Ozone generation chamber and ozone generator

Abstract

The utility model relates to ozone generation device technical field discloses an ozone generation chamber and ozone generator, and ozone generation chamber includes: high voltage electrode subassembly, it includes the first electrode plate, high voltage electrode and dielectric body that connect gradually, the area of high voltage electrode and dielectric body are all less than the area of first electrode plate, ground electrode subassembly, it includes the ground electrode and second electrode plate that set up gradually, the area of ground electrode is less than the area of second electrode plate, be equipped with air inlet and air outlet on the first electrode plate or second electrode plate, the first electrode plate and second electrode plate connect and form sealed cavity between the first electrode plate and second electrode plate, and form the discharge gap between ground electrode and dielectric body. Realize the volume of ozone generation chamber reduction, improve the efficiency that ozone generates.

Description

TECHNICAL FIELD

[0001] The utility model belongs to ozone generating device technical field, especially relate to a kind of ozone generating chamber and ozone generator. BACKGROUND

[0002] Ozone has very strong oxidation characteristics, and is a strong oxidant. In a clean semiconductor environment, atomic layer deposition (ALD) and etching (ALE) and other thin film deposition processes can also be achieved with ozone gas reaction. High-purity, high-concentration ozone gas can produce higher film density, thereby improving product performance and reliability.

[0003] Ozone generation methods include ultraviolet irradiation, electrolysis and dielectric barrier discharge. The dielectric barrier discharge method requires simple raw materials, only electricity, air or oxygen, and there is no raw material transportation problem. In addition, the generator structure is simple, so the current large-scale ozone generators in the industry use this method to generate ozone. The structure of ozone generators using the dielectric barrier method is mainly in the form of tubes and plates. The tube structure is commonly used for low-concentration ozone generators, and the plate structure is commonly used for high-concentration ozone generators. In the fields of semiconductors and flat panel displays, high-concentration and high-purity ozone gas is usually required. The existing plate-type ozone generators have the problem of uneven discharge gap, which leads to low ozone production and relatively large volume, which is not suitable for the high integration requirements of semiconductor equipment.

[0004] The development direction of the ozone generator manufacturing industry is towards better and thinner dielectric layers, smaller corona gaps, and improvements in dielectric materials and cooling effects of corona discharge. It is not easy to use thinner dielectric layers and smaller corona gaps, because the dielectric layer not only needs to be thin, but also needs to be uniform. In order to obtain a smaller and uniform discharge gap, the dimensional accuracy of the dielectric layer is required to be very high. As a material for the dielectric layer, ceramic is superior to glass. The precision of a ceramic tube fired at over a thousand degrees cannot be guaranteed, and the cost is too high. Although glass tubes are commonly used as dielectric layers, thin-walled high-precision glass tubes cannot be fired.

[0005] The most commonly used product on the market is a tubular medium-frequency generator. This type of product has the following characteristics: (1) the generator discharge chamber has a single electrode water cooling, and the high-voltage electrode relies on gas flow for heat dissipation, which is ineffective and affects the ozone concentration; (2) the cooling water flow path is long, and the water flow is not evenly distributed, resulting in a large temperature gradient; (3) the discharge chamber is relatively long, and the ozone passes through a long path, causing some ozone to decompose, resulting in low efficiency; (4) the dielectric body uses enamel tubes, which have low dielectric constant and thermal conductivity, affecting ozone concentration and yield, and increasing ozone decomposition; (5) the tubular discharge units of the ozone generator are arranged in a honeycomb structure inside the tubular container, which is large in volume and has low space utilization.

[0006] Compared with the ozone generator using the structure, the ozone generator has relatively low technical content, many types of raw materials, and high manufacturing cost. Moreover, the ozone generator has a large size and is not a modular structure, which brings many inconveniences to transportation, installation, use, maintenance and replacement of the equipment, increases transportation and maintenance costs, and has certain influence on ozone production. Meanwhile, the power frequency of the medium-frequency large ozone generator is lower than 2000Hz, which causes the power component to have a large size and high self-loss.

[0007] Therefore, how to design a new ozone generation technology with small size, high efficiency, good performance, convenient maintenance and low cost is a technical problem to be solved by the utility model. Utility model content

[0008] The utility model provides a kind of ozone generation chamber and ozone generator, realize the volume of ozone generation chamber is reduced, improve the efficiency of ozone generation.

