Gas transmission pipeline and atomic layer deposition equipment

Abstract

The utility model is suitable for the technical field of atomic layer deposition, and provides a gas transmission pipeline and atomic layer deposition equipment. The gas conveying pipeline comprises a first bent pipeline, a spraying device and a second bent pipeline; the spraying device is located between the first bent pipeline and the second bent pipeline; one end of the first bent pipeline is communicated with a first source bottle, and the other end of the first bent pipeline is communicated with the spraying device; one end of the second bent pipeline is communicated with a second source bottle, and the other end of the second bent pipeline is communicated with the spraying device. The spraying device is arranged between the first bent pipeline and the second bent pipeline, and gases in the two source bottles are sprayed out of the spraying device through the two bent pipelines respectively, so that gas transmission paths of the two gases do not need to share a pipeline, and the two gases are prevented from reacting in the shared pipeline and blocking the gas transmission pipeline.

Description

TECHNICAL FIELD

[0001] The utility model belongs to atomic layer deposition field especially relates to a gas pipeline and atomic layer deposition equipment. BACKGROUND

[0002] The gas pipeline for atomic layer deposition in the related art is a three-way multi-bend pipeline, and two gas cylinders share a section of conveying pipeline. Due to the existence of the shared main pipeline, the gas source will react in advance in the shared main pipeline during gas conveying. The accumulated powder generated by the reaction will block the gas pipeline, hinder or stop the gas flow, thereby affecting the amount and purity of the gas entering the reaction chamber subsequently and shortening the service life of the gas pipeline. Based on this, how to avoid the blockage of the gas pipeline has become a problem to be solved urgently. SUMMARY

[0003] The utility model provides a kind of gas pipeline and atomic layer deposition equipment, to solve the technical problem that the gas pipeline in the related art can be blocked.

[0004] The utility model embodiment is realized as follows: the gas pipeline provided by the utility model includes: first bent pipeline, spraying device and second bent pipeline;The spraying device is located between the first bent pipeline and the second bent pipeline;One end of the first bent pipeline is communicated with first source bottle, the other end of the first bent pipeline is communicated with the spraying device, and the gas in the first source bottle is sprayed out from the spraying device through the first bent pipeline;One end of the second bent pipeline is communicated with second source bottle, the other end of the second bent pipeline is communicated with the spraying device, and the gas in the second source bottle is sprayed out from the spraying device through the second bent pipeline.

[0005] Further, the first bent pipeline includes first pipeline and second pipeline;The extension direction of the first pipeline and the extension direction of the second pipeline intersect;One end of the first pipeline is communicated with the first source bottle, the other end of the first pipeline is communicated with one end of the second pipeline, and the other end of the second pipeline is communicated with the spraying device.

[0006] Further, the first pipeline and the second pipeline are both straight pipelines.

[0007] Further, the second bent pipeline includes third pipeline and fourth pipeline;The extension direction of the third pipeline and the extension direction of the fourth pipeline intersect;One end of the third pipeline is communicated with the second source bottle, the other end of the third pipeline is communicated with one end of the fourth pipeline, and the other end of the fourth pipeline is communicated with the spraying device.

[0008] Further, the third pipeline and the fourth pipeline are both straight pipelines.

[0009] Further, a first one-way valve is arranged between the first source bottle and the first bent pipe, so that the gas in the first source bottle is unidirectionally passed into the first bent pipe; a second one-way valve is arranged between the second source bottle and the second bent pipe, so that the gas in the second source bottle is unidirectionally passed into the second bent pipe.

[0010] Further, the spraying device comprises a third one-way valve, through which the gas is unidirectionally passed into the spraying device.

[0011] Further, a roughness of an inner wall of the first bent pipe is less than or equal to 0.8 μm; and / or, a roughness of an inner wall of the second bent pipe is less than or equal to 0.8 μm.

[0012] The utility model embodiment further provides an atomic layer deposition equipment, the atomic layer deposition equipment includes: reaction cavity and the gas pipeline of any above described, the gas output from the gas pipeline enters the reaction cavity.

