Vacuum pump

By setting an oil chamber and an oil outlet on the main shaft of the vacuum pump and utilizing an eccentrically rotating oil compression component, active pumping of oil is achieved, solving the problem of poor lubrication effect of lubricating oil, improving the lubrication effect of bearings and extending their service life.

CN223634907UActive Publication Date: 2025-12-05SHANGHAI SHENGJIAN SEMICONDUCTOR TECHNOLOGY CO LTD
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Patent Information

Application Number
CN202423321750.7
Authority / Receiving Office
CN · China
Patent Type
Utility models(China)
Current Assignee / Owner
Filing Date
2024-12-31
Publication Date
2025-12-05
Estimated Expiration
2034-12-31

AI Technical Summary

Technical Problem

The lubrication effect of existing vacuum pumps is not ideal, mainly because the process of lubricating oil moving from the inlet to the outlet by gravity alone is not ideal.

Method used

Design a vacuum pump that uses an oil chamber and an oil outlet on the spindle and an eccentrically positioned spindle and oil compression component. When the spindle rotates, it drives the oil compression component to rotate eccentrically in the compression groove, compressing and pumping the oil to the bearing to achieve active lubrication.

Benefits of technology

The lubrication effect of the bearing has been optimized, thus extending the bearing's lifespan.

✦ Generated by Eureka AI based on patent content.

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Patent Text Reader

Abstract

The utility model relates to the technical field of vacuum pumps, in particular to a vacuum pump. The utility model provides a vacuum pump which comprises a main shaft and a pumping structure. The main shaft is provided with the oil cavity and the oil outlet hole, and the oil outlet hole is arranged opposite to the bearing, so that oil gas in the oil cavity can be pumped to the bearing; by arranging the main shaft and the oil compression piece which are eccentrically arranged, the main shaft can drive the oil compression piece to eccentrically rotate in the compression groove when rotating, so that the oil compression piece can compress and pump oil gas in the compression groove into the oil cavity and convey the oil liquid to the bearing, lubrication of the bearing is further optimized, and the service life of the bearing is prolonged.
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Description

TECHNICAL FIELD

[0001] The utility model relates to vacuum pump technical field, specifically, relate to a kind of vacuum pump. BACKGROUND

[0002] The multistage Roots vacuum pump in the related art is increasingly widely applied in semiconductor, photovoltaic industry. The commonly used lubricating structure of the vacuum pump is provided with an oil inlet above the bearing seat and an oil outlet hole below the bearing seat. The lubricating oil is returned to the oil pool from the oil outlet hole due to the influence of gravity. The lubricating oil in the oil pool is thrown up by the oil throwing plate arranged on the main shaft and auxiliary shaft, thereby entering the oil inlet hole of the bearing seat, and finally completing the lubrication cycle.

[0003] The inventor found that the lubricating oil only relies on gravity to complete the process from the oil inlet hole to the oil outlet hole, and the lubricating effect on the bearing is not ideal. SUMMARY

[0004] The utility model discloses a kind of vacuum pumps, it can be compressed into oil liquid by oil gas, and oil liquid is pumped to bearing along oil cavity, lubricates bearing.

[0005] The embodiment of the utility model can be realized as follows:

[0006] The utility model provides a kind of vacuum pump, comprising: main shaft, the tail end of the main shaft is equipped with oil cavity, bearing is sleeved on the main shaft, the main shaft is relative to the bearing and is provided with oil outlet hole, the oil outlet hole is communicated with the oil cavity;

[0007] Pumping structure, the pumping structure is set to the tail end of the main shaft and includes mounting seat and oil compression piece, the mounting seat is equipped with oil inlet hole and compression groove, the oil inlet hole is communicated with the compression groove and the oil tank of the vacuum pump, the compression groove is set to the side of the mounting seat towards the main shaft and is communicated with the oil cavity;The oil compression piece is rotatably limited in the compression groove and is sleeved on the main shaft, and the axis of the oil compression piece is eccentric with the axis of the main shaft.

