Flying probe tester calibration device based on high-resolution camera

Abstract

The utility model relates to the technical field of flying probe testing machine calibration, and discloses a flying probe testing machine calibration device based on a high-resolution camera, which comprises a calibration plate and a CCD camera, the calibration plate is fixedly arranged on a flying probe testing machine, the calibration plate is provided with through holes distributed in an array, the through holes are distributed at equal division points on the calibration plate, and the CCD camera is arranged on the calibration plate. The two CCD cameras are installed on the flying probe testing machine, and light rays in the through holes are detected through the CCD cameras so that the flying probe testing machine can be calibrated. According to the calibration device, the two CCD cameras are installed on the flying probe tester, mechanical errors of the flying probe tester are calibrated through the high-resolution CCD cameras, a visual control system is fully utilized, a probe of the flying probe tester is accurately pricked at the center position of a corresponding test bonding pad on a circuit board, the production efficiency of a PCB is improved, and the production cost is reduced. The cost is reduced, the calibration operation is simple, the calibration steps are few, and the calibration efficiency and the calibration precision are improved.

Description

TECHNICAL FIELD

[0001] The utility model relates to flying probe testing machine calibration technical field, concretely is a kind of flying probe testing machine calibration device based on high resolution camera. BACKGROUND

[0002] Flying probe testing machine is a system for testing PCB in manufacturing environment, flying probe testing uses four to eight independently controlled probes, four to eight probes are installed on the x-y plane freely movable micro reciprocating moving parts, and test points are directly controlled by CADI Gerber data.In test unit is transported into testing machine by belt or other test unit conveying system, then fixed, and the probe of testing machine contacts test pad and via to test single element of test unit.

[0003] With the development of electronic products towards miniaturization and digitization, printed circuit boards also develop towards high density and high precision, which in turn requires higher testing precision of flying probe testing machine, and the common method to improve the testing precision of flying probe testing machine is to optimize the mechanical structure and use higher precision transmission components, but any processing and measurement inevitably have errors.

[0004] Industrial camera is a high-performance image acquisition device specially used for industrial applications, which converts optical signals into digital images through imaging sensors and analyzes and processes images through image processing algorithms.

[0005] In the prior art, the deviation correction method of flying probe testing machine is disclosed in the application No.CN201510235763.9, wherein the center of the cross target of the camera image is aligned with the center o of one test point of the PCB to be calibrated, the probe is controlled to detect the PCB to be calibrated to obtain the probe test point t, the edge points a1 and a2 on both sides are found along the X or Y direction with the probe test point t as the initial point, the center point a3 in the X or Y direction is found according to the two edge points detected in the X or Y direction, the edge points b1 and b2 on both sides are found along the Y or X direction with the center point a3 in the X or Y direction as the starting point, the center o of the test point of the PCB to be calibrated is found according to the two edge points detected in the Y or X direction, and the deviation between the initial point t of the probe and the center o of the test point is the actual offset of the probe and the center of the camera; the control system compensates for the above actual offset and then performs testing.

[0006] However, the different correction results caused by different resolutions of camera in the correction method mentioned in the prior art; flying probe testing machine cannot use visual control system for self-correction, needle tip correction and PCB test point correction, so a flying probe testing machine calibration device based on high resolution camera is needed. UTILITY MODEL CONTENT

[0007] The utility model disc purposes at providing a kind of flying probe testing machine calibration device based on high-resolution camera, to solve the problems in prior art.

[0008] The utility model disc purposes can be realized by the following technical scheme:

[0009] A kind of flying probe testing machine calibration device based on high-resolution camera, the calibration device includes correction plate and CCD camera, correction plate is fixedly installed on flying probe testing machine, array distribution's through-hole is opened on correction plate, through-hole is distributed at the equal division point on correction plate, two CCD cameras are installed on flying probe testing machine, and the light in through-hole is detected by CCD camera for calibrating flying probe testing machine.

[0010] Further, flying probe testing machine includes base, the symmetrically distributed side plate is fixed on base, the top plate is fixed on side plate, base is fixedly provided with the symmetrically distributed electric sliding table one, two electric sliding table one is horizontally arranged at the two sides of base respectively.

[0011] Further, the electric sliding table one is slidably provided with the symmetrically distributed electric sliding table two, the symmetrically distributed sliding block is slidably arranged on electric sliding table two, and the shell is fixedly arranged on sliding block.

