Electron beam detection device

Abstract

The utility model relates to the technical field of electron beam detection equipment, and aims to solve the problem that a stepping motor of a diaphragm control mechanism generates electromagnetic interference on imaging of the electron beam detection equipment. The utility model provides electron beam detection equipment, which comprises one or more stepping motors used for adjusting the hole position of a diaphragm hole of the electron beam detection equipment; the motor driver is connected with the stepping motor through a driving cable and is used for sending a driving signal to the stepping motor; and the anti-interference module is connected to the driving cable and is used for inhibiting electromagnetic interference generated by the stepping motor. According to the utility model, the technical problem is solved.

Description

TECHNICAL FIELD

[0001] The utility model relates to electron beam detection equipment technical field, especially to a kind of electron beam detection equipment. BACKGROUND

[0002] Electron beam detection equipment is by controlling charged particle focusing state, make charged particle and sample act, and by capturing secondary particle, transmission particle and so on Particle signal carries out imaging, can be characterized to the information such as topography, structure, composition of sample.Electron beam detection equipment's typical application is usually in vacuum based electron beam to the micrograph on semiconductor silicon wafer and mask plate carries out detection and critical dimension measurement, to the open defect and short circuit defect in CMOS (Complementary Metal Oxide Semiconductor, complementary metal oxide semiconductor) integrated circuit is detected.

[0003] CDSEM (Critical Dimension Scanning Electron Microscope, feature size scanning electron microscope) is the electron beam detection equipment commonly used in semiconductor industry.It utilizes scanning electron microscope, realizes the accurate measurement and evaluation to the pattern on semiconductor wafer, and the diaphragm mechanism is used to control the diameter and shape of electron beam, the smaller the diameter of electron beam, the more clear the detail of imaging.Using different shapes of optical aperture, different shapes of electron beam can be manufactured, for example, circular or square.

[0004] At present, in prior art, diaphragm mechanism generally uses stepper motor to control the switching of different diaphragm hole positions, and stepper motor is a kind of actuator which generates corresponding action according to input pulse signal, and is widely used in various fields of production and life due to its excellent positioning characteristics, no position cumulative error and high open-loop accuracy.However, stepper motor can generate electromagnetic interference to the imaging of feature size scanning electron microscope, affect the imaging effect of electron microscope bottom noise image, and further cause the accuracy of measurement and evaluation of feature size scanning electron microscope to the pattern on semiconductor wafer to be reduced. UTILITY MODEL CONTENTS

[0005] One object of the utility model is to provide an electron beam detection equipment which can overcome at least one technical defect in the prior art.

[0006] A further object of the utility model is to suppress the electromagnetic interference generated by the stepper motor of the diaphragm mechanism to the imaging of the electron beam detection equipment, so as to ensure the accuracy of measurement and evaluation of the electron beam detection equipment to the pattern on semiconductor wafer.

[0007] In particular, the utility model provides an electron beam detection equipment, which comprises:

[0008] one or more stepping motors for adjusting a hole position of a diaphragm hole of the electron beam detection device;

[0009] a motor driver connected to the stepping motors through a driving cable for sending driving signals to the stepping motors;

[0010] an anti-interference module connected to the driving cable for suppressing electromagnetic interference generated by the stepping motors.

[0011] Further, the driving cable comprises:

[0012] a plurality of positive cables respectively connected between each phase input positive of the stepping motors and each phase output positive of the motor driver;

[0013] a plurality of negative cables respectively connected between each phase input negative of the stepping motors and each phase output negative of the motor driver; and,

[0014] the anti-interference module comprises:

[0015] a plurality of positive filtering units respectively connected to the positive cables for filtering high frequency signals inputted by the motor driver to each phase input positive of the stepping motors;

[0016] a plurality of negative filtering units respectively connected to the negative cables for filtering high frequency signals inputted by the motor driver to each phase input negative of the stepping motors.

