Vacuum pump

Abstract

The utility model provides a vacuum pump, and relates to the technical field of semiconductor equipment. The vacuum pump comprises a pump body, a connecting pipe, an exhaust pipe and a dust collecting assembly. The number of the pump bodies is at least two, and every two adjacent pump bodies are connected through a connecting pipe. The exhaust pipe is arranged on the pump body at the last stage; the number of the integrated assemblies is at least two, at least one dust collecting assembly is arranged on the connecting pipe, and at least one dust collecting assembly is arranged on the exhaust pipe. The dust collecting assemblies are arranged at the connecting pipe and the exhaust pipe, dust and other impurities in gas can be collected at the connecting pipe and the exhaust pipe through the dust collecting assemblies, dust is prevented from being accumulated at the connecting pipe and the exhaust pipe, and therefore the situation that the pump body is stuck after dust is accumulated into a large particle structure for a long time and enters the next pump body is avoided; the inner diameter of the exhaust pipe is prevented from being reduced or even the whole exhaust pipe is prevented from being blocked due to dust accumulation, the service life of the pump body is effectively prolonged, and stable operation of the vacuum pump is ensured.

Description

TECHNICAL FIELD

[0001] The utility model relates to a semiconductor equipment technical field, specifically, relate to a vacuum pump. BACKGROUND

[0002] In the semiconductor field, the vacuum pump produces dust after long time operation, and some of the existing vacuum pumps are not provided with dust collecting devices, and the dust collecting devices of some others have poor dust treatment capacity, so that the dust is easy to accumulate in the pump or the exhaust, the former not only affects the normal operation of the pump, but also may cause the pump to be stuck, and the latter may cause the caliber of the exhaust to be reduced, so that the exhaust is not smooth, thereby affecting the service life of the vacuum pump. UTILITY MODEL CONTENTS

[0003] The utility model discloses a kind of vacuum pumps, its effective collection dust at connecting pipe and exhaust pipe, prolong the service life of vacuum pump, and ensure that vacuum pump can stably operate.

[0004] The embodiment of the utility model is implemented as follows:

[0005] The utility model provides a kind of vacuum pump, comprising:

[0006] At least two pump bodies;

[0007] Connecting pipe, adjacent two the pump body is connected through the connecting pipe;

[0008] Exhaust pipe, at least one the pump body is set in the exhaust pipe;

[0009] Dust collecting assembly, the number of the dust collecting assembly is at least two, at least one the dust collecting assembly is set in connecting pipe, at least another the dust collecting assembly is set in the exhaust pipe.

[0010] In the above embodiments, the at least two pump bodies are connected in sequence, and two adjacent pump bodies are connected by a connecting pipe, so that the gas can pass through the multiple pump bodies in sequence; and the exhaust pipe is arranged in at least one pump body to achieve normal exhaust of the gas, for example, the exhaust pipe can be arranged in any one of the pump bodies, or the exhaust pipe can be arranged in multiple pump bodies, or even the exhaust pipe can be arranged on each pump body; in actual application, considering the cost of the equipment and the characteristics of the gas flow, generally, only one exhaust pipe is arranged on one of the pump bodies, and generally, the exhaust pipe is arranged on the last-stage pump body among the multiple pump bodies connected in sequence. Therefore, by arranging the dust collection assembly at the connecting pipe, the dust and other impurities in the gas can be collected by the dust collection assembly when the gas flows from the previous pump body to the next pump body through the connecting pipe, so that the dust is prevented from accumulating at the connecting position, thereby preventing the dust from entering the next pump body after accumulating into a large particle structure for a long time to cause the pump body to be stuck, so that the service life of the pump body is effectively prolonged; similarly, by arranging the dust collection assembly at the exhaust pipe, the dust and other impurities in the exhaust pipe can be collected by the dust collection assembly, so that the dust is prevented from accumulating at the exhaust pipe, and the exhaust pipe is prevented from being reduced in inner diameter or even blocked due to the accumulation of the dust, so that the vacuum pump can be ensured to be stably operated.

