Sticky plate for placing wafer for operating platform

Abstract

The utility model provides a sticky plate for placing a wafer for an operating table, which relates to the technical field of wafer sticky plates, and is characterized in that the sticky plate comprises an operating table and a sticky plate, support legs are fixed on the left and right sides of the lower end surface of the operating table, and side fixing plates are fixed on the left and right sides of the upper end surface of the operating table; two sets of mounting bases are fixed between the two sets of side fixing plates, sticky plates are mounted on the mounting bases, four sets of upper grooves are formed in the upper end face of each sticky plate, outer baffles are fixed to the front side and the rear side of the upper end face of each sticky plate, a set of threaded rods are movably connected to the middles of the outer baffles through threads, and rear connecting plates are rotatably connected to the front ends of the threaded rods; the front end of the rear connecting plate is fixed to the rear side face of the clamping plate, multiple sets of clamping grooves are formed in the upper end face of the sticky plate, and a partition plate is clamped between every two sets of clamping grooves which are aligned front and back. According to the utility model, the placed wafer can be rotated and reversed conveniently, the clamping is safe and anti-slip, the disassembly after the assembly is convenient, and the device is more convenient, stable and practical.

Description

Technical Field

[0001] This utility model relates to the field of wafer bonding technology, and more specifically to a bonding plate for placing wafers on an operating table. Background Technology

[0002] In the existing technology, the bonding plates of polycrystalline silicon slicing machines are relatively short in length. Several short workpiece plates are used together during operation. This type of split bonding workpiece plate will generate a lot of gaps during the bonding process, resulting in low workpiece utilization and affecting the output of the slicing machine.

[0003] The specification of an integrated die-bonding plate for a polycrystalline silicon slicing machine (publication number CN202155965U) mentions that it "includes an integrated die-bonding plate, a glass plate, and a connecting mechanism. The integrated die-bonding plate is connected to the slicing machine through the connecting mechanism. The glass plate is bonded to the integrated die-bonding plate and the glass plate is bonded to the polycrystalline silicon rod." However, in the prior art, the die-bonding plate cannot help with wafer reorientation, and slippage may occur during clamping, making it unstable and inconvenient to use. Utility Model Content

[0004] To overcome the shortcomings of the existing technology, a die-holding plate for an operating table is provided to solve the problems that the die-holding plate in the existing technology cannot help the die to be commutated, may slip during the clamping process, and is not stable and convenient to use.

[0005] To achieve the above objectives, a wafer-placement adhesive plate for an operating table is provided, characterized in that: it includes an operating table and an adhesive plate; support legs are fixed on both the left and right sides of the lower end face of the operating table; side fixing plates are fixed on both the left and right sides of the upper end face of the operating table; two sets of mounting seats are fixed between the two sets of side fixing plates; the adhesive plate is mounted on the mounting seats; four upper grooves are provided on the upper surface of the adhesive plate; outer baffles are fixed on both the front and rear sides of the upper end face of the adhesive plate; a set of threaded rods is movably connected to the middle of the outer baffles via threads; the front end of the threaded rods is rotatably connected to a rear connecting plate; and the front end of the rear connecting plate is fixed to the rear side of the clamping plate.

[0006] Furthermore, the mounting base has side openings on both the left and right sides, and a mounting groove is provided on the mounting base, with four sets of sleeve holes on the inner bottom surface of the mounting groove.

[0007] Furthermore, the upper surface of the adhesive plate is provided with multiple sets of slots, and a partition is engaged between two sets of slots that are aligned front to back, and the partition is a detachable structure.

[0008] Furthermore, a central rod is provided at the center of the turntable fitted in the groove, and the lower part of the central rod extends out of the sleeve hole, and a handle is provided at the lower end of the central rod.

[0009] Further, the lower end surface of the stick plate is fixed with lower support rods on both sides, the lower end of the lower support rod is fixed with a side connecting rod, the outer end of the side connecting rod is screwed with a fastening nut, and the fastening nut is a detachable structure.

