Cooling assembly, magnetofluid sealing mechanism and extension device

Abstract

The utility model belongs to the technical field of CVD equipment, and discloses a cooling assembly, a magnetofluid sealing mechanism and an extension device.The cooling assembly comprises a cooling jacket and a heat dissipation ring, the cooling jacket comprises an annular outer sleeve body, an annular inner sleeve body and a connecting body, the inner sleeve body is arranged in the outer sleeve body, a gap is formed between the inner sleeve body and the outer sleeve body, and the outer sleeve body is arranged in the gap. The inner sleeve body is connected with the outer sleeve body through a connector; a first flow channel is arranged in the outer sleeve body, a second flow channel is arranged in the inner sleeve body, and a first liquid inlet and a first liquid outlet which are communicated with the first flow channel and the second flow channel are further formed in the outer sleeve body; the heat dissipation ring is rotationally inserted into the gap, and the heat dissipation ring can be limited to be connected to a rotating shaft of the magnetofluid sealing mechanism in a sleeving mode so as to rotate along with the rotating shaft; the magnetofluid sealing mechanism and the extension device both comprise the cooling assembly so as to reduce the overall temperature of the rotating shaft and the magnetofluid sealing mechanism.

Description

TECHNICAL FIELD

[0001] The utility model relates to CVD equipment technical field especially relates to a cooling assembly, magnetic fluid sealing mechanism and epitaxial device. BACKGROUND

[0002] Chemical vapor deposition (CVD) can be divided into horizontal type and vertical type, and the uniformity of the epitaxial thickness and the doping concentration of the epitaxial wafer is a key parameter affecting the performance of silicon carbide devices, and the epitaxial wafer of the horizontal type is thinner the farther away from the air inlet position, and the air inlet of the vertical type is located at the center, so the center thickness of the epitaxial wafer is thick and the periphery is thin.

[0003] In the prior art, the rotation of the base drives the rotation of the epitaxial wafer, which can greatly reduce the non-uniformity of the thickness and the doping concentration. However, since the rotating shaft needs to pass through the cavity and be connected with the motor, and the cavity needs to be sealed and maintain a certain degree of vacuum, the magnetic fluid sealing mechanism is usually used to dynamically seal the rotating shaft in the prior art. In the process engineering, the temperature in the cavity can reach up to 1700℃, at which time the temperature conducted on the rotating shaft will also be very high. The working temperature of the ordinary magnetic fluid sealing mechanism is limited to about 80℃-120℃, while the use of special high-temperature carrier liquid and magnetic material can withstand a temperature as high as 300℃. However, at higher temperatures (such as more than 400℃), the performance of the magnetic fluid sealing mechanism will be severely affected, so the magnetic fluid sealing mechanism needs to be cooled during use. SUMMARY

[0004] The utility model discloses a kind of cooling assembly, magnetic fluid sealing mechanism and epitaxial device, to solve the problem of cooling magnetic fluid sealing mechanism.

[0005] To achieve this purpose, the utility model adopts the following technical solutions:

[0006] The cooling assembly comprises:

[0007] The cooling jacket comprises an annular outer sleeve, an annular inner sleeve, and a connecting body. The inner sleeve is nested in the outer sleeve, and a gap is provided between the inner sleeve and the outer sleeve. The inner sleeve and the outer sleeve are connected by the connecting body.

[0008] A first flow channel is provided in the outer sleeve, and a second flow channel is provided in the inner sleeve. A first liquid inlet and a first liquid outlet are provided on the outer sleeve, which communicate with the first flow channel and the second flow channel. A heat dissipation ring is rotatably inserted into the gap. The heat dissipation ring can be sleeved on the rotating shaft of the magnetic fluid sealing mechanism and can rotate relative to the cooling jacket with the rotating shaft.

[0009] In some embodiments, two first liquid inlets and two first liquid outlets are provided, one of the first liquid inlets and one of the first liquid outlets are communicated with the first flow channel, and the other of the first liquid inlets and the other of the first liquid outlets are communicated with the second flow channel through the connecting flow channel of the connecting body.

