Vacuum chuck for processing silicon component

Abstract

The utility model provides a vacuum chuck for processing a silicon component, which comprises a chuck body, an adsorption port arranged on the chuck, an adsorption device arranged on the chuck body, a placing ring arranged on the upper end face of the chuck body, an adsorption air passage arranged on the placing ring, and a fixing device arranged between the placing ring and the chuck body, when a silicon component needs to be placed on the vacuum chuck to be fixed, the silicon component is placed on the placing ring, the placing ring can isolate the silicon component from the surface of the chuck body to prevent the bottom surface of the silicon component from being scratched, negative pressure is generated through the adsorption device when adsorption needs to be generated, and due to the fact that the adsorption air channel is communicated with the adsorption opening, the silicon component is prevented from being scratched. At the moment, the silicon component placed on the placing ring is fixed on the placing ring under the negative pressure of the adsorption air channel, when the silicon component is placed on the suction cup or the silicon component needs to be taken down from the suction cup, the silicon component cannot move on the surface of the suction cup, and abrasion caused by friction between the bottom face of the silicon component and the surface of the suction cup is avoided.

Description

TECHNICAL FIELD

[0001] The utility model relates to vacuum chuck technical field, concretely relates to a vacuum chuck for silicon component processing. BACKGROUND

[0002] Silicon ring and silicon disc are collectively referred to as silicon components, which are high-consumption products in the field of semiconductors. Silicon ring, as a base material for semiconductor chips, provides a stable platform for building different circuits and components. Silicon ring usually has a high-purity single-crystal silicon structure, which has good thermal conductivity and mechanical stability.

[0003] During the processing of silicon components, vacuum chucks are commonly used to fix them. Vacuum chuck, also known as vacuum lifting device, is one of the vacuum equipment actuators. It is a simple device that adheres to smooth surfaces and is usually composed of an adsorbent and a vacuum chamber. Its principle is to create negative pressure in the vacuum chamber to generate adsorption force on the adsorbent and tightly adhere it to the smooth surface. At the same time when the vacuum begins to diffuse, the adsorbent layer will start to form in the low-pressure area on the surface. Because the negative pressure area in the vacuum chamber is more compact than the high-pressure area on the surface, the adsorbent layer will form and tightly adhere to the surface, thus generating strong adsorption force.

[0004] However, since the silicon components are directly placed on the upper surface of the vacuum chuck, the bottom surface of the silicon component directly contacts the upper surface of the chuck. When placing or removing the silicon component from the chuck, the silicon component is easily moved on the surface of the chuck, which can cause abrasion of the bottom surface of the silicon component due to friction with the surface of the chuck. SUMMARY

[0005] The utility model aims at the defects and deficiencies of the prior art and provides a vacuum chuck for silicon component processing.

[0006] To achieve the above-mentioned purpose, the utility model adopts the following technical scheme: a vacuum chuck for silicon component processing, comprising a chuck body, an adsorption port arranged on the chuck, an adsorption device arranged on the chuck body and communicating with the adsorption port, a placement ring arranged on the upper end face of the chuck body for placing the silicon component and preventing scratching of the silicon component, an adsorption air duct opened on the placement ring and communicating with the adsorption port, and a fixing device arranged between the placement ring and the chuck body for fixing or releasing the placement ring on the chuck body.

[0007] Further improvement: at least three adsorption ports are arranged on the chuck body, each adsorption port is arranged equidistantly around the center end of the chuck body, and the adsorption port is a long strip adsorption port.

[0008] Further improvement is that the placing ring is a quartz ring or a silica gel ring or a rubber ring.

[0009] Further improvement is that the adsorption air channel is a circular arc air channel.

[0010] Further improvement is that the fixing device comprises at least three ring bodies arranged in a ring shape on the suction disc body, a plurality of connecting holes equidistantly arranged on the upper end surface of the suction disc body, corresponding holes arranged on the ring bodies on both sides of the adsorption air channel, fixing members arranged between the ring bodies and the suction disc body, and the adsorption air channel arranged on the ring bodies and communicated with the adsorption port.