[0010] Further, the front side of the clamping plate is provided with a plurality of protrusions, and the protrusions are made of silicone rubber.

[0011] The utility model discloses the beneficial effect lies in:

[0012] 1. The utility model discloses the convenient assembly between stick plate and mounting seat, split convenient, and can drive the rotation of carousel through the rotation handle, and the rotation of wafer is conveniently driven, and the operation is more flexible and practical.

[0013] 2. The utility model discloses the rotation of screw rod is moved to the front of rear connecting plate along with the rotation, thereby the two sets of clamping plates that are in line with each other are driven to clamp in wafer, make its place more safe and stable.

[0014] 3. The utility model discloses the convenient rotation of wafer and change direction, and clamping safety antiskid, and convenient assembly after dismounting, more convenient stable practical. DRAWINGS

[0015] Figure 1 It is the front view schematic diagram of the utility model embodiment;

[0016] Figure 2 It is the left view schematic diagram of the utility model embodiment's stick plate installation in mounting seat;

[0017] Figure 3 It is the stick plate installation in the top view schematic diagram of mounting seat of the utility model embodiment;

[0018] Figure 4 It is the mounting seat schematic diagram of the utility model embodiment.

[0019] In the drawing: 1, operation platform;10, support leg;11, side fixed plate;12, mounting seat;13, installation groove;14, sleeve hole;15, side through hole;2, stick plate;20, clamping groove;21, partition;22, upper recess;23, carousel;230, center rod;231, handle;24, outer baffle;25, rear connecting plate;26, screw rod;27, clamping plate;28, protrusion;29, lower support rod;290, side connecting rod;291, fastening nut. CONCRETE IMPLEMENTATION

[0020] In order to make the technical problems, technical solutions and beneficial effects of the utility model clearer, the utility model is further described in detail below in combination with the drawings and examples. The specific examples described herein are only used to explain the utility model and are not used to limit the utility model. Specific details such as specific system structures and technologies are proposed so as to understand the utility model examples more thoroughly. The described examples are part of the embodiments of the disclosure, not all the embodiments. However, those skilled in the art should know that the utility model can be realized in other embodiments without these specific details. Based on the examples in the disclosure, all other embodiments obtained by those skilled in the art without creative labor belong to the protection scope of the disclosure.

[0021] The specific implementation of the utility model is described in detail below in combination with the drawings.

[0022] Figure 1 is a front view schematic diagram of the utility model embodiment, Figure 2 is a left view schematic diagram of the utility board installed on the mounting seat of the utility model embodiment, Figure 3 is a top view schematic diagram of the utility board installed on the mounting seat of the utility model embodiment and Figure 4 is a schematic diagram of the mounting seat of the utility model embodiment.

[0023] Referring to Figures 1 to 4 , the utility model provides a kind of utility board for placing wafer, including operation platform 1 and utility board 2, the lower end surface of operation platform 1 left and right sides are both fixed with support leg 10, the upper end surface of operation platform 1 left and right sides are both fixed with side fixed plate 11, and two groups of side fixed plate 11 are fixed with two groups of mounting seat 12, mounting seat 12 is installed with utility board 2, and four groups of upper grooves 22 are arranged on the upper end surface of utility board 2, the upper end surface of utility board 2 is fixed with outer baffle 24 before and after two sides, and outer baffle 24 is movably connected with a group of threaded rods 26 in middle part by screw thread, the front end of threaded rod 26 is rotatably connected with rear connecting plate 25, and the front end of rear connecting plate 25 is fixed at the back side of clamping plate 27.

[0024] In the embodiment, the left and right sides of mounting seat 12 are both provided with side through hole 15, and mounting groove 13 is arranged on mounting seat 12, and four groups of sleeve holes 14 are arranged on the inner bottom surface of mounting groove 13;Multiple clamping grooves 20 are arranged on the upper end surface of utility board 2, and partition plate 21 is clamped between two groups of clamping grooves 20 aligned before and after, and partition plate 21 is detachable structure;The center of rotating disc 23 placed in groove 22 is provided with center rod 230, and the lower part of center rod 230 extends out of sleeve hole 14, and handle 231 is arranged on the lower end of center rod 230.

