Double-sided detection equipment for appearance defects after packaging and bonding of IGBT (Insulated Gate Bipolar Translator)

Abstract

The utility model discloses double-sided detection equipment for appearance defects of an IGBT (Insulated Gate Bipolar Translator) after packaging and bonding, which comprises a marble table surface, a lower-layer XYZ-axis movement module, a detection transmission line, an upper-layer XYZ-axis movement module, a front optical detection module and a back optical detection module are sequentially arranged on the marble table surface upwards, and two groups of fixed plates are fixedly connected onto the marble table surface; the lower-layer XYZ-axis movement module is arranged on the marble table top, the detection transmission line and the upper-layer XYZ-axis movement module are sequentially arranged above the lower-layer XYZ-axis movement module through fixing plates, and the front optical detection module is arranged on the upper-layer XYZ-axis movement module. A single platform carries different optical modules to meet different detection requirements, the platforms can be produced in batches, and the production cost is saved; compared with the existing single-side detection equipment, the device has the advantages that the back side detection function is added, the wider customer requirements are met, and the improvement of the product quality is facilitated.

Description

TECHNICAL FIELD

[0001] The utility model relates to the technical field of semiconductor manufacturing, especially to a kind of IGBT encapsulation bonding appearance defect double-sided detection equipment. BACKGROUND

[0002] As the post-process of semiconductor manufacturing, packaging process includes back grinding, dicing, die bonding, wire bonding and molding steps, and the quality control requirements of semiconductor packaging technology are strict, and any defect that affects product quality and reduces product service life is not allowed, therefore, the control requirements of production process quality in production process are extremely high, and currently, the detection items of WB process section on the market are usually product front appearance detection, with the development of market, higher requirements are put forward for appearance defect detection of WB process section, under the condition of meeting product front appearance detection, requirements for product back detection are also put forward;

[0003] The types of defects generated in WB process are various, and the traditional inspection method is artificial visual inspection, workers are professionally trained, a large number of professional workers are put into clean and closed space, and even professional skilled workers are emotional and subjective, therefore, product quality control may fluctuate, resulting in defective products flowing out and economic loss. UTILITY MODEL CONTENT

[0004] The utility model aims at at least solving one of the technical problems existing in prior art, providing a kind of IGBT encapsulation bonding appearance defect double-sided detection equipment, the device can be combined offline operation mode and can be combined online operation mode, can flexibly select working mode according to production demand;The device realizes platformization modularization operation, and different optical modules are carried on single platform to meet different detection needs, and the platform can be mass-produced, saving production cost, not only improve the versatility of equipment, but also reduce the time and cost waste caused by frequent replacement of equipment;Compared with existing single-sided detection equipment, the device increases back detection function, meets more extensive customer demand, and helps to improve product quality.

[0005] The utility model also provides have above-mentioned IGBT package bonding appearance defect double -faced detection equipment, include: marble platform, marble platform is provided with lower layer XYZ axis movement module, detection transmission line and upper layer XYZ axis movement module, front optical detection module, back optical detection module in proper order to the upper, marble platform is fixedly connected with two groups of fixed plate, lower layer XYZ axis movement module sets up on marble platform, detection transmission line and upper layer XYZ axis movement module group respectively through fixed plate and set up in the upper of lower layer XYZ axis movement module in proper order, front optical detection module sets up on upper layer XYZ axis movement module, back optical detection module sets up on lower layer XYZ axis movement module, front optical detection module and back optical detection module include main camera, double telephoto lens, four eyes structure light sensor and high angle annular light source.

[0006] According to the utility model discloses a kind of IGBT package bonding appearance defect double -faced detection equipment, upper layer XYZ axis movement module includes X axis movement module, Y axis movement module and Z axis movement module, the X axis movement module is slidably installed on the Y axis movement module, the Z axis movement module is slidably installed on the X axis movement module, can be more flexible movement, the structure of lower layer XYZ axis movement module (2) is consistent with upper layer XYZ axis movement module (4).

