Air inlet device and coating equipment
By employing a three-stage uniform air intake device in the coating equipment, the problem of airflow turbulence is solved, achieving uniformity and stability of airflow, improving coating quality, reducing equipment size, and lowering costs.
Patent Information
- Application Number
- CN202423281575.3
- Authority / Receiving Office
- CN · China
- Patent Type
- Utility models(China)
- Current Assignee / Owner
- Filing Date
- 2024-12-30
- Publication Date
- 2025-11-28
- Estimated Expiration
- 2034-12-30
AI Technical Summary
In existing coating equipment, the gas flow rate is higher near the air inlet pipe and lower further away, resulting in turbulent airflow. Moreover, the turbulent airflow needs to travel a long distance to stabilize, which affects the coating quality and is not conducive to the miniaturization of the equipment.
The air intake device with a three-stage air equalization structure includes an air pipe assembly, a first air equalization assembly, a second air equalization assembly, and a third air equalization assembly. Through multiple through holes and baffles, it achieves uniformity and stability of airflow and shortens the airflow stabilization distance.
It improves coating quality, reduces equipment size and manufacturing costs, and ensures uniformity of coating operation by achieving a uniform and stable airflow over a short distance.
Smart Images
Figure CN223607364U_ABST
Abstract
Description
TECHNICAL FIELD
[0001] The present application relates to the technical field of semiconductor technology, in particular to an air inlet device and a coating equipment. BACKGROUND
[0002] A flange air inlet device is usually connected to the sidewall of a coating equipment, and an air inlet pipeline is connected to the flange air inlet device, and the air inlet pipeline is communicated with an air source. During a coating operation, the flange air inlet device is used to introduce gas into a reaction chamber to ensure the coating quality. However, the gas flow near the air inlet pipeline is relatively large, and the gas flow and intensity at positions close to and far from the air inlet pipeline are different, which causes the gas flow to be relatively turbulent when passing through the flange air inlet device into the reaction chamber, and the turbulent gas flow needs to flow for a long distance in the reaction chamber before it can recover to a relatively stable state, which is not conducive to reducing the size of the coating equipment. CONTENT OF THE UTILITY MODEL
[0003] The present application aims to at least solve one of the technical problems existing in the prior art. To this end, the present application provides an air inlet device which can improve the uniformity of the gas flow, shorten the distance of the stable gas flow, and be beneficial to reducing the size of the coating equipment.
[0004] The present application also provides a coating equipment having the above-mentioned air inlet device.
[0005] The air inlet device according to the first aspect of the present application comprises a device main body, an air pipe assembly, a first uniform gas assembly, a second uniform gas assembly and a third uniform gas assembly.
[0006] The air pipe assembly is provided with a first opening and a second opening, and the air pipe assembly is connected to the device main body.
[0007] The second uniform gas assembly is provided with a plurality of first through holes.
[0008] The third uniform gas assembly is provided with a plurality of second through holes.
[0009] In the first direction, the second uniform gas assembly is connected to the device main body, the first uniform gas assembly is connected to one side of the second uniform gas assembly close to the device main body, the third uniform gas assembly is connected to one side of the second uniform gas assembly away from the device main body, and the second opening faces the first uniform gas assembly. The air pipe assembly is configured to introduce air through the second opening, so that the gas passes through the first uniform gas assembly, the first through holes and the second through holes in sequence.
[0010] According to the gas inlet device provided by the embodiment of the present application, the device main body is used for connecting the side wall of the coating equipment, the first opening is used for connecting the gas source, the gas flowing out of the second opening passes through the first uniform gas assembly, the first through holes and the second through holes in sequence, and the first uniform gas assembly, the second uniform gas assembly and the third uniform gas assembly are used for uniformly distributing the gas flowing out of the second opening in sequence. Thus, the uniformity and stability of the gas flow can be improved in a short distance through three times of uniform distribution, which is beneficial to guarantee the coating quality during the coating operation. In addition, the shortening of the uniform distribution distance is also beneficial to reduce the volume of the coating equipment and reduce the manufacturing cost of the coating equipment.
