Multi-class MEMS thermopile test fixture
By designing multi-category MEMS thermopile test fixtures, the problem of poor portability of MEMS thermopile sensors requiring placement in a constant temperature chamber has been solved, achieving a stable testing environment and efficient operation, and reducing testing costs.
Patent Information
- Application Number
- CN202520246004.1
- Authority / Receiving Office
- CN · China
- Patent Type
- Utility models(China)
- Current Assignee / Owner
- Filing Date
- 2025-02-17
- Publication Date
- 2025-12-02
- Estimated Expiration
- 2035-02-17
AI Technical Summary
Existing MEMS thermopile sensor testing requires placement in a constant temperature chamber, resulting in poor portability, difficulty in meeting diverse and rapid response testing needs, and high testing costs and low efficiency.
A multi-category MEMS thermopile test fixture was designed, comprising a base, TO package placement hole, support ring, flexible package placement hole, fluid channel, arc-shaped limiting plate and limiting post, etc. Through the cooperation of these structures, a stable testing environment is provided and the operation process is simplified.
It improves the versatility of test fixtures, reduces test errors caused by unstable ambient temperature, increases the handling speed and testing efficiency, and lowers testing costs.
Smart Images
Figure CN223623727U_ABST
Abstract
Description
Technical Field
[0001] This utility model relates to the field of thermopile sensor testing technology, and in particular to a multi-category MEMS thermopile testing fixture. Background Technology
[0002] MEMS thermopile is a thermoelectric conversion device based on microelectromechanical systems technology. Based on the Seebeck effect, when two different materials form a closed loop and the two junctions are at different temperatures, charge carriers will move along the temperature gradient, thereby generating a thermoelectric potential in the loop. The thermopile is composed of multiple pairs of thermocouples connected in series, and each pair of thermocouples outputs a thermoelectric potential. These thermoelectric potentials are superimposed to achieve the detection of small temperature differences. In order to ensure its performance and reliability, the MEMS thermopile sensor needs to be tested after production. During the testing process, a test stand is needed to limit and support the sensor, thereby improving the testing stability of the thermopile sensor.
[0003] In existing testing processes, the test results of MEMS thermopile sensors are greatly affected by temperature. In order to reduce the test errors caused by changes in the external ambient temperature, the MEMS thermopile sensors need to be placed in a constant temperature chamber. This not only makes the system complex but also has poor portability, making it difficult to meet diverse and rapid response testing needs. Moreover, the testing cost is high and the testing efficiency is low. Therefore, a multi-category MEMS thermopile test fixture is proposed to solve the above problems. Utility Model Content
[0004] To overcome the above shortcomings, this utility model provides a multi-category MEMS thermopile test fixture, which aims to improve the problem that the existing technology requires MEMS thermopile sensors to be placed in a constant temperature chamber for testing, resulting in poor portability and difficulty in meeting diverse and rapid response testing needs.
[0005] To achieve the above objectives, the present invention adopts the following technical solution: a multi-category MEMS thermopile test fixture, comprising a base, a TO package placement hole on the upper surface of the base, a support ring fixedly connected to the inner bottom surface of the TO package placement hole, a flexible package placement hole on the upper surface of the base, a plurality of fluid channels on the outer surface of the base, arc-shaped limiting plates respectively provided on the front and rear sides above the TO package placement hole, and a limiting post fixedly connected to the upper surface of the base.
[0006] As a further description of the above technical solution:
[0007] The bottom surface of the arc-shaped limiting plate is fixedly connected to the upper surface of the base.
[0008] As a further description of the above technical solution:
[0009] The inner diameter of the arc-shaped limiting plate is the same as the diameter of the TO package placement hole.
[0010] As a further description of the above technical solution:
[0011] A connecting ring is provided below the support ring, a connecting rod is fixedly connected to the upper surface of the connecting ring, and a pushing ring is fixedly connected to the upper end of the connecting rod.
[0012] As a further description of the above technical solution:
[0013] The upper end of the connecting rod passes through the support ring, and the pushing ring is sleeved inside the TO package placement hole.
[0014] As a further description of the above technical solution:
[0015] The inner diameters of the connecting ring and the pushing ring are the same as the inner diameter of the supporting ring.
[0016] As a further description of the above technical solution:
[0017] An annular rubber pad is fixedly connected to the upper surface of the push ring.
[0018] As a further description of the above technical solution:
[0019] A gap is left between the two arc-shaped limiting plates set above the TO packaging placement hole.
[0020] This utility model has the following beneficial effects:
[0021] 1. In this utility model, through the combination of the TO package placement hole, support ring, flexible package placement hole, fluid channel, arc-shaped limiting plate and limiting post, MEMS thermopile sensor products with various package types can be placed and supported, improving the versatility of the test fixture, and forming a flow channel inside the base to accurately maintain the temperature stability of the outside of the product, providing a precise test environment for product testing and reducing test errors caused by unstable ambient temperature.
