Cleaning device, cutting fluid circulating system and wire cutting machine

Abstract

The utility model provides a cleaning device, cutting fluid circulation system and wire cutting machine, including cutting chamber and wire cutting mechanism, the wire cutting mechanism is installed in the cutting chamber, the cleaning device is installed in the cutting chamber, the cleaning device includes the fixed seat and the cleaning pipe, the cleaning pipe is rotatablely installed on the fixed seat, the fixed seat is fixed on the fixed seat, and the cleaning pipe is fixed on the fixed seat. The cleaning pipe is provided with a plurality of cleaning nozzles and a positioning cleaning mechanism used for cleaning the inner wall of the cutting chamber and the wire cutting mechanism. The cleaning device capable of rotating is arranged in the cutting chamber, so that the inner wall of the cutting chamber can be automatically and comprehensively cleaned, the complicated procedure of manual flushing in the prior art is avoided, and the working efficiency is greatly improved; in addition, by arranging the positioning cleaning mechanism, the cutting material, the cutting wire net and other structures can be directionally washed in the rotating process of the rotary cleaning device, and cleaning is more user-friendly.

Description

TECHNICAL FIELD

[0001] The utility model relates to wire cutting technical field, especially to a kind of cleaning device, cutting fluid circulation system and wire cutting machine. BACKGROUND

[0002] In the field of wire cutting technology, the cutting wire in high speed is used to realize cutting by relative motion to the cutting piece (including but not limited to silicon rod, magnetic material, semiconductor, sapphire, silicon carbide and other materials). For example, when cutting photovoltaic silicon rod, silicon carbide, semiconductor, magnetic material, sapphire and other materials by using cutting wire in high speed, in order to prevent the splashing of cutting debris, cutting fluid and other things, and to affect the surrounding working environment, it is usually necessary to seal the wire cutting mechanism, such as setting the wire cutting mechanism in the cutting chamber. However, after cutting is completed, due to the splashing of cutting fluid and cutting debris, the cutting debris will adhere to the inner wall of the cutting chamber and the wire cutting mechanism. In the prior art, the cutting chamber is usually manually cleaned after cutting is completed, which is time-consuming and laborious, and affects the use efficiency of the wire cutting machine. Therefore, there is an urgent need for a cleaning device that can efficiently clean the inner wall of the cutting chamber and the wire cutting mechanism. SUMMARY

[0003] In view of the above technical problems, the utility model technical scheme provides a kind of cleaning device, cutting fluid circulation system and wire cutting machine, which can efficiently clean the inner wall of the cutting chamber and the wire cutting mechanism after cutting is completed.

[0004] The utility model provides a kind of cleaning device, fixed seat and cleaning pipe, the cleaning pipe rotatablely installed on the fixed seat, and a plurality of cleaning spray heads are arranged on the cleaning pipe.

[0005] Further optimization of the utility model technical scheme, the fixed seat includes first fixed seat and second fixed seat, and the first fixed seat is provided with liquid inlet interface.

[0006] Further optimization of the utility model technical scheme, the liquid inlet interface is arranged on the side wall of the first fixed seat or the mounting surface of the first fixed seat.

[0007] Further optimization of the utility model technical scheme, further include rotary power device, the rotary power device is arranged in the second fixed seat, to control the rotation of the cleaning pipe.

[0008] Further optimization of the utility model technical scheme, the rotary power device is rotary cylinder or motor.

[0009] The further optimization of the utility model technical scheme, the second fixed seat includes the mounting seat, the installation component and the protective cover, the rotating power device sets up on the mounting seat, the cleaning pipe is connected with the rotating power device through the installation component, the protective cover sets up on the mounting seat.

[0010] The further optimization of the utility model technical scheme, the installation component includes the connecting flange, the mounting disc and the sealing device, the mounting disc is connected with the rotating power device through the connecting flange, and the mounting disc is used to connect the cleaning pipe;The connecting flange is connected with the protective cover through the sealing device.

[0011] The further optimization of the utility model technical scheme, the cleaning pipe is connected with the fixed seat through the rotating flange, and the rotating flange is installed on the fixed seat through the bearing.

[0012] The further optimization of the utility model technical scheme, the rotating flange and the fixed seat are provided with the sealing device.

[0013] The further optimization of the utility model technical scheme, all the cleaning spray heads are arranged in a line along the length direction of the cleaning pipe, and at least one row of cleaning spray heads is arranged on the cleaning pipe.

