Vacuum pump exhaust monitoring system

Abstract

The utility model provides a vacuum pump exhaust monitoring system, and belongs to the technical field of vacuum pump exhaust systems. The vacuum pump exhaust monitoring system comprises an annular channel and a connector arranged between exhaust pipes at the tail of a vacuum pump, and the annular channel is provided with an air inlet and an air outlet; the first sealing piece and the second sealing piece are arranged on the two sides of the annular channel correspondingly and used for sealing the inner cavity of the exhaust pipe and the annular channel and sealing the annular channel and the atmosphere side correspondingly; the gas inlet pipeline and the gas outlet pipeline are respectively connected with the gas inlet and the gas outlet of the annular channel, and a gas detection structure is arranged on the gas inlet pipeline and / or the gas outlet pipeline; inert gas enters the annular channel through the gas inlet pipeline and then is exhausted through the gas exhaust pipeline, a monitoring loop is formed, whether gas leakage occurs at the connecting joint or not is judged according to the detection result of the gas detection structure, detection and maintenance are facilitated, leakage of harmful gas or combustible gas is delayed, and meanwhile the downtime and shutdown time of the vacuum pump can be delayed.

Description

TECHNICAL FIELD

[0001] The present disclosure belongs to the technical field of exhaust system of vacuum pump, and particularly relates to a vacuum pump exhaust monitoring system capable of detecting gas leakage. BACKGROUND

[0002] The vacuum system may involve discharging toxic, harmful or dangerous flammable gas, which needs to be discharged through the exhaust pipeline, and the harmful components are treated and discharged.

[0003] Due to the long exhaust pipeline of the factory, there are some elbow and straight head connection areas, which are connected through sealing members and other connecting members. Relative to the overall exhaust pipeline, these pipeline connection areas are the most likely places to leak. If these pipeline connection areas leak, colorless leakage gas is not easy to detect, and the leakage cannot be discovered in the first time, which may cause certain safety problems and affect the operation of the vacuum pump or other equipment. Moreover, if the leakage gas is a toxic and harmful chemical gas, inhalation hazard may occur, and if the leakage gas is a flammable gas, combustion or explosion may occur when it combines with oxygen in the air or flammable and explosive gas. CONTENT OF THE UTILITY MODEL

[0004] The present disclosure aims to at least solve one of the technical problems existing in the prior art, and provides a vacuum pump exhaust monitoring system.

[0005] The present disclosure provides a vacuum pump exhaust monitoring system, which comprises:

[0006] An annular channel is arranged at the connecting joint between the exhaust pipes at the tail of the vacuum pump, and the annular channel has an air inlet and an air outlet;

[0007] First and second sealing members are arranged on the two sides of the annular channel, respectively, and are used for sealing the inner cavities of the exhaust pipes and the annular channel, and the annular channel and the atmosphere side, respectively;

[0008] An air inlet pipeline and an air outlet pipeline are connected with the air inlet and the air outlet of the annular channel, respectively, and a gas detection structure is arranged on the air inlet pipeline and / or the air outlet pipeline;

[0009] Inert gas enters the annular channel from the air inlet pipeline, and is then discharged through the air outlet pipeline to form a monitoring loop, and the detection result of the gas detection structure is used to determine whether gas leakage occurs at the connecting joint.

[0010] Optionally, when the connecting joint between the two exhaust pipes is a flange, the connecting end surface of the flange is provided with the annular channel, a first annular groove and a second annular groove along the circumferential direction thereof, respectively;

[0011] The first annular groove is located between the annular channel and the exhaust pipe inner cavity, and the first sealing element is embedded in the first annular groove;

[0012] The second annular groove is located between the annular channel and the atmosphere side, and the second sealing element is embedded in the second annular groove.

[0013] Optionally, an inner annular support is arranged between the two flanges, and an outer annular support connected with the inner annular support; wherein,

[0014] The annular channel is located between the inner annular support and the outer annular support in the radial direction;

[0015] The first sealing element is arranged in the inner annular support;

[0016] The second sealing element is arranged in the outer annular support.

[0017] Optionally, the outer annular support is further connected with an anti-extrusion support on the side away from the inner annular support.

[0018] Optionally, when one of the two exhaust pipe connection ends is inserted into the other exhaust pipe connection end, the two connection ends form the connection joint;

[0019] The one of the connection ends is provided with the annular channel, the first annular groove and the second annular groove on the curved surface thereof in the circumferential direction respectively towards the curved surface of the other connection end;

[0020] The first annular groove is located between the annular channel and the exhaust pipe inner cavity, and the first sealing element is embedded in the first annular groove;

[0021] The second annular groove is located between the annular channel and the atmosphere side, and the second sealing element is embedded in the second annular groove.

[0022] Optionally, the two exhaust pipes are respectively provided with a first fixing part and a second fixing part at the connection, and the first fixing part and the second fixing part are connected by a fixing element.

[0023] Optionally, the gas detection structure is a pressure gauge.

[0024] Optionally, the gas detection structure is a flow meter.

[0025] Optionally, the gas inlet pipeline and the gas exhaust pipeline are both connected to a gas storage tank, and the gas inlet pipeline is provided with a gas pump.