[0012] Further, the side of the shell is fixedly provided with baffle, the connecting plate is fixed in the shell, the connecting plate is located at the side of baffle, the fixed seat is fixed between connecting plate and baffle, and the detection assembly is fixed on fixed seat.

[0013] Further, the side of the connecting plate away from baffle is fixed with mounting block, the mounting plate is fixed at one end of mounting block, and the CCD camera is fixedly installed on mounting plate, the CCD camera is at the A1BY axis and B1BY axis position of eight flying probe testing machine, and the two CCD cameras are used for the calibration of the front and back of flying probe testing machine.

[0014] Further, the base is fixed with clamping assembly, and the clamping assembly includes two clamps, the two clamps are horizontally arranged between base and top plate, and the two clamps are used for fixing correction plate.

[0015] Further, the precision level film is assembled on the correction plate.

[0016] The utility model disc purposes have the beneficial effects:

[0017] 1, the calibration device of the utility model, install two CCD cameras on flying probe testing machine, calibrate the mechanical error of flying probe testing machine by high-resolution CCD camera, make full use of visual control system, so that flying probe testing machine probe is accurately and accurately stuck on corresponding test pad center position on circuit board, improve the production efficiency of PCB, reduce cost.

[0018] 2、The calibration device of the utility model, the flying probe testing machine carries out self correction by utilizing visual control system, corrects each axis, corrects needle tip and corrects PCB board test point, and high resolution CCD camera can improve the test precision of the flying probe testing machine. BRIEF DESCRIPTION OF DRAWINGS

[0019] The utility model will be further described below in combination with the drawings.

[0020] Figure 1 It is the structure schematic diagram of the flying probe testing machine of the utility model;

[0021] Figure 2 It is the structure schematic diagram of the flying probe testing machine of the utility model Figure 1 It is the structure schematic diagram of the flying probe testing machine of the utility model;

[0022] Figure 3 It is the structure schematic diagram of the flying probe testing machine of the utility model;

[0023] Figure 4 It is the structure schematic diagram of the flying probe testing machine of the utility model;

[0024] Figure 5 It is the structure schematic diagram of the flying probe testing machine of the utility model;

[0025] Figure 6 It is the structure schematic diagram of the flying probe testing machine of the utility model;

[0026] Figure 7 It is the structure schematic diagram of the flying probe testing machine of the utility model;

[0027] Figure 8 It is the structure schematic diagram of the flying probe testing machine of the utility model;

[0028] Figure 9 It is the structure schematic diagram of the flying probe testing machine of the utility model;

[0029] Figure 10 It is the structure schematic diagram of the flying probe testing machine of the utility model;

[0030] Figure 11 It is the structure schematic diagram of the flying probe testing machine of the utility model;

[0031] Figure 12 It is the structure schematic diagram of the flying probe testing machine of the utility model;

[0032] Figure 13 It is the structure schematic diagram of the flying probe testing machine of the utility model;

[0033] Figure 14 It is the structure schematic diagram of the flying probe testing machine of the utility model;

[0034] Figure 15 is the imaging center correction operation schematic diagram of the utility model;

[0035] Figure 16 is the imaging center correction operation schematic diagram of the utility model;

[0036] Figure 17 is the imaging center correction operation schematic diagram of the utility model;

[0037] Figure 18 is the pixel number diagram of 400 million pixels of the utility model;

[0038] Figure 19 is the pixel number diagram of 600 million pixels of the utility model.

[0039] The drawings are described as follows:

[0040] 1, base; 2, side plate; 3, electric sliding table one; 4, electric sliding table two; 5, sliding block; 6, mounting block; 7, shell; 8, baffle; 9, connecting plate; 10, fixed seat; 11, mounting plate; 12, calibration plate; 13, detection assembly. DETAILED DESCRIPTION

[0041] The technical solutions in the embodiments of the utility model will be clearly and completely described below with reference to the drawings in the embodiments of the utility model. Obviously, the described embodiments are only part of the embodiments of the utility model, not all the embodiments. Based on the embodiments in the utility model, all other embodiments obtained by those skilled in the art without creative labor fall within the scope of protection of the utility model.

