Opening and closing mechanism and plasma etching system

Abstract

The utility model relates to an opening and closing mechanism and a plasma etching system, the opening and closing mechanism is used for a vacuum chamber, the vacuum chamber comprises a chamber cover and a chamber body, the opening and closing mechanism comprises translation sliding support devices and an opening and closing device, and the two translation sliding support devices are symmetrically arranged on two sides of the chamber body. The opening and closing devices are symmetrically arranged on the translation sliding supporting device on the two sides of the cavity in a sliding mode, the driving ends of the opening and closing devices are connected with the cavity cover, the opening and closing devices are used for driving the cavity cover to reciprocate relative to the cavity in the opening and closing direction, and the opening and closing devices can reciprocate relative to the cavity in the translation direction on the translation sliding supporting device. The opening and closing direction intersects with the translation direction. The opening and closing devices in the opening and closing mechanism are symmetrically arranged on the two sides of the cavity and the two sides of the cavity cover, it can be guaranteed that the two sides of the cavity cover are evenly stressed in the opening and closing process, the problem that one side of the cavity cover tilts is solved, the sealing performance of the vacuum cavity is guaranteed, the occupied space is small in a translation moving mode, the maintenance space can be increased, and maintenance is convenient.

Description

TECHNICAL FIELD

[0001] The utility model relates to semiconductor manufacturing equipment technical field especially relates to a kind of opening and closing mechanism and plasma etching system. BACKGROUND

[0002] The basic principle of inductively coupled plasma etching method is that under vacuum low pressure, the radio frequency output of ICP radio frequency power is output to annular coupling coil, and the mixed etching gas in a certain proportion is coupled glow discharge to generate high-density plasma, under the RF radio frequency effect of lower electrode, the chemical bond of semiconductor material in the pattern area of substrate is broken, and volatile material is generated with etching gas, which is removed from vacuum pipeline in gas form.

[0003] Therefore, the application of vacuum chamber is essential in etching equipment, and the whole process is carried out in the vacuum environment composed of the cavity of vacuum chamber and the cavity cover. The vacuum chamber needs to be maintained or repaired regularly, at which time the cavity cover needs to be removed to expose the entire aperture of the vacuum chamber, and then the cavity cover is closed after maintenance.

[0004] The cavity cover is the upper half of the vacuum chamber, mainly used for sealing the cavity and bearing the upper coil, dielectric window and other components. The weight of the cavity cover plus the weight of the remaining components makes it difficult for human operation and easy to hit other components of the vacuum chamber during the opening and closing process of the cavity cover, causing these components to loosen or damage, reducing the service life and posing a certain safety hazard. Therefore, single-shaft cavity cover lifting mechanism and cavity cover rotating mechanism are currently used to open and close the cavity cover, but this structure is a single-shaft structure, and the cavity cover is not uniformly stressed, which can cause the cavity cover to tilt on one side due to its own weight during opening and closing, causing wear and tear of the positioning structure between the cavity cover and the cavity, affecting the sealing effect between the cavity cover and the cavity. UTILITY MODEL CONTENTS

[0005] The first purpose of the utility model is to provide an opening and closing mechanism to make the cavity cover of the vacuum chamber uniformly stressed during opening and closing, avoiding the problem of cavity cover tilting.

[0006] The second purpose of the utility model is to provide a plasma etching system comprising the above opening and closing mechanism.

[0007] To achieve the above purpose, the utility model provides the following technical scheme:

[0008] An opening and closing mechanism for a vacuum chamber, the vacuum chamber comprising a cavity cover and a cavity, the opening and closing mechanism comprising:

[0009] Translation sliding support devices, two translation sliding support devices are symmetrically arranged on both sides of the cavity.

[0010] The opening and closing device is symmetrically arranged on both sides of the cavity through the translational sliding support device, the driving end of the opening and closing device is connected with the cavity cover, the opening and closing device is used for driving the cavity cover to reciprocate relative to the cavity along the opening and closing direction, and the opening and closing device can reciprocate relative to the cavity along the translational direction on the translational sliding support device, and the opening and closing direction intersects with the translational direction.

