Constant temperature system

Abstract

The utility model belongs to the technical field of semiconductor wafer defect detection, and particularly relates to a constant temperature system which comprises a control module, a heat exchange mechanism, an air supply mechanism, a plurality of air volume adjusting mechanisms and a plurality of cavities, the heat exchange mechanism transfers heat to the air supply mechanism, so that the air supply mechanism blows hot air to each air volume adjusting mechanism; each air volume adjusting mechanism adjusts the corresponding opening degree so as to adjust the air volume of hot air blown into the corresponding cavity. The control module is configured to control the heat exchange temperature of the heat exchange mechanism so as to control the temperature of hot air blown out by the air supply mechanism. According to the utility model, the heat exchange mechanism is matched with the air supply mechanism to transfer heat to clean air, and the air volume adjusting mechanism can ensure that the temperature of each chamber is maintained at a set temperature, thereby avoiding sudden change of the temperature in the chamber, stabilizing the precision and the service life of a precision part, and improving the precision of defect detection.

Description

TECHNICAL FIELD

[0001] The utility model belongs to semiconductor wafer defect detection technical field, especially, relate to a constant temperature system. BACKGROUND

[0002] In semiconductor equipment, equipment internal temperature control is related to detection precision, since the different expansion coefficients of each material in the equipment, the sudden change of temperature will seriously affect the equipment internal motion platform precision and optical system stability, thereby affecting the detection precision of the equipment.

[0003] In the existing semiconductor equipment, filter cotton is used to cooperate with the fan to blow air to the equipment interior, the temperature balance of the equipment interior is difficult to guarantee, the precision and service life of precision parts are seriously affected, the maintenance cost is increased in the later period, and the defect detection precision is reduced.

[0004] Therefore, it is urgent to develop a new constant temperature system to solve the technical problem that the temperature in the equipment is difficult to maintain balanced state only by using the fan direct blowing in the existing semiconductor equipment.

[0005] It should be noted that the above information disclosed in the background section of the present application is only used to understand the background of the present application, and therefore, the above description is not considered as the information of the prior art. CONTENT OF THE UTILITY MODEL

[0006] The present disclosure provides at least a constant temperature system.

[0007] In the first aspect, the present disclosure provides a constant temperature system, comprising: a control module, a heat exchange mechanism, a blowing mechanism, a plurality of air volume adjusting mechanisms and a plurality of chambers; wherein the blowing mechanism is connected with the heat exchange mechanism, each air volume adjusting mechanism is connected with the blowing mechanism, and each chamber is connected with the corresponding air volume adjusting mechanism; the heat exchange mechanism is electrically connected with the control module; the heat exchange mechanism is adapted to transfer heat to the blowing mechanism, so that the blowing mechanism blows hot air to each air volume adjusting mechanism; each air volume adjusting mechanism is adapted to adjust the corresponding opening degree respectively, so as to adjust the air volume of the hot air blown to the corresponding chamber; the control module is configured to control the heat exchange temperature of the heat exchange mechanism, so as to control the temperature of the hot air blown by the blowing mechanism.

[0008] In an alternative embodiment, the heat exchange mechanism comprises a water chiller, a water inlet pipe, a finned heat exchanger and a water outlet pipe; the water inlet pipe is in communication with the water chiller and the finned heat exchanger respectively, the finned heat exchanger is located at one side of the air supply mechanism, and the water outlet pipe is in communication with the water chiller and the finned heat exchanger respectively; the water chiller is electrically connected with the control module; the water chiller is adapted to output the circulating liquid to the finned heat exchanger through the water inlet pipe for heat exchange, so that the finned heat exchanger transmits heat to the air supply mechanism, and the circulating liquid after heat exchange in the finned heat exchanger returns to the water chiller through the water outlet pipe; the control module is configured to control the heat exchange temperature of the water chiller.