[0011] According to some embodiments of the present application, the third uniform gas assembly comprises a first uniform gas member, a second uniform gas member and a connecting member, the first uniform gas member and the second uniform gas member are connected with the connecting member, the connecting member is connected with the second uniform gas assembly, and the first uniform gas member and the second uniform gas member are each provided with a plurality of second through holes.
[0012] In the first direction, the first uniform gas member is arranged at intervals with the second uniform gas member, and each first through hole of the first uniform gas member is projected outside each second through hole of the second uniform gas member.
[0013] According to some embodiments of the present application, the second uniform gas assembly comprises a plurality of accommodating cavities, the number of the third uniform gas assemblies is equal to the number of the accommodating cavities, and each third uniform gas assembly is located in a different accommodating cavity in one-to-one correspondence.
[0014] According to some embodiments of the present application, the first through hole and the second through hole are cross-sectioned along a plane perpendicular to the first direction, and the cross-sectional area of the first through hole is smaller than the cross-sectional area of the second through hole.
[0015] According to some embodiments of the present application, the first uniform gas assembly comprises a connecting portion and a flow blocking member, the connecting portion and the flow blocking member are connected, the connecting portion is connected with the second uniform gas assembly, in the first direction, the second opening, the flow blocking member and the region provided with the first through holes are arranged at intervals in sequence, and the second opening faces the flow blocking member.
[0016] According to some embodiments of the present application, the device main body is provided with a plurality of gas inlet cavities, the gas pipe assembly is provided with a plurality of second openings, the number of the gas inlet cavities, the second openings and the first uniform gas assemblies is equal, each second opening is connected with each gas inlet cavity in one-to-one correspondence, and each first uniform gas assembly is located in each gas inlet cavity in one-to-one correspondence.
[0017] According to some embodiments of the present application, in the first direction, the side of the second uniform gas assembly close to the device main body is provided with a mounting groove, and part of the first uniform gas assemblies are located in the mounting groove.
[0018] According to some embodiments of the present application, the first through holes are arranged at intervals, and the interval between the two adjacent first through holes is the same.
[0019] According to some embodiments of this application, the air intake device further includes an inlet pipe and an outlet pipe. The main body of the device includes a first main body and a second main body. The second main body is connected to the side of the first main body away from the second air distribution component. The first main body and the second main body together enclose a cooling cavity. The inlet pipe and the outlet pipe are both connected to the cooling cavity.
[0020] A coating apparatus according to a second aspect of this application includes an apparatus body and an air intake device as described in any of the above embodiments. The apparatus body is provided with a reaction chamber, and the air intake device is connected to the apparatus body.
[0021] The coating equipment according to the embodiments of this application has at least the following beneficial effects: the air inlet device is used to ensure the uniformity and stability of the gas introduced into the reaction chamber. Compared with the absence of an air inlet device, the stability of the gas is improved at the same distance, which is beneficial to improving the coating quality of the coating equipment. In addition, it is also beneficial to reduce the size of the coating equipment and reduce the manufacturing cost of the coating equipment.
[0022] Additional aspects and advantages of this application will be set forth in part in the description which follows, and in part will be obvious from the description, or may be learned by practice of this application. Attached Figure Description
[0023] The present application will be further described below with reference to the accompanying drawings and embodiments, wherein:
[0024] Figure 1 This is a schematic diagram of the air intake device according to an embodiment of this application;
[0025] Figure 2 for Figure 1 Sectional view at point AA;
[0026] Figure 3 for Figure 2 A magnified view of a portion of point A in the middle;
[0027] Figure 4 This is an exploded view of the air intake device according to an embodiment of this application;
[0028] Figure 5 for Figure 1 A cross-sectional view from another angle at point AA;
[0029] Figure 6 This is an exploded view of the air intake device according to an embodiment of this application from another perspective;
[0030] Figure 7 for Figure 5 A magnified view of a portion of point B in the middle.
