Modularized ultra-pure semi-automatic gas switching device

Abstract

The utility model discloses a modularized ultra-pure semi-automatic gas switching device. A control valve and an emptying valve in the device are of an integrated modular structure, the structure comprises an integrated valve block, a control valve element and an emptying valve element, the control valve element and the emptying valve element are arranged on the integrated valve block, the integrated valve block comprises a first air inlet, a first air outlet and a second air outlet, a main channel communicated with the first air inlet and the first air outlet is arranged in the integrated valve block, and the emptying valve element controls on-off of the main channel; a bypass channel communicated with the main channel is further arranged in the integrated valve block, an outlet of the bypass channel is a second air outlet, and the switch valve element controls the bypass channel to be opened and closed. Through the arrangement of the modularized valve body structure, the control valve and the emptying valve form an integrated structure, a connecting pipeline is omitted, the dead volume is reduced, purging is facilitated, the production and experiment safety is guaranteed, and the gas purity is improved. And through the arrangement of a metal surface static sealing connection mechanism, the static sealing connection of all channels of the whole device is achieved, and the requirements for airtightness and purity of an ultra-pure gas production process are met.

Description

TECHNICAL FIELD

[0001] The utility model relates to the technical field of ultrapure gas pipeline connection, particularly relates to a modular ultrapure semi-automatic gas switching device. BACKGROUND

[0002] The semi-automatic gas switching device is widely applied in the fields of semiconductor, solar energy, biological pharmaceuticals and laboratories, and is mainly used for continuously supplying ultrapure gas without interruption. However, in the existing semi-automatic gas switching device, the left or right switch ball valve and the emptying ball valve are connected through a connecting pipe, which results in a large dead volume in the pipeline and makes it difficult to purge, especially for high corrosive toxic gas, it is difficult to meet the process requirements of ultrapure gas. For example, the prior art CN208951695U, a semi-automatic gas switching system, wherein the left inlet pressure gauge 5a and the left emptying ball valve 7a are connected through the left pipeline two 9a, and the right inlet pressure gauge 5b and the right emptying ball valve 7b are connected through the right pipeline two 9b.

[0003] In addition, the connection between each pipeline and valve body in the existing ordinary semi-automatic switching device is mostly conical thread connection. For example, in the prior art CN208951695U, the left pipeline one 8a and the left pipeline two 9a are connected to the left square five-way 6a through MC joints, the right pipeline one 8b and the right pipeline two 9b are connected to the right square five-way 6b through MC joints, the left inlet pressure gauge 5a, the left pressure reducing valve 2 and the left square five-way 6a are threadedly connected, the right inlet pressure gauge 5b, the right pressure reducing valve 3 and the right square five-way 6b are threadedly connected, and the low-pressure alarm device is threadedly connected with the left square five-way 6a or the right square five-way 6b. However, the conical thread connection is prone to leakage after long-term use, and cannot guarantee long-term air tightness, especially for high corrosive toxic gas, the air tightness cannot meet the requirements. Therefore, the existing ordinary semi-automatic switching device cannot meet the requirements under the condition that the content of ultrapure gas is more and more strictly calibrated.

[0004] Therefore, the existing semi-automatic gas switching device still has deficiencies in structure and needs to be further improved. How to create a new modular ultrapure semi-automatic gas switching device that at least overcomes one of the above technical problems. UTILITY MODEL CONTENTS

[0005] The utility model solves the technical problem to provide a modular ultrapure semi-automatic gas switching device, which is provided with an integrated modular structure, greatly saves the dead volume of the pipeline, is beneficial to purging, facilitates disassembly and assembly, guarantees the safety of production and experiment, realizes the connection between each pipeline and each valve body through metal face static sealing, achieves static sealing of the whole device, is not easy to leak, facilitates disassembly and assembly, is beneficial to online maintenance, meets the air tightness and purity requirements of ultrapure gas, and thus overcomes the deficiencies of the existing semi-automatic gas switching device.

[0006] To solve the above technical problems, the utility model provides a kind of modularization ultrahigh purity semi-automatic gas switching device, including left control valve, left evacuation valve, left pressure reducing valve, right control valve, right evacuation valve, right pressure reducing valve and total output valve, and the pipeline of connecting each valve body, left control valve and left evacuation valve are integrated modular structure, the integrated modular structure includes integrated valve block and left control valve core and left evacuation valve core being arranged on the integrated valve block, the integrated valve block includes first gas inlet, first gas outlet and second gas outlet, the inside of the integrated valve block is equipped with main channel that is connected with the first gas inlet and first gas outlet, left evacuation valve core controls the on-off of main channel, the inside of the integrated valve block is also equipped with with main channel communication branch channel, the outlet of branch channel is second gas outlet, left switch valve core controls the on-off of branch channel;

[0007] Right control valve and right evacuation valve adopt integrated modular structure which is symmetrical with the structure of left control valve and left evacuation valve.