[0009] To achieve the above technical purpose, the utility model adopts the following technical scheme:

[0010] In one aspect, the utility model provides a kind of ozone generation chamber, comprising:

[0011] High-voltage electrode assembly, it includes the first electrode plate, high-voltage electrode and dielectric body connected in sequence, the area of the high-voltage electrode and the dielectric body is less than the area of the first electrode plate;

[0012] Ground electrode assembly, it includes ground electrode and second electrode plate arranged in sequence, the area of the ground electrode is less than the area of the second electrode plate;

[0013] Air inlet and air outlet are provided on the first electrode plate or the second electrode plate;The first electrode plate and the second electrode plate are connected, and a sealed cavity is formed between the first electrode plate and the second electrode plate, and a discharge gap is formed between the ground electrode and the dielectric body.

[0014] In some embodiments of the application, the first electrode plate includes a first mounting portion and a first connecting portion, the first mounting portion is disc-shaped, the first mounting portion is used for mounting the high-voltage electrode, and the periphery of the first mounting portion is bent and extended to one side to form a first connecting portion;The second electrode plate includes a second mounting portion and a second connecting portion, the second mounting portion is disc-shaped, the second mounting portion is used for mounting the ground electrode, and the periphery of the second mounting portion is bent and extended to one side to form a second connecting portion;The first connecting portion and the second connecting portion are connected, and the sealed cavity is a circular annular cavity.

[0015] In some embodiments of the application, the first connecting portion and the second connecting portion are welded.

[0016] In some embodiments of the present application, the first mounting portion is provided with a first groove for resisting deformation of the first electrode plate during welding; the second mounting portion is provided with a second groove for resisting deformation of the second electrode plate during welding, and the first groove and the second groove are correspondingly arranged.

[0017] In some embodiments of the present application, the first groove and the second groove are both rectangular in cross section.

[0018] In some embodiments of the present application, the first electrode plate, the high-voltage electrode and the dielectric body are concentrically arranged; and the ground electrode and the second electrode plate are concentrically arranged.

[0019] In some embodiments of the present application, the first electrode plate is provided with a first cooling device at one end away from the high-voltage electrode; the second electrode plate is provided with a second cooling device at one end away from the ground electrode; and the first cooling device and the second cooling device are used for cooling heat generated in the discharge gap.

[0020] In some embodiments of the present application, the first cooling device and the second cooling device both include a cooling plate provided with a cooling pipeline.

[0021] In some embodiments of the present application, the area of the cooling plate in the first cooling device is greater than the area of the high-voltage electrode; and the area of the cooling plate in the second cooling device is greater than the area of the ground electrode.

[0022] In another aspect, the utility model also provides an ozone generator, comprising:

[0023] The ozone generation chamber as claimed in any one of the above;

[0024] A gas supply system for providing oxygen to the sealed cavity in the ozone generation chamber;

[0025] A power supply system for supplying power to the high-voltage electrode of the ozone generation chamber to generate ozone through high-voltage discharge of oxygen.

[0026] Compared with the prior art, the utility model has the advantages and positive effects that:

[0027] (1) By prefabricating the high-voltage electrode assembly and the ground electrode assembly, transportation and maintenance are facilitated, and transportation and maintenance costs are reduced; when in use, the high-voltage electrode assembly and the ground electrode assembly are connected together to form the ozone generation chamber, so that the entire ozone generation chamber has a small volume, a compact structure and a high ozone generation efficiency.

[0028] (2) The reduction in the volume of the ozone generation chamber reduces the volume of the ozone generator and improves the space utilization rate. BRIEF DESCRIPTION OF DRAWINGS

[0029] In order to more clearly illustrate the technical solutions of the embodiments of the present application or the prior art, the following will briefly introduce the drawings needed to be used in the embodiments or prior art description. Obviously, the drawings in the following description are some embodiments of the present application, and other drawings can also be obtained by those skilled in the art without any creative effort on the basis of these drawings.

[0030] Figure 1 It is a structural schematic view of an embodiment of the ozone generating chamber of the present application.

[0031] Figure 2 It is a sectional view of Figure 1

[0032] Figure 3 It is a front view of Figure 2

[0033] Figure 4 It is a distribution schematic view of the cooling pipeline in the cooling plate in an embodiment of the ozone generating chamber of the present application.

[0034] Explanation of reference signs:

[0035] 100, first electrode plate; 101, first groove; 102, first mounting portion; 103, first connecting portion;

[0036] 200, second electrode plate; 201, second groove; 202, second mounting portion; 203, second connecting portion;

[0037] 300, high-voltage electrode;

[0038] 400, dielectric body;

[0039] 500, ground electrode;

[0040] 600, discharge gap;

[0041] 700, cooling plate; 701, water inlet; 702, water outlet; 703, cooling pipeline;

[0042] 800, sealed cavity. DETAILED DESCRIPTION

[0043] ​​In order to make the purpose, technical scheme and advantages of the embodiments of the present application clearer, the technical scheme of the embodiments of the present application will be described clearly and completely below in conjunction with the drawings in the embodiments of the present application. Obviously, the described embodiments are some but not all of the embodiments of the present application. Based on the embodiments in the present application, all other embodiments obtained by those of ordinary skill in the art without creative work fall within the scope of protection of the present application.

