Safety protection device of crystal picking machine

Abstract

The utility model relates to the technical field of semiconductor production and manufacturing, and discloses a safety protection device of a crystal picking machine, which comprises a protection plate, a supporting rod and a connecting seat, one end of the supporting rod is rotatably connected with the connecting seat, the other end of the supporting rod is connected with the bottom of the protection plate, the connecting seat is provided with a plane for connecting a machine table, and a locking assembly is arranged on the connecting seat. The locking assembly comprises a sliding rod and a pair of connecting rods, the sliding rod penetrates through the connecting base, a channel for the sliding rod to move is formed in the connecting base, the connecting rods are rotationally connected to the two ends of the sliding rod, the ends, away from the sliding rod, of the connecting rods are hinged to the supporting rod, and through holes communicated with the channel are formed in the connecting base. And an inserting piece for limiting the sliding rod is arranged in the through hole. According to the utility model, the supporting rod and the connecting seat are arranged in a matched manner, so that the protection plate is rotatably mounted in a feeding and discharging risk area of the crystal picking machine, an internal movement mechanism is shielded and protected, and meanwhile, the internal mechanism is also convenient to disassemble and maintain.

Description

TECHNICAL FIELD

[0001] The utility model relates to the technical field of semiconductor production and manufacturing, specifically to a pick up wafer machine safety device. BACKGROUND

[0002] The pick up wafer machine is a kind of equipment for picking up wafer in semiconductor industry, and the wafer is picked up by mechanical hand to tray and is transferred, so the tray placing platform is usually arranged in the pick up wafer machine, each tray can be loaded with a certain number of IC wafers, when a tray is filled, workers need to collect materials and replace new empty tray to continue picking up wafer, but the internal moving mechanism of the existing pick up wafer machine is exposed outside to facilitate disassembly and maintenance, and the tray can be dropped into the machine during the manual loading process, and the internal mechanism is collided, so as to cause the damage of machine hardware. UTILITY MODEL CONTENTS

[0003] The utility model aims at providing a kind of pick up wafer machine safety device to solve the problems raised in the above background.

[0004] To achieve the above object, the utility model provides the following technical scheme: a kind of pick up wafer machine safety device, including protection plate, support rod and connecting seat, the support rod one end is rotationally connected with connecting seat, and the other end is connected with the bottom of protection plate, the connecting seat has the plane for connecting machine, the protection plate is rotationally connected with machine by connecting seat under the drive of support rod, locking assembly is equipped on the connecting seat, the locking assembly includes slide rod and a pair of connecting rod, the slide rod is set through connecting seat, the channel for the movement of slide rod is opened in the connecting seat, the connecting rod is rotationally connected at the two ends of slide rod, the end of the pair of connecting rod away from slide rod is respectively hinged with support rod, the through hole that is communicated with channel is opened in the connecting seat, the insert for the limiting of slide rod is equipped in the through hole.

[0005] In the application scheme, the following improvements are made, the insert includes upper and lower arranged convex column and threaded seat, the convex column side is equipped with rotary inclined surface, the threaded seat top end is equipped with the top block matched with rotary inclined surface, the inner thread matched with threaded seat is equipped on the through hole inner wall, the convex column top end is equipped with stop block.

[0006] In the application scheme, the following improvements are made, the convex column bottom is equipped with positioning block, and the positioning hole matched with positioning block is opened in the middle of threaded seat top end.

[0007] In the application scheme, the following improvements are made, the number of support rod is at least two and is symmetrically distributed, and the protection plate is installed at the top end of multiple support rods.

[0008] The connecting seat is provided with a mounting groove in the middle of the side away from the plug-in part, and the fixing shaft is arranged through the end of the supporting rod and connected with the inner wall of the mounting groove.

[0009] The inner wall of the mounting groove is provided with a protrusion, and the protrusion away from the mounting groove is attached to the side edge of the supporting rod.

[0010] Compared with the prior art, the safety protection device of the crystal picking machine has the following beneficial effects:

[0011] The supporting rod and the connecting seat are matched to rotate the protection plate on the feeding and discharging risk area of the crystal picking machine, shield and protect the internal moving mechanism, prevent the tray from falling into the machine table and impacting the hardware to cause damage, and facilitate disassembly and maintenance of the internal mechanism. BRIEF DESCRIPTION OF DRAWINGS

[0012] Figure 1 The utility model of structure schematic drawing is provided;

[0013] Figure 2 It is the sectional view of locking assembly.