[0017] Further, each positive filtering unit comprises:

[0018] a positive inductor connected to the positive cable to connect two connection ends of the positive inductor to one phase input positive of the stepping motors and one phase output positive of the motor driver through the positive cable;

[0019] a positive capacitor with one connection end connected to the connection end of the positive inductor connected to the motor driver and the other connection end grounded; and,

[0020] each negative filtering unit comprises:

[0021] a negative inductor connected to the negative cable to connect two connection ends of the negative inductor to one phase input negative of the stepping motors and one phase output negative of the motor driver through the negative cable;

[0022] a negative capacitor with one connection end connected to the connection end of the negative inductor connected to the motor driver and the other connection end grounded.

[0023] Further, the anti-interference module further comprises:

[0024] The circuit board, the positive inductor, the negative inductor, the positive capacitor and the negative capacitor are arranged on the circuit board.

[0025] The plurality of positive connection terminals are arranged on the circuit board, and are respectively connected to the two connection terminals of the positive inductor, and are used for connecting the positive cable.

[0026] The plurality of negative connection terminals are arranged on the circuit board, and are respectively connected to the two connection terminals of the negative inductor, and are used for connecting the negative cable.

[0027] The plurality of ground connection terminals are arranged on the circuit board, and are respectively connected to the ground connection terminals of the positive capacitor and the negative capacitor, and are grounded.

[0028] Further, the inductance value of the positive inductor and the negative inductor is respectively configured to be in the range of 50μH to 150μH; and,

[0029] The rated current of the positive inductor and the negative inductor is respectively configured to be in the range of 1A to 5A.

[0030] Further, the inductance value of the positive inductor and the negative inductor is respectively configured to be 100μH; and,

[0031] The rated current of the positive inductor and the negative inductor is respectively configured to be 3A.

[0032] Further, the rated voltage of the positive capacitor and the negative capacitor is respectively configured to be in the range of 24V to 150V; and,

[0033] The capacitance of the positive capacitor and the negative capacitor is respectively configured to be in the range of 5nF to 15nF.

[0034] Further, the rated voltage of the positive capacitor and the negative capacitor is respectively configured to be 100V; and,

[0035] The capacitance of the positive capacitor and the negative capacitor is respectively configured to be 10nF.

[0036] Further, a cable shield is arranged on the driving cable between the stepper motor and the anti-interference module.

[0037] Further, the number of the stepper motors is configured to be two, and the two stepper motors are respectively used for adjusting the hole positions of the light diaphragm holes in the arrangement direction of the light diaphragm holes and in a predetermined direction, the predetermined direction is perpendicular to the arrangement direction, and the predetermined direction and the arrangement direction form an adjustment plane, and the emission direction of the electron beam emitting gun of the electron beam detection device is perpendicular to the adjustment plane.

[0038] The electronic beam detection equipment has the anti-interference module added on the driving cable between the stepping motor and the motor driver, and the anti-interference module can inhibit the electromagnetic interference generated by the stepping motor.

[0039] The above and other objects, advantages and features of the present application will become more apparent by describing in detail the embodiments thereof with reference to the attached drawings in which: BRIEF DESCRIPTION OF DRAWINGS

[0040] In the following detailed description of some embodiments of the present application, reference will be made to the accompanying drawings, which are meant to illustrate and not to limit the present application. Identical or similar components or parts are designated with the same reference numerals throughout the drawings. It should be understood by those skilled in the art that the drawings are not necessarily to scale. In the drawings:

[0041] Figure 1 is a structural schematic diagram of an electronic beam detection equipment according to an embodiment of the present application;

[0042] Figure 2 is a circuit connection schematic diagram of an electronic beam detection equipment according to an embodiment of the present application;

[0043] Figure 3 is a circuit connection schematic diagram of an anti-interference module in an electronic beam detection equipment according to an embodiment of the present application;

[0044] Figure 4 is an electron microscope noise floor image of an electronic beam detection equipment in the prior art;

