Single crystal furnace and single crystal production equipment
By installing a crucible lid and drive assembly in the single crystal furnace, the problems of spatter residue and heat radiation loss were solved, resulting in reduced wire breakage rate and improved product quality.
Patent Information
- Application Number
- CN202422985691.7
- Authority / Receiving Office
- CN · China
- Patent Type
- Utility models(China)
- Current Assignee / Owner
- Filing Date
- 2024-12-04
- Publication Date
- 2025-12-02
- Estimated Expiration
- 2034-12-04
AI Technical Summary
The spatter generated during the melting of silicon material in existing single crystal furnaces remains on the inner wall of the water-cooled screen, affecting crystal pulling efficiency and quality. At the same time, excessive heating power leads to heat radiation loss.
A single-crystal furnace was designed. By setting up a crucible lid and a crucible lid drive assembly, the crucible lid is lowered to the lower port of the water-cooled screen when the silicon material melts, blocking splashes and reducing heat radiation loss. The crucible lid, made of non-metallic high-temperature resistant material, avoids metal contamination.
It effectively prevents splashes from falling onto the inner wall of the water-cooled screen, thus improving product quality and reducing the breakage rate.
Smart Images
Figure CN223620538U_ABST
Abstract
Description
Technical Field
[0001] This utility model relates to the field of single crystal production technology, and in particular to a single crystal furnace and single crystal production equipment. Background Technology
[0002] In the production process of single crystal furnaces, a feeding device is required to add granular silicon or polycrystalline silicon raw materials into the crucible, which are then melted by a graphite heater. Existing single crystal furnaces generate significant thermal shock during the melting process, causing oscillations in the molten surface and resulting in splashing. These splashes remain on the inner wall of the water-cooled screen, and if they fall off during subsequent crystal pulling, they can cause wire breakage, severely impacting pulling efficiency and quality. Furthermore, the graphite heater is required for heating during silicon melting, and the crucible is open, allowing heat to easily radiate away, leading to heat loss in the thermal field and increasing heating power. Utility Model Content
[0003] This invention provides a single crystal furnace to solve the problems of existing single crystal furnaces where spatter remains on the inner wall of the water-cooled screen, affecting crystal pulling efficiency and quality, and where the heating power of the single crystal furnace is too high.
[0004] This utility model provides a single crystal furnace, comprising:
[0005] Auxiliary furnace chamber;
[0006] The main furnace chamber includes a shell, a water-cooled screen, and a crucible. The auxiliary furnace chamber is located on the upper part of the shell. The crucible and the water-cooled screen are both located inside the shell, with the water-cooled screen positioned above the crucible.
[0007] A crucible lid drive assembly is connected to the auxiliary furnace chamber;
[0008] A crucible lid is connected to a crucible lid driving assembly, which drives the crucible lid to move up and down so that the crucible lid descends to the lower port of the water-cooled screen when the silicon material melts.
[0009] According to the present invention, a single crystal furnace is provided in which the crucible lid is provided with an observation port, which is used to allow a camera to view the melting status inside the crucible in real time.
[0010] According to the present invention, the crucible lid is made of a non-metallic high-temperature resistant material.
[0011] According to the present invention, a single crystal furnace is provided, wherein the crucible lid driving assembly includes:
[0012] A driving component, wherein the driving component is disposed at the upper end of the auxiliary furnace chamber;
[0013] The lifting mechanism has its upper end connected to the driving component and its lower end penetrating the auxiliary furnace chamber and connected to the crucible lid.
[0014] According to the single crystal furnace provided by this utility model, the lifting mechanism includes:
[0015] A metal rope is inserted inside the auxiliary furnace chamber. The upper end of the metal rope is connected to the drive component, and the lower end of the metal rope is connected to the crucible lid.
[0016] According to the single crystal furnace provided by this utility model, the lifting mechanism further includes:
[0017] A weight, the upper end of which is connected to the lower end of the metal rope;
[0018] A fixing rod is provided, the upper end of which is connected to the lower end of the weight, and the lower end of which is connected to the crucible lid.