[0008] Optionally, the pumping structure further includes oil compression pipe, the oil compression pipe is set to the tail end of the oil cavity, and the oil compression piece is rotatably arranged on the oil compression pipe.

[0009] Optionally, the axis of the oil cavity is eccentric with the axis of the main shaft.

[0010] Optionally, the eccentric interval between the axis of the oil cavity and the axis of the main shaft is 1mm-5mm.

[0011] Optionally, the oil compression piece includes annular body and protrusion, the protrusion is arranged on the outer wall of the annular body, and the annular body is rotatably arranged at the tail end of the main shaft.

[0012] The compression groove comprises a first groove body and a second groove body in communication, the second groove body is arranged at the outer edge of the first groove body, the annular body is located in the first groove body, and the protrusion is arranged in the second groove body.

[0013] Optionally, a notch is arranged on the oil compression member, the notch is in communication with the compression groove and the oil cavity, and the notch and the oil inlet hole are located on the two sides of the protrusion, respectively, in the rotation direction of the oil compression member.

[0014] Optionally, the notch is arranged on the side of the oil compression member away from the main shaft, and the notch is arranged away from the oil inlet hole.

[0015] Optionally, the mounting seat is fixedly connected with the main shaft, and a guide oil groove is arranged on the side of the mounting seat away from the main shaft, and the oil inlet hole is in communication with the guide oil groove.

[0016] Optionally, the mounting seat is fixedly connected with the oil tank.

[0017] Optionally, the mounting seat is fixedly connected with the oil tank, and the mounting seat is provided with an oil passing hole suitable for lubricating oil to pass through, and the oil passing hole is in communication with the oil inlet hole.

[0018] Optionally, a shaft sleeve is arranged on the main shaft, a guide gap is arranged between the shaft sleeve and the main shaft, and the oil outlet hole is in communication with the guide gap.

[0019] The shaft sleeve is in abutment with the bearing, and the guide gap is in communication with the connecting position of the bearing and the main shaft.

[0020] The beneficial effects of the vacuum pump provided by the embodiment of the utility model include:

[0021] By arranging the oil cavity and the oil outlet hole on the main shaft, and arranging the oil outlet hole relative to the bearing, the oil gas in the oil cavity can be pumped to the bearing, by arranging the eccentric main shaft and the oil compression member, the main shaft can drive the oil compression member to rotate reversely in the compression groove when the main shaft rotates, the oil compression member can compress the oil gas in the compression groove to the oil cavity, and the oil gas can actively pump the oil to the bearing along the oil cavity and the oil outlet hole, thereby further optimizing the lubrication of the bearing and prolonging the service life of the bearing. BRIEF DESCRIPTION OF DRAWINGS

[0022] In order to more clearly illustrate the technical scheme of the embodiment of the utility model, the following will briefly introduce the drawings needed to be used in the embodiment, and it should be understood that the following drawings only show some embodiments of the utility model, and therefore should not be regarded as a limitation to the scope, and for those skilled in the art, other related drawings can also be obtained without creative labor on the basis of the drawings.

[0023] Figure 1 A schematic view of a vacuum pump structure provided for the present embodiment;

[0024] Figure 2 A first sectional view of a pumping structure provided for the present embodiment;

[0025] Figure 3 A first front view of a mounting seat provided for the present embodiment;

[0026] Figure 4 A first back view of a mounting seat provided for the present embodiment;

[0027] Figure 5 A front view of an oil compression member provided for the present embodiment;

[0028] Figure 6 A back view of an oil compression member provided for the present embodiment;

[0029] Figure 7 A side view of an oil compression member provided for the present embodiment;

[0030] Figure 8 A back view of a mounting seat and an oil compression member provided for the present embodiment;

[0031] Figure 9 A first schematic view of an oil compression member rotating in a mounting seat provided for the present embodiment;

[0032] Figure 10 A second schematic view of an oil compression member rotating in a mounting seat provided for the present embodiment;

[0033] Figure 11 A second sectional view of a pumping structure provided for the present embodiment;

[0034] Figure 12 A second side view of a mounting seat provided for the present embodiment;

[0035] Figure 13 A second front view of a mounting seat provided for the present embodiment;

[0036] Figure 14 A second back view of a mounting seat provided for the present embodiment.