[0009] In an alternative embodiment, the heat exchange mechanism further comprises a water collecting tray; the water collecting tray is located between the finned heat exchanger and the air supply mechanism to hinder the circulating liquid from flowing to the air supply mechanism.

[0010] In an alternative embodiment, the air supply mechanism comprises a heat-conducting shell, at least one air supply fan and an air supply cavity; the heat-conducting shell is located at one side of the finned heat exchanger, the air supply fan is located in the heat-conducting shell, and the air supply cavity is located at one side of each air supply fan; the finned heat exchanger transmits heat to the heat-conducting shell to heat the air in the heat-conducting shell, and then each air supply fan blows hot air to each air volume adjusting mechanism through the air supply cavity.

[0011] In an alternative embodiment, the air supply mechanism further comprises a filter element; the filter element is located between each air supply fan and the air supply cavity to filter impurities in the hot air blown by each air supply fan.

[0012] In an alternative embodiment, the air supply mechanism further comprises a temperature sensor; the temperature sensor is located in the air supply cavity, and the temperature sensor is electrically connected with the control module; the control module is further configured to detect the temperature of the hot air flowing through the air supply cavity through the temperature sensor.

[0013] In an alternative embodiment, the air volume adjusting mechanism comprises an adjusting plug, an air outlet pipe and an air supply hose; the adjusting plug is located between the air supply cavity and the air outlet pipe, the adjusting plug is limitingly and slidably connected with the air supply cavity, the adjusting plug is limitingly and slidably connected with the air outlet pipe, and the air supply hose is in communication with the air outlet pipe and the chamber respectively; the adjusting plug is provided with an adjusting hole; the adjusting plug is adapted to relatively slide with the air supply cavity and the air outlet pipe, so that the adjusting hole adjusts the opening degree between the air supply cavity and the air outlet pipe.

[0014] In an alternative embodiment, the constant temperature system further comprises: a plurality of air volume detection mechanisms; each of the air volume detection mechanisms is connected to a corresponding air supply hose and a corresponding chamber, and each of the air volume detection mechanisms is electrically connected to the control module; and the control module is further configured to detect the air volume of the hot air through each of the air volume detection mechanisms.

[0015] In an alternative embodiment, the air volume detection mechanism comprises: an air inlet pipe and an air volume sensor; the air inlet pipe is in communication with the air supply hose and the chamber; the air volume sensor extends into the air inlet pipe, and the air volume sensor is electrically connected to the control module; and the control module is further configured to detect the air volume of the hot air through the air volume sensor.

[0016] In an alternative embodiment, the air volume detection mechanism further comprises: a fixing seat and a connecting seat; the fixing seat is located on the outer surface of the air inlet pipe, and the fixing seat is in communication with the inside of the air inlet pipe; and the connecting seat is movably inserted into the fixing seat, and the air volume sensor is movably inserted into the connecting seat, so that the air volume sensor extends into the air inlet pipe.

[0017] The constant temperature system of the present application can transfer heat to clean air through the heat exchange mechanism in cooperation with the air supply mechanism, and the air volume adjusting mechanism can ensure that the temperature of each chamber is maintained at a set temperature, thereby avoiding sudden changes in the temperature in the chamber, achieving stable precision of the precision parts and long service life, and improving the precision of defect detection.

[0018] Other features and advantages of the present application will be described in the following description, and some will become apparent from the description, or will be understood from the practice of the present application. The purpose and other advantages of the present application will be achieved and obtained by the structure specifically pointed out in the specification and the drawings.

[0019] In order to make the above-mentioned purposes, features and advantages of the present application more obvious and easy to understand, the preferred embodiments are described in detail below, and the detailed description is made below with the help of the accompanying drawings. BRIEF DESCRIPTION OF DRAWINGS

[0020] In order to more clearly illustrate the specific embodiments of the present application or the technical solutions in the prior art, the drawings needed in the specific embodiments or the prior art description will be briefly introduced as follows. Obviously, the drawings in the following description are some embodiments of the present application, and for those skilled in the art, other drawings can also be obtained without creative labor on the basis of these drawings.