[0031] Reference numerals: device body 100, first body 110, second body 120, air inlet chamber 121, cooling chamber 130;
[0032] trachea assembly 200, first opening 210, second opening 220;
[0033] first air uniforming assembly 300, connecting portion 310, flow blocking member 320;
[0034] second air uniforming assembly 400, first through hole 410, accommodating cavity 420, mounting groove 430;
[0035] third air uniforming assembly 500, first air uniforming member 510, second air uniforming member 520, second through hole 530, connecting member 540;
[0036] water inlet pipe 610, water outlet pipe 620. DETAILED DESCRIPTION
[0037] Embodiments of the present application are described below in detail, examples of which are shown in the drawings, wherein the same or similar reference signs represent the same or similar elements or elements having the same or similar functions throughout. The embodiments described below by referring to the drawings are exemplary, only for explaining the present application, and cannot be understood as a limitation to the present application.
[0038] In the description of the present application, it is understood that the orientation description, such as the orientation or position relationship indicated by up, down, front, back, left, right, etc. is based on the orientation or position relationship shown in the drawings, only for the purpose of describing the present application and simplifying the description, and is not intended to indicate or imply that the device or element referred to must have a particular orientation, be constructed and operated in a particular orientation, and therefore cannot be understood as a limitation to the present application.
[0039] In the description of the present application, the meaning of several is more than one, the meaning of multiple is more than two, greater than, less than, more than, etc. are understood as not including the number, above, below, etc. are understood as including the number. If the first, second is described, it is only for the purpose of distinguishing technical features, and cannot be understood as indicating or implying relative importance or implicitly indicating the number of indicated technical features or the order of indicated technical features.
[0040] In the description of the present application, unless otherwise explicitly limited, the words such as setting, mounting, connecting, etc. should be broadly understood, and the person skilled in the art can reasonably determine the specific meaning of the above words in the present application in combination with the specific content of the technical solution.
[0041] In the description of the present application, the description of the terms "one embodiment", "some embodiments", "exemplary embodiment", "example", "specific example", or "some examples" means that the specific features, structures, materials or characteristics described in connection with the embodiment or example are included in at least one embodiment or example of the present application. In the present specification, the exemplary description of the above terms does not necessarily refer to the same embodiment or example. Moreover, the specific features, structures, materials or characteristics described can be combined in any appropriate manner in one or more embodiments or examples.
[0042] The embodiments of the present application are described below in conjunction with the accompanying drawings:
[0043] Reference Figures 1 to 4 According to the gas inlet device of the present application, the gas inlet device is used for being installed on the sidewall of the reaction chamber of the coating equipment, and the gas enters the reaction chamber of the coating equipment through the gas inlet device. The gas inlet device comprises a device body 100, a gas pipe assembly 200, a first uniform gas assembly 300, a second uniform gas assembly 400 and a third uniform gas assembly 500. The gas pipe assembly 200 is provided with a first opening 210 and a second opening 220, and the gas pipe assembly 200 is connected with the device body 100. The second uniform gas assembly 400 is provided with a plurality of first through holes 410, and the third uniform gas assembly 500 is provided with a plurality of second through holes 530. Wherein, along the first direction, the second uniform gas assembly 400 is connected with the device body 100, the first uniform gas assembly 300 is connected on the side of the second uniform gas assembly 400 close to the device body 100, and the third uniform gas assembly 500 is connected on the side of the second uniform gas assembly 400 away from the device body 100. The first opening 210 is used for connecting the gas source, the gas source is used for introducing the gas into the gas pipe assembly 200, the gas in the gas pipe assembly 200 flows out from the second opening 220, and the second opening 220 is arranged along the first direction towards the first uniform gas assembly 300, so that the gas flow flowing out from the second opening 220 passes through the first uniform gas assembly 300, each first through hole 410 and each second through hole 530 in turn, realizes three times of uniform gas, and is beneficial to improving the uniformity and stability of the gas introduced into the reaction chamber.