[0045] Figure 5 is an electron microscope noise floor image of an electronic beam detection equipment according to an embodiment of the present application. DETAILED DESCRIPTION

[0046] In the description of the present application, it should be understood that the terms "first", "second", etc. are used only for the purpose of description and should not be construed as indicating or implying relative importance or implying the number of the technical features indicated. Therefore, the features with "first", "second" can explicitly or implicitly include at least one of the features, i.e. one or more of the features. In the description of the present application, the meaning of "a plurality of" is at least two, such as two, three, etc., unless otherwise specifically limited. When a certain feature "includes or contains" a certain or certain features, unless otherwise specifically described, it indicates that other features and can further include other features are not excluded.

[0047] Unless otherwise defined, all terms (including technical and scientific terms) used herein have the same meaning as commonly understood by one of ordinary skill in the art to which this application belongs. It will be apparent to those skilled in the art that various modifications and variations can be made to the present application without departing from the spirit or scope of the application. Thus, it is intended that the present application cover modifications and variations of this application provided they come within the scope of the appended claims and their equivalents.

[0048] In addition, in the description of the present embodiments, a first feature being "on" or "under" a second feature can include the first and second features being in direct contact, or can include the first and second features not being in direct contact but being in contact through another feature between them. That is, in the description of the present embodiments, a first feature being "on", "above", and "over" a second feature includes the first feature being directly above and obliquely above the second feature, or simply means that the first feature is higher in horizontal level than the second feature. A first feature being "under", "below", or "underneath" a second feature can be the first feature being directly below or obliquely below the second feature, or simply means that the first feature is lower in horizontal level than the second feature.

[0049] Unless otherwise defined, all terms (including technical and scientific terms) used herein have the same meaning as commonly understood by one of ordinary skill in the art to which this application belongs. It will be apparent to those skilled in the art that various modifications and variations can be made to the present application without departing from the spirit or scope of the application. Thus, it is intended that the present application cover modifications and variations of this application provided they come within the scope of the appended claims and their equivalents.

[0050] In the description of the present embodiments, reference to terms such as "embodiment", "another embodiment", "some embodiments" and the like, means that a particular feature, structure, material or characteristic described in connection with the embodiment or example is included in at least one embodiment or example of the present application. The illustrative examples shown throughout the specification can not necessarily be consistent with each other, and the specific features, structures, materials or characteristics can be combined in any suitable manner in one or more embodiments or examples.

[0051] The electronic beam detection device of the present embodiments will be described in detail below with reference to Figure 1 and Figure 5 It should be noted that, Figure 1 only the diaphragm control mechanism of the electronic beam detection device is shown, and the diaphragm control mechanism shows the stepper motor and the plurality of diaphragm holes.

[0052] With reference to Figure 1 and Figure 2 In the present embodiments, the electronic beam detection device can include a motor driver 200, an anti-interference module 400, and one or more stepper motors 110.

[0053] The stepper motor 110 is used to adjust the hole position of the diaphragm hole 120 of the electronic beam detection device.

[0054] The motor driver 200 is connected with the stepping motor 110 through the driving cable 300, and the motor driver 200 is used to send driving signals to the stepping motor 110.

[0055] The anti-interference module 400 is connected with the driving cable 300, and the anti-interference module 400 is used to suppress the electromagnetic interference generated by the stepping motor 110.

[0056] Since the electron beam detection device of the embodiment adds the anti-interference module 400 on the driving cable 300 between the stepping motor 110 and the motor driver 200, the anti-interference module 400 can suppress the electromagnetic interference generated by the stepping motor 110. Therefore, the electron beam detection device of the embodiment can effectively suppress the electromagnetic interference generated by the stepping motor 110 of the diaphragm mechanism to the imaging of the electron beam detection device, and ensure the accuracy of the measurement and evaluation of the pattern on the semiconductor wafer by the electron beam detection device. For reference Figure 4 and Figure 5 , Figure 4 The electron beam detection device of the prior art is shown in the electron microscope background noise image, and Figure 4 The diagonal stripe electromagnetic interference indicated in the figure is the electromagnetic interference generated by the stepping motor to the electron microscope background noise image of the electron beam detection device, Figure 5 The electron beam detection device of the embodiment after adding the anti-interference module is shown in the electron microscope background noise image.

