Coating jig and coating equipment

Abstract

The utility model provides a coating jig and coating equipment. The coating jig comprises a mask plate assembly and a magnet plate assembly. The mask plate assembly comprises an annular bottom plate, a mask plate covering the upper side of the bottom plate, and a pressing plate; pattern openings arranged in an array mode are formed in the middle of the mask plate, and a first connecting hole and a second connecting hole are formed in the edges of the two sides in the first direction respectively; the bottom plate is provided with bosses which are connected with the first connecting hole and the second connecting hole in an inserted mode respectively, the inner diameter of the first connecting hole is consistent with the outer diameter of the corresponding boss, the second connecting hole is a long kidney-shaped hole extending in the first direction, and the width of the long kidney-shaped hole is consistent with the outer diameter of the corresponding boss; the pressing plate surrounds the mask plate and is arranged on the upper side of the bottom plate, a substrate containing groove is formed in the middle area, and the mask plate serves as the bottom of the substrate containing groove. The magnet plate assembly covers an upper opening of the substrate placing groove and is detachably and fixedly connected with the mask plate assembly. The mask plate and the substrate can be fully attached, and the film coating quality is improved.

Description

TECHNICAL FIELD

[0001] The present application relates to the field of semiconductor manufacturing, and in particular to a coating jig and a coating device. BACKGROUND

[0002] In the process of semiconductor manufacturing, a series of processes need to be performed on a substrate, many of which will apply a thin film or coating on the substrate. For example, in the process of manufacturing an OLED panel, a thin film of organic material needs to be deposited on the surface of a glass substrate; for another example, in the process of manufacturing a chip, a coating needs to be made on the surface of a wafer.

[0003] In all these coating processes for making a thin film or coating, a mask plate is usually used to obtain a thin film or coating with a specific pattern. During processing, the substrate to be coated must be fixed together with the mask plate in the coating device, and the mask plate must have a small amount of sag to ensure that the mask plate and the substrate are fully attached.

[0004] In the past, in order to reduce the sag of the mask plate and make the mask plate as fully attached to the substrate as possible, the mask plate needs to be stretched tightly by a stretching net and then welded to the mask frame. However, the stretching net process requires the use of a stretching net device to perform a complex stretching net process, which not only has high production cost but also has low production efficiency. However, the problem of poor attachment of the mask plate to the substrate due to sag cannot be well solved, especially when the mask plate is used, the sag of the mask plate may increase or local undulating deformation may occur due to temperature rise.

[0005] In view of the actual need for good attachment of the mask plate to the substrate in the prior art, a new solution is urgently needed. SUMMARY

[0006] In order to solve or improve the above technical problems existing in the prior art, the present application provides a coating jig and a coating device, which can be at least applied in the process of manufacturing an OLED panel or a chip. The coating jig is used to apply a thin film or coating on a substrate, which can make the mask plate fully attached to the substrate, thereby improving the processing precision of the thin film or coating.

[0007] A first aspect of the present application provides a coating jig, the coating jig comprising a mask plate assembly and a magnet plate assembly;

[0008] The mask plate assembly comprises a bottom plate in the shape of a ring, a mask plate covering the upper side of the bottom plate, and a pressing plate;

[0009] The mask plate has pattern openings arranged in an array in the middle, and first and second connecting holes are respectively arranged on the two side edges in the first direction of the mask plate;

[0010] The bottom plate is provided with a boss which is inserted into the first connecting hole and the second connecting hole respectively,

[0011] The inner diameter of the first connecting hole is consistent with the outer diameter of the corresponding boss,

[0012] The second connecting hole is an oblong hole extending along the first direction, and the width of the oblong hole is consistent with the outer diameter of the corresponding boss;

[0013] The pressing plate is arranged on the upper side of the bottom plate around the mask plate, and the middle part forms a substrate placing groove, and the mask plate serves as the bottom of the substrate placing groove;

[0014] The magnet plate assembly covers the upper opening of the substrate placing groove, and is detachably fixedly connected with the mask plate assembly.

[0015] In the foregoing technical solution, when the substrate is placed in the substrate placing groove, the mask plate directly supports the substrate, at this time, the magnet plate assembly arranged on the upper side of the substrate applies a magnetic force to the mask plate, which can make the mask plate recover from the sagging state to the flat state and fully adhere to the substrate.

[0016] Furthermore, the mask plate is connected with the bottom plate by the first connecting hole, the second connecting hole and the boss, and when the mask plate is installed, only the corresponding connecting hole needs to be sleeved on the corresponding boss, without the need of screen stretching and welding. Therefore, the complex process of screen stretching is omitted, and the manufacturing efficiency of the mask plate assembly is significantly improved.

[0017] The connecting hole of the mask plate and the boss of the bottom plate are also designed in a matching manner, so that the mask plate can extend outward with the first connecting hole as the fixed point. In the process of reducing the sagging and recovering to the flat state under the attraction of the magnet plate, the stress generated in the mesh surface of the mask plate can be eliminated by extending to the first direction and the two sides of the extending direction, so that the mask plate is more flatly adhered to the substrate.

[0018] In addition, in the first direction, the first connecting hole is tightly matched with the corresponding boss, and the second connecting hole is tightly matched with the corresponding boss in the width direction, which can realize the purpose of positioning the assembly position of the mask plate, and when the mask plate is deformed, it will not deviate from the first direction before deformation, so it has high alignment accuracy.

[0019] Further, the pattern openings arranged in an array are configured as:

[0020] The pattern openings are arranged in multiple rows along the second direction and in multiple columns along a third direction perpendicular to the second direction; and

[0021] The pattern openings are circular,

[0022] Or the pattern opening is rectangular, two groups of opposite sides of the rectangle are parallel to the second direction and the third direction respectively, and one diagonal of the rectangle is parallel to the first direction.

[0023] In the foregoing technical solution, if the mask plate expands and deforms due to temperature rise, the deformation degree of the long side and the short side of the rectangular mask opening is equivalent, so that the distortion of the rectangular shape of the pattern opening can be reduced or avoided.

[0024] Optionally, the mask plate has a plurality of adjacent first connecting holes, and the bottom plate is provided with a plurality of bosses respectively inserted into the plurality of adjacent first connecting holes;

[0025] Or, the mask plate has a plurality of adjacent second connecting holes, and the bottom plate is provided with a plurality of bosses respectively inserted into the plurality of adjacent second connecting holes;

[0026] Or, the mask plate has a plurality of adjacent first connecting holes and a plurality of adjacent second connecting holes, and the bottom plate is provided with a plurality of bosses respectively inserted into the plurality of adjacent first connecting holes and the plurality of adjacent second connecting holes.

[0027] It should be understood that when the bosses and the connecting holes are processed, there will inevitably be a certain degree of processing error, which will cause the bosses and the connecting holes to be not accurately matched. The foregoing technical solution can reduce the deviation of the mask plate from the predetermined position caused by the inaccurate matching of the bosses and the connecting holes, that is, the position deviation of the mask plate during installation can be reduced or eliminated, and the positioning accuracy of the mask plate on the bottom plate can be improved.

[0028] Further, the edge of the mask plate is further provided with a plurality of third connecting holes, and the third connecting holes are distributed at positions on the mask plate different from the first connecting holes and the second connecting holes;

[0029] The bottom plate is provided with a boss inserted into the third connecting hole, and the outer diameter of the boss is smaller than the inner diameter of the third connecting hole.