[0011] Further improvement is that the fixing member is a mounting bolt arranged between the ring body and the suction disc body and threadedly connected with the connecting hole, the head of the mounting bolt is located on the upper end of the ring body, and the screw rod of the mounting bolt is threadedly matched with the connecting hole through the corresponding hole.

[0012] Further improvement is that the fixing device comprises a plurality of connecting holes equidistantly arranged on the upper end surface of the suction disc body, corresponding holes arranged on the placing ring and located on the upper and lower sides of the adsorption air channel, and fixing members arranged between the placing ring and the suction disc body.

[0013] Further improvement is that the fixing member is a mounting bolt arranged between the placing ring and the suction disc body and threadedly connected with the connecting hole, the head of the mounting bolt is located on the upper end of the placing ring, and the screw rod of the mounting bolt is threadedly matched with the connecting hole through the corresponding hole.

[0014] Further improvement is that a guide member is arranged between each ring body and the suction disc body.

[0015] Further improvement is that the guide member comprises guide grooves symmetrically arranged on the suction disc body and located on the lower end surface of the ring body, and guide blocks arranged on the lower end of each ring body and slidably connected with the guide grooves, and the guide grooves are arranged on one side of the connecting hole.

[0016] After the above technical scheme is adopted, the beneficial effects of the present application are as follows: when it is necessary to fix the silicon component on the vacuum suction disc, the silicon component is placed on the placing ring, the placing ring can isolate the silicon component from the surface of the suction disc body, so as to prevent the bottom surface of the silicon component from being scratched, when adsorption is needed, negative pressure is generated by the adsorption device, since the adsorption air channel is communicated with the adsorption port, the silicon component placed on the placing ring is fixed on the placing ring by the negative pressure of the adsorption air channel, when the silicon component is placed on the suction disc or needs to be taken off from the suction disc, the silicon component will not move on the surface of the suction disc, so as to prevent the bottom surface of the silicon component from being abraded by rubbing with the surface of the suction disc.

[0017] Further effects: when the silicon components of other sizes need to be placed, the fixing between the ring body and the suction disc body is released by rotating the mounting bolt with the tool, then each ring body is moved to the center end position of the suction disc body along the position of the suction port, if the diameter of the silicon component is large, it is moved away from the center end, and if the diameter is small, it is moved to the position close to the center end, after the position is confirmed, the position of the corresponding hole is matched with the position of the connecting hole, and the moving distance between each ring body is the same, so that the diameter formed between each ring body is enlarged or reduced, then the bolt is installed on the ring body and the suction disc body, so that the position between each ring body can be adjusted according to the size of the silicon component, so that the placing ring can adapt to silicon components of different sizes.

[0018] Further effects: the placing ring can also be arranged as a ring-shaped disc, when it is needed to adapt to silicon components of different sizes, the mounting bolt is only rotated to release the fixing between the placing ring and the suction disc body, the placing ring of the size of the silicon component is placed on the suction disc body, and the position of the corresponding hole is matched with the position of the connecting hole, then the mounting bolt is inserted into the corresponding hole, and the mounting bolt is screwed to be matched with the connecting hole in thread, so that the placing ring is fixed on the vacuum suction disc.

[0019] Further effects: when the position of the ring body on the suction disc body is adjusted, the ring body can keep straight-line movement through the cooperation of the guide block and the guide groove, the sliding direction of the ring body to the center end of the suction disc body is kept, and the phenomenon that the ring body deviates when the ring body is moved is prevented. BRIEF DESCRIPTION OF DRAWINGS

[0020] In order to more clearly illustrate the technical scheme in the embodiments of the present application or the prior art, the drawings needed to be used in the following embodiment or prior art description will be briefly introduced. Obviously, the drawings in the following description are only some embodiments of the present application, and other drawings can also be obtained by those skilled in the art without creative labor.