[0008] Further improvement, the integrated valve block also includes third vent that is arranged opposite to the second gas outlet and is communicated, and the third vent is used as spare gas outlet of the second gas outlet, second gas inlet or other detection expansion port.

[0009] Further improvement, the integrated valve block adopts conical face ladder type structure, left control valve core and left evacuation valve core are arranged on two symmetrical conical faces of the conical face ladder type structure, first gas inlet and first gas outlet are correspondingly arranged on two conical face side walls of the conical face ladder type structure, second gas outlet and third vent are correspondingly arranged on two vertical face side walls of the conical face ladder type structure.

[0010] Further improvement, metal surface static sealing connection mechanism is used between the connection of the pipeline and each valve body.

[0011] The metal surface static sealing connection mechanism includes first convex spherical surface ring structure at the end of each pipeline and second convex spherical surface ring structure at the bottom end face of each valve body connecting counterbore, and annular gasket is arranged between the first convex spherical surface ring structure and the second convex spherical surface ring structure, and the end of each pipeline is also sleeved with nut with external thread, the inner wall of each mechanism connecting counterbore is provided with internal thread, the external thread of the nut is connected with the internal thread of the connecting counterbore, so that the first convex spherical surface ring structure is tightly abutted on one side of the annular gasket, the other side of the annular gasket is tightly abutted on the second convex spherical surface ring structure, and the metal surface static sealing of each pipeline and each valve body connecting counterbore is achieved.

[0012] Further improvement, the R arc radius of the first convex spherical annular structure and the second convex spherical annular structure is 0.8mm.

[0013] Further improvement, the each pipeline end is further provided with an expansion part, the first convex spherical annular structure is arranged on the top end side of the expansion part, and the extending end of the nut is abutted on the bottom end side of the expansion part.

[0014] Further improvement, the outer edge diameter of the expansion part is less than or equal to the hole diameter of the connecting counterbore.

[0015] After the design is adopted, the utility model has at least the following advantages:

[0016] 1. The modularized ultrahigh-purity semi-automatic gas switching device is provided with a modularized valve body structure, so that the existing control valve and the emptying valve form an integrated structure, the connecting pipeline is saved, the dead volume is reduced, the safety of production and experiment is ensured, and the purity of the supplied gas is improved.

[0017] 2. The third vent is provided, the integrated modularized structure is installed without difference, and the installation is convenient and fast. The third vent can be used as a second air inlet or other detection expansion port, so that the application range and effect are expanded.

[0018] 3. The connection mode between the pipelines and the valve bodies is a metal surface static sealing connection mechanism, the static sealing connection of the whole device is achieved, the problems that the existing tapered thread connection is easy to leak and is not easy to disassemble are overcome, the use time and the air tightness of the device are prolonged, online maintenance is facilitated, the air tightness and purity requirements of the ultrahigh-purity gas production process are met, and the continuous supply of high-corrosive toxic gas is suitable. BRIEF DESCRIPTION OF DRAWINGS

[0019] The above is only a summary of the technical scheme of the utility model, in order to more clearly understand the technical means of the utility model, the utility model will be further described in detail in combination with the drawings and the specific embodiments.

[0020] Figure 1 It is a whole structure schematic view of the modularized ultrahigh-purity semi-automatic gas switching device.

[0021] Figure 2 It is an internal passage section view of the integrated modularized structure in the modularized ultrahigh-purity semi-automatic gas switching device.

[0022] Figure 3 It is a top perspective view of the integrated modularized structure in the modularized ultrahigh-purity semi-automatic gas switching device.

[0023] Figure 4It is the sectional view of the metal surface static sealing connection mechanism of the integrated modular structure and pipeline connection in the modular ultrahigh-purity semi-automatic gas switching device. DETAILED DESCRIPTION

[0024] Exemplary embodiments of the present application will be described herein below with reference to the accompanying drawings. While exemplary embodiments of the present application are shown in the drawings, it is understood that the present application can be embodied in various forms and should not be limited by the embodiments set forth herein. Rather, these embodiments are provided so that this disclosure will be thorough and complete, and will fully convey the scope of the present application to those skilled in the art.

[0025] Referring to the drawings Figure 1 The modular ultrahigh-purity semi-automatic gas switching device of the present embodiment includes a mounting plate 10 and left control valve 11, left evacuation valve 12, left pressure reducing valve 13, left pressure gauge 14, right control valve 21, right evacuation valve 22, right pressure reducing valve 23, right pressure gauge 24, low pressure pressure gauge 31, total output valve 32 arranged thereon, and pipelines connecting the valve bodies. It should be noted that the left control valve 11, left evacuation valve 12, left pressure reducing valve 13, left pressure gauge 14, right control valve 21, right evacuation valve 22, right pressure reducing valve 23, right pressure gauge 24, low pressure pressure gauge 31, and total output valve 32 have the same functions as the existing semi-automatic gas switching device, and achieve uninterrupted supply of gas.

