Ultrasonic cleaning device for cleaning mother disc

Abstract

The utility model relates to the technical field of optical disk cleaning, in particular to an ultrasonic cleaning device for cleaning a mother disk, which comprises a cleaning pool, an ultrasonic system component arranged below the cleaning pool, a heating rod group arranged in the cleaning pool on the side wall of the cleaning pool, and a mother disk fixing device arranged on one side of the heating rod group in the cleaning pool. The mother disc fixing device comprises a fixed part and a movable part, the fixed part comprises supporting stand columns and a first mother disc fixing piece, three sets of supporting stand columns are welded and fixed to the lower end of the first mother disc fixing piece, the supporting stand columns are fixed to the bottom of the cleaning pool, and the movable part comprises a second mother disc fixing piece, a fixing piece base plate, two sets of sliding blocks and two sets of adjusting rails. The two adjusting rails are fixed to the bottom of the cleaning pool, the two sliding blocks are correspondingly assembled at the upper ends of the two adjusting rails and slidably connected with the adjusting rails, the fixing piece base plate is fixed to the upper ends of the two sliding blocks, and the second mother disc fixing piece is fixed to the upper end of the fixing piece base plate.

Description

TECHNICAL FIELD

[0001] The utility model relates to disc cleaning technical field, especially a kind of ultrasonic cleaning device for cleaning master disc. BACKGROUND

[0002] Optical disc master disc, also known as master or glass master disc, is the original disc used for making copy disc in the process of optical disc duplication, and is a glass substrate with high precision size, high smoothness and high cleanliness obtained by high-precision grinding, polishing and super-clean cleaning. In order to realize the concept of green and environmental protection, the master disc that has been used repeatedly before is often reused. During the photoetch process, the master disc needs to be cleaned before coating to remove the photoresist attached to the master disc in the previous photoetch process.

[0003] At present, a master disc cleaning device with publication number CN221063671U is disclosed, which includes a base, a cleaning tank fixedly connected to the top of the base, a tank door hingedly connected to the outside of the cleaning tank, a placement plate fixedly connected inside the cleaning tank, a plurality of drainage holes perforated on the placement plate, a liquid storage tank with an opening upwardly disposed below the placement plate inside the cleaning tank, a clamping assembly provided on the top of the placement plate, a sliding groove provided on the top of the cleaning tank, a first moving block and a second moving block slidingly fitted in the sliding groove, a driving assembly provided in the sliding groove to drive the first moving block and the second moving block to move towards each other, a lifting assembly provided on the bottom of each of the first moving block and the second moving block, and a cleaning rack provided below each of the lifting assemblies, with a cleaning assembly provided on one side of each of the cleaning racks.

[0004] Although this master disc cleaning device can be clamped according to the size of the master disc and has a wide range of applications, it has the following disadvantages: the cleaning method used by this cleaning device is spraying, which sprays cleaning liquid from a high-pressure nozzle to wash the surface of the master disc to achieve the cleaning effect. However, the spraying cleaning method can only remove simple dirt on the surface of the master disc, and cannot completely remove the photoresist on the surface of the master disc. UTILITY MODEL CONTENTS

[0005] In view of the above situation, in order to overcome the defects of the prior art, the purpose of the utility model is to provide an ultrasonic cleaning device for cleaning master disc. The above technical purpose is achieved by the following technical scheme:

[0006] The utility model provides an ultrasonic cleaning device for master disc cleaning, including the cleaning pool, be equipped with ultrasonic system assembly below the cleaning pool, the lateral wall of cleaning pool is equipped with heating rod group in the cleaning pool, one side of the inside of cleaning pool is equipped with master disc fixing device, the master disc fixing device includes fixed part and movable part, the fixed part includes support column, first master disc fixing piece, the lower end of first master disc fixing piece is welded with three groups of support column, the support column is fixed to the bottom of cleaning pool, the movable part includes second master disc fixing piece, fixing piece base plate, two groups of sliding block, two groups of adjusting track, two groups adjusting track are fixed to the bottom of cleaning pool, two groups of sliding block are correspondingly assembled on the upper end of two groups of adjusting track, and the sliding block is connected with adjusting track slidingly, the fixing piece base plate is fixed to the upper end of two groups of sliding block, the second master disc fixing piece is fixed to the upper end of fixing piece base plate, and the first master disc fixing piece is arranged towards the second master disc fixing piece.

[0007] Further, the second master disc fixing piece and the first master disc fixing piece are structurally identical, the first master disc fixing piece includes a lower side plate and an upper side plate, the upper side plate and the lower side plate are both arc-shaped structures, the lower side plate is fixed to the lower end of the upper side plate, and the lower end of the upper side plate is provided with a fixed clamping groove.

