Efficient replacement structure of vacuum pressure gauge

Abstract

The utility model relates to the technical field of high-temperature ion implanters, in particular to a high-efficiency replacement structure of a vacuum pressure gauge, which comprises a pipeline used for connecting a vacuum chamber; the middle part of the pipeline is detachably connected with an isolating valve, and the tail end of the pipeline is detachably connected with a pressure gauge; wherein the pressure gauge is connected with the pipeline through a quick release component, the isolation valve is arranged between the vacuum cavity and the pressure gauge, and the design allows the connection between the pressure gauge and the vacuum cavity to be directly blocked by closing the isolation valve when a pressure gauge part is replaced, so that the pressure gauge can be conveniently replaced. Therefore, the whole vacuum system does not need to be subjected to a complex treatment process, the efficiency of replacement operation is remarkably improved through the improvement, the operation time is greatly shortened, the replacement efficiency is remarkably improved, in addition, due to the fact that the vacuum system does not need to be closed or high-temperature parts do not need to be cooled or heated, the equipment utilization rate is improved, and the cost is reduced. The transformation process is simple and high in feasibility.

Description

TECHNICAL FIELD

[0001] The utility model relates to high temperature ion implantation machine technical field especially relates to a high -efficient replacement structure of vacuum pressure gauge. BACKGROUND

[0002] High temperature ion implantation machine is used for wafer ion doping complex equipment, relates to vacuum, high pressure, gas circuit and circuit control technique, wherein, keeping high vacuum degree is very important, equipment present structure such as the drawing of specification shows, vacuum gauge 1 is in the position of vacuum chamber 2, directly with vacuum chamber 2 connection, when operating, high vacuum pump runs, high pressure valve 3 opens, and vacuum gauge 1 detects cavity vacuum degree. Figure 1

[0003] The vacuum gauge of high temperature ion implantation machine process chamber is installed in the operating position, and the process by-products in the operating process can cause the filament in the vacuum gauge to be damaged due to short circuit and the like, so that the vacuum pressure gauge needs to be disassembled and replaced, and due to the characteristics of the machine, the replacement process is complex, including: stopping the vacuum, cooling the high-temperature parts of the cavity, replacing the vacuum gauge, heating the high-temperature parts, testing, rewiring and a series of actions, which generally takes about 12.5H, and the working time is long, which greatly affects the production line.

[0004] Therefore, in order to improve the replacement convenience of the vacuum pressure gauge, the utility model provides a high-efficiency replacement structure of vacuum pressure gauge. UTILITY MODEL CONTENTS

[0005] The utility model discloses a kind of high-efficiency replacement structures of vacuum pressure gauge, to solve the low replacement efficiency of vacuum pressure gauge in prior art, and the utility model provides a kind of high-efficiency replacement structure of vacuum pressure gauge.

[0006] To achieve the above object, the utility model adopts the following technical scheme:

[0007] Design a kind of high-efficiency replacement structure of vacuum pressure gauge, including:

[0008] Pipeline for connecting vacuum chamber;

[0009] Isolating valve is detachably connected to the middle part of the pipeline, and pressure gauge is detachably connected to the tail end of the pipeline.

[0010] Wherein the pressure gauge is connected with the pipeline by quick-release assembly, sealing element is further provided between the pressure gauge and the pipeline, and protective structure is further provided on the quick-release assembly.

[0011] Further, the middle part of the pipeline has a disconnecting part, and the two ends of the disconnecting part are connected with the isolating valve through flanges and fasteners.

[0012] ​Further, the tail end of the pipeline is fixedly connected with a first connecting seat, the tail end of the pressure gauge is provided with a second connecting seat, the first connecting seat is attached to the end face of the second connecting seat, and the first connecting seat is connected with the second connecting seat through a quick release assembly.

[0013] Further, the first connecting seat and the second connecting seat are both provided with a frustum face, and the two frustum faces are symmetrically distributed.

[0014] Further, the sealing member is a sealing gasket arranged between the first connecting seat and the second connecting seat.

[0015] Further, the quick release assembly comprises a first arm and a second arm in pin joint rotation, and the first arm and the second arm are both in arc structure.

[0016] Wherein, the free end of the first arm and the second arm is formed with an ear seat, a screw rod is rotatably connected in the ear seat of the first arm, the other end of the screw rod is arranged in the ear seat of the second arm, and a nut is threadedly connected to the other end of the screw rod.

[0017] Further, the inner side of the first arm and the second arm is provided with a V-shaped groove, and the V-shaped groove is arranged outside the two frustum faces.

[0018] Further, the protective structure comprises a sheath rotatably connected outside the ear seat of the first arm, and the other end of the sheath is connected with the ear seat of the second arm through a locking member.