[0021] Figure 1 is a structural schematic view of embodiment one in the present application;

[0022] Figure 2 is a top view of the suction disc body in Figure 1

[0023] Figure 3 is a structural schematic view of embodiment two in the present application;

[0024] Figure 4 is a top view of the suction disc body in Figure 3

[0025] ​​Explanation of reference signs: suction cup body 1, suction port 2, placement ring 3, suction air duct 4, ring body 5, connecting hole 6, mounting bolt 7, guide groove 8, guide block 9. DETAILED DESCRIPTION

[0026] The utility model will be further explained in connection with the drawings and specific embodiments. EMBODIMENT

[0027] Referring to Figure 1 , Figure 2 The technical scheme adopted in the embodiment is: a vacuum suction cup for processing silicon parts, comprising a suction cup body 1, further comprising a suction port 2 arranged on the suction cup, a suction device (not shown in the figure) arranged on the suction cup body 1 and communicating with the suction port 2, a placement ring 3 arranged on the upper end face of the suction cup body 1 for placing silicon parts and preventing scratching of the silicon parts, a suction air duct 4 opened on the placement ring 3 and communicating with the suction port 2, and a fixing device arranged between the placement ring 3 and the suction cup body 1 for fixing or releasing the placement ring 3 on the suction cup body 1.

[0028] The suction cup body 1 is provided with at least three suction ports 2, each of which is arranged equidistantly around the center end of the suction cup body 1, and the suction port 2 is a long strip suction port. The suction port 2 is arranged from the outer circle of the suction cup body 1 to the center end.

[0029] The placement ring 3 is a quartz ring or a silica gel ring or a rubber ring. Quartz is mainly made of silicon dioxide, which is similar in material to silicon parts. When the silicon parts are placed on the quartz disc, it can prevent the phenomenon of scratching the silicon parts, and quartz is a non-polluting composite material, which is manufactured in a vacuum condition, so it is consistent in appearance and dense without pores, and will not cause pollution during the use of carrying silicon parts. Silica gel is non-toxic and harmless, and has relatively stable histocompatibility, is easy to shape, has high cost performance, and is not easy to damage the surface of the silicon parts.

[0030] The suction air duct 4 is a circular arc air duct.

[0031] The fixing device comprises: the placement ring 3 is arranged in at least three ring bodies 5 on the suction cup body 1, a plurality of connecting holes 6 are equidistantly arranged on the upper end face of the suction cup body 1, corresponding holes (not shown in the figure) are arranged on both sides of the suction air duct 4 on each ring body 5, a fixing member is arranged between the ring body 5 and the suction cup body 1, and the suction air duct 4 is arranged on each ring body 5 and communicates with the suction port 2. A plurality of connecting holes 6 are arranged on both sides of each suction port 2. The connecting holes 6 and the suction ports 2 are arranged in the same direction.

[0032] The fixing member is a mounting bolt 7 arranged between the ring body 5 and the suction disc body 1 and threadedly connected with the connecting hole 6, the head of the mounting bolt 7 is located at the upper end of the ring body 5, and the screw rod of the mounting bolt 7 is threadedly matched with the connecting hole 6 through a corresponding hole (not shown in the figure).

[0033] A guide member is arranged between each ring body 5 and the suction disc body 1.

[0034] The guide member comprises a guide groove 8 symmetrically arranged on the suction disc body 1 and located at the lower end surface of the ring body 5, and a guide block 9 arranged at the lower end of each ring body 5 and slidably connected with the guide groove 8, and the guide groove 8 is arranged on one side of the connecting hole 6.