[0037] Icon: 010 - vacuum pump; 011 - pumping structure; 012 - vacuum pump body; 0121 - end seat; 013 - main shaft; 0131 - oil cavity; 0132 - oil outlet hole; 0133 - bearing; 0134 - shaft sleeve; 01341 - guide gap; 0135 - oil compression pipe; 014 - oil tank; 100 - mounting seat; 101 - disc body; 102 - seat body; 103 - connecting part; 110 - oil inlet hole; 120 - compression groove; 121 - first groove body; 122 - second groove body; 150 - oil guide groove; 160 - oil passing hole; 200 - oil compression piece; 210 - notch; 201 - annular body; 202 - protrusion; 203 - connecting port. DETAILED DESCRIPTION

[0038] In view of the problems in the background art, the utility model provides a kind of vacuum pump 010, it can be compressed into oil liquid by oil gas and lubricating oil, and oil liquid is pumped to bearing 0133 along oil cavity 0131, lubricates bearing 0133.

[0039] To make the purpose, technical scheme and advantage of the utility model embodiment clearer, the technical scheme in the utility model embodiment will be clearly and completely described below with the drawings in the utility model embodiment, apparently, the described embodiment is part of the embodiment of the utility model, not all embodiments.Usually the components of the utility model embodiment described and shown in the drawing herein can be arranged and designed in various different configurations.

[0040] Therefore, the detailed description of the embodiments of the utility model provided in the drawings below is not intended to limit the scope of the claimed utility model, but only represents selected embodiments of the utility model.Based on the embodiments in the utility model, all other embodiments obtained by those skilled in the art without creative labor are within the scope of protection of the utility model.

[0041] It should be noted that: similar signs and letters represent similar items in the following drawings, so once an item is defined in one drawing, it does not need to be further defined and explained in subsequent drawings.

[0042] In the description of the utility model, it should be noted that if the terms "upper", "lower", "inner", "outer" and the like indicate the orientation or positional relationship shown in the drawings, or the orientation or positional relationship of the utility model product in use, it is only for the convenience of describing the utility model and simplifying the description, and does not indicate or imply that the device or element referred to must have a particular orientation, be constructed and operated in a particular orientation, therefore it cannot be understood as a limitation on the utility model.

[0043] In addition, if the terms "first", "second" and the like are used herein, they are merely used to distinguish the description, and cannot be understood as indicating or implying relative importance.

[0044] It should be noted that the features in the embodiments of the present application can be combined with each other without conflict.

[0045] The overall structure, working principle and technical effects of the pumping structure 011 and the vacuum pump 010 provided by the present application will be described in detail below in combination with the drawings.

[0046] Please refer to Figure 2 The vacuum pump 010 provided by the present application is applied to a vacuum pump 010 system, which can compress oil gas into oil liquid and actively pump the oil liquid to the bearing 0133 along the oil cavity 0131 to lubricate the bearing 0133.

[0047] Please refer to Figures 1-2 The present embodiment provides a vacuum pump 010, which comprises a main shaft 013 and a pumping structure 011; the tail end of the main shaft 013 is provided with an oil cavity 0131, the main shaft 013 is provided with a bearing 0133, the main shaft 013 is provided with an oil outlet hole 0132 relative to the bearing 0133, and the oil outlet hole 0132 is communicated with the oil cavity 0131; the pumping structure 011 is arranged at the tail end of the main shaft 013 and comprises a mounting seat 100 and an oil compression member 200, the mounting seat 100 is provided with an oil inlet hole 110 and a compression groove 120, the oil inlet hole 110 is communicated with the compression groove 120 and an oil tank 014 of the vacuum pump 010, and the compression groove 120 is arranged on the side of the mounting seat 100 facing the main shaft 013 and is communicated with the oil cavity 0131; the oil compression member 200 is rotatably limited in the compression groove 120 and is sleeved on the main shaft 013, and the shaft center of the oil compression member 200 is eccentrically arranged with the shaft center of the main shaft 013.

