Magnetic suspension motor and molecular pump

Abstract

The utility model relates to the technical field of magnetic levitation motors, and discloses a magnetic levitation motor, a molecular pump and a tool, the magnetic levitation motor comprises a shell, a rotating shaft, a pump core assembly, a first protection bearing and a first cover plate, the shell defines a containing space, the rotating shaft is arranged in the containing space, and the rotating shaft is provided with a first end and a second end in the axial direction of the rotating shaft; the pump core assembly is arranged in the containing space, the pump core assembly is arranged between the rotating shaft and the shell in the radial direction of the rotating shaft, the first protection bearing is arranged at the first end in a sleeving mode, and the first protection bearing is arranged on the side, facing the first end, of the pump core assembly in the axial direction of the rotating shaft; the first cover plate is fixed to the shell and arranged on the side, away from the second end, of the first protection bearing. The magnetic suspension motor solves the technical problem that a cover plate of the magnetic suspension motor is inconvenient to disassemble and a protective bearing is inconvenient to replace.

Description

Technical Field

[0001] This application relates to the field of magnetic levitation motor technology, and more particularly to a magnetic levitation motor and a molecular pump. Background Technology

[0002] With the maturity and development of magnetic levitation motor technology, the application of magnetic levitation motors in molecular pumps is becoming increasingly widespread. The magnetic bearing of a permanent magnet biased magnetic levitation motor uses permanent magnets to generate a bias magnetic field, providing support for the shaft in three degrees of freedom: axial and radial. This reduces the overall system size and energy consumption. However, the protective bearing of a permanent magnet biased magnetic levitation motor is prone to damage and requires frequent replacement. In related technologies, because the cover plate of the protective bearing of a permanent magnet biased magnetic levitation motor is inside the pump core assembly, it is inconvenient to remove the cover plate and replace the protective bearing. Utility Model Content

[0003] This application provides a magnetic levitation motor and a molecular pump, which solves the technical problem that it is inconvenient to disassemble the cover plate of the magnetic levitation motor and replace the protective bearing.

[0004] To achieve the above objectives, the main technical solutions adopted in this application include:

[0005] In a first aspect, embodiments of this application provide a magnetic levitation motor, which includes a housing, a rotating shaft, a pump core assembly, a first protective bearing, and a first cover plate. The housing defines an accommodating space, the rotating shaft is disposed in the accommodating space, and along the axial direction of the rotating shaft, the rotating shaft has a first end and a second end. The pump core assembly is disposed in the accommodating space, and along the radial direction of the rotating shaft, the pump core assembly is disposed between the rotating shaft and the housing. The first protective bearing is sleeved on the first end, and along the axial direction of the rotating shaft, the first protective bearing is disposed on the side of the pump core assembly facing the first end. The first cover plate is fixed to the housing and disposed on the side of the first protective bearing away from the second end.

[0006] The magnetic levitation motor proposed in this application has a first cover plate fixed to the housing and located on the side of the first protective bearing away from the second end. When disassembling the first protective bearing, the first cover plate can be removed first, and then the first protective bearing can be disassembled, which greatly improves the disassembly and replacement efficiency of the first protective bearing and improves the maintenance efficiency of the magnetic levitation motor.

[0007] Optionally, the magnetic levitation motor further includes a second protective bearing and a second cover plate. The second protective bearing is sleeved on the second end along the axial direction of the rotating shaft. The second protective bearing is located on the side of the pump core assembly facing the second end. The second cover plate is fixed to the housing and located on the side of the second protective bearing away from the first end.

[0008] The second cover plate is fixed to the housing and is located on the side of the second protective bearing away from the first end. When disassembling the second protective bearing, the second cover plate can be removed first, and then the second protective bearing can be removed, which greatly improves the efficiency of disassembling and replacing the second protective bearing and improves the maintenance efficiency of the magnetic levitation motor.

[0009] Optionally, the pump core assembly includes a first magnetic bearing assembly, a second magnetic bearing assembly, and a stator assembly, wherein the outer diameters of the first magnetic bearing assembly, the second magnetic bearing assembly, and the stator assembly are the same.

[0010] The outer diameters of the first magnetic bearing assembly, the second magnetic bearing assembly, and the stator assembly are the same. This not only improves the uniformity of the adhesive flow between the pump core assembly and the housing, thus enhancing the potting quality, but also makes the wiring between the pump core assembly and the housing easier to install, thereby reducing the production and manufacturing costs of the magnetic levitation motor.

[0011] Optionally, the magnetic levitation motor also includes a positioning shaft, a first magnetic bearing assembly having a first positioning hole, a second magnetic bearing assembly having a second positioning hole, and a third positioning hole on the stator assembly. Along the axial direction of the rotating shaft, the positioning shaft passes through the first positioning hole, the second positioning hole, and the third positioning hole in sequence.