[0019] According to the present invention, in a single crystal furnace, the upper end of the fixing rod is detachably connected to the lower end of the weight.
[0020] According to the present invention, in a single crystal furnace, the upper end of the fixing rod is connected to the lower end of the weight by a locking nut.
[0021] According to the present invention, a single crystal furnace is provided with a first guide slope on the outer peripheral surface of the upper end of the hammer and a second guide slope on the outer peripheral surface of the lower end of the locking nut.
[0022] This utility model also provides a single crystal production equipment, including the single crystal furnace described in any of the above claims.
[0023] The single crystal furnace provided by this utility model, by setting a crucible lid and a crucible lid driving component, in the sealed state, uses the crucible lid driving component to drive the crucible lid down to the lower port of the water-cooled screen. On the one hand, it can keep the thermal field warm and reduce internal heat radiation loss, which can effectively reduce the power consumption during silicon material melting. On the other hand, during the silicon material melting process, the crucible lid can effectively prevent silicon material from splashing onto the inner wall of the water-cooled screen due to liquid surface vibration or splashing, thereby avoiding the risk of silicon material falling off in the subsequent crystal pulling process, reducing the wire breakage rate and improving product quality. Attached Figure Description
[0024] To more clearly illustrate the technical solutions in this utility model or the prior art, the drawings used in the description of the embodiments or the prior art will be briefly introduced below. Obviously, the drawings described below are some embodiments of this utility model. For those skilled in the art, other drawings can be obtained from these drawings without creative effort.
[0025] Figure 1 This is a side view of the single crystal furnace provided by this utility model.
[0026] Figure 2 This is a side view cross-sectional structural diagram of the single crystal furnace provided by this utility model.
[0027] Figure 3 yes Figure 2 A magnified schematic diagram of the structure at point A in the middle.
[0028] Figure 4 This is a top view of the pot lid provided by this utility model.
[0029] Figure 5 This is a side view of the weight provided by this utility model.
[0030] Figure 6 This is a side view cross-sectional structural diagram of the counterweight provided by this utility model.
[0031] Figure label:
[0032] 100. Auxiliary furnace chamber; 200. Main furnace chamber; 210. Shell; 220. Water-cooled screen; 230. Crucible; 240. Graphite heater; 250. Insulation layer; 260. Pot support shaft; 270. Flow guide tube; 300. Crucible lid drive assembly; 310. Drive component; 320. Metal rope; 330. Counterweight; 340. Fixing rod; 350. Locking nut; 360. First guide slope; 370. Second guide slope; 400. Crucible lid; 410. Observation port. Detailed Implementation
[0033] To make the objectives, technical solutions, and advantages of this utility model clearer, the technical solutions of this utility model will be clearly and completely described below with reference to the accompanying drawings. Obviously, the described embodiments are only some embodiments of this utility model, not all embodiments. Based on the embodiments of this utility model, all other embodiments obtained by those skilled in the art without creative effort are within the scope of protection of this utility model.
[0034] In the description of the embodiments of this utility model, it should be noted that the terms "center," "longitudinal," "lateral," "upper," "lower," "front," "rear," "left," "right," "vertical," "horizontal," "top," "bottom," "inner," and "outer," etc., indicating the orientation or positional relationship, are based on the orientation or positional relationship shown in the accompanying drawings. They are only for the convenience of describing the embodiments of this utility model and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation. Therefore, they should not be construed as limitations on the embodiments of this utility model. In addition, the terms "first," "second," and "third" are used for descriptive purposes only and should not be construed as indicating or implying relative importance.
[0035] In the description of the embodiments of this utility model, it should be noted that, unless otherwise explicitly specified and limited, the terms "connected" and "linked" should be interpreted broadly. For example, they can refer to a fixed connection, a detachable connection, or an integral connection; they can refer to a mechanical connection or an electrical connection; they can refer to a direct connection or an indirect connection through an intermediate medium. Those skilled in the art can understand the specific meaning of the above terms in the embodiments of this utility model based on the specific circumstances.