[0030] In the foregoing technical solution, by providing the third connecting hole and the corresponding boss, the corresponding edge of the mask plate will not be separated from the bottom plate when subjected to external force. Moreover, since the third connecting hole and the corresponding boss are in clearance fit, the corresponding edge of the mask plate having the third connecting hole can freely contract inward or freely expand outward to a certain extent, so that when the mask plate deforms due to temperature change or due to attraction of the magnet plate assembly, it can freely expand outward, avoiding the mask plate from being locally deformed due to stress not being released, so that the mask plate is more flatly attached to the substrate.

[0031] Further, the pressing plate covers the upper end of the boss to limit the mask plate from the upper end of the boss, so that the mask plate cannot easily separate from the boss on the bottom plate.

[0032] Further, the pressing plate is an annular whole, or has multiple pressing plates surrounding an annular area. When having multiple pressing plates, the multiple pressing plates can be connected head to tail to form an annular, or can be distributed in a ring shape with the head and tail not connected.

[0033] Further, the bottom plate is provided with a mask clamping groove, and the boss is arranged in the mask clamping groove.

[0034] The edge of the mask plate is accommodated in the mask clamping groove.

[0035] In the foregoing technical solution, by arranging the mask clamping groove, on the one hand, the mask plate can be given space, so that the pressing plate cannot press the mask plate tightly, and the mask plate can be freely stretched outwards and contracted inwards to a certain extent; on the other hand, after the edge of the mask plate is accommodated in the mask clamping groove, no gap is generated between the edge of the mask plate and the inner side wall (i.e. the inner side wall of the pressing plate) of the mask clamping groove, which can avoid the leakage of materials from the gap during plating, and can also avoid unacceptable deformation of the mask plate caused by the mask plate being blocked by the inner side wall of the mask clamping groove when the mask plate is stretched outwards.

[0036] Further, a plurality of connecting grooves are arranged in the mask clamping groove, and the boss is arranged in each connecting groove.

[0037] The outer edge of the mask plate extends outwards to form a plurality of connecting portions, the plurality of connecting portions are respectively accommodated in the corresponding connecting grooves, and are connected with the corresponding bosses. It should be understood that the connecting portions are connected with the corresponding bosses through the connecting holes arranged thereon, and the connecting holes include first connecting holes, second connecting holes and third connecting holes.

[0038] In the foregoing technical solution, by connecting the extended connecting portions with the bosses, the influence of the connection on the internal stress of the mask plate net surface can be reduced, and the possibility of unacceptable deformation of the mask plate can be reduced.

[0039] Further, the plating jig further comprises a plurality of adjusting assemblies, and the adjusting assemblies are arranged around the substrate placing groove.

[0040] The adjusting assembly comprises a base, a top block, a first connecting screw, a first spring and an adjusting knob.

[0041] The base is connected with the pressing plate or the bottom plate, and the bottom of the base is provided with a top block groove which penetrates at least to one side surface of the base, and the one side surface faces the substrate placing groove.

[0042] The top block is at least partially accommodated in the top block groove, and has an inclined surface at an end thereof away from the substrate placing groove and a first counterbore at an end thereof towards the substrate placing groove, the first counterbore extending to the inclined surface;

[0043] The first connecting screw is arranged in the first counterbore and extends to connect with an inner wall of a side of the top block groove away from the substrate placing groove;

[0044] The first spring is arranged in the first counterbore and is sleeved on a middle portion of the first connecting screw;

[0045] The top portion of the base is provided with a threaded hole extending to the top block groove, and an adjusting knob is arranged in the threaded hole, a lower end of the adjusting knob extending to abut against the inclined surface.

[0046] In the foregoing technical solution, the adjusting assembly is arranged to adjust the position of the substrate in the substrate placing groove, so as to avoid the substrate from being deviated in the substrate placing groove and improve the alignment accuracy of the substrate and the mask plate.

[0047] Further, the film coating jig further comprises a plurality of lock catch assemblies, the lock catch assemblies being arranged around the substrate placing groove;

[0048] The lock catch assembly comprises a pressing piece, a second connecting screw and a second spring;

[0049] The pressing piece is provided with a second counterbore extending through two end surfaces of the pressing piece, and a buckle body is arranged at a middle portion of the pressing piece, the buckle body extending outward along a radial direction of the second counterbore;

[0050] The second connecting screw is arranged in the second counterbore and extends to connect with a surface of the pressing plate or the bottom plate;

[0051] The second spring is arranged in the second counterbore and is sleeved on a middle portion of the second connecting screw;

[0052] The buckle body is pressed against an edge of the magnet plate assembly.

[0053] In the foregoing technical solution, the lock catch assembly is arranged to realize quick assembly of the mask plate assembly and the magnet plate assembly, so as to greatly improve the convenience of disassembling the substrate and significantly improve the production efficiency.

[0054] Further, the magnet plate assembly comprises a back plate, a plurality of magnets and a cover plate, wherein:

[0055] A cover plate groove is arranged on a side surface of the back plate away from the substrate placing groove, and a plurality of sink grooves are arranged at a bottom of the cover plate groove;

[0056] The plurality of magnets are arranged one by one in the plurality of sink grooves;

[0057] The cover plate covers and is fixed in the cover plate groove.

[0058] In the foregoing technical solution, the structure of the magnet plate assembly is designed, so that the assembly difficulty of the magnet plate assembly itself is reduced, and the production and processing are more convenient.

[0059] Further, the side surface of the back plate facing the substrate placing groove is provided with a plurality of convex parts arranged in an array. By arranging the convex parts in an array to contact the substrate, on the one hand, uniform support can be provided to the surface of the substrate; on the other hand, when the substrate is attached to the back plate, the gas between the two can be discharged in time, avoiding poor attachment between the two at local positions due to the failure of timely discharge of local gas, not only improving the quality of the film, but also reducing the possibility of damage to the substrate; in addition, by arranging the convex parts, the heat flow can be more evenly distributed on the substrate during film plating, which helps to reduce defects caused by excessive local temperature of the substrate.

[0060] Further, the mask plate has a plurality of mutually parallel longitudinal ribs and a plurality of mutually parallel transverse ribs.

[0061] The plurality of magnets are respectively orthogonally projected at the intersection of the longitudinal ribs and the transverse ribs.

[0062] In the foregoing technical solution, the magnetic force of the magnet acts on the intersection of the longitudinal and transverse ribs of the mask plate, effectively avoiding the pattern opening of the mask plate, so that the mask plate can be more uniformly attached to the surface of the substrate under the action of the magnet.

[0063] Further, the film plating jig further comprises a plurality of adjusting assemblies and a plurality of locking assemblies, the plurality of adjusting assemblies and the plurality of locking assemblies are distributed on the mask plate assembly, and the back plate has a plurality of first notches for the locking assemblies and a plurality of second notches for the adjusting assemblies. In the case of installing a plurality of adjusting assemblies and a plurality of locking assemblies, the adjusting assemblies and the locking assemblies can be prevented from interfering with the magnet plate assembly, so that the magnet plate assembly can be more smoothly assembled with the mask plate assembly.

[0064] Optionally, the adjusting assemblies are non-uniformly distributed around the mask plate assembly, or the locking assemblies are non-uniformly distributed around the mask plate assembly. The purpose of this design is to assemble the magnet plate assembly with the mask plate assembly in a unique matching manner, so that the magnetic magnets in the magnet plate assembly and the mask plate are aligned in a predetermined manner, ensuring that the magnet can provide uniform and effective adsorption to the mask plate.

[0065] Further, the back plate is provided with a buckle body clamping groove at the first notch. Rotating the pressing piece in the locking assembly to buckle the buckle body into the buckle body clamping groove can prevent unnecessary rotation of the pressing piece on the magnet plate assembly, thereby preventing the magnet plate assembly from being separated from the locking assembly.