[0012] The positioning shaft passes sequentially through the first, second, and third positioning holes, fixing the first magnetic bearing assembly, the second magnetic bearing assembly, and the stator assembly in the axial direction of the rotating shaft. This eliminates the need for additional fixing structures, improving the overall structural stability of the magnetic levitation motor and reducing vibration and noise caused by component misalignment or displacement. Furthermore, as the core component connecting all parts, the positioning shaft provides additional rigid support, enhancing the motor's overall rigidity and load-bearing capacity. This is particularly important for high-speed rotating motors, as it ensures the stability and reliability of the rotating shaft during high-speed operation.

[0013] Optionally, there are multiple positioning shafts, first positioning holes, second positioning holes and third positioning holes. The multiple positioning shafts are arranged at intervals along the circumference of the rotating shaft, and each positioning shaft passes through the corresponding first positioning hole, the corresponding second positioning hole and the corresponding third positioning hole in sequence.

[0014] Multiple positioning shafts and corresponding positioning holes form a multi-point support structure. This structure can more effectively distribute and bear various forces and vibrations during the operation of the magnetic levitation motor, thereby significantly improving the overall structural stability of the magnetic levitation motor.

[0015] Optionally, the magnetic levitation motor further includes a first plate and a second plate. The first plate is disposed between the stator assembly and the first magnetic bearing assembly, and the second plate is disposed between the stator assembly and the second magnetic bearing assembly. The first plate is provided with a fourth positioning hole that cooperates with the positioning shaft, and the second plate is provided with a fifth positioning hole that cooperates with the positioning shaft.

[0016] The first plate is provided with a fourth positioning hole that mates with the fourth positioning shaft, and the second plate is provided with a fifth positioning hole that mates with the positioning shaft. This can further enhance the relative positional stability between the stator assembly, the first magnetic bearing assembly, and the second magnetic bearing assembly, and reduce the performance degradation of the magnetic levitation motor caused by component loosening or displacement. Moreover, the arrangement of the first and second plates can enhance the overall rigidity of the magnetic levitation motor, enabling the motor to maintain better stability and accuracy when running at high speed or under load.

[0017] Optionally, the inner wall of the housing is provided with a first groove and a second groove, both of which extend along the axial direction of the rotating shaft. Along the circumferential direction of the rotating shaft, the size of the first groove is larger than the size of the second groove.

[0018] The inner wall of the housing is provided with a first groove and a second groove. Along the circumference of the rotating shaft, the size of the first groove is larger than that of the second groove. On the one hand, this improves the circuit layout of the pump core assembly and the flow of adhesive into the magnetic levitation motor, thereby increasing production efficiency. On the other hand, the groove design facilitates production and processing, reducing the production cost of the magnetic levitation motor.

[0019] Optionally, the stator assembly further includes a first protrusion, which is respectively disposed on the first magnetic bearing assembly, the second magnetic bearing assembly, and the stator assembly. The inner sidewall of the housing is also provided with a third groove, which extends along the axial direction of the shaft. The first protrusion and the third groove are interlocked. Along the circumferential direction of the shaft, the size of the third groove is smaller than the size of the first groove and the size of the third groove is smaller than the size of the second groove.

[0020] The size of the third groove is smaller than that of the first groove, and the size of the third groove is smaller than that of the second groove. This reduces the impact of the third groove on the strength of the shell and improves the stability and reliability of the magnetic levitation motor.

[0021] Optionally, the magnetic levitation motor also includes a sensor assembly and a bearing housing. The sensor assembly is disposed at the first end and on the side of the first cover plate away from the second end. The sensor assembly has a first surface and a second surface, which are arranged opposite to each other along the axial direction of the shaft. The bearing housing, the sensor assembly, and the first cover plate are connected by fastening bolts. The fastening bolts have nut ends located between the first surface and the second surface.

[0022] The nut end is located between the first and second surfaces, which can reduce the impact of the fastening bolts on the function of the sensor components and improve the stability and reliability of the magnetic levitation motor operation.

[0023] Secondly, embodiments of this application also provide a molecular pump, including the magnetic levitation motor of any of the embodiments of this application.

[0024] The molecular pump proposed in this application embodiment has a first cover plate fixed to the housing and disposed on the side of the first protective bearing away from the second end. When disassembling the first protective bearing, the first cover plate can be disassembled first, and then the first protective bearing can be disassembled, which greatly improves the disassembly and replacement efficiency of the first protective bearing and improves the maintenance efficiency of the magnetic levitation motor. Attached Figure Description

[0025] To more clearly illustrate the technical solutions in the specific embodiments of this application or the prior art, the drawings used in the description of the specific embodiments or the prior art will be briefly introduced below. Obviously, the drawings described below are some embodiments of this application. For those skilled in the art, other drawings can be obtained from these drawings without creative effort.

[0026] Figure 1 This is a schematic diagram of the structure of a magnetic levitation motor provided in an embodiment of this application;

[0027] Figure 2 for Figure 1 Side view;

[0028] Figure 3 for Figure 2 Sectional view in the AA direction;

[0029] Figure 4 for Figure 2 Sectional view in the BB direction;

[0030] Figure 5 The structure of the pump core assembly is shown;

[0031] Figure 6 This is a schematic diagram of the structure of the shell provided in an embodiment of this application;

[0032] Figure 7 for Figure 6 Side view.