[0044] Specifically, when the reaction chamber is ventilated, the gas flowing out of the second opening 220 flows to the first uniform gas assembly 300 in the first direction, and the gas is dispersed by impacting the first uniform gas assembly 300, that is, the first uniform gas process. There is a gap between the first uniform gas assembly 300 and the second uniform gas assembly 400, and the first uniform gas assembly 300 can block at least part of the first through hole 410, so as to avoid the gas flowing out of the second opening 220 directly passing through the first through hole 410 in the first direction. After the gas is dispersed by impacting the first uniform gas assembly 300, it passes through the gap between the first uniform gas assembly 300 and the second uniform gas assembly 400, and then enters and passes through each first through hole 410, effectively alleviating the situation that the gas flow of each first through hole 410 at different positions is different due to the different distances between each first through hole 410 and the second opening 220. The gas is distributed through a plurality of first through holes 410, that is, the second uniform gas process, which is beneficial to improve the uniformity of the gas passing through each first through hole 410. After the gas passes through each first through hole 410, it passes through each second through hole 530, and each second through hole 530 uniformly distributes the gas passing through each first through hole 410 again, that is, the third uniform gas process. Therefore, through three uniform gas processes, the gas entering the reaction chamber is more uniform and stable, which is beneficial to improve the film coating quality.
[0045] It should be noted that the gas flowing in the gas pipe assembly 200 is in a turbulent state, and after three uniform gas processes, the effect of laminar flow can be achieved. The gas inlet device of the present application shortens the distance required for the gas to change from a turbulent state to a stable state, which is beneficial to reduce the volume of the film coating equipment and reduce the manufacturing cost of the film coating equipment. When the gas passes through the gas inlet device and continues to flow to the reaction area in the reaction chamber, the gas is more stable and uniform, which is beneficial to ensure the uniformity of the film coating and improve the film coating quality.
[0046] Reference Figures 2 to 4In some embodiments, the third uniform gas component 500 comprises a first uniform gas member 510, a second uniform gas member 520, and a connecting member 540, the first uniform gas member 510 and the second uniform gas member 520 are both connected with the connecting member 540, the connecting member 540 is connected with the second uniform gas component 400, and the first uniform gas member 510 and the second uniform gas member 520 are both provided with a plurality of second through holes 530. In the first direction, the first uniform gas member 510 is arranged at intervals with the second uniform gas member 520, and each second through hole 530 provided on the first uniform gas member 510 is projected outside each second through hole 530 provided on the second uniform gas member 520, that is, the second through holes 530 provided on the first uniform gas member 510 are arranged at intervals with the second through holes 530 provided on the second uniform gas member 520, so that after the gas passes through the second through holes 530 provided on the first uniform gas member 510, the gas contacts the intervals between each second through hole 530 provided on the second uniform gas member 520 in the first direction, avoiding the gas directly passing through the second through holes 530 provided on the first uniform gas member 510 and the second uniform gas member 520 in the first direction, but dispersing after contacting the intervals between each second through hole 530 provided on the second uniform gas member 520, and then passing through each second through hole 530 provided on the second uniform gas member 520. The first uniform gas member 510 is used for splitting the gas, the second uniform gas member 520 is used for converging the gas, and the gas is split and converged to achieve the third uniform gas, which is beneficial to ensure the uniformity and stability of the gas.
[0047] Specifically, in the first direction, the second uniform gas component 400 splits the gas, and after the gas passes through the second uniform gas component 400, the gas passes through the first uniform gas member 510 and the second uniform gas member 520 in turn. The first uniform gas member 510 and the second uniform gas member 520 split and converge the gas passing through the second uniform gas component 400, which is beneficial to eliminate the vortex generated by the gas passing through the second uniform gas component 400 and ensure the uniformity of the gas.
