Double-layer quartz tube water-cooling sealing structure

Abstract

The utility model relates to the technical field of quartz tubes, and discloses a double-layer quartz tube water-cooling sealing structure, which comprises an outer tube I, two inner tubes and an outer tube II, the outer part of the outer tube I is connected with a sliding ring in a sliding manner, the four sides of the inner wall of the sliding ring are fixedly connected with clamping blocks, the inner walls of the clamping blocks are connected with balls in a sliding manner, and the inner walls of the clamping blocks are connected with the balls in a sliding manner. The first outer pipe and the second outer pipe are in a clamping relation, one side of each ball is fixedly connected with an elastic assembly used for providing a clamping effect, the inner wall of one inner pipe is fixedly connected with a rubber pad, the inner wall of the other inner pipe is fixedly connected with a supporting ring, and the inner wall of the supporting ring is in sliding connection with a rubber ring. According to the quartz tube, after the first outer tube and the second outer tube are connected, the rubber ring at the position can be inserted into the inner wall of the rubber pad, tight attachment of the rubber ring and the rubber pad is guaranteed under the elastic counter-acting force of the second spring, and the sealing performance of the quartz tube is improved.

Description

TECHNICAL FIELD

[0001] The utility model relates to quartz tube technical field especially relates to a double -layer quartz tube water -cooling sealing structure. BACKGROUND

[0002] Quartz tube technology is a kind of technology using high-purity silicon dioxide to manufacture special industrial components, especially plays a key role in the field of semiconductor manufacturing. Quartz tube is widely used in optics, electronics, chemical industry and other industries due to its high temperature resistance, corrosion resistance, good thermal stability and excellent light transmission performance. In the semiconductor industry, quartz tube is often used in high-temperature diffusion furnace and other precision equipment as the key material of reaction chamber or protective tube, ensuring the purity and accuracy in the process of semiconductor manufacturing.

[0003] Double-layer quartz tube water cooling is a key technology used in high-temperature and high-vacuum environment, which realizes the cooling of inner quartz tube by injecting cooling liquid into the annular cavity between inner and outer quartz tubes, thereby maintaining the normal working temperature of the equipment.

[0004] In the prior art, some double-layer quartz tubes are only connected by simple pipe sections, which cannot guarantee the sealing effect of the water cooling liquid during circulation, further leading to leakage of the cooling liquid and causing the quality of the semiconductor to decrease. Therefore, a double-layer quartz tube water cooling sealing structure is proposed to solve the above problems. UTILITY MODEL CONTENTS

[0005] In order to make up for the above shortcomings, the utility model provides a double-layer quartz tube water cooling sealing structure, which aims to improve the problem that some double-layer quartz tubes in the prior art cannot guarantee the sealing effect of the water cooling liquid during circulation, further leading to leakage of the cooling liquid and causing the quality of the semiconductor to decrease.

[0006] In order to achieve the above purpose, the utility model adopts the following technical scheme:

[0007] A double-layer quartz tube water cooling sealing structure, comprising an outer tube one, two inner tubes and an outer tube two, the outer tube one is externally connected with a sliding ring, the inner wall of the sliding ring is fixedly connected with a clamping block on four sides, the inner wall of the clamping block is slidably connected with a ball, the ball is in clamping relationship with the outer tube two, one side of the ball is fixedly connected with an elastic component for providing clamping action, the inner wall of one of the inner tubes is fixedly connected with a rubber pad, the inner wall of the other inner tube is fixedly connected with a support ring, the inner wall of the support ring is slidably connected with a rubber ring, the outer part of the rubber ring is slidably connected to the inner wall of the rubber pad.

[0008] As a further description of the above technical scheme:

[0009] The inner wall of the outer pipe one and the inner wall of the outer pipe two are fixedly connected with a plurality of supporting rods, and the other ends of the plurality of supporting rods are fixedly connected to the outer portions of the two inner pipes respectively;

[0010] As a further description of the above technical solution:

[0011] The elastic assembly comprises a limiting disc, one side of the limiting disc is fixedly connected to one side of the ball, the other side of the limiting disc is fixedly connected with a spring one, and the other end of the spring one is fixedly connected to the inner wall of the clamping block.

[0012] As a further description of the above technical solution:

[0013] One side of the rubber ring is fixedly connected with a limiting ring, and the outer portion of the limiting ring is slidingly connected to the inner wall of the supporting ring.

[0014] As a further description of the above technical solution:

[0015] One side of the limiting ring is fixedly connected with a spring two, and the other end of the spring two is fixedly connected to the inner wall of the supporting ring.

[0016] As a further description of the above technical solution:

[0017] One side of the outer pipe one is slidingly connected to one side of the outer pipe two, and the outer portion of the sliding ring is slidingly connected to the outer portion of the outer pipe two.

[0018] As a further description of the above technical solution:

[0019] One side of each of the two inner pipes is in contact, and the plurality of supporting rods are uniformly distributed on the outer portions of the inner pipes.