[0013] The gas pipeline and the atomic layer deposition equipment of the utility model embodiment, through setting the spraying device between the first bent pipe and the second bent pipe, the gas in two source bottles is respectively sprayed from the spraying device through two bent pipes, so that the gas conveying path of two kinds of gas does not need to share the pipe, thereby avoiding the reaction of two kinds of gas in the shared pipe and blocking the gas pipeline. BRIEF DESCRIPTION OF DRAWINGS

[0014] Figure 1 A module structure schematic view of the atomic layer deposition equipment provided by the utility model embodiment is shown in the figure;

[0015] Figure 2 A structure schematic view of the gas pipeline provided by the utility model embodiment is shown in the figure;

[0016] Figure 3 A structure schematic view of the gas pipeline provided by the utility model embodiment is shown in the figure;

[0017] Figure 4 A module structure schematic view of the spraying device in the gas pipeline provided by the utility model embodiment is shown in the figure.

[0018] Main element symbol explanation: 1000, atomic layer deposition equipment; 100, gas pipeline; 200, first source bottle; 300, second source bottle; 10, first bent pipe; 20, second bent pipe; 30, spraying device; 40, first one-way valve; 50, second one-way valve; 11, first pipe; 12, second pipe; 21, third pipe; 22, fourth pipe; 31, third one-way valve. DETAILED DESCRIPTION

[0019] In order to make the purpose, technical scheme and advantages of the utility model clearer and more apparent, the utility model will be further described in detail below in combination with the drawings and examples. It should be understood that the specific examples described herein are only used to explain the utility model and not to limit the utility model.

[0020] Please refer to Figure 1 The atomic layer deposition equipment 1000 in the embodiment of the utility model can include the gas conveying pipeline 100 in the embodiment of the utility model. It should be noted that the drawings provided by the present application are schematic drawings, and some elements are not displayed in the drawings. The purpose is to clearly describe the technical scheme and highlight the key points of the utility model. It is not intended to limit the technical scheme and not to include these undisplayed elements. That is to say, the drawings are only examples and do not represent a specific form of the battery assembly.

[0021] Please refer to Figures 2 to 4 The atomic layer deposition equipment 1000 specifically includes a reaction cavity and a gas conveying pipeline 100. The gas sprayed through the gas conveying pipeline 100 enters the reaction cavity. The atomic layer deposition equipment 1000 can be applied to the precise deposition process of chemical vapor phase.

[0022] The gas conveying pipeline 100 in the embodiment of the utility model includes a first bent pipeline 10, a spraying device 30 and a second bent pipeline 20. The spraying device 30 is located between the first bent pipeline 10 and the second bent pipeline 20; one end of the first bent pipeline 10 is in communication with a first source bottle 200, the other end of the first bent pipeline 10 is in communication with the spraying device 30, and the gas in the first source bottle 200 is sprayed out from the spraying device 30 through the first bent pipeline 10; one end of the second bent pipeline 20 is in communication with a second source bottle 300, the other end of the second bent pipeline 20 is in communication with the spraying device 30, and the gas in the second source bottle 300 is sprayed out from the spraying device 30 through the second bent pipeline 20.

[0023] In this way, the spraying device 30 is arranged between the first bent pipeline 10 and the second bent pipeline 20 in the utility model, and the gas in the two source bottles is sprayed out from the spraying device 30 through the two bent pipelines respectively, so that the gas conveying paths of the two kinds of gas do not need to share the pipeline, thereby avoiding the reaction of the two kinds of gas in the shared pipeline and blocking the gas conveying pipeline.

[0024] At the same time, the pipeline with the bending design can reduce the violent fluctuation of the airflow speed, thereby realizing more stable gas transmission.

[0025] Specifically, the first bent pipeline 10 and the second bent pipeline 20 are connected to different source bottles respectively. Of course, the gas in the first source bottle 200 and the second source bottle 300 can be the same or different.

[0026] The spraying device 30 is located between the first bent pipe 10 and the second bent pipe 20. In this way, the two gases in the two source bottles can be kept separated before entering the reaction chamber, and the two gases do not contact in the gas delivery pipeline 100, avoiding chemical reactions (such as side reactions or deposition reactions) in the shared pipeline, preventing the formation of solid deposits to cause the gas delivery pipeline 100 to be blocked, thereby improving the service life of the gas delivery pipeline 100 and reducing the maintenance frequency.