[0011] In an embodiment of the present application, the translational device is used for driving the opening and closing device to reciprocate along the translational direction on the translational sliding support device.

[0012] In an embodiment of the present application, the translational device is a piston cylinder, or the translational device is a linear motor, or the translational device includes a rotary motor and a transmission mechanism.

[0013] In an embodiment of the present application, the translational sliding support device includes a translational support rod and a stop limiting piece arranged at both ends of the translational support rod, the opening and closing device is arranged on the translational support rod, and the stop limiting piece is used for limiting the opening and closing device in the translational direction.

[0014] In an embodiment of the present application, the driving end of the opening and closing device is connected with the cavity cover through a connecting rod, an expansion support rod is arranged between the connecting rod and the translational support rod, and the expansion support rod is expandable.

[0015] In an embodiment of the present application, the expansion support rod includes a sleeve part, a support rod part and an elastic piece, the support rod part is arranged in the sleeve part and can reciprocate axially relative to the sleeve part, and the elastic piece is arranged between the sleeve part and the support rod part.

[0016] In an embodiment of the present application, the translational device includes a rotary motor, the translational support rod and the opening and closing device are screw-threadedly matched to constitute a first screw pair, the expansion support rod and the translational support rod are screw-threadedly matched to constitute a second screw pair, the translational support rod and the stop limiting piece are rotatably matched and connected, the translational support rod is arranged in the cavity through the stop limiting pieces at both ends, and the rotary motor is in transmission connection with the translational support rod.

[0017] In an embodiment of the present application, translational position detection devices are arranged at both ends of the translational sliding support device respectively, a controller of the opening and closing mechanism is in communication connection with the translational position detection devices and the translational device respectively, and the controller is used for controlling the working state of the translational device according to the detection value of the translational position detection device.

[0018] In an embodiment of the present application, the driving end of the opening and closing device is connected to the first end of the cavity cover in the translation direction, and a telescopic support member is further arranged between the cavity cover and the cavity body, the cavity cover is respectively provided with a sliding groove on both sides corresponding to the translation sliding support device, the sliding groove extends to the second end of the cavity cover in the translation direction, and the first end of the telescopic support member is connected to the cavity body, and the second end of the telescopic support member is slidingly arranged in the sliding groove.

[0019] A plasma etching system comprises the opening and closing mechanism according to any one of the preceding embodiments.

[0020] As can be seen from the above technical solutions, the opening and closing mechanism disclosed in the present application is used for a vacuum chamber, the vacuum chamber comprises a cavity cover and a cavity body, and the opening and closing mechanism comprises translation sliding support devices and opening and closing devices, wherein the two translation sliding support devices are symmetrically arranged on both sides of the cavity body, the plurality of opening and closing devices are symmetrically slidingly arranged on the translation sliding support devices on both sides of the cavity body, the driving end of the opening and closing device is connected to the cavity cover, the opening and closing device is used for driving the cavity cover to reciprocally move relative to the cavity body along an opening and closing direction, the opening and closing device can reciprocally move relative to the cavity body along a translation direction on the translation sliding support device, and the opening and closing direction intersects the translation direction.

[0021] When the cavity cover is opened, the opening and closing device acts, the driving end of the opening and closing device lifts the cavity cover in the opening and closing direction away from the cavity body, when the driving end of the opening and closing device moves to the position, the opening and closing device moves along the translation direction on the translation sliding support device, so that the cavity cover moves to one side of the cavity body, until the cavity cover exposes the entire aperture of the cavity body, when the cavity cover is closed, the opening and closing device reversely moves along the translation direction on the translation sliding support device, until the cavity cover is located directly above the cavity body, the opening and closing device acts, and the driving end of the opening and closing device drives the cavity cover to close along the opening and closing direction with the cavity body, therefore, it can be seen that the plurality of opening and closing devices in the opening and closing mechanism are symmetrically arranged on both sides of the cavity body and the cavity cover, which can ensure that both sides of the cavity cover are uniformly stressed during the opening and closing process, thereby avoiding the problem that one side of the cavity cover is lifted up, ensuring the sealing performance of the vacuum chamber, increasing the safety during the opening and closing process, and reducing the occupied space during the translation movement, thereby improving the maintenance space and facilitating maintenance. BRIEF DESCRIPTION OF DRAWINGS

[0022] In order to more clearly illustrate the technical solutions in the embodiments of the present application or the prior art, the following will briefly introduce the drawings needed to be used in the embodiments or the prior art description. Obviously, the drawings in the following description are only some embodiments of the present application, and other drawings can also be obtained by those skilled in the art without any creative effort on the basis of these drawings.