[0021] Figure 1 A structural diagram of a constant temperature system provided by the embodiments of the present application is shown in the figure.

[0022] Figure 2A principle block diagram of a constant temperature system provided by an embodiment of the present disclosure;

[0023] Figure 3 A front view structural diagram of a heat exchange mechanism provided by an embodiment of the present disclosure;

[0024] Figure 4 A side view structural diagram of a heat exchange mechanism provided by an embodiment of the present disclosure;

[0025] Figure 5 A front sectional view of a air supply mechanism provided by an embodiment of the present disclosure;

[0026] Figure 6 A side sectional view of a air supply mechanism provided by an embodiment of the present disclosure;

[0027] Figure 7 A structural diagram of a air volume adjusting mechanism provided by an embodiment of the present disclosure;

[0028] Figure 8 A structural diagram of a adjusting plugboard provided by an embodiment of the present disclosure;

[0029] Figure 9 A structural diagram of a air volume detecting mechanism provided by an embodiment of the present disclosure;

[0030] Figure 10 A sectional view of a air volume detecting mechanism provided by an embodiment of the present disclosure;

[0031] Figure 11 A structural diagram of a air volume detecting mechanism provided by an embodiment of the present disclosure;

[0032] Figure 12 A sectional view of a air volume detecting mechanism provided by an embodiment of the present disclosure.

[0033] In the figure:

[0034] 1, heat exchange mechanism; 11, water chiller; 12, water inlet pipe; 13, fin heat exchanger; 14, water outlet pipe; 15, water receiving tray;

[0035] 2, air supply mechanism; 21, heat conduction shell; 22, air supply fan; 23, air supply cavity; 24, filter element; 25, temperature sensor;

[0036] 3, air volume adjusting mechanism; 31, adjusting plugboard; 311, adjusting hole; 32, air outlet pipe; 33, air supply hose;

[0037] 4, chamber;

[0038] 5, air volume detecting mechanism; 51, air inlet pipe; 52, air volume sensor; 53, fixing seat; 54, connecting seat; 55, cover plate. Detailed Implementation

[0039] To make the objectives, technical solutions, and advantages of the embodiments of this utility model clearer, the technical solutions of this utility model will be clearly and completely described below with reference to the accompanying drawings. Obviously, the described embodiments are only some embodiments of this utility model, not all embodiments. Based on the embodiments of this utility model, all other embodiments obtained by those skilled in the art without creative effort are within the protection scope of this utility model.

[0040] In this document, when it is mentioned that a first component is located on a second component, this can mean that the first component can be directly formed on the second component, or that a third component can be inserted between the first and second components. Furthermore, in the accompanying drawings, the thickness of the components may be exaggerated or reduced for the purpose of effectively describing the technical content.

[0041] It should be noted that similar labels and letters in the following figures indicate similar items. Therefore, once an item is defined in one figure, it does not need to be further defined and explained in subsequent figures.

[0042] The following detailed description, with reference to the accompanying drawings, describes some embodiments of the present invention. Unless otherwise specified, the following embodiments and features can be combined with each other.

[0043] like Figures 1 to 12 As shown, at least one embodiment provides a constant temperature system, comprising: a control module, a heat exchange mechanism 1, an air supply mechanism 2, a plurality of airflow regulating mechanisms 3, and a plurality of chambers 4; wherein the air supply mechanism 2 is connected to the heat exchange mechanism 1, each of the airflow regulating mechanisms 3 is connected to the air supply mechanism 2, and each of the chambers 4 is connected to a corresponding airflow regulating mechanism 3; the heat exchange mechanism 1 is electrically connected to the control module; the heat exchange mechanism 1 is adapted to transfer heat to the air supply mechanism 2 so that the air supply mechanism 2 blows hot air to each airflow regulating mechanism 3; each of the airflow regulating mechanisms 3 is adapted to adjust its corresponding opening degree to adjust the airflow of the hot air blown into the corresponding chamber 4; the control module is configured to control the heat exchange temperature of the heat exchange mechanism 1 to control the temperature of the hot air blown out by the air supply mechanism 2.

