Device for disassembling edge guide wheel bearing of wafer single-side polishing machine

Abstract

The utility model discloses a device for disassembling an edge guide wheel bearing of a wafer single-side polishing machine. The device comprises two vertical plates arranged in a spaced mode, the tops of the two vertical plates are fixedly connected with a fixing plate, and a threaded hole penetrating through the fixing plate is formed in the center of the fixing plate; a separation pressing plate with a circular hole in the center is arranged below the fixing plate; a long inside hexagonal bolt is arranged in the threaded hole of the fixed plate; when the edge guide wheel bearing is disassembled, the edge guide wheel is fixed below the separation pressing plate, the bearing and the shaft of the edge guide wheel are completely exposed out of the circular hole of the separation pressing plate, when the long hexagon socket screw is rotated clockwise, the lower end of the long hexagon socket screw penetrates through the circular hole of the separation pressing plate and is screwed into the threaded hole of the edge guide wheel shaft, and when the long hexagon socket screw is rotated anticlockwise, the edge guide wheel is disassembled. And the shaft and the bearing of the side guide wheel are driven to move upwards, so that the side guide wheel bearing is disassembled. The device is simple in structure, convenient to operate and capable of reducing mechanical damage to the edge guide wheel bearing and the bearing seat and shortening the equipment maintenance time.

Description

TECHNICAL FIELD

[0001] The utility model relates to a device for disassembling wafer single side polishing machine side guide wheel bearing belongs to semiconductor production processing technical field. BACKGROUND

[0002] With the development of semiconductor technology, the demand for large size wafer is higher and higher, which puts forward higher stability requirement to its processing and production equipment. In the production and processing process of 12 inch wafer regenerative sheet, when the single side polishing machine is used for wafer polishing in the production site, the state of side guide wheel is one of the important factors to determine the product quality. The side guide wheel plays the positioning role to the ceramic disc, and the side guide wheel and the ceramic disc are in synchronous rotation state, if high quality polishing sheet is processed, the mutual coordination and stable operation of the two in the rotation process are required, and the key is the bearing state of side guide wheel. In actual production, the product quality is often reduced due to the poor bearing state of side guide wheel. The poor bearing state of side guide wheel mainly shows the wear and rust of bearing parts, thereby the stability of side guide wheel rotation is reduced, so the side guide wheel bearing needs to be disassembled and replaced regularly.

[0003] The side guide wheel of single side polishing machine is composed of side guide wheel POM outer sleeve, bearing sleeve, deep groove ball bearing and shaft, the deep groove ball bearing is installed on the shaft and is installed in the shaft sleeve as a whole, and the shaft sleeve and the POM outer sleeve are tightly installed through interference combination.

[0004] When the side guide wheel bearing is replaced, the bearing is often stuck in the bearing sleeve and cannot be pulled out, generally, the rubber hammer is used to knock the edge of bearing sleeve and the shaft of bearing, and the vise is used to pull out the shaft of bearing, and it is almost impossible to pull out the bearing and shaft from the bearing sleeve by hand. This maintenance method is time-consuming and laborious, and may cause certain mechanical damage to the bearing sleeve and the shaft of bearing. Moreover, there are four side guide wheels on a device, if the side guide wheel bearings of the whole production line are disassembled according to this method, the maintenance efficiency and production efficiency will be greatly reduced. UTILITY MODEL CONTENTS

[0005] The utility model discloses a device for disassembling wafer single side polishing machine side guide wheel bearing, which has simple structure, convenient operation, can easily disassemble the side guide wheel bearing of single side polishing machine, reduces mechanical damage of the side guide wheel bearing and bearing seat in the process of separating the side guide wheel bearing and bearing seat, shortens the maintenance time of the device and improves the working efficiency of the device.

[0006] To achieve the above object, the utility model adopts the following technical scheme:

[0007] The utility model provides a kind of device for disassembling wafer single side polishing machine edge guide wheel bearing, the device includes two interval setting vertical plate, two vertical plate top fixedly connected with a fixed plate, the central part of fixed plate is equipped with the threaded hole passing through fixed plate;

[0008] Separation pressing plate is equipped below fixed plate, and the central part of separation pressing plate is equipped with circular opening;

[0009] Long hexagon socket head cap screw is equipped in the threaded hole of fixed plate;

[0010] When disassembling edge guide wheel bearing, edge guide wheel is fixed below separation pressing plate, separation pressing plate presses the upper edge of the shaft sleeve of edge guide wheel, the bearing and shaft of edge guide wheel are completely exposed to the circular opening of separation pressing plate, when rotating long hexagon socket head cap screw clockwise, its lower end passes through the circular opening of separation pressing plate and is screwed into the threaded hole of edge guide wheel shaft, when rotating long hexagon socket head cap screw counterclockwise, the shaft and bearing of edge guide wheel are driven to move upwards, so that edge guide wheel bearing is disassembled.

