Waste gas treatment device

Abstract

The utility model provides a waste gas treatment device which comprises a torch head, the torch head comprises a top cover and a side cover, the top cover is connected to one end of the side cover and shields the side cover, a fire outlet and a plurality of protective gas holes are formed in the surface of the top cover, the protective gas holes are arranged around the fire outlet, and the protective gas holes are communicated with the top cover. The side cover is provided with a mounting hole, and the mounting hole is communicated with the protective air hole; and the high-pressure air pump communicates with the mounting hole, and the high-pressure air pump is used for outputting inert gas. Inert gas is discharged through the protection gas holes, and the multiple protection gas holes are arranged around the fire outlet, so that nitrogen ions discharged from the fire outlet are isolated from oxygen, and generation of nitrogen oxide is avoided.

Description

TECHNICAL FIELD

[0001] The utility model relates to waste gas treatment technical field especially relates to a waste gas treatment device. BACKGROUND

[0002] With the increasingly prosperous semiconductor industry, capacity surges, various waste gases will be produced in the production process, most of these gases are serious harm to human body and environment. Although the prior art also designs waste gas treatment device to handle the waste gas produced in the production process, but the existing waste gas treatment device can not completely remove waste gas. The existing waste gas treatment device will produce nitrogen ions in the process of treating waste gas. And the existing waste gas treatment device is by the way of combustion to treat waste gas, then the combustion process will produce high temperature. The area that produces high temperature also exists nitrogen ions, then these nitrogen ions will combine with oxygen to generate nitrogen oxides under the action of high temperature. These nitrogen oxides generated are harmful gases, which will cause harm to human body and environment.

[0003] If these nitrogen oxides diffuse in the environment, it will cause serious damage to the respiratory system of human body. At the same time, the nitrogen oxides discharged into the environment will combine with water vapor to generate acid rain, thereby causing irreversible harm to the environment and causing loss to the environment. INVENTION CONTENTS

[0004] The utility model provides a waste gas treatment device to solve the problem of harm to the environment and human body caused by the combination of nitrogen ions and oxygen to generate nitrogen oxides in the prior art waste gas treatment device.

[0005] The utility model provides a waste gas treatment device, which comprises:

[0006] The torch head comprises a top cover and a side cover, the top cover is connected to one end of the side cover and covers the side cover, the top cover surface is provided with a fire outlet and a plurality of protective gas holes, a plurality of protective gas holes are arranged around the fire outlet, the side cover is provided with a mounting hole, and the mounting hole is communicated with the protective gas hole;

[0007] The high-pressure gas pump is communicated with the mounting hole, and the high-pressure gas pump is used for outputting inert gas.

[0008] According to the waste gas treatment device provided by the utility model, the protective gas holes are arranged in a ring shape with the fire outlet as the center.

[0009] According to the waste gas treatment device provided by the utility model, the top cover surface is provided with at least two groups of protective rings, and the two groups of protective rings are concentric circles with the fire outlet as the center. Each group of protective rings is provided with a plurality of protective gas holes.

[0010] The torch head further comprises a gas path, the gas path is arranged between the top cover and the side cover, and the mounting hole and the protective gas hole are communicated through the gas path.

[0011] According to the waste gas treatment device, the inner diameter of the gas path gradually increases along the flow direction of the inert gas.

[0012] According to the waste gas treatment device, the gas path is inclined along the direction close to the fire outlet along the flow direction of the inert gas.

[0013] According to the waste gas treatment device, the gas path is arranged along the axis direction of the protective gas hole.

[0014] According to the waste gas treatment device, the waste gas treatment device further comprises a pressure regulating valve, and the pressure regulating valve is connected between the high-pressure gas pump and the mounting hole.

[0015] According to the waste gas treatment device, the output pressure of the high-pressure gas pump is between 3 kg and 5 kg.

[0016] According to the waste gas treatment device, the diameter of each protective gas hole is between 0.5 mm and 2 mm.