[0033] [Explanation of Labels in the Attached Image]

[0034] Magnetic levitation motor 100; accommodating space 101; housing 110; rotating shaft 120; first end 121; second end 122; pump core assembly 130; first protective bearing 140; first cover plate 141; second protective bearing 150; second cover plate 151; first magnetic bearing assembly 160; first positioning hole 161; second magnetic bearing assembly 170; second positioning hole 171; stator assembly 180; third positioning hole 181; positioning shaft 190; first plate 200; fourth positioning hole 201; second plate 210; fifth positioning hole 211; first groove 210; second groove 220; third groove 230; first protrusion 240; sensor assembly 250; first surface 251; second surface 252; bearing seat 260; fastening bolt 270; nut end 271. Detailed Implementation

[0035] To make the objectives, technical solutions, and advantages of the embodiments of this application clearer, the technical solutions of the embodiments of this application will be clearly and completely described below with reference to the accompanying drawings. Obviously, the described embodiments are only some embodiments of this application, not all embodiments. Based on the embodiments of this application, all other embodiments obtained by those skilled in the art without creative effort are within the scope of protection of this application.

[0036] Unless otherwise defined, all technical and scientific terms used in this application have the same meaning as commonly understood by one of ordinary skill in the art to which this application pertains; the terminology used in the description of this application is for the purpose of describing particular embodiments only and is not intended to limit the application; the terms "comprising" and "having," and any variations thereof, in the description, claims, and accompanying drawings of this application are intended to cover non-exclusive inclusion. The terms "first," "second," etc., in the description, claims, or accompanying drawings of this application are used to distinguish different objects, not to describe a specific order or hierarchy.

[0037] In this application, the reference to "embodiment" means that a specific feature, structure, or characteristic described in connection with an embodiment may be included in at least one embodiment of this application. The appearance of this phrase in various places throughout the specification does not necessarily refer to the same embodiment, nor is it a mutually exclusive, independent, or alternative embodiment. It will be explicitly and implicitly understood by those skilled in the art that the embodiments described in this application can be combined with other embodiments.

[0038] In the description of this application, it should be noted that, unless otherwise expressly specified and limited, the terms "installation," "connection," "linking," and "attachment" should be interpreted broadly. For example, they can refer to a fixed connection, a detachable connection, or an integral connection; they can refer to a direct connection or an indirect connection through an intermediate medium; and they can refer to the internal communication between two components. Those skilled in the art can understand the specific meaning of the above terms in this application according to the specific circumstances.

[0039] In this application, the term "and / or" is merely a description of the relationship between related objects, indicating that three relationships can exist. For example, A and / or B can represent: A existing alone, A and B existing simultaneously, or B existing alone. Additionally, in this application, the character " / " generally indicates that the preceding and following related objects have an "or" relationship.

[0040] In this application, "multiple" refers to two or more (including two), and similarly, "multiple groups" refers to two or more (including two), and "multiple pieces" refers to two or more (including two).

[0041] With the maturity and development of magnetic levitation motor technology, the application of magnetic levitation motors in molecular pumps is becoming increasingly widespread. Magnetic levitation motors can be classified according to the method of generating magnetic force in the magnetic bearings: pure electromagnetic magnetic levitation motors, passive magnetic levitation motors, and permanent magnet bias magnetic levitation motors. Permanent magnet bias magnetic bearings use permanent magnets to generate a bias magnetic field, providing support for the shaft in three degrees of freedom (axial and radial). This reduces the overall system size and energy consumption, leading to their increasingly widespread application. Magnetic levitation motors generally consist of a motor stator assembly, a magnetic bearing assembly, and a sensor assembly, with each component sequentially positioned and installed within a housing.

[0042] However, in related technologies, the outer diameters of the motor stator assembly, magnetic bearing assembly, and sensor assembly vary, requiring the machining of steps of different diameters and heights inside the housing for positioning. This results in a complex structure that is difficult to route wires and apply adhesive. The protective bearing of the permanent magnet bias levitation motor is prone to damage and requires frequent replacement. Since the cover plate of the protective bearing of the permanent magnet bias levitation motor is inside the pump core assembly, disassembling the cover plate requires first disassembling some components inside the pump core assembly, such as the magnetic bearing, before the cover plate can be removed. Furthermore, replacing the protective bearing requires first removing the bearing cover plate, which makes it inconvenient to disassemble the cover plate and then replace the protective bearing.

[0043] In view of this, in order to improve the replacement efficiency of the protective bearing of the permanent magnet biased magnetic levitation motor, some embodiments of this application provide a magnetic levitation motor and a molecular pump. The magnetic levitation motor includes a housing, a rotating shaft, a pump core assembly, a first protective bearing, and a first cover plate.

