Quartz wafer detector

Abstract

The utility model relates to a quartz wafer detector, and belongs to the technical field of wafer detection equipment, the quartz wafer detector comprises a detector body and a rotary table, one side of the rotary table is provided with a blocking edge and an air blowing pipe matched with defective products, the blocking edge is inserted and fixedly connected with a guide frame matched with the defective products, and the guide frame is fixedly connected with the rotary table. A feeding port facing the rotary table is formed in the side, close to the rotary table, of the guide frame, the lower side of the guide frame is fixedly connected with a mounting pipe communicated with the interior of the guide frame, the outer side of the lower end of the mounting pipe is sleeved with a bearing cylinder for bearing defective products, and a connecting assembly for connecting the bearing cylinder with the mounting pipe is arranged between the bearing cylinder and the mounting pipe. And a plugging plate for plugging the mounting pipe is rotationally connected into the mounting pipe. The method has the effect of reducing the adverse effect on the recovery rate of defective products.

Description

Technical Field

[0001] This application relates to the technical field of wafer inspection equipment, and in particular to a quartz wafer inspection instrument. Background Technology

[0002] Both natural and man-made quartz crystals are hexagonal pyramidal in shape and exhibit anisotropic physical properties. The various crystal wafers in a crystal oscillator are cut into square, rectangular, or circular slices at different angles to each axis; different cut wafers have different performance characteristics. After frequency division, quartz crystal wafers undergo visual inspection to remove defects such as chipped edges, bright spots, and surface contamination that affect the crystal's electrical performance.

[0003] Chinese Patent No. CN216484664U discloses a wafer appearance inspection instrument, including a machine base, a turntable, a vibrating feeding tray, a wafer appearance inspection mechanism, a feeding air blowing mechanism, a good product receiving mechanism, and a defective product receiving tray, all mounted on the machine base. The vibrating feeding tray, the wafer appearance inspection mechanism, and the feeding air blowing mechanism are sequentially arranged on the outside of the turntable. The good product receiving mechanism and the defective product receiving tray are positioned corresponding to the feeding air blowing mechanism. A thread feeder and a sensor camera are also provided on one side of the vibrating feeding tray. The sensor camera is aimed at the vibrating feeding tray and electrically connected to the thread feeder. A temperature and humidity sensor is provided in the center of the turntable, and a humidifier is also provided on the machine base. The humidifier is electrically connected to the temperature and humidity sensor.

[0004] In related technologies, the detector drives the defective products on the turntable to move towards the defective product receiving tray via an air blowing mechanism until the defective products detach from the turntable and fall into the defective product receiving tray. Since there is a height difference between the edge of the turntable and the upper side of the defective product receiving tray, it is easy for the wafer to fail to align with the defective product receiving tray when it detaches from the edge of the turntable and fall outside the defective product receiving tray, affecting the defective product recovery rate. Utility Model Content

[0005] To reduce the adverse impact on the defective product recovery rate, this application provides a quartz wafer inspection instrument.

[0006] The quartz wafer testing instrument provided in this application adopts the following technical solution:

[0007] A quartz wafer inspector includes an inspector body and a turntable. A retaining edge and an air blowing pipe adapted to defective products are installed on one side of the turntable. A guide frame adapted to defective products is inserted into and fixedly connected to the retaining edge. A feed port facing the turntable is opened on the side of the guide frame near the turntable. An installation tube communicating with the interior of the guide frame is fixedly connected to the lower side of the guide frame. A receiving cylinder for receiving defective products is sleeved on the outer side of the lower end of the installation tube. A connecting component connecting the receiving cylinder and the installation tube is provided. A sealing plate for sealing the installation tube is rotatably connected in the installation tube.

