Micro-display optical detection equipment

Abstract

The utility model relates to a micro-display optical detection device, which comprises a detection module group, the detection module group comprises an optical machine installation rack, and the optical machine installation rack is connected with an optical machine used for detecting a display device; the motion module comprises a first linear module used for driving the optical machine to move close to or away from the display device; and the distance measuring module comprises a laser transmitter and a laser receiver which are symmetrically positioned on the two sides of the ray machine, and the axes of the laser transmitter and the laser receiver intersect at one point on the axis of the ray machine. The laser transmitter and the laser receiver are arranged on the two sides of the light machine, and the axis of the laser transmitter and the axis of the laser receiver intersect at one point on the axis of the light machine, so that the detection points of the distance measuring module and the light machine are both located in the same detection area of the display device. The first linear module drives the light machine to move close to or away from the display device to a field depth range of focusing of the light machine according to the actual distance measured by the distance measurement module, so that rapid focusing is realized, and the detection precision of the display device is improved.

Description

Technical Field

[0001] This application relates to the field of Micro LED inspection technology, and in particular to an optical inspection device for microdisplays. Background Technology

[0002] Currently, Micro LED, as a mainstream display technology, has unparalleled advantages over other micro-display technologies. However, Micro LED microdisplays require ATE and AOI testing to effectively reduce the failure rate of those equipped with Micro LED microdisplays.

[0003] When the AOI test module performs optical inspection on the Micro LED microdisplay, the distance between the AOI test module's optical engine and the Micro LED microdisplay needs to be measured by a distance sensor. By adjusting the distance between the optical engine and the Micro LED microdisplay to achieve the depth of field of the optical engine, defects in the Micro LED microdisplay can be detected.

[0004] In related technologies, a rangefinder capable of moving synchronously with the AOI test module is installed next to it, with the central axis of the rangefinder parallel to the optomechanical central axis of the AOI test module. Before the optomechanical inspection of the Micro LED microdisplay, the rangefinder needs to be moved above the Micro LED microdisplay inspection area to monitor the Z-axis distance between the optomechanical system and the Micro LED microdisplay inspection area.

[0005] The collected distance information is then fed back to the control system. Finally, the rangefinder needs to be moved out of the Micro LED microdisplay detection area, and the optical engine needs to be moved above the Micro LED microdisplay detection area. The control system controls the linear module to adjust the height of the optical engine to achieve rapid focusing.

[0006] However, the depth of field of the detection area of ​​the optomechanical inspection of the Micro LED microdisplay reaches the micrometer level. After moving the optomechanical instrument above the detection area of ​​the Micro LED microdisplay, the height difference between the optomechanical instrument and the detection area of ​​the Micro LED microdisplay has a large error, which reduces the clarity of the detection area of ​​the Micro LED microdisplay and reduces the detection accuracy. Summary of the Invention

[0007] This application provides a microdisplay optical inspection device to solve the problem in related technologies where, after the AOI test module completes distance measurement, the optical engine needs to be moved above the Micro LED microdisplay inspection area for optical inspection, which causes a change in the position and height of the optical engine and reduces the accuracy of the optical engine inspection.

[0008] This application provides a microdisplay optical inspection device, including:

[0009] A detection module, comprising an optomechanical mounting bracket on which an optomechanical mechanism for detecting display devices is connected;

[0010] The motion module includes a first linear module for driving the optomechanic to move closer to or away from the display device;

[0011] The ranging module includes a laser emitter and a laser receiver symmetrically located on both sides of the optomechanical system, with their axes intersecting at a point on the axis of the optomechanical system.

[0012] In some embodiments, the axes of the laser emitter and the laser receiver are in the same plane as the axis of the optomechanical system.

[0013] In some embodiments, the angle between the axis of the laser emitter and the axis of the laser receiver and the axis of the optomechanical system is the same, and the angle between the axis of the laser emitter and the axis of the laser receiver is 60°-120°.

[0014] In some embodiments, the axis of the laser emitter, the axis of the laser receiver, and the axis of the optomechanism intersect at a point on the surface of the display device.

[0015] In some embodiments: the ranging module is connected to a PC controller, and the PC controller is connected to the first linear module.

[0016] In some embodiments, the system further includes a second linear module and a third linear module connected to the optical engine mounting bracket, wherein the first linear module, the second linear module, and the third linear module are interconnected and their directions of movement are perpendicular to each other.

[0017] In some embodiments: the optical engine is fixed to the first linear module by an optical engine mounting plate, and the laser emitter and laser receiver are both fixed to the optical engine mounting plate by adjustable mounting brackets.