[0014] In the drawing: 1, protection plate;2, supporting rod;21, fixed shaft;3, connecting seat;31, channel;32, through hole;33, mounting groove;331, protrusion;4, slide rod;5, connecting rod;6, plug-in part;61, convex column;611, positioning block;62, threaded seat;621, positioning hole;63, rotating inclined surface;64, top block;65, block. DETAILED DESCRIPTION

[0015] The technical scheme in the embodiments of the utility model will be described below with reference to the drawings in the embodiments of the utility model:

[0016] For example, Figure 1As shown in the figure, the safety protection device of the crystal picking machine is mainly composed of a protection plate 1, a supporting rod 2 and a connecting seat 3. Firstly, the protection plate 1 is made according to the position and size of the risk corresponding area on the machine table, and the sheet metal strength of the protection plate 1 is manually not foldable. The number of the supporting rod 2 is two and symmetrically distributed. The protection plate 1 is fixedly installed at the top of the two supporting rods 2 and moves synchronously with the supporting rods 2. The connecting seat 3 is provided with a mounting groove 33 in the middle of one side. The supporting rod 2 is provided with a fixed shaft 21 penetratingly arranged at the end thereof, and the two ends of the fixed shaft 21 are connected with the inner wall of the mounting groove 33, so that one end of the supporting rod 2 is rotatably connected with the connecting seat 3 and the other end is connected with the bottom of the protection plate 1. The connecting seat 3 has a plane for connecting the machine table. The plane is provided with holes at four corners, which are matched with the existing screw holes on the machine table, and the hexagonal bolts are used for fixing the same without damaging the machine table. The protection plate 1 is rotatably connected with the machine table through the connecting seat 3 under the driving of the supporting rod 2.

[0017] As shown in the figure, Figure 2 The connecting seat 3 is provided with a locking assembly. The locking assembly comprises a slide rod 4 and a pair of connecting rods 5. The slide rod 4 is penetratingly arranged in the connecting seat 3. The connecting seat 3 is provided with a channel 31 for the movement of the slide rod 4. The connecting rods 5 are rotatably connected at the two ends of the slide rod 4. The ends of the connecting rods 5 away from the slide rod 4 are hingedly connected with the supporting rods 2. The connecting seat 3 is provided with a through hole 32 in communication with the channel 31. The through hole 32 is provided with an insert 6 for limiting the slide rod 4. The insert 6 comprises a convex column 61 and a threaded seat 62 arranged in an up-down manner. The side edge of the convex column 61 is provided with a rotating inclined surface 63. The top end of the threaded seat 62 is provided with a top block 64 matched with the rotating inclined surface 63. The inner wall of the through hole 32 is provided with an internal thread matched with the threaded seat 62. The top end of the convex column 61 is provided with a stop block 65. The bottom of the convex column 61 is provided with a positioning block 611. The top end of the threaded seat 62 is provided with a positioning hole 621 matched with the positioning block 611. The bottom side edge of the threaded seat 62 is connected with a rotating wrench, which is convenient to rotate.

[0018] In order to improve the stability of the supporting rod 2, a convex block 331 is arranged on the inner wall of the mounting groove 33. The side of the convex block 331 away from the mounting groove 33 is matched with the side edge of the supporting rod 2. When the supporting rod 2 and the plane of the connecting seat 3 keep a 90-degree angle, the connecting end of the supporting rod 2 is supported.

[0019] The above embodiments are only part of the embodiments of the present application, not all the embodiments. Based on the embodiments in the present application, all other embodiments obtained by those skilled in the art without creative labor belong to the scope of protection of the present application.

Claims

1. A safety protection device for a crystal sorting machine, characterized in that: The utility model provides a protective plate, support rod and connecting seat, one end of the support rod (2) is rotatably connected with the connecting seat (3), the other end is connected with the bottom of the protective plate (1), the connecting seat (3) has a plane for connecting the machine table, the protective plate (1) is rotatably connected with the machine table through the connecting seat (3) under the drive of the support rod (2), the connecting seat (3) is equipped with locking assembly, the locking assembly includes slide rod (4) and a pair of connecting rod (5), the slide rod (4) is arranged through the connecting seat (3), the connecting seat (3) is equipped with the passageway (31) for the movement of slide rod (4), the connecting rod (5) is rotatably connected at both ends of slide rod (4), and the end of the connecting rod (5) away from slide rod (4) is hingedly connected with the support rod (2) respectively, the connecting seat (3) is equipped with the through hole (32) being communicated with the passageway (31), and the through hole (32) is equipped with the insert (6) for limiting slide rod (4).

2. The safety guard of claim 1, wherein: The insert (6) includes upper and lower convex columns (61) and threaded seats (62), the convex column (61) side is equipped with a rotating inclined surface (63), the threaded seat (62) top is equipped with a top block (64) matched with the rotating inclined surface (63), the through hole (32) inner wall is equipped with an internal thread matched with the threaded seat (62), and the convex column (61) top is equipped with a stop block (65).

3. The safety guard of claim 2, wherein: The convex column (61) bottom is equipped with a positioning block (611), and the threaded seat (62) top is equipped with a positioning hole (621) matched with the positioning block (611).

4. The safety guard of claim 1, wherein: The number of the support rod (2) is at least two and is symmetrically distributed, and the protective plate (1) is installed at the top of the plurality of support rods (2).

5. The safety guard of claim 1, wherein: The connecting seat (3) is equipped with an installation groove (33) in the middle of the side away from the insert (6), the support rod (2) end is equipped with a fixed shaft (21) arranged through, and the fixed shaft (21) two ends are connected with the inner wall of the installation groove (33) respectively.

6. The safety guard of claim 5, wherein: The inner side wall of the installation groove (33) is equipped with a convex block (331), and the side of the convex block (331) away from the installation groove (33) is attached to the side edge of the support rod (2).

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