[0011] Further, the central part of the fixed plate is provided with a raised cylinder, and the threaded hole penetrates through the entire cylinder and the fixed plate.

[0012] Further, the inner walls of the vertical plates are respectively provided with slots, and the two ends of the separation pressing plate are respectively fixedly installed in the corresponding slots.

[0013] Further, the vertical plates are fixedly connected with the fixed plate and the separation pressing plate by fixed bolts.

[0014] Further, the fixed bolts are hexagonal socket head cap screws.

[0015] Further, the threaded hole in the central part of the fixed plate is coaxial with the opening in the central part of the separation pressing plate.

[0016] Further, the diameter of the through hole in the central part of the separation pressing plate is equivalent to the inner diameter of the bearing sleeve of the edge guide wheel.

[0017] The utility model discloses a kind of device for disassembling wafer single side polishing machine edge guide wheel bearing, the device includes two interval setting vertical plate, two vertical plate top fixedly connected with a fixed plate, the central part of fixed plate is equipped with the threaded hole passing through fixed plate;

[0018] The utility model provides a kind of dismounting special device of wafer single side polishing machine edge guide wheel bearing, and the whole edge guide wheel is fixed on the device, and edge guide wheel bearing is disassembled using long hexagon socket head cap screw and separation pressing plate. BRIEF DESCRIPTION OF DRAWINGS

[0019] Figure 1It is the sectional view of the device.

[0020] Figure 2 It is the sectional view of the device.

[0021] Figure 3 It is the structural schematic view of the fixed plate in the device.

[0022] Figure 4 It is the structural schematic view of the vertical plate in the device.

[0023] Figure 5 It is the structural schematic view of the separation pressing plate in the device.

[0024] Reference signs:

[0025] 1 vertical plate; 11 slot; 2 fixed plate; 21 cylindrical body; 22 threaded hole; 3 separation pressing plate; hole 31; 4 long hexagonal bolt; 6 through hole; 7 threaded hole; 71 long hexagonal bolt. DETAILED DESCRIPTION

[0026] The utility model will be further described below through the drawings and specific embodiments, but it does not mean the limitation of the protection scope of the utility model.

[0027] As Figures 1 to 3 Indicated, the utility model is used for the device of single side polishing machine edge guide wheel bearing dismounting, including two interval certain distance setting vertical plate 1, vertical plate 1 top installs fixed plate 2. The central part of fixed plate 2 is equipped with convex cylindrical body 21, the cylindrical body 21 is integral type structure design with fixed plate 2, is equipped with threaded hole 22 in, the threaded 22 hole penetrates entire cylindrical body 21 and fixed plate 2. As Figure 4 、 5 Indicated, vertical plate 1 inside is equipped with slot 11, installs separation pressing plate 3 at slot 11, and separation pressing plate 3 central part is equipped with circular hole 31. The threaded hole 22 of fixed plate 2 and the hole 31 of separation pressing plate 3 central part are coaxial design, and the diameter of the hole 31 of separation pressing plate 3 central part matches the inner diameter of edge guide wheel bearing sleeve. Long hexagonal bolt 4 is arranged in threaded hole 22, and long hexagonal bolt 4 passes through the threaded hole 22 of cylindrical body 21, fixed plate 2 and the circular hole 31 of separation pressing plate 3, and is connected to the bearing of edge guide wheel on the coaxial axis.

[0028] Vertical plate 1 and fixed plate 2 are connected by fixed bolt, for example, the top position of vertical plate 1 is separately equipped with two threaded holes 7, and the four corner positions of fixed plate 2 are equipped with through holes 6 corresponding to threaded hole 7, by rotating long hexagonal bolt 71 into corresponding through hole 6 and threaded hole 7, vertical plate 1 and fixed plate 2 are fixedly connected.

[0029] Vertical plate 1 and separation pressing plate 3 are connected by fixed bolt, asFigure 1 As shown, the separation pressing plate 3 is inserted into the slot 11 inside the vertical plate 1, and the separation pressing plate 3 is provided with threaded holes 7 on both sides, and the through holes 6 matching the positions of the slot 11 inside the vertical plate 1 are used to install the inner hexagonal bolts 71.

[0030] The object to which the utility model is applied is a side guide wheel component of a single-side polishing machine, the side guide wheel is composed of a side guide wheel POM outer sleeve, a bearing sleeve, a deep-groove ball bearing, a shaft and the like, the deep-groove ball bearing is installed on the shaft, and is installed in the bearing sleeve as a whole, and the bearing sleeve and the POM outer sleeve are tightly installed through interference combination.