[0057] For reference Figure 2 and Figure 3 In the embodiment, the driving cable 300 can include a plurality of positive cables 310 and a plurality of negative cables 320.

[0058] The plurality of positive cables 310 are respectively connected between each phase input positive of the stepping motor 110 and each phase output positive of the motor driver 200.

[0059] The plurality of negative cables 320 are respectively connected between each phase input negative of the stepping motor 110 and each phase output negative of the motor driver 200.

[0060] It can be understood that the driving cable 300 can be connected between the motor driver 200 and the stepping motor 110 through the plurality of positive cables 310 and the plurality of negative cables 320, so as to send driving signals to the stepping motor 110 and promote the stepping motor 110 to act.

[0061] For reference Figure 2 and Figure 3In the embodiment, the anti-interference module 400 can include a positive filter unit 410 and a negative filter unit 420, which can be connected to the positive cable 310 and the negative cable 320 respectively at the input positive and the input negative of the same phase of the stepping motor 110.

[0062] It can be understood that the positive filter unit 410 can filter the high-frequency signal input by the motor driver 200 to the input positive of one phase of the stepping motor 110, and the negative filter unit 420 can filter the high-frequency signal input by the motor driver 200 to the input negative of the same phase of the stepping motor 110. Further, the positive filter unit 410 and the negative filter unit 420 can filter the high-frequency signal input to the phase of the stepping motor 110 to suppress or eliminate the electromagnetic interference generated by the coil of the phase of the stepping motor 110, and further, the anti-interference module 400 can suppress the electromagnetic interference generated by the stepping motor 110, and improve the accuracy of the measurement and evaluation of the pattern on the semiconductor wafer by the electron beam detection device.

[0063] Referring to Figure 2 and Figure 3 In the embodiment, the anti-interference module 400 can include a plurality of positive filter units 410 and a plurality of negative filter units 420.

[0064] The plurality of positive filter units 410 are connected to the positive cable 310 respectively, and the plurality of positive filter units 410 are used to filter the high-frequency signal input by the motor driver 200 to the input positive of each phase of the stepping motor 110.

[0065] The plurality of negative filter units 420 are connected to the negative cable 320 respectively, and the plurality of negative filter units 420 are used to filter the high-frequency signal input by the motor driver 200 to the input negative of each phase of the stepping motor 110.

[0066] It can be understood that the anti-interference module 400 can include a plurality of positive filter units 410 with the same number as the positive cable 310 and a plurality of negative filter units 420 with the same number as the negative cable 320, and the plurality of positive filter units 410 are connected to the positive cable 310 respectively, and the plurality of negative filter units 420 are connected to the negative cable 320 respectively. Further, the embodiment can achieve the suppression or even elimination of the electromagnetic interference generated by all the phase coils of the stepping motor 110, to further improve the suppression of the electromagnetic interference generated by the stepping motor 110 by the anti-interference module 400, and improve the accuracy of the measurement and evaluation of the pattern on the semiconductor wafer by the electron beam detection device.

[0067] Referring to Figure 2 and Figure 3In the embodiment, the stepper motor 110 can be a two-phase stepper motor 110. Further, the driving cable 300 can include two positive cables 310 and two negative cables 320, and the anti-interference module 400 can include two positive filtering units 410 and two negative filtering units 420. Further, the embodiment can ensure the accuracy of the measurement and evaluation of the pattern on the semiconductor wafer by the electron beam detection device.

