Rotary joint for conveying cooling liquid medium

Abstract

The rotary joint for conveying the cooling liquid medium comprises a shell and a main shaft, the shell is of a hollow structure, a containing space is preset in the shell, a water injection hole and a water drainage hole are formed in the side wall of the shell, an annular water injection cavity and an annular water outlet cavity are formed in the shell in the circumferential direction, the water injection hole communicates with the water injection cavity, and the water outlet cavity communicates with the water drainage hole; the main shaft is rotatably arranged in the shell, a water inlet hole and a water outlet hole are formed in the top of the main shaft, the main shaft penetrates through the shell and is fixedly connected with the bottom of the grinding disc, the water inlet hole and the water outlet hole are communicated with the bottom of the grinding disc, and a first water through hole and a second water through hole are formed in the side wall of the main shaft; and the first water through hole communicates with the water inlet hole and corresponds to and communicates with the water injection cavity, the second water through hole communicates with the water outlet hole and corresponds to and communicates with the water outlet cavity, medium exchange between the pipeline and the rotary grinding disc is achieved, and the phenomenon that the cooling water pipe is wound or bent is avoided.

Description

Technical Field

[0001] This application relates to the field of grinding equipment technology, and more particularly to a rotary joint for conveying coolant medium. Background Technology

[0002] Chemical-Mechanical Polishing (CMP) is a crucial step in wafer planarization. The CMP process involves pressing a polishing head against a polishing pad, relying on the relative motion between the wafer and the pad, and the abrasive particles in the polishing slurry to polish the wafer surface. During polishing, friction between the wafer and the pad, as well as micro-cutting effects, generate significant heat, leading to excessively high temperatures. However, for CMP, the chemical interaction between the polishing slurry and the wafer surface must occur within a specific temperature range. If the temperature is too high, the chemical reaction will be too rapid, creating an imbalance between the chemical action and the mechanical removal process, significantly impacting wafer quality. Therefore, temperature control is essential during CMP.

[0003] Currently, the common method for cooling grinding discs is to continuously circulate cooling water through the bottom of the disc, allowing the water to carry away the heat generated and thus cool the disc. However, how to continuously inject cooling water into the grinding disc remains a problem that urgently needs to be solved by those skilled in the art. Utility Model Content

[0004] In view of this, this application proposes a rotary joint for conveying coolant medium.

[0005] According to one aspect of this application, a rotary joint for conveying coolant medium is provided, comprising: a housing and a spindle;

[0006] The shell is a hollow structure with a pre-set accommodating space inside. It has water injection holes and drainage holes on its side walls. The shell also has an annular water injection chamber and a water outlet chamber along its circumference. The water injection holes are connected to the water injection chambers, and the water outlet chambers are connected to the drainage holes.

[0007] The main shaft is rotatably disposed inside the housing, with a water inlet and a water outlet at the top. The main shaft passes through the housing and is fixedly connected to the bottom of the grinding disc. The water inlet and the water outlet communicate with the bottom of the grinding disc. The side wall of the main shaft has a first water passage and a second water passage. The first water passage communicates with the water inlet and corresponds to and communicates with the water injection chamber. The second water passage communicates with the water outlet and corresponds to and communicates with the water outlet chamber. When the main shaft rotates with the grinding disc, the housing remains stationary.

[0008] In one possible implementation, a mounting flange is provided on the top of the spindle;

[0009] The mounting flange is bolted to the bottom of the grinding disc.

[0010] One possible implementation also includes: bearings;

[0011] The bearing is disposed inside the housing, with its outer side connected to the inside of the housing and its inner side connected to the main shaft.

[0012] In one possible implementation, the water injection hole and the drain hole are arranged vertically.

[0013] The water injection chamber and the water inlet chamber are arranged vertically and vertically, and the water injection chamber and the water outlet chamber are isolated from each other.

[0014] In one possible implementation, the water injection chamber is a hollow structure that covers the first water passage hole opened on the main shaft;

[0015] The water outlet chamber is a hollow structure that covers the second water passage hole opened on the main shaft.

[0016] In one possible implementation, the housing includes an outer shell and a bottom cover;

[0017] The outer shell is hollow inside and has an opening at the bottom;

[0018] The bottom cover is detachably mounted on the bottom of the outer casing and is bolted to the outer casing.

[0019] In one possible implementation, the top of the water injection chamber is provided with a sealing groove, and a sealing ring is embedded inside it;

[0020] The bottom of the water outlet chamber is provided with a sealing groove, and a sealing ring is embedded inside;

[0021] The outlet chamber is not connected to the inlet chamber.