[0044] It should be noted that, in the description of the present application, the terms indicating the direction or positional relationship of "upper", "lower", "inner", "outer" and the like are based on the direction or positional relationship shown in the drawings, which is merely for the convenience of description, and does not indicate or imply that the device or element must have a specific orientation, be constructed and operated in a specific orientation, and therefore cannot be understood as a limitation on the present application. In addition, the terms "first", "second" are only for the purpose of description, and cannot be understood as indicating or implying relative importance.

[0045] In the present application, unless otherwise explicitly specified and limited, the terms "mounting", "connection" and the like should be understood broadly, for example, it can be fixedly connected, or detachably connected, or integrally connected; it can be mechanically connected, or electrically connected; it can be directly connected, or indirectly connected through an intermediate medium, or it can be the communication between two elements. For those of ordinary skill in the art, the specific meaning of the above terms in the present application can be understood according to the specific circumstances.

[0046] In the present application, unless otherwise explicitly specified and limited, the first feature "on" or "under" the second feature can include that the first and second features are in direct contact, or that the first and second features are not in direct contact but are in contact through another feature between them. Moreover, the first feature "on", "above" and "above" the second feature includes that the first feature is directly above and obliquely above the second feature, or only indicates that the horizontal height of the first feature is higher than that of the second feature. The first feature "under", "below" and "below" the second feature includes that the first feature is directly below and obliquely below the second feature, or only indicates that the horizontal height of the first feature is less than that of the second feature.

[0047] The disclosure below provides many different embodiments or examples for implementing different structures of the present application. For the sake of simplicity, the description below of the specific examples will not be exhaustive of the disclosure. Indeed, the present application can be practiced in a variety of ways. Accordingly, other embodiments and examples of the present application will be suggested to those skilled in the art by this disclosure. For example, even though the present application is described with respect to specific examples, one skilled in the art will recognize that the present application is not limited to these specific examples and that the present application can be practiced with other examples. Further, other applications can be derived from the disclosure of the present application by a variety of means, and the disclosure of the present application will support the application of these other applications. Thus, the disclosure of the present application should be understood as being illustrative only and should not be understood to limit the scope of the present application. Furthermore, the disclosure of the present application should not be understood to limit the scope of the present application to the specific examples disclosed herein. Indeed, the present application can be practiced in a variety of ways.

[0048] As shown in Figures 1 to 4 The present application provides an ozone generation chamber, which has small volume, high ozone generation efficiency, and modular structure for easy maintenance and transportation. The ozone generation chamber comprises a high-voltage electrode assembly and a ground electrode assembly, specifically:

[0049] The high-voltage electrode assembly comprises a first electrode plate 100, a high-voltage electrode 300 and a dielectric body 400 arranged from top to bottom, and the first electrode plate 100, the high-voltage electrode 300 and the dielectric body 400 are bonded by special glue. The area of the high-voltage electrode 300 and the dielectric body 400 is smaller than the area of the first electrode plate 100.

[0050] The ground electrode assembly comprises a ground electrode 500 and a second electrode plate 200 arranged from top to bottom, and the ground electrode 500 and the second electrode plate 200 are bonded by special glue. The area of the ground electrode 500 is smaller than the area of the second electrode plate 200.

[0051] The first electrode plate 100 or the second electrode plate 200 is provided with an air inlet and an air outlet (not shown in the figure), and the air inlet and the air outlet are provided with detachable plugs. The first electrode plate 100 and the second electrode plate 200 are connected and form a sealed cavity 800 between them. The ground electrode 500 and the dielectric body 400 form a uniform discharge gap 600.

[0052] When installed, the first electrode plate 100 and the second electrode plate 200 each have a certain thickness, the first electrode plate 100 and the second electrode plate 200 are symmetrically placed, the periphery of the first electrode plate 100 and the second electrode plate 200 is connected by welding, and the discharge gap 600 is formed between the dielectric body 400 and the ground electrode 500; since the area of the high-voltage electrode 300 and the dielectric body 400 is smaller than the area of the first electrode plate 100, and the area of the ground electrode 500 is smaller than the area of the second electrode plate 200, after the first electrode plate 100 and the second electrode plate 200 are welded, a sealed cavity is formed between the first electrode plate 100, the high-voltage electrode 300, the dielectric body 400, the ground electrode 500, and the second electrode plate 200.

