Heat dissipation assembly, magnetofluid sealing mechanism and extension system
By combining heat dissipation components and a magnetic fluid sealing mechanism in CVD equipment, the temperature of the rotating shaft is reduced through radiative heat exchange of cooling fluid, thus solving the problem of the magnetic fluid sealing mechanism's performance being affected at high temperatures and achieving stable operation of the equipment.
Patent Information
- Application Number
- CN202423155385.7
- Authority / Receiving Office
- CN · China
- Patent Type
- Utility models(China)
- Current Assignee / Owner
- Filing Date
- 2024-12-20
- Publication Date
- 2025-12-05
- Estimated Expiration
- 2034-12-20
AI Technical Summary
The performance of existing magnetohydrodynamic (MHD) sealing mechanisms is affected by high-temperature environments, and they cannot effectively cool down, causing the rotating shaft and MHD sealing mechanism in CVD equipment to malfunction.
The system employs a heat dissipation assembly and a magnetic fluid sealing mechanism. By inserting a heat dissipation pipe onto the rotating shaft and using radiative heat exchange through a cooling fluid, the temperature of the rotating shaft and the magnetic fluid sealing mechanism is reduced.
It effectively reduces the temperature of the rotating shaft and the magnetohydrodynamic sealing mechanism, ensuring their normal operation in high-temperature environments and improving the operational stability and efficiency of CVD equipment.
Smart Images
Figure CN223633514U_ABST
Abstract
Description
TECHNICAL FIELD
[0001] The utility model relates to CVD equipment technical field especially relates to a heat dissipation subassembly, magnetic fluid sealing mechanism and epitaxial system. BACKGROUND
[0002] Chemical vapor deposition (CVD) can be divided into horizontal type and vertical type, and the uniformity of the epitaxial thickness and the doping concentration of the epitaxial wafer is a key parameter affecting the performance of silicon carbide devices, and the epitaxial wafer of the horizontal type is farther from the air inlet position, and the thickness is thinner, and the air inlet of the vertical type is located at the center, so the center thickness of the epitaxial wafer is thick, and the periphery is thin.
[0003] In the prior art, the rotation of the base drives the rotation of the epitaxial wafer, which can greatly reduce the thickness and the non-uniformity of the doping concentration. However, since the rotating shaft needs to pass through the cavity and be connected with the motor, and the cavity needs to be sealed and maintain a certain degree of vacuum, the magnetic fluid sealing mechanism is usually used to dynamically seal the rotating shaft in the prior art. In the process engineering, the temperature in the cavity can reach 1700 DEG C at the highest, at which time the temperature conducted on the rotating shaft will also be very high. The working temperature of the ordinary magnetic fluid sealing mechanism is limited to about 80 DEG C-120 DEG C, and by using special high-temperature carrier liquid and magnetic material, the temperature can be as high as 300 DEG C. However, at a higher temperature (such as more than 400 DEG C), the performance of the magnetic fluid sealing mechanism will be severely affected, so the magnetic fluid sealing mechanism needs to be cooled during use. SUMMARY
[0004] The utility model discloses a kind of heat dissipation components, magnetic fluid sealing mechanism and epitaxial system, to solve the cooling problem of magnetic fluid sealing mechanism.
[0005] To achieve this purpose, the utility model adopts the following technical solutions:
[0006] The heat dissipation component includes:
[0007] The cooling jacket is provided with a first through cavity, and a first groove is opened in the cavity wall of the first through cavity. The cooling jacket is also provided with a first liquid inlet and a first liquid outlet. The first liquid inlet and the first liquid outlet are communicated through a first flow channel arranged in the cooling jacket.
[0008] The heat dissipation pipe is placed in the first through cavity, and the outer wall of the heat dissipation pipe is provided with heat dissipation fins. The heat dissipation pipe can be sleeved on the rotating shaft of the magnetic fluid sealing mechanism and rotate with the rotating shaft.
[0009] In some embodiments, the first grooves extend along the axial direction of the first through cavity, and a plurality of first grooves are distributed along the circumferential direction of the first through cavity.
[0010] In some embodiments, each of the heat dissipation fins is arranged along an axial direction of the heat dissipation pipe, and a plurality of the heat dissipation fins are arranged along a circumferential direction of the heat dissipation pipe.
[0011] In some embodiments, each of the heat dissipation fins is provided with a plurality of fractures arranged along an axial direction of the heat dissipation pipe.