[0044] Specifically, the control module is configured to control the heat exchange temperature of the heat exchange mechanism 1 in order to control the temperature of the hot air blown out by the air supply mechanism 2, which is prior art. This application does not involve any improvement to the procedure or method itself.

[0045] In at least one embodiment, heat is transferred to the clean air by the heat exchange mechanism 1 cooperating with the air supply mechanism 2, and the control module controls the temperature and air volume of the clean air into the chamber 4 through the heat exchange mechanism 1 and the air volume adjusting mechanism 3, so that the temperature of each chamber 4 can be maintained at a set temperature, the temperature in the chamber 4 is prevented from changing suddenly, the precision and service life of the stable precision parts are realized, and the precision of defect detection is improved.

[0046] In at least one embodiment, referring to Figure 1 , the heat exchange mechanism 1 comprises a water chiller 11, a water inlet pipe 12, a fin heat exchanger 13 and a water outlet pipe 14; the water inlet pipe 12 is in communication with the water chiller 11 and the fin heat exchanger 13 respectively, the fin heat exchanger 13 is located on one side of the air supply mechanism 2, and the water outlet pipe 14 is in communication with the water chiller 11 and the fin heat exchanger 13 respectively; the water chiller 11 is electrically connected with the control module; the water chiller 11 is adapted to output the circulating liquid into the fin heat exchanger 13 through the water inlet pipe 12 for heat exchange, so that the fin heat exchanger 13 transfers heat to the air supply mechanism 2, and the circulating liquid after heat exchange in the fin heat exchanger 13 returns to the water chiller 11 through the water outlet pipe 14; the control module is configured to control the heat exchange temperature of the water chiller 11.

[0047] Specifically, the inside of the water chiller 11 is provided with a cooler and a pump, the circulating liquid is cooled by the cooler, and the circulating liquid is delivered out by the pump, and the water chiller 11 is provided with a water inlet one and a water outlet one, the fin heat exchanger 13 is provided with a water inlet two and a water outlet two, the water inlet pipe 12 connects the water outlet one and the water inlet two, and the water outlet pipe 14 connects the water inlet one and the water outlet two.

[0048] Specifically, the inside of the fin heat exchanger 13 is provided with a plurality of aluminum fins, and a coil pipe passes through the aluminum fins to realize the heat exchange function.

[0049] Specifically, the water inlet pipe 12 is a circular flexible pipe.

[0050] Specifically, the water outlet pipe 14 is a circular flexible pipe.

[0051] Specifically, the water chiller 11 cools the circulating liquid and delivers the circulating liquid to the fin heat exchanger 13 through the water inlet pipe 12, the fin heat exchanger 13 transfers the heat of the circulating liquid to the clean air, and then the circulating liquid returns to the water chiller 11 through the water outlet pipe 14.

[0052] In at least one embodiment, referring to Figure 3 , Figure 4 , the heat exchange mechanism 1 further comprises a water collecting tray 15; the water collecting tray 15 is located between the fin heat exchanger 13 and the air supply mechanism 2 to prevent the circulating liquid from flowing to the air supply mechanism 2.

[0053] Specifically, the water pan 15 is a square sheet metal part, and the side surface of the water pan 15 is provided with a plurality of waist-shaped holes. The side surface of the finned heat exchanger 13 is provided with a plurality of threaded holes. The waist-shaped holes of the water pan 15 correspond to the threaded holes of the finned heat exchanger 13 in position. The water pan 15 is fixedly installed below the finned heat exchanger 13 through screws.