[0018] In some embodiments, an integrated circuit testing device is also included, located on one side of the testing module. The integrated circuit testing device is provided with a probe station for testing the display device, and the integrated circuit testing device is fixedly connected to the optomechanical mounting frame via a connector.

[0019] In some embodiments, a marble platform is also included, which is fixed to the bottom of the integrated circuit testing device and the optomechanical mounting frame. The bottom of the marble platform is provided with a base, and the four corners of the base are provided with air floats to support the marble platform.

[0020] In some embodiments: the bottom of the base is provided with a plurality of first support feet for supporting the base, and the bottom of the first support feet is provided with a steel pad.

[0021] In some embodiments, the device further includes an outer casing, wherein the detection module, motion module, ranging module, integrated circuit detection device, marble platform and base are all located inside the outer casing and are not connected to the outer casing. The bottom of the outer casing is provided with a plurality of second support feet for supporting the outer casing.

[0022] The beneficial effects of the technical solution provided in this application include:

[0023] This application provides a microdisplay optical inspection device. The microdisplay optical inspection device of this application is equipped with a detection module, which includes an optomechanical mounting bracket on which an optomechanical mechanism for detecting display devices is connected; a motion module, which includes a first linear module for driving the optomechanical mechanism to move closer to or away from the display device; and a ranging module, which includes a laser emitter and a laser receiver symmetrically located on both sides of the optomechanical mechanism and whose axes intersect at a point on the axis of the optomechanical mechanism.

[0024] Therefore, this application sets up a laser emitter and a laser receiver on both sides of the optical engine, and the axes of the laser emitter and the laser receiver intersect at a point on the axis of the optical engine, so that the detection points of the ranging module and the optical engine are both located in the same detection area of ​​the display device. The laser beam emitted by the laser emitter is reflected by the surface of the display device and enters the laser receiver, which can then measure the actual distance between the optical engine and the surface of the display device. The first linear module drives the optical engine to move closer to or further away from the display device according to the actual measured distance, within the depth of field range of the optical engine's focus, to achieve rapid focusing and improve the detection accuracy of the display device. Attached Figure Description

[0025] To more clearly illustrate the technical solutions in the embodiments of this application, the accompanying drawings used in the description of the embodiments will be briefly introduced below. Obviously, the accompanying drawings described below are only some embodiments of this application. For those skilled in the art, other drawings can be obtained based on these drawings without creative effort.

[0026] Figure 1 This is a schematic diagram of the detection module, motion module, and ranging module according to an embodiment of this application;

[0027] Figure 2 This is a front view of the detection module, motion module, and ranging module of this application embodiment, excluding the optomechanical mounting frame;

[0028] Figure 3This is a perspective view of the detection module, motion module, and ranging module of this application embodiment, excluding the optomechanical mounting bracket;

[0029] Figure 4 This is a schematic diagram of the structure of the detection module connected to the integrated circuit detection device according to an embodiment of this application;

[0030] Figure 5 This is a schematic diagram of the structure of this application without the outer casing;

[0031] Figure 6 This is a schematic diagram of the structure of the outer casing according to an embodiment of this application.

[0032] Figure label:

[0033] 10. Detection module; 11. Opto-mechanical mounting bracket; 12. Opto-mechanical unit; 13. Opto-mechanical mounting plate; 20. Motion module; 21. First linear module; 22. Second linear module; 23. Third linear module; 30. Ranging module; 31. Laser emitter; 32. Laser receiver; 33. Adjustable mounting base; 40. Integrated circuit testing device; 41. Probe station; 42. Connector; 43. Marble platform; 44. Base; 45. Air flotation; 46. First support foot; 47. Steel pad; 50. Outer casing; 51. Second support foot. Detailed Implementation

[0034] To make the objectives, technical solutions, and advantages of the embodiments of this application clearer, the technical solutions of the embodiments of this application will be clearly and completely described below with reference to the accompanying drawings. Obviously, the described embodiments are only some embodiments of this application, not all embodiments. Based on the embodiments of this application, all other embodiments obtained by those skilled in the art without creative effort are within the scope of protection of this application.

[0035] This application provides a microdisplay optical inspection device that solves the problem in related technologies where, after the AOI test module completes distance measurement, the optical engine needs to be moved above the Micro LED microdisplay inspection area for optical inspection, which causes a change in the position and height of the optical engine and reduces the accuracy of the optical engine inspection.