[0066] Further, the magnet plate assembly further comprises a mounting seat and at least one handle. The mounting seat is used for connecting with a connecting part in a coating equipment; the handle is used for conveniently being gripped by an operator, so as to conveniently assemble the evaporation jig or the magnet plate assembly in the evaporation jig into the coating equipment.

[0067] The second aspect of the present application provides a coating equipment, wherein the coating jig described in the first aspect of the present application is arranged.

[0068] Using the coating equipment in the present application, the substrate can be quickly assembled and disassembled without a screen and welding, and the substrate and the mask plate can be uniformly attached and accurately aligned, so that the production efficiency and the product quality can be improved to a certain extent.

[0069] In addition, other additional aspects and advantages of the present application will be partially given in the following description, partially will become obvious from the following description, or will be understood by the practice of the present application. BRIEF DESCRIPTION OF DRAWINGS

[0070] Figure 1 is a structure schematic diagram of the coating jig in the embodiment of the present application;

[0071] Figure 2 is a schematic diagram of the coating jig in the embodiment of the present application in an open state, and the substrate contained therein is shown in the figure;

[0072] Figure 3 is a schematic diagram of the change of the sag state of the mask plate before and after being attracted by the magnetic force of the magnet plate assembly in the embodiment of the present application;

[0073] Figure 4 is an exploded view showing the structure of the mask plate assembly in the embodiment of the present application, and the adjusting assembly and the locking assembly mounted on the mask plate assembly are also shown in the figure;

[0074] Figure 5 is a structure schematic diagram of the bottom plate and the mask plate assembled therein in the embodiment of the present application;

[0075] Figure 6 is a structure schematic diagram of the adjusting assembly in the embodiment of the present application;

[0076] Figure 7 is a schematic diagram for showing that the substrate contained in the substrate placing groove is changed from a state of being deviated to a state of being aligned after being adjusted in the embodiment of the present application;

[0077] Figure 8 is a local structure schematic diagram of the coating jig at the position of the adjusting assembly in the embodiment of the present application;

[0078] Figure 9 is a sectional view along Figure 8 line A-A in figure 1.

[0079] Figure 10 is a sectional view along Figure 8

[0080] Figure 11 is a structural schematic diagram of a magnet plate assembly in the embodiment of the present application;

[0081] Figure 12 is a structural schematic diagram of a lock catch assembly in the embodiment of the present application;

[0082] Figure 13 is a partial structural schematic diagram of a coating jig at the position of the lock catch assembly in the embodiment of the present application;

[0083] Figure 14 is a sectional view along Figure 13

[0084] Figure 15 is a schematic diagram for indicating the corresponding position of a mask plate and a magnet in the embodiment;

[0085] The annotations in the figure are:

[0086] 1: mask plate assembly; 11: bottom plate; 111: mask slot; 112: connecting slot; 113: boss; 12: mask plate; 121: pattern opening; 122: first connecting part; 123: second connecting part; 124: third connecting part; 125: first connecting hole; 126: second connecting hole; 127: third connecting hole; 128: longitudinal rib; 129: transverse rib; 13: pressing plate; 14: fastening screw;

[0087] 100: substrate placing slot;

[0088] 2: magnet plate assembly; 21: back plate; 211: cover plate slot; 212: sink; 213: first notch; 214: catch body slot; 215: second notch; 216: convex part; 22: magnet; 23: cover plate; 24: handle; 25: mounting seat;

[0089] 3: adjusting assembly; 31: base; 311: top block slot; 312: threaded hole; 32: top block; 321: clearance notch; 322: inclined surface; 323: first counterbore; 33: first connecting screw; 34: first spring; 35: adjusting knob;

[0090] 4: lock catch assembly; 41: pressing piece; 411: second counterbore; 412: catch body; 42: second connecting screw; 43: second spring;

[0091] 5: substrate. DETAILED DESCRIPTION

[0092] ​​The present application will now be described more fully hereinafter with reference to the accompanying drawings, in which exemplary embodiments of the application are shown. The application may, however, be embodied in many different forms and should not be construed as limited to the embodiments set forth herein. Rather, these embodiments are provided so that this disclosure will be thorough and complete, and fully convey the scope of the application to those skilled in the art. One skilled in the art with access to the teachings provided herein will recognize additional embodiments, modifications, and manifestations of this application and are therefore not limited by this detailed description.

[0093] It should be noted that, in the present disclosure, when terms with directional indications, such as "upper", "top", "lower", "bottom", etc., are used, such terms are used only to explain the relative positional relationship between elements or structures in a certain attitude (as shown in the drawings), and if the certain attitude changes, the directional indications will change accordingly. However, when an element is said to be "provided with" another element, have a structure, or an element is said to be "on" another element, the term "on" does not necessarily have a directional indication, and can only be used to indicate that there is a connection (direct connection, or there can be intervening elements) between the two elements, or to indicate that the structure belongs to the element.

[0094] When terms such as "first", "second", etc. are used, although the terms "first", "second", etc. can be used herein to describe various types of elements, these elements should not be limited by these terms. These terms are used to distinguish one element from another. Therefore, the first element discussed below can be referred to as a second element without departing from the teachings of the present disclosure.

[0095] When the expression that an element has "one end" and "the other end" is used, the terms "one end" and "the other end" therein can mean two ends of an element in its length direction, such as a long strip, a rod, etc., or can be used only to distinguish two different parts on the element, and should not be limitedly understood as the element must have a similar shape such as a long strip, a rod, etc.

[0096] When terms such as "first direction", "second direction", "third direction", etc. are used, such terms do not indicate a single direction, but include two opposite directions. For example, referring to FIG. 1, the first direction includes not only the direction indicated by the arrow in the figure, but also the opposite direction of the direction indicated by the arrow. Figure 5 In addition, in line with the "first direction", it should be understood as the same as or parallel to the "first direction".

[0097] When terms such as "annular", "surrounding", etc. are used, the "ring" referred to is not limited to a circular ring, but can also be a rectangular ring, etc.

[0098] In this application, "long hole" can refer to a long hole that is distinct from a round hole and a regular polygonal hole, and the length of the hole is significantly greater than its width.

[0099] In this application, "pattern opening" can refer to a single through opening or a patterned area containing several through openings. Correspondingly, "mask" in this application can represent various types of masks. For example, when the "mask" is a general-purpose mask (CMM) used to fabricate a common layer on an OLED display panel, "pattern opening" represents a single through opening. As another example, when the "mask" is a precision mask (FMM) used to fabricate pixels on an OLED display panel, "pattern opening" represents a patterned area containing several pixel openings. Meanwhile, "vertical rib" and "lateral rib" represent the portions between adjacent patterned areas, not the portions between adjacent pixels.

[0100] Furthermore, the technical solutions of the various embodiments of this application can be combined with each other, but only if they are based on the ability of a person skilled in the art to implement them. When the combination of technical solutions is contradictory or cannot be implemented, it should be considered that such combination of technical solutions does not exist and is not within the scope of protection claimed by this application.

[0101] Unless otherwise specified, the same reference numerals are used throughout this document to denote the same objects.

[0102] In view of the aforementioned state of the prior art and considering its various shortcomings, and not wishing to be bound by any theory, this application provides an embodiment of a coating fixture in its first aspect. This coating fixture can be applied at least to depositing functional films on the surface of a substrate in a chemical vapor deposition process. The substrate referred to includes, but is not limited to, glass substrates used to fabricate OLED display panels, and wafers used to fabricate chips, etc.

