Inner container for etching equipment and etching equipment

Abstract

The utility model provides a kind of inner container and etching equipment for etching equipment, etching equipment is equipped with the etching cavity surrounded by shell, inner container is used to be placed in etching cavity and is set with shell, the inner container includes detachably connected bottom protective container and cavity wall protective container, the cavity wall protective container has transmission window for substrate transmission and detection window for detection mechanism setting, the bottom protective container and the cavity wall protective container are positioned by positioning structure and are connected.The utility model inner container adopts the structure mode of detachable connection, it is easy to install it to the etching cavity in shell in steps, it is also easy to take from the etching cavity of etching equipment, therefore, when the etching cavity of etching equipment needs to be maintained, only the inner container of the utility model is taken out and then moved to cleaning area to clean, it saves time and effort, without direct operation in etching cavity.

Description

TECHNICAL FIELD

[0001] The utility model relates to etching technical field especially relates to the inner container for etching cavity and etching equipment. BACKGROUND

[0002] In semiconductor manufacturing, one of the main equipment required by integrated process is etching equipment. In operation, the inner wall of the etching cavity of the etching equipment will attach a large amount of polymer, so in the maintenance process, a lot of time and effort is needed to clean the inner wall of the etching cavity. In addition, during the cavity cleaning process, the polymer will be in the form of dust floating in the air, although the maintenance personnel wear goggles and filter masks, but still will have hidden danger to the health of the on-site personnel.

[0003] Therefore, it is necessary to develop an etching cavity which is easy to clean and maintain. UTILITY MODEL CONTENT

[0004] The utility model discloses a kind of inner container and etching equipment for etching equipment, to solve the problem of etching cavity of etching equipment regular maintenance time-consuming and labor-intensive.

[0005] The utility model provides a kind of inner container for etching equipment, the etching equipment is equipped with the etching cavity surrounded by shell, the inner container is placed in the etching cavity and is attached the shell setting, the inner container includes detachably connected bottom protective container and cavity wall protective container, the cavity wall protective container has transmission window for substrate transmission and detection window for detection mechanism setting, the bottom protective container and the cavity wall protective container are positioned by positioning structure and are connected.

[0006] Preferably, the bottom protective container includes a first cover and a second cover that are detachably connected, the first cover is used to be arranged at the bottom of the shell to form the cavity bottom wall of the etching cavity, and the second cover is annular and has the same outer diameter as the electrostatic chuck pedestal in the etching cavity to be annularly arranged on the electrostatic chuck pedestal.

[0007] Preferably, the first cover and the second cover are each provided with a plurality of positioning holes arranged in a ring direction.

[0008] Preferably, the first cover and the second cover are each provided with a plurality of positioning holes arranged in a ring direction.

[0009] Preferably, the first cover and the second cover are provided with concave-convex matching positioning portions at the contact position.

[0010] Preferably, the positioning structure includes a positioning member and positioning holes provided on the bottom protective container and the cavity wall protective container, and the positioning member is arranged in the corresponding positioning holes of the bottom protective container and the cavity wall protective container.

[0011] Preferably, the positioning structure is a concave-convex matching structure arranged at the contact between the bottom protective liner and the cavity wall protective liner.

[0012] Preferably, the materials of the bottom protective liner and the cavity wall protective liner are the same as the material of the cavity wall of the etching cavity.

[0013] Preferably, the inner surface of the liner is smooth, and the outer surface of the liner is a rough surface.

[0014] The utility model also provides a kind of etching equipment, the including shell with inner cavity and the liner of any one described above etching equipment, the liner is placed in the inner cavity of the shell and the liner constitutes the cavity wall of etching cavity.

[0015] The liner for etching equipment and the etching equipment have the following beneficial effects: the liner is fixed in a detachable manner by the bottom protective liner and the cavity wall protective liner, which is easy to install step by step into the etching cavity of the etching equipment to be fixed with the shell of the etching cavity, so that the liner is used as the inner cavity wall of the etching cavity, and it is also easy to take out step by step from the etching cavity of the etching equipment. Therefore, when the etching cavity of the etching equipment needs to be maintained, the liner of the utility model can be taken out and cleaned in the cleaning area, which saves time and effort and does not need to be operated directly in the etching cavity. In addition, cleaning in the cleaning area can be safely handled, and the health hazards to maintenance personnel can be eliminated. BRIEF DESCRIPTION OF DRAWINGS

[0016] Figure 1 An embodiment of the liner for etching cavity equipment is shown.

[0017] Figure 2 An embodiment of the first cover is shown. Figure 1 A local enlarged view of A in FIG. 4 is shown.