[0019] Wherein, the sheath is arranged outside the two ear seats and the nut.

[0020] Further, the locking member is a positioning glass bead embedded in the ear seat of the second arm, a positioning hole is arranged on the end face of the sheath, and the telescopic end of the positioning glass bead is clamped with the positioning hole.

[0021] Further, the sheath is in U-shaped structure, and the sheath is further provided with an indicating part on the end face.

[0022] The efficient replacement structure of the vacuum pressure gauge has the beneficial effects that: the isolation valve arranged between the vacuum cavity and the pressure gauge allows to directly block the connection between the pressure gauge and the vacuum cavity by closing the isolation valve when replacing the pressure gauge component, so that the complex processing process of the whole vacuum system is not needed, the efficiency of the replacement operation is improved, the operation time is greatly shortened, the replacement efficiency is significantly improved, in addition, the utilization rate of the equipment is improved because the vacuum system does not need to be closed or the high-temperature component does not need to be cooled and heated, the improvement process is simple and feasible, and overall, the improvement not only simplifies the replacement operation process, but also reduces the influence on the production line. BRIEF DESCRIPTION OF DRAWINGS

[0023] Figure 1 It is a schematic diagram of prior art pressure gauge connecting structure;

[0024] Figure 2 It is a perspective view of the utility model;

[0025] Figure 3 It is a schematic diagram of sectional structure of the utility model;

[0026] Figure 4 It is a schematic diagram of first connecting seat structure of the utility model;

[0027] Figure 5 It is a schematic diagram of protection structure structure of the utility model.

[0028] In the drawing: 1, pipeline;11, first connecting seat;12, second connecting seat;13, conical surface;2, isolation valve;3, pressure gauge;4, quick release assembly;41, first arm;42, second arm;43, lug seat;44, screw;45, nut;46, V-shaped groove;5, sealing element;6, protection structure;61, sheath;62, locking element;63, indicating part. DETAILED DESCRIPTION

[0029] The technical solutions in the embodiments of the utility model will be clearly and completely described below with reference to the drawings in the embodiments of the utility model. Obviously, the described embodiments are only part of the embodiments of the utility model, not all the embodiments.

[0030] Referring to Figures 2-5 It is one embodiment of the utility model, which discloses a kind of efficient replacement structure of vacuum pressure gauge, specifically the structure includes the pipeline 1 for connecting vacuum chamber, of course, a flange interface can be installed in the end portion of the pipeline 1 in the embodiment, to facilitate with the vacuum chamber is connected conveniently;

[0031] In addition, detachable isolation valve 2 can be connected in the middle of the pipeline 1 in the embodiment, the isolation valve 2 is prior art, the prior isolation valve can be directly used in the art, and its principle is not described in detail, the tail end of the pipeline 1 is detachably connected with pressure gauge 3, and the pressure gauge 3 in the embodiment is a Pirani vacuum gauge, and its specific working principle has been disclosed in prior art, which will not be described in detail here.

[0032] The pressure gauge 3 is connected with the pipeline 1 by quick release assembly 4, and sealing element 5 is further arranged between the pressure gauge 3 and the pipeline 1, and protection structure 6 is further arranged on the quick release assembly 4.

[0033] Specifically, in the embodiment, the isolation valve 2 is arranged in the middle part of the pipeline 1, when the vacuum gauge needs to be replaced due to failure, the isolation valve 2 is closed, and only the pressure gauge 3 part is inflated and replaced, so that the replacement convenience of the pressure gauge 3 is greatly improved.

[0034] In some embodiments, the pipeline 1 has a broken part in the middle part, and the two ends of the broken part are connected with the isolation valve 2 through flanges and fasteners.

[0035] Further, the tail end of the pipeline 1 is fixedly connected with a first connecting seat 11, and the tail end of the pressure gauge 3 has a second connecting seat 12, the first connecting seat 11 and the second connecting seat 12 are end face abutting and connected through a quick release assembly 4.

[0036] In the embodiment, the first connecting seat 11 and the second connecting seat 12 both have a frustum 13, and the two frustums 13 are symmetrically distributed, that is, the first connecting seat 11 and the second connecting seat 12 both have a frustum structure, and the two frustum structures are symmetrically arranged, and the first connecting seat 11 and the second connecting seat 12 have the same size, so as to ensure the connection stability of the subsequent quick release assembly 4.

[0037] Of course, the sealing element 5 in the embodiment is a sealing gasket arranged between the first connecting seat 11 and the second connecting seat 12, and the sealing gasket is a ring-shaped sealing gasket, which is used to improve the connection sealing property between the first connecting seat 11 and the second connecting seat 12, so as to avoid the problem of vacuum leakage at the connection part of the two.