[0053] When used, the plugs at the gas inlet and the gas outlet are removed, the gas inlet is connected with the gas supply system, the gas outlet is connected with the ozone receiving system, the high-voltage electrode 300 is powered, the gas supply system provides oxygen, the oxygen enters the sealed cavity 800 formed by the first electrode plate 100 and the second electrode plate 200 from the gas inlet, and then enters the discharge gap 600, the high-voltage discharge makes the oxygen generate ozone, and the ozone enters the ozone receiving system through the gas outlet, and this process can continuously generate ozone.

[0054] As shown in Figure 2 , Figure 3 , the first electrode plate 100 includes a first mounting portion 102 and a first connecting portion 103, the first mounting portion 102 is disc-shaped, the first mounting portion 102 is used for mounting the high-voltage electrode 300, and the periphery of the first mounting portion 102 is bent and extended to one side to form the first connecting portion 103; the second electrode plate 200 includes a second mounting portion 202 and a second connecting portion 203, the second mounting portion 202 is disc-shaped, the second mounting portion 202 is used for mounting the ground electrode 500, and the periphery of the second mounting portion 202 is bent and extended to one side to form the second connecting portion 203; after the first connecting portion 103 and the second connecting portion 203 are connected, the sealed cavity 800 is a circular annular cavity.

[0055] The first mounting portion 102 and the second mounting portion 202 are disc-shaped, which facilitates welding of the first connecting portion 103 and the second connecting portion 203, after the first connecting portion 103 and the second connecting portion 203 are welded, the circular annular sealed cavity 800 helps to be filled with oxygen when used, and ensures that oxygen uniformly enters the discharge gap 600 from all around, thereby improving the concentration and efficiency of generated ozone.

[0056] The first connecting portion 103 and the second connecting portion 203 are connected by welding, compared with the traditional bolt connection mode, under the condition that the area of the discharge gap 600 is the same, the entire generating chamber has a smaller volume, the structure is more compact, the sealing is more reliable, and sealing gaskets are not needed, which can reduce the introduction of external pollution and is more conducive to ensuring the purity of generated ozone.

[0057] The first mounting portion 102 is provided with a first groove 101, and the second mounting portion 202 is provided with a second groove 201, and the first groove 101 and the second groove 201 are correspondingly arranged. The first groove 101 and the second groove 201 are used to resist the thermal deformation of the first electrode plate 100 and the second electrode plate 200 when the first connecting portion 103 and the second connecting portion 203 are welded, so as to ensure the flatness requirement of the contact part of the first mounting portion 102 and the high-voltage electrode 300 and the contact part of the second mounting portion 202 and the ground electrode 500, thereby ensuring the uniform consistency of the discharge gap 600, and also being beneficial to the improvement of the ozone concentration.

[0058] The cross section of the first groove 101 and the second groove 201 is rectangular, and the rectangular groove is convenient for processing and reduces the manufacturing difficulty.

[0059] The first electrode plate 100, the high-voltage electrode 300 and the dielectric body 400 are concentrically arranged; and the ground electrode 500 and the second electrode plate 200 are concentrically arranged, and the concentric arrangement is convenient for assembling and welding the high-voltage discharge assembly and the ground electrode assembly, thereby improving the installation efficiency.

[0060] The first electrode plate 100 is provided with a first cooling device at one end away from the high-voltage electrode 300, and the second electrode plate 200 is provided with a second cooling device at one end away from the ground electrode 500; the first cooling device and the second cooling device are used to cool the heat generated in the discharge gap 600, so as to achieve better heat dissipation effect and improve the efficiency of generating ozone.

[0061] As shown in Figure 4 The first cooling device and the second cooling device each include a cooling plate 700, and the cooling plate 700 is provided with a cooling pipeline 703, and the arrangement form of the cooling pipeline 703 in the cooling plate 700 can refer to the patent “CN201811277627.6 An ozone generating device”. The area of the cooling plate 700 in the first cooling device is greater than the area of the high-voltage electrode 300, so that the cooling plate 700 can completely cover the discharge gap 600, and the heat generated in the discharge gap 600 can be fully taken away, thereby being beneficial to improving the generation efficiency and concentration of ozone.

[0062] In use, the water inlet 701 formed in the cooling plate 700 is connected with a cold water source, the cold water flows into the cooling plate 700 through the water inlet 701, and flows out through the water outlet 702 formed in the cooling plate 700, and the continuous flow of the cold water can take away the heat, thereby achieving the heat dissipation purpose.