[0011] The beneficial effects of the vacuum pump provided by the embodiments of the present application include: by arranging the dust collection assembly at the connecting pipe, the dust and other impurities in the gas can be collected by the dust collection assembly when the gas flows from the previous pump body to the next pump body through the connecting pipe, so that the dust is prevented from accumulating at the connecting position, thereby preventing the dust from entering the next pump body after accumulating into a large particle structure for a long time to cause the pump body to be stuck, so that the service life of the pump body is effectively prolonged; similarly, by arranging the dust collection assembly at the exhaust pipe, the dust and other impurities in the exhaust pipe can be collected by the dust collection assembly, so that the dust is prevented from accumulating at the exhaust pipe, and the exhaust pipe is prevented from being reduced in inner diameter or even blocked due to the accumulation of the dust, so that the vacuum pump can be ensured to be stably operated. BRIEF DESCRIPTION OF DRAWINGS

[0012] In order to more clearly illustrate the technical scheme of the embodiments of the present application, the following will briefly introduce the drawings needed to be used in the embodiments. It should be understood that the following drawings only show some embodiments of the present application, and therefore should not be regarded as a limitation on the scope. For those skilled in the art, other related drawings can also be obtained without creative labor on the basis of these drawings.

[0013] Fig. 1 The vacuum pump structure schematic view provided by the embodiments of the present application is shown in the figure;

[0014] Fig. 2 The connecting pipe and the dust collection assembly sectional view provided by the embodiments of the present application are shown in the figure;

[0015] Fig. 3 A dust collecting component structure schematic view is provided for the embodiment of the utility model.

[0016] Icon: 10-vacuum pump;100-pump body;200-connection pipe;210-first end;220-second end;300-exhaust pipe;310-vertical section;320-horizontal section;400-dust collecting assembly;410-dust collecting pipe;420-fastener;430-dust collecting component;431-connection part;432-dust collecting cavity;440-sealing ring. DETAILED DESCRIPTION

[0017] In order to make the purpose, technical scheme and advantages of the embodiments of the utility model clearer, the technical scheme in the embodiments of the utility model will be described clearly and completely below in combination with the drawings in the embodiments of the utility model. Obviously, the described embodiments are part of the embodiments of the utility model, rather than all the embodiments. The components of the embodiments of the utility model described and shown in the drawings here can be arranged and designed in various different configurations.

[0018] Therefore, the following detailed description of the embodiments of the utility model provided in the drawings is not intended to limit the scope of the claimed utility model, but only represents selected embodiments of the utility model. Based on the embodiments in the utility model, all other embodiments obtained by those of ordinary skill in the art without creative labor fall within the scope of protection of the utility model.

[0019] It should be noted that: similar signs and letters represent similar items in the following drawings, so once an item is defined in one drawing, it does not need to be further defined and explained in subsequent drawings.

[0020] In the description of the utility model, it should be noted that the terms "center", "upper", "lower", "left", "right", "vertical", "horizontal", "inner", "outer" and the like indicate the orientation or positional relationship based on the orientation or positional relationship shown in the drawings, or the orientation or positional relationship commonly placed when the utility model product is used, and are only for the convenience of describing the utility model and simplifying the description, and do not indicate or imply that the indicated device or element must have a particular orientation, be constructed and operated in a particular orientation, and therefore cannot be understood as a limitation on the utility model. In addition, the terms "first", "second", "third" and the like are only used to distinguish the description, and cannot be understood as indicating or implying relative importance.

[0021] In addition, the terms "horizontal", "vertical" and the like do not mean that the components must be absolutely horizontal or vertical, but can be slightly inclined. For example, "horizontal" only means that it is more horizontal than "vertical", and does not mean that the structure must be completely horizontal, but can be slightly inclined.

[0022] In the description of the utility model, it is necessary to point out that, unless there is definite stipulation and limitation, the terms "arrange", "install", "connect" and "connect" should be understood in a broad sense, for example, it can be fixed connection, or detachable connection, or integrally connected, it can be mechanical connection, or electrical connection, it can be directly connected, or indirectly connected through intermediate medium, it can be the communication inside two elements. For ordinary skilled in the art, the specific meaning of the above terms in the utility model can be understood according to specific circumstances.

[0023] In the field of semiconductors, dust is generated after the vacuum pump is operated for a long time, and some existing vacuum pumps are not provided with dust collecting devices, and the dust collecting devices of some existing vacuum pumps have poor dust handling capacity, so that dust is easy to accumulate in the pump or at the exhaust, the former not only affects the normal operation of the pump, but also may cause the pump to be stuck, and the latter may cause the caliber of the exhaust to be reduced, causing poor exhaust, thereby affecting the service life of the vacuum pump.

[0024] Based on the technical problems existing in the prior art, please refer to Figs. 1 to 3 The utility model embodiment provides a kind of vacuum pump 10, with good dust handling capacity, effectively prolongs the service life of vacuum pump 10.

[0025] In detail, vacuum pump 10 includes pump body 100, connecting pipe 200, exhaust pipe 300 and dust collecting assembly 400.

