Local particle spraying tool for mask plate

Abstract

The utility model discloses a local particle spraying tool for a mask plate. The local particle spraying tool comprises a base and a cover plate, a first placing structure for positioning and placing a mask plate and a second placing structure for positioning and placing the cover plate are arranged in the base, and the cover plate is used for covering the mask plate in the first placing structure when being arranged in the second placing structure; at least two through holes aligned with the mask plates in the first placement structure are formed in the cover plate, the cover plate is detachably connected with protective caps which correspond to the through holes and are used for sealing and covering the corresponding through holes, and the protective caps are used for opening the corresponding through holes after being detached from the cover plate. The local particle spraying tool for the mask plate can be used for locally spraying small particle balls on the surface of the mask plate, so that the small particle balls with different diameters can be sprayed on different areas on the surface of the same mask plate, and different pollution and defects can be simulated on the different areas on the surface of the same mask plate.

Description

TECHNICAL FIELD

[0001] The utility model relates to a kind of local particle spraying tool for mask plate. BACKGROUND

[0002] Currently, defect detection is a very important link in mask plate production process, and calibration plate can be used to assist in detecting defects of mask plate. By spraying particles of a certain size to the surface of mask plate, corresponding pollution and defects can be simulated on the surface of mask plate. After the mask plate with simulated pollution and defects is detected and qualified, it can be used as a calibration plate, which can be used to assist in detecting surface pollution and defects of mask plate. When the mask plate is made into a calibration plate, if particles of different diameters are sprayed locally in different areas on the surface of mask plate, different pollution and defects can be simulated in different areas of the same mask plate, thereby expanding the application range of the mask plate when used as a calibration plate. However, the existing equipment, such as atomizer, cannot spray particles locally in specific areas on the surface of mask plate, but can only spray particles on the entire surface of mask plate. Therefore, it is not possible to spray particles of different diameters in different areas on the surface of the same mask plate, and different pollution and defects cannot be simulated. SUMMARY

[0003] The technical problem to be solved by the utility model is to overcome the defects of the prior art and provide a local particle spraying tool for mask plate. The use of the local particle spraying tool for mask plate can spray particles locally on the surface of mask plate, thereby spray particles of different diameters in different areas on the surface of the same mask plate, and simulate different pollution and defects in different areas on the surface of the same mask plate.

[0004] To solve the above technical problems, the technical scheme of the utility model is as follows: a local particle spraying tool for mask plate, comprising a base and a cover plate.

[0005] The base is provided with a first placement structure for positioning and placing a mask plate and a second placement structure for positioning and placing the cover plate. When the cover plate is placed in the second placement structure, it is used to cover the mask plate in the first placement structure.

[0006] The cover plate is provided with at least two through holes aligned with the mask plate in the first placement structure.

[0007] The cover plate is detachably connected with a protective cap corresponding to the through hole and used to cover the corresponding through hole. The protective cap is used to open the corresponding through hole after being detached from the cover plate.

[0008] Further, the first placing structure comprises a first positioning slot arranged in the base and a supporting block connected to the base, the mask plate is arranged in the first positioning slot, and the supporting block is used for supporting the mask plate arranged in the first positioning slot.

[0009] The second placing structure comprises a second positioning slot arranged in the base and a bearing part arranged in the base, the cover plate is arranged in the second positioning slot, and the bearing part is used for supporting the cover plate arranged in the second positioning slot.

[0010] The second positioning slot is located above the first positioning slot, so that the cover plate covers the mask plate arranged in the first positioning slot when the cover plate is arranged in the second positioning slot.

[0011] Further, at least one abutting bolt is threadedly connected in the base, the abutting bolt is used for being screwed to abut against the sidewall of the mask plate in the first positioning slot to abut and fix the mask plate in the first positioning slot.

[0012] Further, an avoiding slot is arranged in the base and communicates with the first positioning slot and is located at the side of the first positioning slot, and the first positioning slot and the avoiding slot both penetrate through the base.

[0013] Further, the depth of the first positioning slot is greater than the thickness of the mask plate.

[0014] Further, a locking mechanism is connected to the base and is used for locking the cover plate in the second positioning slot.

[0015] Further, a specific structure of the locking mechanism is provided, the locking mechanism comprises at least one locking assembly, the locking assembly comprises a pressing plate and a fastening bolt, a bolt hole is arranged in the pressing plate, the fastening bolt is threadedly connected to the base after penetrating through the bolt hole, and the fastening bolt is used for locking the pressing plate after the pressing plate is turned to press the cover plate in the second positioning slot, so as to press and limit the cover plate in the second positioning slot.