[0012] In some embodiments, the heat dissipation assembly further comprises a locking sleeve capable of being locked on the rotating shaft, and the locking sleeve is arranged below the heat dissipation pipe to abut against the heat dissipation pipe.
[0013] The magnetic fluid sealing mechanism further comprises:
[0014] The magnetic fluid sealing mechanism further comprises:
[0015] The heat dissipation assembly as described above is capable of sealingly connecting the magnetic fluid cavity and the external cavity, the rotating shaft penetrates through the heat dissipation pipe and the external cavity, and the heat dissipation pipe is capable of rotating with the rotating shaft.
[0016] In some embodiments, the magnetic fluid sealing mechanism further comprises a fixing seat arranged on a side of the heat dissipation assembly away from the magnetic fluid assembly, the fixing seat is sealingly connected to the cooling sleeve, an end of the fixing seat away from the heat dissipation assembly is sealingly fixed to the external cavity, and the fixing seat is provided with a second through cavity through which the rotating shaft penetrates.
[0017] In some embodiments, the fixing seat is provided with a second liquid inlet and a second liquid outlet, and the second liquid inlet and the second liquid outlet are communicated through a second flow channel arranged in the fixing seat.
[0018] In some embodiments, an inner cavity wall of the second through cavity is provided with a second groove corresponding to the second flow channel.
[0019] In some embodiments, an end face of the fixing seat facing the magnetic fluid cavity is provided with a sealing member surrounding the second through cavity.
[0020] The epitaxial system further comprises a reaction cavity and the magnetic fluid sealing mechanism as described above, and the rotating shaft penetrates into the reaction cavity to connect a susceptor for fixing a substrate in the reaction cavity.
[0021] The epitaxial system further comprises a reaction cavity and the magnetic fluid sealing mechanism as described above, and the rotating shaft penetrates into the reaction cavity to connect a susceptor for fixing a substrate in the reaction cavity.
[0022] The rotating shaft of the magnetic fluid sealing mechanism is inserted on the heat dissipation pipe, then the cooling fluid is injected into the first flow channel through the first liquid inlet, and then is discharged through the first liquid outlet, so that the heat on the rotating shaft is radiated and exchanged with the fluid in the first flow channel through the heat dissipation pipe, so as to reduce the temperature of the rotating shaft and the magnetic fluid sealing mechanism, and ensure normal operation. BRIEF DESCRIPTION OF DRAWINGS
[0023] Figure 1 is an exploded view of the heat dissipation assembly in the utility model;
[0024] Figure 2 is a sectional view of the cooling jacket in the utility model;
[0025] Figure 3 is a schematic view of the magnetic fluid sealing mechanism in the utility model;
[0026] Figure 4 is a sectional view of the magnetic fluid sealing mechanism;
[0027] Figure 5 is a sectional view of the fixing seat in the utility model.
[0028] In the drawings:
[0029] 10, heat dissipation assembly; 11, cooling jacket; 112, first through cavity; 113, first groove; 114, first liquid inlet; 115, first liquid outlet; 116, first flow channel; 12, heat dissipation pipe; 13, locking sleeve; 14, heat dissipation fin; 141, fracture;
[0030] 20, magnetic flow assembly; 21, magnetic flow cavity; 22, rotating shaft;
[0031] 30, fixing seat; 31, second through cavity; 32, second flow channel; 33, second groove; 34, embedding groove;
[0032] 40, reaction cavity;
[0033] 50, base. DETAILED DESCRIPTION
[0034] The utility model will be further described in detail below in combination with the drawings and embodiments. It can be understood that the specific embodiments described herein are only used to explain the utility model, and not limited to the utility model. In addition, it should be noted that, in order to facilitate the description, only the part related to the utility model is shown in the drawings, not all structures.
[0035] In the description of the utility model, unless another definite provision and limitation, the term "link", "connect", "fix" should do broad sense understanding, for example, can be fixed connection, also can be detachable connection, or be integrated;Can be mechanical connection, also can be electrical connection;Can be directly connected, also can be indirectly connected through the intermediate medium, can be two elements inside the communication or two element's mutual action relation.For the ordinary skilled in the art, the specific meaning of the above-mentioned terms in the utility model can be understood according to the specific circumstances.
[0036] In the utility model, unless another definite provision and limitation, the first feature is "on" or "under" the second feature can include the first and second features direct contact, also can include the first and second features is not direct contact but is through the contact between other features between them.And, the first feature is "on", "above" and "on" the second feature includes the first feature is directly above and obliquely above the second feature, or just indicates that the horizontal height of the first feature is higher than the second feature.The first feature is "under", "below" and "under" the second feature includes the first feature is directly below and obliquely below the second feature, or just indicates that the horizontal height of the first feature is less than the second feature.