[0023] Fig. 1The main view of the vacuum chamber provided with the opening and closing mechanism according to the embodiment of the present application is shown in the figure.

[0024] Fig. 2 The first view structure schematic diagram of the vacuum chamber provided with the opening and closing mechanism according to the embodiment of the present application is shown in the figure.

[0025] Fig. 3 The second view structure schematic diagram of the vacuum chamber provided with the opening and closing mechanism according to the embodiment of the present application is shown in the figure.

[0026] In the figure,

[0027] 1 is a vacuum chamber; 101 is a cavity; 102 is a cavity cover; 2 is a translational sliding support device; 201 is a translational support rod; 202 is a stop limiting piece; 3 is an opening and closing device; 4 is a connecting rod; and 5 is an extension support rod. DETAILED DESCRIPTION

[0028] One of the cores of the present application is to provide an opening and closing mechanism, and the structural design of the opening and closing mechanism can make the cavity cover of the vacuum chamber bear force uniformly during opening and closing, and avoid the problem of cavity cover edge lifting.

[0029] Another core of the present application is to provide a plasma etching system comprising the opening and closing mechanism.

[0030] The technical solutions in the embodiments of the present application will be clearly and completely described below with reference to the drawings in the embodiments of the present application. Obviously, the described embodiments are only part of the embodiments of the present application, rather than all the embodiments. Based on the embodiments in the present application, all other embodiments obtained by those skilled in the art without creative labor fall within the scope of protection of the present application.

[0031] Please refer to Figs. 1 to 3 , Fig. 1 The main view of the vacuum chamber provided with the opening and closing mechanism according to the embodiment of the present application is shown in the figure, Fig. 2 The first view structure schematic diagram of the vacuum chamber provided with the opening and closing mechanism according to the embodiment of the present application is shown in the figure, Fig. 3 The second view structure schematic diagram of the vacuum chamber provided with the opening and closing mechanism according to the embodiment of the present application is shown in the figure.

[0032] The utility model discloses an opening and closing mechanism, this opening and closing mechanism is used for vacuum chamber 1, and vacuum chamber 1 includes cavity cover 102 and cavity 101, and cavity cover 102 and cavity 101 seal cooperation, namely, be provided with sealing structure between cavity cover 102 and cavity 101 to form vacuum environment, and still be provided with positioning structure between cavity cover 102 and cavity 101 to guide and limit cavity cover 102 during the closure of cavity cover 102 and cavity 101, and the opening and closing mechanism includes translation sliding support device 2 and opening and closing device 3.

[0033] Among them, translation sliding support device 2 is used to support and direction guide cavity cover 102 during the opening and closing and translation of cavity cover 102, and two translation sliding support devices 2 are symmetrically arranged on the two sides of cavity 101, and a plurality of opening and closing devices 3 are symmetrically arranged on the two sides of cavity 101 and are slidably arranged on translation sliding support device 2, that is, there is at least one opening and closing device 3 on each side, the number of opening and closing devices 3 on the two sides of cavity 101 is the same, the driving end of opening and closing device 3 is connected with cavity cover 102, opening and closing device 3 is used to drive cavity cover 102 to reciprocate relative to cavity 101 along the opening and closing direction, and opening and closing device 3 can reciprocate relative to cavity 101 along the translation direction on translation sliding support device 2, so as to drive cavity cover 102 in the opening and closing state to move along the translation direction, the movement of opening and closing device 3 along the translation direction can be realized manually or by an electric device, which is not limited herein, the opening and closing direction intersects with the translation direction, and in one specific embodiment, the opening and closing direction is perpendicular to the translation direction.