[0036] In this embodiment of the utility model, unless otherwise explicitly specified and limited, "above" or "below" the second feature can mean that the first feature is in direct contact with the second feature, or that the first feature is in indirect contact with the second feature through an intermediate medium. Furthermore, "above," "on top of," and "over" the second feature can mean that the first feature is directly above or diagonally above the second feature, or simply that the first feature is at a higher horizontal level than the second feature. "Below," "below," and "under" the second feature can mean that the first feature is directly below or diagonally below the second feature, or simply that the first feature is at a lower horizontal level than the second feature.
[0037] In the description of this specification, the references to terms such as "one embodiment," "some embodiments," "example," "specific example," or "some examples," etc., refer to specific features, structures, materials, or characteristics described in connection with that embodiment or example, which are included in at least one embodiment or example of the present invention. In this specification, the illustrative expressions of the above terms do not necessarily refer to the same embodiment or example. Furthermore, the specific features, structures, materials, or characteristics described may be combined in any suitable manner in one or more embodiments or examples. Moreover, without contradiction, those skilled in the art can combine and integrate the different embodiments or examples described in this specification, as well as the features of different embodiments or examples.
[0038] like Figures 1 to 3As shown, the single crystal furnace includes a secondary furnace chamber 100, a main furnace chamber 200, a crucible lid driving assembly 300, and a crucible lid 400. The main furnace chamber 200 includes a shell 210, a water-cooled screen 220, and a crucible 230. The secondary furnace chamber 100 is located on the upper part of the shell 210. The crucible 230 and the water-cooled screen 220 are both located inside the shell 210, with the water-cooled screen 220 positioned above the crucible 230. The crucible lid driving assembly 300 is connected to the secondary furnace chamber 100; the crucible lid 400 is connected to the crucible lid driving assembly 300. The crucible lid driving assembly 300 drives the crucible lid 400 to move up and down, so that the crucible lid 400 descends to the lower port of the water-cooled screen 220 when the silicon material melts.
[0039] The single crystal furnace provided by this utility model, by setting a crucible lid 400 and a crucible lid driving assembly 300, uses the crucible lid driving assembly 300 to drive the crucible lid 400 down to the lower port of the water-cooled screen 220. On the one hand, it can keep the hot zone warm and reduce the internal heat radiation loss, which can effectively reduce the power during silicon material melting. On the other hand, during the silicon material melting process, the crucible lid 400 can effectively block the silicon material from splashing onto the inner wall of the water-cooled screen 220 due to liquid surface vibration, thereby avoiding the risk of silicon material falling off in the subsequent crystal pulling process, reducing the wire breakage rate and improving product quality.
[0040] In one embodiment of this utility model, such as Figure 2 As shown, the auxiliary furnace chamber 100 is used to provide the necessary space for crystal growth. The auxiliary furnace chamber 100 has a tubular structure and is vertically arranged on the upper part of the shell 210. The auxiliary furnace chamber 100 and the shell 210 are detachably connected to facilitate subsequent process operations.
[0041] In one embodiment of this utility model, such as Figure 3 As shown, the main furnace chamber 200 also includes a graphite heater 240, which is disposed on the outer periphery of the crucible 230. The graphite heater 240 is used to heat the crucible 230, thereby providing heat for the melting of silicon raw materials.
[0042] In one embodiment of this utility model, such as Figure 3 As shown, the main furnace chamber 200 also includes a heat insulation layer 250, which is disposed inside the shell 210 and surrounds the graphite heater 240. A gap exists between the heat insulation layer 250 and the graphite heater 240 to facilitate the insertion and removal of the crucible 230. The heat insulation layer 250 within the shell 210 has the following beneficial effects: 1. It reduces heat loss in the single crystal furnace, lowers energy consumption, and improves energy efficiency. 2. It helps maintain a suitable temperature environment within the single crystal furnace and reduces temperature fluctuations. 3. It saves energy and reduces operating costs.
[0043] In one embodiment of this utility model, such as Figure 3 As shown, the main furnace chamber 200 also includes a pot support shaft 260, which is vertically movably mounted at the bottom of the shell 210. The pot support shaft 260 is vertically positioned, and the crucible 230 is placed on the upper end of the pot support shaft 260. The lower end of the pot support shaft 260 is connected to a drive mechanism, which drives the crucible 230 to independently move up and down relative to the water-cooled screen 220 via the pot support shaft 260. The crucible 230 is used to hold silicon material and serves as the melting area. The crucible 230 is located at the center of the entire thermal field and can rotate independently.
