Aperture adjusting structure and exposure machine thereof

Abstract

The utility model relates to the technical field of exposure machines, and discloses an aperture adjusting structure and an exposure machine thereof, the aperture adjusting structure comprises a frame assembly, the frame assembly comprises a side plate, a first rectangular strip and a second rectangular strip; the horizontal moving assembly comprises a first lead screw, a moving rod, a first servo motor and a second servo motor; the aperture assembly comprises an aperture body, a movable plate and two light quantity adjusting units, and the light quantity adjusting units are located above the aperture body. The first groove plate is arranged on the aperture body, the first light shielding plate and the second light shielding plate are controlled to move through the third servo motor and the fourth servo motor, the two light quantity adjusting units cooperate to complete control over the light passing quantity, the two aperture assemblies can aim at two defects through one-time exposure, the chromium removal speed is further increased, and the chromium removal efficiency is improved. And the productivity is improved.

Description

Technical Field

[0001] This utility model relates to the field of exposure machine technology, and in particular to an aperture adjustment structure and an exposure machine thereof. Background Technology

[0002] The prior art discloses an aperture-adjustable exposure machine (publication number: CN217718426U), comprising: a light source; a light adjustment component for homogenizing the light emitted by the light source, disposed below the light source; an aperture component located below the light adjustment component, the aperture component having a light-transmitting hole, the size and position of which are adjusted according to the size and position of chromium residue on the photomask; a stage on which the photomask is disposed, and light passing through the light-transmitting hole exposes the photomask; and a control system, the control system being communicatively connected to the aperture component and the stage, for controlling the aperture component and the stage.

[0003] Existing technology changes the exposure range by controlling the size of the overlapping area of ​​the two aperture openings, but each exposure can only target one defect, and there is still room for improvement in work efficiency.

[0004] Therefore, based on the prior art, those skilled in the art have provided an aperture adjustment structure and its exposure machine to solve the problems mentioned in the background art. Utility Model Content

[0005] To address the shortcomings of existing technologies, this invention provides an aperture adjustment structure and its exposure machine, solving the problems mentioned in the background section.

[0006] To achieve the above objectives, the present invention adopts the following technical solution:

[0007] An aperture adjustment structure includes: a frame assembly comprising a side plate, a first rectangular strip, and a second rectangular strip; a horizontal movement assembly comprising a first lead screw, a moving rod, a first servo motor, and a second servo motor; and an aperture assembly movably engaged with the moving rod, wherein the horizontal movement assembly adjusts the position of the aperture assembly. The aperture assembly includes an aperture body, a moving plate, and light intensity adjustment units, wherein the light intensity adjustment units are located above the aperture body, and there are two light intensity adjustment units stacked on the aperture body. The light intensity adjustment units are used to change the amount of light transmitted through the aperture body.

[0008] According to the aperture adjustment structure machine, a first sliding cavity is provided on the side wall of the first rectangular bar near the second rectangular bar, a first lead screw is movably installed in the first sliding cavity, a first servo motor is fixedly installed on the outer side wall of the first rectangular bar, and a limiting cavity is provided through the side wall of the second rectangular bar near the first rectangular bar.

[0009] According to the aperture adjusting structure, one end of the moving rod is movably clamped in the first sliding cavity, the first lead screw movably penetrates the moving rod, the first lead screw is in threaded connection with the moving rod, the other end of the moving rod is movably clamped in the limiting cavity, and the second servo motor is fixedly installed at the end of the moving rod away from the first rectangular strip.

[0010] According to the aperture adjusting structure, a sliding groove is formed through a side wall surface of the moving rod, one end of the moving plate is movably clamped in the sliding groove, the second lead screw is movably installed in the sliding groove, the output shaft of the second servo motor movably penetrates the moving rod and is fixedly connected with the second lead screw, and the second lead screw movably penetrates the moving plate and is in threaded connection with the moving plate.

[0011] According to the aperture adjusting structure, the moving plate is fixedly connected with the aperture body, a rectangular via hole is formed in the top end of the aperture body, the light quantity adjusting unit comprises a first groove plate, a second groove plate, a second light shielding plate and a first light shielding plate, and the two groups of second light shielding plates and first light shielding plates of the two light quantity adjusting units are in a mutually perpendicular state.