[0044] The housing defines an accommodating space, a rotating shaft is disposed in the accommodating space, the rotating shaft has a first end and a second end along the axial direction of the rotating shaft, a pump core assembly is disposed in the accommodating space, the pump core assembly is disposed between the rotating shaft and the housing along the radial direction of the rotating shaft, a first protective bearing and a first cover plate, the first protective bearing is sleeved on the first end, the first protective bearing is disposed on the side of the pump core assembly facing the first end along the axial direction of the rotating shaft, and the first cover plate is fixed to the housing and disposed on the side of the first protective bearing away from the second end.

[0045] In the above solution, the protective bearing of the magnetic levitation motor is prone to damage and requires frequent replacement. Disassembling the protective bearing requires removing the bearing cover, which is located inside the protective bearing, axially away from the housing, making removal inconvenient. Therefore, the first protective bearing is positioned on the side of the pump core assembly facing the first end, and the first cover is fixed to the housing and positioned on the side of the first protective bearing away from the second end. When disassembling the first protective bearing, the first cover can be removed first, followed by the first protective bearing itself, significantly improving the efficiency of disassembly and replacement, and thus enhancing the maintenance efficiency of the magnetic levitation motor.

[0046] For ease of explanation, the following embodiments will be described using a magnetic levitation motor and a molecular pump according to an embodiment of this application as an example.

[0047] Please refer to Figures 1 to 7 , Figure 1 This is a schematic diagram of the structure of the magnetic levitation motor 100 provided in the embodiments of this application; Figure 2 for Figure 1 Side view; Figure 3 for Figure 2 Sectional view in the AA direction;

[0048] Figure 4 for Figure 2 Sectional view in the BB direction; Figure 5 The structure of the pump core assembly 130 is shown; Figure 6 This is a schematic diagram of the structure of the housing 110 provided in an embodiment of this application; Figure 7 for Figure 6 Side view.

[0049] In this embodiment, the magnetic levitation motor 100 includes a housing 110, a rotating shaft 120, a pump core assembly 130, a first protective bearing 140, and a first cover plate 141. The housing 110 defines a receiving space 101. The rotating shaft 120 is disposed in the receiving space 101. Along the axial direction of the rotating shaft 120, the rotating shaft 120 has a first end 121 and a second end 122. The pump core assembly 130 is disposed in the receiving space 101. Along the radial direction of the rotating shaft 120, the pump core assembly 130 is disposed between the rotating shaft 120 and the housing 110. The first protective bearing 140 is sleeved on the first end 121. Along the axial direction of the rotating shaft 120, the first protective bearing 140 is disposed on the side of the pump core assembly 130 facing the first end 121. The first cover plate 141 is fixed to the housing 110 and disposed on the side of the first protective bearing 140 away from the second end 122.

[0050] The housing 110 defines a receiving space 101. A rotating shaft 120 is disposed within the receiving space 101, meaning at least a portion of the rotating shaft 120 is enveloped by the receiving space 101. Along the axial direction of the rotating shaft 120, the rotating shaft 120 has a first end 121 and a second end 122, which are positioned opposite each other. A pump core assembly 130 is disposed within the receiving space 101, inside the housing 110. Along the radial direction of the rotating shaft 120, the pump core assembly 130 is positioned between the rotating shaft 120 and the housing 110; that is, along the radial direction of the rotating shaft 120, the pump core... Component 130 is disposed on the outside of the rotating shaft 120 and on the inside of the housing 110. The housing 110 also includes a first protective bearing 140 and a first cover plate 141. The first protective bearing 140 is sleeved on the first end 121 of the rotating shaft 120. For the magnetic levitation motor 100, if the pump core assembly 130 inside the magnetic levitation motor 100 is damaged or fails, the magnetic levitation bearing inside the pump core assembly 130 will lose its supporting force. The protective bearing can support the rotating shaft 120 and prevent the rotating shaft 120 from losing control due to the loss of magnetic support, thereby protecting the magnetic levitation motor 100 from damage.

[0051] The first cover plate 141 is used to prevent lubricating oil and other substances from overflowing from the first protective bearing 140 or the bearing housing 260. If lubricating oil flows out, the protective bearing may lose lubrication, accelerate wear, and lead to equipment failure. The first cover plate 141 can also reduce the pollution and damage of the first protective bearing 140 by the external environment, thereby maintaining the cleanliness and working performance of the first protective bearing 140, which is conducive to extending the service life of the first protective bearing 140 and improving the stability and reliability of the magnetic levitation motor 100.

[0052] Because the protective bearing of the magnetic levitation motor 100 is prone to damage and requires frequent replacement, removing the protective bearing requires removing the bearing cover plate. However, the bearing cover plate is located inside the protective bearing, that is, on the side axially away from the housing 110, making it inconvenient to remove. Therefore, the first protective bearing 140 is located on the side of the pump core assembly 130 facing the first end 121, and the first cover plate 141 is fixed to the housing 110 and located on the side of the first protective bearing 140 away from the second end 122. When removing the first protective bearing 140, the first cover plate 141 can be removed first, and then the first protective bearing 140 can be removed, which greatly improves the efficiency of removing and replacing the first protective bearing 140 and improves the maintenance efficiency of the magnetic levitation motor 100.