[0026] Optionally, the gas detection structure is further electrically connected with a controller, and the controller comprises a monitoring module and an alarm module; wherein,

[0027] The monitoring module is configured to monitor a detection result of the gas detection structure.

[0028] The alarm module is configured to send an alarm signal according to the detection result.

[0029] The present disclosure provides a vacuum pump exhaust monitoring system. An annular channel is arranged at a connecting joint between exhaust pipes at the tail of a vacuum pump, and an air inlet pipe and an exhaust pipe are arranged at the air inlet and the air outlet of the annular channel. Inert gas is introduced into the air inlet pipe, and is discharged to the exhaust pipe through the annular channel to form a monitoring loop. When gas leakage occurs at the connecting joint between the exhaust pipes at the tail of the vacuum pump, the gas detection structure can detect the gas leakage result. According to the detection result, it can be determined whether gas leakage occurs at the connecting structure. The system can timely find the leakage problem at the connecting joint between the exhaust pipes at the tail of the vacuum pump, trigger an alarm, facilitate detection and maintenance, delay the leakage of harmful gas or flammable gas, and delay the downtime of the vacuum pump. BRIEF DESCRIPTION OF DRAWINGS

[0030] Figure 1 FIG. 1 is a structural schematic diagram of a vacuum pump exhaust monitoring system according to Embodiment 1 of the present disclosure;

[0031] Figure 2 FIG. 2 is a structural schematic diagram of a vacuum pump exhaust monitoring system according to Embodiment 2 of the present disclosure at a connecting joint between exhaust pipes;

[0032] Figure 3 FIG. 3 is a structural schematic diagram of a vacuum pump exhaust monitoring system according to Embodiment 2 of the present disclosure at a connecting joint between exhaust pipes;

[0033] Figure 4 FIG. 4 is a structural schematic diagram of a vacuum pump exhaust monitoring system according to Embodiment 3 of the present disclosure at a connecting joint between exhaust pipes;

[0034] Figure 5 FIG. 5 is a structural schematic diagram of a vacuum pump exhaust monitoring system according to Embodiment 3 of the present disclosure at a connecting joint between exhaust pipes;

[0035] Figure 6 FIG. 6 is a structural schematic diagram of a vacuum pump exhaust monitoring system according to Embodiment 4 of the present disclosure at a connecting joint between exhaust pipes;

[0036] Figure 7 FIG. 7 is a schematic diagram of a sealing structure in a vacuum pump exhaust monitoring system according to Embodiment 4 of the present disclosure. DETAILED DESCRIPTION

[0037] In order for those skilled in the art to better understand the technical solutions of the present disclosure, the present disclosure will be further described in detail below in conjunction with the drawings and specific embodiments. It should be understood that the specific embodiments described herein are only used to explain the present disclosure and are part of the embodiments of the present disclosure, but not all the embodiments. Based on the embodiments of the present disclosure, all other embodiments obtained by those skilled in the art without creative labor fall within the protection scope of the present disclosure.

[0038] In some descriptions of the present disclosure, the terms "comprising" or "including" and the like do not limit the mentioned shapes, numbers, steps, actions, operations, components, elements and / or groups thereof, nor exclude the presence or addition of one or more other different shapes, numbers, steps, actions, operations, components, elements and / or groups thereof.

[0039] In some descriptions of the present disclosure, the terms "first", "second" are only for descriptive purposes, and cannot be understood as indicating or implying relative importance or implicitly indicating the number and order of the indicated technical features.

[0040] In some descriptions of the present disclosure, the terms "mounting", "connecting", "connecting" or "fixing" and the like are not limited to physical or mechanical connection, but can include electrical connection, whether direct or indirect through intermediate media, can be the internal communication of two elements or the interaction relationship between two elements.

[0041] In some descriptions of the present disclosure, the terms "center", "longitudinal", "transverse", "length", "width", "thickness", "upper", "lower", "front", "rear", "left", "right", "vertical", "horizontal", "top", "bottom", "inner", "outer" and the like indicate the orientation or positional relationship shown in the drawings, and are only used to represent the relative positional relationship. When the absolute position of the described object changes, the relative positional relationship may also change accordingly.

[0042] As Figures 1 to 6As shown, the present disclosure proposes a vacuum pump exhaust monitoring system capable of detecting gas leakage, which comprises: an annular channel 61, a first sealing member 621, a second sealing member 622, an air inlet pipeline 41 and an exhaust pipeline 51; wherein the annular channel 61 is arranged at the connecting joint between the exhaust pipes at the tail of the vacuum pump 11, and the annular channel 61 has an air inlet 65 and an air outlet 66; the first sealing member 621 and the second sealing member 622 are arranged on both sides of the annular channel 61 respectively, and the first sealing member 621 is used for sealing between the inner cavities of the two exhaust pipes and the annular channel 61, and the second sealing member 622 is used for sealing between the annular channel 61 and the outside atmosphere; the air inlet pipeline 41 is connected with the air inlet of the annular channel 61, and the exhaust pipeline 51 is connected with the air outlet of the annular channel 61, and a gas detection structure is arranged on the air inlet pipeline 41 and / or the exhaust pipeline 51. Based on the above structure, the inert gas enters the annular channel 61 from the air inlet pipeline 41, and then is discharged through the exhaust pipeline 51, forming a monitoring loop, and whether the gas leakage occurs at the connecting joint is determined by judging whether the detection data of the gas detection structure changes.