[0048] Reference Figures 3 to 7 In some embodiments, the second uniform gas component 400 comprises a plurality of accommodating cavities 420, the number of the third uniform gas components 500 is equal to the number of the accommodating cavities 420, and the third uniform gas components 500 are located in the different accommodating cavities 420 one by one, that is, each accommodating cavity 420 contains one third uniform gas component 500. Each third uniform gas component 500 is connected with the second uniform gas component 400, the accommodating cavities 420 are used for accommodating the third uniform gas components 500, which is beneficial to reduce the thickness of the air inlet device. In addition, the gas in each accommodating cavity 420 is isolated from each other, which effectively avoids the mutual interference of the gas flow in each accommodating cavity 420, and is beneficial to ensure the stability of the gas flow.
[0049] Specifically, along the first direction, the cavity wall of the second uniform gas assembly 400 spaced apart from the third uniform gas assembly 500 is provided with a plurality of first through holes 410, the third uniform gas assembly 500 is provided with a plurality of second through holes 530, the gas enters the containing cavity 420 through each first through hole 410, and then exits the containing cavity 420 through each second through hole 530, the gas sequentially passes through the plurality of first through holes 410 and the plurality of second through holes 530, realizes the second uniform gas and the third uniform gas, effectively avoids the mutual interference of the gas in different containing cavities 420, and is beneficial to improve the uniformity of the gas.
[0050] Reference Figure 6 and Figure 7 In some embodiments, the first through hole 410 and the second through hole 530 are cross-sectioned along a plane perpendicular to the first direction, the cross-sectional area of the first through hole 410 is smaller than the cross-sectional area of the second through hole 530, and the second through hole 530 is provided with a larger cross-sectional area, which is beneficial to reduce the gas vortex generated when the gas passes through the first through hole 410, and in turn, the gas passing through the first through hole 410 and the second through hole 530 along the first direction is more uniform and stable.
[0051] Specifically, each first through hole 410 penetrates the second uniform gas assembly 400 along the first direction, each second through hole 530 penetrates the third uniform gas assembly 500 along the first direction, the axial direction of the first through hole 410 and the second through hole 530 is the first direction, the first through hole 410 can be a circular hole, and the second through hole 530 can be an oblong hole, the cross-sectional area of each first through hole 410 is the same, and the cross-sectional area of each second through hole 530 is also the same, each first through hole 410 is used for shunting the gas to improve the uniformity of the gas. Each second through hole 530 is used for shunting the gas passing through each first through hole 410 again, and the larger cross-sectional area can provide more space for the flow of the gas, which is beneficial to reduce the flow rate of the gas, thereby effectively eliminating the gas vortex generated when the gas passes through each first through hole 410, and ensuring the uniformity of the gas.
[0052] It should be noted that the first through hole 410 can be a circular hole with a diameter of 0.3mm, and the oblong hole is a hole comprising a rectangular main body portion and a semicircular hole connected to each end of the rectangular length.
[0053] Reference Figure 6 and Figure 7In some embodiments, the first uniform gas component 300 comprises a connecting part 310 and a flow blocking part 320, the connecting part 310 is connected with the flow blocking part 320, and the connecting part 310 is connected with the second uniform gas component 400. In the first direction, the second opening 220, the flow blocking part 320 and the region of the second uniform gas component 400 provided with the first through hole 410 are sequentially and separately arranged, and the second opening 220 is arranged towards the flow blocking part 320. The second opening 220 and the flow blocking part 320 are separately arranged to avoid the flow blocking part 320 blocking the second opening 220, so as to ensure the smoothness of the gas flow. The gas flowing out of the second opening 220 contacts the flow blocking part 320 and is dispersed, and then the dispersed gas flows into the first through hole 410 through the gap between the flow blocking part 320 and the region of the second uniform gas component 400 provided with the first through hole 410, which reduces the influence of the different distances between the first through hole 410 and the second opening 220 on the gas flow, and is beneficial to improve the situation that the gas flow through the first through hole 410 is uneven, and then ensures the uniformity of the gas after flowing through the first through hole 410.