[0053] In some embodiments, the first cover plate 141 can be fixed to the housing 110 by bolt connection.

[0054] Please refer to Figures 1 to 7 The magnetic levitation motor 100 also includes a second protective bearing 150 and a second cover plate 151. The second protective bearing 150 is sleeved on the second end 122 along the axial direction of the rotating shaft 120. The second protective bearing 150 is located on the side of the pump core assembly 130 facing the second end 122. The second cover plate 151 is fixed to the housing 110 and is located on the side of the second protective bearing 150 away from the first end 121.

[0055] The magnetic levitation motor 100 also includes a second protective bearing 150 and a second cover plate 151. The second protective bearing 150 is sleeved on the second end 122 along the axial direction of the rotating shaft 120. The second protective bearing 150 is opposite to the first protective bearing 140. The second protective bearing 150 can support the rotating shaft 120 and reduce the probability of the rotating shaft 120 colliding with other components inside the magnetic levitation motor 100. The second protective bearing 150 is located on the side of the pump core assembly 130 facing the second end 122. That is, the second protective bearing 150 is located on the side of the pump core assembly 130 away from the first end 121. The pump core assembly 130 is located between the first protective bearing 140 and the second protective bearing 150. The second cover plate 151 is fixedly connected to the housing 110. The second cover plate 151 can be fixedly connected to the housing 110 by means of bolts or other detachable connection. The second cover plate 151 is located on the side of the second protective bearing 150 away from the first end 121. It can be understood that the second protective bearing 150 is located between the second cover plate 151 and the pump core assembly 130.

[0056] Specifically, the second cover plate 151 is fixed to the housing 110 and is located on the side of the second protective bearing 150 away from the first end 121. When disassembling the second protective bearing 150, the second cover plate 151 can be disassembled first, and then the second protective bearing 150 can be disassembled, which greatly improves the disassembly and replacement efficiency of the second protective bearing 150 and improves the maintenance efficiency of the magnetic levitation motor 100.

[0057] Please refer to Figures 1 to 7 In this embodiment, the pump core assembly 130 includes a first magnetic bearing assembly 160, a second magnetic bearing assembly 170, and a stator assembly 180. The outer diameters of the first magnetic bearing assembly 160, the second magnetic bearing assembly 170, and the stator assembly 180 are the same.

[0058] The first magnetic bearing assembly 160 and the second magnetic bearing assembly 170 are bearing-type components. Through magnetic force, they prevent contact between the rotating shaft 120 and the stator assembly 180. This significantly reduces mechanical wear and friction on the rotating shaft 120, extending the service life of the magnetic levitation motor 100. Furthermore, the first and second magnetic bearing assemblies 160 and 170 support high-speed operation of the rotating shaft 120 with minimal vibration and noise, improving the operating efficiency and accuracy of the magnetic levitation motor 100. When energized, the windings of the stator assembly 180 generate a magnetic field. This magnetic field interacts with the magnetic field generated by the permanent magnets on the rotating shaft 120, thus causing the rotating shaft 120 to rotate.

[0059] The outer diameters of the first magnetic bearing assembly 160, the second magnetic bearing assembly 170, and the stator assembly 180 are the same. That is, along the axial direction of the shaft 120, the outer peripheral surfaces of the first magnetic bearing assembly 160, the second magnetic bearing assembly 170, and the stator assembly 180 are flush.

[0060] Since adhesive is injected between the pump core assembly 130 and the housing 110 in the magnetic levitation motor 100, and there are wires between the pump core assembly 130 and the housing 110, if the outer peripheral surfaces of the first magnetic bearing assembly 160, the second magnetic bearing assembly 170, and the stator assembly 180 are not flush, on the one hand, the flow speed of the adhesive between the pump core assembly 130 and the housing 110 will be uneven during the injection process, affecting the quality of the injection; on the other hand, the battery cells located between the pump core assembly 130 and the housing 110 may need to be designed to avoid the unevenness, which will increase production and manufacturing costs and reduce the operating efficiency of the magnetic levitation motor 100.

[0061] Therefore, the outer diameters of the first magnetic bearing assembly 160, the second magnetic bearing assembly 170, and the stator assembly 180 are the same. On the one hand, this can improve the uniform flow of adhesive between the pump core assembly 130 and the housing 110, thus improving the quality of adhesive filling. On the other hand, it can also make the wiring between the pump core assembly 130 and the housing 110 smoother, reducing the production and manufacturing costs of the magnetic levitation motor 100.

[0062] Please refer to Figures 1 to 7 In this embodiment, the magnetic levitation motor 100 also includes a positioning shaft 190. The first magnetic bearing assembly 160 is provided with a first positioning hole 161, the second magnetic bearing assembly 170 is provided with a second positioning hole 171, and the stator assembly 180 is provided with a third positioning hole 181. Along the axial direction of the rotating shaft 120, the positioning shaft 190 passes through the first positioning hole 161, the second positioning hole 171 and the third positioning hole 181 in sequence.