[0012] According to the aperture adjusting structure, the first groove plate and the second groove plate are fixedly installed with a partition column at the middle position in the cavity, the second light shielding plate and the first light shielding plate are in a "convex" shape, the third lead screw and the fourth lead screw are movably installed in the cavity of the second groove plate, the third lead screw movably penetrates the corresponding first light shielding plate and is in threaded connection with the first light shielding plate, the fourth lead screw movably penetrates the corresponding second light shielding plate and is in threaded connection with the second light shielding plate, the third servo motor and the fourth servo motor are fixedly installed on the two side outer wall surfaces of the second groove plate, the output shaft of the third servo motor is fixedly connected with the third lead screw, and the output shaft of the fourth servo motor is fixedly connected with the fourth lead screw.

[0013] According to the aperture adjusting structure, the first groove plate is fixedly installed with a guide rod in the cavity, and the guide rod movably penetrates the corresponding first light shielding plate and the second light shielding plate.

[0014] An exposure machine comprises a machine body and the aperture adjusting structure, and the side plate and the first rectangular strip are fixedly installed on the inner wall surface of the machine body.

[0015] The aperture adjusting structure and the exposure machine have the following beneficial effects:

[0016] (1) By setting the side plate and the first rectangular bar fixedly installed on the inner wall of the machine body, the frame assembly is fixed in the machine body, a horizontal moving assembly is arranged, the aperture assembly can be moved in X-axis when the first servo motor works, the aperture assembly can be moved in Y-axis when the second servo motor works, the movement of the aperture assembly in horizontal position is completed, a first recessed groove plate is arranged on the aperture body, the first light shielding plate and the second light shielding plate are controlled to move by the third servo motor and the fourth servo motor, two groups of light amount adjusting units work cooperatively to complete the control of the light amount, two groups of aperture assemblies can aim at two defects in one-time exposure, and the speed of chromium removal is further improved, and the production capacity is improved.

[0017] (2) A first sliding cavity is formed in the first rectangular bar, a first screw rod is movably installed in the first sliding cavity, one end of a moving rod is movably clamped in the first sliding cavity, the other end of the moving rod is movably clamped in the limiting cavity, the first servo motor drives the first screw rod to rotate and drives the moving rod to move in the working process, and X-axis movement of the aperture assembly is completed, a sliding groove is formed in the moving rod in penetration, one end of a moving plate is movably clamped in the sliding groove, a second screw rod is movably installed in the sliding groove, an output shaft of the second servo motor is movably penetrated through the moving rod and fixedly connected with the second screw rod, the second screw rod is movably penetrated through the moving plate and in threaded connection with the moving plate, and the second servo motor drives the second screw rod to rotate in the working process, and Y-axis position adjustment of the aperture assembly is completed.

[0018] (3) In the working process, the third servo motor drives the third screw rod to rotate, the third screw rod is movably penetrated through the first light shielding plate and drives the first light shielding plate to move, the fourth servo motor drives the fourth screw rod to rotate, the fourth screw rod is movably penetrated through the second light shielding plate and drives the second light shielding plate to move, the movement of the first light shielding plate and the second light shielding plate can control the light amount, and the precision of the light amount control is further refined through the arrangement of the two groups of light amount adjusting units and the two groups of second light shielding plates and the first light shielding plates of the two groups of light amount adjusting units in the perpendicular state. BRIEF DESCRIPTION OF DRAWINGS

[0019] Figure 1 It is a perspective view of the aperture adjusting structure of the utility model;

[0020] Figure 2 It is a perspective view of the aperture adjusting structure of the utility model; Figure One ;

[0021] Figure 3 It is a perspective view of the aperture adjusting structure of the utility model; Figure Two ;

[0022] Figure 4 It is a perspective view of the aperture adjusting structure of the utility model;

[0023] Figure 5 It is an explosion map of the diaphragm assembly of the diaphragm adjusting structure.