[0043] In the present embodiment, by arranging the exhaust monitoring system at the connecting joint between the exhaust pipes at the tail of the vacuum pump, by introducing the inert gas with stable pressure into the air inlet pipeline in the exhaust monitoring system, and by judging whether the detection data of the gas detection structure changes, it is determined whether the gas leakage occurs at the connecting joint. For example, when there is no gas leakage, the inert gas enters the annular channel from the air inlet pipeline, and then is discharged through the exhaust pipeline, and at this time, the value of the gas detection structure does not change and remains stable; when the gas leakage occurs at the connecting joint between the exhaust pipes at the tail of the vacuum pump, the leaked gas flows into the annular channel from the inner cavities of the exhaust pipes through the first sealing member, and further enters the air inlet pipeline or the exhaust pipeline, thereby causing the detection data of the gas detection structure to change, and it is inferred that the gas leakage occurs at the connecting joint. Based on the system, the gas leakage can be found at the first time, and the maintenance personnel can timely check and maintain the pipeline, thereby avoiding the occurrence of safety accidents.

[0044] It should be noted that the system of the present embodiment is used for monitoring whether the gas leakage occurs at the connecting joint of the exhaust pipes between the vacuum pump and the combustion equipment. These exhaust pipes are located at the tail of the vacuum pump and are used for discharging the process gas of the vacuum pump. Based on the system, the gas leakage can be accurately judged, and the exhaust pipes can be timely checked and repaired.

[0045] It should be further noted that the arrangement position of the system is not limited in the present embodiment. The vacuum pump exhaust monitoring system can be arranged at the connecting joint of all exhaust pipes arranged between the tail of the vacuum pump and the plant, or the vacuum pump exhaust monitoring system can be arranged at the connecting joint of some exhaust pipes which have the risk of gas leakage.

[0046] It still needs to be explained that one side of the annular channel is sealed with the exhaust pipe lumen through the first sealing piece, so that when the first sealing piece is damaged or broken, the gas leakage of the exhaust pipe lumen can be detected in time. In addition, the other side of the annular channel is also sealed with the atmosphere side through the second sealing piece, so that when the second sealing piece is damaged or broken, whether air enters the annular channel can be detected in time.

[0047] It still needs to be explained that the gas detection structure and its setting position are not limited in this embodiment. The gas detection structure can be a pressure gauge, a flow meter, or both. When the pressure gauge fails, the flow meter can continue to obtain gas data, improving the accuracy of the detection data. Of course, the pressure gauge and / or flow meter can be set in the air inlet pipeline or the exhaust pipeline, or both.

[0048] For example, as shown in Figure 1 , the air inlet pressure gauge 42 and the air inlet flow meter 43 are arranged in the air inlet pipeline 41 to obtain the pressure value and flow value of the gas. When one or both of them changes, it is judged that the connection joint between the exhaust pipes leaks gas. The exhaust pressure gauge 52 is arranged in the exhaust pipeline 51 to obtain the pressure value of the gas. Of course, in other embodiments, an exhaust flow meter can also be arranged in the exhaust pipeline, which is not limited.

[0049] It still needs to be explained that in order to analyze and judge the detection value of the pressure gauge or flow meter, a controller can also be arranged to automatically judge whether the connection joint between the exhaust pipes leaks gas, improving the judgment efficiency.

[0050] For example, as shown in Figure 1 , the air inlet pressure gauge 42, the air inlet flow meter 43 and the exhaust pressure gauge 52 are electrically connected with the controller 33. The controller includes a monitoring module and an alarm module. The monitoring module is used to monitor the pressure value and flow value of the pressure gauge and flow meter respectively. The alarm module is used to send an alarm signal according to the pressure value and flow value.

[0051] Further, as shown in Figures 1 to 6 , the air inlet pipeline 41 should also be connected with the gas storage tank 31, and a gas pump 32 is arranged in the connected air inlet pipeline. The gas storage tank 31 provides inert gas, and the gas pump 32 extracts inert gas from the gas storage tank 31. The inert gas flows into the annular channel 61 through the air inlet pipeline 41. Of course, the gas storage tank 31 here can also be connected with the exhaust pipeline 51. In this way, the inert gas flows out of the gas storage tank 31, enters the annular channel 61 arranged between the two exhaust pipes through the air inlet pipeline 41, and then flows back to the gas storage tank 31 through the exhaust pipeline 51, forming a gas monitoring loop, and the inert gas can be recycled.