[0035] The working principle of the utility model is as follows: when it is needed to fix the silicon component on the vacuum suction disc, the silicon component is placed on the placing ring 3 formed by each ring body 5, the ring body 5 can isolate the silicon component from the surface of the suction disc body 1, so as to prevent the bottom surface of the silicon component from being scratched, and when it is needed to generate suction, negative pressure is generated through the suction device (not shown in the figure), since the suction air duct 4 is communicated with the suction port 2, at this time, the silicon component placed on the placing ring 3 is fixed on the placing ring 3 by the negative pressure of the suction air duct 4, when the silicon component is placed on the suction disc or needs to be taken off from the suction disc, the silicon component will not move on the surface of the suction disc, so as to prevent the bottom surface of the silicon component from being abraded by rubbing with the surface of the suction disc; when it is needed to place other size silicon components, the fixing between the ring body 5 and the suction disc body 1 is released by rotating the mounting bolt 7 through a tool, then each ring body 5 is moved along the position of the suction port 2 to the central end position of the suction disc body 1, if the diameter of the silicon component is large, the ring body 5 is moved away from the central end, and if the diameter of the silicon component is small, the ring body 5 is moved to the position close to the central end, after the position is confirmed, the position of the corresponding hole (not shown in the figure) is matched with the position of the connecting hole 6, and the moving distance of each ring body 5 is made to be the same, so as to expand or reduce the diameter formed between each ring body 5, then the bolt is installed on the ring body 5 and the suction disc body 1, so that the position between each ring body 5 can be adjusted according to the size of the silicon component, so that the placing ring 3 can adapt to silicon components of different sizes; when the position of the ring body 5 on the suction disc body 1 is adjusted, the cooperation between the guide block 9 and the guide groove 8 enables the ring body 5 to keep linear motion, keeps the sliding direction of the ring body 5 to the central end of the suction disc body 1, and prevents the ring body 5 from deviating when the ring body 5 is moved. Embodiment

[0036] Reference Figure 3 , Figure 4As shown, a vacuum chuck for processing silicon components comprises a chuck body 1, further comprises a suction port 2 arranged on the chuck, a suction device (not shown in the figure) arranged on the chuck body 1 and communicated with the suction port 2, a placing ring 3 arranged on the upper end face of the chuck body 1 for placing silicon components and preventing scratching of the silicon components, a suction air duct 4 opened on the placing ring 3 and communicated with the suction port 2, and a fixing device arranged between the placing ring 3 and the chuck body 1 for fixing or releasing the placing ring 3 on the chuck body 1.

[0037] The chuck body 1 is provided with at least three suction ports 2, each of which is arranged equidistantly around the center end of the chuck body 1, and the suction port 2 is a long strip suction port. The suction port 2 is arranged from the outer circle of the chuck body 1 to the center end.

[0038] The placing ring 3 is a quartz ring or a silica gel ring or a rubber ring. Quartz is mainly made of silicon dioxide, which is similar in material to silicon components, can prevent scratching of silicon components when placed on a quartz plate, and is a non-polluting composite material, which is manufactured under vacuum conditions, so that the inside and outside are consistent, dense and non-porous, and will not cause pollution during use. Silica gel is non-toxic and harmless, has relatively stable tissue compatibility, is easy to shape, has high cost performance, and is not easy to damage the surface of the silicon component.

[0039] The suction air duct 4 is a circular arc air duct.

[0040] The fixing device comprises a plurality of connecting holes 6 equidistantly opened on the upper end face of the chuck body 1, corresponding holes (not shown in the figure) opened on the placing ring 3 and located on the upper and lower sides of the suction air duct 4, and a fixing member arranged between the placing ring 3 and the chuck body 1. The plurality of connecting holes 6 are arranged from the outer circle of the chuck body 1 to the center end.

[0041] The fixing member is a mounting bolt 7 arranged between the placing ring 3 and the chuck body 1 and threadedly connected with the connecting hole 6, the head of the mounting bolt 7 is located on the upper end of the placing ring 3, and the screw rod of the mounting bolt 7 is threadedly matched with the connecting hole 6 through the corresponding hole (not shown in the figure).

[0042] The utility model discloses a working principle: when needing to prevent the silicon component from being fixed on the vacuum chuck, place the silicon component on the placing ring 3, the placing ring 3 can insulate the surface of the silicon component and the suction disc body 1, prevent the bottom surface of the silicon component from being scratched, produce negative pressure through the adsorption device (not shown in the drawing) when needing to produce adsorption, since the adsorption air passage 4 is communicated with the adsorption port 2, the silicon component placed on the placing ring 3 is fixed on the placing ring 3 by the negative pressure on the adsorption air passage 4, when placing the silicon component on the suction disc or needing to take down the silicon component from the suction disc, the silicon component will not move on the surface of the suction disc, and the bottom surface of the silicon component will not be abraded by rubbing with the surface of the suction disc, when needing to adapt to silicon components of different sizes, only need to twist the mounting bolt 7 to remove the fixing between the placing ring 3 and the suction disc body 1, place the placing ring 3 of the size of the adapted silicon component on the suction disc body 1, and make the corresponding hole (not shown in the drawing) correspond to the position of the connecting hole 6, then insert the mounting bolt 7 into the corresponding hole (not shown in the drawing), and twist the mounting bolt 7 to make it be screwed with the connecting hole 6, so that the placing ring 3 is fixed on the vacuum chuck, to adjust the size of the placing ring 3 according to the silicon components of different sizes.

