Liquid heating device with multiple sealing structures
By employing a multi-layered sealing structure consisting of a quartz glass tube and a quartz heating element, the problems of metal ion contamination and poor sealing in liquid heaters are solved, achieving efficient and safe liquid heating, suitable for semiconductor and photovoltaic silicon wafer cleaning equipment.
Patent Information
- Application Number
- CN202423302237.3
- Authority / Receiving Office
- CN · China
- Patent Type
- Utility models(China)
- Current Assignee / Owner
- Filing Date
- 2024-12-30
- Publication Date
- 2025-12-02
- Estimated Expiration
- 2034-12-30
AI Technical Summary
Existing liquid heaters suffer from metal ion contamination, poor sealing, and high energy consumption, which negatively impact product quality, especially in semiconductor and photovoltaic silicon wafer cleaning equipment.
It adopts a multi-seal structure of quartz glass tube and quartz heating tube, and achieves multiple seals through components such as heating tube sealing ring, glass tube flat gasket sealing ring and outer sealing ring to avoid contact between liquid and metal parts. Combined with heat insulation sleeve and temperature sensing probe, it improves heating efficiency and safety.
It achieves metal ion-free heating, reduces energy consumption, improves thermal efficiency, reduces the risk of leakage, and is easy to maintain, making it suitable for semiconductor and photovoltaic silicon wafer cleaning equipment.
Smart Images

Figure CN223623108U_ABST
Abstract
Description
Technical Field
[0001] This utility model relates to the field of heating equipment, specifically to a liquid heating device with a multi-layer sealing structure. Background Technology
[0002] Most common electric heaters used for liquid heating consist of heating elements such as heating plates, heating rods, or heating wires placed inside a container made of plastic or metal. The container stores or exchanges heat. These heaters often contain metal components in their heating elements or parts in contact with the liquid. During the heating process, some metal molecules or ions are inevitably generated, resulting in the heated liquid also containing metal molecules or ions. For some specialized production equipment, such as silicon wafer cleaning in semiconductors and photovoltaics, the hot solution must not contain metal or conductive ions; otherwise, it will affect the product or cause quality defects. Therefore, using conventional liquid heaters in such specialized equipment often leads to unstable product quality.
[0003] Furthermore, existing electric heaters generally suffer from poor heat insulation, electrical insulation, and sealing, which not only easily leads to high energy consumption and reduced thermal efficiency, but also poses potential risks of electric leakage and heat burns. Moreover, when the sealing effect is insufficient, liquid can come into contact with the metal components inside the heater, causing the liquid to mix with more metal ions. Although some existing electric heaters do have sealing features, they generally use a firing method for sealing, which makes assembly, replacement, and maintenance quite difficult. Utility Model Content
[0004] To overcome the shortcomings of the existing technology, the purpose of this utility model is to provide a liquid heating device with a multi-seal structure, which can solve the problems of existing liquid heaters having metal ions easily mixed into the heated liquid and insufficient sealing effect.
[0005] This utility model is achieved through the following technical solution:
[0006] A liquid heating device with a multi-layer sealing structure includes: a quartz glass tube having a hollow cavity; a quartz heating tube coaxially arranged inside the quartz glass tube; a gap between the quartz heating tube and the quartz glass tube to form a liquid channel; a heating tube mounting base with a mounting hole for fitting onto the quartz heating tube; a protruding ring extending along the inner side of the mounting hole, the protruding ring fitting onto the quartz heating tube; an inlet and an outlet communicating at both ends of the liquid channel; a heating tube sealing ring fitted onto the quartz heating tube; and a heating tube sealing pressure block fitted onto the... The quartz heating tube is mounted on one side of the heating tube sealing ring; the heating tube sealing block is threadedly engaged with the quartz heating tube to tightly press the heating tube sealing ring against the convex ring; the glass tube flat gasket sealing ring has an annular groove on the heating tube mounting base, and a flange on the outer side of the annular groove; the glass tube flat gasket sealing ring has an L-shaped cross-section; the glass tube flat gasket sealing ring is placed between the annular groove and the end of the quartz glass tube, and also between the flange and the outer wall of the quartz glass tube.