[0042] A flying probe tester calibration device based on a high-resolution camera, as shown in Figure 1 , Figure 2 The flying probe tester includes a base 1, the base 1 is fixedly provided with symmetrically distributed side plates 2, the side plates 2 are fixedly installed with a top plate, the base 1 is fixedly provided with symmetrically distributed electric sliding tables one 3, the two electric sliding tables one 3 are respectively horizontally arranged on the two sides of the base 1 and are located between the base 1 and the top plate.

[0043] The electric sliding tables one 3 are slidably provided with symmetrically distributed electric sliding tables two 4, the electric sliding tables two 4 are slidably provided with symmetrically distributed sliding blocks 5, the sliding blocks 5 are fixedly provided with shells 7, one side of the shell 7 is fixedly provided with baffles 8, the shell 7 is fixedly provided with connecting plates 9 inside, the connecting plates 9 are located on one side of the baffles 8, the connecting plates 9 and the baffles 8 are fixedly provided with fixed seats 10 therebetween, and the fixed seats 10 are fixedly provided with detection assemblies 13.

[0044] The connecting plate 9 is fixed with a mounting block 6 away from the baffle 8, one end of the mounting block 6 is fixed with a mounting plate 11, the CCD camera is fixedly installed on the mounting plate 11, the CCD camera is installed at the A1BY shaft and the B1BY shaft positions of the eight-probe test machine, that is, one set of CCD camera is installed at the A1BY shaft and the B1BY shaft of the A surface (front surface) and the B surface (back surface) respectively, which reciprocates up and down with the A1BY or B1BY shaft, and can also reciprocate left and right with the A1X or B1X shaft, but does not move with the A1BX or B1BX shaft.

[0045] Suppose that the time function of the CCD camera on the A1BY shaft and the B1BY shaft in the x-axis direction is respectively:

[0046] X A =X(t A )

[0047] X B =X(t B )

[0048] Suppose that the time function of the CCD camera on the A1BY shaft and the B1BY shaft in the y-axis direction is respectively:

[0049] y2 A =f(T A )

[0050] y2 B =f(T B )

[0051] The corresponding motion is controlled by the servo motor of each shaft, as shown in Figures 3-5 .

[0052] As shown in Figure 6 , the clamping assembly is fixed on the machine base 1, the clamping assembly includes two clamps, the two clamps are located between the machine base 1 and the top plate, the clamps are located between the two electric sliding tables 13, and the two clamps are arranged in an upper and lower horizontal state, which are respectively an upper clamp and a lower clamp, a correction plate 12 is fixedly arranged between the two clamps, a precision grade film is assembled on the correction plate 12, and the correction plate 12 is fixedly installed on the flying probe test machine and adjusted in position.

[0053] As can be seen from Figure 6 , at this time, the area where the correction plate 12 is installed and placed is equivalent to the effective test area of the flying probe test machine;

[0054] The effective test area of the flying probe test machine is divided as follows by using the equal division attribute of the correction plate itself:

[0055] In the x-axis direction, 18 equal parts are divided at an interval of 40mm;

[0056] In the y-axis direction, 15 equal parts are made at intervals of 40 mm;

[0057] The CCD camera at the position of A1BY and B1BY uses the LED light carried by itself to form corresponding images in the CCD camera of each other through the 0.2286 mm diameter hole of the calibration plate. Through the working principle of the vision system, the detected hole target can be converted into an image signal and transmitted to a dedicated image processing system. According to the pixel distribution and brightness on the hole, the center position of the image is confirmed. At this time, the CCD camera at the position of A1BY and B1BY is manually adjusted to make the center position of the image and the center position of the image correspond one by one.

[0058] That is, the CCD camera at the position of A1BY sees the center position of the image on the calibration plate as point a;

[0059] The CCD camera at the position of B1BY sees the center position of the image on the calibration plate as point b;

[0060] The center position of any 0.2286 mm diameter hole on the calibration plate is point c;

[0061] If the CCD camera at the position of A1BY sees the position a on the calibration plate as c;

[0062] At the same time, the CCD camera at the position of B1BY sees the position b on the calibration plate as c;

[0063] Then: a = c = b, as shown in Figure 7

[0064] Let the coordinates of point c be (xi, yj), where i = 1, 2, …, 19; j = 1, 2, …, 16;

[0065] Using the above principle, the center position of the image of the CCD camera at the position of A1BY and B1BY can be corresponded to the center position of any 0.2286 mm diameter hole on the calibration plate, that is: a = c (xi, yj) = b.