[0022] In one possible implementation, the water inlet is connected to the first water outlet via a first water pipe, the first water pipe having an "L" shaped cross-section, and the water outlet is connected to the second water outlet via a second water pipe, the second water pipe having an "L" shaped cross-section.

[0023] In one possible implementation, the mounting flange is spaced at a predetermined distance from the top of the spindle, and the top of the spindle is embedded in the bottom of the grinding disc, with the mounting flange abutting against the bottom of the grinding disc.

[0024] In one possible implementation, the water inlet and the drain outlet have a preset depth.

[0025] The beneficial effects of the rotary joint for conveying coolant medium according to the embodiments of this application are as follows: By providing an annular water injection chamber and a water outlet chamber circumferentially inside the housing, and providing a first water passage hole and a second water passage hole corresponding to and communicating with the water injection chamber and the water outlet chamber on the side wall of the main shaft, in use, the grinding disc is fixedly connected to the top of the main shaft, and coolant is injected into the water injection chamber through the water injection hole. The coolant enters the main shaft through the first water passage hole and passes through the water inlet hole and the bottom of the grinding disc in sequence to cool the grinding disc. At the same time, the coolant flows out from the bottom of the grinding disc, enters the main shaft through the water outlet hole, enters the water outlet chamber through the second water passage hole, and finally flows out from the drain hole. When the main shaft rotates with the grinding disc, the cooling water does not rotate with it because the housing remains stationary, thereby avoiding the phenomenon of entanglement or bending of the cooling water pipe, effectively improving the stability and reliability of the rotary joint for conveying coolant medium.

[0026] Other features and aspects of this application will become clear from the following detailed description of exemplary embodiments with reference to the accompanying drawings. Attached Figure Description

[0027] The accompanying drawings, which are included in and form part of this specification, illustrate exemplary embodiments, features, and aspects of this application together with the specification and serve to explain the principles of this application.

[0028] Figure 1 A cross-sectional schematic diagram of a rotary joint for conveying coolant medium according to an embodiment of this application is shown;

[0029] Figure 2 A front view schematic diagram of a rotary joint for conveying coolant medium according to an embodiment of this application is shown;

[0030] Figure 3 This diagram shows the main structure of a rotary joint for conveying coolant medium according to an embodiment of this application. Detailed Implementation

[0031] Various exemplary embodiments, features, and aspects of this application will now be described in detail with reference to the accompanying drawings. The same reference numerals in the drawings denote elements that have the same or similar functions. Although various aspects of the embodiments are shown in the drawings, they are not necessarily drawn to scale unless specifically indicated otherwise.

[0032] It should be understood that the terms "center", "longitudinal", "lateral", "length", "width", "upper", "lower", "front", "rear", "left", "right", "vertical", "horizontal", "top", "bottom", "inner", "outer", "clockwise", "counterclockwise", "axial", "radial", and "circumferential" indicate the orientation or positional relationship based on the orientation or positional relationship shown in the accompanying drawings. They are only for the convenience of describing this utility model or simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation. Therefore, they should not be construed as limitations on this utility model.

[0033] Furthermore, the terms "first" and "second" are used for descriptive purposes only and should not be construed as indicating or implying relative importance or implicitly specifying the number of technical features indicated. Thus, a feature defined as "first" or "second" may explicitly or implicitly include one or more of that feature. In the description of this utility model, "a plurality of" means two or more, unless otherwise explicitly specified.

[0034] The term “exemplary” as used herein means “serving as an example, embodiment, or illustration.” Any embodiment illustrated herein as “exemplary” is not necessarily to be construed as superior to or better than other embodiments.

[0035] Furthermore, to better illustrate this application, numerous specific details are provided in the following detailed embodiments. Those skilled in the art should understand that this application can be implemented without certain specific details. In some instances, methods, means, components, and circuits well-known to those skilled in the art have not been described in detail in order to highlight the main points of this application.