[0068] Referring to Figure 2 and Figure 3 In the embodiment, the number of the stepper motor 110 can be set to two, and the two stepper motors 110 are respectively used to adjust the hole positions of the light diaphragm holes 120 in the arrangement direction of the light diaphragm holes 120 and in a predetermined direction, so that the electron beam detection device can realize the adjustment of the hole positions of the light diaphragm holes 120. Specifically, one of the stepper motors 110 (such as the lower stepper motor 110 marked in Figure 1 ) can be used to switch the hole positions of the light diaphragm holes 120 in the arrangement direction of the light diaphragm holes 120, and the other stepper motor 110 (such as the upper stepper motor 110 marked in Figure 1 ) can be used to adjust the switched hole positions of the light diaphragm holes 120 in the predetermined direction. The predetermined direction is perpendicular to the arrangement direction, and the predetermined direction and the arrangement direction form an adjustment plane, and the emission direction of the electron beam emission gun of the electron beam detection device is perpendicular to the adjustment plane.

[0069] Referring to Figure 2 and Figure 3 In the embodiment, the driving cable 300 can include four positive cables 310 and four negative cables 320 to realize the connection of the motor driver 200 and the two stepper motors 110. The anti-interference module 400 can include four positive filtering units 410 and four negative filtering units 420, and the positive filtering units 410 are correspondingly connected to the positive cables 310, and the negative filtering units 420 are correspondingly connected to the negative cables 320. Further, the embodiment can suppress the electromagnetic interference generated by the two stepper motors 110, so as to effectively suppress the electromagnetic interference generated by the stepper motor 110 of the light diaphragm mechanism on the imaging of the electron beam detection device, and ensure the accuracy of the measurement and evaluation of the pattern on the semiconductor wafer by the electron beam detection device.

[0070] Referring to Figure 2 and Figure 3 In the embodiment, the filtering unit group (including two positive filtering units 410 and two negative filtering units 420) for suppressing the electromagnetic interference of one of the stepper motors 110 is arranged separately from the filtering unit group (including two positive filtering units 410 and two negative filtering units 420) for suppressing the electromagnetic interference of the other stepper motor 110, so as to avoid the interference between the two filtering unit groups.

[0071] Referring to Figure 2 In this embodiment, the motor driver 200 is connected with the 24V power supply 500 to realize power supply and driving of one or two stepping motors 110.

[0072] Referring to Figure 2 and Figure 3 In this embodiment, each positive filtering unit 410 can include a positive inductor 411 and a positive capacitor 412.

[0073] The positive inductor 411 is connected to the positive cable 310 to connect two connection ends of the positive inductor 411 to one-phase input positive of the stepping motor 110 and one-phase output positive of the motor driver 200 through the positive cable 310.

[0074] One connection end of the positive capacitor 412 is connected to the connection end of the positive inductor 411 connected to the motor driver 200, and the other connection end of the positive capacitor 412 is grounded.

[0075] It can be understood that by setting the positive filtering unit 410 as the positive inductor 411 and the positive capacitor 412, the positive filtering unit 410 can realize filtering of high-frequency signals input by the motor driver 200 to one-phase input positive of the stepping motor 110.

[0076] Referring to Figure 2 and Figure 3 In this embodiment, each negative filtering unit 420 can include a negative inductor 421 and a negative capacitor 422.

[0077] The negative inductor 421 is connected to the negative cable 320 to connect two connection ends of the negative inductor 421 to one-phase input positive of the stepping motor 110 and one-phase output positive of the motor driver 200 through the negative cable 320.

[0078] One connection end of the negative capacitor 422 is connected to the connection end of the negative inductor 421 connected to the motor driver 200, and the other connection end of the negative capacitor 422 is grounded.

[0079] It can be understood that by setting the negative filtering unit 420 as the negative inductor 421 and the negative capacitor 422, the negative filtering unit 420 can realize filtering of high-frequency signals input by the motor driver 200 to one-phase input negative of the stepping motor 110.

[0080] Referring to Figure 3 In this embodiment, the anti-interference module 400 can further include a circuit board 430.

[0081] The positive inductor 411, the negative inductor 421, the positive capacitor 412 and the negative capacitor 422 are arranged on the circuit board 430.