[0048] The vacuum pump 010 has an oil tank 014 for placing lubricating oil, the tail end of the main shaft 013 extends into the oil tank 014, so that the oil gas in the oil tank cavity can be pressed into the compression groove 120 through the oil inlet hole 110; wherein the oil compression member 200 is eccentrically arranged with the main shaft 013, the rotation of the main shaft 013 can drive the oil compression member 200 to eccentrically rotate in the compression groove 120, and the eccentric rotation of the oil compression member 200 can compress the oil gas in the pumping compression groove 120. Further make the oil gas enter the oil cavity 0131, and be pumped to the bearing 0133 along the oil cavity 0131 and the oil outlet hole 0132, so as to realize the lubrication of the bearing 0133. It can be understood that the oil liquid can flow to the bearing 0133 through the assembly gap of the main shaft 013.

[0049] Therefore, by setting the eccentrically arranged main shaft 013 and the oil compression member 200, the main shaft 013 can drive the oil compression member 200 to rotate eccentrically in the compression groove 120 when rotating, so that the oil compression member 200 can compress the oil gas in the pumping compression groove 120 into the oil cavity 0131, and the oil gas is actively pumped to the bearing 0133 along the oil cavity 0131 and the oil outlet hole 0132, further optimizing the lubrication of the bearing 0133 and prolonging the service life of the bearing 0133.

[0050] It can be understood that when the vacuum pump 010 is in a working state, the pressure in the oil tank cavity of the oil tank 014 is greater than the working cavity pressure in the vacuum pump 010, so that the oil gas in the oil tank 014 can enter the compression groove 120 through the oil inlet hole 110 under the action of pressure to be compressed to form oil liquid.

[0051] In addition, in the embodiment, the main shaft 013 is also provided with an oil throwing disc, through which the lubricating oil can be thrown up, and part of the oil can also enter the compression groove 120 from the oil inlet hole 110, be compressed and pumped to the oil cavity 0131 by the oil compression member 200, and be delivered to the bearing 0133, which can further improve the lubrication effect.

[0052] In the embodiment, the vacuum pump 010 includes a vacuum pump body 012.

[0053] In the embodiment, please refer to Figures 1-2 , the vacuum pump body 012 includes a main shaft 013, a pump body, an end seat 0121 and an oil tank 014; the pump body is provided with a working cavity including a plurality of stages of cavities, and the pump body is sealingly provided with the end seat 0121 at both ends. The end seats 0121 at both ends are sealingly and fixedly connected with the oil tank 014, wherein the oil tank 014 is used for storing lubricating oil required for operation of the vacuum pump body 012.

[0054] The main shaft 013 is arranged in the pump body and the end seats 0121 at both ends, and the main shaft 013 is rotatably connected with the end seats 0121 at both ends through the bearing 0133. The main shaft 013 is provided with a rotor located in the working cavity, the tail end of the main shaft 013 penetrates the end seat 0121 and is located in the tail end oil tank 014, and the head end of the main shaft 013 penetrates the end seat 0121 and is in transmission connection with the output shaft of the driving unit.

[0055] It can be understood that the output shaft of the driving unit is connected with the main shaft 013 to drive the main shaft 013 to rotate, and the rotation of the main shaft 013 drives the rotor to rotate to compress the gas in the working cavity.

[0056] In the embodiment, please refer to Figure 2 , the bearing 0133 is sleeved on the main shaft 013, and the shaft sleeve 0134 is also sleeved and fixed on the main shaft 013. The shaft sleeve 0134 can abut against the bearing 0133 and is located on one side of the bearing 0133, as Figure 2In the shown example, the shaft sleeve 0134 abuts against the side of the bearing 0133 facing the tail end of the main shaft 013.

[0057] In the present embodiment, the tail end of the main shaft 013 is provided with an oil cavity 0131 and an oil outlet hole 0132, the oil outlet hole 0132 being in communication with the oil cavity 0131, and the oil outlet hole 0132 being arranged relative to the bearing 0133.