[0007] Furthermore, the liquid heating device with multiple sealing structures further includes: an outer sealing ring for the glass tube and an outer sealing ring pressing block; the outer sealing ring for the glass tube is inserted between the flange and the quartz glass tube and abuts against the side of the flat gasket sealing ring for the glass tube; the cross-section of the outer sealing ring pressing block is L-shaped, and the outer sealing ring pressing block covers the upper part of the flange and abuts against the outer sealing ring for the glass tube, so as to tightly press the outer sealing ring for the glass tube against the flat gasket sealing ring for the glass tube.
[0008] Furthermore, the liquid heating device with multiple sealing structures further includes: a first pressure plate and a second pressure plate; the first pressure plate abuts against one side of the heating tube mounting base, and the second pressure plate abuts against the side of the outer sealing ring block opposite to the outer sealing ring of the glass tube; the first pressure plate and the second pressure plate are fixedly locked together to tightly fit the outer sealing ring of the glass tube into the installation gap between the flange and the quartz glass tube.
[0009] Furthermore, the liquid heating device with multiple sealing structures also includes a locking bolt and a locking nut for adjusting the tightness of the first pressure plate and the second pressure plate; the locking bolt passes through the first pressure plate and the second pressure plate and is screwed to the locking nut to lock the first pressure plate and the second pressure plate.
[0010] Furthermore, the liquid heating device with multiple sealing structures further includes: an inlet pipe and an outlet pipe, wherein the inlet and the outlet are respectively opened on the inlet pipe and the outlet pipe; the inlet pipe is fused and sealed to the heating element mounting base on the inlet side, and the outlet pipe is fused and sealed to the heating element mounting base on the outlet side.
[0011] Furthermore, the quartz glass tube and the quartz heating tube are arranged parallel to each other, while the liquid inlet pipe and the liquid outlet pipe are arranged perpendicular to the quartz glass tube to form a side-inlet and side-outlet liquid heating device.
[0012] Furthermore, the inlet and outlet pipes are made of Teflon or high-temperature resistant PP material.
[0013] Furthermore, the liquid heating device with multiple sealing structures also includes: a heat insulation sleeve; the heat insulation sleeve is tightly fitted onto the outer wall of the quartz glass tube.
[0014] Furthermore, the heat insulation sleeve is made of ceramic fiber insulation cotton material.
[0015] Furthermore, the liquid heating device with multiple sealing structures also includes: a temperature sensing probe; the temperature sensing probe is fixed on the heating tube mounting base located on the liquid outlet side, and the sensing part of the temperature sensing probe extends into the liquid channel.
[0016] Compared with existing technologies, the beneficial effects that this utility model can achieve are as follows:
[0017] During operation, the liquid to be heated is input through the inlet, entering the fluid channel between the quartz glass tube and the quartz heating element. The quartz heating element is energized, and the generated heat is conducted to the liquid through the quartz glass tube. The heated liquid is then output through the outlet. Throughout the heating process, the liquid fills the space between the quartz glass tube and the quartz heating element, achieving indirect heating without contact with any metal components (such as electrodes or wires). This ensures that the heated liquid is free of any metal molecules or ions, resulting in higher cleanliness. This method can be applied to specialized equipment requiring the hot solution to be free of metal or conductive ions, such as equipment used for cleaning silicon wafers in semiconductors and photovoltaics.
[0018] At the end of the quartz heating tube, a heating tube sealing ring seals the installation gap. Then, by screwing a threaded heating tube sealing block into the internal threaded hole of the heating tube mounting base, the heating tube sealing ring is tightly pressed against the convex ring, achieving a double seal and ensuring stable fastening, preventing loosening due to vibration. Simultaneously, at the end of the quartz glass tube, a flat glass tube gasket sealing ring seals the installation gap at the end of the quartz glass tube. Furthermore, in the radial direction, the flat glass tube gasket sealing ring also seals the gap between the outer wall of the quartz glass tube and the flange.