[0082] It can be understood that the positive inductor 411, the negative inductor 421, the positive capacitor 412 and the negative capacitor 422 can be arranged on one circuit board 430, and then the anti-interference module 400 can be completely assembled in one assembly space, so as to facilitate the installation and use of the anti-interference module 400.

[0083] Referring to Figure 3 In this embodiment, the positive inductor 411, the negative inductor 421, the positive capacitor 412 and the negative capacitor 422 can be welded on the through holes of the circuit board 430 by welding.

[0084] It can be understood that the positive inductor 411, the negative inductor 421, the positive capacitor 412 and the negative capacitor 422 are connected to the circuit board 430 by welding, so as to ensure the stability of the connection of the positive inductor 411, the negative inductor 421, the positive capacitor 412 and the negative capacitor 422 on the circuit board 430, and improve the applicability of the anti-interference module 400 in various scenes.

[0085] Referring to Figure 2 and Figure 3 In this embodiment, the anti-interference module 400 can further include a plurality of positive connection terminals 450, a plurality of negative connection terminals 460 and a plurality of ground connection terminals 470.

[0086] The plurality of positive connection terminals 450 are arranged on the circuit board 430, and the plurality of positive connection terminals 450 are respectively connected to the two connection terminals of the positive inductor 411. The plurality of positive connection terminals 450 are used for connecting the positive cable 310.

[0087] The plurality of negative connection terminals 460 are arranged on the circuit board 430, and the plurality of negative connection terminals 460 are respectively connected to the two connection terminals of the negative inductor 421. The plurality of negative connection terminals 460 are used for connecting the negative cable 320.

[0088] The plurality of ground connection terminals 470 are arranged on the circuit board 430, and the plurality of ground connection terminals 470 are respectively connected to the connection terminals of the positive capacitor 412 and the negative capacitor 422. The plurality of ground connection terminals 470 are respectively grounded.

[0089] It can be understood that the anti-interference module 400 can be conveniently connected to the driving cable 300 through the positive connection terminals 450 and the negative connection terminals 460. Furthermore, the anti-interference module 400 of this embodiment can be conveniently and quickly assembled on the electron beam detection device, so as to realize the suppression of the electromagnetic interference generated by the stepping motor 110, and ensure the accuracy of the measurement and evaluation of the pattern on the semiconductor wafer by the electron beam detection device.

[0090] In the embodiment, the inductance value of the positive inductor 411 and the negative inductor 421 is respectively configured in the range of 50 μH to 150 μH; and the rated current of the positive inductor 411 and the negative inductor 421 is respectively configured in the range of 1A to 5A.

[0091] It can be understood that the inductance value of the positive inductor 411 and the negative inductor 421 is respectively configured in the range of 50 μH to 150 μH; and the rated current of the positive inductor 411 and the negative inductor 421 is respectively configured in the range of 1A to 5A, so that the anti-interference module 400 is adapted to the power supply application range of the stepping motor 110 of the embodiment in the case of promoting the anti-interference module 400 to realize the suppression of electromagnetic interference of the stepping motor 110.

[0092] In the embodiment, the inductance value of the positive inductor 411 and the negative inductor 421 is respectively configured in the range of 100 μH; and the rated current of the positive inductor 411 and the negative inductor 421 is respectively configured in the range of 3A.

[0093] It can be understood that the inductance value of the positive inductor 411 and the negative inductor 421 is respectively configured in the range of 100 μH; and the rated current of the positive inductor 411 and the negative inductor 421 is respectively configured in the range of 3A, to further ensure the suppression effect of the anti-interference module 400 on the electromagnetic interference of the stepping motor 110.

[0094] In the embodiment, the outer diameter of the magnetic ring of the positive inductor 411 and the negative inductor 421 can be respectively in the range of 8mm to 18mm, the thickness of the magnetic ring can be respectively in the range of 1mm to 8mm, and the wire diameter can be respectively in the range of 0.1mm to 1mm.