[0058] In the present embodiment, the oil cavity 0131 is a blind hole and extends at least to the position of the shaft sleeve 0134; the oil outlet hole 0132 is arranged relative to the shaft sleeve 0134 and in communication with the oil cavity 0131, and a guide gap 01341 can be formed between the shaft sleeve 0134 and the main shaft 013, the guide gap 01341 being in communication with the connection between the oil outlet hole 0132 and the bearing 0133, and the oil pumped out of the oil outlet hole 0132 is guided to the connection between the bearing 0133 and the main shaft 013 through the guide gap 01341.

[0059] Optionally, a gap of 0.1mm-0.5mm is left between the shaft sleeve 0134 and the main shaft 013.

[0060] Optionally, multiple oil outlet holes 0132 can be arranged, and the multiple oil outlet holes 0132 are arranged at equal angles around the axial direction of the main shaft 013.

[0061] Optionally, the diameter of the oil outlet hole 0132 can be 3mm-5mm.

[0062] It can be understood that the oil pumped out of the oil outlet hole 0132 flows axially along the guide gap 01341 between the shaft sleeve 0134 and the main shaft 013 into the inside of the bearing 0133, so as to achieve the purpose of lubricating the bearing 0133.

[0063] In the present embodiment, the vacuum pump 010 comprises a pumping structure 011. The pumping structure 011 can actively pump the oil gas in the oil tank 014 to the bearing 0133 along the compression groove 120 and the oil cavity 0131, so as to lubricate the bearing 0133.

[0064] In the present embodiment, please refer to Figure 2 The pumping structure 011 comprises an oil compression pipe 0135. The tail end of the main shaft 013 is fixed with the oil compression pipe 0135, and the oil compression pipe 0135 is fixedly arranged in the oil cavity 0131; an oil compression member 200 is sleeved on the oil compression pipe 0135; one end of the oil compression pipe 0135 is in communication with the oil cavity 0131, and the other end is in communication with the gap 210 of the oil compression member 200.

[0065] In the embodiment, the oil cavity 0131 is arranged eccentrically with the spindle 013, and the axis of the oil cavity 0131 is arranged eccentrically with the axis of the spindle 013. The eccentric interval H between the axis of the oil cavity 0131 and the axis of the spindle 013 is 1mm-5mm, for example, H can be 1mm, 2mm, 3mm, 4mm or 5mm. The interval distance between the axis of the oil cavity 0131 and the axis of the spindle 013 is selected according to the axial diameter of the spindle 013.

[0066] One end of the oil compression pipe 0135 is press-fitted into the oil cavity 0131 of the spindle 013, and the other end is arranged eccentrically with the oil compression member 200, so as to realize the eccentric arrangement of the oil compression member 200 and the spindle 013.

[0067] Of course, in some other embodiments, the axis of the oil cavity 0131 is arranged coaxially with the axis of the spindle 013, and the axis of the oil compression pipe 0135 is arranged eccentrically with the axis of the spindle 013, which can also realize the eccentric arrangement of the oil compression member 200 and the spindle 013.

[0068] In the embodiment, the pumping structure 011 includes a mounting seat 100 arranged at the tail end of the spindle 013, and the mounting seat 100 is provided with an oil inlet hole 110 and a compression groove 120.

[0069] In some embodiments, the mounting seat 100 is fixedly arranged at the tail end of the spindle 013, and the mounting seat 100 is arranged coaxially with the spindle 013. The mounting seat 100 is provided with the oil inlet hole 110 penetrating one side top and the compression groove 120 arranged on the other side, and the oil inlet hole 110 communicates with the compression groove 120 through the mounting seat 100.

[0070] The compression groove 120 is arranged opposite to the oil compression member 200, and the oil compression member 200 can rotate eccentrically in the compression groove 120. The shape of the compression groove 120 can be matched with the shape of the oil compression member 200.

[0071] Optionally, the diameter of the oil inlet hole 110 can be 3mm-5mm.