[0052] It should be understood that when the vacuum pump exhaust monitoring system is arranged on the plurality of connection joints, each intake pipeline can be connected to only one gas storage tank, that is, a plurality of intake pipelines can be connected to one total intake pipeline, the total intake pipeline is connected to the gas storage tank, and a gas pump is arranged on the total intake pipeline. Meanwhile, a plurality of exhaust pipelines can also be connected to one total exhaust pipeline, the total exhaust pipeline is connected to the gas storage tank, thereby saving the gas storage equipment and pipelines and reducing the cost.

[0053] It should also be understood that, in order to facilitate the connection of each intake pipeline to the total intake pipeline, an intake connection joint can be arranged at the intake end of each intake pipeline, and the plurality of intake pipelines are connected to the total intake pipeline through the intake connection joint. Similarly, the connection mode of each exhaust pipeline to the total exhaust pipeline can also be the same as described above. In addition, it is not difficult to understand that, for the annular channel, an intake connecting member, such as an intake connecting pipeline or an intake connecting joint, can also be arranged at the intake port and the exhaust port, respectively, to realize the quick connection of the intake pipeline, the exhaust pipeline and the annular channel, thereby improving the operation efficiency.

[0054] It should also be understood that, since the annular channel is arranged at the connection joint between the two exhaust pipes, the annular channel can be arranged at the connection end of the connection joint to form a gas passage through which the inert gas can pass. It should be noted that the annular channel needs to be arranged according to the type of the connection joint, and the arrangement position is not limited. For example, when the two exhaust pipes are connected through flanges, the connection joint is a flange, and the annular channel should be arranged at the connection end of the flange. For another example, when the two exhaust pipes are connected through bolts and one exhaust pipe is inserted into the other exhaust pipe, the two exhaust pipes are connected through the respective end portions, that is, the connection joint is the connection end of the exhaust pipe, and the annular channel should be arranged at the connection end of the exhaust pipe.

[0055] In some preferred embodiments, when the two exhaust pipes are connected through flanges, one side of the two flanges connected to each other is the connection end, and the connection end of one flange is arranged with an annular channel, a first annular groove and a second annular groove along the circumferential direction thereof. Of course, the first annular groove and the second annular groove can also be arranged along the circumferential direction of the connection end of the other flange, the first annular groove is located between the annular channel and the inner cavity of the exhaust pipe, the first sealing member is embedded in the first annular groove, the second annular groove is located between the annular channel and the atmosphere side, and the second sealing member is embedded in the second annular groove. In this case, the flange side away from the connection end face should be provided with an intake port and an exhaust port in communication with the annular channel, the intake port is connected to the intake pipeline, the exhaust port is connected to the exhaust pipeline, and a monitoring loop is formed. Of course, an intake connecting member can also be arranged on the intake port to facilitate the connection to the intake pipeline, and an exhaust connecting member can also be arranged on the exhaust port to facilitate the connection to the exhaust pipeline.

[0056] In some preferred embodiments, when the two exhaust pipes are connected by flanges, the side of the two connecting flanges is the connecting end, the connecting end of one of the flanges is provided with an annular channel along the circumference thereof, an inner annular support is arranged between the two flanges, and an outer annular support is connected to the inner annular support, the annular channel is located between the inner annular support and the outer annular support in the radial direction, the first sealing member is arranged on the inner annular support, and the second sealing member is arranged on the outer annular support. That is, the first sealing member and the second sealing member can be arranged on the support structure in addition to being embedded in the annular groove of the connecting end of the flange, as long as they can seal the annular channel.

[0057] In some preferred embodiments, when the two exhaust pipes are connected by bolts and one of the exhaust pipes is inserted into the other, an annular channel, a first annular groove, and a second annular groove can be formed along the circumference of the curved surface of the connecting end of one of the exhaust pipes facing the other, the first annular groove is located between the annular channel and the inner cavity of the exhaust pipe, the first sealing member is embedded in the first annular groove, the second annular groove is located between the annular channel and the atmosphere side, and the second sealing member is embedded in the second annular groove. For example, the annular channel, the first annular groove, and the second annular groove can be arranged on the curved surface of the connecting end of the exhaust pipe inserted inside, or the channel, the first annular groove, and the second annular groove can be arranged on the connecting end of the exhaust pipe outside. It should be noted that in the above two cases, the inlet and outlet connected to the annular channel should be arranged on the exhaust pipe outside, the inlet is connected to the inlet pipeline, the outlet is connected to the outlet pipeline, and a monitoring loop is formed. Similarly, an inlet connector can also be arranged on the inlet to facilitate connection to the inlet pipeline, and an outlet connector can be arranged on the outlet to facilitate connection to the outlet pipeline.

[0058] Based on the above structure, the vacuum pump is in a negative pressure environment, and the annular channel in the vacuum pump exhaust monitoring system is connected to inert gas with constant pressure. The pressure can be set according to actual needs. For example, if the pressure is higher than the atmospheric pressure, when a problem occurs at the connection of the exhaust pipe at the tail of the vacuum pump, such as damage or breakage of the connecting joint or the first sealing member, the pressure in the annular channel will be greater than the pressure in the inner cavity of the exhaust pipe, and the inert gas in the annular channel will be quickly absorbed into the inner cavity of the exhaust pipe. If the second sealing member or the connecting joint is damaged or broken, the outside is the atmosphere, and the inert gas in the annular channel will flow out through the first sealing member, causing fluctuations in the pressure value or the flow value. Based on the real-time monitoring of the pressure value and the flow value by the pressure gauge or the flow meter, it can be determined that the gas is leaking, and the location of the damage or breakage can be further determined. The system will issue an alarm, or the gas leakage signal can be transmitted to the main machine by the controller according to the needs, so that the abnormal condition of the exhaust pipe at the tail of the vacuum pump can be detected in the first time.