[0026] Among them, the number of pump body 100 is at least two, and adjacent two pump body 100 is connected by connecting pipe 200;Exhaust pipe 300 is arranged on the pump body 100 in the last stage, that is, the last pump body 100 in the plurality of pump body 100;The number of dust collecting assembly 400 is at least two, and at least one dust collecting assembly 400 is arranged on connecting pipe 200, and at least one dust collecting assembly 400 is arranged on exhaust pipe 300.

[0027] In the embodiment, at least two pump body 100 is connected in sequence, and adjacent two pump body 100 is connected by connecting pipe 200, so that gas can pass through the plurality of pump body 100 in sequence;And exhaust pipe 300 is arranged in at least one pump body 100 to realize normal exhaust of gas, for example, exhaust pipe 300 can be arranged in any one of the pump body 100, exhaust pipe 300 can be arranged in the plurality of pump body 100, or exhaust pipe 300 can be arranged on each pump body 100, which is not limited specifically.

[0028] In practical application, considering the cost of the equipment and the characteristics of the gas flow, the exhaust pipe 300 is usually arranged on only one of the pump bodies 100, and is usually arranged on the pump body 100 located at the end of the plurality of sequentially connected pump bodies 100.

[0029] In the embodiment, the dust collection assembly 400 is arranged at the connecting pipe 200, so that the dust and other impurities in the gas can be collected by the dust collection assembly 400 when the gas flows from the previous pump body 100 to the next pump body 100 through the connecting pipe 200, thereby avoiding the accumulation of dust at the connecting position, and avoiding the situation that the dust, after being accumulated into a large particle structure for a long time, enters the next pump body 100 and causes the pump body 100 to be stuck, thereby effectively prolonging the service life of the pump body 100. Similarly, the dust collection assembly 400 is also arranged at the exhaust pipe 300, so that the dust and other impurities in the exhaust pipe 300 can be collected by the dust collection assembly 400, thereby avoiding the accumulation of dust at the exhaust pipe 300, and avoiding the situation that the dust accumulation causes the inner diameter of the exhaust pipe 300 to be reduced or even causes the entire exhaust pipe 300 to be blocked, thereby ensuring that the vacuum pump 10 can operate stably.

[0030] Further, the dust collection assembly 400 is detachably connected with the connecting pipe 200.

[0031] In the embodiment, the dust collection assembly 400 is detachably connected with the connecting pipe 200, so that the dust collection assembly 400 has detachability, thereby facilitating the disassembly or assembly of the dust collection assembly 400. For example, in the case of needing to be overhauled, maintained or cleaned, the dust collection assembly 400 can be directly detached from the connecting pipe 200 and is overhauled and cleaned, thereby avoiding the accumulation of dust at the connecting pipe 200. Therefore, compared with the existing device, the entire pump body 100 is not disassembled, thereby improving the convenience of overhauling, maintaining and cleaning the vacuum pump 10.

[0032] Similarly, the dust collection assembly 400 is detachably connected with the exhaust pipe 300.

[0033] In the embodiment, the dust collection assembly 400 is detachably connected with the exhaust pipe 300, so that the dust collection assembly 400 has detachability, thereby facilitating the disassembly or assembly of the dust collection assembly 400. For example, in the case of needing to be overhauled, maintained or cleaned, the dust collection assembly 400 can be directly detached from the exhaust pipe 300 and is overhauled and cleaned, thereby avoiding the accumulation of dust at the exhaust pipe 300. Therefore, compared with the existing device, the entire pump body 100 is not disassembled, thereby improving the convenience of overhauling, maintaining and cleaning the vacuum pump 10.

[0034] In detail, the dust collection assembly 400 comprises a dust collection pipe 410, a fastener 420 and a dust collection member 430 which are sequentially connected.

[0035] The dust collecting pipe 410 is connected with the connecting pipe 200 or the exhaust pipe 300, and the dust collecting member 430 is detachably connected with the dust collecting pipe 410 through the fastener 420.

[0036] In the embodiment, it is to be noted that, in order to ensure the air tightness of the connection between the dust collecting pipe 410 and the connecting pipe 200 and the exhaust pipe 300, the connecting pipe 200 and the dust collecting pipe 410 of the dust collecting assembly 400 connected therewith are made by an integral molding process, which is simple and low in cost, and the connecting pipe 200 and the dust collecting pipe 410 formed thereby are high in structural strength and good in air tightness.

