Crystal stabbing device

Abstract

The utility model discloses a crystal stabbing device which comprises a bearing frame, a moving frame, a moving plate, crystal stabbing needles, a first hinge mechanism and a second hinge mechanism. The moving frame is movably arranged in the bearing frame, the moving plate is movably arranged in the moving frame, and one end of the crystal pricking needle is fixedly connected to the moving plate; the moving frame comprises two first side plates which are arranged at intervals in the first direction, the first side plates are provided with convex parts, the first hinge mechanism is connected with the bearing frame and the convex parts, and the first hinge mechanism can drive the moving frame to move relative to the bearing frame; the second hinge mechanism is connected with the moving frame and the moving plate and can drive the moving plate to move relative to the moving frame. According to the utility model, the first hinge mechanism and the second hinge mechanism are arranged to realize no motion friction, and the first side plate of the motion frame is provided with the convex part, so that the motion frame and the bearing frame are conveniently connected with the first flexible hinge mechanism, and the whole structure is simple and compact.

Description

TECHNICAL FIELD

[0001] The utility model relates to the technical field of semiconductor packaging, especially relates to a chip mass transfer's prick crystal device. BACKGROUND

[0002] With the continuous development of chips, the size of chips is becoming more and more miniaturized. The microchip made needs to be transferred from the crystal film to the substrate. These mass microchips are perfectly transferred to the circuit substrate to reduce manufacturing costs, and this technology is called mass transfer. In the mass transfer process, the prick crystal method is generally used, the mini LED is quickly positioned with the circuit carrier plate, and then the mini LED is pricked down with the prick crystal needle to transfer the mini LED to the circuit carrier plate. However, the existing prick crystal platform is complex in design, large in overall size, and has limitations in use. SUMMARY

[0003] In view of the deficiencies in the prior art, the utility model aims to provide a prick crystal device.

[0004] In order to achieve the above-mentioned purpose, the technical scheme provided by an embodiment of the utility model is as follows:

[0005] A prick crystal device comprises:

[0006] A bearing frame;

[0007] A moving frame movably arranged in the bearing frame, the moving frame comprising two first side plates spaced apart along a first direction, at least one of the first side plates being provided with a protrusion, the protrusion protruding from the corresponding first side plate in a direction away from the other first side plate;

[0008] A moving plate movably arranged in the moving frame;

[0009] A prick crystal needle, one end of the prick crystal needle being fixedly connected to the moving plate, the other end of the prick crystal needle sequentially penetrating through the moving frame and the bearing frame;

[0010] A first hinge mechanism, the first hinge mechanism being connected to the bearing frame and the protrusion respectively, the first hinge mechanism being capable of moving the moving frame relative to the bearing frame along the first direction;

[0011] A second hinge mechanism, the second hinge mechanism being connected to the moving frame and the moving plate respectively, the second hinge mechanism being capable of moving the moving plate relative to the moving frame along a second direction;

[0012] Wherein, the first direction is perpendicular to the second direction.

[0013] As a further improvement of the utility model, two first side plates are respectively provided with the convex part, the first hinge mechanism includes two first hinge groups which are arranged along the first direction at intervals, and each first hinge group is movably connected to the bearing frame at two ends along the second direction, and each first hinge group is connected to a corresponding convex part.

[0014] As a further improvement of the utility model, each first hinge group includes two first flexible hinges which are arranged along the second direction at intervals, the convex part is connected between the two first flexible hinges, and each first flexible hinge is connected to the bearing frame at an end away from the convex part.

[0015] As a further improvement of the utility model, the second hinge mechanism includes two second hinge groups which are arranged along the second direction at intervals, each second hinge group is movably connected to the moving frame at two ends along the first direction, and each second hinge group is connected to the moving plate.

[0016] As a further improvement of the utility model, each second hinge group includes two second flexible hinges which are arranged along the first direction at intervals, the moving plate is connected between the two second flexible hinges, and each second flexible hinge is connected to the moving frame at an end away from the moving plate.