[0043] The utility model discloses a structure of product, the model of each element is not the content of the utility model protection, is the known technology, and the element that can realize the function of the utility model on the market can be used as a silicon component processing vacuum chuck. Therefore the model of element and the like parameters are not described in detail in the utility model. The contribution of the utility model is that each element is combined scientifically.

[0044] The basic principle and main features of the utility model and its advantages are shown and described above, and those skilled in the art should understand that the utility model is not limited to the above examples, and the above examples and descriptions are only illustrative of the principle of the utility model, and various changes and improvements can be made to the utility model without departing from the spirit and scope of the utility model, and these changes and improvements all fall within the scope of the claimed utility model, and the scope of protection of the utility model is defined by the attached claims and their equivalents. The utility model is not described in detail, and is the known technology of those skilled in the art.

Claims

1. A vacuum chuck for processing silicon components, comprising a chuck body, characterized in that: It also includes an adsorption port on the suction cup, an adsorption device on the suction cup body and connected to the adsorption port, a placement ring on the upper end face of the suction cup body for placing silicon components and preventing scratching of the silicon components, an adsorption air passage on the placement ring and connected to the adsorption port, and a fixing device between the placement ring and the suction cup body for fixing or unfixing the placement ring to the suction cup body.

2. The vacuum chuck for processing silicon components according to claim 1, characterized in that: The suction cup body is provided with at least three suction ports, and each suction port is arranged equidistantly around the center end of the suction cup body. The suction port is a long strip suction port.

3. The vacuum chuck for processing silicon components according to claim 1, characterized in that: The placement ring is a quartz ring, a silicone ring, or a rubber ring.

4. The vacuum chuck for processing silicon components according to claim 1, characterized in that: The adsorption channel is an arc-shaped channel.

5. A vacuum chuck for processing silicon components according to claim 1, characterized in that: The fixing device includes: the placement ring is at least three rings arranged in a ring on the suction cup body; a plurality of connecting holes are equally spaced on the upper end face of the suction cup body; corresponding holes are opened on both sides of the adsorption air passage on each ring; a fixing member is arranged between the ring and the suction cup body; the adsorption air passage is arranged on each ring and communicates with the adsorption port.

6. A vacuum chuck for processing silicon components according to claim 5, characterized in that: The fixing component is a mounting bolt disposed between the ring body and the suction cup body and threadedly connected to the connecting hole. The head of the mounting bolt is located at the upper end of the ring body, and the screw portion of the mounting bolt passes through the corresponding hole and is threadedly engaged with the connecting hole.

7. A vacuum chuck for processing silicon components according to claim 1, characterized in that: The fixing device includes a plurality of connecting holes equidistantly opened on the upper end face of the suction cup body, corresponding holes opened on the placement ring and located on the upper and lower sides of the adsorption air passage, and a fixing member disposed between the placement ring and the suction cup body.

8. A vacuum chuck for processing silicon components according to claim 7, characterized in that: The fixing component is a mounting bolt disposed between the placement ring and the suction cup body and threadedly connected to the connecting hole. The head of the mounting bolt is located at the upper end of the placement ring, and the screw portion of the mounting bolt passes through the corresponding hole and is threadedly engaged with the connecting hole.

9. A vacuum chuck for processing silicon components according to claim 5, characterized in that: A guide is provided between each of the ring bodies and the suction cup body.

10. A vacuum chuck for processing silicon components according to claim 9, characterized in that: The guide includes guide grooves symmetrically formed on the suction cup body at the lower end face of the ring, and guide blocks disposed at the lower end of each ring and slidably connected to the guide grooves. The guide grooves are disposed on one side of the connecting hole.

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