[0072] In some examples, please refer to Figure 2The mounting seat 100 is fixedly connected with the main shaft 013, thereby facilitating the mounting assembly of the mounting seat 100, the sealing assembly of the components, and the stable operation of the main shaft 013. The mounting seat 100 is a cylindrical structure with the same diameter as the main shaft 013. The oil guide groove 150 is arranged on the side of the mounting seat 100 away from the main shaft 013. The oil inlet hole 110 is in communication with the oil guide groove 150. The oil guide groove 150 is used for guiding the oil gas to flow to the oil inlet hole 110. At the same time, the oil liquid can also be thrown to the oil guide groove 150, and the oil gas and the oil liquid can be guided to flow to the oil inlet hole 110 through the oil guide groove 150. Alternatively, the mounting seat 100 can be fixed to the tail end of the main shaft 013 by bolts or sealing glue.

[0073] In one embodiment, please refer to Figure 10 The mounting seat 100 is fixedly connected with the oil tank 014. One side of the mounting seat 100 is fixedly connected with the inner wall of the oil tank 014. The other side of the mounting seat 100 is provided with a compression groove 120, which cooperates with the oil compression member 200.

[0074] Alternatively, the mounting seat 100 is provided with an oil passing hole 160 suitable for the lubricating oil to pass through. The oil passing hole 160 is in communication with the oil inlet hole 110. The lubricating oil in the oil tank 014 is generally located at the bottom of the oil tank 014, as shown in Figure 11 By arranging the oil passing hole 160, the lubricating oil at the bottom can be thrown out through the oil passing hole 160 and sent to the oil inlet hole 110. At the same time, the oil passing hole 160 can also realize the communication of the oil gas on both sides of the mounting seat 100, so that the oil gas can flow to the oil inlet hole 110 through the oil passing hole 160, thereby facilitating the transportation of the oil gas and the oil liquid at the oil inlet hole 110.

[0075] The mounting seat 100 and the tail end face of the main shaft 013 are left with an assembly gap of 0.01 mm or less, which facilitates the mounting assembly of the mounting seat 100 and enables the oil liquid in the compression groove 120 to flow to the oil cavity 0131.

[0076] In this embodiment, please refer to Figures 12-14 The mounting seat 100 comprises a disc body 101 and a seat body 102 connected with each other. The disc body 101 is provided with a plurality of connecting portions 103, which can be fixed to the inner wall of the oil tank 014 by bolts or the like. The first end of the seat body 102 is provided with the oil guide groove 150 and the oil inlet hole 110 in communication. The second end of the seat body 102 is provided with the compression groove 120 in communication with the oil inlet hole 110. The disc body 101 is fixed to the first end of the seat body 102. The end face of the disc body 101 is flush with the end face of the seat body 102. At least one oil passing hole 160 is arranged on the disc body 101.

[0077] It can be understood that when the main shaft 013 rotates, the oil thrown by the oil throwing plate can enter the oil inlet hole 110 through the oil passing hole 160, as shown in the figure. Figure 11 As shown in the figure, the oil throwing plate is arranged on the main shaft 013 and located on the side of the mounting seat 100 facing the main shaft 013.

[0078] In this embodiment, please refer to Figures 5-8 , the pumping structure 011 includes an oil compression member 200.

[0079] In this embodiment, please refer to Figure 2 and Figure 8 , the oil compression member 200 is arranged in the compression groove 120 of the mounting seat 100; the oil compression member 200 is sleeved on the oil compression pipe 0135 of the main shaft 013; one end of the oil compression member 200 is sleeved with the oil compression pipe 0135 and abuts against the tail end surface of the main shaft 013, and the other end abuts against the inner wall of the compression groove 120 of the mounting seat 100, wherein the oil compression member 200 can rotate relative to the main shaft 013 and the compression groove 120.

[0080] Among them, the oil compression member 200 and the oil compression pipe 0135 are gap matched.

[0081] Among them, the oil compression member 200 and the mounting seat 100 are gap matched.

[0082] Optionally, please refer to Figure 5 , the oil compression member 200 is provided with a notch 210, and the notch 210 is connected with the compression groove 120 and the oil cavity 0131.