[0063] The magnetic levitation motor 100 includes a positioning shaft 190, which, for example, can be constructed from a rigid material such as a metal rod. A first magnetic bearing assembly 160 is provided with a first positioning hole 161, a second magnetic bearing assembly 170 is provided with a second positioning hole 171, and a stator assembly 180 is provided with a third positioning hole 181. It is understood that, along the axial direction of the rotating shaft 120, the first positioning hole 161, the second positioning hole 171, and the third positioning hole 181 are sequentially arranged opposite each other, and their projections coincide.

[0064] The positioning shaft 190 passes sequentially through the first positioning hole 161, the second positioning hole 171, and the third positioning hole 181, thereby fixing the positions of the first magnetic bearing assembly 160, the second magnetic bearing assembly 170, and the stator assembly 180 along the axial direction of the rotating shaft 120. This eliminates the need for additional fixing structures to secure the components, improving the overall structural stability of the magnetic levitation motor 100 and reducing vibration and noise caused by component misalignment or displacement. Furthermore, as a core component connecting the various parts, the positioning shaft 190 provides additional rigid support, enhancing the overall rigidity and load-bearing capacity of the motor. This is particularly important for high-speed rotating motors, as it ensures the stability and reliability of the rotating shaft 120 during high-speed operation.

[0065] Please refer to Figures 1 to 7 In this embodiment, there are multiple positioning shafts 190, first positioning holes 161, second positioning holes 171 and third positioning holes 181. Multiple positioning shafts 190 are arranged at intervals along the circumference of the rotating shaft 120. Each positioning shaft 190 passes through the corresponding first positioning hole 161, the corresponding second positioning hole 171 and the corresponding third positioning hole 181 in sequence.

[0066] Multiple positioning shafts 190 and corresponding positioning holes form a multi-point support structure. This structure can more effectively distribute and bear various forces and vibrations during the operation of the magnetic levitation motor 100, thereby significantly improving the overall structural stability of the magnetic levitation motor 100. Moreover, the design of multiple positioning shafts 190 and positioning holes can more effectively fix the radial position of the rotating shaft 120, so that the rotating shaft 120 maintains a more stable operating state when rotating at high speed.

[0067] Please refer to Figures 1 to 7 In this embodiment, the magnetic levitation motor 100 further includes a first plate 200 and a second plate 210. The first plate 200 is disposed between the stator assembly 180 and the first magnetic bearing assembly 160, and the second plate 210 is disposed between the stator assembly 180 and the second magnetic bearing assembly. The first plate 200 is provided with a fourth positioning hole 201 corresponding to that provided on the positioning shaft 190. The second plate 210 is provided with a fifth positioning hole 211 corresponding to that provided on the positioning shaft 190.

[0068] The magnetic levitation motor 100 includes a first plate 200 and a second plate 210. The first plate 200 is disposed between the stator assembly 180 and the first magnetic bearing assembly 160. Along the axial direction of the shaft 120, at least a portion of the stator assembly 180 and the first magnetic bearing assembly 160 are spaced apart. For example, the first plate 200 can be configured as a magnetic shield. The first plate 200 can reduce the influence of the magnetic field generated by the first magnetic bearing assembly 160 on the stator assembly 180, and can also reduce the influence of the magnetic field generated by the stator assembly 180 on the first magnetic bearing assembly 160, thereby improving the stability and reliability of the operation of the magnetic levitation motor 100. The second plate 210 is disposed between the stator assembly 180 and the second magnetic bearing assembly 170. For example, the second plate 210 can also be constructed as a magnetic shield. The second plate 210 can reduce the influence of the magnetic field generated by the second magnetic bearing assembly 170 on the stator assembly 180, and can also reduce the influence of the magnetic field generated by the stator assembly 180 on the second magnetic bearing assembly 170, thereby improving the stability and reliability of the operation of the magnetic levitation motor 100. The stator assembly 180 is located between the first plate 200 and the second plate 210. The first plate 200 and the second plate 210 can be fixed to the housing 110 respectively.

[0069] Specifically, the first plate 200 is provided with a fourth positioning hole 201 that mates with the fourth positioning shaft 190, and the second plate 210 is provided with a fifth positioning hole 211 that mates with the positioning shaft 190. This can further enhance the relative positional stability between the stator assembly 180, the first magnetic bearing assembly 160, and the second magnetic bearing assembly 170, and reduce the performance degradation of the magnetic levitation motor 100 caused by component loosening or displacement. Moreover, the arrangement of the first plate 200 and the second plate 210 can enhance the overall rigidity of the magnetic levitation motor 100, enabling the motor to maintain better stability and accuracy when running at high speed or under load.

[0070] Please refer to Figures 1 to 7 The inner sidewall of the housing 110 is provided with a first groove 210 and a second groove 220. Both the first groove 210 and the second groove 220 extend along the axial direction of the rotating shaft 120. Along the circumferential direction of the rotating shaft 120, the size of the first groove 210 is larger than the size of the second groove 220.