[0103] See appendix Figure 1 As shown, the coating fixture provided in this application includes a mask assembly 1 and a magnet assembly 2, wherein:

[0104] See appendix Figure 1 Appendix Figure 2 Appendix Figure 4 and attached Figure 5 As shown. The mask assembly 1 includes a base plate 11, a mask 12 and a pressure plate 13. The base plate 11 is annular, the mask 12 covers the upper side of the base plate 11, including covering the annular area surrounded by the base plate 11, and the pressure plate 13 is also disposed on the upper side of the base plate 11.

[0105] The mask plate 12 has pattern openings 121 arranged in an array in the middle part of the mask plate 12, and first and second connecting holes 125 and 126 are arranged at the two side edges of the mask plate 12 in the first direction, and the base plate 11 is provided with bosses 113 which are respectively inserted into the first and second connecting holes 125 and 126. The inner diameter of the first connecting hole 125 is consistent with the outer diameter of the corresponding boss 113, so that the boss 113 is tightly fitted with the first connecting hole 125; the second connecting hole 126 is an oblong hole extending along the first direction, and the width of the oblong hole is consistent with the outer diameter of the corresponding boss 113, that is, the length of the oblong hole is greater than the outer diameter of the corresponding boss 113, that is, the second connecting hole 126 is tightly fitted with the corresponding boss 113 in the width direction, and there is a large gap between the second connecting hole 126 and the corresponding boss 113 in the length direction (i.e. the first direction), so as to allow relative movement between the second connecting hole 126 and the corresponding boss 113.

[0106] The pressing plate 13 is arranged on the upper side of the base plate 11 around the mask plate 12, and the middle part surrounded by the pressing plate 13 forms a substrate placing groove 100, and the mask plate 12 serves as the bottom of the substrate placing groove 100. Preferably, the pressing plate 13 is detachably connected with the base plate 11, for example, as shown in FIG. 2, the pressing plate 13 is connected with the base plate 11 by a plurality of fastening screws 14. Figure 4

[0107] The magnet plate assembly 2 covers the upper opening of the substrate placing groove 100, and the magnet plate assembly 2 is detachably fixedly connected with the mask plate assembly 1, for example, the magnet plate assembly 2 is connected with the mask plate assembly 1 by screws, or by buckling members, etc.

[0108] As shown in FIG. 3, when loading the substrate 5, first, the magnet plate assembly 2 and the mask plate assembly 1 are disassembled to expose the substrate placing groove 100 in the mask plate assembly 1, then the substrate 5 is horizontally placed in the substrate placing groove 100, and the distance between the substrate 5 and the inner side wall of the substrate placing groove 100 is as uniform as possible, and then the magnet plate assembly 2 and the mask plate assembly 1 are reassembled together. Figure 2

[0109] The substrate 5 placed in the substrate placing groove 100 is directly supported by the mask plate 12, at this time, the magnet plate assembly 2 arranged on the upper side of the substrate 5 applies magnetic force to the mask plate 12 from the upper side of the substrate 5 to attract the mask plate 12, so that the mask plate 12 is restored from the sagging state to the flat state and is attached to the surface of the substrate 5, as shown in FIG. 4. Figure 3 Therefore, the mask plate 12 can be fully attached to the surface of the substrate 5, and when a film or a coating is applied to the surface of the substrate 5, the quality of the product is higher.

[0110] As shown in FIG. 5, when the substrate 5 is unloaded, first, the magnet plate assembly 2 and the mask plate assembly 1 are disassembled to expose the substrate placing groove 100 in the mask plate assembly 1, then the substrate 5 is horizontally placed in the substrate placing groove 100, and the distance between the substrate 5 and the inner side wall of the substrate placing groove 100 is as uniform as possible, and then the magnet plate assembly 2 and the mask plate assembly 1 are reassembled together. Figure 4 and FIG. 6, when the substrate 5 is unloaded, first, the magnet plate assembly 2 and the mask plate assembly 1 are disassembled to expose the substrate placing groove 100 in the mask plate assembly 1, then the substrate 5 is horizontally placed in the substrate placing groove 100, and the distance between the substrate 5 and the inner side wall of the substrate placing groove 100 is as uniform as possible, and then the magnet plate assembly 2 and the mask plate assembly 1 are reassembled together.​​Figure 5 As shown, in the mask assembly 1, the mask 12 is connected to the corresponding boss 113 via the first connecting hole 125 and the second connecting hole 126, thereby connecting the mask 12 to the base plate 11. When installing the mask 12, it is only necessary to fit the corresponding connecting hole onto the corresponding boss 113; there is no need for mesh stretching and welding of the mask 12. Therefore, the complex mesh stretching process is eliminated, and the manufacturing efficiency of the mask assembly 1 is significantly improved.

[0111] By designing the engagement method of the first and second connecting holes and the boss 113, when the mask plate 12 is reduced in drooping due to the attraction of the magnet plate assembly 2, or when it expands or contracts due to temperature changes, the mask plate 12 can freely extend and retract outward in the first direction, and can also freely extend and retract to both sides of the extension direction. Therefore, it avoids the mask plate 12 from undulating and deforming due to the failure to release local stress, and ensures that the mask plate 12 can be more flatly attached to the substrate 5.

[0112] See appendix Figure 5 As shown, in the first direction, the first connecting hole 125 and the corresponding boss 113 are tightly fitted together, and the second connecting hole 126 is tightly fitted together with the corresponding boss 113 in its width direction. This can achieve the purpose of positioning the mask plate 12 on the base plate 11. Furthermore, when the mask plate 12 extends or retracts, the position of the first connecting hole 125 of the mask plate 12 on the base plate 11 remains basically unchanged, and the mask plate 12 does not deviate from the first direction before deformation. Therefore, it has high alignment accuracy.

[0113] In one embodiment, see Appendix Figure 5 As shown, the patterned openings 121 arranged in an array on the mask 12 are configured such that the patterned openings 121 are arranged in multiple rows along the second direction and in multiple columns along a third direction perpendicular to the second direction. Furthermore, the patterned openings 113 are rectangular, with two sets of opposite sides of the rectangle parallel to the second direction and the third direction, respectively, and one diagonal of the rectangle aligning with the first direction.

[0114] In the above embodiments, when the mask plate 12 expands and deforms due to temperature rise, the long side and short side of the rectangular mask opening 121 experience similar degrees of deformation, which can reduce or avoid distortion of the rectangular shape of the pattern opening 121. Therefore, when a thin film or coating is applied to the surface of the substrate 5 on the mask plate 12, the accuracy of the formed thin film pattern or coating pattern is higher.

[0115] In another embodiment, the pattern openings on the mask plate can also be circular. In this case, the pattern openings arranged in an array are arranged in multiple rows along a second direction and in multiple columns along a third direction perpendicular to the second direction. Since the width of the circular pattern openings is uniform in each radial direction, the pattern openings are less likely to be distorted when the mask plate is expanded naturally due to thermal expansion.

[0116] It should be understood that, in the foregoing embodiments, the inner diameter of the first connecting hole 125 is set to be consistent with the outer diameter of the corresponding boss 113, and the width of the second connecting hole 126 is set to be consistent with the outer diameter of the corresponding boss 113, which are the results of ideal cases that the inventors want to achieve. However, in actual production, errors are inevitably generated when the bosses 113 and the first and second connecting holes are machined. Therefore, within the allowable error range, even if the inner diameter of the first connecting hole 125 and the width of the second connecting hole 126 are not consistent with the outer diameter of the corresponding boss 113, they should be considered as being covered by the protection scope of the present application.

[0117] Preferably, in an embodiment of the present application, the single-side fitting clearance of the first connecting hole 125 and the corresponding boss 113, and the single-side fitting clearance of the second connecting hole 126 in the width direction and the corresponding boss 113 are each less than or equal to 0.015 mm.