[0038] Preferably, the quick release assembly 4 comprises a pin-connected rotating first arm 41 and a second arm 42, and the first arm 41 and the second arm 42 both have an arc structure.

[0039] In the free end of the first arm 41 and the second arm 42, an ear seat 43 is formed, the ear seat 43 of the first arm 41 is rotatably connected with a screw rod 44, and the other end of the screw rod 44 is arranged in the ear seat 43 of the second arm 42 and is threadedly connected with a nut 45.

[0040] Specifically, the opening of the ear seat 43 in the embodiment is directed outward of the first arm 41 and the second arm 42. When the pipe 1 and the pressure gauge 3 need to be fixed, the first arm 41 and the second arm 42 are first sleeved outside the first connecting seat 11 and the second connecting seat 12, then the screw rod 44 is rotated to be partially arranged in the ear seat 43 of the second arm 42, at this time, the nut 45 is rotated, and the relative clamping movement between the first arm 41 and the second arm 42 is maintained by the movement resistance of the nut 45, so that the circumferential connection and fixation of the first connecting seat 11 and the second connecting seat 12 are realized.

[0041] Of course, in order to ensure that the first connecting seat 11 and the second connecting seat 12 can axially move to ensure sealing, the inner side of the first arm 41 and the second arm 42 in the embodiment is provided with a V-shaped groove 46, and the V-shaped groove 46 is sleeved outside the two conical surfaces 13.

[0042] That is, when the first arm 41 and the second arm 42 are in clamping movement, the V-shaped groove 46 is in contact with the two conical surfaces 13 of the first connecting seat 11 and the second connecting seat 12 to control the axial relative movement of the first connecting seat 11 and the second connecting seat 12 and press the sealing gasket therebetween, so as to improve the connection stability of the two.

[0043] In a further embodiment, the protective structure 6 in the utility model comprises a sheath 61 rotatably connected to the outer side of the ear seat 43 of the first arm 41, and the other end of the sheath 61 is connected to the ear seat 43 on the second arm 42 through a locking piece 62.

[0044] The sheath 61 is sleeved outside the two ear seats 43 and the nut 45.

[0045] On the basis of the above embodiment, the locking piece 62 in the embodiment is a positioning glass bead embedded in the ear seat 43 of the second arm 42, a positioning hole is formed in the end surface of the sheath 61, the telescopic end of the positioning glass bead is clamped with the positioning hole, and it should be noted that the diameter of the positioning hole in the embodiment is greater than the diameter of the telescopic end of the positioning glass bead, and the purpose is to provide a certain movement space for the telescopic end of the positioning glass bead. Since the first arm 41 and the second arm 42 are connected, the spacing between the two ear seats 43 will change under the influence of the clamping force, and therefore, in the embodiment, the positioning glass bead is clamped with the positioning hole in a stable manner by using the positioning hole with a larger aperture.

[0046] That is, in the embodiment, the sheath 61 is used to cover the two ear seats 43 and the nut 45, and after the connection is completed, the nut 45 is covered to avoid the connection stability of the pressure gauge 3 being affected by the nut 45 being touched by mistake.

[0047] Secondly, the sheath 61 is in a U-shaped structure, and the sheath 61 further has an indication part 63 on an end face of the sheath 61. In the embodiment, the indication part 63 can be in characters, such as "Please ensure that the isolation valve is opened", so that the user is reminded when the user operates, to ensure that the quick disassembly assembly 4 is disassembled after the isolation valve 2 is opened first, to realize the disassembly of the pressure gauge 3, and to improve the safety of the operation.

[0048] In summary, the replacement operation process of the pressure gauge 3 is simplified in the utility model.

[0049] a. The isolation valve 2 is closed to block the pressure gauge 3 and the vacuum cavity;

[0050] b. The quick disassembly assembly 4 is disassembled and assembled to replace the pressure gauge 3;

[0051] c. Beam current adjustment and reline process; the whole vacuum system does not need to be processed, to achieve the purpose of improving the replacement efficiency.

[0052] The replacement operation steps in the present structure are: a, the high vacuum pump stops running for 0.5 hours; b, the cavity is broken for 0.5 hours; c, the cavity part is cooled for 4 hours; d, the high vacuum gauge is replaced for 0.5 hours; e, the high vacuum is established and recovered for 2 hours; f, the cavity high-temperature part is warmed up for 1 hour; g, the beam current is recovered for 1 hour; h, the film running test is performed for 1 hour; i, the machine is restarted and the monitoring item value is tested for 2 hours, and the time consumption needs 12.5 hours;

[0053] After the isolation valve 2 mechanism is modified, the operation steps are: a, the high vacuum gauge isolation valve is closed for 0.1 hours; b, the high vacuum gauge is replaced for 0.4 hours; c, the high vacuum is established and recovered for 0.5 hours; d, the beam current is recovered for 1 hour; e, the film running test is performed for 1 hour; f, the machine is restarted and the monitoring item value is tested for 2 hours; the theoretical time consumption is about 5 hours, the time saving is 7.5 hours, the efficiency is improved by 250%, the feasibility is high, and the modification and replacement operation are simple.