[0054] In at least one embodiment, referring to Figure 5 , the air supply mechanism 2 comprises a heat-conducting shell 21, at least one air supply fan 22, and an air supply air chamber 23. The heat-conducting shell 21 is located on one side of the finned heat exchanger 13. The air supply fan 22 is located in the heat-conducting shell 21. The air supply air chamber 23 is located on one side of each air supply fan 22. The finned heat exchanger 13 transfers heat to the heat-conducting shell 21 to heat the air in the heat-conducting shell 21. Then, each air supply fan 22 blows hot air to each air volume adjusting mechanism 3 through the air supply air chamber 23.

[0055] Specifically, the heat-conducting shell 21 is a rectangular welded sheet metal part, which is fixedly installed on the upper surface of the shell fixing frame. The side surface of the heat-conducting shell 21 is provided with a plurality of through holes corresponding to the threaded holes of the finned heat exchanger 13. The finned heat exchanger 13 is fixedly installed on the side surface of the heat-conducting shell 21.

[0056] Specifically, the air supply fan 22 is fixedly installed on both sides of the upper surface of the fan mounting seat. The fan mounting seat is fixedly installed on the upper surface of the shell fixing frame and located in the interior of the heat-conducting shell 21.

[0057] Specifically, the air supply air chamber 23 is a rectangular welded sheet metal part, which is fixedly installed on the lower surface of the shell fixing frame.

[0058] In at least one embodiment, referring to Figure 5 , the air supply mechanism 2 further comprises a filter element 24. The filter element 24 is located between each air supply fan 22 and the air supply air chamber 23 to filter impurities in the hot air blown out by each air supply fan 22.

[0059] Specifically, the filter element 24 is fixedly installed on the lower surface of the fan mounting seat.

[0060] In at least one embodiment, referring to Figure 6 , the air supply mechanism 2 further comprises a temperature sensor 25. The temperature sensor 25 is located in the air supply air chamber 23, and the temperature sensor 25 is electrically connected to the control module. The control module is further configured to detect the temperature of the hot air flowing through the air supply air chamber 23 through the temperature sensor 25.

[0061] Specifically, the temperature sensor 25 is fixedly installed on the side surface of the air supply air chamber 23.

[0062] Specifically, the air supply fan 22 sends the clean air from the outside into the air supply cavity 23 through the fin heat exchanger 13, and the temperature sensor 25 detects the temperature of the clean air in the air supply cavity 23, and then transmits the temperature data to the control module, and the control module adjusts the temperature of the water chiller 11 according to the detected temperature data to control the clean air temperature within the target temperature range.

[0063] In at least one embodiment, referring to Figure 7 、 Figure 8 , the air volume adjusting mechanism 3 comprises an adjusting plug 31, an air outlet duct 32, and an air supply hose 33; the adjusting plug 31 is located between the air supply cavity 23 and the air outlet duct 32, and is in limit sliding connection with the air supply cavity 23 and the air outlet duct 32; the air supply hose 33 is in communication with the air outlet duct 32 and the chamber 4 respectively; the adjusting plug 31 is provided with an adjusting hole 311; the adjusting plug 31 is adapted to slide relative to the air supply cavity 23 and the air outlet duct 32 to adjust the opening degree between the air supply cavity 23 and the air outlet duct 32.

[0064] Specifically, referring to Figure 7 、 Figure 8 , moving the adjusting plug 31 in the F1 direction can adjust the opening degree between the air supply cavity 23 and the air outlet duct 32, thereby controlling the air volume.

[0065] Specifically, the adjusting plug 31 is an L-shaped sheet metal part in sliding connection with the lower surface of the air supply cavity 23.

[0066] Specifically, the air outlet duct 32 is a welded part in sliding connection with the adjusting plug 31.

[0067] Specifically, the air supply hose 33 is a circular hose fixedly connected with the lower end of the air outlet duct 32.

[0068] Specifically, the air supply volume is adjusted by moving the adjusting plug 31.