[0010] In some embodiments, the heat dissipation ring comprises a base plate part and a surrounding plate part, the surrounding plate part is arranged along the circumference of the base plate part, the base plate part can be sleeved on the rotating shaft, and the surrounding plate part is inserted into the gap.

[0011] In some embodiments, the surrounding plate part is provided with a through groove.

[0012] In some embodiments, the connecting body divides the gap along the axial direction of the inner sleeve body into a first gap and a second gap, and the first gap and the second gap are both provided with the heat dissipation ring.

[0013] In some embodiments, the cooling assembly further comprises a locking sleeve, the locking sleeve can be locked on the rotating shaft to abut against the heat dissipation ring in the second gap.

[0014] In some embodiments, the inner cavity wall of the inner sleeve body is provided with a first groove.

[0015] A magnetic fluid sealing mechanism is also provided, which comprises:

[0016] A magnetic flow assembly, which comprises a magnetic flow cavity for containing magnetic fluid and a rotating shaft connected to the magnetic flow cavity;

[0017] A cooling assembly as described above, which can seal and connect the magnetic flow cavity and an external cavity, the rotating shaft penetrates through the heat dissipation ring and into the external cavity, and the heat dissipation ring rotates with the rotating shaft.

[0018] In some embodiments, the magnetic fluid sealing mechanism further comprises a connecting seat, the connecting seat is located on the side of the cooling assembly away from the magnetic flow assembly, one end of the connecting seat is sealed and connected to the cooling jacket, the connecting seat has a through cavity, the rotating shaft penetrates through the through cavity, and the end of the connecting seat away from the cooling assembly can be sealed and fixed to the external cavity.

[0019] In some embodiments, the connecting seat is provided with a second liquid inlet and a second liquid outlet, and the second liquid inlet and the second liquid outlet are communicated through a third flow channel arranged in the connecting seat.

[0020] In some embodiments, the inner cavity wall of the through cavity is provided with a second groove corresponding to the third flow channel.

[0021] Also provided is an epitaxial device comprising a reaction chamber and a magnetic fluid sealing mechanism as described above, the rotating shaft penetrating into the reaction chamber to connect a susceptor inside the reaction chamber for fixing a substrate.

[0022] In some embodiments, the rotating shaft is provided with a monitoring channel penetrating through both ends of the rotating shaft along the axial direction of the rotating shaft, the monitoring channel being communicated with the through channel of the susceptor, and an observation plate is plugged at the port of the monitoring channel outside the reaction chamber; the epitaxial device is further provided with a temperature monitoring member arranged outside the reaction chamber to enable monitoring of the temperature of the substrate through the monitoring channel and the through channel.

[0023] The utility model has the advantages of:

[0024] The heat dissipation ring is sleeved on the rotating shaft, and then inserted in the gap between the inner sleeve body and the outer sleeve body, cooling fluid can be injected into the first flow channel and the second flow channel through the first liquid inlet, and then flows out of the first liquid outlet, so that when the rotating shaft drives the heat dissipation ring to rotate, the heat on the rotating shaft is conducted to the heat dissipation ring, and then the cooling fluid in the first flow channel and the second flow channel can be radiated and exchanged with heat, so as to reduce the temperature of the rotating shaft and the magnetic fluid sealing mechanism as a whole. BRIEF DESCRIPTION OF DRAWINGS

[0025] Figure 1 is the explosion view of the cooling assembly in the utility model;

[0026] Figure 2 is the cross-sectional view of the cooling jacket in the utility model;

[0027] Figure 3 is the schematic view of the heat dissipation ring in the utility model;

[0028] Figure 4 is the schematic view of the magnetic fluid sealing mechanism in the utility model;

[0029] Figure 5 is the cross-sectional view of the magnetic fluid sealing mechanism in the utility model;

[0030] Figure 6 is Figure 5 the enlarged view of A in the utility model;

[0031] Figure 7 is the cross-sectional view of the connecting seat in the utility model.

