, the limiting block is arranged on the upper end of the support frame, and the clamping block is movably connected with the upper end of the support frame through the rod piece and the limiting block.

[0009] Preferably, the connecting pipe one is connected with the water inlet pipe one at one end away from the water outlet pipe one; the connecting pipe two is connected with the water inlet pipe two at one end away from the water outlet pipe two; and the water inlet pipe two is a hose at one end close to the connecting pipe two.

[0010] Preferably, the support frame is connected with a bottom plate at the bottom; and the connecting pipe one is placed on the bottom plate.

[0011] Preferably, the blade is connected with a fixing frame; the fixing frame is connected with a motor; the blade is driven to rotate by the motor; a cylinder is connected to the frame body; the output end of the cylinder is fixedly connected to the upper end of the fixing frame; and the blade is driven to move up and down by the cylinder.

[0012] Compared with the prior art, the cutting machine multi-hole cleaning device has the following beneficial effects:

[0013] The cutting machine multi-hole cleaning device has the following beneficial effects: BRIEF DESCRIPTION OF DRAWINGS

[0014] Figure 1 It is a structural schematic view of the utility model;

[0015] Figure 2 It is a structural schematic view of another perspective of the utility model;

[0016] Figure 3 It is a structural schematic view of the utility model;

[0017] Figure 4 It is a structural schematic view of the utility model;

[0018] Figure 5 It is a top view of the connecting pipe two of the utility model.

[0019] In the drawing: 10, base; 11, frame body; 12, blade; 13, fixing frame; 14, motor; 15, cylinder; 21, support frame; 22, connecting pipe one; 23, water outlet pipe one; 24, connecting pipe two; 25, water outlet pipe two; 26, connecting block; 27, rotating rod; 28, water inlet pipe one; 29, water inlet pipe two; 31, gear one; 32, gear two; 33, handle; 34, clamping block; 35, limiting block; 36, bottom plate. Detailed Implementation

[0020] The following will refer to Figures 1-5 This invention describes the specific implementation of the multi-hole cleaning device for a cutting machine, which includes a base 10 and a frame 11 mounted on the base 10. A blade 12 is movably connected to the frame 11, and a support frame 21 is also connected to the base 10. A connecting pipe 22 and a connecting pipe 24 are connected to the inner side of the support frame 21. A water outlet pipe 23 is connected to the connecting pipe 22, and a water outlet pipe 25 is connected to the connecting pipe 24. Multiple water outlet pipes 23 and 25 are provided, with the water outlets facing the cutting direction and perpendicular to the corresponding connecting pipes. The connecting pipe 24 is arc-shaped and concave inward at the cutting end, so that the water outlet direction of the water outlet pipe 25 on the connecting pipe 24 is concentrated inward, facilitating cleaning of the cutting position.

[0021] Furthermore, a connecting block 26 is connected to the second connecting pipe 24; a rotating rod 27 is connected to the connecting block 26; both ends of the rotating rod 27 are rotatably connected to the support frame 21; the second connecting pipe 24 is rotatably connected to the support frame 21 through the rotating rod 27. A gear 31 is fixedly connected to the rotating rod 27; a meshing gear 32 is connected to the gear 31; the gear 32 is rotatably connected to the support frame 21 through a shaft and is connected to a handle 33; the gear 31 and the gear 32 are driven to rotate simultaneously through the handle 33.

[0022] To prevent rotation between gears, a locking block 34 is movably connected to the support frame 21. The locking block 34 is arc-shaped, matching the upper end of the second gear 32. The lower end of the locking block 34 is provided with locking teeth. The second gear 32 is fixedly locked by the locking block 34 to prevent movement between gears. The upper end of the locking block 34 is connected to a limiting block 35 via a rod. The limiting block 35 is located on the upper end of the support frame 21. The locking block 34 is movably connected to the upper end of the support frame 21 via the rod and the limiting block 35. In use, simply lifting the locking block 34 and the limiting block 35 up or down will rotate the gear.

