Electrostatic chuck in shape of loriophyllum commune

Abstract

The utility model relates to a leafy grass-shaped electrostatic chuck, which comprises an adsorption surface for adsorbing an object to be adsorbed at one end of a ceramic disc, the first electrode conductive block is a disc-shaped block provided with an outer frame, and the interior of the first electrode conductive block is a hollow cavity; the second electrode conductive block is arranged in the outer frame of the first electrode conductive block in a staggered manner; the second electrode conductive block and the first electrode conductive block are attached to the other end of the ceramic plate; one end of the placing table is provided with a convex rhombus, and the convex rhombus is embedded into the gap between the second electrode conductive block and the first electrode conductive block; wherein the second electrode conductive block is in a multi-leaf clover shape, the first electrode conductive block is a hollow disc-shaped block which is correspondingly provided with a multi-leaf clover-shaped outer frame, and the multi-leaf clover shape is staggered, so that rapid distribution of uniform electrostatic induction is achieved, and the electrostatic adsorption force is enhanced.

Description

TECHNICAL FIELD

[0001] An electrostatic chuck, in particular, a multi-leaf clover shape electrostatic chuck. BACKGROUND

[0002] The prior art electrostatic chuck, the positive electrode sheet and the negative electrode sheet generating static electricity, the distribution area formed is not the same, resulting in the induction of positive static electricity more than negative, or the induction of positive static electricity less than negative, in addition, the layout of the positive electrode sheet and the negative electrode sheet is staggered, so that the effect of generating static electricity is limited.

[0003] As shown in Figure 1 , Figure 2 The first electrode conductive block 12 and the second electrode conductive block 13 of the prior art are staggered in layout, and the distribution area formed is not the same, so that the effect of generating static electricity is limited. SUMMARY

[0004] The utility model relates to a multi-leaf clover shape electrostatic chuck, wherein, including: a ceramic disc, the ceramic disc one end has a plurality of bumps, forms the adsorption surface of adsorbing the adsorption object, a first electrode conductive block, the first electrode conductive block is the disc shaped block with frame, and the inside is hollow cavity, a second electrode conductive block, the second electrode conductive block is staggered in the frame of the first electrode conductive block, and the second electrode conductive block and the first electrode conductive block have a gap between the frame, and the second electrode conductive block and the first electrode conductive block are attached to the other end of the ceramic disc, a placing table, one end of the placing table has a convex diamond, the convex diamond is embedded in the gap between the second electrode conductive block and the first electrode conductive block, and the second electrode conductive block and the first electrode conductive block are attached to one end of the placing table, a cooling device, the cooling device is provided with an upper end and a lower end, the upper end is attached to the other end of the placing table, and the lower end has a mounting hole, and a connecting head, one end of the connecting head is provided with the mounting hole, wherein the second electrode conductive block is a multi-leaf clover shape, and the first electrode conductive block is a hollow disc shaped block with a multi-leaf clover shape frame, wherein the second electrode conductive block and the first electrode conductive block form static electricity on the surface of the ceramic disc, so as to adsorb the adsorption object.

[0005] The utility model relates to a multi-leaf clover shape electrostatic chuck, wherein, the second electrode conductive block and the first electrode conductive block, the positive and negative electric properties are opposite, so as to adsorb the adsorption object, the second electrode conductive block and the first electrode conductive block, and the positive and negative electric properties are opposite again, so as to separate the adsorption object.

[0006] The utility model discloses a multi-leaf grass shape's electrostatic chuck, wherein the first electrode conducting block is equipped with at least one convex rod, and the second electrode conducting block is equipped with at least one rod seam, wherein the at least one convex rod and the at least one rod seam correspond to stagger, so as to evenly and quickly distribute the static induction.

[0007] The utility model discloses a multi-leaf grass shape's electrostatic chuck, wherein the ceramic disc forms the air guide channel between the plurality of convex blocks, when the ceramic disc completely adsorbs the object to be adsorbed, the ceramic disc forms the air guide channel between the plurality of convex blocks, and when the ceramic disc does not completely adsorb the object to be adsorbed, air leakage from the air guide channel is monitored.