[0019] In summary, this heating device features a multi-layered sealing structure that is highly stable and resistant to loosening, resulting in better sealing of the liquid channel. This achieves low energy consumption and high thermal efficiency, reducing the risk of electric leakage and heat burns. Furthermore, it isolates the liquid from metal components, ensuring liquid cleanliness. Additionally, this sealing structure facilitates the disassembly and replacement of components, making maintenance more convenient. Attached Figure Description
[0020] Figure 1 The image shown is a perspective view of this utility model;
[0021] Figure 2 The image shown is a top view of this utility model;
[0022] Figure 3 As shown Figure 2 Sectional view along the middle AA direction;
[0023] Figure 4 As shown Figure 3 A magnified view of a section at point B in the middle;
[0024] Figure 5 As shown Figure 3 A schematic diagram from a three-dimensional perspective;
[0025] Figure 6 As shown Figure 5 A magnified view of a section at point C;
[0026] Figure 7 The image shown is a cross-sectional view of the heating element mounting base.
[0027] In the diagram: 10, quartz glass tube; 20, quartz heating element; 30, liquid channel; 40, heating element mounting base; 41, convex ring; 42, annular groove; 43, flange; 50, liquid inlet; 60, liquid outlet; 70, heating element sealing ring; 80, heating element sealing block; 90, glass tube flat gasket sealing ring; 100, glass tube outer sealing ring; 110, outer sealing ring block; 120, first pressure plate; 130, second pressure plate; 140, locking bolt; 150, locking nut; 160, liquid inlet pipe; 170, liquid outlet pipe; 180, heat insulation sleeve; 190, temperature sensor. Detailed Implementation
[0028] The present invention will now be further described in conjunction with the accompanying drawings and specific embodiments. It should be noted that, without conflict, the various embodiments or technical features described below can be arbitrarily combined to form new embodiments.
[0029] In the description of this utility model, it should be understood that the terms "center", "length", "width", "thickness", "upper", "lower", "front", "rear", "left", "right", "vertical", "horizontal", "top", "bottom", "inner", and "outer" indicate the orientation or positional relationship based on the orientation or positional relationship shown in the accompanying drawings. They are only for the convenience of describing this utility model and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation. Therefore, they should not be construed as limitations on this utility model.
[0030] Furthermore, the terms "first" and "second" are used for descriptive purposes only and should not be construed as indicating or implying relative importance or implicitly specifying the number of technical features indicated. Thus, a feature defined as "first" or "second" may explicitly or implicitly include one or more of that feature. In the description of this utility model, "a plurality of" means two or more, unless otherwise explicitly specified.
[0031] In the description of this utility model, it should be noted that, unless otherwise explicitly specified and limited, the terms "installation," "connection," and "joining" should be interpreted broadly. For example, they can refer to a fixed connection, a detachable connection, or an integral connection; they can refer to a mechanical connection or an electrical connection; they can refer to a direct connection or an indirect connection through an intermediate medium; they can refer to the internal communication of two components or the interaction between two components. Those skilled in the art can understand the specific meaning of the above terms in this utility model according to the specific circumstances.
[0032] See Figures 1-6This utility model discloses a liquid heating device with multiple sealing structures, including: a quartz glass tube 10, a quartz heating tube 20, a heating tube mounting base 40, a liquid inlet 50, a liquid outlet 60, a heating tube sealing ring 70, a heating tube sealing pressure block 80, and a glass tube flat gasket sealing ring 90.