[0016] Further, an upwardly protruding convex ring part corresponding to the through hole is arranged on the upper surface of the cover plate, the through hole is located at the inner side of the corresponding convex ring part, and the protective cap is used for being detachably connected to the convex ring part and covering the corresponding through hole.

[0017] Further, the protective cap is detachably connected to the convex ring part through threads, or the protective cap is detachably connected to the convex ring part through buckling.

[0018] Further, a first handle is connected to the base, and a second handle is connected to the cover plate.

[0019] After the above technical scheme is adopted, the base, the cover plate, the protective cap and the like are all subjected to ultrasonic cleaning before use, then the mask plate is positioned and placed in the first placement structure, the cover plate is placed in the second placement structure, at this time the cover plate covers the mask plate in the first placement structure, one of the protective caps corresponding to the through holes is disassembled to open the corresponding through hole, then the existing equipment such as an atomizer is used to spray the small particles to the surface of the mask plate from the opened through hole, since the mask plate is covered and shielded by the cover plate and the protective cap, only the area on the mask plate corresponding to the opened through hole is sprayed with the small particles, thus the mask plate using the local particle spraying tool of the embodiment of the present application can realize local spraying of the small particles to the specific area on the surface of the mask plate. The through holes are provided with four, which are marked as No. 1, No. 2, No. 3 and No. 4. First, the protective cap corresponding to the No. 1 through hole is disassembled to open the No. 1 through hole, then the existing equipment such as an atomizer is used to spray the small particles of the first diameter to the surface of the mask plate from the No. 1 through hole. After the end, the No. 1 through hole is re-covered and plugged by using the protective cap and the protective cap corresponding to the No. 2 through hole is disassembled to open the No. 2 through hole, then the small particles of the second diameter are sprayed to the surface of the mask plate from the No. 2 through hole. After the end, the No. 2 through hole is re-covered and plugged by using the protective cap and the protective cap corresponding to the No. 3 through hole is disassembled to open the No. 3 through hole, then the small particles of the third diameter are sprayed to the surface of the mask plate from the No. 3 through hole. After the end, the No. 3 through hole is re-covered and plugged by using the protective cap and the protective cap corresponding to the No. 4 through hole is disassembled to open the No. 4 through hole, then the small particles of the fourth diameter are sprayed to the surface of the mask plate from the No. 4 through hole, thereby the small particles of different diameters can be sprayed to different areas on the surface of the same mask plate, thereby different pollution and defects can be simulated on different areas of the same mask plate, and the same area on the mask plate can be prevented from being repeatedly sprayed with the small particles by installing the protective cap. BRIEF DESCRIPTION OF DRAWINGS

[0020] Figure 1 It is a structural schematic view of the base of the present application;

[0021] Figure 2 It is a structural schematic view of the cover plate of the present application;

[0022] Figure 3 It is a structural schematic view of the mask plate installed in the base of the present application;

[0023] Figure 4 It is a structural schematic view of the cover plate installed in the base of the present application;

[0024] In the figure: 1, base; 2, cover plate; 3, mask plate; 4, through hole; 5, protective cap; 6, first positioning groove; 7, support block; 8, second positioning groove; 9, bearing part; 10, abutting bolt; 11, mounting hole; 12, avoiding groove; 13, pressing plate; 14, fastening bolt; 15, convex ring part; 16, first handle; 17, second handle. DETAILED DESCRIPTION

[0025] In order to make the content of the utility model more easily be clearly understood, the following according to specific embodiment and combining with the drawings, the utility model is further detailed.

[0026] As Figures 1-4 Indicated, a kind of mask plate is with local particle spraying tooling, including base 1 and cover plate 2;

[0027] The base 1 is equipped with the first placement structure for positioning placing mask plate 3 and the second placement structure for positioning placing the cover plate 2, the cover plate 2 is placed in the second placement structure when for covering the top of mask plate 3 in the first placement structure;

[0028] The cover plate 2 is equipped with at least two through holes 4 aligned with mask plate 3 in the first placement structure;

[0029] The cover plate 2 is detachably connected with protective cap 5 corresponding to the through hole 4 and for covering the corresponding through hole 4, the protective cap 5 is used to be removed from the cover plate 2 to make the corresponding through hole 4 open.