[0026] The improvement of the present embodiment lies in that the left control valve 11 and left evacuation valve 12 are an integrated modular structure. Referring to the drawings Figure 2 and 3 As shown in the drawings, the integrated modular structure includes an integrated valve block 101 and left control valve core and left evacuation valve core arranged on the integrated valve block 101. The integrated valve block 101 includes a first gas inlet 102, a first gas outlet 103, and a second gas outlet 104. The integrated valve block 101 is internally provided with a main passage 105 communicating the first gas inlet 102 and the first gas outlet 103, and the left evacuation valve core controls the opening and closing of the main passage 105. The integrated valve block 101 is also internally provided with a branch passage 106 communicating with the main passage 105, and the outlet of the branch passage 106 is the second gas outlet 104, and the left switch valve core controls the opening and closing of the branch passage 106. In use, the first gas inlet 102 is connected to a gas cylinder. When the left control valve core is closed and the left evacuation valve core is opened, gas enters from the first gas inlet 102, passes through the main passage 105, and is discharged from the first gas outlet 103. When the left control valve core is opened and the left evacuation valve core is closed, gas enters from the first gas inlet 102, passes through the branch passage 106, and is discharged from the second gas outlet 104 into the left pressure reducing valve 13.

[0027] The third vent 107 is arranged opposite to the second gas outlet 104 and is in communication with the second gas outlet 104. The third vent 107 can be used as a backup gas outlet of the second gas outlet 104. When the integrated modular structure is used on the left side of the gas switching device, the third vent 107 is used as a gas outlet connected with the left pressure reducing valve 13. At this time, the second gas outlet 104 is plugged. When the integrated modular structure is used on the right side of the gas switching device, the second gas outlet 104 is used as a gas outlet connected with the right pressure reducing valve 23. At this time, the third vent 107 is plugged. The structure can make the integrated valve block be installed without distinction, which is convenient and fast.

[0028] Of course, the third vent 107 can also be used as a second gas inlet for synchronous gas inlet with the first gas inlet 102. The third vent 107 can also be used as other detection expansion ports to improve the expansion function of the switching device.

[0029] More specifically, the integrated valve block 101 adopts a tapered stepped structure. The left control valve core and the left emptying valve core are arranged on two symmetrical tapered surfaces 1011 of the tapered stepped structure. The first gas inlet 102 and the first gas outlet 103 are arranged on two tapered side walls 1012 of the tapered stepped structure, respectively. The second gas outlet 104 and the third vent 107 are arranged on two vertical side walls 1013 of the tapered stepped structure, respectively. The structure of the integrated valve block is scientific and reasonable, which further reduces the dead volume.

[0030] More preferably, the connection between the pipeline and each valve body in the modular ultrahigh-purity semi-automatic gas switching device adopts a metal surface static sealing connection mechanism.

[0031] As shown in FIG. 6, the integrated valve block 101 is arranged in the gas switching device. The first gas inlet 102 is arranged on the left side of the integrated valve block 101. The first gas outlet 103 is arranged on the right side of the integrated valve block 101. The second gas outlet 104 is arranged on the top of the integrated valve block 101. The third vent 107 is arranged on the bottom of the integrated valve block 101. Figure 4The connection between the inlet pipe 1 and the first inlet port 102 of the integrated valve block 101 is shown in the cross-sectional view, and the connection between the outlet pipe 2 and the first outlet port 103 of the integrated valve block 101 is also shown in the cross-sectional view. The metal surface static sealing connection mechanism includes a first convex spherical annular structure 1001 at the end of the inlet pipe and a second convex spherical annular structure 1002 at the bottom end surface of the connecting counterbore of the integrated valve block, and a ring-shaped gasket 1003 is arranged between the first convex spherical annular structure 1001 and the second convex spherical annular structure 1002. The end of the inlet pipe 1 is also sleeved with a threaded nut 1004, and the inner wall of the connecting counterbore of the integrated valve block is provided with an internal thread 1005. The external thread of the threaded nut 1004 is connected with the internal thread 1005 of the connecting counterbore, so that the first convex spherical annular structure 1001 is tightly abutted on one side of the ring-shaped gasket 1003, and the other side of the ring-shaped gasket 1003 is tightly abutted on the second convex spherical annular structure 1002, thereby achieving the metal surface static sealing of the connecting counterbore of the integrated valve block 101 and the inlet pipe 1.

[0032] In this embodiment, the R arc radius of the first convex spherical annular structure 1001 and the second convex spherical annular structure 1002 is 0.8 mm. The pipe with this R arc characteristic belongs to a new UHCR connecting pipe, which can better achieve the metal surface sealing effect.