[0036] See Figures 1 to 3 As shown, this application provides a microdisplay optical inspection device, including:

[0037] The detection module 10 includes an optical engine mounting frame 11, which is a portal steel frame or a portal marble frame. An optical engine 12 for detecting display devices is connected to the optical engine mounting frame 11. The optical engine mounting frame 11 is used to install and fix the optical engine 12 and the motion module 20. The optical engine 12 is used to acquire image information of each detection area of ​​the display device.

[0038] A motion module 20 is connected between the optical engine mounting bracket 11 and the optical engine 12. The motion module 20 includes a first linear module 21 for driving the optical engine 12 to move towards or away from the display device. The direction of movement of the first linear module 21 is parallel to the Z-axis direction, and the axis of the optical engine 12 is parallel to the Z-axis direction. The first linear module 21 drives the optical engine 12 to move up and down along the Z-axis direction.

[0039] The ranging module 30 includes a laser emitter 31 and a laser receiver 32 symmetrically located on both sides of the optomechanical system 12, with their axes intersecting at a single point on the axis of the optomechanical system 12. The laser emitter 31 and the laser receiver 32 are arranged at an angle downwards on both sides of the optomechanical system 12. The laser beam emitted by the laser emitter 31 is reflected by the detection area of ​​the display device to the laser receiver 32, thereby enabling the measurement of the Z-axis distance between the laser emitter 31 and the detection area of ​​the display device.

[0040] Since the laser emitter 31 and the laser receiver 32 are arranged on both sides of the optomechanical system 12 and their relative positions are fixed, the Z-axis distance between the laser emitter 31 and the detection area of ​​the display device is measured indirectly by measuring the Z-axis distance between the optomechanical system 12 and the detection area of ​​the display device. Then, based on the focused distance between the optomechanical system 12 and the detection area of ​​the display device, the distance between the optomechanical system 12 and the detection area of ​​the display device is adjusted by the first linear module 21 to quickly focus.

[0041] Furthermore, since the laser emitter 31 and laser receiver 32 are symmetrically arranged with their axes tilted downwards and intersect at a single point on the axis of the optical engine 12, the position where the laser emitter 31 and laser receiver 32 measure the Z-axis distance between the optical engine 12 and the display device is precisely the detection area that the optical engine 12 needs to detect. Therefore, there is no need to move the position of the optical engine 12 left, right, back, or forth; simply adjusting the height of the optical engine 12 in the Z-axis direction is sufficient for focusing and optical detection.

[0042] In this embodiment, laser emitters 31 and laser receivers 32 are symmetrically arranged on both sides of the optical engine 12, and the axes of the laser emitters 31 and laser receivers 32 intersect at a point on the axis of the optical engine 12, so that the detection points of the ranging module 30 and the optical engine 12 are located in the same detection area of ​​the display device.

[0043] The laser beam emitted by the laser emitter 31 is reflected off the surface of the display device and enters the laser receiver 32, which can then measure the actual distance between the optical engine 12 and the display device. The first linear module 21 drives the optical engine 12 to move closer to or further away from the display device according to the actual measured distance, within the depth of field where the optical engine 12 is focused, thereby achieving rapid focusing and improving the detection accuracy of the display device.

[0044] In some alternative embodiments: see Figures 1 to 3 As shown in the embodiment of this application, a microdisplay optical inspection device is provided. The axes of the laser emitter 31 and the laser receiver 32 of this microdisplay optical inspection device are in the same plane as the axis of the optomechanical system 12, i.e., in the XOZ plane or the YOZ plane. The angles between the axes of the laser emitter 31 and the laser receiver 32 and the axis of the optomechanical system 12 are the same, and the angles between the axes of the laser emitter 31 and the laser receiver 32 are 60°-120°, more preferably 90°.

[0045] The axes of the laser emitter 31, the laser receiver 32, and the optomechanical system 12 intersect at a point on the surface of the display device. When the laser beam emitted by the laser emitter 31 is reflected on the surface of the display device and enters the laser receiver 32, the detection points of the ranging module 30 and the optomechanical system 12 are located at the center point of the same detection area of ​​the display device, which further improves the clarity of the optical detection of the optomechanical system 12.

[0046] In some alternative embodiments: see Figures 1 to 3 As shown in the figure, this application embodiment provides a microdisplay optical inspection device. The ranging module 30 of the microdisplay optical inspection device is connected to a PC controller, and the PC controller is connected to a first linear module 21. The first linear module 21 is directly controlled by the PC controller. When the ranging module 30 detects the actual distance between the optical engine 12 and the display device, it directly sends a distance adjustment command to the first linear module 21.