[0007] According to the utility model discloses a kind of IGBT package bonding appearance defect double -faced detection equipment, the outer surface of front optical detection module and back optical detection module is fixedly connected with lens mounting plate, and front optical detection module and back optical detection module are slidably connected with the corresponding Z axis movement module by lens mounting plate, can improve the coherence between device.

[0008] According to the utility model discloses a kind of IGBT package bonding appearance defect double -faced detection equipment, the outer surface of lens mounting plate is fixedly connected with lens fixing seat, and double telephoto lens is fixed by lens fixing seat, and high angle annular light source is fixedly connected with lens fixing seat, can ensure the stability of device.

[0009] According to the utility model discloses a kind of IGBT package bonding appearance defect double -faced detection equipment, four cameras of four eye structure light sensor are installed in the four around of double telephoto lens, adopt the way of oblique projection to make four eye structure light sensor and double telephoto lens keep concentric, can improve the comprehensiveness of detection.

[0010] The utility model discloses a kind of IGBT encapsulation bonding appearance defect double-sided detection equipment, the front optical detection module further includes three-color combination light source, the upper surface of the three-color combination light source is fixedly connected with light source mounting plate, the three-color combination light source is fixedly connected with lens mounting plate by light source mounting plate, using red, green, blue three colors of light source, can improve the contrast of measured object surface, let details be more clear, different colors can highlight the characteristics of different materials or surface, especially on the sample of more complex color or strong reflectivity.

[0011] The utility model discloses a kind of IGBT encapsulation bonding appearance defect double-sided detection equipment, the front optical detection module further includes code reader, the outer surface of the code reader is fixedly connected with code reader mounting plate, the code reader is fixedly connected with lens mounting plate by code reader mounting plate, the information of workpiece can be effectively read.

[0012] The utility model discloses a kind of IGBT encapsulation bonding appearance defect double-sided detection equipment, the detection transmission line includes two parallel belt transmission lines, and one of them can be moved along the vertical direction of belt transmission line, can be adjusted, adapt to the workpiece of different size.

[0013] The utility model discloses a kind of IGBT encapsulation bonding appearance defect double-sided detection equipment, the inlet end of the detection transmission line is provided with ion wind dust removal device, can remove dust, reduce the interference of dust.

[0014] Beneficial effects

[0015] 1, compared with prior art, the novel IGBT encapsulation bonding appearance defect double-sided detection equipment, the device can be combined off-line operation mode and can be combined online operation mode, can flexibly select working mode according to production demand.

[0016] 2, compared with prior art, the novel IGBT encapsulation bonding appearance defect double-sided detection equipment, the device realizes platformization modularization operation, and different optical modules are carried on single platform to meet different detection needs, can mass production platform, save production cost, not only improve the versatility of equipment, also reduce the time and cost waste due to frequent replacement of equipment.

[0017] 3, compared with prior art, the novel IGBT encapsulation bonding appearance defect double-sided detection equipment, the device is relative to existing single-sided detection equipment, increase back detection function, so that the detection of product is more comprehensive, can effectively identify potential defects, satisfy more extensive customer demand, help product quality improvement. BRIEF DESCRIPTION OF DRAWINGS

[0018] The utility model is further described below in connection with drawings and embodiment;

[0019] Figure 1 It is the three-dimensional structure diagram of IGBT packaging bonding appearance defect double-sided detection equipment of the utility model;

[0020] Figure 2 It is the front optical detection module structure schematic diagram of IGBT packaging bonding appearance defect double-sided detection equipment of the utility model;

[0021] Figure 3 It is the back optical detection module structure schematic diagram of IGBT packaging bonding appearance defect double-sided detection equipment of the utility model;

[0022] Figure 4 It is the upper layer XYZ axis movement module structure schematic diagram of IGBT packaging bonding appearance defect double-sided detection equipment of the utility model.