[0017] As a further improvement of the utility model, one side of the convex part of at least one first side plate towards the other first side plate is provided with an inner side, two ends of the inner side along the second direction are respectively provided with limiting surfaces, and the two limiting surfaces are arranged at an angle with the inner side; one of the second hinge groups is movably connected to the inner side, and the second hinge group can move along the inner side between the two limiting surfaces.

[0018] As a further improvement of the utility model, one of the second hinge groups is connected to an end of the moving plate away from the crystal piercing needle, the other second hinge group is connected to an end of the moving plate towards the crystal piercing needle, and two ends of the other second hinge group are movably connected to the two first side plates.

[0019] As a further improvement of the utility model, still include first drive mechanism, first drive mechanism connect motion frame, first drive mechanism can drive motion frame relative to the bearing frame moves along first direction, and / or still include second drive mechanism, second drive mechanism connect motion plate, second drive mechanism can drive motion plate relative to the motion frame moves along second direction, and / or still include first encoder module, first encoder module is used for feedback motion frame in first direction's motion position, and / or still include second encoder module, second encoder module is used for feedback motion plate in second direction's motion position.

[0020] As a further improvement of the utility model, still include first drive mechanism and second drive mechanism, first drive mechanism connect motion frame, second drive mechanism connect motion plate, first drive mechanism can drive motion frame relative to the bearing frame moves along first direction, second drive mechanism can drive motion plate relative to the motion frame moves along second direction, first drive mechanism and / or second drive mechanism include voice coil motor.

[0021] As a further improvement of the utility model, still include first shell and second shell, first shell and second shell along third direction respectively connect in the both sides of bearing frame.

[0022] The utility model discloses the beneficial effects are:

[0023] In the utility model, realize frictionless motion through setting up first hinge mechanism and second hinge mechanism, and motion precision is high, and, the first side plate of motion frame sets up the convex part, the connection of first flexible hinge mechanism is facilitated to motion frame and bearing frame, makes whole structure simple and compact, and internal space utilization rate is big. ACCURACY

[0024] In order to more clearly illustrate the technical scheme in the embodiment of the utility model or prior art, the following will be to the embodiment or prior art description needed to use the drawing briefly introduced, obviously, the following description in the drawing only is some embodiments of the utility model is recorded, for the ordinary skilled person in the art comes, under the premise of not paying the creative labor, still can obtain other drawings according to these drawings.

[0025] Figure 1 It is the assembly drawing of the preferred embodiment of the utility model;

[0026] Figure 2 It is the exploded structural schematic view of the preferred embodiment of the utility model;

[0027] Figure 3The structure schematic view of the preferred embodiment of the utility model is not provided with the first shell, the second shell, the first sealing plate and the second sealing plate;

[0028] Figure 4 The structure schematic view of the preferred embodiment of the utility model is not provided with the first shell, the second shell, the first sealing plate and the second sealing plate;

[0029] Figure 5 For Figure 4 The front view of the preferred embodiment of the utility model is shown in the figure;

[0030] Figure 6 The front view of the preferred embodiment of the utility model is shown in the figure;

[0031] Figure 7 The total displacement graph of YZ axis of the preferred embodiment of the utility model is shown in the figure;

[0032] Figure 8 The partial displacement graph along Y direction of the preferred embodiment of the utility model is shown in the figure;

[0033] Figure 9 The partial displacement graph along Z direction of the preferred embodiment of the utility model is shown in the figure;

[0034] Figure 10 The frequency response numerical value graph of the preferred embodiment of the utility model is shown in the figure;

[0035] Figure 11 The frequency response graph of the preferred embodiment of the utility model is shown in the figure;