[0017] The waste gas treatment device provided by the utility model, the protective gas hole is arranged on the top cover of the torch head, the mounting hole is arranged on the side cover of the torch head, and the protective gas hole and the mounting hole are communicated with each other. Then, the mounting hole on the torch head is connected with the high-pressure gas pump, so that the high-pressure gas pump can input the gas from the mounting hole into the torch head, and then the gas is output from the protective gas hole. Because the fire outlet is arranged on the top cover, the nitrogen ions are discharged from the top cover. The fire outlet sprays the flame to form a high-temperature area, and the nitrogen ions are discharged from the high-temperature area, so that the nitrogen ions discharged near the fire outlet can form nitrogen oxides. Therefore, the protective gas hole is arranged around the fire outlet. When the high-pressure gas pump is started, the inert gas is output by the high-pressure gas pump, and the inert gas is output from the protective gas hole, so that the external oxygen and the internal nitrogen ions are isolated, and the generation of nitrogen oxides is avoided. In the application, the inert gas is used for isolation, and the problem of generation of nitrogen oxides in the prior art is solved. BRIEF DESCRIPTION OF DRAWINGS

[0018] In order to more clearly illustrate the technical scheme of the utility model or the prior art, the following will briefly introduce the drawings needed to be used in the embodiment or the prior art description. Obviously, the drawings in the following description are some embodiments of the utility model, and other drawings can be obtained by those skilled in the art without creative labor.

[0019] Figure 1 This is a cross-sectional view of the waste gas treatment device provided by this utility model.

[0020] Figure 2 This is a top view of the waste gas treatment device provided by this utility model.

[0021] Figure label:

[0022] 1. Flame head; 11. Top cover; 12. Side cover; 13. Flame outlet; 15. Protective gas vent; 16. Mounting hole; 17. Gas passage; 171. Inlet section; 172. Outlet section;

[0023] 2. High-pressure air pump;

[0024] 3. Pressure regulating valve. Detailed Implementation

[0025] To make the objectives, technical solutions, and advantages of this utility model clearer, the technical solutions of this utility model will be clearly and completely described below with reference to the accompanying drawings. Obviously, the described embodiments are only some embodiments of this utility model, not all embodiments. Based on the embodiments of this utility model, all other embodiments obtained by those skilled in the art without creative effort are within the scope of protection of this utility model.

[0026] The following is combined Figure 1 This invention describes a waste gas treatment device, comprising a flare head 1 and a high-pressure air pump 2. The flare head 1 includes a top cover 11 and a side cover 12. The top cover 11 is connected to one end of the side cover 12 and covers the side cover 12. The surface of the top cover 11 has a flame outlet 13 and multiple protective air holes 15, which are arranged around the flame outlet 13. The side cover 12 has a mounting hole 16, which communicates with the protective air holes 15. The high-pressure air pump 2 communicates with the mounting hole 16 and is used to output inert gas.

[0027] Please refer to the above as well. Figure 1 and Figure 2In this embodiment, the torch head 1 is approximately cylindrical, with the tubular portion of the torch head 1 serving as a side cover 12. The top of the side cover 12 is open, so in this embodiment, a top cover 11 connects to the top of the side cover 12, and the top cover 11 seals the top opening of the side cover 12, thus maintaining the internal seal of the torch head 1. A flame outlet 13 is provided on the top cover 11. When the torch head 1 processes waste gas, a combustion reaction occurs, and the flame can be discharged through the flame outlet 13. Because the flame outlet 13 is the outlet of the torch head 1, all the gas inside the torch head 1 will be discharged through the flame outlet 13. Since the flame outlet 13 contains a flame and maintains combustion, the gas discharged through the flame outlet 13 will pass through the high-temperature section of the flame combustion, ensuring that the gas discharged through the flame outlet 13 is burned and does not accumulate in the air, reducing potential safety risks.

[0028] Furthermore, not only combustible gases are emitted from the burner outlet 13, but nitrogen ions generated within the torch head 1 are also emitted from the burner outlet 13. Since the burner outlet 13 is a high-temperature zone due to continuous combustion, the nitrogen ions at this temperature easily combine with oxygen in the air to form nitrogen oxides. These nitrogen oxides then diffuse into the air, causing environmental pollution, and when inhaled, they can harm human health.