[0036] like Figure 1 , Figure 2 and Figure 3As shown, the rotary joint for conveying coolant medium in this embodiment includes: a housing 100 and a main shaft 200. The housing 100 has a hollow structure with a pre-set accommodating space inside. A water injection hole 111 and a drain hole 112 are provided on the side wall. An annular water injection chamber and a water outlet chamber are provided circumferentially inside the housing 100. The water injection hole 111 is connected to the water injection chamber, and the water outlet chamber is connected to the drain hole 112. The main shaft 200 is rotatably disposed inside the housing 100. A water inlet 220 and a water outlet 230 are provided on the top. The main shaft 200 passes through the housing 100 and is fixedly connected to the bottom of the grinding disc. The water inlet 220 and the water outlet 230 are connected to the bottom of the grinding disc. A first water passage 113 and a second water passage 114 are provided on the side wall of the main shaft 200. The first water passage 113 is connected to the water inlet 220 and corresponds to and is connected to the water injection chamber. The second water passage 114 is connected to the water outlet 230 and corresponds to and is connected to the water outlet chamber. When the main shaft 200 rotates with the grinding disc, the housing 100 remains stationary.

[0037] In this embodiment, an annular water injection chamber and a water outlet chamber are provided circumferentially inside the housing 100. A first water inlet 113 and a second water inlet 114, corresponding to and communicating with the water injection chamber and the water outlet chamber, are provided on the side wall of the main shaft 200. During use, the grinding disc is fixedly connected to the top of the main shaft 200. Cooling water is injected into the water injection chamber through the water injection hole 111. The cooling water enters the main shaft 200 through the first water inlet 113 and then sequentially passes through the water inlet 220 and the bottom of the grinding disc. The cooling water cools the grinding disc. At the same time, the cooling water flows out from the bottom of the grinding disc, enters the spindle 200 through the water outlet 230, enters the water outlet chamber through the second water passage 114, and finally flows out from the drain hole 112. When the spindle 200 rotates with the grinding disc, the cooling water does not rotate with the housing 100 because the housing 100 remains stationary. This avoids the phenomenon of the cooling water pipe getting tangled or bent, and effectively improves the stability and reliability of the rotary joint that transports the coolant medium.

[0038] In one specific embodiment, the top of the spindle 200 is provided with a mounting flange 210, which is bolted to the bottom of the grinding disc. By providing the mounting flange 210, it is easy to fix the spindle 200 to the bottom of the grinding disc, and the bolted connection ensures a stable connection and facilitates disassembly.

[0039] In this specific embodiment, a bearing 115 is also included. The bearing 115 is disposed inside the housing 100, with its outer side connected to the inside of the housing 100 and its inner side connected to the spindle 200. By providing the bearing 115, the frictional resistance of the spindle 200 during rotation can be effectively reduced, thereby improving the rotational flexibility and stability of the spindle 200.

[0040] In one specific embodiment, the water injection hole 111 and the drain hole 112 are arranged vertically, and the water injection chamber and the water outlet chamber are arranged vertically, thus separating the water injection chamber and the water outlet chamber. The water injection chamber is located above the water outlet chamber.

[0041] In one specific embodiment, the water injection chamber is a hollow structure that covers the first water passage hole 113 on the spindle 200, and the water outlet chamber is a hollow structure that covers the second water passage hole 114 on the spindle 200. Specifically, after entering the water injection chamber, the cooling water can fully contact the first water passage hole 113 and flow smoothly into the spindle 200 through the first water passage hole 113. The annular structure of the water injection chamber ensures that it covers the first water passage hole 113 on the spindle 200, allowing the first water passage hole 113 to communicate with the water injection chamber. Similarly, the water outlet chamber is a hollow structure that completely covers the second water passage hole 114 on the spindle 200. After passing through the bottom of the grinding disc, the cooling water enters the spindle 200 through the water outlet hole 230, then flows into the water outlet chamber through the second water passage hole 114, and finally exits through the drain hole 112.

[0042] It should be noted that the water inlet chamber and the water injection chamber are not connected and can be isolated by a special structure.

[0043] In one specific embodiment, the housing 100 includes an outer shell 110 and a bottom cover 120. The outer shell 110 is hollow inside and has an opening at the bottom to facilitate the insertion and installation of the spindle 200. The bottom cover 120 is detachably disposed at the bottom of the outer shell 110 and bolted to the outer shell 110 to facilitate the assembly and disassembly of the housing 100, as well as the cleaning and maintenance of the interior of the housing 100.

[0044] In one specific embodiment, the top of the water injection chamber is provided with a sealing groove and a sealing ring is embedded inside, and the bottom of the water outlet chamber is provided with a sealing groove and a sealing ring is embedded inside. The sealing ring can fit tightly against the walls of the water injection chamber and the water outlet chamber to prevent leakage of cooling water.

[0045] In one specific embodiment, the water inlet 220 is connected to the first water passage 113 by a first water passage pipe, the cross-section of which is L-shaped. The water outlet 230 is connected to the second water passage 114 by a second water passage pipe, the cross-section of which is L-shaped. This ensures the stability and smoothness of the cooling water flow. The L-shaped water passage pipe not only avoids the generation of eddies or turbulence in the cooling water flow, but also improves the utilization rate and cooling efficiency of the cooling water.