[0025] As a preferable implementation, the utility model discloses convenient assembly between the adhesive plate 2 and the mounting seat 12, convenient split, and through the rotation handle 231 can drive the rotating disc 23 rotation, conveniently drive wafer rotation change direction, operation is more flexible practical.

[0026] In the embodiment, the lower end face of the adhesive plate 2 is fixed with the lower support rod 29 on both sides, the lower end of the lower support rod 29 is fixed with the side connecting rod 290, the outer end of the side connecting rod 290 is screwed with the fastening nut 291, and the fastening nut 291 is detachable structure, and the front side of the clamping plate 27 is provided with multiple groups of protrusions 28, and the protrusions 28 adopt silicon rubber material.

[0027] As a preferable implementation, the utility model through clockwise rotation screw rod 26 will move to the front of the back connecting plate 25 from the rotation, thereby drive the two groups of clamping plates 27 that are in front and back alignment and hold in wafer, make it place more safe and stable.

[0028] The utility model can effectively solve the problem that the existing technology cannot help wafer change direction, and the clamping process may slip, and the use is not stable and convenient, the utility model is convenient for rotating the wafer placed and change direction, clamping safety antiskid, and the utility model is convenient for assembling and disassembling, and is more convenient, stable and practical.

[0029] The above embodiment is used to explain the utility model, rather than limit the utility model, and any modification and change made to the utility model within the spirit and application protection right claim range of the utility model should be included in the protection range of the utility model.

Claims

1. A wafer placing adhesive sheet for an operation table, characterized by: The operation platform (1) and the sticking plate (2) are provided, the lower end surface of the operation platform (1) is fixed with supporting legs (10) on the left and right sides, the upper end surface of the operation platform (1) is fixed with side fixed plates (11) on the left and right sides, two groups of mounting seats (12) are fixed between the two groups of side fixed plates (11), the mounting seat (12) is installed with the sticking plate (2), the upper end surface of the sticking plate (2) is provided with four groups of upper grooves (22), the upper end surface of the sticking plate (2) is fixed with outer baffle plates (24) on the front and rear sides, and the middle part of the outer baffle plate (24) is movably connected with a group of threaded rods (26) through threads, the front end of the threaded rod (26) is rotatably connected with a rear connecting plate (25), and the front end of the rear connecting plate (25) is fixed on the rear side of the clamping plate (27).

2. The wafer placing adhesive sheet for an operation table according to claim 1, wherein The left and right sides of the mounting seat (12) are provided with side openings (15), and the mounting seat (12) is provided with a mounting groove (13), and the inner bottom surface of the mounting groove (13) is provided with four groups of sleeve holes (14).

3. The wafer placing adhesive sheet for an operation table according to claim 1, wherein The upper end surface of the sticking plate (2) is provided with a plurality of clamping grooves (20), and the two groups of clamping grooves (20) are clamped with a partition plate (21), and the partition plate (21) is a detachable structure.

4. The wafer placing adhesive sheet for an operation table according to claim 1, wherein The center of the rotating disc (23) sleeved in the groove (22) is provided with a center rod (230), the lower part of the center rod (230) extends out of the sleeve hole (14), and the lower end of the center rod (230) is provided with a handle (231).

5. The wafer placing adhesive sheet for an operation table according to claim 1, wherein The lower end surface of the sticking plate (2) is fixed with lower supporting rods (29) on the left and right sides, the lower end of the lower supporting rod (29) is fixed with a side connecting rod (290), the outer end of the side connecting rod (290) is screwed with a fastening nut (291), and the fastening nut (291) is a detachable structure.

6. The wafer placing adhesive sheet for an operation table according to claim 1, wherein The front side of the clamping plate (27) is provided with a plurality of protrusions (28), and the protrusions (28) are made of silicone rubber material.

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