[0008] The utility model discloses a multi-leaf grass shape's electrostatic chuck, wherein the placing table is equipped with at least one air guide channel and at least one air guide hole, wherein the cooling device is equipped with at least one air guide channel and at least one air guide hole, and the first electrode conducting block is equipped with at least one recess.

[0009] The utility model discloses a multi-leaf grass shape's electrostatic chuck, wherein the convex rhombus is the insulator of loop shape closed, and the electrically conductive between the second electrode conducting block and the first electrode conducting block of attaching the placing table is blocked, wherein the inside of the convex rhombus loop at one end of the placing table has an electrode hole, and the outside of the convex rhombus loop at one end of the placing table has another electrode hole.

[0010] The utility model discloses a multi-leaf grass shape's electrostatic chuck, wherein the upper end portion has two electrode holes, and the installation hole is communicated with the two electrode holes.

[0011] The utility model discloses a multi-leaf grass shape's electrostatic chuck, wherein the second electrode conducting block and the first electrode conducting block are each distributed with the same area.

[0012] The utility model discloses a multi-leaf grass shape's electrostatic chuck, wherein the second electrode conducting block and the first electrode conducting block are each distributed with the same area.

[0013] The utility model discloses a multi-leaf grass shape's electrostatic chuck, wherein the second electrode conducting block and the first electrode conducting block are each distributed with the same area.

[0014] The utility model discloses a multi-leaf grass shape's electrostatic chuck, wherein the second electrode conducting block and the first electrode conducting block are each distributed with the same area.

[0015] The utility model relates to a static chuck of multi-leaf grass shape, wherein the second electrode conducting block is of multi-leaf grass shape, the first electrode conducting block is a hollow disc-shaped block with a multi-leaf grass shape outer frame, in addition, the first electrode conducting block is provided with at least one convex rod, the second electrode conducting block is provided with at least one rod seam, wherein the at least one convex rod and the at least one rod seam correspond to staggered distribution, achieving the effect of enhancing the uniform distribution of static induction, and correspondingly enhancing the adsorption force effect of the static chuck on the adsorbed object. The utility model overcomes the limitation of the prior art that the distribution of the positive electrode sheet and the negative electrode sheet is staggered, uneven static induction is generated, and the distribution is not fast, so that the utility model overcomes the limitation of the prior art that the effect of generating static electricity is limited. BRIEF DESCRIPTION OF DRAWINGS

[0016] The utility model will be explained further in detail in combination with the drawings and specific embodiments.

[0017] Figure 1 The explosion schematic view of the prior art single-electrode static chuck;

[0018] Figure 2 is Figure 1 the structure schematic view of another view

[0019] Figure 3 The explosion schematic view of the first state static chuck of multi-leaf grass shape of the utility model;

[0020] Figure 4 The explosion schematic view of the second state static chuck of multi-leaf grass shape of the utility model;

[0021] Figure 5 The first perspective schematic view of the static chuck of multi-leaf grass shape of the utility model;

[0022] Figure 6 The first perspective schematic view of the static chuck of multi-leaf grass shape of the utility model;

[0023] Figure 7 The second perspective schematic view of the static chuck of multi-leaf grass shape of the utility model;

[0024] Figure 8 The third perspective schematic view of the static chuck of multi-leaf grass shape of the utility model;

[0025] Figure 9 The fourth perspective schematic view of the static chuck of multi-leaf grass shape of the utility model;

[0026] Figure 10 The connection head schematic view of the static chuck of multi-leaf grass shape of the utility model;

[0027] Figure 11The utility model discloses a first visual angle ceramic disc schematic drawing of static chuck of multi-leaf grass shape,

[0028] Figure 12 The utility model discloses a second visual angle ceramic disc schematic drawing of static chuck of multi-leaf grass shape,

[0029] Figure 13 The utility model discloses a first visual angle first electrode conductive block schematic drawing of static chuck of multi-leaf grass shape,

[0030] Figure 14 The utility model discloses a second visual angle first electrode conductive block schematic drawing of static chuck of multi-leaf grass shape,

[0031] Figure 15 The utility model discloses a first visual angle second electrode conductive block schematic drawing of static chuck of multi-leaf grass shape,