[0069] In at least one embodiment, referring to Figure 9 , the constant temperature system further comprises a plurality of air volume detection mechanisms 5; each air volume detection mechanism 5 is connected with a corresponding air supply hose 33 and a corresponding chamber 4, and each air volume detection mechanism 5 is electrically connected with the control module; the control module is further configured to detect the air volume of the hot air through each air volume detection mechanism 5.

[0070] In at least one embodiment, referring to Figure 9The air volume detection mechanism 5 comprises an air inlet duct 51 and an air volume sensor 52; the air inlet duct 51 is in communication with the air supply hose 33 and the chamber 4 respectively; the air volume sensor 52 extends into the air inlet duct 51, and the air volume sensor 52 is electrically connected with the control module; the control module is further configured to detect the air volume of the hot air through the air volume sensor 52.

[0071] Specifically, the air inlet duct 51 is a cylindrical welded part, the upper end of which is fixedly connected with the air supply hose 33, the lower end of which is fixedly connected with the chamber 4, and the side surface of which is provided with two threaded holes I and one through hole I.

[0072] In at least one embodiment, referring to Figure 10 , the air volume detection mechanism 5 further comprises a fixed seat 53 and a connecting seat 54; the fixed seat 53 is located on the outer surface of the air inlet duct 51, and the fixed seat 53 is in communication with the inside of the air inlet duct 51; the connecting seat 54 is movably inserted into the fixed seat 53, and the air volume sensor 52 is movably inserted into the connecting seat 54, so that the air volume sensor 52 extends into the air inlet duct 51.

[0073] Specifically, the fixed seat 53 is a rectangular processed part, the surface of which is provided with two through holes III and one through hole IV, and the side surface of the through hole IV is provided with a circular boss.

[0074] Specifically, the connecting seat 54 is a cylindrical processed part, the center of which is provided with a through hole V for installing the air volume sensor 52, the side surface of which is provided with a threaded hole II and a U-shaped groove, the air volume sensor 52 is deeply inserted into the through hole V of the connecting seat 54, the detection hole of the air volume sensor 52 is ensured to be in the same plane as the U-shaped groove, the air volume sensor 52 is fixedly connected with the connecting seat 54 by screwing the threaded hole II and tightening, the U-shaped groove of the connecting seat 54 is corresponded to the boss of the fixed seat 53, and then the two are fixedly connected.

[0075] Referring to Figure 11 , Figure 12 , the cover plate 55 is a rectangular processed part, the surface of which is provided with two through holes II, and the cover plate 55 is fixedly installed on the side surface of the air inlet duct 51.

[0076] Specifically, when the air volume needs to be detected, the cover plate 55 is removed, the fixed seat 53 is installed on the side surface of the air inlet duct 51, and the circular boss is ensured to be located at the upper end of the through hole IV during installation.

[0077] Specifically, the cold water machine 11 and the air supply fan 22 are started, the cold water machine 11 delivers the circulating liquid to the fin heat exchanger 13, and the air supply fan 22 inhales the clean air, when passing through the fin heat exchanger 13, the circulating liquid transmits heat to the clean air through the aluminum fin, the clean air is delivered to the air supply cavity 23 through the air supply fan 22, the temperature sensor 25 detects the temperature of the clean air and transmits the data to the control module, the control module adjusts the temperature of the cold water machine 11 according to the detected temperature data, until the temperature of the clean air reaches the target value, the clean air enters the chamber 4 through the air inlet pipe 51, according to the air volume data detected by the air volume sensor 52, the adjusting plug 31 is moved until the air volume data reaches the target value, then the fixing seat 53 is removed, and the cover plate 55 is installed to the side of the air inlet pipe 51.