[0046] In one specific embodiment, the mounting flange 210 is spaced at a predetermined distance from the top of the spindle 200, and the top of the spindle 200 is embedded in the bottom of the grinding disc. The mounting flange 210 abuts against the bottom of the grinding disc, ensuring that the top of the spindle 200 can be firmly embedded in the bottom of the grinding disc. The tight abutment between the mounting flange 210 and the bottom of the grinding disc improves the connection stability between the spindle 200 and the grinding disc, and also enhances the overall rigidity and durability of the rotary joint for conveying coolant medium.

[0047] In one specific embodiment, the water inlet hole 111 and the drain hole 112 have a preset depth, which facilitates the connection and installation of the external water inlet pipe and the water outlet pipe.

[0048] The various embodiments of this application have been described above. These descriptions are exemplary and not exhaustive, nor are they limited to the disclosed embodiments. Many modifications and variations will be apparent to those skilled in the art without departing from the scope and spirit of the described embodiments. The terminology used herein is chosen to best explain the principles, practical application, or improvement of the technology in the market, or to enable others skilled in the art to understand the embodiments disclosed herein.

Claims

1. A rotary joint for conveying coolant medium, suitable for connection to the bottom of a grinding disc, characterized in that, include: Housing and spindle; The shell is a hollow structure with a pre-set accommodating space inside. It has water injection holes and drainage holes on its side walls. The shell also has an annular water injection chamber and a water outlet chamber along its circumference. The water injection holes are connected to the water injection chambers, and the water outlet chambers are connected to the drainage holes. The main shaft is rotatably disposed inside the housing, with a water inlet and a water outlet at the top. The main shaft passes through the housing and is fixedly connected to the bottom of the grinding disc. The water inlet and the water outlet communicate with the bottom of the grinding disc. The side wall of the main shaft has a first water passage and a second water passage. The first water passage communicates with the water inlet and corresponds to and communicates with the water injection chamber. The second water passage communicates with the water outlet and corresponds to and communicates with the water outlet chamber. When the main shaft rotates with the grinding disc, the housing remains stationary.

2. The rotary joint for conveying coolant medium according to claim 1, characterized in that, The top of the spindle is provided with a mounting flange; The mounting flange is bolted to the bottom of the grinding disc.

3. The rotary joint for conveying coolant medium according to claim 2, characterized in that, Also includes: Bearings; The bearing is disposed inside the housing, with its outer side connected to the inside of the housing and its inner side connected to the main shaft.

4. The rotary joint for conveying coolant medium according to any one of claims 1-3, characterized in that, The water injection hole and the drain hole are arranged vertically. The water injection chamber and the water outlet chamber are arranged vertically and vertically, and the water injection chamber and the water outlet chamber are isolated from each other.

5. The rotary joint for conveying coolant medium according to claim 4, characterized in that, The water injection chamber is a hollow structure that covers the first water passage hole opened on the main shaft; The water outlet chamber is a hollow structure that covers the second water passage hole opened on the main shaft.

6. The rotary joint for conveying coolant medium according to any one of claims 1-3, characterized in that, The housing includes an outer shell and a bottom cover; The outer shell is hollow inside and has an opening at the bottom; The bottom cover is detachably mounted on the bottom of the outer casing and is bolted to the outer casing.

7. The rotary joint for conveying coolant medium according to claim 1, characterized in that, The top and bottom of the water injection chamber are provided with sealing grooves, and sealing rings are embedded inside. The top of the water injection chamber and the bottom of the water outlet chamber are both provided with sealing grooves, with sealing rings embedded inside. The outlet chamber is not connected to the injection chamber.

8. The rotary joint for conveying coolant medium according to claim 1, characterized in that, The water inlet is connected to the first water outlet via a first water pipe, the first water pipe having an "L" shaped cross-section. The water outlet is connected to the second water outlet via a second water pipe, the second water pipe having an "L" shaped cross-section.

9. The rotary joint for conveying coolant medium according to claim 2, characterized in that, The mounting flange is spaced at a predetermined distance from the top of the spindle, and the top of the spindle is embedded in the bottom of the grinding disc, with the mounting flange abutting against the bottom of the grinding disc.

10. The rotary joint for conveying coolant medium according to claim 1, characterized in that, The water injection hole and the water drainage hole have a preset depth.

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