[0033] Among them, see Figure 3 and Figure 5 The quartz glass tube 10 has a hollow cavity, and the quartz heating tube 20 is housed within the hollow cavity of the quartz glass tube 10, with the two arranged coaxially. There is a gap between the quartz glass tube 10 and the quartz heating tube 20, thereby forming a liquid channel 30 through which liquid flows. The liquid inlet 50 and the liquid outlet 60 are respectively connected to the liquid inlet.
[0034] See Figures 3-7 Two heating element mounting seats 40 are provided for mounting the two ends of the quartz heating element 20. Each heating element mounting seat 40 has a mounting hole, and a protruding ring 41 extends from the inner side of the hole, fitting onto the outer wall of the quartz heating element 20. A heating element sealing ring 70 is fitted onto the quartz heating element 20 and positioned beside the mounting gap between the protruding ring 41 and the quartz heating element 20. A heating element sealing block 80 is also fitted onto the quartz heating element 20 and positioned on the side of the heating element sealing ring 70. The heating element sealing block 80 has external threads, and correspondingly, the protruding ring 41 has internal threads. The heating element sealing block 80 is screwed into the protruding ring 41 through the threaded structure, thereby tightly pressing the heating element sealing ring 70 against the protruding ring 41.
[0035] The heating element mounting base 40 is provided with an annular groove 42 on the opposite side of the protruding ring 41, and a flange 43 is provided on the outer side of the annular groove 42, the flange 43 protruding horizontally relative to the annular groove 42. The glass tube flat gasket sealing ring 90 has an L-shaped cross-section and is placed between the annular groove 42 and the end of the quartz glass tube 10, relying on the L-shaped cross-sectional structure, and is also placed between the flange 43 and the outer wall of the quartz glass tube 10.
[0036] During operation, the liquid to be heated is input through the inlet 50. The liquid enters the fluid channel between the quartz glass tube 10 and the quartz heating tube 20. The quartz heating tube 20 is energized, and the heat generated is conducted to the liquid through the quartz glass tube 10. After being heated, the liquid is output through the outlet. Throughout the heating process, the liquid fills the space between the quartz glass tube 10 and the quartz heating tube 20, achieving indirect heating without contact with any metal parts (such as electrodes, wires, etc.). This ensures that the heated liquid is free of any metal molecules or ions, resulting in higher cleanliness. This method can be applied to special equipment that requires the hot solution to be free of metal ions or conductive ions, such as equipment used for cleaning silicon wafers in semiconductors and photovoltaics.
[0037] At the end of the quartz heating tube 20, the heating tube sealing ring 70 seals the installation gap of the quartz heating tube 20. Then, by screwing the externally threaded heating tube sealing block 80 into the internally threaded hole of the heating tube mounting base 40, the heating tube sealing ring 70 is tightly pressed onto the convex ring 41, achieving a double sealing effect and ensuring stable fastening, preventing loosening due to vibration. Simultaneously, at the end of the quartz glass tube 10, the glass tube flat gasket sealing ring 90 seals the installation gap at the end of the quartz glass tube 10. Furthermore, in the radial direction, the glass tube flat gasket sealing ring 90 also seals the gap between the outer wall of the quartz glass tube 10 and the flange 43.
[0038] In summary, this heating device features a multi-layered sealing structure that is highly stable and resistant to loosening, resulting in a better seal within the liquid channel 30. This achieves low energy consumption and high thermal efficiency, reducing the risk of electric leakage and heat burns. Furthermore, it isolates the liquid from metal components, ensuring liquid cleanliness. Additionally, this sealing structure facilitates the disassembly and replacement of components, making maintenance more convenient.
[0039] Preferably, see below. Figures 3-7 This utility model also includes an outer sealing ring 100 and an outer sealing ring pressure block 110 for enhancing the sealing effect at the end of the quartz glass tube 10. The outer sealing ring 100 is positioned between the flange 43 and the quartz glass tube 10, and abuts against the side of the flat sealing ring 90. The outer sealing ring pressure block 110 has an L-shaped cross-section. It covers the flange 43, thus enhancing the radial sealing of the quartz glass tube 10. Simultaneously, due to its L-shaped cross-section, the outer sealing ring pressure block 110 also abuts against the side of the outer sealing ring 100, thereby tightly pressing the outer sealing ring 100 against the flat sealing ring 90, thus enhancing the axial sealing of the quartz glass tube 10.