[0020] As a further description of the above technical solution:

[0021] One side of the supporting ring is in contact with one side of the rubber pad, and the outer portion of the supporting ring is slidingly connected to the inner wall of one of the inner pipes.

[0022] The utility model has the advantages of:

[0023] In the utility model, when the outer pipe one and the outer pipe two are connected, the rubber ring is inserted into the inner wall of the rubber pad, and the elastic reaction force of the spring two ensures the close contact of the rubber ring and the rubber pad, thereby improving the sealing performance of the quartz pipe. BRIEF DESCRIPTION OF DRAWINGS

[0024] Figure 1A kind of double quartz tube water-cooling sealing structure's three-dimensional schematic diagram is proposed in the utility model;

[0025] Figure 2 A kind of double quartz tube water-cooling sealing structure's sliding ring's structural schematic diagram is proposed in the utility model;

[0026] Figure 3 For Figure 2 The enlarged view of A in it;

[0027] Figure 4 For Figure 2 The enlarged view of B in it.

[0028] Legend:

[0029] 1, outer tube one;2, strut;3, inner tube;4, outer tube two;5, sliding ring;6, clamping block;7, ball;8, limit disc;9, spring one;10, rubber pad;11, support ring;12, rubber ring;13, limit ring;14, spring two. Specific embodiments

[0030] The technical scheme in the embodiments of the utility model will be described clearly and completely in conjunction with the drawings in the embodiments of the utility model below, and obviously, the described embodiments are only part of the embodiments of the utility model, not all the embodiments. Based on the embodiments in the utility model, all other embodiments obtained by the person skilled in the art without creative labor belong to the scope of protection of the utility model.

[0031] With reference to Figures 1 to 3 The utility model provides an embodiment: a kind of double quartz tube water-cooling sealing structure, including outer tube one 1, two inner tubes 3, outer tube two 4, one side of two inner tubes 3 is contacted, one side of outer tube one 1 is slidably connected in one side of outer tube two 4, one side of outer tube one 1 here has protruding portion, and one side of outer tube two 4 has recessed portion, and they are just formed clamping, and the inner wall of outer tube one 1 and outer tube two 4 is fixedly connected with multiple struts 2, and the other end of multiple struts 2 is fixedly connected in the outside of two inner tubes 3 respectively, and the strut 2 here is used to ensure the fixed connection of two inner tubes 3 and outer tube one 1 and outer tube two 4.

[0032] A plurality of struts 2 are evenly distributed outside the inner tube 3, and the even distribution of the struts 2 ensures that the forces on the respective support points of the outer tube one 1 and the outer tube two 4 connected with the struts 2 are balanced, and the outer tube one 1 is slidingly connected with the sliding ring 5 outside, which provides stable sliding support for the sliding ring 5, and the sliding ring 5 is slidingly connected outside the outer tube two 4, and the inner wall of the sliding ring 5 is fixedly connected with the clamping block 6 on four sides, which is a key part of the connection between the outer tube one 1 and the outer tube two 4, and the inner wall of the clamping block 6 is slidingly connected with the ball 7, and the ball 7 is in a clamping relationship with the outer tube two 4, which can ensure the connection between the outer tube one 1 and the outer tube two 4.

[0033] One side of the ball 7 is fixedly connected with an elastic assembly for providing clamping action, which includes a limiting disc 8, one side of the limiting disc 8 is fixedly connected with one side of the ball 7, which limits the sliding range of the ball 7 and prevents accidental falling, and the other side of the limiting disc 8 is fixedly connected with the spring one 9, and the other end of the spring one 9 is fixedly connected with the inner wall of the clamping block 6, which makes the ball 7 form a stable clamping relationship with the outer tube two 4 and ensures stable connection.

[0034] Referring to Figure 2 and Figure 4 One inner wall of one of the inner tubes 3 is fixedly connected with a rubber pad 10, which is made of rubber and has good elasticity and better waterproof performance, and the inner wall of the other inner tube 3 is fixedly connected with a support ring 11, which provides effective support for the support ring 11, and one side of the support ring 11 is in contact with one side of the rubber pad 10, and the outer wall of the support ring 11 is slidingly connected with the inner wall of one of the inner tubes 3, which can ensure stable connection between the two inner tubes 3 and keep them in the same horizontal line after the support ring 11 is slid into the inner wall of one of the inner tubes 3.

[0035] The inner wall of the support ring 11 is slidingly connected with a rubber ring 12, and the outer wall of the rubber ring 12 is slidingly connected with the inner wall of the rubber pad 10, which can ensure that the external cooling liquid does not enter the inside of the inner tube 3 from the gap after the rubber ring 12 is inserted into the inner wall of the rubber pad 10, thereby improving the sealing performance, and one side of the rubber ring 12 is fixedly connected with a limiting ring 13, and the outer wall of the limiting ring 13 is slidingly connected with the inner wall of the support ring 11, which limits the sliding range of the rubber ring 12 and is a limiting structure, and one side of the limiting ring 13 is fixedly connected with a spring two 14, and the other end of the spring two 14 is fixedly connected with the inner wall of the support ring 11, which can ensure the stable clamping of the rubber ring 12 and the rubber pad 10 and further improve the sealing performance, effectively preventing the cooling liquid from entering the inside of the inner tube 3 and thereby hindering the manufacture of semiconductors, thereby ensuring the quality of semiconductor manufacturing.