[0083] Among them, the oil compression member 200 is provided with a notch 210 on the side away from the main shaft 013, and the notch 210 and the oil inlet hole 110 are respectively located on the two sides of the protrusion 202 in the rotation direction of the oil compression member 200. In this embodiment, the notch 210 and the oil inlet hole 110 are symmetrically arranged.

[0084] Among them, the width and depth of the notch 210 range from 3mm to 5mm.

[0085] It is worth mentioning that in the movement direction of the oil compression member 200, the oil inlet hole 110 is arranged away from the notch 210; so that the oil gas can be effectively compressed into the oil cavity 0131.

[0086] Optionally, please refer to Figures 5-7 , the oil compression member 200 includes an annular body 201 and a protrusion 202, the protrusion 202 is arranged on the outer wall of the annular body 201, and the annular body 201 is rotatably arranged on the oil compression pipe 0135 at the tail end of the oil cavity 0131.

[0087] Among them, the annular body 201 is provided with a connecting port 203, and the connecting port 203 of the annular body 201 is sleeved on the oil compression pipe 0135.

[0088] The protrusion 202 can be a circular arc structure, and the protrusion 202 and the second groove body 122 of the compression groove 120 are used to limit the oil compression member 200 and compress the pumped oil gas.

[0089] The shaft center of the annular body 201 is coaxially arranged with the shaft center of the oil compression pipe 0135.

[0090] Optionally, referring to Figure 3 and Figure 4 The bottom of the mounting seat 100 is provided with a compression groove 120, and the compression groove 120 includes a first groove body 121 and a second groove body 122 in communication, and the second groove body 122 is arranged at the outer edge of the first groove body 121. The first groove body 121 is a circular groove, and the second groove body 122 is a circular arc groove. The annular body 201 of the oil compression member 200 is located in the first groove body 121, and the protrusion 202 is limitedly arranged in the second groove body 122.

[0091] The working principle and process of the pumping structure 011 provided in the embodiment of the utility model are as follows:

[0092] The oil compression pipe 0135 is eccentrically arranged with the main shaft 013, is in interference fit in the oil cavity 0131, and forms a hollow pipeline in communication with the oil cavity 0131, so that the oil compression pipe 0135 and the main shaft 013 are fixedly connected to form an eccentric shaft structure, the oil compression member 200 is sleeved on the oil compression pipe 0135 and is in clearance fit with the oil compression pipe 0135; the mounting seat 100 is formed with a compression groove 120 matched with the shape of the oil compression member 200, and the space volume of the compression groove 120 is greater than the volume of the oil compression member 200, so that the oil compression member 200 can eccentrically swing in the compression groove 120 to realize compression. Figures 8-9 As shown in the combination

[0093] Therefore, the main shaft 013 can drive the oil compression member 200 to eccentrically rotate in the compression groove 120 when the main shaft 013 rotates, and the combination Figures 4-9As shown, the oil compression member 200 and the compression groove 120 can form a compression cavity, when the oil compression member 200 rotates to the right side of the compression groove 120, the oil inlet hole 110 is communicated with the left compression cavity, and the oil gas enters the compression cavity, with the rotation of the oil compression member 200, the compression driving oil gas moves towards the second groove body 122, when the oil compression member 200 rotates relatively to the left side, the oil gas is compressed to the right compression cavity, at this time, the gap 210 can be communicated with the right compression cavity, and the compressed oil can be guided out through the gap 210, the gap 210 is communicated with the oil cavity 0131, so as to guide the oil to the oil cavity 0131 and flow to the bearing 0133, and the lubrication of the bearing 0133 is realized.

[0094] In summary, the vacuum pump 010 provided by the embodiment of the present application, by setting the oil cavity 0131 and the oil outlet hole 0132 on the main shaft 013, and setting the oil outlet hole 0132 relative to the bearing 0133, the oil gas in the oil cavity 0131 can be pumped to the bearing 0133; by setting the eccentric main shaft 013 and the oil compression member 200, the main shaft 013 can drive the oil compression member 200 to rotate reversely in the compression groove 120 when rotating, so that the oil compression member 200 can compress the oil gas in the compression groove 120 to the oil cavity 0131, and the oil gas actively pumps the oil to the bearing 0133 along the oil cavity 0131 and the oil outlet hole 0132, further optimizes the lubrication of the bearing 0133, and prolongs the service life of the bearing 0133.