[0023] Legend:

[0024] 1, marble countertop; 2, lower layer XYZ axis movement module; 3, detection transmission line; 4, upper layer XYZ axis movement module; 5, front optical detection module; 6, back optical detection module; 7, main camera; 8, double telecentric lens; 9, four-eye structured light sensor; 10, high-angle ring light source; 11, fixed plate; 12, X-axis movement module; 13, Y-axis movement module; 14, Z-axis movement module; 15, lens mounting plate; 16, lens fixing seat; 17, three-color combined light source; 18, light source mounting plate; 19, code reader; 20, ion wind dust removal device. DETAILED DESCRIPTION

[0025] This part will describe the specific embodiments of the utility model in detail, and the preferred embodiments of the utility model are shown in the drawings. The role of the drawings is to supplement the description of the text part with graphics, so that people can intuitively and visually understand each technical feature and the overall technical scheme of the utility model. However, it cannot be understood as a limitation on the protection scope of the utility model.

[0026] Reference Figures 1-4The utility model discloses an IGBT encapsulation bonding appearance defect double -sided detection equipment, it includes: marble mesa 1 for fixed support whole device, marble mesa 1 is provided with lower layer XYZ axis movement module 2 in proper order upwards, for moving on three dimensions, detection transmission line 3 for transmission work piece and upper layer XYZ axis movement module 4 for moving on three dimensions, front optical detection module 5 for front detection object, back optical detection module 6 for back detection object, marble mesa 1 is fixedly connected with two groups of fixed plate 11 for fixed support structure, lower layer XYZ axis movement module 2 sets up on marble mesa 1, and detection transmission line 3 and upper layer XYZ axis movement module 4 group are respectively through fixed plate 11 and are set in the upper layer of lower layer XYZ axis movement module 2 in proper order, front optical detection module 5 sets up on upper layer XYZ axis movement module 4, back optical detection module 6 sets up on lower layer XYZ axis movement module 2, and front optical detection module 5 and back optical detection module 6 include main camera 7 for capturing object, double telephoto lens 8 for providing high -quality image capture, four eyes structure light sensor 9, can obtain the three -dimensional shape information of object through the projection structure light mode, with high angle annular light source 10 for uniform illumination, especially in the case of insufficient light or low contrast, can improve image quality.

[0027] Upper layer XYZ axis movement module 4 includes X axis movement module 12, Y axis movement module 13 and Z axis movement module 14, X axis movement module 12 is slidably installed on Y axis movement module 13, Z axis movement module 14 is slidably installed on X axis movement module 12, for moving on three dimensions, ensure that can accurately align detection position, and the structure of lower layer XYZ axis movement module 2 is consistent with upper layer XYZ axis movement module 4.

[0028] The outer surface of the front optical detection module 5 and the back optical detection module 6 is fixedly connected with a lens mounting plate 15, the front optical detection module 5 and the back optical detection module 6 are slidably connected with the corresponding Z-axis movement module 14 through the lens mounting plate 15, the outer surface of the lens mounting plate 15 is fixedly connected with a lens fixing seat 16, the double-telecentric lens 8 is fixed by the lens fixing seat 16, the high-angle annular light source 10 is fixedly connected with the lens fixing seat 16, four cameras of the four-eye structured light sensor 9 are respectively installed around the double-telecentric lens 8, the four-eye structured light sensor 9 and the double-telecentric lens 8 are kept concentric by adopting the oblique projection mode, the front optical detection module 5 further comprises a three-color combined light source 17, by using the light sources of red, green and blue colors, the contrast of the surface of the measured object can be improved, details are clearer, different colors can highlight the characteristics of different materials or surfaces, especially on the sample with relatively complex color or strong reflectivity, the upper surface of the three-color combined light source 17 is fixedly connected with a light source mounting plate 18, the three-color combined light source 17 is fixedly connected with the lens mounting plate 15 through the light source mounting plate 18, the front optical detection module 5 further comprises a code reader 19, which reads and decodes the bar code or two-dimensional code on the object, the outer surface of the code reader 19 is fixedly connected with a code reader mounting plate, the code reader 19 is fixedly connected with the lens mounting plate 15 through the code reader mounting plate, the detection transmission line 3 comprises two parallel belt transmission lines, and one of the two belt transmission lines is movable in the vertical direction of the belt transmission line, for adjusting the width, the inlet end of the detection transmission line 3 is provided with an ion wind dust removal device 20 for dust removal.