[0008] Further, the inner wall of the cleaning pool is provided with a drainage groove, the drainage groove is opened at the lowermost end of the inner wall of the cleaning pool, and the drainage groove is located on the side close to the master disc fixing device.

[0009] Further, the heating rod group is composed of a plurality of heating rods, the thermistor part of the heating rod is located inside the cleaning pool, and one end of the heating rod is fixed to the side wall of the cleaning pool through a nut.

[0010] Further, the lower end of the fixing piece base plate is further provided with a connecting column, the bottom of the connecting column is fixedly provided with a connecting strip, the other end of the connecting strip is fixedly provided with a longitudinally arranged moving strip, the upper end of the moving strip is fixedly provided with an operating handle, the inner wall of the cleaning pool is fixedly provided with a limiting track, and the moving strip is slidingly assembled on the limiting track.

[0011] Further, one side of the cleaning pool is fixedly provided with a sub-platform, the upper end of the sub-platform is fixedly provided with a waste liquid pool, the outer side of the drainage groove is provided with a drainage pipe fixed to the cleaning pool, the drainage pipe is in communication with the drainage groove, one side of the drainage pipe is provided with a drainage valve, and the drainage opening of the drainage valve is located in the waste liquid pool.

[0012] Further, both sides of the waste liquid pool are provided with connecting blocks fixed to the upper end of the sub-platform, the inside of the connecting block is provided with a liquid inlet pipe leading to the inside of the cleaning pool.

[0013] In summary, the utility model has the following beneficial effects:

[0014] The utility model discloses a ultrasonic cleaning system component is set up, cooperate heating rod heating cleaning fluid, promote the water bath temperature, has improved the cleaning effect to the master disc, can effectively remove the photoresist on the master disc surface;

[0015] The utility model discloses a manually adjustable master disc fixing device is equipped in the cleaning pool, and the fixed effect is good, and the operation is convenient, and simultaneously, the design of double position makes the device can clean and process two groups of master discs simultaneously, improves the cleaning efficiency to the master disc;

[0016] The utility model discloses a complete liquid discharge system is equipped with, can quickly discharge the residual liquid, colloid of cleaning pool from cleaning pool and carry out independent processing. BRIEF DESCRIPTION OF DRAWINGS

[0017] The drawings explained here are used to provide further understanding of the utility model, and constitute a part of this application, but do not constitute improper limitation to the utility model, and in the drawings:

[0018] Figure 1 It is the inclined view of the utility model;

[0019] Figure 2 It is the upper view of the utility model;

[0020] Figure 3 It is the side view of the utility model;

[0021] Figure 4 It is Figure 1 The enlarged schematic view of A in the middle;

[0022] Figure 5 It is Figure 1 The enlarged schematic view of B in the middle.

[0023] In the drawing, 1, cleaning pool;2, ultrasonic system component;3, support column;4, first master disc fixing piece;5, second master disc fixing piece;6, fixing piece base plate;7, sliding block;8, adjusting track;9, fixed clamping groove;10, liquid discharge groove;11, heating rod;12, connecting column;13, moving strip;14, operation handle;15, limiting track;16, auxiliary platform;17, waste liquid pool;18, liquid discharge pipe;19, liquid discharge valve;20, connecting block;21, liquid inlet pipe;22, connecting strip. DETAILED DESCRIPTION

[0024] The foregoing and other technical contents, features and effects of the utility model, in the following, cooperate with the reference of the drawings Figure 1 to the drawings Figure 5 In the detailed description of the embodiment, it will be clearly presented. The structure content mentioned in the following embodiment is all with the reference of the drawings of the specification.

[0025] The various exemplary embodiments of the present application will be described below with reference to the accompanying drawings. Embodiment

[0026] An ultrasonic cleaning device for master disc cleaning, which is mainly used for cleaning the residual gum on the surface of the master disc, and the main body structure of the device comprises a group of cleaning pools 1, an ultrasonic system assembly 2 is installed below the cleaning pool 1, the ultrasonic system assembly 2 is mainly composed of an ultrasonic generator and a transducer, high-frequency electric energy generated by the ultrasonic generator is converted into mechanical vibration through the transducer, these vibrations propagate in the cleaning liquid to form countless micro-bubbles, and high pressure is generated in the growth and rupture process of these bubbles, so that the dirt on the surface of the object is stripped to achieve the purpose of cleaning.