[0029] The combustion reaction inside the torch head 1 also generates high temperatures. While nitrogen ions are produced inside the torch head 1 at this high temperature, they do not react with oxygen to form nitrogen oxides. This is because during the combustion reaction inside the torch head 1, the combustible material consumes most of the oxygen, thus preventing the combination of nitrogen ions with oxygen and the formation of nitrogen oxides. Therefore, the generated nitrogen ions are carried out from the flame outlet 13 along with the flame. There are two conditions for nitrogen ions to form nitrogen oxides: one is combination with oxygen, and the other is high temperature. As can be seen from the above, reducing the oxygen content can prevent the formation of nitrogen oxides. Therefore, in this embodiment, the method of isolating nitrogen ions and oxygen is used to avoid the formation of nitrogen oxides.

[0030] like Figure 2 As shown, a plurality of protective vent holes 15 are provided around the outer ring of the burner outlet 13. Simultaneously, a mounting hole 16 is provided on the side cover 12, connecting the mounting hole 16 to the protective vent holes 15. Furthermore, this embodiment also includes a high-pressure air pump 2, whose outlet is connected to the mounting hole 16, allowing the high-pressure gas output by the high-pressure air pump 2 to be discharged into the mounting hole 16. Because the mounting hole 16 and the protective vent holes 15 are interconnected, the high-pressure gas entering the mounting hole 16 will be discharged from the protective vent holes 15.

[0031] Furthermore, the protective vent 15 is arranged around the burner outlet 13, so the high-pressure gas is discharged around the burner outlet 13. Because it is necessary to prevent nitrogen ions from combining with oxygen to form nitrogen oxides, a high-pressure gas pump 2 is used to output high-pressure gas, causing the high-pressure gas to be discharged from the protective vent 15 at a relatively high flow rate, thereby flushing away this portion of the air. And under a continuous high flow rate, the high-pressure gas discharged from the protective vent 15 forms an air wall, preventing surrounding air from passing through the highly permeable air wall. At the same time, it is necessary not only to prevent oxygen in the air from combining with nitrogen ions to form nitrogen oxides, but also to prevent the high-pressure gas discharged from the protective vent 15 from reacting with nitrogen ions. Therefore, in this embodiment, the gas output by the high-pressure gas pump 2 is an inert gas, thereby avoiding reaction with nitrogen ions.

[0032] In this embodiment, inert gas is output by high-pressure air pump 2 and discharged around the burner 13 through protective air hole 15. This allows the inert gas to be discharged around the burner 13, protecting the burner 13 and isolating it from the outside air, thus preventing the combination of nitrogen ions and oxygen and the generation of nitrogen oxides.

[0033] In one embodiment, the protective vent 15 is arranged in a ring around the burner outlet 13. In this embodiment, designing the protective vent 15 as a ring, with the burner outlet 13 at its center, allows for a larger range of inert gas discharged from the protective vent 15. Furthermore, since the protective vent 15 is ring-shaped, there are no gaps in it, so the inert gas discharged from the protective vent 15 exits with a circular cross-section, thus forming a cylindrical gas wall. This cylindrical gas wall prevents air from flowing into the burner outlet 13 through gaps or crevices, further improving the protective effect and preventing the formation of nitrogen oxides.

[0034] In one embodiment, at least two sets of protective rings are provided on the surface of the top cover 11. Both sets of protective rings are concentric circles with the flame outlet 13 as the center, and each set of protective rings is provided with multiple protective vents 15.

[0035] like Figure 2 As shown, this embodiment uses two sets of protective rings as an example. Both sets of protective rings are centered on the top cover 11, and the radii of the two sets of protective rings are different. Each set of protective rings is provided with multiple protective vents 15, and the number of protective vents 15 on each set of protective rings can be the same or different. First, the protective vents 15 are set on the protective ring with the smaller radius, that is, the protective ring closer to the flame outlet 13. Multiple protective vents 15 are arranged at intervals along the protective ring with the smaller radius, and the spacing can be selected according to the actual situation.