[0044] In one embodiment of this utility model, such as Figure 3 As shown, the main furnace chamber 200 also includes a guide tube 270, which is located above the crucible 230 and surrounds the water-cooled screen 220. The guide tube 270 and the water-cooled screen 220 constitute a cooling mechanism, the main function of which is to cool the pulled crystal rod and increase the pulling speed. The water-cooled screen 220 can be raised and lowered independently. The lower end face of the water-cooled screen 220 is provided with a lower port, which is circular. Of course, the shape of the lower port is not limited to this and is determined according to the shape of the crucible lid 400. The diameter of the lower port is slightly larger than the diameter of the crucible lid 400 so that the crucible lid 400 can pass through the lower port. The lowest position of the lowered crucible lid 400 needs to be flush with the edge of the lower port. Since the diameter of the lower port is slightly larger than the diameter of the crucible lid 400, a gap is formed between the crucible lid 400 and the lower port. Argon gas can carry away the volatiles of the thermal field through these gaps and the observation port 410, thereby improving the crystal pulling quality.
[0045] In one embodiment of this utility model, such as Figure 4 As shown, the crucible lid 400 is provided with an observation port 410, which is a circular hole. However, it can also be a square or oval hole, depending on the shape of the camera. The observation port 410 allows the camera to view the melting process inside the crucible 230 in real time. The diameter of the observation port 410 is larger than the diameter of the camera to ensure that the camera can pass through smoothly. Preferably, the observation port 410 is located off-center from the center of the crucible lid 400 to avoid interference between the fixing rod 340 and the camera.
[0046] In one embodiment of this utility model, the crucible lid 400 is made of a non-metallic high-temperature resistant material. Using a non-metallic material for the crucible lid 400 can avoid metal contamination of the single-crystal silicon. Using a high-temperature resistant material for the crucible lid 400 can further reduce internal heat radiation loss and further reduce the power consumption during silicon melting. Preferably, the crucible lid 400 is made of a material resistant to temperatures above 1400℃. The material of the crucible lid 400 is graphite, ceramic, or carbon fiber. Of course, the material of the crucible lid 400 is not limited to these and can also be other high-temperature resistant materials.
[0047] In one embodiment of this utility model, such as Figure 2 As shown, the crucible lid driving assembly 300 includes a driving component 310 and a lifting mechanism. The driving component 310 is disposed at the upper end of the auxiliary furnace chamber 100. The upper end of the lifting mechanism is connected to the driving component 310, and the lower end of the lifting mechanism passes through the auxiliary furnace chamber 100 and is connected to the crucible lid 400. The driving component 310 is used to drive the crucible lid 400 to move up and down through the lifting mechanism, so that the crucible lid 400 descends to the lower port of the water-cooled screen 220 when the silicon material melts. In this embodiment, the driving component 310 is a lifting head; of course, other types of driving structures are also possible.
[0048] In one embodiment of this utility model, such as Figure 2 As shown, the lifting mechanism includes a metal rope 320, which passes through the interior of the auxiliary furnace chamber 100. The upper end of the metal rope 320 is connected to the drive component 310, and the lower end is connected to the crucible lid 400. The use of a metal rope 320 can adapt to the high-temperature environment inside the single crystal furnace and prevent the metal rope 320 from breaking. Preferably, the metal rope 320 is a tungsten wire rope; however, the specific type of metal rope 320 is not limited to this, and other high-temperature resistant metal materials can also be used.