[0032] In the drawings:

[0033] 10, cooling assembly; 11, cooling jacket; 111, outer sleeve body; 112, inner sleeve body; 113, connecting body; 114, first flow channel; 115, second flow channel; 116, first liquid inlet; 117, first liquid outlet; 118, first recess; 119, first embedding slot; 12, heat dissipation ring; 121, base plate part; 122, surrounding plate part; 123, through slot; 13, locking sleeve;

[0034] 20, magnetic flow assembly; 21, magnetic flow cavity; 22, rotating shaft; 221, limiting step; 23, monitoring channel; 24, observation plate;

[0035] 30, connecting seat; 31, through cavity; 32, third flow channel; 33, second recess; 34, second embedding slot;

[0036] 40, reaction cavity;

[0037] 50, base; 51, through channel;

[0038] 60, temperature monitoring member;

[0039] 70, driving member. DETAILED DESCRIPTION

[0040] The utility model will be described in further detail below in combination with the drawings and examples. It can be understood that the specific examples described here are only used to explain the utility model, and not to limit the utility model. In addition, it should be noted that, in order to facilitate the description, only the part related to the utility model is shown in the drawings, not all structures.

[0041] In the description of the utility model, unless otherwise explicitly specified and limited, the terms "connected", "connected", "fixed" should be understood broadly, for example, it can be fixedly connected, or it can be detachably connected, or it can be integrated, it can be mechanically connected, or it can be electrically connected, it can be directly connected, or it can be indirectly connected through an intermediate medium, it can be the internal communication of two elements or the interaction relationship of two elements. For ordinary skilled in the art, the specific meaning of the above terms in the utility model can be understood according to the specific circumstances.

[0042] In the utility model, unless another definite provision and limitation, first feature is "on" or "under" second feature can include that first and second features are in direct contact, also can include that first and second features are not in direct contact but contact through other feature between them.

[0043] In the description of the embodiment, the terms "upper", "lower", "left", "right", and other orientation or position relationship are based on the orientation or position relationship shown in the drawings, only for the convenience of description and simplification of operation, and do not indicate or imply that the device or element referred to must have a particular orientation, be constructed and operated in a particular orientation, therefore cannot be understood as a limitation on the utility model. In addition, the terms "first", "second" are only used to distinguish in description, and have no special meaning.

[0044] As shown in Figures 1 to 7 The utility model provides a cooling assembly, cooling assembly 10 includes cooling jacket 11 and heat dissipation ring 12, cooling jacket 11 includes annular outer sleeve body 111, annular inner sleeve body 112 and connecting body 113, inner sleeve body 112 is nested in outer sleeve body 111, and gap is arranged between inner sleeve body 112 and outer sleeve body 111, and inner sleeve body 112 and outer sleeve body 111 are connected through connecting body 113;First flow channel 114 is arranged in outer sleeve body 111, second flow channel 115 is arranged in inner sleeve body 112, and first liquid inlet and first liquid outlet of connecting first flow channel 114 and second flow channel 115 are further arranged on outer sleeve body 111;Heat dissipation ring 12 is rotatably inserted in the gap, heat dissipation ring 12 can be sleeved on the rotating shaft 22 of the magnetic fluid sealing mechanism and can rotate relative to cooling jacket 11 along with rotating shaft 22.

[0045] Heat dissipation ring 12 is sleeved on rotating shaft 22, and then is inserted at the gap between inner sleeve body 112 and outer sleeve body 111, cooling fluid is injected into first flow channel 114 and second flow channel 115 through first liquid inlet, and then flows out from first liquid outlet, and then when rotating shaft 22 drives heat dissipation ring 12 to rotate, the heat on rotating shaft 22 is conducted to heat dissipation ring 12, and then can be radiated and exchanged heat with cooling fluid in first flow channel 114 and second flow channel 115, to reduce the temperature of rotating shaft 22 and the whole magnetic fluid sealing mechanism.

[0046] In the current embodiment, outer sleeve body 111, inner sleeve body 112 and connecting body 113 are integrally formed.