[0036] After the protective vents 15 on the smaller radius protective ring are installed, protective vents 15 are then installed on the larger radius protective ring, with multiple protective vents 15 evenly spaced on the larger radius protective ring. In this embodiment, by setting up two sets of protective rings, the output range of the inert gas is increased, which also increases the protection range, thereby preventing air from flowing from the gaps between the protective vents 15 to the burner outlet 13.

[0037] Furthermore, when setting the protective vents 15 on the protective ring with a larger radius, the protective vents 15 can also be set at corresponding positions between two adjacent protective vents 15 on the protective ring with a smaller radius. Because the protective vents 15 on the protective ring with a smaller radius are arranged at intervals, there is a gap between two adjacent protective vents 15. Then, along the radial direction, a new protective vent 15 is set at a position corresponding to this gap on the protective ring with a larger radius. Therefore, by alternately setting the protective vents 15 on the two sets of protective rings, the protection range of the discharged inert gas can be made more comprehensive, improving the protection efficiency.

[0038] In one embodiment, the torch head 1 further includes a gas passage 17, which is disposed between the top cover 11 and the side cover 12. The mounting hole 16 and the protective gas hole 15 are connected through the gas passage 17. In one embodiment, the inner diameter of the gas passage 17 gradually increases along the flow direction of the inert gas.

[0039] like Figure 2 As shown, in this embodiment, the gas path 17 includes two sections, approximately "L"-shaped, namely the inlet section 171 and the outlet section 172, thereby connecting the protective vent 15 at the top with the mounting hole 16 on the side. The inlet section 171, which connects the gas path 17 to the mounting hole 16, is for conduction, so its direction is not limited as long as it achieves the conduction function. The outlet section 172, which connects the gas path 17 to the protective vent 15, is the discharge path for the inert gas. The inert gas is discharged after passing through the outlet section 172, so the outlet section 172 determines the state of the discharged inert gas. In this embodiment, the inner diameter of the outlet section 172 is designed to gradually increase along the flow direction of the inert gas. Therefore, the inner wall of the outlet section 172 is an inclined surface sloping to both sides. The inert gas discharged along the inner wall of the outlet section 172 will continue to be discharged along this inclined direction, thus ensuring that the inert gas maintains a gradually increasing inner diameter trend after being discharged from the outlet section 172.

[0040] In this embodiment, by designing the outlet section 172 as a funnel shape, the inert gas continues to expand after being discharged, thereby increasing the protection range.

[0041] In an embodiment, the gas path 17 is inclined along the direction close to the outlet 13 in the flow direction of the inert gas. In this embodiment, the outlet section 172 is designed to be inclined towards the central outlet 13. In the case that the protection gas holes 15 are provided in plurality and arranged around the outlet 13, the plurality of outlet sections 172 are all inclined in the same way and with the same angle. Then, after the inert gas is discharged along the outlet section 172, the plurality of inert gas streams will intersect at a point, and the intersection point is on the extension line of the center line of the outlet 13, so as to form a conical protection gas wall, and the protection effect can be improved.

[0042] In an embodiment, the gas path 17 is arranged along the axis direction of the protection gas hole 15. In this embodiment, the outlet section 172 is arranged along the axis perpendicular to the top cover 11, so that the inert gas is sprayed vertically to the top cover 11, and the inert gas has a certain spraying distance, and the isolation effect can be achieved. The spraying distance of the inert gas needs to be greater than the distance between the low-temperature region and the outlet 13, because outside the spraying distance of the inert gas, there is no isolation of the inert gas, and the nitrogen ions can contact with the oxygen. If at this time, it is still in the high-temperature region, it is possible to form nitrogen oxides. Therefore, by making the spraying distance of the inert gas greater than the distance between the low-temperature region and the outlet 13, it is ensured that when there is no isolation of the inert gas, the high-temperature condition for forming nitrogen oxides is not met.

[0043] In an embodiment, the exhaust treatment device further comprises a pressure regulating valve 3 connected between the high-pressure gas pump 2 and the mounting hole 16. In an embodiment, the output pressure of the high-pressure gas pump 2 is between 3 kg and 5 kg. In an embodiment, the diameter of each protection gas hole 15 is between 0.5 mm and 2 mm.