[0031] In the previous maintenance, due to the lack of suitable tooling, the rusted bearing is usually tightly engaged with the bearing sleeve, and it is difficult to separate the bearing from the bearing sleeve by hand, the rubber hammer is used to knock the edge of the bearing sleeve and the shaft of the bearing, and the bearing shaft is pulled out using the vise, this method is easy to cause mechanical scratches on the side guide wheel bearing sleeve and other components, and the maintenance efficiency is low, the equipment recovery time is long, thereby affecting the operation of the machine, and it is not conducive to the improvement of the silicon wafer yield.

[0032] The utility model effectively solves the previous maintenance difficulty and adverse effect, and the specific operation method is as follows, the side guide wheel is placed below the separation pressing plate 3, the bearing sleeve of the side guide wheel and the upper edge of the POM outer sleeve are just pressed by the lower part of the separation pressing plate 3, the deep-groove ball bearing of the side guide wheel is completely exposed in the opening 31, the shaft of the side guide wheel is kept coaxial with the opening 31 and the threaded hole 22, the long inner hexagonal bolt 4 is screwed into the threaded hole of the shaft of the side guide wheel through the threaded hole 22 in a clockwise direction using the inner hexagonal wrench, then the long inner hexagonal bolt 4 is screwed upward in a counterclockwise direction using the inner hexagonal wrench, since the shaft is wrapped by the bearing, the shaft will rotate counterclockwise synchronously in the process of screwing the long inner hexagonal bolt 4 counterclockwise, and since the long inner hexagonal bolt 4 passes through the threaded hole 22, an upward force is applied on the shaft of the side guide wheel, the shaft of the side guide wheel is as a whole with the bearing, so the shaft and the bearing can be easily disassembled.

[0033] When the long inner hexagonal bolt 4 lifts up the bearing of the whole side guide wheel, the bearing and the shaft are completely exposed between the fixed plate 2 and the separation pressing plate 3, at this time, the long inner hexagonal bolt 4 is removed from the shaft, and the bearing and the shaft can be smoothly taken out of the device, and further disassembly work is carried out on the two.

[0034] The utility model can adopt SUS304 stainless steel and the like, can guarantee good mechanical characteristics, is economical and durable, satisfies the work demand. Meanwhile, the device is a combined part, is convenient for disassembling at any time, and single component replacement is more convenient. In the maintenance process, the device of the utility model greatly shortens the maintenance time, reduces the maintenance cost, and improves the working efficiency of the machine.

Claims

1. A device for disassembling a side guide wheel bearing of a single-side polishing machine for wafers, characterized in that, The device comprises two vertically arranged plates, and a fixed plate is fixedly connected to the top of the plates, and a threaded hole penetrating the fixed plate is arranged at the center of the fixed plate; A separation pressing plate is arranged below the fixed plate, and a circular opening is arranged at the center of the separation pressing plate; A long hexagonal bolt is arranged in the threaded hole of the fixed plate; When the edge guide wheel bearing is disassembled, the edge guide wheel is fixed below the separation pressing plate, the separation pressing plate presses the upper edge of the shaft sleeve of the edge guide wheel, the bearing and the shaft of the edge guide wheel are completely exposed to the circular opening of the separation pressing plate, when the long hexagonal bolt is rotated clockwise, the lower end of the long hexagonal bolt penetrates the circular opening of the separation pressing plate and is screwed into the threaded hole of the shaft of the edge guide wheel, when the long hexagonal bolt is rotated counterclockwise, the shaft and the bearing of the edge guide wheel are driven to move upward, so that the edge guide wheel bearing is disassembled.

2. The apparatus for disassembling the edge roller bearing of a single-side polishing machine for wafers according to claim 1, characterized in that, The center of the fixed plate is provided with a protruding cylindrical body, and the threaded hole penetrates the entire cylindrical body and the fixed plate.

3. The apparatus for disassembling a side guide wheel bearing of a single-side polishing machine for wafers according to claim 1 or 2, characterized in that, The inner walls of the plates are respectively provided with grooves, and the two ends of the separation pressing plate are respectively fixedly installed in the corresponding grooves.

4. The apparatus for disassembling a side guide wheel bearing of a single-side polishing machine for wafers according to claim 1 or 2, characterized in that, The plates are respectively fixedly connected with the fixed plate and the separation pressing plate through fixed bolts.

5. The apparatus for disassembling the edge roller bearing of a single-side polishing machine for wafers according to claim 4, characterized in that, The fixed bolts are hexagonal bolts.

6. The apparatus for disassembling the edge roller bearing of a single-side polishing machine for wafers according to claim 1, characterized in that, The threaded hole at the center of the fixed plate and the opening at the center of the separation pressing plate are coaxially arranged.

7. The apparatus for disassembling the edge roller bearing of a single-side polishing machine for wafers according to claim 6, characterized in that, The diameter of the through hole at the center of the separation pressing plate is equivalent to the inner diameter of the bearing sleeve of the edge guide wheel.

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