[0047] In some embodiments, the first liquid inlet 116 and the first liquid outlet 117 are both provided with two, one of the first liquid inlet 116 and one of the first liquid outlet 117 are communicated with the first flow channel 114; the other of the first liquid inlet 116 and the other of the first liquid outlet 117 are communicated with the second flow channel 115 through the connecting flow channel provided in the connecting body 113, so that the cooling fluid can be injected into the first flow channel 114 through one of the first liquid inlets 116 and discharged through one of the first liquid outlets 117, and the cooling fluid can be injected into the second flow channel 115 through the other of the first liquid inlets 116 and discharged through the other of the first liquid outlets 117, without interfering with each other.

[0048] As shown in Figure 1 and Figure 3 In some embodiments, in order to facilitate the installation of the heat dissipation ring 12, the heat dissipation ring 12 includes an annular base plate part 121 and a surrounding plate part 122, the surrounding plate part 122 is arranged along the circumference of the base plate part 121, so that the heat dissipation ring 12 is in a groove type in the longitudinal section, the base plate part 121 is tightly sleeved on the rotating shaft 22 to rotate with the rotating shaft 22, and the surrounding plate part 122 is inserted between the gaps to radiate heat.

[0049] According to formula one: Q1 = ∈ 12 C0[(T1 / 100) 4 -(T2 / 100) 4 ]φ 12 F1;

[0050] Formula two: φ 12 = F2 / F1, φ 21 = 1;

[0051] Formula three: ∈ 12 = 1((1 / ∈1-1)φ 12 +(1 / ∈2-1)φ 21 +1);

[0052] Q1: radiation heat transfer heat; C O : black body radiation coefficient; F1: surface area of internal object; F2: surface area of external object; T1: high temperature object surface temperature; T2: low temperature object surface temperature; ∈1: black body radiation coefficient of internal object; ∈2: black body radiation coefficient of external object;

[0053] Based on the theoretical formula, in some embodiments, the through grooves 123 are arranged on the surrounding plate 122 to increase the surface area of the heat dissipation ring 12 and increase the heat dissipation amount. In the present embodiment, a plurality of through grooves 123 are arranged at intervals in the circumferential direction of the surrounding plate 122. The through grooves 123 extend from one end of the surrounding plate 122 away from the base plate 121 to the other end, that is, the through grooves 123 are arranged in the axial direction of the base plate 121 to maximize the surface area.

[0054] Also based on the above formula, as shown in Figure 2 The inner cavity wall of the inner sleeve 112 is provided with a first groove 118 to increase the surface area of the inner sleeve 112, thereby increasing F2 and Q1, that is, the heat dissipation amount of the rotating shaft 22 to the cooling jacket 11 through radiation heat exchange is increased, and the heat exchange efficiency is further improved. In the present embodiment, the first grooves 118 are arranged in the circumferential direction around the inner cavity wall of the inner sleeve 112, and a plurality of first grooves 118 are distributed in the axial direction of the inner sleeve 112.

[0055] In order to further improve the heat exchange efficiency, as shown in Figure 2 and Figure 5 In some embodiments, the connecting body 113 divides the above-mentioned gap into a first gap and a second gap in the axial direction of the inner sleeve 112, and the first gap and the second gap are both provided with a heat dissipation ring 12, and the number of heat dissipation rings 12 is increased to improve the heat exchange efficiency.

[0056] In some embodiments, as shown in Figure 5 The cooling assembly 10 further comprises a locking sleeve 13 which can be locked on the rotating shaft 22 to abut the heat dissipation ring 12 in the second gap from below, so as to prevent the heat dissipation ring 12 in the second gap from falling off due to gravity.