[0118] To reduce or eliminate the adverse effects caused by the machining errors of the connecting holes and the bosses 113, in an embodiment of the present application, as shown in FIG. 2, the mask plate 12 has a plurality of adjacent first connecting holes 125 and a plurality of adjacent second connecting holes 126, and the pressing plate 13 is provided with a plurality of bosses 113 respectively inserted into the plurality of adjacent first connecting holes 125 and the plurality of adjacent second connecting holes 126. Figure 5 As another optional embodiment, the mask plate 12 has a plurality of adjacent first connecting holes 125, and the bottom plate 11 is provided with a plurality of bosses 113 respectively inserted into the plurality of adjacent first connecting holes 125.

[0119] As yet another optional embodiment, the mask plate 12 has a plurality of adjacent second connecting holes 126, and the bottom plate 11 is provided with a plurality of bosses 113 respectively inserted into the plurality of adjacent second connecting holes 126.

[0120] As yet another optional embodiment, the mask plate 12 has a plurality of adjacent second connecting holes 126, and the bottom plate 11 is provided with a plurality of bosses 113 respectively inserted into the plurality of adjacent second connecting holes 126.

[0121] In the above embodiments, by setting the plurality of first connecting holes 125 and / or the plurality of second connecting holes 126 to cooperate with the plurality of bosses 113, the situation that the mask plate 12 deviates from the first direction due to inaccurate cooperation between the bosses 113 and the connecting holes can be reduced or eliminated, thereby reducing or eliminating the positional deviation of the mask plate 12 during installation, improving the positioning accuracy of the mask plate 12 on the base plate 11, and ultimately improving the alignment accuracy of the substrate 5 and the mask plate 12.

[0122] In one embodiment, referring to FIG. 1, the edge of the mask plate 12 is further provided with a plurality of third connecting holes 127, which are distributed at positions on the mask plate 12 different from the first connecting holes 125 and the second connecting holes 126; and the base plate 11 is provided with bosses 113 for plugging the third connecting holes 127, and the outer diameter of the bosses 113 is smaller than the inner diameter of the third connecting holes 127. Figure 5 It should be understood that the third connecting holes 127 are not arranged on both sides of the first direction of the mask plate 12, but are arranged on both sides of the first connecting holes 125 and the second connecting holes 126 as shown in FIG. 2, when the first connecting holes 125 and the second connecting holes 126 have a plurality of them, the third connecting holes 127 are distributed on both sides of the respective distribution areas of the first connecting holes 125 and the second connecting holes 126.

[0123] Figure 5 It should be understood that the third connecting holes 127 are not arranged on both sides of the first direction of the mask plate 12, but are arranged on both sides of the first connecting holes 125 and the second connecting holes 126 as shown in FIG. 2, when the first connecting holes 125 and the second connecting holes 126 have a plurality of them, the third connecting holes 127 are distributed on both sides of the respective distribution areas of the first connecting holes 125 and the second connecting holes 126.

[0124] In the above embodiments, by setting the third connecting holes 127 and the corresponding bosses 113, the corresponding edge of the mask plate 12 will not be separated from the base plate 11 when subjected to external force. At the same time, based on the gap cooperation between the third connecting holes 127 and the corresponding bosses 113, the corresponding edge of the mask plate 12 with the third connecting holes 127 can freely contract inward or freely expand outward to a certain extent, so that when the mask plate 12 is deformed due to temperature change or due to the attraction of the magnet plate assembly 2, it can freely expand outward, avoiding the undulating deformation of the mask plate 12 due to the release of local stress, so that the mask plate 12 is more flatly attached to the substrate 5.

[0125] In one embodiment, referring to FIG. 1, the edge of the mask plate 12 is further provided with a plurality of third connecting holes 127, which are distributed at positions on the mask plate 12 different from the first connecting holes 125 and the second connecting holes 126; and the base plate 11 is provided with bosses 113 for plugging the third connecting holes 127, and the outer diameter of the bosses 113 is smaller than the inner diameter of the third connecting holes 127. Figure 5 It should be pointed out that the bosses 113 connected with the first connecting holes 125, the bosses 113 connected with the second connecting holes 126, and the bosses 113 connected with the third connecting holes 127 can be the same or different.

[0126] ​​

[0127] In one embodiment, the pressing plate 13 covers the upper end of the protrusion 113 to limit the mask plate 12 from easily separating from the protrusion 113 on the base plate 11.

[0128] As another alternative embodiment, the upper end of the protrusion 113 can also be pressed by the magnet plate assembly 2 assembled on the mask plate assembly 1 to achieve the purpose of preventing the mask plate 12 from easily separating from the protrusion 113 on the base plate 11. For example, the protrusion 113 is lengthened to abut against the lower surface of the magnet plate assembly 2, or a protruding portion extending towards the protrusion 113 is arranged at the corresponding position of the magnet plate assembly 2 to abut against the upper end of the protrusion 113.

[0129] In one embodiment, referring to FIG. 1, the pressing plate 13 is an annular whole. In this embodiment, the pressing plate 13 is arranged to have a size substantially the same as that of the base plate 11, and is adapted to be tightly fitted on the annular base plate 11. Figure 4

[0130] As another alternative embodiment, the pressing plate 13 can also be composed of multiple segments, and the multiple segments of the pressing plate 13 are arranged to form an annular region. The multiple segments of the pressing plate 13 can be connected end to end to form an annular shape, or the multiple segments of the pressing plate 13 can be distributed in a ring shape without being connected end to end.

[0131] In one embodiment, referring to FIG. 1, the base plate 11 is provided with a mask clamping groove 111, and the protrusion 113 is arranged in the mask clamping groove 111, and the edge of the mask plate 12 is accommodated in the mask clamping groove 111. Figure 4 By arranging the mask clamping groove 111, on one hand, the mask plate 12 can be given space, so that the pressing plate 13 does not press the mask plate 12 tightly, and the mask plate 12 can be freely stretched outwards and contracted inwards to a certain extent; on the other hand, after the edge of the mask plate 12 is accommodated in the mask clamping groove 111, no gap is generated between the edge of the mask plate 12 and the inner side wall of the mask clamping groove 111 (i.e. the inner side wall of the pressing plate 13), which can avoid the situation of material leakage from the gap during plating, and can also avoid unacceptable deformation of the mask plate 12 caused by the mask plate 12 being blocked by the inner side wall of the mask clamping groove 111 when the mask plate 12 is stretched outwards.

[0132] Referring to FIG. 2, the mask clamping groove 111 is provided with multiple connecting grooves 112, and the protrusion 113 is arranged in each connecting groove 112. The outer edge of the mask plate 12 extends outwards to form multiple connecting portions, and the multiple connecting portions are accommodated in the corresponding connecting grooves 112 and connected with the corresponding protrusions 113.

[0133] Figure 4 Referring to FIG. 2, the mask clamping groove 111 is provided with multiple connecting grooves 112, and the protrusion 113 is arranged in each connecting groove 112. The outer edge of the mask plate 12 extends outwards to form multiple connecting portions, and the multiple connecting portions are accommodated in the corresponding connecting grooves 112 and connected with the corresponding protrusions 113.

[0134] ​​It should be understood that the aforementioned connecting part is connected to the corresponding boss 113 through connecting holes provided thereon. The connecting holes include a first connecting hole 125 and a second connecting hole 126. In some embodiments, a third connecting hole 127 may also be included.

[0135] For example, in one embodiment, such as Figure 5 As shown, the mask plate 12 is provided with a first connecting part 122, a second connecting part 123 and a plurality of third connecting parts 124, wherein a first connecting hole 125 is provided on the first connecting part 122, a second connecting hole 126 is provided on the second connecting part 123, and a third connecting hole 127 is provided on the third connecting part 124.