[0027] A group of heating rods 11 is arranged in the cleaning pool 1, in the embodiment, the group of heating rods 11 is composed of four heating rods 11, the thermistor part of the heating rod 11 is arranged in the cleaning pool 1, one end of the heating rod 11 is fixed to the side wall of the cleaning pool 1 through a nut, and the thermistor part of the heating rod 11 generates heat energy after being electrified, so that the cleaning liquid in the cleaning pool 1 is continuously heated, the cleaning liquid is continuously heated, and the cleaning effect of the master disc is improved.

[0028] A master disc fixing device is arranged on one side of the group of heating rods 11 in the cleaning pool 1, the master disc fixing device comprises a fixed part and a movable part, the fixed part comprises a support column 3 and a first master disc fixing part 4, three groups of support columns 3 are welded and fixed to the lower end of the first master disc fixing part 4, the support column 3 is fixed to the bottom of the cleaning pool 1, the movable part comprises a second master disc fixing part 5, a fixing part base plate 6, two groups of sliding blocks 7 and two groups of adjusting tracks 8, the two groups of adjusting tracks 8 are fixed to the bottom of the cleaning pool 1, the two groups of sliding blocks 7 are correspondingly assembled on the upper ends of the two groups of adjusting tracks 8, and the sliding block 7 and the adjusting track 8 are slidably connected, the fixing part base plate 6 is fixed to the upper ends of the two groups of sliding blocks 7, the second master disc fixing part 5 is fixed to the upper end of the fixing part base plate 6, and the first master disc fixing part 4 is arranged opposite to the second master disc fixing part 5.

[0029] By arranging two master disc cleaning stations, the device can clean two master discs at the same time, and the cleaning efficiency of the master disc cleaning process is improved.

[0030] Preferably, the second master disc fixing part 5 is the same as the first master disc fixing part 4 in structure, the first master disc fixing part 4 comprises a lower side plate and an upper side plate, the upper side plate and the lower side plate are in arc-shaped structures, the lower side plate is fixed to the lower end of the upper side plate, and the lower end of the upper side plate is provided with a fixing clamping groove 9.

[0031] The lower end of the fixing base plate 6 is further provided with a connecting column 12, the bottom of the connecting column 12 is fixedly provided with a connecting strip 22, the other end of the connecting strip 22 is fixedly provided with a longitudinal moving strip 13, the upper end of the moving strip 13 is fixedly provided with an operating handle 14, the inner wall of the cleaning pool 1 is fixedly provided with a limiting track 15, and the moving strip 13 is slidingly assembled on the limiting track 15.

[0032] The inner wall of the cleaning pool 1 is provided with a liquid discharge groove 10, the liquid discharge groove 10 is arranged at the lowermost end of the inner wall of the cleaning pool 1, and the liquid discharge groove 10 is arranged on the side close to the mother disc fixing device, one side of the cleaning pool 1 is fixedly provided with a sub-platform 16, the upper end of the sub-platform 16 is fixedly provided with a waste liquid pool 17, the outer side of the liquid discharge groove 10 is provided with a liquid discharge pipe 18 fixed to the cleaning pool 1, the liquid discharge pipe 18 is communicated with the liquid discharge groove 10, one side of the liquid discharge pipe 18 is provided with a liquid discharge valve 19, and the liquid discharge port of the liquid discharge valve 19 is located in the waste liquid pool 17.

[0033] The two sides of the waste liquid pool 17 are provided with connecting blocks 20 fixed to the upper end of the sub-platform 16, the connecting blocks 20 are internally provided with liquid inlet pipes 21 leading to the inside of the cleaning pool 1, and independent valves for controlling liquid inlet are arranged between the liquid inlet pipes 21 and the cleaning pool 1.

[0034] In the embodiment of the utility model, when the mother disc is cleaned, the photoresist on the surface of the mother disc is mainly removed, the mother disc is placed in the cleaning station, one end of the mother disc is first clamped into the fixed clamping groove 9 of the first mother disc fixing part 4, then the operating handle 14 is moved, the moving strip 13 is driven to move through the connecting strip 22, and finally the second mother disc fixing part 5 is controlled to move, after the second mother disc fixing part 5 moves towards the direction close to the first mother disc fixing part 4, the two parts clamp the mother disc together, then cleaning starts, the ultrasonic system assembly 2 and the heating rod 11 continuously act on the cleaning pool 1 to clean the mother disc in the cleaning station.