[0032] Figure 16 The utility model discloses a second visual angle second electrode conductive block schematic drawing of static chuck of multi-leaf grass shape,

[0033] Figure 17 The utility model discloses a first visual angle placing table schematic drawing of static chuck of multi-leaf grass shape,

[0034] Figure 18 The utility model discloses a second visual angle placing table schematic drawing of static chuck of multi-leaf grass shape,

[0035] Figure 19 The utility model discloses a first visual angle cooling device upper end portion schematic drawing of static chuck of multi-leaf grass shape,

[0036] Figure 20 The utility model discloses a second visual angle cooling device upper end portion schematic drawing of static chuck of multi-leaf grass shape,

[0037] Figure 21 The utility model discloses a first visual angle cooling device lower end portion schematic drawing of static chuck of multi-leaf grass shape,

[0038] Figure 22 The utility model discloses a second visual angle cooling device lower end portion schematic drawing of static chuck of multi-leaf grass shape.

[0039] Explanation of reference signs

[0040] 10 chuck

[0041] 20 static chuck of multi-leaf grass shape

[0042] 11 ceramic disc

[0043] 111 convex block

[0044] 112 gas guide hole

[0045] 12 first electrode conductive block

[0046] 120 spacing slot

[0047] 121 hollow cavity

[0048] 124 notch

[0049] 126 convex rod

[0050] 13 second electrode conductive block

[0051] 133 rod slot

[0052] 14 placement platform

[0053] 140 convex diamond

[0054] 141 electrode hole

[0055] 142 electrode hole

[0056] 143 gas guide passage

[0057] 146 gas guide hole

[0058] 15 cooling device

[0059] 17 upper end portion

[0060] 171 electrode hole

[0061] 172 electrode hole

[0062] 173 gas guide hole

[0063] 174 gas guide hole

[0064] 175 coupling column

[0065] 176 gas guide passage

[0066] 18 lower end portion

[0067] 181 lock hole

[0068] 185 installation hole

[0069] 19 connector

[0070] 191 electrode hole DETAILED DESCRIPTION

[0071] The technical solutions in the embodiments of the utility model will be described clearly and completely in combination with the drawings in the embodiments of the utility model. In the following description, a large number of specific details are set forth in order to enable a full understanding of the utility model, but the utility model can also be implemented in other manners different from those described herein, and those skilled in the art can make similar generalizations without departing from the connotation of the utility model, therefore, the utility model is not limited to the specific embodiments disclosed below.

[0072] As Figures 2 to 22 The utility model discloses a kind of electrostatic chuck 20 of multi-leaf grass shape, wherein, including: a ceramic disc 11, the ceramic disc 11 one end has multiple bumps 111, forming the adsorption surface of adsorbed object to be adsorbed;A first electrode conducting block 12, the first electrode conducting block 12 is the disc-shaped block with frame, the first electrode conducting block 12 inside is hollow cavity 121;A second electrode conducting block 13, the second electrode conducting block 13 is staggered in the frame of the first electrode conducting block 12, the second electrode conducting block 13 with the first electrode conducting block 12 between there is a gap 120, the second electrode conducting block 13 and the first electrode conducting block 12 are attached to the other end of the ceramic disc 11;A placing table 14, one end of the placing table 14 has a convex diamond 140, the convex diamond 140 is embedded in the gap 120 between the second electrode conducting block 13 and the first electrode conducting block 12, the second electrode conducting block 13 and the first electrode conducting block 12 are attached to one end of the placing table 14;A cooling device 15, the cooling device 15 is provided with an upper end portion 17 and a lower end portion, the upper end portion 17 is attached to the other end of the placing table 14, the lower end portion has a mounting hole 185;And a connecting head 19, one end of the connecting head 19 is provided with the mounting hole 185;Wherein the second electrode conducting block 13 is multi-leaf grass shape, the first electrode conducting block 12 is hollow disc-shaped block with corresponding multi-leaf grass shape frame;Wherein the second electrode conducting block 13 and the first electrode conducting block 12 form static electricity on the surface of ceramic disc 11, so as to adsorb the object to be adsorbed.The connecting head 19 has electrode hole 191.