[0059] The system of the embodiment can timely monitor the leaked gas of the exhaust pipe at the tail of the vacuum pump, accurately locate the position of the gas leakage, facilitate timely maintenance, and in the initial period, the leaked gas is first discharged into the vacuum pump exhaust monitoring system, which can form a protective barrier to effectively block further leakage of harmful gas and delay the leakage of harmful gas into the air. In addition, when the exhaust pipe at the tail of the vacuum pump leaks, the chamber of the vacuum pump is undergoing a process operation. If the exhaust pipe suddenly leaks, it will affect the vacuum degree in the chamber due to the change in the pressure in the vacuum pump. Based on the system of the embodiment, by continuously introducing nitrogen into the annular channel, the vacuum pump can be prevented from immediately shutting down, and an alarm can be sent to start the standby vacuum pump in time, delay the downtime of the vacuum pump, and make the downtime of the vacuum pump controllable.

[0060] The vacuum pump exhaust monitoring system will be further described below in combination with specific embodiments:

[0061] Embodiment 1

[0062] As shown in Figure 1 , the exhaust pipe at the tail of the vacuum pump 11 includes a first exhaust pipe 21, a second exhaust pipe 22, and a third exhaust pipe 23, and of course, can also include other multiple exhaust pipes, etc., which are not shown here. The multiple exhaust pipes are all connected to the exhaust pipe 20 of the plant. The first exhaust pipe 21 and the second exhaust pipe 22 are connected by a first connecting joint 24, and the second exhaust pipe 22 and the third exhaust pipe 23 are connected by a second connecting joint 25. The vacuum pump exhaust monitoring system is provided on the first connecting joint 24 and the second connecting joint 25.

[0063] The vacuum pump exhaust monitoring system includes an annular channel, a first sealing member, a second sealing member, an inlet pipe 41, and an exhaust pipe 51. The annular channel has an inlet and an outlet. The inlet pipe 41 and the exhaust pipe 51 are connected to the inlet and the outlet of the annular channel, respectively. The inlet pipe 41 is provided with an inlet pressure gauge 42 and an inlet flow meter 43, and the exhaust pipe 51 is provided with an exhaust pressure gauge 52. The inlet pressure gauge 42, the inlet flow meter 43, and the exhaust pressure gauge 52 are electrically connected to a controller 33. The first sealing member and the second sealing member are provided on both sides of the annular channel, respectively. The first sealing member is used to seal between the inner cavity of the exhaust pipe and the annular channel, and the second sealing member is used to seal between the annular channel and the atmosphere.

[0064] Further, please continue to refer to Figure 1, the first connecting joint 24 and the second connecting joint 25 are connected to the total gas inlet pipeline 40, the gas outlet pipeline 51 is connected to the total gas outlet pipeline 50, and the total gas outlet pipeline 50 and the total gas inlet pipeline 40 are connected to the gas tank 31. A gas pump 32 is arranged at a downstream position of the gas tank 31, and is used to pump inert gas from the gas tank 31 into each gas inlet pipeline 41.

[0065] Based on the above structure, when the vacuum pump 11 is working, the gas is discharged from the first gas outlet pipeline 21, discharged through the intermediate second gas outlet pipeline 22 and third gas outlet pipeline 23 and other gas outlet pipelines to the gas outlet pipeline 20 of the factory, and the connecting joints between these gas outlet pipelines may have a hidden danger of leakage. Therefore, the vacuum pump exhaust monitoring system of the present embodiment can detect the leakage gas. The vacuum pump exhaust monitoring system forms a closed-loop control system, and by providing stable inert gas, the pressure of the system can be kept constant. The gas pump 32 pumps inert gas (for example, nitrogen) from the gas tank 31, provides it to the total gas inlet pipeline 40, and then flows into different gas inlet pipelines 41. The inert gas further flows into the annular channel, is discharged through the gas outlet pipeline 51 to the total gas outlet pipeline 50, and then flows back to the gas tank 31. If the first connecting joint 24 or the second connecting joint 25 leaks, the gas in the gas outlet pipeline lumen flows into the annular channel, or external gas flows into the annular channel, etc. The gas inlet pressure gauge 42, the gas outlet pressure gauge 52 and the gas inlet flow meter 43 can detect the changes of pressure and flow, and transmit the pressure and flow values to the controller 33, so as to determine whether the gas leakage occurs at the connecting joint of the gas outlet pipeline, and further send an alarm signal.