[0054] It should be noted that the gas flowing out of the second opening 220 flows towards the flow blocking part 320, and the gas is dispersed after contacting the flow blocking part 320, which realizes the first uniform gas of the gas. The dispersed gas enters the first through hole 410 through the gap between the flow blocking part 320 and the second uniform gas component 400, and then passes through the first through hole 410, which realizes the second uniform gas of the gas.
[0055] Reference Figure 6 and Figure 7 In other embodiments, the gas pipe component 200 comprises a plurality of gas inlet pipes, each of which is provided with a first opening 210 and a second opening 220, and each of the first openings 210 is in communication with the gas source, and each of the second openings 220 is located at different positions. The first uniform gas component 300 comprises a plurality of flow blocking parts 320 and a plurality of connecting parts 310, the number of flow blocking parts 320 is equal to the number of connecting parts 310, and each of the flow blocking parts 320 is connected with the connecting part 310 one by one, and each of the connecting parts 310 is connected with the second uniform gas component 400, so that each of the flow blocking parts 320 has a gap with the second uniform gas component 400 in the first direction. In the first direction, the second openings 220 at different positions are respectively towards the flow blocking parts 320 at different positions, and each of the second openings 220 is arranged one by one with each of the flow blocking parts 320. The gas inlet through the plurality of second openings 220, and then the gas flow flowing out of each of the second openings 220 is blocked and dispersed by the plurality of flow blocking parts 320, which is beneficial to further enhance the stability of the gas flow.
[0056] It should be noted that the gas pressure and gas flow in the plurality of gas inlet pipes can not be equal, and the gas pressure and gas flow in each gas inlet pipe can be adjusted as needed to achieve more stable gas flow into the reaction chamber. Each gas inlet pipe can be a VCR pipe, which is beneficial to avoid gas leakage and ensure the vacuum environment in the reaction chamber.
[0057] Reference Figure 6 and Figure 7 In some embodiments, the device body 100 is provided with a plurality of gas inlet cavities 121, and the gas pipe assembly 200 is provided with a plurality of second openings 220. The number of the gas inlet cavities 121, the second openings 220 and the first uniform gas assemblies 300 is equal, and each second opening 220 is in one-to-one correspondence with each gas inlet cavity 121. Each first uniform gas assembly 300 is placed in each gas inlet cavity 121 in one-to-one correspondence. The gas inlet cavity 121 is used to accommodate the first uniform gas assembly 300, so that the thickness of the connection of the device body 100, the first uniform gas assembly 300 and the second uniform gas assembly 400 is the connection thickness of the device body 100 and the second uniform gas assembly 400. The part of the second uniform gas assembly 400 without the first through hole 410 abuts against the cavity wall of the gas inlet cavity 121, which is used to ensure that the gas flowing out of the second opening 220 passes through the first uniform gas assembly 300 and each first through hole 410 in turn, and avoid gas leakage.
[0058] Specifically, the device body 100 is provided with a plurality of gas inlet cavities 121, and the number of the gas inlet cavities 121, the second openings 220 and the flow barriers 320 is equal. Each second opening 220 is connected to one gas inlet cavity 121, and each gas inlet cavity 121 contains one flow barrier 320. The accommodation of the gas inlet cavity 121 to the flow barrier 320 is beneficial to reduce the thickness of the gas inlet device. In addition, it can also avoid the mutual interference of each second opening 220 when gas is flowing in, further ensuring the uniformity and stability of the gas flow.
[0059] Reference Figure 6 and Figure 7 In some embodiments, along the first direction, the side of the second uniform gas assembly 400 close to the device body 100 is provided with a mounting groove 430, and part of the first uniform gas assembly 300 is located in the mounting groove 430. This is beneficial to ensure the stability of the connection of the first uniform gas assembly 300 and the second uniform gas assembly 400, and also beneficial to reduce the connection thickness of the first uniform gas assembly 300 and the second uniform gas assembly 400.