[0008] By adopting the above technical solution, the air blowing pipe blows air and drives the defective product to move towards the guide frame until the defective product enters the guide frame from the feed port and enters the receiving cylinder through the installation pipe. At this time, the connecting assembly connects the lower end of the installation pipe and the receiving cylinder, reducing the possibility of the defective product falling outside the receiving cylinder after leaving the guide frame, thus reducing the adverse impact on the defective product recovery rate. When the receiving cylinder needs to be replaced, the sealing plate is rotated to seal the installation pipe, which facilitates the disassembly and replacement of the receiving cylinder through the connecting assembly. At this time, the guide frame can still accommodate defective products, reducing the possibility of the detector body having to stop working when replacing the receiving cylinder, thus reducing the adverse impact on work efficiency.

[0009] Optionally, a drive shaft is inserted and fixedly connected to the middle of the sealing plate. Both ends of the drive shaft pass through the sidewall of the mounting tube and are rotatably connected to the mounting tube. Each end of the drive shaft is fixedly connected to a mounting plate with a diameter larger than the cross-sectional diameter of the drive shaft. Insertion slots adapted to the mounting plates are provided on both sides of the upper end of the receiving tube. The connecting assembly includes connecting blocks located on one side of the mounting plate and corresponding to each mounting plate. The connecting blocks face the corresponding mounting plate and are inserted into and slidably connected to the sidewall of the receiving tube. A spring is installed between the connecting block and the sidewall of the receiving tube. The connecting block can be completely inserted into the receiving tube. A fixing slot adapted to the connecting block is provided on the mounting plate. When the sealing plate rotates to open the mounting tube, the connecting block is inserted into the corresponding fixing slot. The mounting plate is provided with a fixing member to fix the relative position of the mounting plate and the mounting tube.

[0010] By adopting the above technical solution, the drive connecting block is fully inserted into the side wall of the receiving cylinder. At this time, the spring is compressed, and the drive receiving cylinder is sleeved on the outside of the lower end of the installation tube and moves towards the installation plate. The drive sealing plate rotates to open the installation tube until the installation plate is inserted into the insertion slot, and the connecting block is aligned with the insertion slot. The spring returns to its deformation and pushes the connecting block into the insertion slot. At this time, the installation plate and the installation tube are fixed by the fastener, thereby fixing the receiving cylinder and the installation tube. This reduces the possibility of defective products falling outside the receiving cylinder after detaching from the guide frame, and reduces the adverse impact on the defective product recovery rate.

[0011] Optionally, the end of the connecting block near the corresponding mounting plate is configured as an upward-sloping surface that is inclined away from the corresponding mounting plate, and the receiving cylinder is provided with an unlocking component that drives the connecting block to disengage from the corresponding mounting plate.

[0012] By adopting the above technical solution, the receiving cylinder is sleeved on the outside of the lower end of the installation tube and moves upward until the side wall of the installation plate abuts against the inclined surface of the connecting block. The receiving cylinder continues to move upward, at which point the installation plate presses the connecting block along the inclined surface until the connecting block can be fully inserted into the side wall of the receiving cylinder. The spring is compressed, driving the sealing plate to rotate to open the installation tube. The receiving cylinder continues to move upward until the connecting block is aligned with the insertion slot. The spring returns to its deformation and pushes the connecting block into the insertion slot, which facilitates fixing the installation plate and the receiving cylinder and improves work efficiency.

[0013] Optionally, the unlocking component includes an unlocking rod corresponding to the connecting block and located on the side of the connecting block away from the mounting tube. The end of the unlocking rod passes through the side wall of the receiving cylinder and is fixed to the end of the connecting block away from the corresponding mounting plate. The unlocking rod is slidably connected to the receiving cylinder in a direction close to or away from the mounting plate.

[0014] By adopting the above technical solution, when the connecting block moves and is inserted into the insertion slot, the unlocking rod moves with the connecting block towards the mounting plate. When it is necessary to remove the receiving tube, the unlocking rod is driven to move the connecting block away from the corresponding mounting plate until the end of the connecting block is disengaged from the insertion slot. At this time, the receiving tube is disengaged from the mounting plate, which facilitates the disassembly and installation of a new receiving tube and improves work efficiency.

[0015] Optionally, a torsion spring is installed between the mounting plate and the outer wall of the mounting tube to connect the two. One of the mounting plates is provided with a rotating component that drives the sealing plate to rotate. When the receiving cylinder is installed on the mounting tube, the sealing plate is parallel to the height direction of the mounting tube.