[0066] It should be noted that the present embodiment only takes two connecting joints as an example for description. In other embodiments, a plurality of gas outlet pipelines and a plurality of connecting joints can be included, and the same vacuum pump exhaust monitoring system can be arranged on each of the plurality of connecting joints, or the vacuum pump exhaust monitoring system can be arranged on one or several connecting joints. Here, it is not enumerated one by one.

[0067] Embodiment 2

[0068] The present example takes the connecting joint between any two gas outlet pipelines as an example for description, such as Figure 2As shown, taking the first exhaust pipe and the second exhaust pipe as an example, the first exhaust pipe 21 and the second exhaust pipe 22 are used to exhaust the tail exhaust gas of the vacuum pump, the end of the first exhaust pipe 21 penetrates into the end of the second exhaust pipe 22, so that the connecting end of the first exhaust pipe 21 and the second exhaust pipe 22 forms a connecting joint, and an annular channel 61, a first annular groove and a second annular groove are respectively arranged on the curved surface of the connecting end of the first exhaust pipe 21 in the circumferential direction, wherein the first annular groove is embedded with a first sealing ring to form a first sealing member 621 for sealing the annular channel 61 and the inner cavity of the exhaust pipe, and the second annular groove is embedded with a second sealing ring to form a second sealing member 622 for sealing the annular channel 61 and the atmosphere side.

[0069] It should be noted that the annular channel, the first annular groove and the second annular groove are grooves that are entirely arranged along the curved surface of the connecting end of the exhaust pipe, and each groove is entirely communicated in the circumferential direction of the connecting end.

[0070] Further, as shown, Figure 2 the annular channel 61 has an air inlet 65 and an air outlet 66 which are communicated with the outside, wherein the air inlet 65 and the air outlet 66 penetrate through the outer wall of the second exhaust pipe 22 to form a vent hole structure communicated with the outside, and the air inlet 65 is connected with an air inlet connecting member 63, so as to be communicated with an air inlet pipeline through the air inlet connecting member; similarly, the air outlet 66 is connected with an air outlet connecting member 64, so as to be communicated with an air outlet pipeline through the air outlet connecting member. Secondly, the air inlet pipeline and the air outlet pipeline are respectively connected to a gas storage tank through a total air inlet pipeline and a total air outlet pipeline.

[0071] Further, as shown, Figure 2 and Figure 3 the first exhaust pipe 21 and the second exhaust pipe 22 are respectively provided with a first fixing portion 211 and a second fixing portion 221 at the connecting position of the two, the first fixing portion 211 can be a circular boss formed by the outer wall of the first exhaust pipe 21 extending radially outward; similarly, the second fixing portion 221 can be a circular boss formed by the end of the second exhaust pipe 22 extending radially outward; the first fixing portion 211 and the second fixing portion 221 are connected through a fixing member. That is, the first exhaust pipe and the second exhaust pipe are connected through the cooperation of the sleeved end portions, and further provided with fixing portions on the outer portions of the pipes, and the two pipes are fixedly connected through a fixing member such as a bolt.

[0072] Based on the above structure, the inert gas is introduced from outside, the gas enters the annular channel 61 through the gas inlet connecting piece 63 and the gas inlet 65, the annular channel 61 is filled with gas, and then the gas is discharged through the gas outlet 66 and the gas outlet connecting piece 64. When the first sealing member 621 and the second sealing member 622 have scratches, wear, corrosion and other problems, the gas will flow, at this time the annular channel 61 is in a negative pressure state, the inert gas with constant pressure flows between the first sealing member 621 and the second sealing member 622, and the inert gas introduced here is assumed to be higher than the atmospheric pressure, of course, the specific pressure value can be set according to the actual use, the pressure on the right side of the first sealing member 621 and the two exhaust pipes is consistent, and is in a negative pressure state. The left side of the second sealing member 622 is atmospheric pressure, if the second sealing member 622 is damaged, the gas on the right side of the second sealing member 622 will flow to the left side of the second sealing member 622, that is, the pressure in the annular channel 61 will fluctuate, which can be detected by the system. If the first sealing member 621 has a problem, the gas pressure in the annular channel 61 on the left side of the first sealing member 621 is greater than that on the right side of the first sealing member 621, then the gas in the annular channel 61 will flow into the right side of the first sealing member 621, that is, the pressure or flow in the annular channel 61 will fluctuate, which can be detected by the system, and the system can further judge whether the gas leakage occurs at the connecting joint of the exhaust pipe and an alarm is prompted.

[0073] Embodiment 3

[0074] The present example is illustrated by taking the connecting joint between any two exhaust pipes as an example, as shown in Figure 4 The second exhaust pipe 22 and the third exhaust pipe 23 are used to discharge the exhaust gas of the vacuum pump, the second exhaust pipe 22 and the third exhaust pipe 23 are connected through the first flange 71 and the second flange 72 respectively, so that the surfaces of the two flanges connected form a connecting end, an annular groove is formed on the connecting end of the first flange 71 along the circumferential direction of the connecting end as an annular channel 61 for the inert gas to flow through, and a first annular groove and a second annular groove are respectively formed on the connecting end of the second flange 72 along the circumferential direction of the connecting end, the first annular groove is located on the inner side of the annular channel 61 in the radial direction, and the second annular groove is located on the outer side of the annular channel 61 in the radial direction, wherein a first sealing ring is embedded in the first annular groove to form a first sealing member 621 for sealing the annular channel 61 and the inner cavity of the exhaust pipe, and a second sealing ring is embedded in the second annular groove to form a second sealing member 622 for sealing the annular channel 61 and the atmosphere side.