[0033] More specifically, the end of the inlet pipe 1 is also provided with an expansion part 1006, the first convex spherical annular structure 1001 is arranged on the top end side of the expansion part 1006, and the inserted end of the threaded nut 1004 is abutted on the bottom end side of the expansion part 1006, so as to ensure that when the threaded nut 1004 is connected with the connecting counterbore, the first convex spherical annular structure 1001 and the second convex spherical annular structure 1002 are tightly abutted on both sides of the ring-shaped gasket 1003, and the sealing effect is ensured.

[0034] The outer edge diameter of the expansion part 1006 is equal to the hole diameter of the connecting counterbore. Of course, the outer edge diameter of the expansion part 1006 can also be smaller than the hole diameter of the connecting counterbore.

[0035] Similarly, the connection between the outlet pipe 2 and the integrated valve block 101 also adopts the above-mentioned metal surface static sealing connection mechanism. In this embodiment, the connection between all pipes and valve bodies adopts the metal surface static sealing connection mechanism, so that the gas passages in the device are all metal surface static sealing, the full static sealing structure of the gas passages is realized, the gas tightness is ensured, and the installation and disassembly are convenient and fast.

[0036] The above merely describes preferred embodiments of the present application, and is not intended to limit the present application in any form. Those skilled in the art can make some simple modifications, equivalent changes or modifications to the disclosed technical contents, and all fall within the protection scope of the present application.

Claims

1. A modular ultrapure semi-automatic gas switching device comprising a left control valve, a left evacuation valve, a left pressure reducing valve, a right control valve, a right evacuation valve, a right pressure reducing valve, and a total output valve, and a pipe connecting each valve body, characterized in that, The left control valve and the left exhaust valve are an integrated modular structure, the integrated modular structure comprises an integrated valve block and a left control valve core and a left exhaust valve core arranged on the integrated valve block, the integrated valve block comprises a first gas inlet, a first gas outlet and a second gas outlet, the integrated valve block is internally provided with a main channel communicating the first gas inlet and the first gas outlet, the left exhaust valve core controls the opening and closing of the main channel, the integrated valve block is further internally provided with a branch channel communicating with the main channel, the outlet of the branch channel is the second gas outlet, and the left control valve core controls the opening and closing of the branch channel. The right control valve and the right exhaust valve adopt an integrated modular structure symmetrical to the structure of the left control valve and the left exhaust valve.

2. The modular ultrahigh purity semi-automatic gas switching device of claim 1, wherein, The integrated valve block further comprises a third gas vent arranged opposite to the second gas outlet and communicating with the second gas outlet, and the third gas vent is used as a backup gas outlet of the second gas outlet, a second gas inlet or other detection expansion port.

3. The modular ultrahigh purity semi-automatic gas switching device of claim 2, wherein, The integrated valve block adopts a tapered stepped structure, the left control valve core and the left exhaust valve core are arranged on two symmetrical tapered surfaces of the tapered stepped structure, the first gas inlet and the first gas outlet are respectively arranged on the side walls of the two tapered surfaces of the tapered stepped structure, and the second gas outlet and the third gas vent are respectively arranged on the side walls of the two vertical surfaces of the tapered stepped structure.

4. Modular ultrahigh purity semi-automatic gas switching device according to any one of claims 1 to 3, characterized in that The connection between the pipeline and each valve body adopts a metal surface static sealing connection mechanism. The metal surface static sealing connection mechanism comprises a first convex spherical surface ring structure at the end of each pipeline and a second convex spherical surface ring structure at the bottom end surface of each valve body connecting counterbore, and a ring-shaped gasket arranged between the first convex spherical surface ring structure and the second convex spherical surface ring structure, and each pipeline end is further provided with a nut with external threads, the inner wall of each mechanism connecting counterbore is provided with internal threads, the external threads of the nut are connected with the internal threads of the connecting counterbore, the first convex spherical surface ring structure is tightly abutted on one side of the ring-shaped gasket, the other side of the ring-shaped gasket is tightly abutted on the second convex spherical surface ring structure, and the metal surface static sealing of each pipeline and each valve body connecting counterbore is achieved.

5. The modular ultrahigh purity semi-automatic gas switching device of claim 4, wherein, The R arc radius of the first convex spherical surface ring structure and the second convex spherical surface ring structure is 0.8mm.

6. The modular ultrahigh purity semi-automatic gas switching device of claim 5, wherein, Each pipeline end is further provided with an expansion part, the first convex spherical surface ring structure is arranged on the top end side of the expansion part, and the extending end of the nut is abutted on the bottom end side of the expansion part.

7. The modular ultrahigh purity semi-automatic gas switching device of claim 6, wherein, The outer edge diameter of the expansion part is less than or equal to the hole diameter of the connecting counterbore.

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