[0071] The inner wall of the housing 110, that is, the side of the housing 110 facing the pump core assembly 130, is provided with a first groove 210 and a second groove 220. Both the first groove 210 and the second groove 220 extend along the axial direction of the rotating shaft 120. The length direction of the first groove 210 and the second groove 220 is parallel to the axial direction of the rotating shaft 120. Both the first groove 210 and the second groove 220 have openings, and the openings of the first groove 210 and the second groove 220 face the pump core assembly 130.

[0072] Since some of the wiring in the pump core assembly 130 is located on its outer circumferential surface, specifically between the pump core assembly 130 and the housing 110, the first groove 210 can accommodate the wiring. Adhesive is needed to fill the space between the pump core assembly 130 and the housing 110 of the magnetic levitation motor 100. If the adhesive is directly poured into the first groove 210, it may damage the wiring, and the filling efficiency and speed will be poor. Therefore, the second groove 220 can be used for filling the pump core assembly 130 with adhesive. In other words, adhesive can flow from the second groove 220 into the space between the pump core assembly 130 and the housing 110. The first groove 210 is used for wiring, which is typically complex and numerous, while the second groove 220 is used for filling. The size of the filling opening only needs to accommodate the amount of adhesive; therefore, the size of the first groove 210 can be larger than the size of the second groove 220.

[0073] Specifically, the inner wall of the housing 110 is provided with a first groove 210 and a second groove 220. Along the circumference of the rotating shaft 120, the size of the first groove 210 is larger than that of the second groove 220. On the one hand, this improves the wiring of the pump core assembly 130 and the flow of adhesive into the magnetic levitation motor 100, thereby increasing production efficiency. On the other hand, the groove design facilitates production and processing, reducing the production cost of the magnetic levitation motor 100.

[0074] Please refer to Figures 1 to 7In this embodiment, the stator assembly 180 further includes a first protrusion 240, which is respectively disposed on the first magnetic bearing assembly 160, the second magnetic bearing assembly 170 and the stator assembly 180. The inner sidewall of the housing 110 is also provided with a third groove 230, which extends along the axial direction of the rotating shaft 120. The first protrusion 240 and the third groove 230 are inserted and engaged. Along the circumferential direction of the rotating shaft 120, the size of the third groove 230 is smaller than the size of the first groove 210 and the size of the third groove 230 is smaller than the size of the second groove 220.

[0075] The insertion and engagement of the first protrusion 240 and the third groove 230 results in a tighter connection between the stator assembly 180 and the housing 110, effectively improving the stability of the entire motor structure, reducing vibration and noise during operation, and enhancing the motor's operating accuracy and reliability. Furthermore, the insertion and engagement design of the first protrusion 240 and the third groove 230 simplifies the motor assembly process. During assembly, simply align the first protrusion 240 of the stator assembly 180 with the third groove 230 of the housing 110 and insert it; no additional fasteners or tools are required, reducing assembly difficulty and cost.

[0076] The size of the third groove 230 is smaller than that of the first groove 210, and the size of the third groove 230 is smaller than that of the second groove 220. This reduces the impact of the third groove 230 on the strength of the housing 110 and improves the stability and reliability of the magnetic levitation motor 100.

[0077] Please refer to Figures 1 to 7 In this embodiment, the magnetic levitation motor 100 further includes a sensor assembly 250 and a bearing seat 260. The sensor assembly 250 is disposed at the first end 121 and on the side of the first cover plate 141 away from the second end 122. The sensor assembly 250 has a first surface 251 and a second surface 252. Along the axial direction of the rotating shaft 120, the first surface 251 and the second surface 252 are disposed opposite to each other. The bearing seat 260 is connected to the sensor assembly 250 by a fastening bolt 270. The fastening bolt 270 has a nut end 271, which is located between the first surface 251 and the second surface 252.

[0078] It is understood that the housing 110 mentioned in the embodiments of this application may include a bearing seat 260, a first cover plate 141 fixed to the housing 110 through the bearing seat 260, a sensor disposed at the first end 121, and a sensor assembly 250 disposed on the side of the first cover plate 141 away from the second end 122. That is, the first cover plate 141 and the sensor assembly 250 are disposed on the same side protecting the bearing. After the bearing seat 260, the first cover plate 141 and the sensor assembly 250 are fastened by the fastening bolt 270, the nut end 271 is located between the first surface 251 and the second surface 252, which can reduce the impact of the fastening bolt 270 on the function of the sensor assembly 250 and improve the stability and reliability of the operation of the magnetic levitation motor 100.

[0079] This application also provides a molecular pump, which includes the magnetic levitation motor 100 of any of the embodiments of this application.

[0080] The molecular pump proposed in this application embodiment has a first cover plate 141 fixed to the housing 110 and disposed on the side of the first protective bearing 140 away from the second end 151. When disassembling the first protective bearing 140, the first cover plate 141 can be disassembled first, and then the first protective bearing 140 can be disassembled, which greatly improves the disassembly and replacement efficiency of the first protective bearing 140 and improves the maintenance efficiency of the magnetic levitation motor 100.