[0040] Further preferably, to enhance the clamping effect of the outer sealing ring pressure block 110, this utility model also includes a first pressure plate 120 and a second pressure plate 130. The first pressure plate 120 abuts against one side of the heating tube mounting base 40, and the second pressure plate 130 abuts against the side of the outer sealing ring pressure block 110 opposite to the outer sealing ring 100 of the glass tube. The first pressure plate 120 and the second pressure plate 130 are locked together, thereby tightly fitting the outer sealing ring 100 of the glass tube into the installation gap between the flange 43 and the quartz glass tube 10, thus further enhancing the sealing effect of this heating device.
[0041] More specifically, the present invention also includes a locking bolt 140 and a locking nut 150 for adjusting the tightness of the two pressure plates. The locking bolt 140 is inserted between the first pressure plate 120 and the second pressure plate 130 and screwed onto the locking nut 150, thereby locking the first pressure plate 120 and the second pressure plate 130, thereby enhancing the sealing of the end of the quartz glass tube 10.
[0042] Preferably, the present invention further includes an inlet pipe 160 and an outlet pipe 170, wherein the aforementioned inlet port 50 and outlet port 60 are respectively provided on the inlet pipe 160 and the outlet pipe 170. The inlet pipe 160 is fused and sealed to the heating element mounting base 40 on the inlet side, and the outlet pipe 170 is fused and sealed to the heating element mounting base 40 on the outlet side. Through integral fusion, the sealing performance of the inlet and outlet ends is enhanced, preventing leakage of liquid during the inlet and outlet processes, thereby ensuring the cleanliness of the liquid.
[0043] More specifically, the inlet pipe 160 and the outlet pipe 170 are made of Teflon or high-temperature resistant PP material, which has high-temperature resistance and is easy to weld and seal.
[0044] Preferably, the quartz glass tube 10 and the quartz heating tube 20 are arranged parallel to each other, while the liquid inlet pipe 160 and the liquid outlet pipe 170 are arranged perpendicular to the quartz glass tube 10. In use, the device is installed vertically along the axial direction of the quartz glass tube 10, forming a liquid-side-inlet-side-out structure. This structure facilitates flexible installation in confined spaces and is easy to arrange. Furthermore, because the liquid flows vertically overflow within the device, the heating effect is uniform and the heat exchange efficiency is high.
[0045] Preferably, the present invention further includes a heat insulation sleeve 180, which is tightly fitted onto the outer wall of the quartz glass tube 10 to keep the liquid warm and prevent the outer shell from being burned. Further, the heat insulation sleeve 180 can be made of ceramic fiber insulation cotton material.
[0046] Preferably, the present invention also includes a temperature sensing probe 190, which serves to accurately detect the temperature of the outflowing liquid. The temperature sensing probe 190 is fixed on the heating tube mounting base 40 on the liquid outlet side, and the sensing part of the temperature sensing probe 190 extends into the liquid channel 30. By feeding back the liquid temperature to the control system, the outflow temperature can be adjusted by regulating the heating power of the quartz heating tube 20 or the flow rate of the liquid in the device.
[0047] The above embodiments are merely preferred embodiments of this utility model and should not be construed as limiting the scope of protection of this utility model. Any non-substantial changes and substitutions made by those skilled in the art based on this utility model shall fall within the scope of protection claimed by this utility model.