[0049] In one embodiment of this utility model, such as Figure 5 and Figure 6 As shown, the lifting mechanism also includes a counterweight 330 and a fixing rod 340. The counterweight 330 is vertically arranged and has a columnar structure. In this embodiment, the cross-section of the counterweight 330 is circular, but it can also be elliptical, a regular polygon, or other shapes. The upper end of the counterweight 330 is connected to the lower end of the metal rope 320. Specifically, a limit block is provided at the lower end of the metal rope 320, and a positioning hole is provided on the end face of the upper end of the counterweight 330. The limit block at the lower end of the metal rope 320 is embedded in the positioning hole and fixed with fasteners. By setting the counterweight 330, the weight at the lower end of the metal rope 320 is increased, improving the stability of the crucible lid 400 and preventing the crucible lid 400 from swinging during the rising or falling process.
[0050] The upper end of the fixing rod 340 is connected to the lower end of the counterweight 330, and the lower end of the fixing rod 340 is connected to the crucible lid 400. Using the fixing rod 340 to connect the counterweight 330 and the crucible lid 400 can further improve the stability of the crucible lid 400 and prevent it from swinging during ascent or descent. Preferably, the lower end of the fixing rod 340 is threaded, and the center of the crucible lid 400 has a threaded hole. The threaded hole can be a through hole or a blind hole, and the lower end of the fixing rod 340 is threaded into the threaded hole. Of course, the connection method between the lower end of the fixing rod 340 and the crucible lid 400 is not limited to this; welding, pin connection, or other connection methods can also be used.
[0051] In a preferred embodiment of this invention, the upper end of the fixing rod 340 is detachably connected to the lower end of the counterweight 330. By making the upper end of the fixing rod 340 detachably connected to the lower end of the counterweight 330, the installation and removal of the crucible lid 400 can be facilitated.
[0052] In one specific embodiment of this utility model, such as Figure 5 and Figure 6 As shown, the upper end of the fixing rod 340 is connected to the lower end of the counterweight 330 via a locking nut 350. Specifically, the upper end of the fixing rod 340 is provided with a limiting part, which is an inverted cone shape, meaning the outer diameter of the upper end of the limiting part is larger than the outer diameter of the lower end. The diameter of the lower end of the locking nut 350 is smaller than the maximum outer diameter of the limiting part, and the lower end of the locking nut 350 is fitted onto the lower end of the limiting part. The lower end of the counterweight 330 is provided with external threads, and the upper end of the locking nut 350 is threadedly engaged with the external threads at the lower end of the counterweight 330.
[0053] To disassemble the crucible lid 400, simply unscrew the locking nut 350 to separate the fixing rod 340 from the counterweight 330. To install the crucible lid 400, fit the locking nut 350 onto the external thread at the lower end of the counterweight 330 and tighten the locking nut 350.
[0054] In a preferred embodiment of this utility model, such as Figure 5 and Figure 6As shown, the outer circumferential surface of the upper end of the counterweight 330 is provided with a first guide slope 360, and the outer circumferential surface of the lower end of the locking nut 350 is provided with a second guide slope 370. When the counterweight 330 moves upward inside the auxiliary furnace chamber 100, due to the limited internal space of the auxiliary furnace chamber 100, if the edge of the upper end of the counterweight 330 is at a right angle, the edge of the upper end of the counterweight 330 will rub against the inner wall of the auxiliary furnace chamber 100, preventing the crucible lid 400 from continuing to move upward, and thus preventing the crucible lid 400 from rising to the predetermined height. By providing the first guide slope 360 on the outer circumferential surface of the upper end of the counterweight 330, the outer diameter of the counterweight 330 gradually decreases from bottom to top at the location of the first guide slope 360, thus avoiding the edge of the upper end of the counterweight 330 rubbing against the inner wall of the auxiliary furnace chamber 100. Similarly, when the counterweight 330 moves downward inside the auxiliary furnace chamber 100, if the lower edge of the locking nut 350 is at a right angle, the lower edge of the locking nut 350 will rub against the inner wall of the auxiliary furnace chamber 100, preventing the crucible lid 400 from moving downward smoothly and thus preventing it from descending to the predetermined height. By providing a second guide slope 370 on the outer circumferential surface of the lower end of the locking nut 350, the outer diameter of the locking nut 350 gradually decreases from top to bottom at the location of the second guide slope 370, thus preventing the lower edge of the locking nut 350 from rubbing against the inner wall of the auxiliary furnace chamber 100.