[0066] Finally, a reference coordinate system of the effective test area of the flying probe tester is formed, thereby further correcting the negative effects of machining errors and assembly errors and improving the overall test precision of the equipment, as shown in Figure 8 .

[0067] Further, when the center positions of the images of the CCD cameras are respectively aligned with the first c (x1, y1) point on the calibration plate, that is: a = c (x1, y1) = b, the point can be set as the coordinate origin of the entire effective test. Further, according to the preset allowable degree and other conditions, the automatic recognition and alignment correction function for the remaining points can be realized.​

[0068] The calibration device is composed of the correction plate 12 and the CCD camera, and the flying probe tester is calibrated in precision.

[0069] The CCD camera correction method is as follows:

[0070] S1, the correction direction is set as: from bottom to top, from left to right, the x-axis and the y-axis direction are respectively moved at equal intervals of 40 mm, that is:

[0071] The first column is x1, from y1 to y16;

[0072] The second column is x2, from y1 to y16;

[0073] ...

[0074] The nineteenth column is x19, from y1 to y16;

[0075] S2, taking the point c(x1, y1) as the starting point, the CCD cameras on the A1BY and B1BY axes are respectively captured in the manual mode, as shown in Figure 9

[0076] S3, then move upwards along the y-axis direction at intervals of 40 mm, the purpose is to compensate for the machining and assembly errors by using the reference coordinates on the correction plate, and correct the position of the imaging center and the position of the image center, and adjust them to be consistent, as shown in Figure 10

[0077] S4, similarly, the identification, alignment, correction and other steps of the remaining points are completed until the final point, and then each axis is reset to the original point, as shown in Figure 11 Figure 12

[0078] Probe correction method:

[0079] S1, on the two independent motion modules stacked in the y-axis motion direction, motion modules along the x-axis direction are respectively set, that is:

[0080] The displacement time function of the y-axis direction is:

[0081] Top y module: y1=f(t);

[0082] Bottom y module: y2=f(T);

[0083] The displacement time function of the x-axis direction is:

[0084] Top y module: the time displacement function of the small x-axis is x1=x(z);

[0085] ​​​​Bottom y module: The time displacement function of the small x-axis is x2 = x(Z);

[0086] This results in 8 probes:

[0087] On the A1X axis system: A1TZ, A1BZ;

[0088] On the A2X axis system: A2TZ, A2BZ;

[0089] On the B1X axis system: B1TZ, B1BZ;

[0090] On the B2X axis system: B2TZ, B2BZ;

[0091] S2, 8-probe calibration method:

[0092] S2.1, The principle is the same as above, such as... Figure 13 As shown, after removing the calibration plate 12, the corrected position coordinates of the light spot captured on the calibration plate by the CCD camera are used as the new coordinates, that is: the coordinates of point c' are (xi', yj').

[0093] Where i = 1, 2, ..., 19; j = 1, 2, ..., 16.

[0094] S2.2. Using the CCD camera on B1BY, calibrate the probe tips of A1TZ and A1BZ on the A1X axis and A2TZ and A2BZ on the A2X axis, respectively, as follows:

[0095] S2.2.1. Let the center position of the image captured by the CCD camera on B1BY be point c', and the probe tip be point d, then

[0096] The displacement-time function of point d along the x-axis is: X = X[x(t)]

[0097] The displacement-time function of point d along the y-axis is: y = y(t);

[0098] The displacement-time function of point d along the z-axis is: z = z(t);

[0099] S2.2.2. Let the starting point be c'(x1', y1'). This means that during calibration, the center position of the CCD camera image on B1BY is first moved to this position to form c'(x1', y1'). Then, A1X or A2X moves the probe d point to the position of c'. The CCD camera converts the detected target into an image signal, which is then transmitted to a dedicated image processing system, such as... Figure 14 As shown, the center position of the image is determined based on the pixel distribution and brightness, and then the Y-axis and small x-axis motion modules correct the center position of the image to the center position of the CCD camera imaging.