[0014] The further optimization of the utility model technical scheme, the cleaning spray head includes the vertical spray head and the inclined spray head, the vertical spray head is arranged in the middle of the cleaning pipe, and the inclined spray head is arranged on both sides of the cleaning pipe.

[0015] The further optimization of the utility model technical scheme further includes the positioning cleaning mechanism, the positioning cleaning mechanism is arranged between the cleaning pipe and the fixed seat, and is used to directional cleaning of the cleaning pipe.

[0016] The further optimization of the utility model technical scheme, the positioning cleaning mechanism includes the detection disc and the proximity switch, and the detection disc and the proximity switch are installed on the cleaning pipe and the fixed seat respectively.

[0017] The further optimization of the utility model technical scheme, the proximity switch is arranged on the protective cover of the fixed seat, and the number of the proximity switch is at least two;The detection disc is installed on the cleaning pipe.

[0018] A cutting fluid circulation system includes the cleaning device described above.

[0019] A wire cutting machine, comprising a cutting chamber and a wire cutting mechanism, the wire cutting mechanism is installed in the cutting chamber, and the cleaning device described above or the cutting fluid circulating system described above is installed in the cutting chamber to clean the inner wall of the cutting chamber and the wire cutting mechanism.

[0020] Further optimization of the technical scheme of the utility model, at least two groups of the cleaning device are arranged in the cutting chamber, and the cleaning device is installed on the inner wall of the cutting chamber through the fixing seat.

[0021] Further optimization of the technical scheme of the utility model, comprising two groups of the cleaning device, and the cleaning pipes of the two groups of the cleaning device are arranged in parallel in the cutting chamber; the two groups of the cleaning device are arranged on the two sides of the wire cutting mechanism.

[0022] Further optimization of the technical scheme of the utility model, further comprising a third group of the cleaning device, and the third group of the cleaning device is arranged perpendicularly to the other two groups of the cleaning device.

[0023] Further optimization of the technical scheme of the utility model, the wire cutting machine is a slicing machine.

[0024] Compared with the prior art, the utility model has the advantages that:

[0025] 1. By arranging the rotatable cleaning device, the cleaning position can be controlled during cleaning; by arranging the rotating cleaning device in the cutting chamber, the inner wall of the cutting chamber can be automatically cleaned, avoiding the complicated process of manual flushing in the prior art, and greatly improving the work efficiency; in addition, the liquid inlet position is designed to facilitate the arrangement of the liquid inlet pipeline, which can be arranged outside the cutting chamber or inside the cutting chamber, and is more flexible.

[0026] 2. By arranging the positioning and cleaning mechanism on the cleaning device, the specific position of the inner wall of the cutting chamber and the directional flushing of the wire cutting mechanism can be realized during rotation. BRIEF DESCRIPTION OF DRAWINGS

[0027] In the following, the utility model will be described in more detail based on the embodiments and with reference to the drawings.

[0028] Fig. 1 is a structure diagram of the cleaning device in the technical scheme of the utility model;

[0029] Fig. 2 is a cross-sectional structure diagram of the cleaning device in the technical scheme of the utility model;

[0030] Fig. 3 is a structure diagram of the wire cutting machine in the technical scheme of the utility model.

[0031] In the drawings, like reference numerals refer to like elements throughout. The drawings are not necessarily to scale, emphasis instead being placed upon illustrating the principles of the application.

[0032] Brief Description of the Drawings

[0033] 1 - cutting chamber; 11 - wire cutting mechanism; 12 - feeding mechanism; 2 - cleaning device; 21 - first fixed seat; 211 - rotating flange; 212 - bearing; 22 - cleaning pipe; 23 - second fixed seat; 24 - cleaning nozzle; 25 - positioning and cleaning mechanism; 251 - detection disc; 252 - proximity switch; 26 - liquid inlet; 3 - rotating power device; 31 - connecting flange; 32 - mounting disc; 4 - protective cover; 5 - sealing device. DETAILED DESCRIPTION

[0034] The specific embodiments of the present application will be described in the following by specific embodiments, and those skilled in the art can easily understand other advantages and effects of the present application from the content disclosed in the specification. Obviously, the described embodiments are only a part of the embodiments of the present application, not all the embodiments. Based on the embodiments in the present application, all other embodiments obtained by those skilled in the art without creative labor belong to the scope of protection of the present application.