[0073] As Figures 13 to 16 The utility model discloses a kind of electrostatic chuck 20 of multi-leaf grass shape, wherein, the second electrode conducting block 13 with the first electrode conducting block 12, positive and negative electric property is opposite, so as to adsorb the object to be adsorbed, the second electrode conducting block 13 with the first electrode conducting block 12, with the positive and negative electric property of previous time again opposite, so as to separate the object to be adsorbed.

[0074] As Figures 13 to 16As shown in the utility model is a kind of electrostatic chuck 20 of multiple leaf grass shape, wherein the first electrode conducting block 12 is provided with at least one convex rod 126, the second electrode conducting block 13 is provided with at least one rod seam 133, wherein the at least one convex rod 126 and the at least one rod seam 133 are correspondingly staggered, and the uniform electrostatic induction is quickly distributed.

[0075] As Figures 2 to 12 As shown in the utility model is a kind of electrostatic chuck 20 of multiple leaf grass shape, wherein the multiple convex blocks 111 between the ceramic disc 11 form air guide channel, when the ceramic disc 11 completely adsorbs the adsorbed object, the multiple convex blocks 111 between the ceramic disc 11 form air guide channel, and when the ceramic disc 11 does not completely adsorb the adsorbed object, air leakage from the air guide channel is monitored.

[0076] As Figures 2 to 21 As shown in the utility model is a kind of electrostatic chuck 20 of multiple leaf grass shape, wherein the placing table 14 is provided with at least one air guide channel 143 and at least one air guide hole 146, wherein the cooling device 15 is provided with at least one air guide channel 176 and at least one air guide hole (173, 174), wherein the first electrode conducting block 12 is provided with at least one notch 124.

[0077] As Figures 2 to 21 As shown in the utility model is a kind of electrostatic chuck 20 of multiple leaf grass shape, wherein the convex rhombus 140 is a loop-shaped closed insulator, which blocks the electrical conduction between the second electrode conducting block 13 attached to the placing table 14 and the first electrode conducting block 12, wherein the convex rhombus 140 loop inside one end of the placing table 14 has an electrode hole 142, and the convex rhombus 140 loop outside one end of the placing table 14 has another electrode hole 141. The electrode hole 141 on the outside of the convex rhombus 140 loop and the electrode hole 142 on the inside of the convex rhombus 140 loop are not electrically conductive, forming corresponding second electrode conducting block 13 and first electrode conducting block 12, and the corresponding positive and negative electrical properties are not conductive.

[0078] The utility model is a kind of electrostatic chuck 20 of multiple leaf grass shape, wherein the upper end 17 has two electrode holes (171, 172), the locating hole 185 is communicated with two electrode holes (171, 172), wherein the upper end 17 has a combination column 175, and the lower end 18 has a lock hole 181.

[0079] The utility model is a kind of electrostatic chuck 20 of multiple leaf grass shape, wherein the second electrode conducting block 13 and the first electrode conducting block 12 each have the same distribution area.

[0080] The utility model is a kind of electrostatic chuck 20 of multiple leaf grass shape, wherein the second electrode conducting block 13 and the first electrode conducting block 12 each have different distribution areas.

[0081] The utility model discloses a static chuck 20 of multi-leaf grass shape, wherein the distribution of voltage or current of each of the second electrode conducting block 13 and the first electrode conducting block 12 is different.

[0082] The utility model discloses a static chuck 20 of multi-leaf grass shape, wherein the distribution of voltage or current of each of the second electrode conducting block 13 and the first electrode conducting block 12 is the same.

[0083] The utility model discloses a static chuck 20 of multi-leaf grass shape, wherein the second electrode conducting block 13 is of multi-leaf grass shape, and the first electrode conducting block 12 is a hollow disc-shaped block with a multi-leaf grass shape outer frame. In addition, the first electrode conducting block 12 is provided with at least one protruding rod 126, and the second electrode conducting block 13 is provided with at least one rod gap 133. The at least one protruding rod 126 and the at least one rod gap 133 are staggered and distributed correspondingly, thereby enhancing the distribution effect of electrostatic induction and enhancing the adsorption force effect of the static chuck on the adsorbed object. The distribution of the positive electrode sheet and the negative electrode sheet in the prior art is staggered and less, and therefore the electrostatic effect is limited.