[0075] It should be noted that the annular groove and the annular groove of the present embodiment are grooves that are entirely formed along the circumferential direction of the connecting end of the flange, and each groove is entirely communicated along the circumferential direction of the connecting end.

[0076] Further, as shown in Figure 4As shown, the annular channel 61 has an air inlet 65 and an air outlet 66 which communicate with the outside, wherein the air inlet 65 and the air outlet 66 pass through the wall thickness of the first flange 71 away from the connecting end thereof to form vent hole structures which communicate with the outside, that is, the annular channel is opened at the connecting end of the first flange, two vent hole structures are opened at the side of the first flange away from the connecting end, which communicate with the annular channel and serve as the air inlet 65 and the air outlet 66 respectively, and an air inlet connecting piece 63 is arranged at the air inlet 65, an air inlet connecting joint 631 is arranged at the air inlet end of the air inlet connecting piece 63, which facilitates the communication with the air inlet pipeline through the air inlet connecting piece 63 and the air inlet connecting joint 631, and at the same time, an air outlet connecting piece 64 is arranged at the air outlet 66, an air outlet connecting joint 641 is arranged at the air outlet end of the air outlet connecting piece 64, which facilitates the communication with the air outlet pipeline through the air outlet connecting piece 64 and the air outlet connecting joint 641, of course, the air inlet connecting piece and the air outlet connecting piece can be connecting pipelines.

[0077] Further, as shown in Figure 4 and Figure 5 A clamp 73 is arranged outside the first flange 71 and the second flange 72 to fix the two flanges and improve the sealing performance.

[0078] Based on the above structure, inert gas is introduced from the outside, the gas enters the annular channel 61 through the air inlet connecting piece 63 and the air inlet 65, the annular channel 61 is filled with the gas, and then the gas is discharged through the air outlet 66 and the air outlet connecting piece 64. When the first sealing element 621 and the second sealing element 622 are scratched, worn, corroded or have other problems, gas leakage occurs, at this time, the annular channel 61 is in a negative pressure state, the outside of the second sealing element 622 is atmospheric pressure, and a constant pressure gas higher than the atmospheric pressure is introduced between the first sealing element 621 and the second sealing element 622. If gas leakage occurs at the connecting joint, the same gas flow process as in Example 2 will occur, the pressure value and the flow value will fluctuate, it can be judged whether gas leakage occurs at the connecting joint of the air outlet pipeline, and an alarm prompt is generated.

[0079] Example 4

[0080] This example takes the vacuum pump exhaust monitoring system arranged at the connecting joint between any two air outlet pipelines as an example for illustration, as shown in Figure 6 and Figure 7As shown, also taking the second exhaust pipe and the third exhaust pipe as an example, the second exhaust pipe 22 and the third exhaust pipe 23 are connected through the first flange 71 and the second flange 72 respectively, so that the surfaces of the two flanges connected form a connecting end face, and the connecting end of the first flange 71 is provided with an annular groove as an annular channel 61 for the flow of inert gas along the circumference thereof. An inner annular support 623 is arranged between the two flanges, and an outer annular support 624 connected with the inner annular support 623; the annular channel 61 is located between the inner annular support 623 and the outer annular support 624 in the radial direction, the first sealing element 621 is arranged on the inner annular support 623 to seal the annular channel 61 and the inner cavity of the exhaust pipe, and the second sealing element 622 is arranged on the outer annular support 624 to seal the annular channel 61 and the atmosphere side.

[0081] It should be understood that the first sealing element and the second sealing element of the embodiment can also use sealing rings.

[0082] Further, as shown in Figure 6 and Figure 7 , the radially outer side of the outer annular support 624 is provided with an anti-extrusion support 625, which prevents the sealing element from being extruded when the flange connecting end is uneven or the sealing element is under too much stress.

[0083] The four-seal structure of the present embodiment can effectively improve the sealing between the two flanges and prevent process gas leakage from affecting the normal operation of the equipment.

[0084] Similarly, as shown in Figure 6 , the annular channel 61 has an air inlet 65 and an air outlet 66 in communication with the outside, wherein the air inlet 65 and the air outlet 66 penetrate the wall thickness of the first flange 71 away from the connecting end thereof, forming a vent hole structure in communication with the outside, and an air inlet connecting element 63 is arranged at the air inlet 65, and an air inlet connecting joint 631 is arranged at the air inlet end of the air inlet connecting element 63, so that the air inlet connecting element and the air inlet connecting joint facilitate communication with the air inlet pipeline. Similarly, an exhaust connecting element 64 is arranged at the air outlet 66, and an exhaust connecting joint 641 is arranged at the exhaust end of the exhaust connecting element 64, so that the exhaust connecting element and the exhaust connecting joint facilitate communication with the exhaust pipeline.