[0029] Working principle: during installation, the marble table top 1 is sequentially provided with the lower layer XYZ-axis movement module 2, the detection transmission line 3 and the upper layer XYZ-axis movement module 4 upwards, the front optical detection module 5 is arranged on the upper layer XYZ-axis movement module 4, and the back optical detection module 6 is arranged on the lower layer XYZ-axis movement module 2, then during use, the workpiece is transmitted through the detection transmission line 3, dust is removed through the ion wind dust removal device first, and then the workpiece is comprehensively detected through the movement of the front optical detection module 5 and the back optical detection module 6 through the XYZ-axis movement module.

[0030] The above embodiment of the utility model is described in detail in combination with the drawings, but the utility model is not limited to the above embodiment, and various changes can be made within the knowledge range possessed by ordinary skilled in the art without departing from the purpose of the utility model.

Claims

1. An IGBT package post-bond appearance defect double-sided inspection apparatus, characterized by, Include: Marble table (1), the marble table (1) is sequentially provided with lower layer XYZ axis movement module (2), detection transmission line (3) and upper layer XYZ axis movement module (4), front optical detection module (5), back optical detection module (6) in turn, the marble table (1) is fixedly connected with two groups of fixed plates (11), the lower layer XYZ axis movement module (2) is arranged on the marble table (1), the detection transmission line (3) and upper layer XYZ axis movement module (4) group are sequentially arranged on the lower layer XYZ axis movement module (2) through fixed plate (11) in turn, the front optical detection module (5) is arranged on the upper layer XYZ axis movement module (4), the back optical detection module (6) is arranged on the lower layer XYZ axis movement module (2), the front optical detection module (5) and back optical detection module (6) include main camera (7), double telephoto lens (8), four eyes structured light sensor (9) and high angle ring light source (10).

2. The IGBT package post-bond appearance defect double-side inspection apparatus according to claim 1, characterized in that, The upper layer XYZ axis movement module (4) includes X-axis movement module (12), Y-axis movement module (13) and Z-axis movement module (14), the X-axis movement module (12) is slidably installed on the Y-axis movement module (13), the Z-axis movement module (14) is slidably installed on the X-axis movement module (12), the structure of the lower layer XYZ axis movement module (2) is consistent with the upper layer XYZ axis movement module (4).

3. The IGBT package post-bond appearance defect double-side inspection apparatus according to claim 2, characterized in that, The outer surface of the front optical detection module (5) and back optical detection module (6) is fixedly connected with lens mounting plate (15), the front optical detection module (5) and back optical detection module (6) are slidably connected with the corresponding Z-axis movement module (14) through lens mounting plate (15).

4. The IGBT package post-bond appearance defect double-side inspection apparatus according to claim 3, characterized in that, The outer surface of the lens mounting plate (15) is fixedly connected with lens fixing seat (16), the double telephoto lens (8) is fixed by the lens fixing seat (16), the high angle ring light source (10) is fixedly connected with the lens fixing seat (16).

5. The device according to any one of claims 1-4, wherein the device is characterized by, Four cameras of the four eyes structured light sensor (9) are respectively installed around the double telephoto lens (8), the four eyes structured light sensor (9) is concentric with the double telephoto lens (8).

6. The IGBT package post-bond appearance defect double-side inspection apparatus according to claim 5, wherein The front optical detection module (5) further includes three-color combined light source (17), the upper surface of the three-color combined light source (17) is fixedly connected with light source mounting plate (18), the three-color combined light source (17) is fixedly connected with lens mounting plate (15) through light source mounting plate (18).

7. The IGBT package post-bond appearance defect double-side inspection apparatus according to claim 5, wherein The front optical detection module (5) further includes code reader (19), the outer surface of the code reader (19) is fixedly connected with code reader mounting plate, the code reader (19) is fixedly connected with lens mounting plate (15) through code reader mounting plate.

8. The IGBT package post-bond appearance defect double-side inspection apparatus according to claim 1, characterized in that, The detection transmission line (3) includes two parallel belt transmission lines, and one of them can move vertically along the belt transmission line.

9. The IGBT package post-bond appearance defect double-side inspection apparatus according to claim 8, characterized in that, The inlet end of the detection transmission line (3) is provided with an ion wind dust removal device (20).

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