[0016] By adopting the above technical solution, when the receiving cylinder is sleeved on the installation pipe and installed, the sealing plate is driven to rotate and open the installation pipe by the rotating component. At this time, the torsion spring is compressed. When the receiving cylinder is disassembled, the torsion spring restores its deformation and drives the sealing plate to rotate and seal the installation pipe, reducing the possibility of defective products leaving the installation pipe and reducing the adverse impact on the defective product recovery rate.

[0017] Optionally, the rotating component includes a rotating rod with one end fixedly connected to the outer peripheral wall of one of the mounting plates. When the sealing plate blocks the mounting tube, the rotating rod is located on the lower side of the corresponding mounting plate and is inclined. The lower end of the rotating rod is lower than the lower side of the mounting plate, and the rotating rod can abut against the upper side wall of the receiving cylinder.

[0018] By adopting the above technical solution, when the receiving cylinder is sleeved on the outside of the lower end of the installation pipe and moves upward, the upper side wall of the receiving cylinder first abuts against the side wall of the rotating rod. As the receiving cylinder continues to move upward, the rotating rod, driven by the upper side wall of the receiving cylinder, drives the sealing plate to rotate through the drive shaft and opens the installation pipe, thereby improving work efficiency.

[0019] Optionally, the end of the rotating rod away from the corresponding mounting plate is configured as an arc.

[0020] By adopting the above technical solution, the shape of the end of the rotating rod makes it easy for the rotating rod to rotate under the drive of the receiving cylinder, reducing the possibility that the end of the rotating rod is pressed against the upper side wall of the receiving cylinder and difficult to rotate, and further facilitating the opening of the installation pipe by driving the sealing plate while installing the receiving cylinder, thereby improving work efficiency.

[0021] Optionally, the fixing member includes a fixing rod that passes through the rotating rod at one end and is slidably connected to the rotating rod. When the sealing plate opens the mounting tube, the fixing rod passes through the rotating rod and is inserted into the side wall of the mounting tube.

[0022] By adopting the above technical solution, the mounting plate rotates and opens the mounting tube. At this time, the torsion spring is compressed. Then, the end of the fixing rod passes through the rotating rod and is inserted into the side wall of the mounting tube, thereby fixing the sealing plate and then fixing the receiving cylinder, thus improving the installation efficiency.

[0023] In summary, this application includes at least one of the following beneficial technical effects:

[0024] 1. The air blowing pipe drives the defective product to move closer to the guide frame until the defective product enters the guide frame and then enters the receiving cylinder through the installation pipe. At this time, the connecting assembly connects the lower end of the installation pipe and the receiving cylinder, reducing the possibility that the defective product will fall outside the receiving cylinder after leaving the guide frame. When the receiving cylinder needs to be replaced, the sealing plate is rotated to seal the installation pipe. At this time, the guide frame can still accommodate the defective product, reducing the possibility that the detector body needs to stop working when replacing the receiving cylinder, thus reducing the adverse impact on work efficiency.

[0025] 2. The drive connecting block is fully inserted into the side wall of the receiving cylinder. At this time, the spring is compressed, and the drive receiving cylinder is sleeved on the outside of the lower end of the mounting tube and moves towards the mounting plate. The drive sealing plate rotates to open the mounting tube until the mounting plate is inserted into the insertion slot and the connecting block is aligned with the insertion slot. The spring returns to its deformation and pushes the connecting block into the insertion slot. At this time, the mounting plate and the mounting tube are fixed by the fastener, thereby fixing the receiving cylinder and the mounting tube, reducing the possibility of defective products falling outside the receiving cylinder after detaching from the guide frame.

