Horizontal adjusting device for heater

Abstract

The utility model provides a heater horizontal adjusting device which comprises a carrying table and an adjusting mechanism. A first telescopic rod, a first motor, a second telescopic rod and a second motor are arranged in an adjusting structure, the first telescopic rod is arranged on the upper surface of a carrying table, the second telescopic rod is arranged on the lower surface of the carrying table, and the first telescopic rod and the second telescopic rod are both perpendicular to a datum plane; according to the difference value between the detection height of the point position of the top face of the heater relative to the reference face and the standard height, the first motor drives the first telescopic rod to stretch out and draw back in the direction perpendicular to the reference face, and the second motor drives the second telescopic rod to stretch out and draw back in the direction perpendicular to the reference face; the at least one group of adjusting structure is arranged on the carrying table to accurately adjust the carrying table, so that the top surface of the heater is accurately leveled, the problem of blind adjustment caused by manual adjustment is avoided, time and labor are saved, and the progress and efficiency of leveling the top surface of the heater are improved.

Description

Technical Field

[0001] This utility model relates to the field of semiconductor equipment, and in particular to a heater leveling device. Background Technology

[0002] In the semiconductor manufacturing process, heater leveling is often required to adjust the tilt of the heater to a relatively horizontal state.

[0003] Currently, the heater leveling of chemical vapor deposition (CVD) equipment uses adjusting bolts. By tightening the nuts corresponding to these bolts, the distance is finely adjusted to bring the heater to a relatively horizontal position. This method can only be done manually by tightening the nuts, which is time-consuming and labor-intensive.

[0004] When the adjustment distance is very small, adjusting by tightening the nut can only be considered blind adjustment. Experienced engineers need to judge how much to tighten the nut of the adjusting bolt manually based on the measurement data. Therefore, the data obtained by manual blind adjustment is not accurate and the operation is inconvenient.

[0005] Providing a heater leveling device that can conveniently and accurately level the heater is of great importance for improving leveling efficiency and increasing production efficiency. Summary of the Invention

[0006] The technical problem to be solved by this utility model is to provide a heater leveling device that can conveniently and accurately level the heater.

[0007] To address the aforementioned problems, this utility model provides a heater leveling device, comprising: a platform for supporting the heater, the platform having an upper surface and a lower surface opposite to each other, the platform being capable of linkage with the heater to level the heater; at least one adjusting mechanism disposed on the platform, the adjusting mechanism being used to adjust the platform to achieve leveling of the heater, the adjusting mechanism including a first telescopic rod, a first motor, a second telescopic rod, and a second motor, the first telescopic rod being disposed on the upper surface of the platform, the second telescopic rod being disposed on the lower surface of the platform, both the first telescopic rod and the second telescopic rod being perpendicular to a reference plane; based on the difference between the detected height of a point on the top surface of the heater relative to the reference plane and the standard height of the point relative to the reference plane, the first motor drives the first telescopic rod to extend and retract in a direction perpendicular to the reference plane, and / or the second motor drives the second telescopic rod to extend and retract in a direction perpendicular to the reference plane.

[0008] In some embodiments, the reference plane is a horizontal plane.

[0009] In some embodiments, the standard height is the height of the top surface of the heater relative to the reference surface that meets process requirements.

[0010] In some embodiments, the platform is in the shape of a flat cuboid, and two adjustment mechanisms are provided on the same side of the platform.

[0011] In some embodiments, the minimum distance that the first motor drives the first telescopic rod to extend or retract in a direction perpendicular to the reference plane each time is less than 30 micrometers; and / or the minimum distance that the second motor drives the second telescopic rod to extend or retract in a direction perpendicular to the reference plane each time is less than 30 micrometers.

[0012] In some embodiments, the first motor and the second motor are servo motors.

[0013] In some embodiments, when the detection height of the point is greater than the standard height, the first motor drives the first telescopic rod in a direction perpendicular to the reference plane and downward; when the detection height of the point is less than the standard height, the second motor drives the second telescopic rod in a direction perpendicular to the reference plane and upward.

[0014] In some embodiments, the extension distance of the first telescopic rod and / or the second telescopic rod in a direction perpendicular to the reference plane does not exceed the difference between the detected height and the standard height.

[0015] In some embodiments, the first motor is located at the end of the first telescopic rod away from the platform, and the second motor is located at the end of the second telescopic rod away from the platform.

[0016] In some embodiments, the telescopic range of the first telescopic rod and the second telescopic rod is greater than 10 centimeters.