[0024] Legend:

[0025] 10, side plate; 11, first rectangular bar; 12, second rectangular bar; 13, diaphragm assembly; 14, first sliding cavity; 15, first lead screw; 16, first servo motor; 17, limiting cavity; 18, moving rod; 19, second servo motor; 20, second lead screw; 21, diaphragm body; 22, moving plate; 23, light quantity adjusting unit; 24, first groove plate; 25, second groove plate; 26, first light shield plate; 27, second light shield plate; 28, partition column; 29, third lead screw; 30, third servo motor; 31, fourth lead screw; 32, fourth servo motor. DETAILED DESCRIPTION

[0026] As Figures 1-5 shown: a diaphragm adjusting structure, which comprises: a frame assembly, the frame assembly comprising a side plate 10, a first rectangular bar 11 and a second rectangular bar 12; a horizontal moving assembly, the horizontal moving assembly comprising a first lead screw 15, a moving rod 18, a first servo motor 16 and a second servo motor 19; a diaphragm assembly 13, the diaphragm assembly 13 is movably clamped with the moving rod 18, the horizontal moving assembly adjusts the position of the diaphragm assembly 13, the diaphragm assembly 13 comprises a diaphragm body 21, a moving plate 22 and a light quantity adjusting unit 23, the light quantity adjusting unit 23 is located above the diaphragm body 21, the number of the light quantity adjusting unit 23 is two, the two light quantity adjusting units 23 are stacked on the diaphragm body 21, and the light quantity adjusting unit 23 is used to change the light quantity of the diaphragm body 21.

[0027] An exposure machine, comprising a machine body and the diaphragm adjusting structure, the side plate 10 and the first rectangular bar 11 are fixedly installed on the inner wall surface of the machine body.

[0028] It should be noted that the first servo motor 16, the second servo motor 19 and the third servo motor 20 are small servo motors.

[0029] Specifically, by setting the side plate 10 and the first rectangular strip 11 fixedly installed on the inner wall of the machine body, the frame assembly is fixed in the machine body, the horizontal moving assembly is arranged, the first servo motor 16 can move the aperture assembly 13 in the X-axis direction, the second servo motor 19 can move the aperture assembly 13 in the Y-axis direction, the movement of the aperture assembly 13 in the horizontal position is completed, the first recessed groove plate 24 is arranged on the aperture body 21, the first and second light shielding plates 26 and 27 are controlled to move by the third and fourth servo motors 30 and 32, the two groups of light amount adjusting units 23 work cooperatively to complete the control of the light amount, the two groups of aperture assemblies 13 can aim at two defects in one-time exposure, and the speed of chromium removal is further improved, and the production capacity is improved.

[0030] The first sliding cavity 14 is arranged on the side wall of the first rectangular strip 11 close to the second rectangular strip 12, the first lead screw 15 is movably installed in the first sliding cavity 14, the first servo motor 16 is fixedly installed on the outer wall of the first rectangular strip 11, and the limiting cavity 17 is arranged on the side wall of the second rectangular strip 12 close to the first rectangular strip 11. One end of the moving rod 18 is movably clamped in the first sliding cavity 14, the first lead screw 15 movably penetrates the moving rod 18, the first lead screw 15 is in threaded connection with the moving rod 18, the other end of the moving rod 18 is movably clamped in the limiting cavity 17, and the second servo motor 19 is fixedly installed on the end of the moving rod 18 away from the first rectangular strip 11.

[0031] Specifically, the first sliding cavity 14 is arranged on the first rectangular strip 11, the first lead screw 15 is movably installed in the first sliding cavity 14, one end of the moving rod 18 is movably clamped in the first sliding cavity 14, the other end of the moving rod 18 is movably clamped in the limiting cavity 17, the first servo motor 16 drives the first lead screw 15 to rotate and drives the moving rod 18 to move in the working process, and the X-axis movement of the aperture assembly 13 is completed.

[0032] The sliding groove is arranged on the side wall of the moving rod 18, one end of the moving plate 22 is movably clamped in the sliding groove, the second lead screw 20 is movably installed in the sliding groove, the output shaft of the second servo motor 19 movably penetrates the moving rod 18 and is fixedly connected with the second lead screw 20, and the second lead screw 20 movably penetrates the moving plate 22 and is in threaded connection with the moving plate 22.