[0095] It can be understood that by setting the outer diameter of the magnetic ring of the positive inductor 411 and the negative inductor 421 in the range of 8mm to 18mm, the thickness of the magnetic ring in the range of 1mm to 8mm, and the wire diameter in the range of 0.1mm to 1mm, the applicability of the anti-interference module 400 on the electron beam detection equipment is improved in the case that the anti-interference module 400 can realize the suppression of electromagnetic interference of the stepping motor 110.

[0096] In the embodiment, the outer diameter of the magnetic ring of the positive inductor 411 and the negative inductor 421 can be respectively in the range of 8mm to 18mm, the thickness of the magnetic ring can be respectively in the range of 1mm to 8mm, and the wire diameter can be respectively in the range of 0.1mm to 1mm.

[0097] It can be understood that by setting the outer diameter of the magnetic ring of the positive inductor 411 and the negative inductor 421 to 13 mm, the thickness of the magnetic ring to 5 mm, and the wire diameter to 0.5 mm, the applicability of the anti-interference module 400 on the electron beam detection device and the suppression effect on the electromagnetic interference of the stepping motor 110 are further ensured.

[0098] In the embodiment, the rated voltage of the positive capacitor 412 and the negative capacitor 422 is respectively configured in the range of 24V to 150V; and the capacitance of the positive capacitor 412 and the negative capacitor 422 is respectively configured in the range of 5nF to 15nF.

[0099] It can be understood that the rated voltage of the positive capacitor 412 and the negative capacitor 422 is respectively configured in the range of 24V to 150V; and the capacitance of the positive capacitor 412 and the negative capacitor 422 is respectively configured in the range of 5nF to 15nF, so as to improve the applicability of the anti-interference module 400 on the electron beam detection device in the case of promoting the anti-interference module 400 to suppress the electromagnetic interference of the stepping motor 110.

[0100] In the embodiment, the rated voltage of the positive capacitor 412 and the negative capacitor 422 is respectively configured as 100V; and the capacitance of the positive capacitor 412 and the negative capacitor 422 is respectively configured as 10nF.

[0101] It can be understood that the rated voltage of the positive capacitor 412 and the negative capacitor 422 is respectively configured as 100V; and the capacitance of the positive capacitor 412 and the negative capacitor 422 is respectively configured as 10nF, so as to further ensure the suppression effect of the anti-interference module 400 on the electromagnetic interference of the stepping motor 110.

[0102] In the embodiment, the tolerance of the positive capacitor 412 and the negative capacitor 422 can be respectively configured as ±5%(J level), so as to further ensure the suppression effect of the anti-interference module 400 on the electromagnetic interference of the stepping motor 110.

[0103] Referring to Figure 2 In the embodiment, the cable shielding 600 is arranged on the driving cable 300 between the stepping motor 110 and the anti-interference module 400.

[0104] It can be understood that the driving cable 300 between the stepping motor 110 and the anti-interference module 400 is close to the stepping motor 110 and the electron beam detection device. Therefore, in order to avoid the electromagnetic interference of the driving cable 300 on the imaging of the electron beam detection device, the cable shielding 600 can be additionally arranged on the driving cable 300, so as to further ensure the accuracy of the measurement and evaluation of the pattern on the semiconductor wafer by the electron beam detection device.

[0105] With reference to Figure 2 and Figure 3 In use, the anti-interference module 400 of the embodiment is connected between the motor driver 200 and the two stepper motors 110 on the drive cable 300 through the positive terminal 450 and the negative terminal 460, so that the anti-interference module 400 can suppress the electromagnetic interference generated by the two stepper motors 110.

[0106] At this point, those skilled in the art should recognize that although the present application has been shown and described in detail a plurality of exemplary embodiments, many other variations or modifications can be determined or deduced directly according to the content disclosed by the present application in accordance with the principles of the present application without departing from the spirit and scope of the present application. Therefore, the scope of the present application should be understood and recognized as covering all these other variations or modifications.