[0017] The above technical solution provides a heater leveling device including a platform and an adjustment mechanism. By incorporating a first telescopic rod, a first motor, a second telescopic rod, and a second motor into the adjustment structure, the first telescopic rod is positioned on the upper surface of the platform, and the second telescopic rod is positioned on the lower surface of the platform. Both the first and second telescopic rods are perpendicular to a reference plane. Based on the difference between the detected height and the standard height of a point on the top surface of the heater relative to the reference plane, the first motor drives the first telescopic rod to extend and retract in a direction perpendicular to the reference plane, and the second motor drives the second telescopic rod to extend and retract in the same direction. By providing at least one set of the adjustment structure on the platform, the platform can be precisely adjusted, thereby accurately leveling the top surface of the heater. This avoids the blind adjustment problem of manual adjustment, saves time and effort, and improves the progress and efficiency of leveling the top surface of the heater.

[0018] It should be understood that the above general description and the following detailed description are exemplary and explanatory only, and are not intended to limit the present invention. Techniques, methods, and devices known to those skilled in the art may not be discussed in detail, but where appropriate, such techniques, methods, and devices should be considered part of the specification. Attached Figure Description

[0019] To more clearly illustrate the technical solutions of the embodiments of this utility model, the drawings used in the embodiments of this utility model will be briefly introduced below. Obviously, the drawings described below are only some embodiments of this utility model. For those skilled in the art, other drawings can be obtained based on these drawings without creative effort.

[0020] Figure 1 This is a schematic diagram of a heater leveling device provided in an embodiment of the present invention;

[0021] Figure 2 This is a schematic diagram of an adjustment mechanism provided in one embodiment of the present invention.

[0022] Explanation of reference numerals in the attached figures

[0023] 11 Heaters

[0024] 12 platforms

[0025] 121 Upper surface

[0026] 122 Lower surface

[0027] 13. Adjustment mechanism

[0028] 131 First telescopic pole

[0029] 132 First Motor

[0030] 133 Second telescopic pole

[0031] 134 Second Motor

[0032] D1 is the direction perpendicular to the reference plane and pointing downwards.

[0033] D2 is the direction perpendicular to the reference plane and pointing upwards. Detailed Implementation

[0034] The technical solutions in the embodiments of this utility model will be clearly and completely described below with reference to the accompanying drawings. Obviously, the described embodiments are only some embodiments of this utility model, and not all embodiments. Based on the embodiments of this utility model, all other embodiments obtained by those skilled in the art without creative effort are within the protection scope of this utility model.

[0035] Figure 1 This is a schematic diagram of a heater leveling device provided in an embodiment of the present invention; Figure 2 This is a schematic diagram of an adjustment mechanism provided in one embodiment of the present invention. Figure 1 As shown, the heater leveling device includes a platform 12 and an adjustment mechanism 13.

[0036] Also refer to Figure 1 and Figure 2 The platform 12 is used to support the heater 11. The platform 12 has an upper surface 121 and a lower surface 122 that are disposed opposite to each other. The platform 12 can be linked with the heater 11 to level the heater 11.

[0037] The heater 11 is used to heat the wafer, and the top surface of the heater 11 is in contact with the wafer. In this embodiment, the top surface of the heater 11 is circular, matching the shape of the wafer. In some embodiments, the top surface of the heater 11 may also be rectangular.

[0038] The platform 12 is connected to the heater 11 and can move in the same direction. In this embodiment, the platform 12 is disposed below the heater 11. The heater 11 can be leveled by adjusting the platform 12 in the vertical direction. Specifically, the platform 12 is a flat cuboid, one side of the platform 12 is fixed, and the other side of the platform 12 can be used to level the heater 11; for example, when the other side of the platform 12 is adjusted upward, the corresponding point on the top surface of the heater 11 is adjusted upward; when the other side of the platform 12 is adjusted downward, the corresponding point on the top surface of the heater 11 is adjusted downward.

[0039] The adjustment mechanism 13 is used to adjust the platform 12 to level the top surface of the heater 11. The adjustment mechanism 13 includes a first telescopic rod 131, a first motor 132, a second telescopic rod 133, and a second motor 134. At least one set of the adjustment mechanism 13 is disposed on the platform 12.