[0037] The dust collecting member 430 is used for collecting dust and other impurities, and thus the dust collecting member 430 is detachably connected with the dust collecting pipe 410 through the fastener 420. After the dust collecting member 430 collects a large amount of dust and other impurities, the fastener 420 can be detached to detach the dust collecting member 430 from the dust collecting pipe 410, so that the dust collecting member 430 can be conveniently cleaned or replaced without the need to detach the entire vacuum pump 10, thereby providing convenience for maintenance and significantly reducing the maintenance downtime of the vacuum pump 10.

[0038] Optionally, the fastener 420 can be a flange.

[0039] Further, the dust collecting pipe 410, the fastener 420 and the dust collecting member 430 are connected in sequence in the vertical direction.

[0040] In the embodiment, by connecting the dust collecting pipe 410, the fastener 420 and the dust collecting member 430 in sequence in the vertical direction, in the case where the gas passes through the connecting pipe 200, the dust can pass through the dust collecting pipe 410, the fastener 420 and the dust collecting member 430 in sequence under the action of gravity and be finally collected in the dust collecting member 430, thereby realizing the collection of the dust.

[0041] Further, the dust collecting member 430 comprises a connecting portion 431 and a dust collecting cavity 432 connected with each other, the connecting portion 431 is connected with the dust collecting pipe 410, and the inner diameter of the connecting portion 431 is smaller than the inner diameter of the dust collecting cavity 432.

[0042] In the embodiment, the connecting portion 431 is detachably connected with the dust collecting pipe 410 through the fastener 420, the dust collecting cavity 432 is used for collecting and storing the dust, and the connecting portion 431 and the dust collecting cavity 432 are both in the shape of a cylinder. Therefore, the inner diameter of the dust collecting cavity 432 is larger than the inner diameter of the connecting portion 431, which not only makes the volume of the dust collecting cavity 432 larger and enables the dust collecting cavity 432 to collect and accommodate more dust, but also avoids the overflow of the dust from the dust collecting cavity 432 to a certain extent.

[0043] Further, the dust collecting assembly 400 further comprises a sealing ring 440, which is arranged between the dust collecting pipe 410 and the dust collecting member 430.

[0044] In the embodiment, the sealing member is further arranged between the dust collecting pipe 410 and the dust collecting member 430 to ensure the air tightness between the dust collecting pipe 410 and the dust collecting member 430 when the fastener 420 fixes the dust collecting pipe 410 and the dust collecting member 430, so as to avoid the gas overflowing from the dust collecting pipe 410 and the dust collecting member 430 to pollute the environment.

[0045] Further, the at least two pump bodies 100 are horizontally arranged and stacked in a top-down manner, and the exhaust pipe 300 is arranged at the outlet of the lower pump body 100.

[0046] In the embodiment, it is first to be noted that the gas passes through the multiple pump bodies 100 in a vertical direction from top to bottom, and therefore, the connecting pipe 200 is arranged between the vertically adjacent two pump bodies 100, the exhaust pipe 300 is arranged at the bottom wall of the pump body 100, and the dust collecting assembly 400 is arranged at the connecting pipe 200 and the exhaust pipe 300. When the gas passes through the connecting pipe 200 or the exhaust pipe 300, the dust mixed in the gas can fall into the dust collecting assembly 400 under the action of gravity, so as to effectively collect the dust.

[0047] Further, the connecting pipe 200 includes a first end 210 and a second end 220. In the adjacent two pump bodies 100, the first end 210 is connected with the outlet of the upper pump body 100, and the second end 220 is connected with the inlet of the lower pump body 100. The dust collecting assembly 400 is arranged between the first end 210 and the second end 220, and the dust collecting assembly 400 is vertically below the first end 210.

[0048] In the embodiment, the line connecting the first end 210 and the second end 220 is arranged at an angle with the vertical line, so that the connecting pipe 200 is arranged obliquely. On this basis, the dust collecting member 430 is arranged vertically below the first end 210, so that the gas entering the first end 210 of the connecting pipe 200 from the upper pump body 100 flows towards the dust collecting member 430, and the dust is driven by the airflow and falls into the dust collecting member 430 under the action of gravity, so as to effectively collect the dust and avoid the dust accumulating in the connecting pipe 200.

[0049] Further, the exhaust pipe 300 includes a vertical section 310 and a horizontal section 320 connected with each other, and the dust collecting assembly 400 is arranged at the connection between the vertical section 310 and the horizontal section 320, and the dust collecting assembly 400 is vertically below the vertical section 310.