[0035] When the mother disc is cleaned, the photoresist on the surface of the mother disc is mainly removed, the mother disc is placed in the cleaning station, one end of the mother disc is first clamped into the fixed clamping groove 9 of the first mother disc fixing part 4, then the operating handle 14 is moved, the moving strip 13 is driven to move through the connecting strip 22, and finally the second mother disc fixing part 5 is controlled to move, after the second mother disc fixing part 5 moves towards the direction close to the first mother disc fixing part 4, the two parts clamp the mother disc together, then cleaning starts, the ultrasonic system assembly 2 and the heating rod 11 continuously act on the cleaning pool 1 to clean the mother disc in the cleaning station.

[0036] The above is a further detailed description of the utility model in combination with the specific embodiments, and the specific embodiments of the utility model cannot be limited to this; for the skilled in the art and related technical field, the expansion, operation method and data replacement made on the basis of the technical scheme idea of the utility model should fall within the protection scope of the utility model.

Claims

1. An ultrasonic cleaning apparatus for cleaning a master disc, characterized by: The utility model provides a cleaning pool (1) is equipped with ultrasonic system assembly (2) below, the sidewall of cleaning pool (1) is equipped with heating rod (11) group in the inside of cleaning pool (1), the inside of cleaning pool (1) is equipped with mother disc fixing device on one side of heating rod (11) group, the mother disc fixing device includes fixed part and movable part, the fixed part includes support column (3), first mother disc fixing piece (4), the lower end of first mother disc fixing piece (4) is welded with three groups of support column (3), support column (3) is fixed to the bottom of cleaning pool (1), the movable part includes second mother disc fixing piece (5), fixing piece base plate (6), two groups of sliding blocks (7), two groups of adjusting tracks (8), two groups of adjusting tracks (8) are fixed to the bottom of cleaning pool (1), two groups of sliding blocks (7) are correspondingly assembled on the upper end of two groups of adjusting tracks (8), and the sliding block (7) is connected with adjusting track (8) slidingly, fixing piece base plate (6) is fixed to the upper end of two groups of sliding blocks (7), second mother disc fixing piece (5) is fixed to the upper end of fixing piece base plate (6), and first mother disc fixing piece (4) is arranged opposite to second mother disc fixing piece (5).

2. The ultrasonic cleaning apparatus for cleaning a master disc according to claim 1, wherein: The second mother disc fixing piece (5) is the same as the first mother disc fixing piece (4), the first mother disc fixing piece (4) includes a lower side plate and an upper side plate, the upper side plate and the lower side plate are arc-shaped structures, the lower side plate is fixed to the lower end of the upper side plate, and the lower end of the upper side plate is provided with a fixed clamping groove (9).

3. The ultrasonic cleaning apparatus for cleaning a master disc according to claim 1, wherein: The inner wall of the cleaning pool (1) is provided with a drainage groove (10), the drainage groove (10) is arranged at the lowermost end of the inner wall of the cleaning pool (1), and the drainage groove (10) is arranged on the side close to the mother disc fixing device.

4. The ultrasonic cleaning apparatus for cleaning a master disc according to claim 1, wherein: The heating rod (11) group is composed of a plurality of heating rods (11), the thermistor part of the heating rod (11) is arranged in the cleaning pool (1), and one end of the heating rod (11) is fixed to the side wall of the cleaning pool (1) through a nut.

5. The ultrasonic cleaning apparatus for cleaning a master disc according to claim 1, wherein: The lower end of the fixing piece base plate (6) is further provided with a connecting column (12), the bottom of the connecting column (12) is fixedly provided with a connecting strip (22), the other end of the connecting strip (22) is fixedly provided with a longitudinally arranged moving strip (13), the upper end of the moving strip (13) is fixedly provided with an operating handle (14), the inner wall of the cleaning pool (1) is fixedly provided with a limiting track (15), and the moving strip (13) is slidingly assembled on the limiting track (15).

6. The ultrasonic cleaning apparatus for cleaning a master disc according to claim 3, wherein: One side of the cleaning pool (1) is fixedly provided with a sub-platform (16), the upper end of the sub-platform (16) is fixedly provided with a waste liquid pool (17), the outer side of the drainage groove (10) is provided with a drainage pipe (18) fixed to the cleaning pool (1), the drainage pipe (18) is communicated with the drainage groove (10), one side of the drainage pipe (18) is provided with a drainage valve (19), and the drainage port of the drainage valve (19) is located in the waste liquid pool (17).

7. The ultrasonic cleaning apparatus for cleaning a master disc according to claim 6, wherein: Two sides of the waste liquid pool (17) are provided with connecting blocks (20) fixed to the upper end of the sub-platform (16), and the inside of the connecting block (20) is provided with a liquid inlet pipe (21) leading to the inside of the cleaning pool (1).

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