[0037] In the description of the embodiment, the terms "on", "under", "left", "right" and other orientation or position relationship are based on the orientation or position relationship shown in the drawing, only for the convenience of description and simplification operation, and not indicate or imply that the device or element referred to must have a particular orientation, be constructed and operated in a particular orientation, therefore cannot be understood as a limitation on the utility model.In addition, the terms "first", "second" are only used to distinguish in the description, and have no special meaning.
[0038] As Figures 1 to 5 As shown in the application, a heat dissipation assembly 10 is provided, which comprises a cooling jacket 11 and a heat dissipation pipe 12, the cooling jacket 11 is provided with a first through cavity 112, the cavity wall of the first through cavity 112 is provided with a first groove 113, the cooling jacket 11 is further provided with a first liquid inlet 114 and a first liquid outlet 115, the first liquid inlet 114 and the first liquid outlet 115 are communicated through a first flow channel 116 arranged in the cooling jacket 11;The heat dissipation pipe 12 is arranged in the first through cavity 112, the outer wall of the heat dissipation pipe 12 is provided with a heat dissipation fin 14, the heat dissipation pipe 12 can be sleeved on the rotating shaft 22 of the magnetic fluid sealing mechanism and rotate with the rotating shaft 22.
[0039] The rotating shaft 22 of the magnetic fluid sealing mechanism is inserted into the heat dissipation pipe 12, and then the cooling fluid is injected into the first flow channel 116 through the first liquid inlet 114 and discharged from the first liquid outlet 115, so that the heat on the rotating shaft 22 is radiated and exchanged with the fluid in the first flow channel 116 through the heat dissipation pipe 12, so as to reduce the temperature of the rotating shaft 22 and the magnetic fluid sealing mechanism and ensure the normal operation thereof.
[0040] According to formula one: Q1 = ∈ 12 C0[(T1 / 100) 4 -(T2 / 100) 4 ]φ 12 F1;
[0041] Formula two: φ 12 = F2 / F1, φ 21 = 1;
[0042] Formula three: ∈ 12 = 1((1 / ∈1-1)φ 12 +(1 / ∈2-1)φ 21 +1);
[0043] Q1: Radiant heat exchange heat; C O : Black body radiation coefficient; F1: Surface area of internal object; F2: Surface area of external object; T1: High temperature object surface temperature; T2: Low temperature object surface temperature; ∈1: Black body radiation coefficient of internal object; ∈2: Black body radiation coefficient of external object;
[0044] Based on the above principle, by arranging the first groove 113 on the cavity wall of the first through cavity 112, the surface area of the cavity wall of the first through cavity 112 is increased; similarly, the heat dissipation fins 14 are arranged on the outer wall of the heat dissipation pipe 12, so as to increase the surface area of the heat dissipation pipe 12, thereby increasing the heat exchange amount and improving the heat exchange efficiency.
[0045] As Figure 1 and Figure 2 shown, in some embodiments, the first groove 113 extends along the axial direction of the first through cavity 112, so as to maximize the area of a single first groove 113; then, by arranging a plurality of first grooves 113, the surface area is further increased, and in the present embodiment, the plurality of first grooves 113 are distributed along the circumferential direction of the first through cavity 112. It can be understood that in other embodiments, the first grooves 113 can also be arranged circumferentially around the cavity wall of the first through cavity 112, and the plurality of first grooves 113 are arranged along the axial direction of the first through cavity 112, and the above-mentioned manner can also increase the surface area of the first through cavity 112.
[0046] As Figure 1As shown in the drawings, in some embodiments, each heat dissipation fin 14 is arranged along the axial direction of the heat dissipation pipe 12 to maximize the surface area of the individual heat dissipation fin 14; in the present embodiment, a plurality of heat dissipation fins 14 are arranged along the circumferential direction of the heat dissipation pipe 12 to further improve the heat exchange efficiency. Further, each heat dissipation fin 14 is provided with a plurality of breaks 141 arranged along the axial direction of the heat dissipation pipe 12, and the breaks 141 extend from the end of the heat dissipation fin 14 away from the heat dissipation pipe 12 to the end of the heat dissipation fin 14 close to the heat dissipation pipe 12, that is, the plurality of breaks 141 divide each heat dissipation fin 14 along the axial direction of the heat dissipation pipe 12 into a plurality of sub-fins, so as to reduce the heat transfer between the sub-fins arranged along the axial direction of the heat dissipation pipe 12, thereby reducing the possibility of heat spreading along the axial direction of the heat dissipation pipe 12 to the outside of the cooling jacket 11. In the present embodiment, the heat dissipation fin 14 is integrally formed with the heat dissipation pipe 12.