[0078] In summary, the utility model discloses a heat exchange mechanism cooperates with air supply mechanism and transmits heat to clean air, and control module regulates and controls the temperature and air volume of clean air in the chamber through heat exchange mechanism and air volume adjusting mechanism, can guarantee that the temperature of each chamber maintains at the set temperature, avoids the temperature in the chamber to change suddenly, realizes the precision and life of stable precision parts, and improves the precision of defect detection.

[0079] In the description of the embodiments of the utility model, unless there is definite and limited, the terms " install " " connect " " connection " should be broad sense understanding, for example, can be fixed connection, also can be detachable connection, or integrally connected, can be mechanical connection, also can be electrical connection, can be directly connected, also can be indirectly connected through the intermediate medium, can be the intercommunication of two elements. For ordinary skilled in the art, the specific meaning of the above terms in the utility model can be understood according to specific circumstances.

[0080] In the description of the utility model, it needs to be explained that the orientation or position relationship indicated by the terms " center " " upper " " lower " " left " " right " " vertical " " horizontal " " inner " " outer " is based on the orientation or position relationship shown in the drawing, and is only for the convenience of describing the utility model and simplifying the description, and does not indicate or imply that the indicated device or element must have a particular orientation, a particular orientation and operation, therefore, it can not be understood as the limitation of the utility model. In addition, terms such as " first " " second " and other numerical terms are used in this paper, unless the text indicates explicitly. Therefore, the above discussed first element, component, area, layer or section can be called second element, component, area, layer or section without departing from the teaching of the example embodiment.

[0081] Spatially relative terms, such as "inner," "outer," "beneath," "below," "lower," "above," "upper," and the like, can be used herein for ease of description to describe one element or feature's relationship to another element(s) or feature(s) as illustrated in the figures. Spatially relative terms can be intended to encompass different orientations of the device in use or operation in addition to the orientation depicted in the figures. For example, if the device in the figures is turned over, elements described as "below" or "beneath" other elements or features would then be oriented "above" the other elements or features. Thus, the example term "below" can encompass both an orientation of above and below. The device can be otherwise oriented (rotated 90 degrees or at other orientations) and the spatially relative descriptors used herein interpreted accordingly.

[0082] In the above discussion, unless otherwise stated, the terms "about," "approximately," "substantially" and the like mean a variation of + / - 10% when used to describe a numerical value.

[0083] With the above ideal embodiments according to the present application as the inspiration, through the above description, relevant personnel can certainly make various changes and modifications without deviating from the technical thought of the present application. The technical scope of the present application is not limited to the content in the specification, and must be determined according to the scope of claims.

Claims

1. A constant temperature system, characterized in that, include: The system comprises a control module, a heat exchange mechanism (1), an air supply mechanism (2), several air volume regulating mechanisms (3), and several chambers (4); among which... The air supply mechanism (2) is connected to the heat exchange mechanism (1), each of the air volume regulating mechanisms (3) is connected to the air supply mechanism (2), and each of the chambers (4) is connected to the corresponding air volume regulating mechanism (3). The heat exchange mechanism (1) is electrically connected to the control module; The heat exchange mechanism (1) is adapted to transfer heat to the air supply mechanism (2) so that the air supply mechanism (2) blows hot air to each air volume regulating mechanism (3); Each of the air volume adjustment mechanisms (3) is adapted to adjust the corresponding opening degree to adjust the air volume of the hot air blown into the corresponding chamber (4); The control module is configured to control the heat exchange temperature of the heat exchange mechanism (1) in order to control the temperature of the hot air blown out by the air supply mechanism (2).

2. The constant temperature system as described in claim 1, characterized in that, The heat exchange mechanism (1) includes: a chiller (11), an inlet pipe (12), a finned heat exchanger (13), and an outlet pipe (14). The water inlet pipe (12) is connected to the chiller (11) and the finned heat exchanger (13) respectively. The finned heat exchanger (13) is located on one side of the air supply mechanism (2). The water outlet pipe (14) is connected to the chiller (11) and the finned heat exchanger (13) respectively. The chiller (11) is electrically connected to the control module; The chiller (11) is adapted to output circulating liquid to the finned heat exchanger (13) through the inlet pipe (12) for heat exchange, so that the finned heat exchanger (13) transfers heat to the air supply mechanism (2), and the circulating liquid after heat exchange in the finned heat exchanger (13) returns to the chiller (11) through the outlet pipe (14). The control module is configured to control the heat exchange temperature of the chiller (11).