[0047] The motion module 20 also includes a second linear module 22 and a third linear module 23 connected to the optical engine mounting frame 11. The first linear module 21, the second linear module 22 and the third linear module 23 are interconnected and their motion directions are perpendicular to each other.

[0048] The first linear module 21 moves linearly along the Z-axis, the second linear module 22 moves linearly along the X-axis, and the third linear module 23 moves linearly along the Y-axis. The second linear module 22 and the third linear module 23 cooperate to drive the optomechanical system 12 and the first linear module 21 to move in the XOY plane formed by the X-axis and Y-axis, thereby enabling the optomechanical system 12 to sequentially detect each detection area of ​​the microdisplay.

[0049] In some alternative embodiments: see Figures 1 to 3 As shown in the illustration, this application provides a microdisplay optical inspection device. The optomechanism 12 of the microdisplay optical inspection device is fixed to the first linear module 21 via an optomechanism mounting plate 13. The laser emitter 31 and the laser receiver 32 are both fixed to the optomechanism mounting plate 13 via adjustable mounting bases 33. The adjustable mounting bases 33 are used to fix and adjust the position and angle of the laser emitter 31 and the laser receiver 32 relative to the optomechanism 12, thereby facilitating the adjustment of the measurement angle and measurement accuracy of the laser emitter 31 and the laser receiver 32.

[0050] In some alternative embodiments: see Figures 4 to 5 As shown in the figure, this application embodiment provides a microdisplay optical inspection device, which further includes an integrated circuit inspection device 40 located on one side of the inspection module 10. The integrated circuit inspection device 40 is provided with a probe station 41 for inspecting the display device. The integrated circuit inspection device 40 and the optomechanical mounting bracket 11 are fixedly connected by a connector 42. The connector 42 connects the integrated circuit inspection device 40 and the optomechanical mounting bracket 11 into one unit, thereby preventing the probe station 41 and the optomechanical bracket 12 from shifting position due to vibration during the test.

[0051] In some alternative embodiments: see Figures 4 to 6 As shown in the figure, this application embodiment provides a microdisplay optical inspection device, which further includes a marble platform 43 fixed to the bottom of the integrated circuit inspection device 40 and the optomechanical mounting bracket 11. The bottom of the marble platform 43 is provided with a base 44, and the four corners of the base 44 are provided with air floats 45 to support the marble platform 43. The bottom of the base 44 is provided with a plurality of first support feet 46 for supporting the base 44, and the bottom of the first support feet 46 is provided with steel pads 47.

[0052] It also includes an outer casing 50, and the detection module 10, motion module 20, ranging module 30, integrated circuit detection device 40, marble platform 43, and base 44 are all located inside the outer casing 50 and are not connected to it. The bottom of the outer casing 50 is provided with multiple second support feet 51 for supporting the outer casing 50. The outer casing 50 has independent second support feet 51 to support it. After the equipment is positioned, the outer casing 50 is separated from the main equipment. The outer casing 50 is independently supported by the second support feet 51 to avoid the adverse effects of the vibration of the outer casing 50 on the optomechanical detection.

[0053] Working principle

[0054] This application provides a microdisplay optical inspection device. The microdisplay optical inspection device of this application is provided with a detection module 10, which includes an optical engine mounting frame 11 on which an optical engine 12 for detecting display devices is connected; a motion module 20, which includes a first linear module 21 for driving the optical engine 12 to move closer to or away from the display device; and a ranging module 30, which includes a laser emitter 31 and a laser receiver 32 symmetrically located on both sides of the optical engine 12 and whose axes intersect at a point on the axis of the optical engine 12.

[0055] Therefore, this application symmetrically arranges laser emitters 31 and laser receivers 32 on both sides of the optical engine 12, and the axes of the laser emitters 31 and laser receivers 32 intersect at a point on the axis of the optical engine 12, so that the detection points of the ranging module 30 and the optical engine 12 are both located in the same detection area of ​​the display device. The laser beam emitted by the laser emitter 31 is reflected by the surface of the display device and enters the laser receiver 32, thereby allowing the laser receiver 32 to measure the actual distance between the optical engine 12 and the surface of the display device. The first linear module 21 drives the optical engine 12 to move closer to or further away from the display device to the depth of field where the optical engine 12 is focused, based on the actual measured distance, thereby achieving rapid focusing and improving the optical detection accuracy of the display device.