[0035] The terms used in the embodiments of the present application are only for the purpose of describing specific embodiments, and are not intended to limit the present application. The singular forms "a", "said" and "the" used in the embodiments of the present application and the appended claims are also intended to include the plural forms, unless the context clearly indicates otherwise. "Multiple" generally includes at least two, but does not exclude the case of including at least one.

[0036] It should also be noted that the terms "include", "contain" or any other variant thereof are intended to cover non-exclusive inclusion, so that the goods or systems including a series of elements not only include those elements, but also include other elements not explicitly listed, or include elements inherent in such goods or systems. Without more limitation, the element defined by the sentence "including a" does not exclude the presence of other identical elements in the goods or systems including the element. In the description of the present application, it should be understood that the terms "upper", "lower", "bottom", "top", "front", "rear", "inner", "outer", "left", "right" and the like indicate the orientation or positional relationship shown in the drawings, and are only for the convenience of describing the present application and simplifying the description, and do not indicate or imply that the devices or elements referred to must have a particular orientation, be constructed and operated in a particular orientation, therefore it cannot be understood as a limitation on the present application.

[0037] The utility model discloses make further explanation below. Figs. 1-3 The utility model discloses make further explanation below.

[0038] In the technical field of online cutting, especially for cutting photovoltaic silicon rods, silicon carbide, semiconductors, magnetic materials, sapphire and other materials, it is usually completed in the cutting chamber 1 of the online cutting machine. When the cutting work is in progress, the cutting chamber is in a closed state, and cutting fluid is continuously sprayed during the cutting process to ensure the cutting performance of the online cutting machine. Due to the high-speed operation of the cutting wire, the cutting fluid splashes to the inner wall of the cutting chamber 1 under the action of the cutting wire. The silicon powder and other substances contained in the cutting fluid will deposit on the inner wall of the cutting chamber 1 or other components inside the cutting chamber 1. The deposited silicon powder coagulates into blocks, which may fall on the cutting wire net and cause wire breakage or wire jump. In the prior art, the inner wall of the cutting chamber 1, the cutting wire net and the feeding mechanism 12 are manually cleaned after each cutting is completed. The cleaning time is long, which not only consumes time and effort, but also affects the use efficiency of the online cutting machine.

[0039] In view of the problems in the prior art, the present application provides a cleaning device with a rotating cleaning function as shown in Fig. 2 The cleaning device 2 includes a fixed seat and a cleaning pipe 22. The cleaning pipe 22 is rotatably installed on the fixed seat, and a plurality of cleaning nozzles 24 are arranged on the cleaning pipe 22. In this way, the rotation of the cleaning pipe 22 can be controlled to achieve the technical effect of rotating and washing the surrounding environment. The rotating power device 3 for controlling the rotation of the cleaning pipe 22 is preferably arranged in the fixed seat. Specifically, the rotating power device 3 is a rotary air cylinder or a motor.

[0040] As shown in Fig. 3As shown, the mounting base includes a first mounting base 21 and a second mounting base 23. The rotary power device 3 is disposed within the second mounting base 23 to control the rotation of the cleaning tube 22. The second mounting base 23 includes a mounting seat, a mounting assembly, and a protective cover 4. The rotary power device is mounted on the mounting seat, and the cleaning tube 22 is connected to the rotary power device 3 via the mounting assembly. The protective cover 4 is disposed on the mounting seat and covers the rotary power device 3 to prevent it from being contaminated by splashing cutting fluid. Specifically, the mounting assembly includes a connecting flange 31, a mounting plate 32, and a sealing device 5. The mounting plate 32 is connected to the rotary power device 3 via the connecting flange 31, and the mounting plate 32 is used to connect the cleaning tube 22. The mounting plate 32 and the connecting flange 31 are separate designs connected by threads, mainly for convenient installation with the protective cover 4. The installation sequence of the second fixed seat 23 is as follows: first, fix the rotating power device 3 inside the second fixed seat 23; second, fix the connecting flange 31 on the rotating power device 3; then, cover the protective cover 4 so that one end of the connecting flange 31 protrudes from the protective cover 4; finally, fix the mounting plate 32 to the connecting flange 31. After installation, the mounting plate 32 is located outside the protective cover 4, and the contact position between the connecting flange 31 and the protective cover 4 is sealed by a sealing ring. After connection, fix the cleaning pipe 22 on the mounting plate 32. Alternatively, the mounting plate 32 and the connecting flange 31 can be integrated into one piece, set in an "I" shape, or the mounting plate 32 can be removed, and the cleaning pipe 22 can be directly connected to the connecting flange 31.