[0034] In actual application, when cavity cover 102 is opened, opening and closing device 3 acts, the driving end of opening and closing device 3 lifts cavity cover 102 in the opening and closing direction away from cavity 101, when the driving end of opening and closing device 3 moves to the position, opening and closing device 3 moves along the translation direction on translation sliding support device 2, so that cavity cover 102 moves to one side of cavity 101, until cavity cover 102 exposes the entire caliber of cavity 101, when cavity cover 102 is closed, opening and closing device 3 reversely moves along the translation direction on translation sliding support device 2, until cavity cover 102 is located directly above cavity 101, opening and closing device 3 acts, and the driving end of opening and closing device 3 drives cavity cover 102 to close along the opening and closing direction.

[0035] Compared with the prior art, the opening and closing mechanism provided by the embodiment of the application includes a plurality of opening and closing devices 3, and the opening and closing devices 3 are symmetrically arranged on the two sides of cavity 101 and cavity cover 102, which can ensure that cavity cover 102 is uniformly stressed on both sides during the opening and closing process, thereby avoiding the problem that one side of cavity cover 102 is lifted up, ensuring the sealing property of vacuum chamber 1, and simultaneously increasing the safety during the opening and closing process, the translation movement mode occupies small space, can improve the maintenance space, and is convenient for maintenance.

[0036] Further optimization of the above technical solutions, in an embodiment of the present application, in order to realize the automatic opening and closing of the cavity cover 102 and translation, the opening and closing mechanism further comprises a translation device, the translation device is used to drive the opening and closing device 3 to reciprocate on the translation sliding support device 2 in the translation direction. The translation device can be a piston cylinder, or the translation device is a linear motor, or the translation device includes a rotary motor and a transmission mechanism, the transmission mechanism is used to convert rotary motion into linear motion, the transmission mechanism includes but is not limited to gear rack mechanism, screw block mechanism, chain wheel and chain mechanism, cam link mechanism.

[0037] In a specific embodiment of the present application, the above-mentioned translation sliding support device 2 includes a translation support rod 201 and a stop limiting piece 202 arranged at both ends of the translation support rod 201, and the opening and closing device 3 is slidingly arranged on the translation support rod 201, and the stop limiting piece 202 is used to limit the opening and closing device 3 in the translation direction.

[0038] Further, in order to improve the stability of the cavity cover 102 during translation, the driving end of the opening and closing device 3 is connected with the cavity cover 102 through a connecting rod 4, and a telescopic support rod 5 is arranged between the connecting rod 4 and the translation support rod 201, and the telescopic support rod 5 is telescopic.

[0039] Specifically, in the above embodiment, the telescopic support rod 5 includes a sleeve part, a support rod part and an elastic member, the support rod part is arranged in the sleeve part in an axially reciprocating manner, and the elastic member is arranged between the sleeve part and the support rod part.

[0040] In the present case, the above-mentioned translation device includes a rotary motor, the translation support rod 201 and the opening and closing device 3 are threadedly connected to form a first screw pair, the telescopic support rod 5 and the translation support rod 201 are threadedly connected to form a second screw pair, the translation support rod 201 and the stop limiting piece 202 are rotatably connected, and the translation support rod 201 is arranged in the cavity 101 through the stop limiting pieces 202 at both ends, and the rotary motor is drivingly connected with the translation support rod 201.

[0041] Further optimization of the above technical solutions, the translation position detection device is arranged at both ends of the translation sliding support device 2, the controller of the opening and closing mechanism is respectively in communication connection with the translation position detection device and the translation device, and the controller is used to control the working state of the translation device according to the detection value of the translation position detection device.

[0042] To further improve the stability of the cavity cover 102 in the opening and closing process, the driving end of the opening and closing device 3 is connected to the first end of the cavity cover 102 in the translation direction, and a telescopic supporting member is further arranged between the cavity cover 102 and the cavity 101, the cavity cover 102 is provided with a sliding groove corresponding to the two sides of the translation sliding supporting device 2, the sliding groove extends to the second end of the cavity cover 102 along the translation direction, and the first end of the telescopic supporting member is connected to the cavity 101, and the second end of the telescopic supporting member is slidingly arranged in the sliding groove.