[0022] 2. In this utility model, the sensor product placed inside the TO package placement hole can be quickly pushed upward by the cooperation of the connecting ring, connecting rod, pushing ring and annular rubber pad, which makes it convenient for staff to pick up the product, improves the picking speed and testing efficiency, and avoids hard contact between the product and the pushing ring to avoid impact damage. Attached Figure Description
[0023] Figure 1 This is a schematic diagram of the overall multi-category MEMS thermopile test fixture proposed in this utility model;
[0024] Figure 2 This utility model proposes a multi-category MEMS thermopile test fixture. Figure 1 A partial schematic diagram of point A;
[0025] Figure 3 This is a schematic diagram of the base of a multi-category MEMS thermopile test fixture proposed in this utility model;
[0026] Figure 4 This is a schematic diagram of the bottom of a multi-category MEMS thermopile test fixture proposed in this utility model;
[0027] Figure 5 This is a schematic diagram of the connecting ring, connecting rod, pushing ring, and annular rubber pad of a multi-category MEMS thermopile test fixture proposed in this utility model.
[0028] Legend:
[0029] 1. Base; 2. TO package placement hole; 3. Support ring; 4. Flexible package placement hole; 5. Fluid channel; 6. Arc-shaped limiting plate; 7. Limiting post; 8. Connecting ring; 9. Connecting rod; 10. Pushing ring; 11. Annular rubber pad. Detailed Implementation
[0030] The technical solutions of the present utility model will be clearly and completely described below with reference to the accompanying drawings of the embodiments. Obviously, the described embodiments are only some embodiments of the present utility model, and not all embodiments. Based on the embodiments of the present utility model, all other embodiments obtained by those of ordinary skill in the art without creative effort are within the protection scope of the present utility model.
[0031] Reference Figure 1 - Figure 3This utility model provides an embodiment of a multi-category MEMS thermopile test fixture, including a base 1. The base 1 is made of a material with good thermal conductivity, including but not limited to copper, which makes the temperature distribution at the product placement area more uniform and can provide a stable testing environment to a certain extent, reducing testing errors caused by changes in external ambient temperature. The upper surface of the base 1 has a number of TO package placement holes 2, which are of two types: TO39 and TO46. A support ring 3 is fixedly connected to the inner bottom surface of the TO package placement hole 2. The support ring 3 can support and limit the sensor placed inside the TO package placement hole 2, so that the MEMS thermopile sensor remains stable during testing and improves measurement accuracy. The sensor pins can extend out of the TO package placement hole 2 through the support ring 3. The upper surface of the base 1 has a flexible package placement hole 4, which is used to place and support the flexible package sensor. The TO package placement hole 2 and the flexible package placement hole 4 improve the versatility of the MEMS thermopile sensor test fixture and reduce testing costs to a certain extent.
[0032] Several fluid channels 5 are provided on the outer surface of the base 1. The fluid channels 5 are only 10mm away from the sensor product position. The fluid channels 5 can be connected to an external water pipe to supply water at a constant temperature into the fluid channels 5, accurately maintaining the temperature stability around the product, providing a precise testing environment for product testing, and reducing testing errors caused by unstable ambient temperature.
[0033] Reference Figure 2 - Figure 4 Arc-shaped limiting plates 6 are respectively set on the front and rear sides above the TO package placement hole 2. The bottom surface of the arc-shaped limiting plate 6 is fixedly connected to the upper surface of the base 1. The inner diameter of the arc-shaped limiting plate 6 is the same as the diameter of the TO package placement hole 2. A gap is left between the two arc-shaped limiting plates 6 set above the TO package placement hole 2. The arc-shaped limiting plates 6 can initially limit the sensor product placed into the TO package placement hole 2. Before the sensor pins contact the support ring 3, the sensor is limited, so that the pins accurately pass through the support ring 3, avoiding contact and collision between the product pins and the support ring 3, which would cause skew and affect the use of the product. The upper surface of the base 1 is fixedly connected to the limiting post 7. After the product is placed into the two arc-shaped limiting plates 6, the product can be rotated clockwise so that the protruding end on the outer side of the bottom of the sensor fits with the limiting post 7. Then the sensor is moved down so that the protruding end on the outer side of the bottom of the sensor is aligned with the reserved position of the protruding end inside the TO package placement hole 2, reducing alignment time and improving installation and testing efficiency.