[0054] This invention utilizes an isolation valve 2 installed between the vacuum chamber and the pressure gauge 3. This design allows for the direct disconnection of the pressure gauge 3 from the vacuum chamber when replacing components of the pressure gauge 3 by closing the isolation valve 2. This eliminates the need for complex processing procedures on the entire vacuum system, significantly improving the efficiency of replacement operations and greatly shortening operation time. Furthermore, since there is no need to shut down the vacuum system or perform cooling or heating operations on high-temperature components, the utilization rate of the equipment is improved. The modification process is simple and highly feasible. Overall, this improvement not only simplifies the replacement operation process but also reduces the impact on the production line.

[0055] The above description is only a preferred embodiment of the present utility model, but the protection scope of the present utility model is not limited thereto. Any equivalent substitutions or changes made by those skilled in the art within the technical scope disclosed in the present utility model, based on the technical solution and the inventive concept of the present utility model, should be included within the protection scope of the present utility model.

Claims

1. A high-efficiency replacement structure of a vacuum pressure gauge, characterized by comprising: The utility model relates to a pipeline (1) for connecting vacuum chamber, the pipeline (1) is detachably connected with the isolation valve (2) in the middle part, and the tail end of pipeline (1) is detachably connected with pressure gauge (3), wherein the pressure gauge (3) is connected with the pipeline (1) through quick release assembly (4), and sealing element (5) is further arranged between the pressure gauge (3) and the pipeline (1), and the quick release assembly (4) is further provided with protective structure (6). The middle part of the pipeline (1) has a breakaway part, and the two ends of the breakaway part are connected with the isolation valve (2) through flanges and fasteners. The tail end of the pipeline (1) is fixedly connected with a first connecting seat (11), and the tail end of the pressure gauge (3) has a second connecting seat (12), the first connecting seat (11) and the second connecting seat (12) are end face adhered and connected through the quick release assembly (4). The first connecting seat (11) and the second connecting seat (12) each have a frustum (13), and the two frustums (13) are symmetrically distributed.

2. The high-efficiency replacement structure of a vacuum pressure gauge according to claim 1, characterized in that: The sealing element (5) is a sealing gasket placed between the first connecting seat (11) and the second connecting seat (12).

3. The efficient replacement structure of a vacuum pressure gauge according to claim 1, characterized in that: The quick release assembly (4) includes a pin-connected first arm (41) and a second arm (42), and the first arm (41) and the second arm (42) are each in an arc structure.

4. The high-efficiency replacement structure of a vacuum pressure gauge according to claim 3, characterized in that: Wherein the free ends of the first arm (41) and the second arm (42) are each formed with an ear seat (43), a screw rod (44) is rotatably connected in the ear seat (43) of the first arm (41), the other end of the screw rod (44) is placed in the ear seat (43) of the second arm (42) and is threadedly connected with a nut (45).

5. The high-efficiency replacement structure of a vacuum pressure gauge according to claim 4, characterized in that: The first arm (41) and the second arm (42) each have a V-shaped groove (46) on the inner side, and the V-shaped groove (46) is sleeved on the outer side of the two frustums (13).

6. The high-efficiency replacement structure of a vacuum pressure gauge according to claim 4, characterized by: The protective structure (6) includes a sheath (61) rotatably connected on the outer side of the ear seat (43) of the first arm (41), and the other end of the sheath (61) is connected with the ear seat (43) on the second arm (42) through a locking member (62). Wherein the sheath (61) is sleeved on the outer side of the two ear seats (43) and the nut (45).

7. The efficient replacement structure of a vacuum pressure gauge according to claim 6, characterized in that: The locking member (62) is a positioning glass bead embedded in the ear seat (43) of the second arm (42), a positioning hole is formed on the end face of the sheath (61), and the telescopic end of the positioning glass bead is clamped with the positioning hole.

8. The efficient replacement structure of a vacuum pressure gauge according to claim 6, characterized in that: The sheath (61) is in a U-shaped structure, and the sheath (61) further has an indicating part (63) on the end face. ​ 9. The efficient replacement structure of a vacuum pressure gauge according to claim 8, characterized in that: ​ 10. The high-efficiency replacement structure of a vacuum pressure gauge according to claim 8 or 9, characterized in that: ​

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