[0041] like Fig. 2 and Fig. 3As shown, the fixed seat includes a first fixed seat 21 and a second fixed seat 23, the first fixed seat 21 is provided with a liquid inlet interface 26 to provide cleaning liquid for the cleaning pipe 22. Specifically in use, the cleaning pipe 22 is connected with the fixed seat through a rotating flange 211, and the rotating flange 211 is installed on the fixed seat through a bearing 212, and a sealing device 5 is arranged between the rotating flange 211 and the fixed seat. In use, the first fixed seat 21 remains stationary, and the cleaning pipe 22 rotates under the drive of the rotating power device 3, and the connection between the first fixed seat 21 and the cleaning pipe 22 is realized through the rotating flange 211 and the sealing device 5, and the sealing device 5 is preferably an O-shaped sealing ring. In order to facilitate the overall layout of the cleaning device 2, the liquid inlet interface 26 is arranged on the side wall of the first fixed seat 21 or the mounting surface of the first fixed seat 21. The two installation modes can be selected according to the specific work needs. The liquid inlet interface 26 is arranged on the mounting surface of the first fixed seat 21, which is the side wall installed with the cutting chamber 1. A hole corresponding to the liquid inlet interface 26 needs to be opened on the side wall of the cutting chamber 1 during installation. This design can arrange the liquid inlet pipeline outside the cutting chamber, and optimize the pipeline layout in the cutting chamber 1.

[0042] In order to facilitate the control of the rotating cleaning device 2 and ensure the cleaning effect, the cleaning spray head 24 is arranged side by side on the cleaning pipe 22, that is, a row of cleaning spray heads 24 are arranged on one side of the cleaning pipe 22. In order to balance the water pressure and the cleaning effect, the cleaning spray head 24 on the cleaning pipe 22 can be provided with two rows, and the two rows of cleaning spray heads 24 are symmetrically arranged on the side wall of the cleaning pipe 22, and can realize alternate cleaning under the drive of the rotating power device 3, or the rotating power device 3 can be arranged to rotate 180 degrees, and the two rows of cleaning spray heads 24 can realize 360-degree directional cleaning. Alternatively, the cleaning spray heads 24 can be arranged in a staggered and uniform manner on the side wall of the cleaning pipe 22. As long as the density and water pressure of the cleaning spray head 24 are controlled, the inner wall of the cutting chamber 1 can also be effectively cleaned. When the cleaning device 2 is arranged in the cutting chamber 1 along the front-rear direction thereof. In the preferred technical solution, in order to facilitate cleaning of the inner wall of the cutting chamber 1 perpendicular to the cleaning pipe 22, the cleaning spray head 24 on the cleaning pipe 22 is arranged in a vertical spray head and an inclined spray head. The vertical spray head is arranged at the middle of the width direction of the cleaning pipe 22, mainly for cleaning the left and right side walls of the cutting chamber 1 and the cutting line, and can realize vertical spraying. The inclined spray head is arranged on both sides of the width direction of the cleaning pipe 22 (the inclined spray head close to the front side wall is inclined towards the front side wall, and the inclined spray head close to the rear side wall is inclined towards the rear wall), mainly for cleaning the inner wall mounting surface (front and rear side walls) of the cutting chamber 1.

[0043] The application also provides a cutting fluid circulation system, which comprises a liquid collecting pool, a liquid supply device, a filtering device, a heat exchanger and a spraying device connected in sequence, and the cleaning device described above is parallel to the spraying device through a liquid supply pipeline. The liquid collecting pool is used to collect the cutting fluid after spraying or cleaning. After cutting is completed, the spraying device is closed and the cleaning device is opened to work. The specific cutting fluid circulation system is not described here because it is not the point of the application.