[0050] In the embodiment, the vertical section 310 is connected with the outlet of the pump body 100, therefore, by setting the dust collecting member 430 vertically below the vertical section 310, the gas flows towards the dust collecting member 430 after entering the vertical section 310 of the exhaust pipe 300 from the pump body 100, so that the dust is brought into the dust collecting member 430 under the action of the gas flow and gravity, effectively realizing the collection of the dust and avoiding the accumulation of the dust at the exhaust pipe 300.

[0051] In conclusion, the utility model provides a kind of vacuum pump 10, at least two pump bodies 100 are connected in turn, and two adjacent pump bodies 100 are connected by connecting pipe 200, so that gas can pass through multiple pump bodies 100 in turn;And in at least one pump body 100, exhaust pipe 300 is arranged to realize normal gas exhaust;By setting dust collecting assembly 400 at connecting pipe 200, in the case that gas flows from the previous pump body 100 to the next pump body 100 through connecting pipe 200, dust and other impurities in the gas can be collected by dust collecting assembly 400, to avoid dust accumulation at the connection, thereby avoiding the accumulation of dust into the next pump body 100 after long-time accumulation into large-particle structure, causing pump body 100 to be stuck, thereby effectively prolonging the service life of pump body 100;Similarly, by also setting dust collecting assembly 400 at exhaust pipe 300, dust and other impurities in exhaust pipe 300 can be collected by dust collecting assembly 400, to avoid dust accumulation at exhaust pipe 300, and to avoid the accumulation of dust causing the inner diameter of exhaust pipe 300 to shrink or even block the entire exhaust pipe 300, to ensure that vacuum pump 10 can operate stably.

[0052] The above is only preferred embodiment of the utility model, and is not used to limit the utility model, for the person skilled in the art, the utility model can have various changes and changes. Any modification, equivalent replacement, improvement, etc. made within the spirit and principles of the utility model shall be included within the protection scope of the utility model.

Claims

1. A vacuum pump, characterized by, The application relates to a dust collection system for a plurality of pumps. The dust collection system comprises: at least two pump bodies (100); a connecting pipe (200) connecting two adjacent pump bodies (100); an exhaust pipe (300) arranged on the last pump body (100); 2. Vacuum pump according to claim 1, characterized in that at least two dust collection assemblies (400), wherein at least one dust collection assembly (400) is arranged on the connecting pipe (200) and at least one dust collection assembly (400) is arranged on the exhaust pipe (300).

3. Vacuum pump according to claim 1 or 2, characterized in that The dust collection assembly (400) is detachably connected with the connecting pipe (200).

4. The vacuum pump of claim 1, wherein, The dust collection assembly (400) is detachably connected with the exhaust pipe (300). The dust collection assembly (400) comprises a dust collection pipe (410), a fastener (420) and a dust collection member (430) connected in sequence.

5. Vacuum pump according to claim 4, characterized in that The dust collection pipe (410) is connected with the connecting pipe (200) or the exhaust pipe (300), and the dust collection member (430) is detachably connected with the dust collection pipe (410) through the fastener (420).

6. The vacuum pump of claim 4, wherein, The dust collection pipe (410), the fastener (420) and the dust collection member (430) are connected in sequence along the vertical direction.

7. A vacuum pump according to claim 4, characterized in that The dust collection member (430) comprises a connecting portion (431) and a dust collection cavity (432) connected with each other, the connecting portion (431) is connected with the dust collection pipe (410), and the inner diameter of the connecting portion (431) is smaller than that of the dust collection cavity (432).

8. The vacuum pump of claim 1, wherein, The dust collection assembly (400) further comprises a sealing ring (440) arranged between the dust collection pipe (410) and the dust collection member (430).

9. Vacuum pump according to claim 8, characterized in that The at least two pump bodies (100) are horizontally arranged and stacked in a vertical direction, and the exhaust pipe (300) is arranged at the outlet of the lower pump body (100).

10. Vacuum pump according to claim 8 or 9, characterized in that The connecting pipe (200) comprises a first end (210) and a second end (220), the first end (210) is connected with the outlet of the upper pump body (100) in the two adjacent pump bodies (100), the second end (220) is connected with the inlet of the lower pump body (100), the dust collection assembly (400) is arranged between the first end (210) and the second end (220), and the dust collection assembly (400) is vertically arranged below the first end (210). The exhaust pipe (300) comprises a vertical section (310) and a horizontal section (320) connected with each other, the vertical section (310) is connected with the outlet of the pump body (100), the dust collection assembly (400) is arranged at the connection between the vertical section (310) and the horizontal section (320), and the dust collection assembly (400) is vertically arranged below the vertical section (310).

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