[0136] By setting the protruding connecting part to connect with the corresponding boss 113, the influence of the connection on the internal stress of the mask plate 12 can be reduced, and the possibility of unacceptable deformation of the mask plate 12 can be reduced.

[0137] In one embodiment, see Appendix Figure 1 As shown, the coating fixture of this application also includes a plurality of adjustment components 3, which are arranged around the substrate placement groove 100.

[0138] See appendix Figure 6 and appendix Figures 8 to 10 As shown, the adjustment assembly 3 includes a base 31, a top block 32, a first connecting screw 33, a first spring 34, and an adjustment knob 35, wherein:

[0139] The bottom of the base 31 is provided with a top block groove 311, which extends at least to one side surface of the base 31, and the side surface faces the substrate placement groove 100.

[0140] The top block 32 is at least partially accommodated within the top block groove 311. The end of the top block 32 facing away from the substrate placement groove 100 has a bevel 322, and the end facing the substrate placement groove 100 has a first countersunk hole 323, which extends through the bevel 322.

[0141] The first connecting screw 33 is disposed in the first countersunk hole 323 and extends to connect with the inner wall of the top block groove 311 on the side away from the substrate placement groove 100.

[0142] The first spring 34 is disposed in the first countersunk hole 323 and is sleeved in the middle of the first connecting screw 33.

[0143] The base 31 has a threaded hole 312 at its top, which extends into the top block groove 311. An adjusting knob 35 is installed in the threaded hole 312, and its lower end extends to abut against the inclined surface 322. It should be understood that the middle part of the adjusting knob 35 is threadedly connected to the threaded hole 312.

[0144] As shown in Figure 7 After the substrate 5 is placed in the substrate placing groove 100, the substrate 5 is easy to deviate to one side of the substrate placing groove 100, which results in the failure of alignment with the mask plate 12.

[0145] After the adjustment assembly 3 is set, when the substrate 5 in the substrate placing groove 100 deviates to one side, the position of the substrate 5 can be adjusted by the adjustment assembly 3 near the side, so that the substrate 5 returns to the center of the substrate placing groove 100, i.e. reaches the matching state of the substrate 5 and the substrate placing groove 100 shown by the arrow on the right side in Figure 7 After the adjustment assembly 3 is set, when the substrate 5 in the substrate placing groove 100 deviates to one side, the position of the substrate 5 can be adjusted by the adjustment assembly 3 near the side, so that the substrate 5 returns to the center of the substrate placing groove 100, i.e. reaches the matching state of the substrate 5 and the substrate placing groove 100 shown by the arrow on the right side in

[0146] When the adjustment assembly 3 is operated, the adjustment knob 35 is rotated to move downward, the lower end of the adjustment knob 35 presses the inclined surface 322 of the top block 32, the top block 32 moves toward the substrate placing groove 100, and pushes the substrate 5 to push the substrate 5 toward the center of the substrate placing groove 100. When the top block 32 moves toward the substrate placing groove 100, the first spring 34 is pressed by the bottom of the first counterbore 323 and the head of the first connecting screw 33, and is elastically deformed.

[0147] To make the substrate 5 return to the center of the substrate placing groove 100, only one of the adjustment assemblies 3 can be operated, or multiple adjustment assemblies 3 can be operated respectively.

[0148] When the substrate 5 needs to be removed, the adjustment knob 35 is reversely rotated to move upward, the lower end of the adjustment knob 35 is separated from the inclined surface 322 of the top block 32, at this time, the first spring 34 rebounds to make the top block 32 return to the top block groove 311, and no longer pushes the substrate 5. Therefore, the substrate 5 can be more conveniently taken out from the substrate placing groove 100.

[0149] In addition, to make the substrate 5 not be limited in the film coating state, before film coating, the adjustment assembly 3 can be adjusted to the state that the top block 32 in the adjustment assembly 3 does not contact the substrate 5. However, it should be noted that the operation should be performed after the position of the substrate 5 is adjusted.

[0150] By setting the adjustment assembly 3, the deviation of the substrate 5 in the substrate placing groove 100 can be avoided, and the alignment accuracy of the substrate 5 and the mask plate 12 can be improved. Therefore, the quality of products produced by film coating by using the film coating jig of the present application can be improved.

[0151] Optionally, as shown in Figure 4 The base 31 is fixed on the pressing plate 13, so that the adjustment assembly 3 is fixedly connected with the mask plate assembly 1.

[0152] In addition, in some cases, such as when the pressure plate 13 is divided into multiple sections and the position of the fixed adjustment component 3 is not occupied by the pressure plate 13, the base 31 can be directly fixed to the base plate 11.

[0153] The connection between the base 31 and the pressure plate 13 or the bottom plate 11 is preferably a detachable fixed connection, for example, by means of screws.

[0154] Furthermore, the top block 32 may be provided with one or more sets of cooperating first connecting screws 33 and first springs 34. For example, in one embodiment, see Appendix Figure 6 As shown, the top block 32 has two parallel first countersunk holes 323, and the first connecting screw 33 and the first spring 34 are provided in both first countersunk holes 323.

[0155] In one embodiment, refer to Appendix Figure 9 As shown, the top block 32 has a clearance notch 321 at the end away from the substrate placement groove 100, and a slope 322 is disposed within the clearance notch 321. The lower end of the adjustment knob 35 extends to abut against the slope 322 within the clearance notch 321. The top block 32 is provided with two first countersunk holes 323, which are distributed on both sides of the clearance notch 321. The first connecting screw 33 and the first spring 34 are disposed in each of the two first countersunk holes 323.

[0156] In one embodiment, see Appendix Figure 1 and attached Figure 2 As shown, the coating fixture of this application also includes a plurality of locking components 4, which are arranged around the substrate placement groove 100.

[0157] See appendix Figure 12 To be continued Figure 14 As shown, the locking assembly 4 includes a pressure member 41, a second connecting screw 42, and a second spring 43, wherein:

[0158] The pressure member 41 is provided with a second countersunk hole 411, which penetrates both ends of the pressure member 41. A buckle body 412 is provided in the middle of the pressure member 41, which extends outward along the radial direction of the second countersunk hole 411.

[0159] The second connecting screw 42 is disposed within the second countersunk hole 411 and extends to connect with the surface of the pressure plate 13. The second spring 43 is disposed within the second countersunk hole 411 and is sleeved on the middle of the second connecting screw 42.

[0160] The buckle 412 on the pressure member 41 is pressed against the edge of the magnet plate assembly 2.

[0161] In the above embodiments, the mask assembly 1 is fixedly connected to the magnet assembly 2 by the locking assembly 4. When the substrate 5 needs to be assembled, the mask assembly 1 and the magnet assembly 2 are first separated to expose the substrate placement groove 100 in the mask assembly 1. The operation method is as follows:

[0162] i. Pull the pressure piece 41 upward to disengage the buckle 412 from the magnet plate assembly 2, and at the same time rotate the pressure piece 41 to rotate the buckle 412 away from the magnet plate assembly 2, and then release the pressure piece 41.

[0163] ii. Operate in the manner described in step i above, so that the pressing parts 41 of all locking components 4 are disengaged from the magnet plate assembly 2;

[0164] iii. After completing steps i and ii above, separate the mask assembly 1 from the magnet assembly 2.