[0027] Specifically, the spraying device 30 can include a spray nozzle. The spray nozzle can be one of a circular spray nozzle, a triangular spray nozzle, or a rectangular spray nozzle. In the embodiments of the present application, the spraying device 30 including a circular spray nozzle is taken as an example for description.

[0028] Specifically, the spraying device 30 includes a micro-porous distributor or a cyclone structure. In this way, the spraying uniformity of the spraying device 30 can be improved, and the effect of uniformly spraying the gas can be achieved.

[0029] Therefore, the two gases in the first source bottle 200 and the second source bottle 300 can enter the spraying device 30 and be sprayed out from two different paths during the flow delivery process in the first bent pipe 10 and the second bent pipe 20, respectively. In this way, the flow paths of the two gases do not share a pipeline, so the two gases do not react in advance in the gas delivery pipeline 100, that is, there is no gas remaining in the gas delivery pipeline 100, thereby avoiding the gas delivery pipeline 100 from being blocked. Moreover, this does not affect the amount of gas entering the reaction chamber subsequently, and ensures the purity of the gas entering the reaction chamber.

[0030] Further, in a possible implementation, the first bent pipe 10 includes a first pipe 11 and a second pipe 12; the extension direction of the first pipe 11 and the extension direction of the second pipe 12 intersect; one end of the first pipe 11 is in communication with the first source bottle 200, the other end of the first pipe 11 is in communication with one end of the second pipe 12, and the other end of the second pipe 12 is in communication with the spraying device 30. The second bent pipe 20 includes a third pipe 21 and a fourth pipe 22; the extension direction of the third pipe 21 and the extension direction of the fourth pipe 22 intersect; one end of the third pipe 21 is in communication with the second source bottle 300, the other end of the third pipe 21 is in communication with one end of the fourth pipe 22, and the other end of the fourth pipe 22 is in communication with the spraying device 30.

[0031] Thus, the two bent pipes each include pipes extending in directions crossing each other, so that the pipes can be arranged in a crossing and bent manner to reasonably utilize the gas conveying pipeline 100, reduce the overall volume of the gas conveying pipeline 100, and improve the compactness of the gas conveying pipeline 100. Meanwhile, the pipes designed in a crossing manner in the first bent pipe 10 and the second bent pipe 20 prolong the flow path of the gas, so that the gas flows more uniformly, which helps to realize the uniformity of the deposition process in the reaction chamber. Specifically, the extending direction of the first pipe 11 is perpendicular to the extending direction of the second pipe 12, and the extending direction of the third pipe 21 is perpendicular to the extending direction of the fourth pipe 22.

[0032] Specifically, the first pipe 11 and the second pipe 12 in the first bent pipe 10 can be integrally formed. Thus, the integrally formed design eliminates the connection points between the first pipe 11 and the second pipe 12, effectively avoids problems caused by gas leakage or poor sealing at the connection, and improves the sealing performance of the overall pipeline. Meanwhile, the integrally formed first pipe 11 and second pipe 12 reduce the number of independent components and the installation steps, which helps to improve production efficiency, reduces the complexity of processing and assembly, and saves manufacturing costs.

[0033] Of course, the first pipe 11 and the second pipe 12 in the first bent pipe 10 can also be separately formed. The separately designed first pipe 11 and second pipe 12 allow each pipe to be independently disassembled and replaced, so that when a certain pipe is worn, corroded or clogged, the entire first bent pipe 10 does not need to be replaced, thereby reducing maintenance costs.

[0034] Likewise, the third pipe 21 and the fourth pipe 22 in the second bent pipe 20 can be integrally formed. Thus, the integrally formed design eliminates the connection points between the third pipe 21 and the fourth pipe 22, effectively avoids problems caused by gas leakage or poor sealing at the connection, and improves the sealing performance of the overall pipeline. Meanwhile, the integrally formed third pipe 21 and fourth pipe 22 reduce the number of independent components and the installation steps, which helps to improve production efficiency, reduces the complexity of processing and assembly, and saves manufacturing costs.

[0035] Of course, the third pipe 21 and the fourth pipe 22 in the second bent pipe 20 can also be separately formed. The separately designed third pipe 21 and fourth pipe 22 allow each pipe to be independently disassembled and replaced, so that when a certain pipe is worn, corroded or clogged, the entire second bent pipe 20 does not need to be replaced, thereby reducing maintenance costs.