[0055] The following is combined with Figures 1 to 6 Describing a specific embodiment of this utility model, the single crystal furnace includes a secondary furnace chamber 100, a main furnace chamber 200, a crucible lid driving assembly 300, and a crucible lid 400. The main furnace chamber 200 includes a shell 210, a water-cooled screen 220, a crucible 230, a graphite heater 240, a heat insulation layer 250, a pot support shaft 260, and a flow guide tube 270. The water-cooled screen 220, crucible 230, graphite heater 240, heat insulation layer 250, and flow guide tube 270 are all disposed within the shell 210, with the water-cooled screen 220 located above the crucible 230. The graphite heater 240 is disposed on the outer periphery of the crucible 230, and the heat insulation layer 250 is disposed within the shell 210 and surrounds the outer periphery of the graphite heater 240. There is a gap between the heat insulation layer 250 and the graphite heater 240 to facilitate the insertion and removal of the crucible 230.
[0056] The pot support shaft 260 is vertically movably mounted at the bottom of the housing 210. The pot support shaft 260 is vertically positioned, with the crucible 230 placed on its upper end. The lower end of the pot support shaft 260 is connected to a drive mechanism, which drives the crucible 230 to move up and down via the pot support shaft 260. A flow guide tube 270 is located above the crucible 230 and surrounds the water-cooled screen 220. The flow guide tube 270 and the water-cooled screen 220 together form a cooling mechanism. The main function of the cooling mechanism is to cool the pulled crystal rod, thereby increasing the pulling speed. The water-cooled screen 220 can be raised and lowered independently. The lower end face of the water-cooled screen 220 has a lower port, which is circular and slightly larger in diameter than the crucible lid 400, allowing the lid to pass through. The lowest point of the lowered crucible lid 400 must be flush with the edge of the lower port.
[0057] The auxiliary furnace chamber 100 is located on the upper part of the shell 210. The auxiliary furnace chamber 100 is used to provide the necessary space for crystal growth. The auxiliary furnace chamber 100 has a tubular structure and is vertically arranged on the upper part of the shell 210. The auxiliary furnace chamber 100 is detachably connected to the shell 210.
[0058] The crucible lid 400 is equipped with an observation port 410, which is a circular hole. The observation port 410 allows a camera to monitor the melting process inside the crucible 230 in real time. The diameter of the observation port 410 is larger than the diameter of the camera, and it is located off-center from the center of the crucible lid 400. The crucible lid 400 is made of a non-metallic, high-temperature resistant material. Using a non-metallic material avoids metal contamination of the single-crystal silicon. The material of the crucible lid 400 can be graphite, ceramic, or carbon fiber.
[0059] The crucible lid driving assembly 300 includes a driving component 310 and a lifting mechanism. The driving component 310 is located at the upper end of the auxiliary furnace chamber 100. The upper end of the lifting mechanism is connected to the driving component 310, and the lower end of the lifting mechanism passes through the auxiliary furnace chamber 100 and is connected to the crucible lid 400. The driving component 310 is used to drive the crucible lid 400 to move up and down through the lifting mechanism. The driving component 310 is a lifting head.
[0060] The lifting mechanism includes a metal rope 320, a counterweight 330, and a fixing rod 340. The metal rope 320 passes through the interior of the auxiliary furnace chamber 100, and its upper end is connected to the drive component 310. The counterweight 330 is vertically arranged and has a columnar structure with a circular cross-section. A limit block is provided at the lower end of the metal rope 320, and a positioning hole is provided on the upper end face of the counterweight 330. The limit block at the lower end of the metal rope 320 is embedded in the positioning hole and fixed with fasteners. A limit part is provided at the upper end of the fixing rod 340, and the limit part is inverted conical in shape. The lower end diameter of the locking nut 350 is smaller than the maximum outer diameter of the limit part, and the lower end of the locking nut 350 is sleeved on the lower end of the limit part. The lower end of the counterweight 330 is provided with external threads, and the upper end of the locking nut 350 is threaded with the external threads at the lower end of the counterweight 330. The lower end of the fixing rod 340 is threaded, and the center of the crucible lid 400 is provided with a threaded hole, which can be a through hole or a blind hole. The lower end of the fixing rod 340 is threaded into the threaded hole. The outer circumferential surface of the upper end of the counterweight 330 is provided with a first guide slope 360, and the outer circumferential surface of the lower end of the locking nut 350 is provided with a second guide slope 370.