Claims

1. An electron beam detecting apparatus characterized by comprising: The electronic beam detecting device comprises: one or more stepping motors for adjusting the aperture position of the aperture hole of the electronic beam detecting device; a motor driver connected to the stepping motors through a driving cable for sending driving signals to the stepping motors; an anti-interference module connected to the driving cable for suppressing electromagnetic interference generated by the stepping motors.

2. The electronic beam detecting device according to claim 1, wherein: the driving cable comprises: a plurality of positive cables respectively connected between each phase input positive of the stepping motors and each phase output positive of the motor driver; and a plurality of negative cables respectively connected between each phase input negative of the stepping motors and each phase output negative of the motor driver; and the anti-interference module comprises: a plurality of positive filtering units respectively connected to the positive cables for filtering high-frequency signals inputted by the motor driver to each phase input positive of the stepping motors; and a plurality of negative filtering units respectively connected to the negative cables for filtering high-frequency signals inputted by the motor driver to each phase input negative of the stepping motors.

3. The electronic beam detecting device according to claim 2, wherein: each of the positive filtering units comprises: a positive inductor connected to the positive cable, so that two connection ends of the positive inductor are connected to one phase input positive of the stepping motors and one phase output positive of the motor driver through the positive cable; and a positive capacitor having one connection end connected to the connection end of the positive inductor connected to the motor driver and the other connection end grounded; and each of the negative filtering units comprises: a negative inductor connected to the negative cable, so that two connection ends of the negative inductor are connected to one phase input negative of the stepping motors and one phase output negative of the motor driver through the negative cable; and a negative capacitor having one connection end connected to the connection end of the negative inductor connected to the motor driver and the other connection end grounded.

4. The electronic beam detecting device according to claim 3, wherein: the anti-interference module further comprises: a circuit board on which the positive inductor, the negative inductor, the positive capacitor and the negative capacitor are arranged; a plurality of positive connection terminals arranged on the circuit board and respectively connected to the two connection ends of the positive inductor for connecting the positive cables; a plurality of negative connection terminals arranged on the circuit board and respectively connected to the two connection ends of the negative inductor for connecting the negative cables; and a plurality of ground connection terminals arranged on the circuit board and respectively connected to the connection ends of the positive capacitor and the negative capacitor grounded.

5. The electronic beam detecting device according to claim 3, wherein: the inductance values of the positive inductor and the negative inductor are respectively configured in the range of 50 μH to 150 μH; and the rated currents of the positive inductor and the negative inductor are respectively configured in the range of 1 A to 5 A.

6. The electronic beam detecting device according to claim 3, wherein: The inductance value of the positive inductor and the negative inductor is respectively configured in the range of 100 μH; and The rated current of the positive inductor and the negative inductor is respectively configured in the range of 3 A.

7. The electron beam detection device according to claim 3, wherein The rated voltage of the positive capacitor and the negative capacitor is respectively configured in the range of 24 V to 150 V; and The capacitance of the positive capacitor and the negative capacitor is respectively configured in the range of 5 nF to 15 nF.

8. The electron beam detection device according to claim 3, wherein The rated voltage of the positive capacitor and the negative capacitor is respectively configured as 100 V; and The capacitance of the positive capacitor and the negative capacitor is respectively configured as 10 nF.

9. The electron beam detection device according to claim 1, wherein A cable shield is arranged on the driving cable between the stepper motor and the anti-interference module.

10. The electron beam detection device according to claim 1, wherein The number of the stepper motors is two, and the two stepper motors are respectively used for adjusting the hole positions of the light diaphragm holes in the arrangement direction of the light diaphragm holes and in a predetermined direction, the predetermined direction is perpendicular to the arrangement direction, the predetermined direction and the arrangement direction form an adjustment plane, and the emission direction of the electron beam emission gun of the electron beam detection device is perpendicular to the adjustment plane.

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