[0095] The above is only a specific embodiment of the present application, but the protection scope of the present application is not limited to this, any person skilled in the art can easily think of changes or replacements within the technical range disclosed by the present application, which should be covered in the protection scope of the present application.

Claims

1. A vacuum pump, characterized by, The main shaft (013) is provided with an oil cavity (0131) at the tail end, a bearing (0133) is sleeved on the main shaft (013), and the main shaft (013) is provided with an oil outlet hole (0132) relative to the bearing (0133), and the oil outlet hole (0132) communicates with the oil cavity (0131); The pumping structure (011) is arranged at the tail end of the main shaft (013) and comprises a mounting seat (100) and an oil compression member (200), the mounting seat (100) is provided with an oil inlet hole (110) and a compression groove (120), the oil inlet hole (110) communicates the compression groove (120) and an oil tank (014) of the vacuum pump (010), and the compression groove (120) is arranged on the side of the mounting seat (100) facing the main shaft (013) and communicates with the oil cavity (0131); the oil compression member (200) is rotatably limited in the compression groove (120) and is sleeved on the main shaft (013), and the axis of the oil compression member (200) is eccentric to the axis of the main shaft (013). The pumping structure (011) further comprises an oil compression pipe (0135) arranged at the tail end of the oil cavity (0131), and the oil compression member (200) is rotatably arranged on the oil compression pipe (0135).

2. Vacuum pump according to claim 1, characterized in that The axis of the oil cavity (0131) is eccentric to the axis of the main shaft (013).

3. Vacuum pump according to claim 2, characterized in that The eccentric interval between the axis of the oil cavity (0131) and the axis of the main shaft (013) is 1mm-5mm.

4. Vacuum pump according to claim 3, characterized in that The oil compression member (200) comprises an annular body (201) and a protrusion (202) arranged on the outer wall of the annular body (201), and the annular body (201) is rotatably arranged at the tail end of the main shaft (013); 5. The vacuum pump of claim 1, wherein, The compression groove (120) comprises a first groove body (121) and a second groove body (122) in communication, the second groove body (122) is arranged at the outer edge of the first groove body (121), the annular body (201) is located in the first groove body (121), and the protrusion (202) is limitingly arranged in the second groove body (122). The oil compression member (200) is provided with a notch (210) communicating the compression groove (120) and the oil cavity (0131), and the notch (210) and the oil inlet hole (110) are located on the two sides of the protrusion (202) in the rotation direction of the oil compression member (200) respectively.

6. Vacuum pump according to claim 5, characterized in that The notch (210) is arranged on the side of the oil compression member (200) away from the main shaft (013), and the notch (210) is arranged away from the oil inlet hole (110).

7. Vacuum pump according to claim 6, characterized in that The mounting seat (100) is fixedly connected with the main shaft (013), the mounting seat (100) is provided with a guide oil groove (150) on the side away from the main shaft (013), and the oil inlet hole (110) communicates with the guide oil groove (150).

8. The vacuum pump of claim 1, wherein, ​ 9. The vacuum pump of claim 1, wherein, The mounting seat (100) is fixedly connected with the oil tank (014); And / or, the mounting seat (100) is fixedly connected with the oil tank (014), and the mounting seat (100) is provided with an oil passing hole (160) suitable for lubricating oil to pass through, and the oil passing hole (160) is communicated with the oil inlet hole (110).

10. The vacuum pump of claim 1, wherein, A shaft sleeve (0134) is sleeved on the main shaft (013), a guide gap (01341) is left between the shaft sleeve (0134) and the main shaft (013), and the oil outlet hole (0132) is communicated with the guide gap (01341); The shaft sleeve (0134) is abutted with the bearing (0133), and the guide gap (01341) is communicated with the connection part of the bearing (0133) and the main shaft (013).