3. The constant temperature system as described in claim 2, characterized in that, The heat exchange mechanism (1) further includes: a water receiving tray (15); The water receiving tray (15) is located between the finned heat exchanger (13) and the air supply mechanism (2) to prevent the circulating liquid from flowing to the air supply mechanism (2).

4. The constant temperature system as described in claim 2, characterized in that, The air supply mechanism (2) includes: a heat-conducting cover (21), at least one air supply fan (22) and an air supply cavity (23); The heat-conducting cover (21) is located on one side of the finned heat exchanger (13), the air blower (22) is located inside the heat-conducting cover (21), and the air blower cavity (23) is located on one side of each air blower (22). The finned heat exchanger (13) transfers heat to the heat-conducting cover (21) to heat the air inside the heat-conducting cover (21), and then each of the air blowers (22) blows hot air to each air volume regulating mechanism (3) through the air blower cavity (23).

5. The constant temperature system as described in claim 4, characterized in that, The air supply mechanism (2) also includes: a filter element (24); The filter element (24) is located between each blower (22) and the air chamber (23) to filter impurities in the hot air blown out by each blower (22).

6. The constant temperature system as described in claim 4, characterized in that, The air supply mechanism (2) also includes: a temperature sensor (25); The temperature sensor (25) is located inside the air supply cavity (23), and the temperature sensor (25) is electrically connected to the control module; The control module is also configured to detect the temperature of the hot air flowing through the air supply cavity (23) via a temperature sensor (25).

7. The constant temperature system as described in claim 4, characterized in that, The air volume regulating mechanism (3) includes: regulating plate (31), air outlet duct (32) and air supply hose (33); The adjusting plate (31) is located between the air supply cavity (23) and the air outlet duct (32). The adjusting plate (31) is slidably connected to the air supply cavity (23) and slidably connected to the air outlet duct (32). The air supply hose (33) is connected to the air outlet duct (32) and the cavity (4) respectively. The adjusting plate (31) is provided with an adjusting hole (311); The adjusting plate (31) is adapted to slide relative to the air supply cavity (23) and the air outlet duct (32) so that the adjusting hole (311) adjusts the opening between the air supply cavity (23) and the air outlet duct (32).

8. The constant temperature system as described in claim 7, characterized in that, Also includes: Several air volume testing institutions (5); Each of the air volume detection mechanisms (5) is connected to the corresponding air supply hose (33) and the corresponding chamber (4), and each of the air volume detection mechanisms (5) is electrically connected to the control module; The control module is also configured to detect the air volume of hot air through each air volume detection mechanism (5).

9. The constant temperature system as described in claim 8, characterized in that, The air volume detection mechanism (5) includes: an air inlet duct (51) and an air volume sensor (52); The air inlet duct (51) is connected to the air supply hose (33) and the chamber (4) respectively; The air volume sensor (52) extends into the air inlet duct (51) and is electrically connected to the control module; The control module is also configured to detect the air volume of hot air via an air volume sensor (52).

10. The constant temperature system as described in claim 9, characterized in that, The air volume detection mechanism (5) also includes: a fixed base (53) and a connecting base (54); The fixing seat (53) is located on the outer surface of the air inlet duct (51), and the fixing seat (53) is connected to the interior of the air inlet duct (51); The connecting seat (54) is movably connected to the fixed seat (53), and the air volume sensor (52) is movably connected to the connecting seat (54) so ​​that the air volume sensor (52) extends into the air inlet duct (51).

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