[0100] S2.2.3, at this time A1X or A2X axis remains stationary, the use of small x axis driven probe d point along the x axis positive direction of movement 40 mm, while the B1BY camera in the B1X axis driven by the same along the y axis positive direction of movement 40 mm, namely to c'(x2', y1'), and then by the CCD camera will be detected target into image signal, transmitted to the dedicated image processing system, such as shown in figure 2, according to the pixel distribution and brightness to determine the center position of the image, and then by the Y axis and small x axis movement module will be the center position of the image to the center position of the CCD camera imaging; Figure 15

[0101] S2.2.4, at this time A1X or A2X axis remains stationary, then in the y axis direction by A1BY(A1TY / A2BY / A2TY) driven by the whole small x module, namely A1BX(A1TX / A2BX / A2TX) to move up 40 mm, so that at the same time the probe d point in the small x axis A1BX(A1TX / A2BX / A2TX) driven back to zero, on the other hand, the B1BY camera in the B1X axis and B1BY driven to c'(x1', y2'), and then by the CCD camera will be detected target into image signal, transmitted to the dedicated image processing system, according to the pixel distribution and brightness to determine the center position of the image, such as shown in figure 2, and then by the Y axis and small x axis movement module will be the center position of the image to the center position of the CCD camera imaging; Figure 16

[0102] S2.2.5, at this time A1X or A2X axis remains stationary, the use of small x axis driven probe d point along the x axis positive direction of movement 40 mm, while the B1BY camera in the B1X axis driven by the same along the x axis positive direction of movement 40 mm, namely to c'(x2', y2'), and then by the CCD camera will be detected target into image signal, transmitted to the dedicated image processing system, such as shown in figure 2, according to the pixel distribution and brightness to determine the center position of the image, and then by the Y axis and small x axis movement module will be the center position of the image to the center position of the CCD camera imaging; Figure 17

[0103] ​​​S2.2.7. Continue in this manner until the position coordinates of the probe tip d point start from c'(x1', y1') and c'(x2', y1'), then move to c'(x1', y2') and c'(x2, y2'), ..., until c'(x1', y16') and c'(x2', y16'). After the calibration is completed, the A1X or A2X axis will move towards c'(x2', y1') and c'(x3', y1'). Then, follow the above steps to complete the calibration of c'(x2', y1') and c'(x3', y16'). The calibration of c'(x2', y16') and c'(x3', y16') is performed, and finally the calibration of c'(x17', y1') and c'(x18', y1'), c'(x17', y2') and c'(x18', y2'), ..., c'(x17', y16') and c'(x18', y16') is performed. Then the calibration of the probe tips of A1TZ and A1BZ on the A1X axis and A2TZ and A2BZ on the A2X axis is completed by the CCD camera on B1BY.

[0104] S3. Use the CCD camera on A1BY to calibrate the probe tips of A1TZ and B1BZ on the B1X axis and B2TZ and B2BZ on the B2X axis respectively, on the same principle as above.

[0105] The PCB board testing principle is the same as above. Flying probe testing uses four to eight independently controlled probes. The four to eight probes are installed on tiny reciprocating components that can move freely in the xy plane. The test points are directly controlled by CADI Gerber data.

[0106] The unit under test is transported to the test machine via a belt or other unit under test conveyor system, and then fixed in place. The test machine's probes contact the test pads and pathways to test individual components of the unit under test.

[0107] Different results from different resolutions of industrial CCD cameras:

[0108] Assuming the size of the object being detected is 12*9.6mm (A*B), the difference in pixel accuracy between using 400,000 pixels and 6 million pixels is calculated. This demonstrates that higher resolution is more beneficial for improving device accuracy, as follows:

[0109] Using a 1 / 3” CCD sensor (4.8mm width, 3.6mm height), a 400,000-pixel camera resolution (768*576), and a working distance of 78mm, we can calculate:

[0110] Pixel size = Sensor width / Width resolution = 4.8 / 768 * 1000 = 6.25 μm;

[0111] Magnification = sensor width size / field of view width size = 4.8 / 12 = 0.4;

[0112] 40 million pixel camera, the width size of a single pixel = 12 / 768 = 15.6 μm;

[0113] The height size of a single pixel = 9.6 / 576 = 16.7 μm;

[0114] Select the CCD1 / 1.8" type chip (width size is 7.2 mm, height size is 5.4 mm), the camera resolution uses 6 million pixels (3072*2048), working distance is 78 mm, which can be obtained:

[0115] Pixel size = sensor width size / width resolution = 7.2 / 3072 * 1000 = 2.34 μm;

[0116] Magnification = sensor width size / field of view width size = 7.2 / 12 = 0.6;

[0117] 600 million pixel camera, the width size of a single pixel = 12 / 3072 = 3.9 μm;