[0043] The application also provides a plasma etching system comprising the opening and closing mechanism as described in the above embodiments, and thus the technical effects of the plasma etching system please refer to the above embodiments.

[0044] It should be noted that each of the embodiments in the specification adopts a progressive manner for description, and each embodiment focuses on the difference from other embodiments, and the same or similar parts between the embodiments can be referred to each other.

[0045] The principle and implementation mode of the application are described by using specific examples, and the above embodiment is only used to help understand the core idea of the application. It should be pointed out that for ordinary skilled in the art, without departing from the principle of the application, the application can be improved and modified, and these improvements and modifications also fall within the protection scope of the claims of the application.

Claims

1. An opening and closing mechanism for a vacuum chamber (1), the vacuum chamber (1) comprising a cover (102) and a body (101), characterized in that, The opening and closing mechanism includes: Translational sliding support device (2), two translational sliding support devices (2) are symmetrically arranged on both sides of the cavity (101); Opening and closing device (3), a plurality of opening and closing devices (3) are symmetrically slidably disposed on the translational sliding support device (2) on both sides of the cavity (101). The driving end of the opening and closing device (3) is connected to the cavity cover (102). The opening and closing device (3) is used to drive the cavity cover (102) to reciprocate relative to the cavity (101) along the opening and closing direction. The opening and closing device (3) can reciprocate relative to the cavity (101) along the translational direction on the translational sliding support device (2). The opening and closing direction intersects with the translational direction.

2. The opening and closing mechanism according to claim 1, characterized in that, It also includes a translation device, which is used to drive the opening and closing device (3) to reciprocate along the translation direction on the translation sliding support device (2).

3. The opening and closing mechanism according to claim 2, characterized in that, The translation device is a piston cylinder, or the translation device is a linear motor, or the translation device includes a rotary motor and a transmission mechanism.

4. The opening and closing mechanism according to claim 2, characterized in that, The translational sliding support device (2) includes a translational support rod (201) and stop limiting members (202) disposed at both ends of the translational support rod (201). The opening and closing device (3) is slidably disposed on the translational support rod (201). The stop limiting members (202) are used to limit the opening and closing device (3) in the translational direction.

5. The opening and closing mechanism according to claim 4, characterized in that, The drive end of the opening and closing device (3) is connected to the cavity cover (102) via a connecting rod (4). A telescopic support rod (5) is provided between the connecting rod (4) and the translation support rod (201). The telescopic support rod (5) is telescopic.

6. The opening and closing mechanism according to claim 5, characterized in that, The telescopic support rod (5) includes a sleeve portion, a support rod portion and an elastic element. The support rod portion is axially reciprocating within the sleeve portion relative to the sleeve portion, and the elastic element is disposed between the sleeve portion and the support rod portion.

7. The opening and closing mechanism according to claim 5, characterized in that, The translation device includes a rotary motor. The translation support rod (201) and the opening and closing device (3) are threaded together to form a first lead screw pair. The telescopic support rod (5) and the translation support rod (201) are threaded together to form a second lead screw pair. The translation support rod (201) and the stop limiting member (202) are rotatably connected. The translation support rod (201) is set in the cavity (101) through the stop limiting members (202) at both ends. The rotary motor is connected to the translation support rod (201) in a transmission connection.

8. The opening and closing mechanism according to any one of claims 2-7, characterized in that, The translational sliding support device (2) is provided with translational position detection devices at both ends. The controller of the opening and closing mechanism is connected to the translational position detection device and the translational device in communication. The controller is used to control the working state of the translational device according to the detection value of the translational position detection device.

9. The opening and closing mechanism according to any one of claims 1-7, characterized in that, The driving end of the opening and closing device (3) is connected to the first end of the cavity cover (102) in the translation direction. A telescopic support member is also provided between the cavity cover (102) and the cavity (101). The cavity cover (102) is provided with sliding grooves on both sides corresponding to the translation sliding support device (2). The sliding grooves extend along the translation direction to the second end of the cavity cover (102). The first end of the telescopic support member is connected to the cavity (101), and the second end of the telescopic support member is slidably disposed in the sliding groove.

10. A plasma etching system, characterized in that, Includes the opening and closing mechanism as described in any one of claims 1-9.

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