[0030] Specifically, before use, first ultrasonic cleaning is carried out to base 1, cover plate 2, protective cap 5 etc., then mask plate 3 is positioned and placed in the first placement structure, the cover plate 2 is placed in the second placement structure, at this time, the cover plate 2 covers the top of mask plate 3 in the first placement structure, one of the through holes 4 corresponding protective cap 5 is removed to make the corresponding through hole 4 be opened, then existing equipment such as atomizer is used to spray particle ball to the surface of mask plate 3 from the opened through hole 4, since the mask plate 3 is covered and shielded by the cover plate 2 and the protective cap 5, therefore only the area corresponding to the opened through hole 4 on the mask plate 3 can be sprayed to particle ball, therefore after using the mask plate of the application embodiment is with local particle spraying tooling, the surface of mask plate 3 can be realized to spray particle ball in specific area locally.

[0031] In the embodiment, four through holes 4 are provided, which are marked as No. 1, No. 2, No. 3 and No. 4 respectively. First, the protective cap 5 corresponding to the No. 1 through hole 4 is removed to open the No. 1 through hole 4, and then the existing device such as an atomizer is used to spray the first diameter of particle balls from the No. 1 through hole 4 to the surface of the mask plate 3. After finishing, the No. 1 through hole 4 is resealed by using the protective cap 5, and the protective cap 5 corresponding to the No. 2 through hole 4 is removed to open the No. 2 through hole 4, and then the second diameter of particle balls is sprayed from the No. 2 through hole 4 to the surface of the mask plate 3. After finishing, the No. 2 through hole 4 is resealed by using the protective cap 5, and the protective cap 5 corresponding to the No. 3 through hole 4 is removed to open the No. 3 through hole 4, and then the third diameter of particle balls is sprayed from the No. 3 through hole 4 to the surface of the mask plate 3. After finishing, the No. 3 through hole 4 is resealed by using the protective cap 5, and the protective cap 5 corresponding to the No. 4 through hole 4 is removed to open the No. 4 through hole 4, and then the fourth diameter of particle balls is sprayed from the No. 4 through hole 4 to the surface of the mask plate 3, so that different diameters of particle balls can be sprayed on different areas of the surface of the same mask plate 3, and different contaminations and defects can be simulated on different areas of the same mask plate 3, and the same area of the mask plate 3 can be prevented from being repeatedly sprayed by particle balls by installing the protective cap 5.

[0032] Further specifically, the number and arrangement of the through holes 4 on the cover plate 2 can be freely set according to requirements, and in some embodiments, the through holes 4 can be provided with two or three or any number of through holes. The base 1 and the cover plate 2 can be made of non-metallic materials, and the protective cap 5 can correspond to the through holes 4 one by one.

[0033] As shown in Figures 1-4 The first placing structure can include a first positioning groove 6 provided in the base 1 and a support block 7 connected to the base 1, and the mask plate 3 is positioned and placed in the first positioning groove 6, and the support block 7 is used to hold the mask plate 3 placed in the first positioning groove 6.

[0034] The second placing structure can include a second positioning groove 8 provided in the base 1 and a bearing part 9 provided in the base 1, and the cover plate 2 is positioned and placed in the second positioning groove 8, and the bearing part 9 is used to hold the cover plate 2 placed in the second positioning groove 8.

[0035] The second positioning groove 8 is located above the first positioning groove 6 so that the cover plate 2 covers the mask plate 3 in the first positioning groove 6 when the cover plate 2 is installed in the second positioning groove 8; in this embodiment, the cover plate 2 is a square structure, and the bearing part 9 is provided with four, each of which is used to hold one corner of the cover plate 2; further, the mask plate 3 is also a square structure, and the support block 7 is provided with four, each of which is used to hold one corner of the mask plate 3, and the area of the support block 7 holding the mask plate 3 is less than 5mm×5mm, thereby reducing the contact of the support block 7 on the mask plate 3 under the premise of ensuring the safety of fixation.

[0036] As shown in Figures 1-4 The base 1 is threadedly connected with at least one abutting bolt 10, which is used to be screwed to the side wall of the mask plate 3 in the first positioning groove 6 to abut and fix the mask plate 3 in the first positioning groove 6; specifically, the base 1 is provided with a mounting hole 11, and the abutting bolt 10 is installed in the mounting hole 11.

[0037] As shown in Figures 1-4 The base 1 is provided with an avoidance groove 12 which is communicated with the first positioning groove 6 and located at the side of the first positioning groove 6, and the first positioning groove 6 and the avoidance groove 12 both penetrate through the base 1; in this embodiment, the avoidance groove 12 is provided with four.