[0057] The application also provides a magnetic fluid sealing mechanism which comprises a magnetic flow assembly 20 and the above-mentioned cooling assembly 10. The magnetic flow assembly 20 comprises a magnetic flow cavity 21 and a rotating shaft 22. The magnetic flow cavity 21 is used for containing magnetic fluid. The rotating shaft 22 is connected to the magnetic flow cavity 21. The magnetic flow cavity 21, the magnetic fluid and the rotating shaft 22 are all prior art and will not be described here. The cooling assembly 10 can be sealingly connected to the magnetic flow cavity 21 and an external cavity. The rotating shaft 22 penetrates the heat dissipation ring 12 in the cooling assembly 10 and penetrates into the external cavity, so that the heat dissipation ring 12 rotates with the rotating shaft 22. Then, the magnetic fluid in the magnetic flow cavity 21 and the rotating shaft 22 can be cooled by injecting cooling fluid into the cooling jacket 11, thereby ensuring normal operation.

[0058] In some embodiments, the magnetic fluid sealing mechanism further comprises a connecting seat 30, which is located on the side of the cooling assembly 10 away from the magnetic flow assembly 20, and is sealingly connected to the cooling jacket 11 at one end, and is sealingly fixed to the external cavity at the end away from the cooling assembly 10. The connecting seat 30 has a through cavity 31, and the rotating shaft 22 passes through the through cavity 31 and enters the external cavity. The heat dissipation ring 12 in the cooling assembly 10 can be fixed on the magnetic flow cavity 21 through the connecting seat 30, and the connecting seat 30 is connected with the external cavity to cooperate with the sealing of the rotating shaft 22.

[0059] In the current embodiment, as shown in Figure 5 and Figure 6 , the locking sleeve 13 is located in the through cavity 31 of the connecting seat 30. In addition, since the heat dissipation ring 12 located in the second gap is limited by the locking sleeve 13, in order to also limit the heat dissipation ring 12 located in the first gap, a limiting step 221 is arranged on the rotating shaft 22, and when the heat dissipation ring 12 located in the first gap is sleeved on the rotating shaft 22, the base plate part 121 of the heat dissipation ring 12 is limited on the limiting step 221. It can be understood that the rotating shaft 22 can also have a limiting step 221 corresponding to the position of the heat dissipation ring 12 in the second gap.

[0060] As shown in Figure 1 , in some embodiments, in order to ensure sealing, the end face of the outer sleeve body 111 facing the magnetic flow cavity 21 is provided with a sealing element surrounding the inner sleeve body 112, so as to be sealed by the sealing element when the outer sleeve body 111 abuts against the magnetic flow cavity 21. Specifically, the end face of the outer sleeve body 111 facing the magnetic flow cavity 21 is provided with a first embedding groove 119, and the sealing element is embedded in the first embedding groove 119. Exemplarily, the sealing element is a sealing ring. Similarly, as shown in Figure 7 , in order to ensure the sealing of the contact between the connecting seat 30 and the outer sleeve body 111, the side of the connecting seat 30 facing the outer sleeve body 111 is provided with a second embedding groove 34 surrounding the through cavity 31, and a sealing element is also embedded in the second embedding groove 34 for sealing. Exemplarily, the sealing element is an O-ring.

[0061] In some embodiments, the connecting seat 30 is further provided with a second liquid inlet and a second liquid outlet, which are communicated through a third flow channel 32 arranged in the connecting seat 30, so that the cooling fluid is injected into the third flow channel 32 through the second liquid inlet and discharged from the second liquid outlet, thereby being able to exchange heat with the rotating shaft 22 through the connecting seat 30, further improving the heat exchange efficiency. Further, the inner cavity wall of the through cavity 31 is provided with a second groove 33 corresponding to the third flow channel 32, so as to increase the surface area through the second groove 33 and improve the heat exchange efficiency, and the specific principle will not be repeated. In the present embodiment, the second groove 33 is arranged along the circumferential direction of the inner cavity wall of the through cavity 31, and a plurality of second grooves 33 are distributed along the axial direction thereof. In addition, in order to facilitate fixation, the outer sleeve body 111, the connecting seat 30 and the magnetic flow cavity body 21 can all be provided with connecting holes for convenient connection and fixation; the connecting holes can be threaded holes.