[0018] Figure 3 A schematic view of the first cover with the same shape as the bottom of the etching cavity in the shell is shown. DETAILED DESCRIPTION

[0019] In order to make the purpose, technical scheme and advantages of the embodiments of the utility model clearer, the technical scheme in the embodiments of the utility model will be clearly and completely described below. Obviously, the described embodiments are part of the embodiments of the utility model, rather than all the embodiments. Based on the embodiments in the utility model, all other embodiments obtained by those skilled in the art without creative labor belong to the scope of protection of the utility model. Unless otherwise defined, the technical terms or scientific terms used herein should be understood as the usual meaning understood by those skilled in the art to which the utility model belongs. The "including" and similar words used in this paper mean that the elements or objects before the word cover the elements or objects listed after the word and their equivalents, without excluding other elements or objects.

[0020] As shown in the drawings, the utility model discloses a kind of inner container for etching equipment, etching equipment is equipped with the etching cavity surrounded by shell, the inner container of the present embodiment is used to be placed in etching cavity and is set with shell, inner container includes detachably connected bottom protective container and cavity wall protective container 1, the shape of inner container is same with the shape of etching cavity, cavity wall protective container 1 has transmission window 11 for substrate transmission and detection window 12 for detection mechanism setting, bottom protective container and cavity wall protective container 1 are positioned by positioning structure and connected. Figures 1 to 3 The inner container of the present embodiment adopts the structure mode of detachable connection, the detachable connection of the present embodiment is not limited to specific connecting structure, which can also be that cavity wall protective container 1 is supported on bottom protective container, that is, bottom protective container and cavity wall protective container 1 are split type structure, easy to install it step by step into the etching cavity of etching equipment to be fixed with the shell of etching cavity, so that inner container is used as the inner cavity wall of etching cavity, also easy to take from the cavity of etching equipment, therefore, when etching cavity of etching equipment needs to be maintained, only the inner container of the utility model is taken out and moved to cleaning area for cleaning, which saves time and effort, without direct operation in the cavity; In addition, moving to cleaning area for cleaning, the cleaning environment can be handled safely, to avoid polymer floating in the form of dust, eliminate the health hazards to maintenance personnel. Wherein, cavity wall protective container and the shape of the shell surrounding etching cavity are matched, transmission window 11 is provided thereon to ensure the transmission of substrate such as wafer, and detection window 12 is provided for detection device to directly obtain various performance parameters in etching cavity.

[0021] For further better installation and taking, see Figure 1As shown, the aforementioned bottom protector includes a detachably connected first cover 3 and a second cover 2. The first cover 3 is disposed at the bottom of the housing to form the bottom wall of the etching cavity, such as having the same shape as the bottom of the housing. The second cover 2 is annular, and the inner diameter of the second cover is the same as the outer diameter of the electrostatic chuck base in the etching cavity, so as to be arranged around the electrostatic chuck base. In this embodiment, the bottom protector is configured as a split structure. The detachable connection between the first cover 3 and the second cover 2 is not limited to a specific connection structure, but may also be merely a contact support, which further facilitates installation and removal within the housing, and also facilitates cleaning and maintenance. For example, during the cleaning process, it can be placed in different cleaning devices, thereby reducing the volume of the cleaning devices, etc.

[0022] To achieve more stable installation, in one embodiment, both the first cover 3 and the second cover 2 are provided with positioning holes, see... Figure 2 and Figure 3 As shown, positioning holes 31 are provided on the contact surfaces of the first cover 3 and the second cover 2. Positioning elements 4 are provided in the corresponding positioning holes of the first cover 3 and the second cover 2. In this embodiment, the positioning elements 4 can be needle-shaped. By setting the positioning elements 4, the stability between the first cover 3 and the second cover 2 can be increased, and displacement within the etching cavity can be avoided. In addition, the first cover 3 and the second cover 2 can be detachably connected without the need for additional connecting structures. More preferably, the first cover 3 and the second cover 2 are provided with multiple positioning holes along the circumferential direction; for example, four positioning holes are evenly distributed along the circumferential direction to further prevent relative rotation of the first cover 3 and the second cover 2, and to further prevent misalignment of the second cover 2.

[0023] To achieve better stable installation, as another embodiment, a positioning part (not shown) with a concave-convex fit is provided at the contact point between the first cover 3 and the second cover 2. During the production of the first cover 3 and the second cover 2, corresponding concave and convex parts are formed on their contact surfaces. The positioning of the first cover 3 and the second cover 2 is achieved through the cooperation of the concave and convex parts, avoiding relative rotation and misalignment between the two.