[0085] Further, as shown in Figure 6 , a clamp 73 is arranged outside the first flange 71 and the second flange 72 to fix the two flanges and improve the sealing performance.

[0086] Based on the above structure, inert gas is introduced from outside, the gas enters into the annular channel 61 through the gas inlet connector 63 and the gas inlet 65, the annular channel 61 is full of gas, and then the gas is discharged through the gas outlet 66 and the gas outlet connector 64. When the first sealing element 621 and the second sealing element 622 are scratched, worn, corroded or the like, gas leakage occurs, at this time the annular channel 61 is in a negative pressure state, the outside of the second sealing element 622 is atmospheric pressure, and the first sealing element 621 and the second sealing element 622 are connected to constant pressure gas higher than atmospheric pressure. If gas leakage occurs at the connection joint, the same gas flow process as in Example 2 will occur, the pressure value and the flow value will fluctuate, it is judged whether gas leakage occurs at the connection joint of the exhaust pipe, and an alarm prompt is generated.

[0087] It can be understood that the above embodiments are only exemplary embodiments adopted for illustrating the principles of the present disclosure, and the present disclosure is not limited thereto. Various modifications and improvements can be made by those of ordinary skill in the art without departing from the spirit and essence of the present disclosure, and these modifications and improvements are also considered to be within the protection scope of the present disclosure.

Claims

1. A vacuum pump exhaust monitoring system, characterized by, The system comprises: a ring-shaped channel arranged at a connecting joint between exhaust pipes of a vacuum pump tail, and the ring-shaped channel has an air inlet and an air outlet; a first sealing member and a second sealing member arranged at two sides of the ring-shaped channel respectively, and used for sealing the inner cavities of the exhaust pipes and the ring-shaped channel, and the ring-shaped channel and the atmosphere side respectively; an air inlet pipeline and an air outlet pipeline connected with the air inlet and the air outlet of the ring-shaped channel respectively, and a gas detection structure is arranged on the air inlet pipeline and / or the air outlet pipeline; inert gas enters the ring-shaped channel from the air inlet pipeline, and is discharged through the air outlet pipeline, forming a monitoring loop, and whether the gas leakage occurs at the connecting joint is judged by whether the detection data of the gas detection structure changes.

2. The vacuum pump exhaust monitoring system of claim 1, wherein, When the connecting joint between the two exhaust pipes is a flange, the connecting end of the flange is provided with the ring-shaped channel, a first ring-shaped groove and a second ring-shaped groove along the circumferential direction thereof; the first ring-shaped groove is located between the ring-shaped channel and the inner cavity of the exhaust pipe, and the first sealing member is embedded in the first ring-shaped groove; the second ring-shaped groove is located between the ring-shaped channel and the atmosphere side, and the second sealing member is embedded in the second ring-shaped groove.

3. The vacuum pump exhaust monitoring system of claim 1, wherein, When the connecting joint between the two exhaust pipes is a flange, the connecting end of the flange is provided with the ring-shaped channel along the circumferential direction thereof, an inner ring-shaped support is arranged between the two flanges, and an outer ring-shaped support connected with the inner ring-shaped support; wherein, the ring-shaped channel is located between the inner ring-shaped support and the outer ring-shaped support in the radial direction, the first sealing member is arranged at the inner ring-shaped support, and the second sealing member is arranged at the outer ring-shaped support.

4. The vacuum pump exhaust monitoring system of claim 3, wherein, The side of the outer ring-shaped support away from the inner ring-shaped support is further provided with an anti-extrusion support.

5. The vacuum pump exhaust monitoring system of claim 1, wherein, When one of the connecting ends of the two exhaust pipes is inserted into the other connecting end, the two connecting ends form the connecting joint; the connecting end of one of the two exhaust pipes is provided with the ring-shaped channel, the first ring-shaped groove and the second ring-shaped groove along the circumferential direction of the curved surface of the other connecting end; the first ring-shaped groove is located between the ring-shaped channel and the inner cavity of the exhaust pipe, and the first sealing member is embedded in the first ring-shaped groove; the second ring-shaped groove is located between the ring-shaped channel and the atmosphere side, and the second sealing member is embedded in the second ring-shaped groove.

6. The vacuum pump exhaust monitoring system of claim 5, wherein, The first fixing part and the second fixing part are connected through a fixing member.

7. The vacuum pump exhaust monitoring system of any of claims 1 to 6, wherein, The gas detection structure is a pressure gauge.

8. The vacuum pump exhaust monitoring system of any of claims 1 to 6, wherein, The gas detection structure is a flow meter.

9. The vacuum pump exhaust monitoring system of any of claims 1 to 6, wherein, The air inlet pipeline and the air outlet pipeline are connected to a gas storage tank, and the air inlet pipeline is provided with a gas pump.

10. The vacuum pump exhaust monitoring system of any of claims 1 to 6, wherein, The gas detection structure is further electrically connected with a controller, and the controller comprises a monitoring module and an alarm module; wherein, the monitoring module is used for monitoring the detection result of the gas detection structure; the alarm module is used for sending an alarm signal according to the detection result.

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