[0036] Working principle: in use, first, two inner tubes 3 are connected, and the outer tube one 1 and the outer tube two 4 are also contacted, because the support rod 2 connects the inner and outer tubes. At this time, the sliding ring 5 is moved to the intersection of the outer tube one 1 and the outer tube two 4, and then the sliding ring 5 is rotated, at this time, the sliding ring 5 drives the clamping block 6 to rotate, and the groove outside the outer tube two 4 extrudes the ball 7 into the inner wall of the clamping block 6, and then the ball 7 is released to the groove outside the outer tube two 4 after rotating a certain angle, the groove outside the outer tube two 4 has a circular slot at the starting point and the end point, which can be tightly combined with the ball 7, and the spring one 9 is extruded when the ball 7 is retracted into the inner wall of the clamping block 6, until the clamping block 6 is combined with the other circular groove at the end of the groove to release the force to pop out the ball 7, ensuring the stable connection of the outer tube one 1 and the outer tube two 4.

[0037] After connection, the rubber ring 12 inside the support ring 11 is inserted into the inner wall of the rubber pad 10, so as to ensure the close contact of the two under the extrusion force of the spring two 14, effectively improve the sealing performance of the two inner tubes 3 when connected, prevent the cooling liquid from penetrating from the outside of the inner tube 3 to the inside of the inner tube 3, so as to affect the manufacture of semiconductor and ensure the manufacturing quality of semiconductor.

[0038] The design of the whole device makes the cooling system work efficiently in the semiconductor manufacturing process, while maintaining the sealing performance inside, avoiding the leakage of cooling liquid to interfere with the manufacturing process.

[0039] Finally, it should be pointed out that: the above only for the preferred embodiments of the present application, and not for limiting the present application, although the present application has been described in detail with reference to the foregoing embodiments, for those skilled in the art, it still can modify the technical solutions recorded in the foregoing embodiments, or make equivalent replacement for part of the technical features, any modification, equivalent replacement, improvement, etc. within the spirit and principles of the present application, should be included in the protection scope of the present application.

Claims

1. A double-layered quartz tube water-cooled sealing structure, comprising an outer tube one (1), two inner tubes (3), and an outer tube two (4), characterized in that: The outer tube one (1) is externally slidably connected with a sliding ring (5), the inner wall of the sliding ring (5) is fixedly connected with a clamping block (6) on four sides, the inner wall of the clamping block (6) is slidably connected with a ball (7), the ball (7) is in clamping relationship with the outer tube two (4), one side of the ball (7) is fixedly connected with an elastic assembly for providing clamping action, the inner wall of one of the inner tubes (3) is fixedly connected with a rubber pad (10), the inner wall of the other inner tube (3) is fixedly connected with a support ring (11), the inner wall of the support ring (11) is slidably connected with a rubber ring (12), the outer wall of the rubber ring (12) is slidably connected with the inner wall of the rubber pad (10).

2. The water-cooled sealed structure of a double-layered quartz tube according to claim 1, characterized in that: The inner wall of the outer tube one (1) and the outer tube two (4) is fixedly connected with a plurality of support rods (2), the other end of the plurality of support rods (2) is respectively fixedly connected with the outer wall of two inner tubes (3).

3. The double-layered quartz tube water-cooled sealing structure according to claim 1, characterized in that: The elastic assembly comprises a limiting disc (8), one side of the limiting disc (8) is fixedly connected with one side of the ball (7), the other side of the limiting disc (8) is fixedly connected with a spring one (9), the other end of the spring one (9) is fixedly connected with the inner wall of the clamping block (6).

4. The double-layered quartz tube water-cooled sealing structure according to claim 3, characterized in that: One side of the rubber ring (12) is fixedly connected with a limiting ring (13), the outer wall of the limiting ring (13) is slidably connected with the inner wall of the support ring (11).

5. The double-wall quartz tube water-cooled seal structure according to claim 4, characterized in that: One side of the limiting ring (13) is fixedly connected with a spring two (14), the other end of the spring two (14) is fixedly connected with the inner wall of the support ring (11).

6. The double-wall quartz tube water-cooled seal structure according to claim 1, characterized in that: One side of the outer tube one (1) is slidably connected with one side of the outer tube two (4), the outer wall of the sliding ring (5) is slidably connected with the outer wall of the outer tube two (4).

7. The double-layered quartz tube water-cooled sealing structure according to claim 2, characterized in that: One side of the two inner tubes (3) is in contact, a plurality of support rods (2) are evenly distributed on the outer wall of the inner tube (3).

8. The double-wall quartz tube water-cooled seal structure according to claim 1, characterized in that: One side of the support ring (11) is in contact with one side of the rubber pad (10), the outer wall of the support ring (11) is slidably connected with the inner wall of one of the inner tubes (3).

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