[0036] In the figure: 1, bearing frame, 11, first bearing plate, 12, second bearing plate, 2, movement frame, 21, first side plate, 211, convex part, 212, inner side, 213, limiting surface, 22, second side plate, 3, movement plate, 31, first protruding block, 32, support seat, 33, second protruding block, 4, crystal piercing needle, 5, first hinge group, 51, first flexible hinge, 6, second hinge group, 61, second flexible hinge, 71, first encoder module, 711, first reading part, 712, first grating part, 72, second encoder module, 721, second reading part, 722, second grating part, 81, first voice coil motor, 82, second voice coil motor, 91, first shell, 92, second shell, 93, first sealing plate, 94, second sealing plate, 95, connecting terminal. DETAILED DESCRIPTION

[0037] In order to enable the personnel in the technical field to better understand the technical solutions in the present application, the technical solutions in the embodiments of the present application will be clearly and completely described below in combination with the drawings in the embodiments of the present application. Obviously, the described embodiments are only some of the embodiments of the present application, but not all the embodiments. Based on the embodiments in the present application, all the other embodiments obtained by the personnel in the art without creative labor should belong to the scope of protection of the present application.

[0038] Please refer to Figures 1-6 A crystal piercing device, comprising: a bearing frame 1, a moving frame 2, a moving plate 3, a crystal piercing needle 4, a first hinge mechanism and a second hinge mechanism. The moving frame 2 is movably arranged in the bearing frame 1, and the moving frame 2 comprises two first side plates 21 arranged at intervals along a first direction, at least one first side plate 21 is provided with a protrusion 211, and the protrusion 211 protrudes from the corresponding one of the first side plates 21 in a direction away from the other first side plate 21. The moving plate 3 is movably arranged in the moving frame 2; one end of the crystal piercing needle 4 is fixedly connected to the moving plate 3, and the other end of the crystal piercing needle 4 passes through the moving frame 2 and the bearing frame 1 in sequence. The first hinge mechanism is connected to the bearing frame 1 and the protrusion 211 respectively, and the first hinge mechanism can drive the moving frame 2 to move relative to the bearing frame 1 along the first direction. The second hinge mechanism is connected to the moving frame 2 and the moving plate 3 respectively, and the second hinge mechanism can drive the moving plate 3 to move relative to the moving frame 2 along a second direction. The first direction is perpendicular to the second direction.

[0039] The present application has the advantages of simple and compact structure, high utilization rate of internal space, convenient placement of movement along the first direction and movement along the second direction into the same plane, complete decoupling of the movement along the first direction and the movement along the second direction, independent and non-interfering movement, no movement friction, and high movement precision. The first direction is defined as the Y-axis direction in the Figure 1 , and the second direction is defined as the Z-axis direction in the Figure 1 , the first flexible hinge mechanism has very high rigidity in the X-axis and Z-axis directions, the second flexible hinge mechanism has very high rigidity in the X-axis and Y-axis directions, and the first flexible hinge mechanism and the second flexible hinge mechanism have high off-axis rigidity. The first flexible hinge mechanism drives the moving frame 2 to move along the Y-axis direction, and the second flexible hinge mechanism drives the moving plate 3 to move along the Z-axis direction, so that the crystal piercing needle 4 moves independently and completely decouples in the Y-axis and Z-axis movement directions, and high-frequency movement can be realized. The protrusion 211 provided on the first side plate 21 of the moving frame 2 facilitates the connection of the moving frame 2 and the bearing frame 1 with the first flexible hinge mechanism, and the connection of the moving frame 2 and the moving plate 3 with the second flexible hinge mechanism, and facilitates the movement and restoration of the first flexible hinge mechanism and the second flexible hinge mechanism, thereby realizing high-precision, high-speed and fast-response movement.

[0040] In the embodiment, the two first side plates 21 are respectively provided with protrusions 211, and the first hinge mechanism comprises two first hinge groups 5 which are spaced apart along the first direction; each first hinge group 5 is movably connected to the carrying frame 1 at two ends along the second direction, and each first hinge group 5 is connected to a corresponding protrusion 211.

[0041] Preferably, each first hinge group 5 comprises two first flexible hinges 51 which are spaced apart along the second direction, the protrusion 211 is connected between the two first flexible hinges 51, and each first flexible hinge 51 is connected to the carrying frame 1 at an end away from the protrusion 211.