[0026] 3. When the connecting block moves and is inserted into the insertion slot, the unlocking rod moves with the connecting block toward the mounting plate. When it is necessary to remove the receiving tube, drive the unlocking rod to move the connecting block away from the corresponding mounting plate until the end of the connecting block is disengaged from the insertion slot. At this time, the receiving tube is disengaged from the mounting plate, which facilitates the removal and installation of a new receiving tube and improves work efficiency. Attached Figure Description

[0027] Figure 1 This is a schematic diagram of the overall structure of the quartz wafer detector in the embodiments of this application.

[0028] Figure 2 This is a structural diagram illustrating the positional relationship between the mounting frame and the guide frame in an embodiment of this application.

[0029] Figure 3 This is a structural diagram illustrating the positional relationship between the sealing plate and the installation pipe in an embodiment of this application.

[0030] Figure 4 This is a structural diagram illustrating the positional relationship between the connecting components and the mounting plate in an embodiment of this application.

[0031] Explanation of reference numerals in the attached drawings: 1. Workbench; 11. Detector body; 2. Turntable; 21. Edge; 22. Mounting frame; 23. Fixing tube; 24. Receiving plate; 241. Receiving cylinder; 3. Guide frame; 31. Feed inlet; 32. Mounting tube; 4. Receiving cylinder; 41. Insertion groove; 42. Mounting groove; 43. Connecting hole; 5. Connecting assembly; 51. Connecting block; 52. Spring; 53. Unlocking rod; 54. Fixing rod; 6. Sealing plate; 61. Drive shaft; 62. Mounting plate; 621. Fixing groove; 622. Rotating rod; 63. Torsion spring. Detailed Implementation

[0032] The present application will be further described in detail below with reference to the accompanying drawings.

[0033] This application discloses a quartz wafer inspection instrument. (Refer to...) Figure 1 and Figure 2 A quartz wafer inspector includes a worktable 1 and an inspector body 11 on the worktable 1. A horizontal turntable 2 is rotatably connected to the worktable 1, and a motor (not shown in the figure) is installed on the worktable 1 to drive the turntable 2 to rotate. A vertical guard 21 is fixedly connected to the upper side of the worktable 1 on one side of the turntable 2, and the upper side of the guard 21 is higher than the upper side of the turntable 2. Two air blowing pipes (not shown in the figure) are installed on the guard 21, facing the guard 21, and the air blowing pipes correspond one-to-one with good and one-to-one with defective wafers.

[0034] A guide frame 3 corresponding to the defective product is inserted and fixedly connected to the baffle 21. The guide frame 3 has a feed port 31 on the side near the turntable 2, and a vertical mounting tube 32 is inserted and fixedly connected to the lower side of the guide frame 3. The mounting tube 32 communicates with the inside of the guide frame 3. An upward-opening receiving cylinder 4 is sleeved on the outer side of the lower end of the mounting tube 32. The inner wall of the receiving cylinder 4 abuts against the outer wall of the mounting tube 32. A connecting component 5 is provided between the mounting tube 32 and the receiving cylinder 4 to connect the two.

[0035] A mounting frame 22, identical in structure to the guide frame 3, is inserted into and fixedly connected to the flange 21. A fixed tube 23, communicating with the interior of the mounting frame 22, is inserted into and fixedly connected to the lower side of the mounting frame 22. A receiving plate 24, located below the fixed tube 23 and adapted to it, is rotatably connected to the upper side of the worktable 1. Multiple upward-opening receiving cylinders 241, evenly distributed around the circumference of the receiving plate 24 and aligned with the fixed tube 23, are fixedly connected to the receiving plate 24. Good products, driven by the corresponding blowing tube, pass through the mounting frame 22 and the fixed tube 23 and move into the receiving cylinder 241. When the receiving cylinder 241 directly opposite the fixed tube 23 is full of good products, the receiving plate 24 is rotated, driving the next receiving cylinder 241 to align with the fixed tube 23.