[0084] Obviously, the described embodiments are only a part of the embodiments of the utility model, rather than all the embodiments. Based on the embodiments in the utility model, all other embodiments obtained by those skilled in the art without creative labor belong to the scope of protection of the utility model.

Claims

1. A foliage-shaped electrostatic chuck, characterized in that, The application relates to a ceramic plate with a plurality of convex blocks at one end of the plate, forming an adsorption surface for adsorbing an object to be adsorbed; a first electrode conducting block in the shape of a disc with an outer frame and a hollow cavity inside; a second electrode conducting block arranged in the outer frame of the first electrode conducting block, with a gap between the second electrode conducting block and the first electrode conducting block, and the second electrode conducting block and the first electrode conducting block being attached to the other end of the ceramic plate; a placing table with a convex rhombus at one end of the table, the convex rhombus being embedded in the gap between the second electrode conducting block and the first electrode conducting block, and the second electrode conducting block and the first electrode conducting block being attached to one end of the placing table; a cooling device with an upper end and a lower end, the upper end being attached to the other end of the placing table, and the lower end having a mounting hole; and a connecting head with one end penetrating the mounting hole; wherein the second electrode conducting block is in the shape of a multi-leaf clover, and the first electrode conducting block is a hollow disc with a multi-leaf clover-shaped outer frame; wherein the second electrode conducting block and the first electrode conducting block form static electricity on the surface of the ceramic plate, so as to adsorb the object to be adsorbed; wherein the first electrode conducting block is provided with at least one convex rod, and the second electrode conducting block is provided with at least one rod gap, wherein the at least one convex rod and the at least one rod gap are correspondingly staggered, and the uniform static electricity induction is quickly distributed. The second electrode conducting block and the first electrode conducting block are opposite in electric property, so as to adsorb the object to be adsorbed, and the second electrode conducting block and the first electrode conducting block are opposite in electric property again, so as to separate the object to be adsorbed. The plurality of convex blocks of the ceramic plate form an air guide channel, when the ceramic plate completely adsorbs the object to be adsorbed, the plurality of convex blocks of the ceramic plate form an air guide channel; and when the ceramic plate does not completely adsorb the object to be adsorbed, air leakage from the air guide channel is monitored. The placing table is provided with at least one air guide channel and at least one air guide hole, the cooling device is provided with at least one air guide channel and at least one air guide hole, and the first electrode conducting block is provided with at least one recess. The convex rhombus is a loop-shaped closed insulator, which blocks the electric conduction of the second electrode conducting block and the first electrode conducting block attached to the placing table, wherein the inside of the loop at one end of the placing table has an electrode hole, and the outside of the loop at one end of the placing table has another electrode hole. The upper end has two electrode holes, and the mounting hole is connected to the two electrode holes. The second electrode conducting block and the first electrode conducting block have the same distribution area. The second electrode conducting block and the first electrode conducting block have different distribution areas. The second electrode conducting block and the first electrode conducting block have different distribution voltages or currents. The second electrode conducting block and the first electrode conducting block have the same distribution voltages or currents.

2. The multi-lobed clover-shaped electrostatic chuck of claim 1, wherein, ​ 3. The multi-lobed clover-shaped electrostatic chuck of claim 1, wherein, ​ ​ 4. The multi-lobed clover-shaped electrostatic chuck of claim 1, wherein, ​ 5. The multi-lobed clover-shaped electrostatic chuck of claim 1, wherein, ​ 6. The multi-lobed clover-shaped electrostatic chuck of claim 1, wherein, ​ 7. The multi-lobed clover-shaped electrostatic chuck of claim 1, wherein, ​ 8. The multi-lobed clover-shaped electrostatic chuck of claim 1, wherein, ​ 9. The multi-leaf clover-shaped electrostatic chuck of claim 1, wherein, ​ 10. The multi-lobed clover-shaped electrostatic chuck of claim 1, wherein, ​

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