[0081] It should also be noted that the terms "comprising," "including," or any other variations thereof are intended to cover non-exclusive inclusion, such that a process, method, article, or apparatus that comprises a list of elements includes not only those elements but also other elements not expressly listed, or elements inherent to such a process, method, article, or apparatus. Without further limitation, an element defined by the phrase "comprising one..." does not exclude the presence of other identical elements in the process, method, article, or apparatus that includes said element.

[0082] The various embodiments in this specification are described in a progressive manner. Similar or identical parts between embodiments can be referred to interchangeably. Each embodiment focuses on describing the differences from other embodiments. In particular, the system embodiments are basically similar to the method embodiments, so the description is relatively simple; relevant parts can be referred to the descriptions in the method embodiments.

[0083] The above description is merely an embodiment of this application and is not intended to limit the scope of this application. Various modifications and variations can be made to this application by those skilled in the art. Any modifications, equivalent substitutions, improvements, etc., made within the spirit and principles of this application should be included within the scope of the claims of this application.

[0084] Although embodiments of this application have been described in conjunction with the accompanying drawings, those skilled in the art can make various modifications and variations without departing from the spirit and scope of this application, and such modifications and variations all fall within the scope defined by the appended claims.

Claims

1. A magnetic levitation motor, characterized in that, include: The shell defines the interior space; A rotating shaft is disposed in the receiving space, and along the axial direction of the rotating shaft, the rotating shaft has a first end and a second end; A pump core assembly is disposed in the receiving space, along the radial direction of the rotating shaft, between the rotating shaft and the housing; A first protective bearing and a first cover plate, wherein the first protective bearing is sleeved on the first end along the axial direction of the rotating shaft, the first protective bearing is disposed on the side of the pump core assembly facing the first end, and the first cover plate is fixed to the housing and disposed on the side of the first protective bearing away from the second end.

2. The magnetic levitation motor according to claim 1, characterized in that, The magnetic levitation motor further includes a second protective bearing and a second cover plate. The second protective bearing is sleeved on the second end along the axial direction of the rotating shaft. The second protective bearing is located on the side of the pump core assembly facing the second end. The second cover plate is fixed to the housing and located on the side of the second protective bearing away from the first end.

3. The magnetic levitation motor according to claim 1, characterized in that, The pump core assembly includes a first magnetic bearing assembly, a second magnetic bearing assembly, and a stator assembly, wherein the outer diameters of the first magnetic bearing assembly, the second magnetic bearing assembly, and the stator assembly are the same.

4. The magnetic levitation motor according to claim 3, characterized in that, The magnetic levitation motor further includes a positioning shaft. The first magnetic bearing assembly is provided with a first positioning hole, the second magnetic bearing assembly is provided with a second positioning hole, and the stator assembly is provided with a third positioning hole. Along the axial direction of the rotating shaft, the positioning shaft passes through the first positioning hole, the second positioning hole, and the third positioning hole in sequence.

5. The magnetic levitation motor according to claim 4, characterized in that, There are multiple positioning shafts, first positioning holes, second positioning holes and third positioning holes. The multiple positioning shafts are arranged at intervals along the circumference of the rotating shaft. Each positioning shaft passes through the corresponding first positioning hole, the corresponding second positioning hole and the corresponding third positioning hole in sequence.

6. The magnetic levitation motor according to claim 4, characterized in that, The magnetic levitation motor further includes a first plate and a second plate. The first plate is disposed between the stator assembly and the first magnetic bearing assembly, and the second plate is disposed between the stator assembly and the second magnetic bearing assembly. The first plate is provided with a fourth positioning hole that cooperates with the positioning shaft, and the second plate is provided with a fifth positioning hole that cooperates with the positioning shaft.

7. The magnetic levitation motor according to claim 3, characterized in that, The inner wall of the housing is provided with a first groove and a second groove. Both the first groove and the second groove extend along the axial direction of the rotating shaft. Along the circumferential direction of the rotating shaft, the size of the first groove is larger than the size of the second groove.

8. The magnetic levitation motor according to claim 7, characterized in that, The stator assembly further includes a first protrusion, which is respectively disposed on the first magnetic bearing assembly, the second magnetic bearing assembly, and the stator assembly. The inner sidewall of the housing is also provided with a third groove, which extends along the axial direction of the rotating shaft. The first protrusion and the third groove are interlocked. Along the circumferential direction of the rotating shaft, the size of the third groove is smaller than the size of the first groove and the size of the second groove.

9. The magnetic levitation motor according to claim 2, characterized in that, The magnetic levitation motor also includes a sensor assembly and a bearing housing. The sensor assembly is disposed at the first end and on the side of the first cover plate away from the second end. The sensor assembly has a first surface and a second surface, which are arranged opposite to each other along the axial direction of the rotating shaft. The bearing housing, the sensor assembly, and the first cover plate are connected by fastening bolts, the fastening bolts having a nut end located between the first and second surfaces.

10. A molecular pump, characterized in that, Includes the magnetic levitation motor as described in any one of claims 1-9.

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