[0118] The height size of a single pixel = 9.6 / 2048 = 4.69 μm;

[0119] From the above:

[0120] In the PCB manufacturing process, there are the following restrictions:

[0121] The minimum pad spacing is 4 mil, that is, 4 * 0.0254 mm = 0.1016 mm = 101.6 μm;

[0122] The minimum pad size is 2 mil, that is, 2 * 0.0254 mm = 0.0508 mm = 50.8 μm;

[0123] The probe tip size is: 50 μm;

[0124] In the 4mil*4mil range, the number of pixels occupied by 40 million and 600 million is as shown in Figure 18 、 Figure 19 :

[0125] The following conclusions are drawn:

[0126] A, select 1 / 3", 40 million pixel (768*576) CCD, in the range of 101.6*101.6 μm, only 42 pixels, each pixel size: 15.6*16.7 μm, a pixel in the range of 101.6*101.6 μm The proportion of about 15%, which means that every missing 1 pixel, the accuracy is lost 15%;

[0127] B, select 1 / 1.8", 6 million pixels (3072*2048) CCD, in the range of 101.6*101.6 mu m, there are 572 pixels, each pixel size is: 3.9*4.69 mu m, a pixel in the range of 101.6*101.6 mu m is about: 3.83%.

[0128] Therefore, the high-resolution industrial camera can overcome the poor light in the working environment or the pixel loss caused by the reflection of the light during the movement of the CCD, so that the device obtains better operation accuracy, and thus the high-resolution industrial camera can accurately test the flying probe testing machine.

[0129] The above shows and describes the basic principle, main features and advantages of the present application. Those skilled in the art should understand that the present application is not limited to the above examples, and the above examples and descriptions in the specification are only to illustrate the principles of the present application. Without departing from the spirit and scope of the present application, various changes and improvements can be made to the present application, and these changes and improvements all fall within the scope of the present application.

Claims

1. A high resolution camera based flying probe tester calibration apparatus, comprising: The calibration device comprises a correction plate (12) and a CCD camera, the correction plate (12) is fixedly installed on the flying probe tester, the correction plate (12) is provided with through holes arranged in an array, the through holes are arranged at equal division points on the correction plate (12), and two CCD cameras are installed on the flying probe tester, and the flying probe tester is calibrated by detecting light in the through holes through the CCD cameras.

2. The high-resolution camera-based flying probe tester calibration apparatus of claim 1, wherein, The flying probe tester comprises a base (1), symmetrical side plates (2) are fixedly arranged on the base (1), a top plate is fixedly arranged on the side plates (2), symmetrical electric sliding tables (3) are fixedly arranged on the base (1), and the two electric sliding tables (3) are horizontally arranged on the two sides of the base (1).

3. The high resolution camera based flying probe tester calibration apparatus of claim 2, wherein, The electric sliding tables (3) are slidably provided with symmetrical electric sliding tables (4), the electric sliding tables (4) are slidably provided with symmetrical sliding blocks (5), and the sliding blocks (5) are fixedly provided with housings (7).

4. The high-resolution camera-based flying probe tester calibration apparatus of claim 3, wherein, One side of the housing (7) is fixedly provided with a baffle (8), the housing (7) is fixedly provided with a connecting plate (9), the connecting plate (9) is located on one side of the baffle (8), a fixing seat (10) is fixedly arranged between the connecting plate (9) and the baffle (8), and a detection assembly (13) is fixedly arranged on the fixing seat (10).

5. The high resolution camera based flying probe tester calibration apparatus of claim 4, wherein, One side of the connecting plate (9) away from the baffle (8) is fixedly provided with a mounting block (6), one end of the mounting block (6) is fixedly provided with a mounting plate (11), a CCD camera is fixedly arranged on the mounting plate (11), the CCD camera is arranged at the A1BY axis and the B1BY axis of the eight-head flying probe tester, and the two CCD cameras are used for calibrating the front and back of the flying probe tester.

6. The high-resolution camera-based flying probe tester calibration apparatus of claim 2, wherein, The base (1) is fixedly provided with a clamping assembly, the clamping assembly comprises two clamps, the two clamps are horizontally arranged between the base (1) and the top plate, and the two clamps are used for fixing the correction plate (12).

7. The high-resolution camera-based flying probe tester calibration apparatus of claim 1, wherein, The correction plate (12) is assembled with a precision level film.

Images