[0060] Specifically, the second uniform gas assembly 400 comprises a region provided with a plurality of first through holes 410, the first through holes 410 are arranged at intervals, and the mounting grooves 430 are arranged at intervals between the first through holes 410. Part of the first uniform gas assembly 300 is located in the mounting grooves 430, that is, along the first direction, part of the first uniform gas assembly 300 is embedded in the second uniform gas assembly 400. On the basis of ensuring the stable connection of the first uniform gas assembly 300 and the second uniform gas assembly 400, the connection thickness of the first uniform gas assembly 300 and the second uniform gas assembly 400 is reduced, and the distance of the stable gas is shortened.
[0061] Reference Figure 7 In some embodiments, the first through holes 410 are arranged at intervals, and the intervals between adjacent two first through holes 410 are the same, so that the first through holes 410 are uniformly distributed on the second uniform gas assembly 400, which is beneficial to improve the uniformity of the gas passing through the second uniform gas assembly 400.
[0062] Specifically, the first through holes 410 can be equilateral triangle distributed, that is, the positions of the first through holes 410 are arranged according to the vertex positions of the equilateral triangle, so as to ensure the uniformity of the distribution of the first through holes 410, which is beneficial to improve the uniformity and stability of the second uniform gas.
[0063] It should be noted that the diameters of the first through holes 410 are equal, and the interval between the adjacent two first through holes 410 is the distance between the axis of one of the first through holes 410 and the axis of the other first through hole 410.
[0064] Reference Figures 1 to 3 In some embodiments, the gas inlet device further comprises a water inlet pipeline 610 and a water outlet pipeline 620, the device body 100 comprises a first body 110 and a second body 120, the first body 110 is connected with the second body 120, and the first body 110 and the second body 120 enclose a cooling cavity 130. The water inlet pipeline 610 and the water outlet pipeline 620 are both in communication with the cooling cavity 130. The water inlet pipeline 610 is used for introducing cooling liquid into the cooling cavity 130, and the water outlet pipeline 620 is used for flowing out of the cooling liquid, realizing the flow of the cooling liquid in the cooling cavity 130, cooling the gas inlet device, avoiding the damage of the heat accumulation to the gas inlet device, and being beneficial to ensuring the stability of the gas inlet device.
[0065] Specifically, along the first direction, the second uniform gas assembly 400 is connected to the side of the first body 110 away from the second body 120, and the water inlet pipeline 610 and the water outlet pipeline 620 can be connected with a circulating pump to realize the circulation of the cooling liquid in the cooling cavity 130, so as to avoid the temperature of the gas inlet device being too high.
[0066] Reference Figures 1 to 7According to the coating equipment, the gas is injected into the reaction chamber through the gas inlet device, which is beneficial to ensure the uniformity of the gas, so as to improve the coating quality. In addition, compared with not setting the gas inlet device, the distance of the gas becoming uniform is effectively shortened, thereby, it is beneficial to reduce the volume of the coating equipment, so that the coating equipment is more compact as a whole, and the manufacturing cost of the coating equipment is reduced.
[0067] Specifically, the equipment body further comprises a vacuum mechanical hand cavity, the reaction chamber is in communication with the vacuum mechanical hand cavity, the reaction chamber has a reaction area, the vacuum mechanical hand cavity has a mechanical hand, the mechanical hand is used for placing a wafer assembly to be coated in the reaction area, and is used for taking a wafer assembly coated from the reaction area. During the coating operation, the gas enters the reaction chamber through the gas inlet device, the gas passing through the gas inlet device is more uniform and stable, and there is a distance from the gas inlet device to the reaction area, which further improves the uniformity and stability of the gas. Therefore, the gas inlet device can shorten the distance of the gas changing from a turbulent state to a relatively stable state, so that the equipment body does not need to reserve a long gas flow path to ensure the stability of the gas flow, thereby reducing the volume of the equipment body, which is beneficial to reduce the manufacturing cost of the coating equipment.