[0047] As shown in the drawings, Figure 4 In some embodiments, in order to ensure the stability of the heat dissipation pipe 12, the heat dissipation assembly 10 further comprises a locking sleeve 13, which can be locked on the rotating shaft 22, and the locking sleeve 13 is located below the heat dissipation pipe 12 to abut against the heat dissipation pipe 12 to prevent it from falling due to gravity and other factors.
[0048] As shown in the drawings, Figure 3 and Figure 4 The present application also provides a magnetic fluid sealing mechanism, which comprises a magnetic flow assembly 20 and the heat dissipation assembly 10 described above, the magnetic flow assembly 20 comprises a magnetic flow cavity 21 and a rotating shaft 22, the magnetic flow cavity 21 is used to contain magnetic fluid, and the rotating shaft 22 is connected to the magnetic flow cavity 21; the heat dissipation assembly 10 can be sealingly connected to the magnetic flow cavity 21 and an external cavity, the rotating shaft 22 penetrates the heat dissipation pipe 12 and penetrates into the external cavity, and the heat dissipation pipe 12 can rotate with the rotating shaft 22.
[0049] In some embodiments, the magnetic fluid sealing mechanism further comprises a fixing seat 30, which is located on the side of the heat dissipation assembly 10 away from the magnetic flow assembly 20, and the fixing seat 30 is sealingly connected to the cooling jacket 11. The end of the fixing seat 30 away from the heat dissipation assembly 10 can be sealingly fixed to the external cavity. The fixing seat 30 has a second through cavity 31, and the rotating shaft 22 penetrates the second through cavity 31 to connect the fixing seat 30 to the external cavity.
[0050] Thus, the magnetic flow assembly 20 and the heat dissipation assembly 10 can be fixed to the external cavity through the fixing seat 30, and then the fixing seat 30 can be connected to the external cavity to cooperate with the sealing rotating shaft 22. In use, cooling fluid can be injected into the first flow channel 116 for heat exchange to reduce the temperature of the rotating shaft 22 and the magnetic fluid in the magnetic flow cavity 21, thereby ensuring normal operation.
[0051] It should be noted that the fixing seat 30, the cooling jacket 11 and the magnetic flow cavity 21 can be provided with connecting holes, so that the connection is facilitated. Exemplarily, the connecting holes can be threaded holes. In addition, the locking sleeve 13 is located in the second through cavity 31.
[0052] In order to ensure the sealing between the fixing seat 30 and the magnetic flow cavity 21, in some embodiments, the end surface of the fixing seat 30 facing the magnetic flow cavity 21 is provided with a sealing element surrounding the second through cavity 31. Specifically, the end surface of the fixing seat 30 facing the magnetic flow cavity 21 is provided with a recess 34 surrounding the second through cavity 31, and the sealing element is embedded in the recess 34, so that the end surfaces of the two are sealed by extruding the sealing element through the contact therebetween. Exemplarily, the sealing element is a sealing ring.
[0053] In some embodiments, the fixing seat 30 is provided with a second liquid inlet and a second liquid outlet, wherein the second liquid inlet and the second liquid outlet are communicated through the second flow channel 32 provided in the fixing seat 30, that is, the cooling fluid can be injected into the second flow channel 32, and then the heat exchange is radiated to the cooling fluid in the second flow channel 32 through the rotating shaft 22, so as to further improve the heat exchange efficiency. In combination with the above formula, the second groove 33 is arranged at the inner wall of the second through cavity 31 corresponding to the second flow channel 32, so as to increase the surface area of the inner wall of the second through cavity 31, thereby improving the heat exchange efficiency.