[0062] The application also provides an epitaxial device, which comprises a reaction cavity 40 (the above-mentioned external cavity) and the above-mentioned magnetic fluid sealing mechanism, and the connecting seat 30 is sealed and fixed to the reaction cavity 40 away from the cooling assembly 10, so as to be connected to a susceptor 50 for fixing a substrate in the reaction cavity 40 through the rotating shaft 22. In some embodiments, the connecting seat 30 can also be provided with a sealing member at the contact position with the reaction cavity 40 for sealing, while in other embodiments, the connecting seat 30 and the reaction cavity 40 can be welded to improve the sealing performance.

[0063] In some embodiments, the rotating shaft 22 is provided with a monitoring channel 23 and an observation plate 24, the monitoring channel 23 penetrates the rotating shaft 22 along the axial direction of the rotating shaft 22, and the monitoring channel 23 is also communicated with a through channel 51 of the susceptor 50. The observation plate 24 is sealed at the port of the monitoring channel 23 located outside the reaction cavity 40, and the observation plate 24 is made of quartz; the epitaxial device is further provided with a temperature monitoring member 60, which monitors the temperature of the substrate in real time through the observation plate 24, the monitoring channel 23 and the through channel 51, thereby providing a basis for real-time temperature adjustment. Exemplarily, the temperature monitoring member 60 is an infrared sensor.

[0064] In some embodiments, the epitaxial device further comprises a driving member 70, an output end of the driving member 70 being connected to the rotating shaft 22, so as to drive the rotating shaft 22 to rotate, and further drive the susceptor 50 and the substrate on the susceptor 50 to rotate. In the present embodiment, the driving member 70 is a torque motor, which is connected to the end of the rotating shaft 22 far away from the susceptor 50, so as to drive the susceptor 50 to rotate through the torque motor. Compared with the conventional motor, the torque motor reduces the intermediate transmission components such as the belt and the synchronous wheel for the rotating shaft 22. When the intermediate transmission components are used, the belt needs to be taut to realize the transmission when driving the synchronous wheel, and the force generated by the tautness will cause the synchronous wheel and the whole reaction cavity 40 to have a certain eccentricity, and the rotating shaft 22 also has a certain eccentricity. When the rotating shaft 22 rotates, the eccentricity will cause the susceptor 50 to shake, and the longer the rotating shaft 22 is, the more obvious the shaking is, and the substrate is easy to be thrown off from the susceptor 50. The torque motor is directly connected to the rotating shaft 22, and the above transmission components are omitted, so as to reduce the mechanical friction, noise and transmission error; reduce the wear and maintenance of mechanical parts, and prolong the service life of the equipment. Moreover, since the intermediate transmission components are eliminated, high-precision positioning control can be realized, and the shaking is also reduced when the rotating shaft 22 drives the susceptor 50 to rotate.

[0065] Obviously, the above embodiments of the utility model are only examples for clearly explaining the utility model, and are not the limitation of the embodiments of the utility model. For ordinary skilled in the art, various obvious changes, re-adjustment and replacement can be made without departing from the protection scope of the utility model. Here, it is not necessary and impossible to enumerate all the embodiments. Any modification, equivalent replacement and improvement made in the spirit and principle of the utility model should be included in the protection scope of the utility model claim.

Claims

1. A cooling assembly, characterized by, The application relates to a cooling assembly (10), which comprises: a cooling jacket (11), which comprises an annular outer sleeve body (111), an annular inner sleeve body (112) and a connecting body (113), the inner sleeve body (112) is nested in the outer sleeve body (111), a gap is arranged between the inner sleeve body (112) and the outer sleeve body (111), and the inner sleeve body (112) and the outer sleeve body (111) are connected through the connecting body (113); a first flow channel (114) is arranged in the outer sleeve body (111), a second flow channel (115) is arranged in the inner sleeve body (112), and a first liquid inlet (116) and a first liquid outlet (117) are arranged on the outer sleeve body (111) and communicate with the first flow channel (114) and the second flow channel (115); a heat dissipation ring (12) is rotatably inserted into the gap, the heat dissipation ring (12) can be sleeved on a rotating shaft (22) of a magnetic fluid sealing mechanism and can rotate relative to the cooling jacket (11) along with the rotating shaft (22).