[0056] In the description of this application, it should be noted that the terms "upper," "lower," etc., indicating the orientation or positional relationship are based on the orientation or positional relationship shown in the accompanying drawings, and are only for the convenience of describing this application and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation, and therefore should not be construed as a limitation of this application. Unless otherwise expressly specified and limited, the terms "installed," "connected," and "linked" should be interpreted broadly. For example, they can refer to a fixed connection, a detachable connection, or an integral connection; they can refer to a mechanical connection or an electrical connection; they can refer to a direct connection or an indirect connection through an intermediate medium; they can refer to the internal communication between two elements. For those skilled in the art, the specific meaning of the above terms in this application can be understood according to the specific circumstances.

[0057] It should be noted that in this application, relational terms such as "first" and "second" are used merely to distinguish one entity or operation from another, and do not necessarily require or imply any such actual relationship or order between these entities or operations. Furthermore, the terms "comprising," "including," or any other variations thereof are intended to cover non-exclusive inclusion, such that a process, method, article, or apparatus that comprises a list of elements includes not only those elements but also other elements not expressly listed, or elements inherent to such a process, method, article, or apparatus. Without further limitations, an element defined by the phrase "comprising one..." does not exclude the presence of other identical elements in the process, method, article, or apparatus that includes said element.

[0058] The above description is merely a specific embodiment of this application, enabling those skilled in the art to understand or implement this application. Various modifications to these embodiments will be readily apparent to those skilled in the art, and the general principles defined herein may be implemented in other embodiments without departing from the spirit or scope of this application. Therefore, this application is not to be limited to the embodiments shown herein, but is to be accorded the widest scope consistent with the principles and novel features claimed herein.

Claims

1. A microdisplay optical inspection device, characterized in that, include: The detection module (10) includes an optomechanical mounting bracket (11) on which an optomechanical device (12) for detecting display devices is connected; Motion module (20), the motion module (20) includes a first linear module (21) for driving the optical engine (12) to move closer to or away from the display device; The ranging module (30) includes a laser emitter (31) and a laser receiver (32) symmetrically located on both sides of the optomechanical system (12) and whose axes intersect at a point on the axis of the optomechanical system (12).

2. The microdisplay optical inspection device as described in claim 1, characterized in that: The axes of the laser emitter (31) and the laser receiver (32) are in the same plane as the axis of the optomechanical unit (12).

3. The microdisplay optical inspection device as described in claim 1, characterized in that: The axes of the laser emitter (31) and the laser receiver (32) are at the same angle to the axis of the optomechanical unit (12), and the angle between the axes of the laser emitter (31) and the laser receiver (32) is 60°-120°.

4. A microdisplay optical inspection device as described in any one of claims 1 to 3, characterized in that: The axes of the laser emitter (31), the laser receiver (32), and the optomechanical unit (12) intersect at a point on the surface of the display device.

5. A microdisplay optical inspection device as described in any one of claims 1 to 3, characterized in that: The ranging module (30) is connected to a PC controller, which is connected to the first linear module (21).

6. A microdisplay optical inspection device as described in any one of claims 1 to 3, characterized in that: It also includes a second linear module (22) and a third linear module (23) connected to the optical engine mounting frame (11), wherein the first linear module (21), the second linear module (22) and the third linear module (23) are interconnected and their directions of movement are perpendicular to each other.

7. The microdisplay optical inspection device as described in claim 6, characterized in that: The optical engine (12) is fixed on the first linear module (21) by an optical engine mounting plate (13), and the laser emitter (31) and laser receiver (32) are both fixed on the optical engine mounting plate (13) by adjustable mounting bases (33).

8. The microdisplay optical inspection device as described in claim 1, characterized in that: It also includes an integrated circuit testing device (40) located on one side of the testing module (10), the integrated circuit testing device (40) is provided with a probe station (41) for testing the display device, and the integrated circuit testing device (40) is fixedly connected to the optomechanical mounting frame (11) through a connector (42).

9. The microdisplay optical inspection device as described in claim 8, characterized in that: It also includes a marble platform (43) fixed to the bottom of the integrated circuit testing device (40) and the optomechanical mounting bracket (11); The bottom of the marble platform (43) is provided with a base (44), and the four corners of the base (44) are provided with air floats (45) to support the marble platform (43); The bottom of the base (44) is provided with a plurality of first support feet (46) for supporting the base (44), and the bottom of the first support feet (46) is provided with steel pads (47).

10. The microdisplay optical inspection device as described in claim 9, characterized in that: It also includes an outer casing (50), the detection module (10), motion module (20), ranging module (30), integrated circuit detection device (40), marble platform (43) and base (44) are all located inside the outer casing (50) and are not connected to the outer casing (50). The bottom of the outer casing (50) is provided with a plurality of second support feet (51) for supporting the outer casing (50).

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