Claims
1. A liquid heating device with a multi-layer sealing structure, characterized in that, include: Quartz glass tube with a hollow cavity; A quartz heating element is coaxially arranged inside the quartz glass tube; the quartz heating element and the quartz glass tube have a gap to form a liquid channel; A heating element mounting base has a mounting hole for fitting onto the quartz heating element; a protruding ring extends from the mounting hole along its inner side, and the protruding ring fits onto the quartz heating element; The inlet and outlet are connected to the two ends of the liquid channel; A heating element sealing ring is fitted onto the quartz heating element; A heating element sealing block is fitted onto the quartz heating element and located on one side of the heating element sealing ring; the heating element sealing block is threadedly engaged with the quartz heating element to tightly press the heating element sealing ring against the convex ring; The glass tube flat gasket sealing ring has an annular groove on the heating tube mounting base and a flange on the outer side of the annular groove. The glass tube flat gasket sealing ring has an L-shaped cross-section. The glass tube flat gasket sealing ring is placed between the annular groove and the end of the quartz glass tube, and also between the flange and the outer wall of the quartz glass tube.
2. The liquid heating device with a multi-sealing structure as described in claim 1, characterized in that, The liquid heating device with multiple sealing structures further includes: an outer sealing ring for the glass tube and an outer sealing ring pressing block; The outer sealing ring of the glass tube is disposed between the flange and the quartz glass tube and abuts against the side of the flat gasket sealing ring of the glass tube; the cross-section of the outer sealing ring pressing block is L-shaped, and the outer sealing ring pressing block covers the upper part of the flange and abuts against the outer sealing ring of the glass tube, so as to tightly press the outer sealing ring of the glass tube against the flat gasket sealing ring of the glass tube.
3. The liquid heating device with a multi-sealing structure as described in claim 2, characterized in that, The liquid heating device with multiple sealing structures further includes: a first pressure plate and a second pressure plate; the first pressure plate abuts against one side of the heating tube mounting base, and the second pressure plate abuts against the side of the outer sealing ring block opposite to the outer sealing ring of the glass tube; the first pressure plate and the second pressure plate are fixedly locked together to tightly fit the outer sealing ring of the glass tube into the installation gap between the flange and the quartz glass tube.
4. The liquid heating device with a multi-sealing structure as described in claim 3, characterized in that, The liquid heating device with multiple sealing structures further includes a locking bolt and a locking nut for adjusting the tightness of the first pressure plate and the second pressure plate; the locking bolt passes through the first pressure plate and the second pressure plate and is screwed to the locking nut to lock the first pressure plate and the second pressure plate.
5. The liquid heating device with a multi-sealing structure as described in claim 1, characterized in that, The liquid heating device with multiple sealing structures further includes: an inlet pipe and an outlet pipe, wherein the inlet and the outlet are respectively opened on the inlet pipe and the outlet pipe; the inlet pipe is fused and sealed to the heating element mounting base on the inlet side, and the outlet pipe is fused and sealed to the heating element mounting base on the outlet side.
6. The liquid heating device with a multi-sealing structure as described in claim 5, characterized in that, The quartz glass tube and the quartz heating tube are arranged parallel to each other, while the liquid inlet pipe and the liquid outlet pipe are arranged perpendicular to the quartz glass tube to form a side-inlet and side-outlet liquid heating device.
7. The liquid heating device with a multi-sealing structure as described in claim 5, characterized in that, The inlet and outlet pipes are made of Teflon or high-temperature resistant PP material.
8. The liquid heating device with a multiple sealing structure as described in claim 1, characterized in that, The liquid heating device with multiple sealing structures further includes: a heat insulation sleeve; the heat insulation sleeve is tightly fitted onto the outer wall of the quartz glass tube.
9. The liquid heating device with a multiple sealing structure as described in claim 8, characterized in that, The heat insulation sleeve is made of ceramic fiber insulation cotton material.
10. The liquid heating device with a multiple sealing structure as described in claim 1, characterized in that, The liquid heating device with multiple sealing structures further includes: a temperature sensing probe; the temperature sensing probe is fixed on the heating tube mounting base on the liquid outlet side, and the sensing part of the temperature sensing probe extends into the liquid channel.