[0165] After the mask assembly 1 is separated from the magnet assembly 2, the substrate 5 is taken out and placed in the substrate placement slot 100 of the mask assembly 1. Then, the mask assembly 1 containing the substrate 5 is reassembled with the magnet assembly 2. During operation, the pressure member 41 is pulled upward and rotated at the same time to rotate the buckle 412 to be located on the magnet assembly 2. Then the pressure member 41 is released. Under the action of the second spring 43, the pressure member 41 presses down to lock the edge of the magnet assembly 2. After all the pressure members 41 of the locking assemblies 4 are pressed against the edge of the magnet assembly 2, the reassembly of the mask assembly 1 and the magnet assembly 2 is completed.

[0166] Following the aforementioned operating method, the mask assembly 1 and the magnet assembly 2 can be quickly assembled, greatly improving the convenience of loading and unloading the substrate 5 and significantly increasing production efficiency.

[0167] Optionally, in some cases, such as when the pressure plate 13 is divided into multiple segments and the position of the locking assembly 4 is not occupied by the pressure plate 13, the second connecting screw 42 of the locking assembly 4 may also extend to connect with the base plate 11.

[0168] In one embodiment, see Appendix Figure 11 As shown, the magnet plate assembly 2 includes a back plate 21, a plurality of magnets 22, and a cover plate 23. A cover plate groove 211 is provided on the surface of the back plate 21 away from the substrate placement groove 100. A plurality of recesses 212 are arrayed at the bottom of the cover plate groove 211. The plurality of magnets 22 are correspondingly disposed within each of the recesses 212. The cover plate 23 covers and is fixed within the cover plate groove 211. The cover plate 23 is used to encapsulate the magnets 22 within the recesses 212.

[0169] Preferably, the cover plate 23 and the back plate 21 are detachably fixedly connected, for example by screws.

[0170] In the foregoing magnet plate assembly 2, because the independent recesses 212 are arranged on the back plate 21, the repulsion or attraction between the magnets 22 can be weakened when the magnets 22 are assembled into the back plate 21, so that the magnets 22 are more easily assembled into the back plate 21. This design makes the magnet plate assembly 2 itself easier to assemble, and the production and processing more convenient.

[0171] Referring to FIG. 1, the magnet plate assembly 2 includes a back plate 21 and a plurality of magnets 22. Figure 15 Referring to FIG. 1, the magnet plate assembly 2 includes a back plate 21 and a plurality of magnets 22.

[0172] By arranging the protrusions 216 in an array to contact the substrate 5, on the one hand, the surface of the substrate 5 can be uniformly supported, and on the other hand, when the substrate 5 is attached to the back plate 21, the gas between the two can be timely discharged, avoiding poor attachment between the two at local positions due to the failure of timely discharge of local gas, which not only improves the quality of the film, but also reduces the possibility of damage to the substrate 5.

[0173] In addition, by arranging the protrusions 216, the heat flow can be more uniformly distributed on the surface of the substrate 5 when the film is plated, which helps to reduce defects caused by excessive local temperature of the substrate 5.

[0174] Referring to FIG. 1, the magnet plate assembly 2 includes a back plate 21 and a plurality of magnets 22. Figure 1 Referring to FIG. 1, the magnet plate assembly 2 includes a back plate 21 and a plurality of magnets 22.

[0175] In this way, the magnetic force of the magnets 22 is concentrated at the intersections of the longitudinal and transverse ribs of the mask plate 12, effectively avoiding the pattern openings 121 of the mask plate 12, so that the mask plate 12 can be more uniformly attached to the surface of the substrate 5 under the action of the magnets 22. Therefore, when the film is plated, a more precise film pattern can be obtained on the surface of the substrate 5.

[0176] In one embodiment, referring to FIGS. 1 and 2, the plating jig of the present application simultaneously includes a plurality of adjusting assemblies 3 and a plurality of locking assemblies 4, and the plurality of adjusting assemblies 3 and the plurality of locking assemblies 4 are distributed on the mask plate assembly 1. The adjusting assembly 3 and the locking assembly 4 are the same as in the foregoing embodiment. Figure 2 Figure 11 In one embodiment, referring to FIGS. 1 and 2, the plating jig of the present application simultaneously includes a plurality of adjusting assemblies 3 and a plurality of locking assemblies 4, and the plurality of adjusting assemblies 3 and the plurality of locking assemblies 4 are distributed on the mask plate assembly 1. The adjusting assembly 3 and the locking assembly 4 are the same as in the foregoing embodiment.

[0177] In one embodiment, referring to FIGS. 1 and 2, the plating jig of the present application simultaneously includes a plurality of adjusting assemblies 3 and a plurality of locking assemblies 4, and the plurality of adjusting assemblies 3 and the plurality of locking assemblies 4 are distributed on the mask plate assembly 1. The adjusting assembly 3 and the locking assembly 4 are the same as in the foregoing embodiment. Figure 1 ​As shown in FIG. 1, the back plate 21 of the magnet plate assembly 2 has a plurality of first notches 213 for the lock assembly 4 and a plurality of second notches 215 for the adjustment assembly 3. The first notches 213 and the second notches 215 are used to avoid the interference between the adjustment assembly 3 and the lock assembly 4 installed on the mask plate assembly 1, so as to ensure the magnet plate assembly 2 to be assembled with the mask plate assembly 1 more smoothly.

[0178] In order to make the magnet plate assembly 2 to be assembled with the mask plate assembly 1 in a unique matching manner, in an embodiment, referring to FIG. 2, the lock assembly 4 around the mask plate assembly 1 is unevenly distributed. Figure 15 As shown in FIG. 1, the lock assembly 4 around the mask plate assembly 1 is unevenly distributed.

[0179] The unevenly distributed lock assembly 4 is matched with the first notches 213 on the back plate 21 of the magnet plate assembly 2, so as to realize the unique matching of the two. When the operator assembles the mask plate assembly 1 with the magnet plate assembly 2, the operator can determine the assembly direction by identifying the lock assembly 4 and the corresponding first notches 213, so as to easily implement the assembly. After the assembly, the magnets 22 in the magnet plate assembly 2 are aligned with the mask plate 12. For reference, FIG. 3 shows the alignment of the magnets 22 with the mask plate 12. Figure 11 As shown in FIG. 1, the magnets 22 can provide uniform and effective adsorption to the mask plate 12.

[0180] In order to achieve the same purpose as the previous embodiment, alternatively, the adjustment assembly 3 around the mask plate assembly 1 is unevenly distributed.

[0181] In addition, it should be understood that the positioning structure or the positioning mark can also be provided on the mask plate assembly 1 and the magnet plate assembly 2, so as to realize the unique matching of the mask plate assembly 1 and the magnet plate assembly 2.

[0182] In an embodiment, referring to FIG. 2, the back plate 21 of the magnet plate assembly 2 has a plurality of first notches 213 for the lock assembly 4 and a plurality of second notches 215 for the adjustment assembly 3. Figure 1 As shown in FIG. 2, the back plate 21 of the magnet plate assembly 2 has a plurality of first notches 213 for the lock assembly 4 and a plurality of second notches 215 for the adjustment assembly 3. The first notches 213 and the second notches 215 are used to avoid the interference between the adjustment assembly 3 and the lock assembly 4 installed on the mask plate assembly 1, so as to ensure the magnet plate assembly 2 to be assembled with the mask plate assembly 1 more smoothly.

[0183] In an embodiment, referring to FIG. 2, the back plate 21 of the magnet plate assembly 2 has a plurality of first notches 213 for the lock assembly 4 and a plurality of second notches 215 for the adjustment assembly 3. Figure 2 Figure 11 Figure 1 As shown in FIG. 2, the back plate 21 of the magnet plate assembly 2 has a plurality of first notches 213 for the lock assembly 4 and a plurality of second notches 215 for the adjustment assembly 3. The first notches 213 and the second notches 215 are used to avoid the interference between the adjustment assembly 3 and the lock assembly 4 installed on the mask plate assembly 1, so as to ensure the magnet plate assembly 2 to be assembled with the mask plate assembly 1 more smoothly.

