Upper polishing head transmission pressurizing structure of polishing machine equipment

Abstract

The upper polishing head transmission pressurizing structure of the polishing machine equipment comprises a lifting mechanism, an upper support is connected to the lifting mechanism in a liftable mode, an upper disc shaft assembly is arranged on the upper support in a sliding mode, the lower end of the upper disc shaft assembly is connected with an upper disc assembly, the upper end of the upper disc shaft assembly is connected with a cylinder rod end of an air cylinder, and the upper disc shaft assembly is used for driving the upper disc assembly to pressurize. According to the structure, the upper polishing head lifting and pressurizing structure can be separated, the pressurizing stability is improved, the equipment machining precision is guaranteed, and the equipment operation working space is increased.

Description

Technical Field

[0001] This invention relates to the field of polishing equipment, and more specifically to an upper polishing head transmission and pressure structure for a polishing machine. Background Technology

[0002] Single-sided polishing machines are currently the main equipment for processing hard and brittle materials such as monocrystalline silicon, polycrystalline silicon, electronic-grade silicon, and sapphire. As workpiece sizes increase, so do the size of the workpiece carrier, and processing precision becomes increasingly demanding. This necessitates ensuring the stability of the applied pressure during processing. Existing polishing equipment relies entirely on a single cylinder for both pressurization and lifting of the polishing head, resulting in unstable pressure. Summary of the Invention

[0003] The purpose of this invention is to overcome the problems existing in the prior art and provide an upper polishing head transmission pressurization structure for a polishing machine, which separates the pressurization and lifting functions of the upper polishing head, improves the stability of the pressurization pressure, ensures the processing accuracy of the equipment, and increases the processing area space of the equipment.

[0004] To achieve the above-mentioned technical objectives and effects, the present invention is implemented through the following technical solution:

[0005] A pressure-pressurizing structure for the upper polishing head of a polishing machine includes a lifting mechanism. An upper support is movably connected to the lifting mechanism. An upper disc shaft assembly is slidably mounted on the upper support. The lower end of the upper disc shaft assembly is connected to an upper disc assembly, and the upper end is connected to the cylinder rod end of a cylinder for driving the upper disc assembly to apply pressure.

[0006] Furthermore, the lifting mechanism includes an upper platform, on which a motor screw assembly and a linear slide rail are vertically mounted, and the motor screw assembly drives the upper support to rise and fall vertically along the linear slide rail.

[0007] Furthermore, the motor lead screw assembly is connected to and drives the slider on the linear slide rail, and the slider on the linear slide rail is fixed together with the upper bracket and slides together along the linear slide rail.

[0008] Furthermore, the motor lead screw assembly and linear guide rail are vertically arranged on the side of the upper platform.

[0009] Furthermore, the cylinder body end of the cylinder is fixedly connected to the upper bracket.

[0010] The beneficial effects of this invention are:

[0011] The structure of this invention can separate the upper throwing head lifting and pressurizing structure, improve pressurization stability, ensure equipment processing accuracy, and increase the equipment's operating workspace. Attached Figure Description

[0012] Figure 1 This is a schematic diagram of the structure of the present invention.

[0013] The numbers in the diagram are as follows: 1. Upper platform; 2. Motor lead screw assembly; 3. Linear slide rail; 4. Cylinder; 5. Upper bracket; 6. Upper plate assembly; 7. Upper plate shaft assembly. Detailed Implementation

[0014] The present invention will now be described in detail with reference to the accompanying drawings and embodiments.

[0015] like Figure 1 As shown, a polishing machine equipment has an upper polishing head transmission and pressurization structure, including a lifting mechanism. An upper support 5 is movably connected to the lifting mechanism. An upper disc shaft assembly 7 is slidably provided on the upper support 5. An upper disc assembly 6 is connected to the lower end of the upper disc shaft assembly 7, and the cylinder rod end of a cylinder 4 is connected to the upper end for driving the upper disc assembly 6 to apply pressure.

[0016] The lifting mechanism includes an upper platform 1, which can be fixed to a corresponding frame. The upper platform 1 is vertically provided with a motor screw assembly 2 and a linear slide rail 3. The motor screw assembly 2 drives the upper support 5 to rise and fall vertically along the linear slide rail 3.

[0017] The motor lead screw assembly 2 is connected to and drives the slider part on the linear slide rail 3. The slider part on the linear slide rail 3 is fixedly connected to the upper bracket 5 and slides together along the linear slide rail 3.

[0018] The motor lead screw assembly 2 and the linear slide rail 3 are vertically arranged on the side of the upper platform 1.

[0019] The cylinder body of the cylinder 4 is fixedly connected to the upper bracket 5.

[0020] Working process and principle of the invention

[0021] In this invention, the entire upper polishing head is raised and lowered by the motor screw assembly 2 driving the upper support 5. When the upper plate assembly 6 falls on the polishing workpiece, the cylinder rod end of the cylinder 4 moves, and the upper plate assembly 6 is driven by the upper plate shaft assembly 7 to achieve the pressurization function.

[0022] The above description is merely a preferred embodiment of the present invention and is not intended to limit the invention. Various modifications and variations can be made to the present invention by those skilled in the art. Any modifications, equivalent substitutions, improvements, etc., made within the spirit and principles of the present invention should be included within the scope of protection of the present invention.

Claims

1. A pressure-applying structure for the upper polishing head of a polishing machine, characterized in that, It includes a lifting mechanism, on which an upper support (5) is movably connected. An upper plate shaft assembly (7) is slidably provided on the upper support (5). The lower end of the upper plate shaft assembly (7) is connected to an upper plate assembly (6), and the upper end is connected to the cylinder rod end of a cylinder (4) for driving the upper plate assembly (6) to pressurize.

2. The upper polishing head transmission and pressurization structure of the polishing machine equipment according to claim 1, characterized in that, The lifting mechanism includes an upper platform (1), on which a motor screw assembly (2) and a linear slide rail (3) are vertically mounted. The motor screw assembly (2) drives the upper support (5) to rise and fall vertically along the linear slide rail (3).

3. The upper polishing head transmission and pressurization structure of the polishing machine equipment according to claim 2, characterized in that, The motor lead screw assembly (2) is connected to and drives the slider on the linear slide rail (3). The slider on the linear slide rail (3) is fixed together with the upper bracket (5) and slides together along the linear slide rail (3).

4. The upper polishing head transmission and pressurization structure of the polishing machine equipment according to claim 3, characterized in that, The motor lead screw assembly (2) and the linear slide rail (3) are vertically arranged on the side of the upper platform (1).

5. The upper polishing head transmission and pressurization structure of the polishing machine equipment according to claim 1, characterized in that, The cylinder body end of the cylinder (4) is fixed to the upper bracket (5).

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