[0063] In another aspect, the application also provides an ozone generating chamber, comprising:

[0064] The ozone generating chamber as described above;

[0065] A gas supply system for supplying oxygen to the sealed cavity 800 in the ozone generating chamber, the oxygen entering the sealed cavity 800 as a raw material for ozone generation;

[0066] A power supply system for supplying power to the high-voltage electrode 300 of the ozone generating chamber to generate ozone through high-voltage discharge of the oxygen.

[0067] In the description of the present specification, the description referring to the terms "some embodiments", "examples", "specific examples", or "some examples" and the like means that the specific features, structures, materials or characteristics described in connection with the embodiments or examples are included in at least one embodiment or example of the present application. In the present specification, the illustrative description of the above terms does not necessarily refer to the same embodiment or example. Moreover, the specific features, structures, materials or characteristics described can be combined in any one or more embodiments or examples in a suitable manner.

[0068] The above embodiments are only used to illustrate the technical solutions of the present application, and not to limit them; although the present application has been described in detail with reference to the foregoing embodiments, for those skilled in the art, the technical solutions recorded in the foregoing embodiments can still be modified, or some technical features therein can be replaced by equivalents; and these modifications or replacements do not make the corresponding technical solutions deviate from the spirit and scope of the technical solutions claimed by the present application.

[0069] As far as possible, the various aspects and features described and illustrated in the specification can be applied individually, and these individual aspects can be the subject of a divisional application.

Claims

1. An ozone generation chamber characterized by, The ozone generation chamber comprises: a high-voltage electrode assembly comprising a first electrode plate, a high-voltage electrode and a dielectric body connected in sequence, the area of the high-voltage electrode and the area of the dielectric body are both smaller than the area of the first electrode plate; a ground electrode assembly comprising a ground electrode and a second electrode plate arranged in sequence, the area of the ground electrode is smaller than the area of the second electrode plate; an air inlet and an air outlet are arranged on the first electrode plate or the second electrode plate; the first electrode plate and the second electrode plate are connected and a sealed cavity is formed between the first electrode plate and the second electrode plate, and a discharge gap is formed between the ground electrode and the dielectric body.

2. The ozone generation chamber of claim 1, wherein The first electrode plate comprises a first mounting portion and a first connecting portion, the first mounting portion is disc-shaped, the first mounting portion is used for mounting the high-voltage electrode, and the periphery of the first mounting portion is bent and extended to one side to form the first connecting portion; the second electrode plate comprises a second mounting portion and a second connecting portion, the second mounting portion is disc-shaped, the second mounting portion is used for mounting the ground electrode, and the periphery of the second mounting portion is bent and extended to one side to form the second connecting portion; the first connecting portion and the second connecting portion are connected, and the sealed cavity is a circular annular cavity.

3. The ozone generation chamber of claim 2, wherein, The first connecting portion and the second connecting portion are welded.

4. The ozone generation chamber of claim 3, wherein A first recess is arranged on the first mounting portion, the first recess is used for resisting deformation of the first electrode plate during welding; a second recess is arranged on the second mounting portion, the second recess is used for resisting deformation of the second electrode plate during welding, and the first recess and the second recess are arranged correspondingly.

5. The ozone generation chamber of claim 4, wherein, The cross section of the first recess and the cross section of the second recess are both rectangular.

6. The ozone generation chamber of claim 2, wherein, The first electrode plate, the high-voltage electrode and the dielectric body are concentrically arranged; the ground electrode and the second electrode plate are concentrically arranged.

7. The ozone generation chamber according to any one of claims 1 to 6, characterized in that A first cooling device is arranged at one end of the first electrode plate away from the high-voltage electrode; a second cooling device is arranged at one end of the second electrode plate away from the ground electrode; the first cooling device and the second cooling device are used for cooling heat generated in the discharge gap.

8. The ozone generation chamber of claim 7, wherein, The first cooling device and the second cooling device both comprise a cooling plate, and the cooling plate is provided with a cooling pipeline.

9. The ozone generation chamber of claim 8, wherein, The area of the cooling plate in the first cooling device is greater than the area of the high-voltage electrode; the area of the cooling plate in the second cooling device is greater than the area of the ground electrode.

10. An ozone generator characterized by, The ozone generation chamber comprises: The ozone generation chamber of any one of claims 1-9; a gas supply system for supplying oxygen to the sealed cavity in the ozone generation chamber; a power supply system for supplying power to the high-voltage electrode of the ozone generation chamber to generate ozone through high-voltage discharge of oxygen.

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