[0038] In this embodiment, the depth of the first positioning groove 6 is greater than the thickness of the mask plate 3, thereby preventing the upper surface of the mask plate 3 from contacting the cover plate 2.

[0039] As shown in Figures 1-4As shown, the base 1 is connected with a locking mechanism for locking the cover plate 2 in the second positioning groove 8, the locking mechanism can include at least one locking assembly, the locking assembly can include a pressing plate 13 and a fastening bolt 14, the pressing plate 13 is provided with a bolt hole, the fastening bolt 14 is threadedly connected to the base 1 after passing through the bolt hole, and the fastening bolt 14 is used to lock the pressing plate 13 after the pressing plate 13 is turned to press the cover plate 2 in the second positioning groove 8, thereby pressing the cover plate 2 to be defined in the second positioning groove 8. Specifically, in use, first place the mask plate 3 in the first positioning groove 6 and support the mask plate 3 by the supporting block 7, then tighten the abutting bolt 10 to abut against the side wall of the mask plate 3 in the first positioning groove 6, and then fix the mask plate 3 in the first positioning groove 6, so that the mask plate 3 will not fall or shift when placed vertically or obliquely. Then place the cover plate 2 in the second positioning groove 8, turn the pressing plate 13 to press the cover plate 2 in the second positioning groove 8, and then tighten the fastening bolt 14 to press the cover plate 2 to be defined in the second positioning groove 8, so that the cover plate 2 will not fall or shift when placed vertically or obliquely. The mask plate local particle spraying tool using the mask plate of the embodiment can more conveniently and quickly accurately spray small particles on the surface of the mask plate 3, can reduce the manufacturing cost of local particle spraying, and reduce mis-spraying and mis-spraying. In the embodiment, the locking assembly is provided with four.

[0040] As shown in Figure 2 , 4 As shown, the upper surface of the cover plate 2 is provided with a convex ring part 15 protruding upward and corresponding to the through hole 4, the through hole 4 is located on the inner side of the corresponding convex ring part 15, and the protective cap 5 is used to be detachably connected to the convex ring part 15 and cover the corresponding through hole 4. In the embodiment, the protective cap 5 can be detachably connected to the convex ring part 15 through threads, and of course in some embodiments, the protective cap 5 can also be detachably connected to the convex ring part 15 through buckling.

[0041] As shown in Figures 1-4 As shown, the base 1 is connected with a first handle 16, and the cover plate 2 is connected with a second handle 17. In turn, it is convenient to take the base 1 and the cover plate 2.

[0042] In summary, before use, all of the base 1, the cover plate 2, the protective cap 5 and the like are ultrasonically cleaned, then the mask plate 3 is positioned and placed in the first placement structure, the cover plate 2 is placed in the second placement structure, at this time, the cover plate 2 covers the mask plate 3 in the first placement structure, one of the protective caps 5 corresponding to the through hole 4 is removed to open the corresponding through hole 4, then existing equipment such as an atomizer is used to spray particle pellets from the opened through hole 4 to the surface of the mask plate 3, since the mask plate 3 is covered and shielded by the cover plate 2 and the protective cap 5, only the area on the mask plate 3 corresponding to the opened through hole 4 is sprayed with particle pellets, thus the mask plate 3 using the local particle spraying tool of the application can realize local spraying of particle pellets on a specific area of the surface of the mask plate 3. The through hole 4 is provided with four, marked as No. 1, No. 2, No. 3 and No. 4. First, the protective cap 5 corresponding to the No. 1 through hole 4 is removed to open the No. 1 through hole 4, then existing equipment such as an atomizer is used to spray particle pellets of a first diameter from the No. 1 through hole 4 to the surface of the mask plate 3. After completion, the No. 1 through hole 4 is re-covered and sealed by the protective cap 5, and the protective cap 5 corresponding to the No. 2 through hole 4 is removed to open the No. 2 through hole 4, then particle pellets of a second diameter are sprayed from the No. 2 through hole 4 to the surface of the mask plate 3. After completion, the No. 2 through hole 4 is re-covered and sealed by the protective cap 5, and the protective cap 5 corresponding to the No. 3 through hole 4 is removed to open the No. 3 through hole 4, then particle pellets of a third diameter are sprayed from the No. 3 through hole 4 to the surface of the mask plate 3. After completion, the No. 3 through hole 4 is re-covered and sealed by the protective cap 5, and the protective cap 5 corresponding to the No. 4 through hole 4 is removed to open the No. 4 through hole 4, then particle pellets of a fourth diameter are sprayed from the No. 4 through hole 4 to the surface of the mask plate 3, thus particle pellets of different diameters can be sprayed on different areas of the surface of the same mask plate 3, thus different pollution and defects can be simulated on different areas of the same mask plate 3, and the same area on the mask plate 3 can be prevented from being repeatedly sprayed with particle pellets by installing the protective cap 5.