[0036] Further, in a possible implementation, the first pipe 11 and the second pipe 12 are straight pipes. In this way, the first pipe 11 and the second pipe 12 are designed to make the flow path of the gas more direct and simple, reduce the resistance and gas deposition caused by the bending and corner, help to improve the gas conveying efficiency and prevent gas deposition.

[0037] Likewise, the third pipe 21 and the fourth pipe 22 are straight pipes. In this way, the third pipe 21 and the fourth pipe 22 are designed to make the flow path of the gas more direct and simple, reduce the resistance and gas deposition caused by the bending and corner, help to improve the gas conveying efficiency and prevent gas deposition.

[0038] It is worth noting that the "straight pipe" in the embodiment of the utility model refers to the pipe that makes the gas conveying path always point to the same direction without turning. Therefore, the straight pipe ensures that the gas flow always transmits in the same direction, avoids the airflow interference and turbulence caused by turning, and the airflow is more stable, which helps to improve the accuracy and efficiency of gas transmission.

[0039] Please refer to Figure 3 Further, in a possible implementation, a first one-way valve 40 is arranged between the first source bottle 200 and the first bent pipe 10, so that the gas in the first source bottle 200 unidirectionally flows into the first bent pipe 10; and a second one-way valve 50 is arranged between the second source bottle 300 and the second bent pipe 20, so that the gas in the second source bottle 300 unidirectionally flows into the second bent pipe 20.

[0040] In this way, it is ensured that the gas in the first source bottle 200 can only enter the first bent pipe 10 from the first source bottle 200, and it is ensured that the gas in the second source bottle 300 can only enter the second bent pipe 20 from the second source bottle 300, and cannot flow back. The gas in the first source bottle 200 and the second source bottle 300 can only flow in one direction, which achieves the effect of preventing the gas from flowing back and mixing in the gas conveying pipeline 100. At the same time, through the arrangement of the first one-way valve 40 and the second one-way valve 50, the conveying path of different gases can be accurately controlled, the gas in the source bottle is prevented from entering the gas conveying pipeline 100 at inappropriate time or position, and more efficient gas transmission is realized.

[0041] Specifically, the first one-way valve 40 and the second one-way valve 50 can be spring type one-way valves, gravity type one-way valves, ball valve type one-way valves, etc., which can be selected by the user according to the actual situation. In addition, the first one-way valve 40 and the second one-way valve 50 are electrically connected with the controller. In this way, the opening and closing state and the opening and closing time of the first one-way valve 40 and the second one-way valve 50 can be controlled through the controller, so as to achieve the effect of accurately controlling the first one-way valve 40 and the second one-way valve 50.

[0042] Further, in a possible implementation, the roughness of the inner wall of the first meandering pipe 10 is less than or equal to 0.8 μm; and / or, the roughness of the inner wall of the second meandering pipe 20 is less than or equal to 0.8 μm. In this way, the surface resistance of the inner wall of the first meandering pipe 10 and the second meandering pipe 20 can be significantly reduced, the flow resistance of the gas during transportation can be reduced, the turbulence or gas residue caused by the surface roughness can be avoided, and thus the efficiency and uniformity of the gas transportation can be improved, and the stability and reliability of the reaction process can be ensured.

[0043] For example, a mechanical polishing device (such as a grinding wheel, a polishing cloth, or a polishing paste) can be used to polish the inner wall of the first meandering pipe 10 and the second meandering pipe 20.

[0044] For example, the inner wall of the first meandering pipe 10 and the second meandering pipe 20 can be corroded by a chemical solution to achieve smooth treatment of the inner wall.

[0045] For example, the inner wall of the first meandering pipe 10 and the second meandering pipe 20 includes a protective coating (such as PTFE or ceramic coating), and the roughness of the protective coating is less than or equal to 0.8 μm.

[0046] Optionally, the roughness of the inner wall of the first meandering pipe 10 is 0.8 μm, 0.5 μm, 0.2 μm, or 0.01 μm. The roughness of the inner wall of the second meandering pipe 20 is 0.8 μm, 0.5 μm, 0.2 μm, or 0.01 μm.