[0042] In the embodiment, the second hinge mechanism comprises two second hinge groups 6 which are spaced apart along the second direction, each second hinge group 6 is movably connected to the moving frame 2 at two ends along the first direction, and each second hinge group 6 is connected to the moving plate 3.

[0043] Preferably, each second hinge group 6 comprises two second flexible hinges 61 which are spaced apart along the first direction, the moving plate 3 is connected between the two second flexible hinges 61, and each second flexible hinge 61 is connected to the moving frame 2 at an end away from the moving plate 3.

[0044] One face of the protrusion 211 of at least one first side plate 21 towards the other first side plate 21 is provided with an inner side surface 212, the two ends of the inner side surface 212 along the second direction are respectively provided with limiting surfaces 213, and the two limiting surfaces 213 are respectively arranged at an angle with the inner side surface 212; one of the second hinge groups 6 is movably connected to the inner side surface 212, and the one of the second hinge groups 6 can move along the inner side surface 212 between the two limiting surfaces 213.

[0045] One of the second hinge groups 6 is connected to an end of the moving plate 3 away from the crystal needling needle 4, the other of the second hinge groups 6 is connected to an end of the moving plate 3 towards the crystal needling needle 4, and the two ends of the other of the second hinge groups 6 are movably connected to the two first side plates 21.

[0046] In an embodiment, a first driving mechanism is further included, the first driving mechanism is connected to the moving frame 2, and the first driving mechanism can drive the moving frame 2 to move relative to the bearing frame 1 along the first direction; and / or a second driving mechanism is further included, the second driving mechanism is connected to the moving plate 3, and the second driving mechanism can drive the moving plate 3 to move relative to the moving frame 2 along the second direction; and / or a first encoder module 71 is further included, the first encoder module 71 is used to feedback the moving position of the moving frame 2 along the first direction; and / or a second encoder module 72 is further included, the second encoder module 72 is used to feedback the moving position of the moving plate 3 along the second direction. Through the cooperation of the first driving mechanism, the first flexible hinge mechanism and the first encoder module 71, and the cooperation of the second driving mechanism, the second flexible hinge mechanism and the second encoder module 71, the high-precision, high-speed and fast-response linear motion along the first direction and the second direction is further ensured.

[0047] In another embodiment, a first driving mechanism and a second driving mechanism are further included, the first driving mechanism is connected to the moving frame 2, and the second driving mechanism is connected to the moving plate 3; the first driving mechanism can drive the moving frame 2 to move relative to the bearing frame 1 along the first direction, and the second driving mechanism can drive the moving plate 3 to move relative to the moving frame 2 along the second direction; the first driving mechanism and / or the second driving mechanism includes a voice coil motor. Specifically, the first driving mechanism includes a first voice coil motor 81, and the second driving mechanism includes a second voice coil motor 82. The structures of the first voice coil motor 81 and the second voice coil motor 82 are simple and small.

[0048] Preferably, the bearing frame 1 includes two first bearing plates 11 arranged opposite along the first direction and two second bearing plates 12 arranged opposite along the second direction, and each second bearing plate 12 is connected between the two first bearing plates 11. The two ends of the first flexible hinge 51 are respectively connected to the second bearing plate 12 and the convex part 211. The fixed part of the first voice coil motor 81 is fixed to one of the second bearing plates 12, and the driving part of the first voice coil motor 81 is connected to one of the convex parts 211. The moving frame 2 further includes two second side plates 22 arranged opposite along the second direction, and each second side plate 22 is connected between the two first side plates 21. The fixed part of the second voice coil motor 82 is fixed to one of the second side plates 22, and the driving part of the second voice coil motor 82 is connected to the moving plate 3.