[0044] The application also provides a wire cutting device, which comprises a cutting chamber 1 and a wire cutting mechanism 11. The wire cutting mechanism 11 is installed in the cutting chamber 1, and the cleaning device 2 described above is installed in the cutting chamber 1 to clean the inner wall of the cutting chamber 1 and the wire cutting mechanism 11. Specifically, the cleaning device 2 is installed in the cutting chamber through a fixing seat, the cleaning pipe 22 is rotatably installed on the fixing seat, and a plurality of cleaning nozzles 24 are arranged on the cleaning pipe 22. During cleaning, the cleaning pipe 22 can be controlled to rotate to achieve comprehensive cleaning of the inner wall of the cutting chamber 1.

[0045] For the arrangement of the cleaning device 2 in the cutting chamber 1, the cleaning pipe 22 is preferably fixed to the front and rear side walls of the cutting chamber 1 through a fixing seat. In one embodiment, two groups of cleaning devices 2 can be arranged in the cutting chamber 1, and the axes of the cleaning pipes 22 of the two groups of cleaning devices 2 are parallel to each other. The two groups of cleaning devices 2 are located on both sides of the feeding mechanism 12. After cutting is completed, the two groups of cleaning devices 2 can be controlled to clean the cutting chamber on both sides of the cutting chamber 1 at the same time, so that the inner wall of the cutting chamber 1, the feeding mechanism 12 and the wire mesh can be cleaned comprehensively during the rotation of the cleaning pipe 22. In order to further avoid cleaning dead angles and achieve better cleaning effect, a third group of cleaning devices 2 is arranged in another embodiment, and the third group of cleaning devices 2 is arranged perpendicular to the other two groups of cleaning devices 2 in the length direction of the cleaning pipe (not shown in the figure). That is, the third group of cleaning devices 2 and the other two groups of cleaning devices 2 are both horizontally installed, and the third group of cleaning devices 2 is perpendicular to the other two groups of cleaning devices 2 in the horizontal plane, so as to clean the inner wall of the cutting chamber 1 (i.e. the front and rear side walls of the cutting chamber 1) where the first two groups of cleaning devices 2 are installed.

[0046] The wire cutting machine further comprises a feed mechanism 12, which is used to transport the workpiece to be cut to the cutting device. After the wire cutting machine cuts one stroke, some positions of the feed mechanism 12 are more likely to deposit silicon powder, and need to be cleaned. In order to solve the problem, a positioning cleaning mechanism 252 is arranged, which can control the rotation of the cleaning pipe 22 to a specific angle to clean the key positions of the feed mechanism 12. Specifically, the positioning cleaning mechanism 252 can be arranged on the first fixed seat 21 or the second fixed seat 23, for example, on the mounting seat of the second fixed seat 23. The positioning cleaning mechanism 252 detects the position cleaned by the cleaning nozzle 24 and the position that needs to be cleaned in the cutting chamber 1, so as to control the pause position of the motor or the rotary cylinder, so as to achieve the purpose of directional cleaning of the cleaning pipe 22. Preferably, the positioning cleaning mechanism 252 comprises a detection disc 251 and a proximity switch 252, and the detection disc 251 and the proximity switch 252 are respectively arranged on the cleaning pipe 22 and the fixed seat. Of course, the positions of the two can be interchanged. The proximity switch 252 is arranged on the protective cover 4 of the rotary power device 3 mounting seat, and the number of the proximity switch 252 is one or more. When one proximity switch 252 is arranged, the proximity switch 252 counts the different angles of the detection disc 251 to control the rotation angle. When multiple proximity switches 252 are arranged, the proximity switches 252 are arranged at different angles, and the rotation angle is controlled by directly detecting the detection disc 251. The detection disc 251 is arranged on the cleaning pipe 22. When the cleaning device 2 works, the cleaning pipe 22 rotates, the protective cover 4 is stationary, the detection disc 251 rotates with the cleaning pipe 22, and when the detection disc 251 rotates to a certain angle, the detection disc 251 triggers the proximity switch 252 to send a signal, and the rotation is paused, so as to realize the key cleaning of the local position of the cutting chamber 1.

[0047] Based on the embodiments in the utility model, all other embodiments obtained by those skilled in the art without creative labor shall belong to the protection scope of the utility model.

[0048] It should be noted that the terms used herein are only for describing specific embodiments, and are not intended to limit the exemplary embodiments according to the present application. As used herein, the singular form is intended to include the plural form, unless the context clearly indicates otherwise, and furthermore, it should be understood that when the terms "comprise" and / or "include" are used in the specification, there is a feature, step, work, device, component and / or their combination.