[0033] Specifically, the sliding groove is arranged on the moving rod 18, one end of the moving plate 22 is movably clamped in the sliding groove, the second lead screw 20 is movably installed in the sliding groove, the output shaft of the second servo motor 19 movably penetrates the moving rod 18 and is fixedly connected with the second lead screw 20, the second lead screw 20 movably penetrates the moving plate 22 and is in threaded connection with the moving plate 22, the second servo motor 19 drives the second lead screw 20 to rotate in the working process, and the Y-axis position adjustment of the aperture assembly 13 is completed.

[0034] The moving plate 22 is fixedly connected with the diaphragm body 21, the diaphragm body 21 is provided with a rectangular through hole at the top end, the light quantity adjusting unit 23 comprises a first recessed plate 24, a second recessed plate 25, a second light shielding plate 27 and a first light shielding plate 26, and the two groups of second light shielding plates 27 and the first light shielding plates 26 of the two light quantity adjusting units 23 are perpendicular to each other.

[0035] Specifically, the moving plate 22 is fixedly connected with the diaphragm body 21, the diaphragm body 21 is provided with a rectangular through hole at the top end, the light passes through the rectangular through hole and passes through the diaphragm body 21.

[0036] The first recessed plate 24 and the second recessed plate 25 are fixedly installed with a partition column 28 at the middle position in the cavity, the second light shielding plate 27 and the first light shielding plate 26 are in the shape of a "convex" character, the cavity of the second recessed plate 25 is movably installed with a third lead screw 29 and a fourth lead screw 31, the third lead screw 29 movably penetrates through the corresponding first light shielding plate 26 and is threadedly connected with the first light shielding plate 26, the fourth lead screw 31 movably penetrates through the corresponding second light shielding plate 27 and is threadedly connected with the second light shielding plate 27, the two side outer walls of the second recessed plate 25 are fixedly installed with a third servo motor 30 and a fourth servo motor 32, the output shaft of the third servo motor 30 is fixedly connected with the third lead screw 29, and the output shaft of the fourth servo motor 32 is fixedly connected with the fourth lead screw 31. The cavity of the first recessed plate 24 is fixedly installed with a guide rod, and the guide rod movably penetrates through the corresponding first light shielding plate 26 and the second light shielding plate 27.

[0037] Specifically, in the working process, the third servo motor 30 drives the third lead screw 29 to rotate, the third lead screw 29 movably penetrates through the first light shielding plate 26 and drives the first light shielding plate 26 to move, the fourth servo motor 32 drives the fourth lead screw 31 to rotate, the fourth lead screw 31 movably penetrates through the second light shielding plate 27 and drives the second light shielding plate 27 to move, and the movement of the first light shielding plate 26 and the second light shielding plate 27 can control the light transmission amount, and the two groups of light quantity adjusting units 23 are arranged, and the two groups of second light shielding plates 27 and the first light shielding plates 26 of the two light quantity adjusting units 23 are perpendicular to each other, so as to further refine the control precision of the light transmission amount.

[0038] The working principle of the diaphragm adjusting structure and the exposure machine thereof is as follows: the side plate 10 and the first rectangular strip 11 are fixedly installed on the inner wall of the machine body, so that the frame assembly is fixed in the machine body; the horizontal moving assembly is arranged; the diaphragm assembly 13 can be moved along the X-axis when the first servo motor 16 works, and the diaphragm assembly 13 can be moved along the Y-axis when the second servo motor 19 works, so that the movement of the diaphragm assembly 13 in the horizontal position is completed; the first recessed groove plate 24 is arranged on the diaphragm body 21; the first light shielding plate 26 and the second light shielding plate 27 are controlled to move by the third servo motor 30 and the fourth servo motor 32; the two groups of light quantity adjusting units 23 work cooperatively to complete the control of the light quantity; the two groups of diaphragm assemblies 13 can aim at two defects in one-time exposure, so that the speed of chromium removal is further improved, and the production capacity is improved.

[0039] The circuit and electronic components and modules are all prior art, and the person skilled in the art can realize them without redundancy, and the content protected by the utility model does not involve the improvement of software and methods.