[0054] The application also provides an epitaxial system, which comprises a reaction cavity 40 (the above-mentioned external cavity) and the above-mentioned magnetic fluid sealing mechanism, and the fixing seat 30 is sealed and fixed to the reaction cavity 40 away from the heat dissipation assembly 10, and the rotating shaft 22 penetrates into the reaction cavity 40 to connect the base 50 for fixing the substrate in the reaction cavity 40. Exemplarily, the end of the fixing seat 30 away from the heat dissipation assembly 10 can also be provided with a sealing element, so that the sealing is formed between the fixing seat 30 and the reaction cavity 40. Thus, when the heat in the reaction cavity 40 is transferred to the rotating shaft 22, the heat exchange can be performed through the heat dissipation assembly 10 and the fixing seat 30, so as to reduce the temperature of the rotating shaft 22 and the magnetic fluid in the magnetic flow cavity 21, and ensure the normal operation thereof.
[0055] Obviously, the above embodiments of the application are only examples for clearly illustrating the application, and are not intended to limit the embodiments of the application. For those skilled in the art, various obvious changes, re-adjustments and replacements can be made without departing from the protection scope of the application. It is not necessary and impossible to enumerate all the embodiments. Any modification, equivalent replacement and improvement made within the spirit and principle of the application shall be included in the protection scope of the claims of the application.
Claims
1. A heat dissipating assembly characterized by, The heat dissipation assembly comprises: a cooling jacket (11) provided with a first through cavity (112), a first groove (113) being formed on the cavity wall of the first through cavity (112), the cooling jacket (11) being further provided with a first liquid inlet (114) and a first liquid outlet (115), the first liquid inlet (114) and the first liquid outlet (115) being in communication through a first flow channel (116) arranged in the cooling jacket (11); a heat dissipation pipe (12) arranged in the first through cavity (112), the outer wall of the heat dissipation pipe (12) being provided with heat dissipation fins (14), the heat dissipation pipe (12) being capable of being sleeved on a rotating shaft (22) of a magnetic fluid sealing mechanism and rotating with the rotating shaft (22).
2. The heat dissipation assembly of claim 1, wherein, The first grooves (113) extend along the axial direction of the first through cavity (112), and a plurality of the first grooves (113) are distributed along the circumferential direction of the first through cavity (112).
3. The heat dissipation assembly of claim 1, wherein, Each of the heat dissipation fins (14) extends along the axial direction of the heat dissipation pipe (12), and a plurality of the heat dissipation fins (14) are distributed along the circumferential direction of the heat dissipation pipe (12).
4. The heat dissipation assembly of claim 3, wherein, The heat dissipation fins (14) are each provided with a plurality of fracture sections (141) distributed along the axial direction of the heat dissipation pipe (12).
5. The heat dissipation assembly of claim 1, wherein, The heat dissipation assembly further comprises a locking sleeve (13) capable of being locked on the rotating shaft (22), the locking sleeve (13) being located below the heat dissipation pipe (12) to be capable of abutting against the heat dissipation pipe (12).
6. A magnetic fluid seal mechanism characterized by, The heat dissipation assembly (10) according to any one of claims 1-5 is capable of sealingly connecting the magnetic flow cavity (21) and an external cavity, the rotating shaft (22) penetrating the heat dissipation pipe (12) and penetrating into the external cavity, and the heat dissipation pipe (12) being capable of rotating with the rotating shaft (22). The magnetic fluid sealing mechanism further comprises a fixing seat (30) located on the side of the heat dissipation assembly (10) away from the magnetic flow assembly (20), the fixing seat (30) being sealingly connected to the cooling jacket (11), one end of the fixing seat (30) away from the heat dissipation assembly (10) being capable of being sealingly fixed to the external cavity, and the fixing seat (30) being provided with a second through cavity (31), the rotating shaft (22) penetrating the second through cavity (31). The fixing seat (30) is provided with a second liquid inlet and a second liquid outlet, the second liquid inlet and the second liquid outlet being in communication through a second flow channel (32) arranged in the fixing seat (30).
7. The magnetic fluid seal mechanism of claim 6, wherein, The inner cavity wall of the second through cavity (31) is provided with a second groove (33) corresponding to the second flow channel (32).
8. The magnetic fluid seal mechanism of claim 7, wherein, 9. The magnetic fluid seal mechanism of claim 8, wherein, 10. The magnetic fluid seal mechanism of claim 7, wherein, The end face of the fixed seat (30) facing the magnetic flow cavity (21) is provided with a seal around the second through cavity (31).
11. Epitaxial system comprising a reaction chamber (40), characterized in that Also included is the magnetic fluid sealing mechanism as claimed in any one of claims 6-10, wherein the rotating shaft (22) penetrates into the reaction cavity (40) to connect a pedestal (50) for fixing a substrate inside the reaction cavity (40).