[0068] The embodiments of the present application are described in detail above in combination with the drawings, but the present application is not limited to the above embodiments, and various changes can be made within the knowledge range of ordinary skilled in the art without departing from the purpose of the present application. In addition, the embodiments of the present application and the features in the embodiments can be combined with each other without conflict.
Claims
1. An air intake device characterized by, The air inlet device comprises: a device body; an air pipe assembly provided with a first opening and a second opening, the air pipe assembly being connected to the device body; a first air uniformization assembly; a second air uniformization assembly provided with a plurality of first through holes; a third air uniformization assembly provided with a plurality of second through holes; wherein, along a first direction, the second air uniformization assembly is connected to the device body, the first air uniformization assembly is connected to a side of the second air uniformization assembly close to the device body, the third air uniformization assembly is connected to a side of the second air uniformization assembly away from the device body, and the second opening faces the first air uniformization assembly, the air pipe assembly is configured to take in air through the second opening, so that the air passes through the first air uniformization assembly, each of the first through holes and each of the second through holes in sequence.
2. The air intake device of claim 1, wherein The third air uniformization assembly comprises a first air uniformization member, a second air uniformization member and a connecting member, the first air uniformization member and the second air uniformization member are connected to the connecting member, the connecting member is connected to the second air uniformization assembly, and the first air uniformization member and the second air uniformization member are each provided with a plurality of second through holes; wherein, along the first direction, the first air uniformization member and the second air uniformization member are arranged at intervals, and each of the first through holes of the first air uniformization member is projected outside each of the second through holes of the second air uniformization member.
3. The air intake device of claim 1, wherein The second air uniformization assembly comprises a plurality of accommodating cavities, the number of the third air uniformization assemblies is equal to the number of the accommodating cavities, and each of the third air uniformization assemblies is located in a different accommodating cavity in a one-to-one correspondence.
4. The air intake device of claim 1, wherein The first through hole is cross-sectioned along a plane perpendicular to the first direction, and the cross-sectional area of the first through hole is smaller than the cross-sectional area of the second through hole.
5. The air intake device of claim 1, wherein The first air uniformization assembly comprises a connecting portion and a flow blocking member, the connecting portion and the flow blocking member are connected, the connecting portion is connected to the second air uniformization assembly, along the first direction, the second opening, the flow blocking member and the region provided with each of the first through holes are arranged at intervals in sequence, and the second opening faces the flow blocking member.
6. The air intake device of claim 1, wherein The device body is provided with a plurality of air inlet cavities, the air pipe assembly is provided with a plurality of second openings, the number of the air inlet cavities, the second openings and the first air uniformization assemblies is equal, each of the second openings is in communication with each of the air inlet cavities in a one-to-one correspondence, and each of the first air uniformization assemblies is located in each of the air inlet cavities in a one-to-one correspondence.
7. The air intake device of claim 1, wherein Along the first direction, a mounting groove is arranged on a side of the second air uniformization assembly close to the device body, and part of the first air uniformization assemblies are located in the mounting groove.
8. The air intake device of claim 1, wherein Each of the first through holes is arranged at intervals, and adjacent two first through holes have the same interval.
9. The air intake device of any one of claims 1 to 8, wherein, The air inlet device further comprises a water inlet pipeline and a water outlet pipeline, the device body comprises a first body and a second body, the second body is connected to a side of the first body away from the second air uniformization assembly, the first body and the second body enclose a cooling cavity, and the water inlet pipeline and the water outlet pipeline are in communication with the cooling cavity.
10. A coating apparatus, characterized by, The air inlet device comprises: a device body provided with a reaction chamber; the air inlet device according to any one of claims 1 to 9, the air inlet device being connected to the device body.