[0184] ​​After the mounting base 25 of the magnet plate assembly 2 is assembled with the connecting part of the coating equipment, the magnet plate assembly 2 can not be removed from the coating equipment any more, except for the case that necessary maintenance and repair are needed. When the substrate 5 needs to be replaced, only the mask plate assembly 1 containing the substrate 5 is removed from the magnet plate assembly 2. Therefore, the substrate 5 is very convenient to be mounted and dismounted, and the production efficiency is improved.

[0185] In one embodiment, referring to Figs. 1-3, the magnet plate assembly 2 further comprises at least one handle 24, which is used for the operator to conveniently hold and then assemble the evaporation fixture or the magnet plate assembly 2 into the coating equipment. Figure 2 Figure 11 ​ In one embodiment, referring to Figs. 1-3, the magnet plate assembly 2 further comprises at least one handle 24, which is used for the operator to conveniently hold and then assemble the evaporation fixture or the magnet plate assembly 2 into the coating equipment.

[0186] The second aspect of the present application provides an embodiment of a coating equipment, wherein the coating fixture described in the foregoing embodiments is arranged in the coating equipment.

[0187] The above merely provides the specific implementation of the embodiments of the present application, but the protection scope of the embodiments of the present application is not limited to this. Any person skilled in the art can easily think of the changes or replacements within the technical range disclosed by the embodiments of the present application, which should be covered in the protection scope of the embodiments of the present application. Therefore, the protection scope of the embodiments of the present application should be subject to the protection scope of the claims.​​

Claims

1. A coating tool, comprising a mask plate assembly and a magnet plate assembly, characterized in that, the mask plate assembly comprises a bottom plate in a ring shape, a mask plate covering the upper side of the bottom plate, and a pressing plate; the mask plate has pattern openings arranged in an array in the middle part, and first and second connecting holes are respectively arranged at the edges in a first direction; the bottom plate is provided with protrusions respectively inserted into the first and second connecting holes, the inner diameter of the first connecting hole is consistent with the outer diameter of the corresponding protrusion, the second connecting hole is an oblong hole extending along the first direction, and the width of the oblong hole is consistent with the outer diameter of the corresponding protrusion; the pressing plate is arranged on the upper side of the bottom plate around the mask plate, and a substrate placing groove is formed in the middle part, and the mask plate serves as the bottom of the substrate placing groove; the magnet plate assembly covers the upper opening of the substrate placing groove and is detachably fixedly connected with the mask plate assembly.

2. The coating tool according to claim 1, wherein the pattern openings arranged in an array are configured as: the pattern openings are arranged in multiple rows along a second direction and multiple columns along a third direction perpendicular to the second direction; and the pattern openings are in a circular shape, or the pattern openings are in a rectangular shape, two pairs of opposite sides of the rectangular shape are respectively parallel to the second direction and the third direction, and one diagonal of the rectangular shape is in a direction consistent with the first direction.

3. The coating tool of claim 1, wherein the mask plate has multiple adjacent first connecting holes, and the bottom plate is provided with multiple protrusions respectively inserted into the multiple adjacent first connecting holes; and / or the mask plate has multiple adjacent second connecting holes, and the bottom plate is provided with multiple protrusions respectively inserted into the multiple adjacent second connecting holes.

4. The coating tool of claim 1, wherein the edges of the mask plate are further provided with multiple third connecting holes distributed at positions on the mask plate different from the first and second connecting holes; the bottom plate is provided with protrusions inserted into the third connecting holes, and the outer diameter of the protrusions is smaller than the inner diameter of the third connecting holes.

5. The coating tool according to claim 1 or 4, wherein the pressing plate covers the upper end of the protrusions.

6. The coating tool of claim 1, wherein the pressing plate is an integral whole in a ring shape; or the pressing plate has multiple segments arranged in a ring shape.

7. The coating tool according to claim 1 or 4, wherein the bottom plate is provided with a mask clamping groove, and the protrusions are arranged in the mask clamping groove; the edges of the mask plate are accommodated in the mask clamping groove.

8. The coating tool of claim 7, wherein, the mask clamping groove is provided with multiple connecting grooves, and the protrusions are respectively arranged in the connecting grooves; the outer edges of the mask plate extend outwardly to multiple connecting portions, the multiple connecting portions are respectively accommodated in the corresponding connecting grooves, and are connected with the corresponding protrusions.

9. The coating tool of claim 1, wherein, further comprising multiple adjusting assemblies arranged around the substrate placing groove; the adjusting assembly comprises a base, a top block, a first connecting screw, a first spring, and an adjusting knob; the bottom of the base is provided with a top block groove, the top block groove at least penetrates to one side surface of the base, and the one side surface faces the substrate placing groove; the top block is at least partially accommodated in the top block groove, one end of the top block away from the substrate placing groove has an inclined surface, and the other end of the top block facing the substrate placing groove has a first counterbore extending to penetrate the inclined surface; the first connecting screw is arranged in the first counterbore and extends to connect with the inner wall of the top block groove away from the substrate placing groove; the first spring is arranged in the first counterbore and is sleeved on the middle part of the first connecting screw. The top of the base is provided with a threaded hole penetrating into the top block groove, and an adjusting knob is installed in the threaded hole, and the lower end of the adjusting knob extends to abut against the inclined surface.

10. The coating tool of claim 1, wherein, A plurality of locking assemblies are arranged around the substrate placing groove. The locking assembly comprises a pressing piece, a second connecting screw and a second spring. The pressing piece is provided with a second counterbore penetrating through the two end surfaces of the pressing piece, and the middle part of the pressing piece is provided with a buckle body extending outward along the radial direction of the second counterbore. The second connecting screw is arranged in the second counterbore and extends to connect with the surface of the pressing plate or the bottom plate. The second spring is arranged in the second counterbore and is sleeved on the middle part of the second connecting screw. The buckle body is pressed against the edge of the magnet plate assembly.

11. The coating tool of claim 1, wherein The magnet plate assembly comprises a back plate, a plurality of magnets and a cover plate, wherein: The side surface of the back plate away from the substrate placing groove is provided with a cover plate groove, and the bottom of the cover plate groove is arranged with a plurality of sink grooves; A plurality of magnets are arranged one by one in the plurality of sink grooves; The cover plate covers and is fixed in the cover plate groove.

12. The coating tool of claim 11, wherein, The side surface of the back plate facing the substrate placing groove is provided with a plurality of convex parts arranged in an array.

13. The coating tool of claim 11, wherein, The mask plate has a plurality of mutually parallel longitudinal ribs and a plurality of mutually parallel transverse ribs. The plurality of magnets are respectively orthographically projected at the intersection of the longitudinal ribs and the transverse ribs.

14. The coating tool of claim 11, wherein, A plurality of adjusting assemblies and a plurality of locking assemblies are arranged on the mask plate assembly, and the back plate is provided with a plurality of first notches for the locking assemblies and a plurality of second notches for the adjusting assemblies.

15. The coating tool of claim 14, wherein, The adjusting assemblies are non-uniformly distributed around the mask plate assembly, Or the locking assemblies are non-uniformly distributed around the mask plate assembly.

16. The coating tool of claim 14, wherein, The back plate is provided with a buckle body clamping groove at the first notch.

17. The coating tool of claim 11, wherein, The magnet plate assembly further comprises a mounting seat and at least one handle.

18. A coating apparatus, characterized by, The film coating jig is configured as claimed in any one of claims 1-17. The film coating jig is configured as claimed in any one of claims 1-17.

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