[0047] Please refer to Figure 4 Further, in a possible implementation, the spraying device 30 includes a third one-way valve 31, and the gas passes through the third one-way valve 31 to enter the spraying device 30 in one direction. In this way, by providing the third one-way valve 31, the gas in the spraying device 30 can be effectively prevented from flowing back to the gas conveying pipe, and the mixing or reaction between different gases can be avoided, thereby improving the stability and safety of the entire gas conveying pipeline 100, and ensuring the directionality of the gas flow in the spraying device 30, and further optimizing the spraying effect.

[0048] In addition, for the overall flow direction of the gas in the gas conveying pipeline 100, the gas in the first source bottle 200 passes through the first meandering pipe 10 in one direction and then enters the spraying device 30 in one direction, and finally is sprayed into the reaction chamber from the spraying device 30. The gas in the second source bottle 300 passes through the second meandering pipe 20 in one direction and then enters the spraying device 30 in one direction, and finally is sprayed into the reaction chamber from the spraying device 30.

[0049] In the description of the specification, reference to "some embodiments", "certain embodiments", "exemplary embodiments", "specific embodiments", or "some examples" etc., indicate that the particular feature, structure, material, or characteristic being described is included in at least one embodiment or example of the application. The appearing of the above-mentioned phrases in various places in the specification are not necessarily all referring to the same embodiment or example. Furthermore, the particular features, structures, materials, or characteristics can be combined in any suitable manner in one or more embodiments or examples.

[0050] Moreover, the above-mentioned preferred embodiments are only some of the preferred embodiments of the present application, and are not used to limit the present application, and any modification, equivalent replacement, and improvement made within the spirit and principle of the present application should be included in the protection scope of the present application.

Claims

1. A gas transmission pipeline, characterized in that, The gas transmission pipeline includes: a first bend pipe, a spraying device, and a second bend pipe; the spraying device is located between the first bend pipe and the second bend pipe; One end of the first bent pipe is connected to the first source bottle, and the other end of the first bent pipe is connected to the spraying device. The gas in the first source bottle is sprayed out from the spraying device through the first bent pipe. One end of the second bend pipe is connected to the second source bottle, and the other end of the second bend pipe is connected to the spraying device. The gas in the second source bottle is sprayed out from the spraying device through the second bend pipe.

2. The gas transmission pipeline according to claim 1, characterized in that, The first bent pipe includes a first pipe and a second pipe; The extension direction of the first pipe intersects the extension direction of the second pipe; One end of the first pipe is connected to the first source bottle, the other end of the first pipe is connected to one end of the second pipe, and the other end of the second pipe is connected to the spraying device.

3. The gas transmission pipeline according to claim 2, characterized in that, Both the first pipe and the second pipe are straight pipes.

4. The gas transmission pipeline according to claim 1, characterized in that, The second bend in the pipe includes a third pipe and a fourth pipe; The extension directions of the third pipe and the fourth pipe intersect; One end of the third pipe is connected to the second source bottle, the other end of the third pipe is connected to one end of the fourth pipe, and the other end of the fourth pipe is connected to the spraying device.

5. The gas transmission pipeline according to claim 4, characterized in that, Both the third and fourth pipes are straight pipes.

6. The gas transmission pipeline according to claim 1, characterized in that, A first one-way valve is provided between the first source bottle and the first bend pipe, so that the gas in the first source bottle can be unidirectionally introduced into the first bend pipe. A second one-way valve is provided between the second source bottle and the second bend pipe, so that the gas in the second source bottle can flow into the second bend pipe in one direction.

7. The gas transmission pipeline according to claim 1, characterized in that, The spraying device includes a third one-way valve, through which gas is unidirectionally introduced into the spraying device.

8. The gas transmission pipeline according to claim 1, characterized in that, The roughness of the inner wall of the first bent pipe is less than or equal to 0.8 μm; and / or, the roughness of the inner wall of the second bent pipe is less than or equal to 0.8 μm.

9. An atomic layer deposition apparatus, characterized in that, include: The reaction chamber and the gas supply line as described in any one of claims 1 to 8, wherein gas output from the gas supply line enters the reaction chamber.

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