[0023] To ensure the normal use of connecting pipe 1 22 and connecting pipe 24, the end of connecting pipe 1 22 away from the outlet pipe 1 23 is connected to the inlet pipe 1 28; the end of connecting pipe 24 away from the outlet pipe 2 25 is connected to the inlet pipe 2 29; and the end of the inlet pipe 2 29 near connecting pipe 2 24 is a flexible hose for easy angle adjustment.

[0024] In order to prevent the water outlet pipe 23 on the connecting pipe 22 from being too low, a base plate 36 is connected to the bottom of the support frame 21; the connecting pipe 22 is placed on the base plate 36.

[0025] A fixed frame 13 is connected to the blade 12; a motor 14 is connected to the fixed frame 13; the blade 12 is driven to rotate by the motor 14; a cylinder 15 is connected to the frame body 11; an output end of the cylinder 15 is fixedly connected to an upper end of the fixed frame 13; the blade 12 is driven to move up and down by the cylinder 15 to complete a cutting action.

[0026] The above is only the preferred embodiment of the present application, but the protection scope of the present application is not limited to this, any skilled person in the art can make equivalent replacement or change according to the technical scheme and the inventive concept of the present application within the technical range disclosed by the present application, which should be covered in the protection scope of the present application.

Claims

1. A cutting machine multi-hole cleaning device, comprising a base (10) and a frame (11) arranged on the base (10), a blade (12) movably connected on the frame (11), characterized in that, The base (10) is further connected with a support frame (21); the inner side of the support frame (21) is connected with a connecting pipe one (22) and a connecting pipe two (24); the connecting pipe one (22) is connected with a water outlet pipe one (23); the connecting pipe two (24) is connected with a water outlet pipe two (25); the water outlet pipe one (23) and the water outlet pipe two (25) are both provided with a plurality of water outlets which are directed to the cutting direction; the connecting pipe two (24) is arc-shaped; and the connecting pipe two (24) is connected with a connecting block (26); the connecting block (26) is connected with a rotating rod (27); the two ends of the rotating rod (27) are rotatably connected with the support frame (21); and the connecting pipe two (24) is rotatably connected with the support frame (21) through the rotating rod (27).

2. A cutting machine multi-hole cleaning device according to claim 1, characterized in that, The rotating rod (27) is fixedly connected with a gear one (31); the gear one (31) is connected with a gear two (32) which is in engagement; the gear two (32) is rotatably connected with the support frame (21) through a shaft rod and is connected with a handle (33); and the gear one (31) and the gear two (32) are driven to rotate simultaneously through the handle (33).

3. A cutting machine multi-hole cleaning device according to claim 2, characterized in that, The support frame (21) is movably connected with a clamping block (34); the clamping block (34) is arc-shaped and matches the upper end of the gear two (32); and the lower end of the clamping block (34) is provided with clamping teeth, and the gear two (32) is fixed through the clamping block (34).

4. A cutting machine multi-hole cleaning device according to claim 3, wherein, The upper end of the clamping block (34) is connected with a limiting block (35) through a rod piece; the limiting block (35) is arranged on the upper end of the support frame (21); and the clamping block (34) is movably connected with the upper end of the support frame (21) through the rod piece and the limiting block (35).

5. The perforating cleaning apparatus of claim 1, wherein, The end of the connecting pipe one (22) away from the water outlet pipe one (23) is connected with a water inlet pipe one (28); the end of the connecting pipe two (24) away from the water outlet pipe two (25) is connected with a water inlet pipe two (29); and the end of the water inlet pipe two (29) close to the connecting pipe two (24) is a hose.

6. The cutting machine multi-hole cleaning device according to claim 1, wherein, The bottom of the support frame (21) is connected with a bottom plate (36); and the connecting pipe one (22) is placed on the bottom plate (36).

7. The cutting machine multi-hole cleaning device according to claim 1, wherein, The blade (12) is connected with a fixing frame (13); the fixing frame (13) is connected with a motor (14); the blade (12) is driven to rotate through the motor (14); the frame body (11) is connected with a gas cylinder (15); the output end of the gas cylinder (15) is fixedly connected with the upper end of the fixing frame (13); and the blade (12) is driven to move up and down through the gas cylinder (15).

Images