[0049] Although the utility model has been described with reference to the preferred embodiments, various modifications can be made to it without departing from the scope of the utility model and equivalent replacements can be made to the components therein. In particular, the technical features mentioned in each embodiment can be combined in any manner as long as there is no structural conflict. The utility model is not limited to the specific embodiments disclosed herein, but includes all technical solutions falling within the scope of the claims.

Claims

1. A cleaning device, characterized in that, The cleaning device comprises a fixed seat and a cleaning pipe, the cleaning pipe is rotatably installed on the fixed seat, and a plurality of cleaning nozzles are arranged on the cleaning pipe.

2. The cleaning apparatus according to claim 1, wherein The fixed seat comprises a first fixed seat and a second fixed seat, and the first fixed seat is provided with a liquid inlet interface.

3. The cleaning apparatus of claim 2, wherein The liquid inlet interface is arranged on the side wall of the first fixed seat or the mounting surface of the first fixed seat.

4. The cleaning apparatus of claim 2, wherein A rotating power device is further arranged in the second fixed seat to control the rotation of the cleaning pipe.

5. The cleaning apparatus of claim 4, wherein The rotating power device is a rotary cylinder or an electric motor.

6. The cleaning apparatus of claim 5, wherein The second fixed seat comprises a mounting seat, a mounting assembly and a protective cover, the rotating power device is arranged on the mounting seat, the cleaning pipe is connected with the rotating power device through the mounting assembly, and the protective cover is arranged on the mounting seat.

7. The cleaning apparatus of claim 6, wherein The mounting assembly comprises a connecting flange, a mounting disc and a sealing device, the mounting disc is connected with the rotating power device through the connecting flange, and the mounting disc is used to connect the cleaning pipe; and the connecting flange is connected with the protective cover through the sealing device.

8. The cleaning apparatus of claim 1, wherein, The cleaning pipe is connected with the fixed seat through a rotating flange, and the rotating flange is installed on the fixed seat through a bearing.

9. The cleaning apparatus of claim 8, wherein, Sealing devices are arranged between the rotating flange and the fixed seat.

10. The cleaning apparatus of claim 1, wherein, All the cleaning nozzles are arranged in a line along the length direction of the cleaning pipe, and at least one row of the cleaning nozzles is arranged on the cleaning pipe.

11. The cleaning apparatus of claim 10, wherein, The cleaning nozzles comprise vertical nozzles and inclined nozzles, the vertical nozzles are arranged at the middle of the width direction of the cleaning pipe, and the inclined nozzles are arranged at both sides of the width direction of the cleaning pipe.

12. The cleaning apparatus according to any one of claims 1 to 11, wherein A positioning and cleaning mechanism is further arranged between the cleaning pipe and the fixed seat to direct the cleaning of the cleaning pipe.

13. The cleaning apparatus of claim 12, wherein, The positioning and cleaning mechanism comprises a detection disc and a proximity switch, and the detection disc and the proximity switch are respectively installed on the cleaning pipe and the fixed seat.

14. The cleaning apparatus of claim 13, wherein, The proximity switch is arranged on the protective cover of the fixed seat, and the number of the proximity switches is one or more; and the detection disc is installed on the cleaning pipe.

15. A cutting fluid circulation system characterized by, The cleaning device of any one of claims 1-14 is included.

16. A wire saw, characterized in that The cutting chamber and a wire cutting mechanism are included, the wire cutting mechanism is installed in the cutting chamber, the cleaning device of any one of claims 1-14 or the cutting liquid circulating system of claim 15 is installed in the cutting chamber, and the cleaning device is used to clean the inner wall of the cutting chamber and the wire cutting mechanism.

17. The wire saw as claimed in claim 16, characterized in that At least two groups of the cleaning devices are arranged in the cutting chamber, and the cleaning devices are installed on the inner wall of the cutting chamber through the fixed seat.

18. The wire saw of claim 16, wherein, Two groups of the cleaning devices are arranged in parallel in the cutting chamber, and the two groups of the cleaning devices are arranged at both sides of the wire cutting mechanism.

19. The wire saw of claim 17, wherein, A third group of the cleaning devices is further included, and the third group of the cleaning devices is arranged perpendicularly to the other two groups of the cleaning devices.

20. The wire saw of claim 16, wherein, The wire cutting machine is a slicing machine.

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