[0040] like Figure 2As shown, the first telescopic rod 131 is disposed on the upper surface 121 of the platform 12, and the second telescopic rod 133 is disposed on the lower surface 122 of the platform 12. Both the first telescopic rod 131 and the second telescopic rod 133 are perpendicular to the reference plane. Based on the difference between the detected height of a point on the top surface of the heater 11 relative to the reference plane and the standard height of the point relative to the reference plane, the first motor 132 drives the first telescopic rod 131 to extend and retract in a direction perpendicular to the reference plane, and / or the second motor 134 drives the second telescopic rod 133 to extend and retract in a direction perpendicular to the reference plane.

[0041] The reference plane is a horizontal plane, and the direction perpendicular to the reference plane is the vertical direction. Both the first telescopic rod 131 and the second telescopic rod 133 are perpendicular to the reference plane, and the detection height and the standard height are both relative to the same reference plane. In this embodiment, the reference plane is a horizontally set workbench, and both the detection height and the standard height are relative to the workbench. The detection height is the height of the point on the top surface of the heater 11 relative to the reference plane, detected by the sensor, and the standard height is the height of the point on the top surface of the heater 11 relative to the reference plane that meets the process requirements.

[0042] In this embodiment, the first motor 132 is disposed at the end of the first telescopic rod 131 away from the platform 12, and the second motor 134 is disposed at the end of the second telescopic rod 133 away from the platform 12. In some embodiments, the first motor 132 is connected to the first telescopic rod 131 by other structures, or the second motor 134 is connected to the second telescopic rod 133 by other means. This application does not limit the connection structure and connection method between the motor and the telescopic rod.

[0043] In this embodiment, the first motor 132 and the second motor 134 are servo motors. The servo motors can control the rotation of the motors, thereby achieving precise length adjustment of the first telescopic rod 131 and the second telescopic rod 133. Specifically, the first motor 132 drives the first telescopic rod 131 to extend or retract a minimum distance perpendicular to the reference plane each time; for example, the first motor 132 drives the first telescopic rod 131 to extend or retract a minimum distance perpendicular to the reference plane each time, which is 1 mil (25.4 micrometers). Similarly, the second motor 134 drives the second telescopic rod 133 to extend or retract a minimum distance perpendicular to the reference plane each time, which is less than 30 micrometers.

[0044] In this embodiment, the telescopic range of the first telescopic rod 131 and the second telescopic rod 133 is greater than 10 cm. For example, the telescopic range of the first telescopic rod 131 and the second telescopic rod 133 is 15 cm. However, during the process of adjusting the platform 12 to level the heater 11, the adjustment distance of the top surface of the heater 11 is usually very small, for example, 2 mils.

[0045] When the detection height of the point is greater than the standard height, the first motor 132 drives the first telescopic rod 131 in a direction D1 perpendicular to the reference plane downwards, and at the same time, the second motor 134 drives the second telescopic rod 133 in a direction D1 perpendicular to the reference plane downwards; when the detection height of the point is less than the standard height, the second motor 134 drives the second telescopic rod 133 in a direction D2 perpendicular to the reference plane upwards, and at the same time, the first motor 132 drives the first telescopic rod 131 in a direction D2 perpendicular to the reference plane upwards.

[0046] In other words, in this embodiment, the adjustment direction and adjustment distance of the first motor 132 and the second motor 134 are synchronized.

[0047] Continue to refer to Figure 1 Two adjustment mechanisms 13 are provided on the same side of the platform 12. The two adjustment mechanisms 13 are located at the corners of the platform 12, so that the two adjustment mechanisms 13 are symmetrical along the central axis of the platform 12, thereby enabling the level of the two parts of the heater 11 to be adjusted evenly.

[0048] In another embodiment, the platform 12 has only one adjustment mechanism 13, which is located on the central axis of the platform 12.

[0049] In this embodiment, during the leveling process using the heater leveling device, the position of the point is located on the diameter of the top surface of the heater 11 and parallel to the central axis of the platform 12.

[0050] When the detection height of the point is greater than the standard height, both first motors 132 drive the first telescopic rod 131 in a direction D1 perpendicular to the reference plane downwards, and correspondingly, both second motors 134 drive the second telescopic rod 133 in a direction D1 perpendicular to the reference plane downwards; when the detection height of the point is less than the standard height, both second motors 134 drive the second telescopic rod 133 in a direction D2 perpendicular to the reference plane upwards, and correspondingly, both first motors 132 drive the first telescopic rod 131 in a direction D2 perpendicular to the reference plane upwards.