[0044] Because the inert gas needs to be discharged through the protection gas hole 15 to flush away the air, so as to form a gas wall capable of isolating air, it is necessary to ensure that the inert gas has sufficient impact force to flush away the air. The impact force of the inert gas is related to the flow rate, and the greater the flow rate, the stronger the impact force. The flow rate of the inert gas is related to the output pressure of the high-pressure gas pump 2, and the greater the output pressure, the greater the flow rate. Therefore, the high-pressure gas pump 2 is connected with the pressure regulating valve 3, so as to adjust the output pressure of the high-pressure gas pump 2, that is, the flow rate of the inert gas.

[0045] Further, the flow rate of the inert gas is also related to the aperture of the protection gas hole 15, the smaller the aperture of the protection gas hole 15, the greater the flow rate of the inert gas. Therefore, when controlling the impact force of the inert gas in the embodiment, both the output pressure of the high-pressure air pump 2 and the aperture of the protection gas hole 15 need to be considered. For example, when the aperture of the protection gas hole 15 is 2 mm, the output pressure of the high-pressure air pump 2 is 5 kg, so that the output inert gas can have sufficient impact force. When different environments are encountered, the impact force of the inert gas required is also different. At this time, the aperture of the protection gas hole 15 has been determined and cannot be adjusted, so the pressure needs to be adjusted through the pressure regulating valve 3, so as to achieve the effect of adjusting the impact force of the inert gas.

[0046] Finally, it should be noted that: the above embodiments are only used to illustrate the technical solutions of the present application, and not to limit them; although the present application has been described in detail with reference to the foregoing embodiments, those skilled in the art should understand that: it can still modify the technical solutions recorded in the foregoing embodiments, or make equivalent replacement for part of the technical features; and these modifications or replacements do not make the essence of the corresponding technical solutions deviate from the spirit and scope of the technical solutions of the embodiments of the present application.

Claims

1. An exhaust gas treatment device, characterized by, The application relates to a flare head (1) comprising a top cover (11) and a side cover (12), the top cover (11) being connected to one end of the side cover (12) and covering the side cover (12), the top cover (11) being provided with a flame outlet (13) and a plurality of protective gas holes (15) on the surface, the plurality of protective gas holes (15) being arranged around the flame outlet (13), and the side cover (12) being provided with a mounting hole (16) which is communicated with the protective gas holes (15); a high-pressure gas pump (2) which is communicated with the mounting hole (16) and is used for outputting inert gas. The protective gas holes (15) are arranged in a ring shape with the flame outlet (13) as the center. The top cover (11) is provided with at least two groups of protective rings which are concentric circles with the flame outlet (13) as the center, and a plurality of protective gas holes (15) are arranged in each group of the protective rings.

2. The exhaust treatment device of claim 1, wherein, The flare head (1) further comprises a gas channel (17) which is arranged between the top cover (11) and the side cover (12), and the mounting hole (16) and the protective gas holes (15) are communicated through the gas channel (17).

3. The exhaust treatment device of claim 1, wherein, The inner diameter of the gas channel (17) gradually increases along the flow direction of the inert gas.

4. The exhaust treatment device of claim 1, wherein, The gas channel (17) is inclined along the direction close to the flame outlet (13) along the flow direction of the inert gas.

5. The exhaust treatment device of claim 4, wherein, The gas channel (17) is arranged along the axial direction of the protective gas holes (15).

6. The exhaust treatment device of claim 4, wherein, The waste gas treatment device further comprises a pressure regulating valve (3) which is connected between the high-pressure gas pump (2) and the mounting hole (16).

7. The exhaust treatment device of claim 4, wherein, The output pressure of the high-pressure gas pump (2) is between 3 kg and 5 kg.

8. The exhaust treatment device of claim 1, wherein, The diameter of each protective gas hole (15) is between 0.5 mm and 2 mm.

9. The exhaust treatment device of claim 1, wherein, ​ 10. The exhaust treatment device of claim 1, wherein, ​

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