[0040] The basic principle and main features of the utility model and the advantages of the utility model are shown and described above. It should be understood by the person skilled in the industry that the utility model is not limited by the above-mentioned embodiments, and the above-mentioned embodiments and the description in the specification only illustrate the principle of the utility model, and the utility model will have various changes and improvements without departing from the spirit and scope of the utility model, and these changes and improvements all fall within the scope of the utility model claimed.

Claims

1. An aperture adjustment structure, characterized by, Include: Frame assembly, the frame assembly includes side plate (10), first rectangular bar (11) and second rectangular bar (12); Horizontal movement assembly, the horizontal movement assembly includes first screw (15), moving rod (18), first servo motor (16) and second servo motor (19); Aperture assembly (13), the aperture assembly (13) is movably engaged with moving rod (18), and the horizontal movement assembly adjusts the position of the aperture assembly (13), the aperture assembly (13) includes aperture body (21), moving plate (22) and light quantity adjusting unit (23), the light quantity adjusting unit (23) is located above the aperture body (21), the number of light quantity adjusting unit (23) is two, two light quantity adjusting units (23) are stacked on the aperture body (21), and the light quantity adjusting unit (23) is used to change the light passing amount of the aperture body (21).

2. The aperture adjustment structure of claim 1, wherein: The first rectangular bar (11) is provided with a first sliding cavity (14) on the side wall surface close to the second rectangular bar (12), the first sliding cavity (14) movably installs the first screw (15), the first servo motor (16) is fixedly installed on the outer wall surface of the first rectangular bar (11), and the second rectangular bar (12) is provided with a limiting cavity (17) through on the side wall surface close to the first rectangular bar (11).

3. The aperture adjustment structure of claim 1, wherein: One end of the moving rod (18) is movably clamped in the first sliding cavity (14), the first screw (15) movably penetrates the moving rod (18), the first screw (15) and the moving rod (18) are in threaded connection, the other end of the moving rod (18) is movably clamped in the limiting cavity (17), and the second servo motor (19) is fixedly installed on the end of the moving rod (18) away from the first rectangular bar (11).

4. The aperture adjustment structure of claim 3, wherein: A sliding groove is formed through the side wall surface of the moving rod (18), one end of the moving plate (22) is movably clamped in the sliding groove, the second screw (20) is movably installed in the sliding groove, the output shaft of the second servo motor (19) movably penetrates the moving rod (18) and is fixedly connected with the second screw (20), and the second screw (20) movably penetrates the moving plate (22) and is in threaded connection with the moving plate (22).

5. The aperture adjustment structure of claim 1, wherein: The moving plate (22) is fixedly connected with the aperture body (21), a rectangular via hole is formed in the top end of the aperture body (21), the light quantity adjusting unit (23) includes first recessed groove plate (24), second recessed groove plate (25), second light shielding plate (27) and first light shielding plate (26), two groups of second light shielding plates (27) and first light shielding plates (26) of two light quantity adjusting units (23) are in a mutually perpendicular state.

6. The aperture adjustment structure of claim 5, wherein: The middle position of the cavities of the first and second recessed plates (24) and (25) are fixedly installed with a partition column (28), the first and second light shielding plates (26) and (27) are in the shape of "convex", the cavities of the second recessed plate (25) are movably installed with a third lead screw (29) and a fourth lead screw (31), the third lead screw (29) movably penetrates through the corresponding first light shielding plate (26) and is threadedly connected with the first light shielding plate (26), the fourth lead screw (31) movably penetrates through the corresponding second light shielding plate (27) and is threadedly connected with the second light shielding plate (27), the outer wall surfaces of the two sides of the second recessed plate (25) are fixedly installed with a third servo motor (30) and a fourth servo motor (32), the output shaft of the third servo motor (30) is fixedly connected with the third lead screw (29), and the output shaft of the fourth servo motor (32) is fixedly connected with the fourth lead screw (31).

7. The aperture adjustment structure of claim 6, wherein: The cavities of the first recessed plate (24) are fixedly installed with a guide rod, the guide rod movably penetrates through the corresponding first and second light shielding plates (26) and (27).

8. An exposure machine characterized by comprising: The organic body and the aperture adjusting structure as claimed in any one of claims 1-7 are comprised, and the side plate (10) and the first rectangular strip (11) are fixedly installed on the inner wall surface of the body.

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