[0049] Preferably, the top of the moving plate 3 is provided with a first protrusion 31, and the two ends of the second flexible hinge 61 of one of the second flexible hinge groups 6 are connected to the first protrusion 31 and the inner side 212 of the convex portion 211 respectively. In order to improve the stability of the connection between the second voice coil motor 82 and the first protrusion 31, a hollow support seat 32 is preferably connected to the first protrusion 31, and the driving part of the second voice coil motor 82 is connected to the support seat 32. The bottom of the moving plate 3 is provided with a second protrusion 33, and the crystal piercing needle 4 is connected to the second protrusion 33. The two ends of the second flexible hinge 61 of the other second flexible hinge group 6 are connected to the first side plate 21 and the second protrusion 33 respectively.

[0050] Preferably, the first flexible hinge 51 and the second flexible hinge 61 are both in the form of a straight line, which is simple and convenient to process and easy to move.

[0051] It also includes a first housing 91 and a second housing 92, and the first housing 91 and the second housing 92 are connected to the two sides of the bearing frame 1 along a third direction. The third direction is the X-axis direction defined in the middle. Figure 1 The first housing 91 is connected with a first sealing plate 93, and the second housing 92 is connected with a second sealing plate 94, and the second sealing plate 94 is provided with a connecting terminal 95.

[0052] In order to further improve the accuracy of the first encoder module 71 and the second encoder module 72 in collecting positions, the first reading part 711 of the first encoder module 71 is arranged on the first housing 91, the first grating ruler part 712 of the first encoder module 71 is arranged on the other second side plate 22 of the moving frame 2, the second reading part 721 of the second encoder module 72 is arranged on the other first side plate 21 of the moving frame 2, and the second grating ruler part 722 of the second encoder module 72 is arranged on the moving plate 3.

[0053] In use, the first voice coil motor 81 works, and the first voice coil motor 81 drives the convex portion 211 to move along the first direction. At this time, the first flexible hinge 51 moves, driving the moving frame 2 as a whole to move along the first direction, so as to adjust the movement position of the crystal piercing needle 4 in the first direction. The second voice coil motor 82 drives the moving plate 3, and at this time, the second flexible hinge 61 moves, and the moving plate 3 drives the crystal piercing needle 4 to move along the second direction. In the process of downward movement of the crystal piercing needle 4, the horizontal position of the crystal piercing needle 4 is adjusted to make the crystal piercing needle 4 align with the mini LED below, so that the crystal piercing needle 4 accurately pierces the mini LED, and the mini LED is separated from the chip carrier and transferred to the circuit carrier.

[0054] In order to better illustrate the crystal piercing device of the embodiment, the first flexible hinge 51 and the second flexible hinge 61 are both made of material 7075AL, and the obtained mechanical analysis diagram is obtained based on simulation analysis of solidworks. Figures 7-9The total deformation of the YZ axis of the crystal piercing needle 4 is 1.56 mm, the partial displacement in the Y+ direction is 1.040 mm, and the partial displacement in the Z- direction is 1.161 mm. It is confirmed that the crystal piercing device can realize a precise movement stroke of ±1 mm, and the movement precision is high.

[0055] The frequency response numerical graph and the frequency response graph obtained by frequency analysis of the crystal piercing device are shown in Figure 10 、 Figure 11 The first order frequency is 81.5 HZ, which is the working direction of the first flexible hinge 51. The second order frequency is 121.0 HZ, which is the working direction of the second flexible hinge 61. The input frequency of the first voice coil motor 81 and the second voice coil motor 82 should avoid the frequency band corresponding to the two frequencies to avoid resonance.

[0056] It is obvious for those skilled in the art that the present application is not limited to the details of the above exemplary embodiments, and can be implemented in other specific forms without departing from the spirit or essential characteristics of the present application. Therefore, the embodiments should be regarded as exemplary and non-limiting, and the scope of the present application is defined by the appended claims rather than the above description, and all changes falling within the meaning and scope of the equivalent elements of the claims are intended to be included in the present application. Any reference signs in the claims should not be regarded as limiting the claims involved.

[0057] In addition, it should be understood that although the present specification is described in terms of embodiments, not every embodiment contains only one independent technical solution, and the description manner of the specification is only for the sake of clarity, and those skilled in the art should regard the specification as a whole, and the technical solutions in each embodiment can also be properly combined to form other embodiments that those skilled in the art can understand.