2. The cooling assembly of claim 1, wherein, The first liquid inlet (116) and the first liquid outlet (117) are each provided with two, one of the first liquid inlets (116) and one of the first liquid outlets (117) communicate with the first flow channel (114); the other first liquid inlet (116) and the other first liquid outlet (117) communicate with the second flow channel (115) through a connecting flow channel penetrating the connecting body (113).

3. The cooling assembly of claim 1, wherein, The heat dissipation ring (12) comprises an annular base plate part (121) and a surrounding plate part (122), the surrounding plate part (122) is arranged along the circumference of the base plate part (121), the base plate part (121) can be sleeved on the rotating shaft (22), and the surrounding plate part (122) is inserted into the gap.

4. The cooling assembly of claim 3, wherein, Through grooves (123) are arranged on the surrounding plate part (122).

5. The cooling assembly of claim 1, wherein, The connecting body (113) divides the gap into a first gap and a second gap along the axial direction of the inner sleeve body (112), and the first gap and the second gap are each provided with the heat dissipation ring (12).

6. The cooling assembly of claim 5, wherein, The cooling assembly (10) further comprises a locking sleeve (13), which can be locked on the rotating shaft (22) to abut against the heat dissipation ring (12) located in the second gap.

7. The cooling assembly of claim 1, wherein, A first groove (118) is arranged on the inner cavity wall of the inner sleeve body (112).

8. A magnetic fluid seal mechanism characterized by, The application relates to a magnetic flow assembly (20), which comprises a magnetic flow cavity (21) and a rotating shaft (22), the magnetic flow cavity (21) is used for containing magnetic fluid, and the rotating shaft (22) is connected to the magnetic flow cavity (21); The cooling assembly (10) can seal and connect the magnetic flow cavity (21) and an external cavity, the rotating shaft (22) penetrates the heat dissipation ring (12) and penetrates into the external cavity, and the heat dissipation ring (12) rotates along with the rotating shaft (22). ​ 9. The magnetic fluid seal mechanism of claim 8, wherein, The magnetic fluid sealing mechanism further comprises a connecting seat (30) located on the side of the cooling assembly (10) away from the magnetic flow assembly (20), one end of the connecting seat (30) being sealingly connected to the cooling jacket (11), the connecting seat (30) having a through cavity (31) through which the rotating shaft (22) passes, and the end of the connecting seat (30) away from the cooling assembly (10) being sealingly fixed to the external cavity.

10. The magnetic fluid seal mechanism of claim 9, wherein, The connecting seat (30) is provided with a second liquid inlet and a second liquid outlet, and the second liquid inlet and the second liquid outlet are communicated through a third flow channel (32) arranged in the connecting seat (30).

11. The magnetic fluid seal mechanism of claim 10, wherein, The inner cavity wall of the through cavity (31) is provided with a second groove (33) corresponding to the third flow channel (32).

12. Epitaxial apparatus comprising a reaction chamber (40), characterized in that The magnetic fluid sealing mechanism further comprises a rotating shaft (22) penetrating into the reaction cavity (40) to connect a susceptor (50) for fixing a substrate in the reaction cavity (40).

13. The epitaxial apparatus of claim 12, wherein, The rotating shaft (22) is provided with a monitoring channel (23) and an observation plate (24), the monitoring channel (23) penetrating through both ends of the rotating shaft (22) along the axial direction of the rotating shaft (22), the monitoring channel (23) being communicated with a through channel (51) of the susceptor (50), and the observation plate (24) being blocked at the port of the monitoring channel (23) located outside the reaction cavity (40); the epitaxial device is further provided with a temperature monitoring member (60) arranged outside the reaction cavity (40) to enable the temperature of the substrate to be monitored through the monitoring channel (23) and the through channel (51).

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