[0051] The extension / retraction distance of the first telescopic rod 131 and / or the second telescopic rod 133 in the direction perpendicular to the reference plane does not exceed the difference between the detected height and the standard height. The operator determines the extension / retraction distance of the first telescopic rod 131 and / or the second telescopic rod 133 in the direction perpendicular to the reference plane based on the difference between the detected height and the standard height, and implements the extension / retraction via the first motor 132 and / or the second motor 134.

[0052] The above technical solution provides a heater leveling device including a platform and an adjustment mechanism. By incorporating a first telescopic rod, a first motor, a second telescopic rod, and a second motor into the adjustment structure, the first telescopic rod is positioned on the upper surface of the platform, and the second telescopic rod is positioned on the lower surface of the platform. Both the first and second telescopic rods are perpendicular to a reference plane. Based on the difference between the detected height and the standard height of a point on the top surface of the heater relative to the reference plane, the first motor drives the first telescopic rod to extend and retract in a direction perpendicular to the reference plane, and the second motor drives the second telescopic rod to extend and retract in the same direction. By providing at least one set of the adjustment structure on the platform, the platform can be precisely adjusted, thereby accurately leveling the top surface of the heater. This avoids the blind adjustment problem of manual adjustment, saves time and effort, and improves the progress and efficiency of leveling the top surface of the heater.

[0053] It should be noted that, in this document, relational terms such as "first" and "second" are used merely to distinguish one entity or operation from another, and do not necessarily require or imply any such actual relationship or order between these entities or operations. Furthermore, the terms "comprising," "including," or any other variations thereof are intended to cover non-exclusive inclusion. The various embodiments in this specification are described in a related manner, and similar or identical parts between embodiments can be referred to mutually. Each embodiment focuses on describing the differences from other embodiments.

[0054] The above description is merely a preferred embodiment of this utility model and is not intended to limit the scope of protection of this utility model. It should be noted that those skilled in the art can make various improvements and modifications without departing from the principle of this utility model, and these improvements and modifications should also be considered within the scope of protection of this utility model.

Claims

1. A heater leveling device, characterized in that, include: A platform for supporting a heater, the platform having an upper surface and a lower surface disposed opposite to each other, the platform being able to be linked with the heater to level the heater; At least one adjustment mechanism is disposed on the platform. The adjustment mechanism is used to adjust the platform to achieve leveling of the heater. The adjustment mechanism includes a first telescopic rod, a first motor, a second telescopic rod, and a second motor. The first telescopic rod is disposed on the upper surface of the platform, and the second telescopic rod is disposed on the lower surface of the platform. Both the first telescopic rod and the second telescopic rod are perpendicular to the reference plane. Based on the difference between the detected height of a point on the top surface of the heater relative to the reference plane and the standard height of the point relative to the reference plane, the first motor drives the first telescopic rod to extend or retract, and / or the second motor drives the second telescopic rod to extend or retract.

2. The heater leveling device according to claim 1, characterized in that, The reference plane is a horizontal plane.

3. The heater leveling device according to claim 1, characterized in that, The standard height is the height of the point on the top surface of the heater relative to the reference surface that meets the process requirements.

4. The heater leveling device according to claim 1, characterized in that, The platform is in the shape of a flat cuboid, and two adjustment mechanisms are provided on the same side of the platform.

5. The heater leveling device according to claim 1, characterized in that, The minimum distance that the first motor drives the first telescopic rod to extend or retract in a direction perpendicular to the reference plane each time is less than 30 micrometers; and / or The second motor drives the second telescopic rod to extend or retract a minimum distance of less than 30 micrometers in a direction perpendicular to the reference plane each time.

6. The heater leveling device according to claim 1, characterized in that, The first motor and the second motor are servo motors.

7. The heater leveling device according to claim 1, characterized in that, When the detection height at the point is greater than the standard height, the first motor drives the first telescopic rod in a direction perpendicular to the reference plane and downward. When the detection height at the point is less than the standard height, the second motor drives the second telescopic rod in a direction perpendicular to the reference plane and upward.

8. The heater leveling device according to claim 1, characterized in that, The extension distance of the first telescopic rod and / or the second telescopic rod in a direction perpendicular to the reference plane does not exceed the difference between the detection height and the standard height.

9. The heater leveling device according to claim 1, characterized in that, The first motor is located at the end of the first telescopic rod away from the platform, and the second motor is located at the end of the second telescopic rod away from the platform.

10. The heater leveling device according to claim 1, characterized in that, The telescopic range of the first telescopic rod and the second telescopic rod is greater than 10 centimeters.

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