[0043] The above-described specific embodiments further specifically describe the technical problems solved by the application, the technical solutions and the beneficial effects. It should be understood that the above-described embodiments are merely specific embodiments of the application and are not intended to limit the application. Any modification, equivalent replacement, improvement and the like made within the spirit and principle of the application shall be included in the protection scope of the application.

Claims

1. A tooling for localized particle spraying of a photomask, characterized in that, Includes a base (1) and a cover plate (2); The base (1) is provided with a first placement structure for positioning and placing the mask plate (3) and a second placement structure for positioning and placing the cover plate (2). When the cover plate (2) is placed in the second placement structure, it is used to cover the mask plate (3) in the first placement structure. The cover plate (2) is provided with at least two through holes (4) aligned with the mask plate (3) in the first placement structure. The cover plate (2) is detachably connected to a protective cap (5) corresponding to the through hole (4) and used to cover the corresponding through hole (4). The protective cap (5) is used to open the corresponding through hole (4) after being removed from the cover plate (2).

2. The local particle spraying fixture for a mask according to claim 1, characterized in that, The first placement structure includes a first positioning groove (6) disposed in the base (1) and a support block (7) connected to the base (1). The mask plate (3) is used to position and place in the first positioning groove (6), and the support block (7) is used to support the mask plate (3) placed in the first positioning groove (6). The second placement structure includes a second positioning groove (8) provided in the base (1) and a supporting part (9) provided in the base (1). The cover plate (2) is used to position and place in the second positioning groove (8), and the supporting part (9) is used to support the cover plate (2) placed in the second positioning groove (8). The second positioning groove (8) is located above the first positioning groove (6) so that when the cover plate (2) is installed in the second positioning groove (8), it covers the mask plate (3) in the first positioning groove (6).

3. The local particle spraying fixture for a mask according to claim 2, characterized in that, The base (1) is threaded with at least one clamping bolt (10), which is used to be screwed to abut against the side wall of the mask plate (3) in the first positioning groove (6) to fix the mask plate (3) in the first positioning groove (6).

4. The local particle spraying fixture for a mask according to claim 2, characterized in that, The base (1) is provided with a clearance groove (12) that communicates with the first positioning groove (6) and is located on the side of the first positioning groove (6). Both the first positioning groove (6) and the clearance groove (12) penetrate the base (1).

5. The local particle spraying fixture for a mask according to claim 2, characterized in that, The depth of the first positioning groove (6) is greater than the thickness of the mask plate (3).

6. The local particle spraying fixture for a mask according to claim 2, characterized in that, The base (1) is connected to a locking mechanism for locking the cover plate (2) in the second positioning groove (8).

7. The local particle spraying fixture for a mask according to claim 6, characterized in that, The locking mechanism includes at least one locking component, which includes a pressure plate (13) and a fastening bolt (14). The pressure plate (13) has a bolt hole, and the fastening bolt (14) passes through the bolt hole and is threaded onto the base (1). The fastening bolt (14) is used to lock the pressure plate (13) after the pressure plate (13) rotates to press the cover plate (2) in the second positioning groove (8), thereby pressing and confining the cover plate (2) in the second positioning groove (8).

8. The local particle spraying fixture for a mask according to claim 1, characterized in that, The upper surface of the cover plate (2) is provided with an upward protruding ring portion (15) that corresponds one-to-one with the through hole (4). The through hole (4) is located inside the corresponding protruding ring portion (15). The protective cap (5) is used to detachably connect to the protruding ring portion (15) and cover the corresponding through hole (4).

9. The local particle spraying fixture for a mask according to claim 8, characterized in that, The protective cap (5) is detachably connected to the protruding ring (15) by means of threads, or the protective cap (5) is detachably connected to the protruding ring (15) by means of a snap fastener.

10. The local particle spraying fixture for a mask according to claim 1, characterized in that, The base (1) is connected to a first handle (16), and the cover plate (2) is connected to a second handle (17).

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