[0061] The specific workflow of the single crystal furnace is as follows: First, fill the crucible 230 with raw materials, then lower the crucible lid 400 to a position flush with the lower end face of the water-cooled screen 220, then turn on the graphite heater 240 to heat and melt the silicon material. After the silicon material has completely melted, the drive unit 310 drives the crucible lid 400 to rise into the auxiliary furnace chamber 100 through the metal rope 320. The crucible lid 400 inside the auxiliary furnace chamber 100 is taken out by unscrewing it. Finally, the seed crystal is installed, and after the furnace is reassembled, the subsequent crystal pulling work can be carried out.
[0062] This utility model also provides a single crystal production equipment, which includes the single crystal furnace described in any of the above embodiments.
[0063] Finally, it should be noted that the above embodiments are only used to illustrate the technical solutions of this utility model, and not to limit it. Although this utility model has been described in detail with reference to the foregoing embodiments, those skilled in the art should understand that modifications can still be made to the technical solutions described in the foregoing embodiments, or equivalent substitutions can be made to some of the technical features. Such modifications or substitutions do not cause the essence of the corresponding technical solutions to deviate from the spirit and scope of the technical solutions of the embodiments of this utility model.
Claims
1. A single crystal furnace, characterized in that, include: Auxiliary furnace chamber (100); The main furnace chamber (200) includes a shell (210), a water-cooled screen (220), and a crucible (230). The auxiliary furnace chamber (100) is located on the upper part of the shell (210). The crucible (230) and the water-cooled screen (220) are both located inside the shell (210), and the water-cooled screen (220) is located above the crucible (230). A crucible lid drive assembly (300) is connected to the auxiliary furnace chamber (100); The crucible lid (400) is connected to the crucible lid driving assembly (300), which is used to drive the crucible lid (400) to move up and down so that the crucible lid (400) is located at the lower port of the water-cooled screen (220) when the silicon material is melted.
2. The single crystal furnace according to claim 1, characterized in that, The crucible lid (400) is provided with an observation port (410), which is used to allow the camera to view the melting status inside the crucible (230) in real time.
3. The single crystal furnace according to claim 1, characterized in that, The crucible lid (400) is made of a non-metallic high-temperature resistant material.
4. The single crystal furnace according to any one of claims 1 to 3, characterized in that, The crucible lid drive assembly (300) includes: A driving component (310) is disposed at the upper end of the auxiliary furnace chamber (100); The lifting mechanism has its upper end connected to the drive component (310) and its lower end passing through the auxiliary furnace chamber (100) and connected to the crucible lid (400).
5. The single crystal furnace according to claim 4, characterized in that, The lifting mechanism includes: A metal rope (320) is inserted inside the auxiliary furnace chamber (100). The upper end of the metal rope (320) is connected to the drive unit (310), and the lower end of the metal rope (320) is connected to the crucible lid (400).
6. The single crystal furnace according to claim 5, characterized in that, The lifting mechanism also includes: A weight (330), the upper end of which is connected to the lower end of the metal rope (320); A fixing rod (340) is provided, the upper end of which is connected to the lower end of the weight (330), and the lower end of which is connected to the crucible lid (400).
7. The single crystal furnace according to claim 6, characterized in that, The upper end of the fixing rod (340) is detachably connected to the lower end of the counterweight (330).
8. The single crystal furnace according to claim 7, characterized in that, The upper end of the fixing rod (340) is connected to the lower end of the counterweight (330) by a locking nut (350).
9. The single crystal furnace according to claim 8, characterized in that, The outer peripheral surface of the upper end of the hammer (330) is provided with a first guide slope (360), and the outer peripheral surface of the lower end of the locking nut (350) is provided with a second guide slope (370).
10. A single crystal production device, characterized in that, Includes the single crystal furnace as described in any one of claims 1 to 9.