[0024] See Figure 2 As shown, the above-mentioned positioning structure includes a positioning element 4 and positioning holes provided on the bottom liner and the cavity wall liner 1. The positioning element 4 is placed in the corresponding positioning holes of the bottom liner and the cavity wall liner. As a specific embodiment, see... Figure 3 As shown, the first cover 3 in the bottom liner has a positioning hole 32, and the positioning element 4 is inserted into the positioning hole 32, with its other end located in the positioning hole of the cavity wall liner 1. In this embodiment, the positioning element and the positioning hole are used to achieve a stable connection between the bottom liner and the cavity wall liner, avoiding displacement between the two, and also realizing a detachable connection between the bottom liner and the cavity wall liner.

[0025] As another embodiment, the positioning structure is a concave-convex matching structure arranged at the contact position of the bottom protective cover and the cavity wall protective cover. Specifically, a convex part and a concave part are respectively formed on the contact surfaces of the bottom protective cover and the cavity wall protective cover, and the detachable connection and positioning of the two are realized by the concave-convex matching, so as to avoid displacement or rotation.

[0026] To better ensure the realization of the function of the etching cavity, the materials of the bottom protective cover and the cavity wall protective cover are the same as the material of the shell, that is, the same as the material of the cavity wall of the existing etching equipment. Specifically, the expansion coefficient of the used material is consistent with the expansion coefficient of the material of the cavity wall, so as to ensure the close contact of the two.

[0027] As an embodiment, the inner surface of the inner cover is a smooth surface, and the outer surface of the inner cover is a surface with roughness, that is, the outer surface of the inner cover is the surface in contact with the cavity wall of the shell. To avoid displacement of the inner cover, the outer surface is designed as a rough surface to increase the friction between the inner cover and the shell. The inner surface of the inner cover is used as the working surface of the etching cavity, and the smoothness of the inner surface is the same as that of the cavity wall of the shell.

[0028] The utility model also provides a kind of etching equipment, and etching equipment includes the shell with inner cavity and the inner cover as described in various embodiments above, and the inner cover is placed in the inner cavity of the shell and constitutes the cavity wall of etching cavity. The etching equipment of the embodiment can be matched with multiple above-mentioned inner covers, so that during regular maintenance, only the inner cover needing cleaning needs to be removed, and a new inner cover can be installed, saving maintenance time, and the inner cover needing cleaning can be cleaned later.

[0029] Although the embodiments of the utility model are described in detail above, it is obvious for those skilled in the art that various modifications and changes can be made to these embodiments. However, it should be understood that such modifications and changes are within the scope and spirit of the utility model described in the claims. Moreover, the utility model described herein can have other embodiments, and can be implemented or realized in various ways.

Claims

1. An inner liner for an etching apparatus, wherein the etching apparatus has an etching cavity surrounded by a shell, characterized in that: The inner container is arranged in the etching cavity and is attached to the shell, and comprises a detachable bottom container and a cavity wall container, the cavity wall container is provided with a transmission window for substrate transmission and a detection window for detection mechanism arrangement, and the bottom container and the cavity wall container are connected and positioned by a positioning structure.

2. The liner according to claim 1, characterized in that: The bottom container comprises a first cover and a second cover, the first cover is arranged at the bottom of the shell to form a cavity bottom wall of the etching cavity, and the second cover is annular and has an inner diameter same as an outer diameter of an electrostatic chuck base in the etching cavity, so as to be arranged around the electrostatic chuck base.

3. The liner according to claim 2, characterized in that: The first cover and the second cover are provided with positioning holes, and the first cover and the second cover are provided with positioning members in corresponding positioning holes.

4. The liner according to claim 3, characterized in that: The first cover and the second cover are respectively provided with a plurality of positioning holes in the circumferential direction.

5. The liner of claim 2, wherein: The first cover and the second cover are provided with concave-convex matching positioning portions at the contact position.

6. The liner of claim 1, wherein: The positioning structure comprises positioning members and positioning holes provided on the bottom container and the cavity wall container, and the positioning members are arranged in the corresponding positioning holes of the bottom container and the cavity wall container.

7. The liner of claim 1, wherein: The positioning structure is a concave-convex matching structure arranged at the contact position of the bottom container and the cavity wall container.

8. The liner of claim 1, wherein: The materials of the bottom container and the cavity wall container are same as the material of the shell.

9. The liner of claim 1, wherein: The inner surface of the inner container is a smooth surface, and the outer surface of the inner container is a surface with roughness.

10. An etching apparatus, characterized by: The etching device comprises a shell with an inner cavity and an inner container for the etching device according to any one of claims 1 to 9, the inner container is arranged in the inner cavity of the shell and forms a cavity wall of the etching cavity.

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