[0034] Reference Figure 4 - Figure 5A connecting ring 8 is provided below the support ring 3. A connecting rod 9 is fixedly connected to the upper surface of the connecting ring 8. When the connecting ring 8 moves, it can drive the connecting rod 9 to move synchronously. The upper end of the connecting rod 9 passes through the support ring 3. The connecting rod 9 and the support ring 3 are inserted together. The support ring 3 guides and limits the movement of the connecting rod 9, so that the connecting rod 9 can only move in a straight line in the up and down direction. A push ring 10 is fixedly connected to the upper end of the connecting rod 9. When the connecting ring 8 moves, it can drive the push ring 10 to move synchronously through the connecting rod 9. The push ring 10 is sleeved inside the TO package placement hole 2. The inner wall diameters of the connecting ring 8 and the push ring 10 are the same as the inner wall diameter of the support ring 3. An annular rubber pad 11 is fixedly connected to the upper surface of the push ring 10. The annular rubber pad 11 can prevent the sensor from being damaged by hard contact with the push ring 10.
[0035] After the MEMS thermopile sensor product is placed inside the TO package placement hole 2 for testing, the connecting ring 8 can be pushed upwards. The connecting rod 9 drives the pushing ring 10 to move upwards, lifting the product upwards so that the upper end of the product reaches between the two arc-shaped limiting plates 6. At this time, the staff can take out the product through the gap between the two arc-shaped limiting plates 6, which facilitates the handling of the product and improves testing efficiency.
[0036] Working Principle: Based on the packaging type of the MEMS thermopile sensor, the product is placed into the corresponding TO package placement hole 2 or flexible package placement hole 4. After placement, the fluid channel 5 can be connected to an external water pipe, and a constant and stable water flow can be introduced into the fluid channel 5 through the water pipe, so that the external environment of the product remains stable and constant, reducing the influence of external temperature on the product test results. At the same time, the structure is simple and easy to carry, thereby reducing the testing cost. When placing the product into the TO package placement hole 2, the product can first be placed into the gap between the two arc-shaped limiting plates 6 to limit the movement of the product and prevent the product pins from contacting and colliding with the support ring 3, which would cause skew and affect subsequent use. Then, the product can be rotated so that the protruding end on the outer side of the bottom of the product fits with the limiting post 7, and then the product can be moved down to allow the product to quickly and accurately enter the TO package placement hole 2 for placement, reducing the time for accurate alignment. After the test is completed, the operator can push the connecting ring 8 upward, and the connecting rod 9 drives the pushing ring 10 upward, lifting the product upward, so that the product can be quickly removed from the TO package placement hole 2 for easy handling.
[0037] Finally, it should be noted that the above description is only a preferred embodiment of the present utility model and is not intended to limit the present utility model. Although the present utility model has been described in detail with reference to the foregoing embodiments, those skilled in the art can still modify the technical solutions described in the foregoing embodiments or make equivalent substitutions for some of the technical features. Any modifications, equivalent substitutions, improvements, etc., made within the spirit and principles of the present utility model should be included within the protection scope of the present utility model.
Claims
1. A multi-category MEMS thermopile test fixture, comprising a base (1), characterized in that: The upper surface of the base (1) is provided with a TO package placement hole (2), and a support ring (3) is fixedly connected to the inner bottom surface of the TO package placement hole (2). The upper surface of the base (1) is provided with a flexible package placement hole (4), and a plurality of fluid channels (5) are provided on the outer surface of the base (1). Arc-shaped limiting plates (6) are respectively provided on the front and rear sides above the TO package placement hole (2), and limiting posts (7) are fixedly connected to the upper surface of the base (1).
2. The multi-category MEMS thermopile test fixture according to claim 1, characterized in that: The bottom surface of the arc-shaped limiting plate (6) is fixedly connected to the upper surface of the base (1).
3. A multi-category MEMS thermopile test fixture according to claim 1, characterized in that: The inner diameter of the arc-shaped limiting plate (6) is the same as the diameter of the TO package placement hole (2).
4. A multi-category MEMS thermopile test fixture according to claim 1, characterized in that: A connecting ring (8) is provided below the support ring (3), and a connecting rod (9) is fixedly connected to the upper surface of the connecting ring (8). A push ring (10) is fixedly connected to the upper end of the connecting rod (9).
5. A multi-category MEMS thermopile test fixture according to claim 4, characterized in that: The upper end of the connecting rod (9) passes through the support ring (3), and the pushing ring (10) is sleeved inside the TO package placement hole (2).
6. A multi-category MEMS thermopile test fixture according to claim 4, characterized in that: The inner diameters of the connecting ring (8) and the pushing ring (10) are the same as the inner diameter of the supporting ring (3).
7. A multi-category MEMS thermopile test fixture according to claim 4, characterized in that: An annular rubber pad (11) is fixedly connected to the upper surface of the push ring (10).
8. A multi-category MEMS thermopile test fixture according to claim 1, characterized in that: A gap is left between the two arc-shaped limiting plates (6) set above the TO packaging placement hole (2).