Claims

1. A crystal piercing device, characterized in that, The device comprises: a bearing frame; a moving frame movably arranged in the bearing frame, the moving frame comprising two first side plates spaced apart along a first direction, at least one of the first side plates being provided with a protrusion protruding from the corresponding first side plate away from the other first side plate; a moving plate movably arranged in the moving frame; a crystal piercing needle, one end of the crystal piercing needle being fixedly connected to the moving plate, the other end of the crystal piercing needle sequentially penetrating through the moving frame and the bearing frame; a first hinge mechanism, the first hinge mechanism being connected to the bearing frame and the protrusion respectively, the first hinge mechanism being capable of moving the moving frame relative to the bearing frame along the first direction; a second hinge mechanism, the second hinge mechanism being connected to the moving frame and the moving plate respectively, the second hinge mechanism being capable of moving the moving plate relative to the moving frame along a second direction; an inner side of the protrusion of at least one of the first side plates being provided with two limit surfaces at two ends of the inner side along the second direction, the two limit surfaces being arranged at an angle with the inner side respectively; the second hinge mechanism comprising two second hinge groups spaced apart along the second direction, one of the second hinge groups being movably connected to the inner side, one of the second hinge groups being capable of moving along the inner side between the two limit surfaces; wherein the first direction is perpendicular to the second direction.

2. The device according to claim 1, wherein both of the first side plates are provided with the protrusion, the first hinge mechanism comprising two first hinge groups spaced apart along the first direction; each of the first hinge groups being movably connected to the bearing frame at two ends of the first hinge group along the second direction, and each of the first hinge groups being connected to the corresponding protrusion.

3. The device according to claim 2, wherein each of the first hinge groups comprises two first flexible hinges spaced apart along the second direction, the protrusion being connected between the two first flexible hinges, and each of the first flexible hinges being connected to the bearing frame at an end of the first flexible hinge away from the protrusion.

4. The device according to claim 1, wherein each of the second hinge groups being movably connected to the moving frame at two ends of the second hinge group along the first direction, and each of the second hinge groups being connected to the moving plate.

5. The device according to claim 4, wherein each of the second hinge groups comprises two second flexible hinges spaced apart along the first direction, the moving plate being connected between the two second flexible hinges, and each of the second flexible hinges being connected to the moving frame at an end of the second flexible hinge away from the moving plate.

6. The device according to claim 1, wherein One of the second hinge groups is connected to an end of the movement plate away from the crystal piercing needle, another of the second hinge groups is connected to an end of the movement plate towards the crystal piercing needle, and the other two ends of the other second hinge group are respectively movably connected to the two first side plates.

7. The crystal piercing device according to any one of claims 1-5, wherein, a first driving mechanism is further included, the first driving mechanism is connected to the movement frame, and the first driving mechanism is capable of driving the movement frame to move relative to the bearing frame along the first direction; and / or a second driving mechanism is further included, the second driving mechanism is connected to the movement plate, and the second driving mechanism is capable of driving the movement plate to move relative to the movement frame along the second direction; and / or a first encoder module is further included, the first encoder module is used to feedback the movement position of the movement frame along the first direction; and / or a second encoder module is further included, the second encoder module is used to feedback the movement position of the movement plate along the second direction.

8. The crystal piercing device according to any one of claims 1-5, wherein, a first driving mechanism and a second driving mechanism are further included, the first driving mechanism is connected to the movement frame, and the second driving mechanism is connected to the movement plate; the first driving mechanism is capable of driving the movement frame to move relative to the bearing frame along the first direction, and the second driving mechanism is capable of driving the movement plate to move relative to the movement frame along the second direction; the first driving mechanism and / or the second driving mechanism comprises a voice coil motor.

9. The crystal piercing device according to any one of claims 1-5, wherein, a first housing and a second housing are further included, the first housing and the second housing are respectively connected to two sides of the bearing frame along a third direction.

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