[0036] Reference Figure 3 and Figure 4 The mounting tube 32 is provided with a sealing plate 6 for sealing the mounting tube 32. A drive shaft 61 is inserted through and fixedly connected to the middle of the sealing plate 6. The ends of the drive shaft 61 all pass through the side wall of the mounting tube 32 and are rotatably connected to the side wall of the mounting tube 32. The ends of the drive shaft 61 are all fixedly connected to a vertical mounting plate 62 with a diameter larger than the cross-sectional diameter of the drive shaft 61. The ends of the drive shaft 61 are all sleeved with torsion springs 63. The ends of the torsion springs 63 that are close to each other are fixedly connected to the outer side wall of the mounting tube 32, and the ends of the torsion springs 63 that are far apart from each other are fixedly connected to the side wall of the mounting plate 62.

[0037] Both sides of the receiving tube 4 are provided with insertion slots 41 that are adapted to the mounting plate 62. When the receiving tube 4 is installed on the mounting pipe 32, the mounting plate 62 is inserted into the corresponding insertion slot 41. One of the mounting plates 62 is provided with a rotating part that drives the sealing plate 6 to rotate and a fixing part that fixes the sealing plate 6.

[0038] The air blowing pipe corresponding to the defective product blows air and drives the defective product to move towards the guide frame 3 until the defective product enters the guide frame 3 from the feed port 31 and enters the receiving cylinder 4 through the installation pipe 32. At this time, the connecting component 5 connects the lower end of the installation pipe 32 and the receiving cylinder 4 to reduce the possibility of the defective product falling outside the receiving cylinder 4 after leaving the guide frame 3. The fixing component fixes the sealing plate 6.

[0039] When the receiving cylinder 4 needs to be replaced, the drive rotating component rotates the mounting plate 62 and drives the sealing plate 6 to seal the mounting tube 32 through the drive shaft 61, reducing the possibility of defective products falling out of the mounting tube 32. At this time, the torsion spring 63 is not compressed, and the guide frame 3 can still accommodate defective products, reducing the possibility of the detector body 11 needing to stop working when replacing the receiving cylinder 4. When the receiving cylinder 4 is sleeved on the mounting tube 32 and installed, the rotating component drives the sealing plate 6 to rotate and open the mounting tube 32. At this time, the torsion spring 63 is compressed, which facilitates feeding material into the receiving cylinder 4.

[0040] Reference Figure 3 and Figure 4 The connecting assembly 5 includes two horizontal connecting blocks 51 located on one side of the receiving cylinder 4. The connecting blocks 51 are symmetrically arranged on both sides of the mounting plate 62 near the connecting blocks 51. The receiving cylinder 4 has mounting grooves 42 on the side near the connecting blocks 51, which correspond one-to-one with the connecting blocks 51 and communicate with the insertion grooves 41. The ends of the connecting blocks 51 that are far apart from each other are inserted into the corresponding mounting grooves 42 and are slidably connected to the receiving cylinder 4. The connecting blocks 51 can be completely inserted into the mounting grooves 42, and the ends of the connecting blocks 51 that are close to each other are set as inclined surfaces that are upward and inclined towards the side that is far apart from each other.

[0041] Each mounting slot 42 is equipped with a spring 52 facing the corresponding connecting block 51. The ends of the springs 52 that are close to each other are fixedly connected to the corresponding connecting block 51, and the other ends are fixedly connected to the side wall of the receiving cylinder 4. The mounting plate 62 near the connecting block 51 has a fixing slot 621 corresponding to each connecting block 51. When the sealing plate 6 is rotated to vertical and the mounting tube 32 is opened, the fixing slot 621 is directly opposite the corresponding connecting block 51, and the ends of the connecting blocks 51 that are close to each other are inserted into the corresponding fixing slot 621. The other side of the receiving cylinder 4 is fixed to another mounting plate 62 in the same way, and the receiving cylinder 4 is equipped with an unlocking mechanism that drives the connecting block 51 to disengage from the corresponding fixing slot 621.

[0042] In this embodiment, the unlocking component is configured as an unlocking rod 53 corresponding to each connecting block 51 and located on the side of the connecting block 51 away from the mounting tube 32. The unlocking rod 53 is horizontal and perpendicular to the length direction of the connecting block 51. One end of the unlocking rod 53 near the corresponding connecting block 51 passes through the side wall of the receiving cylinder 4 and is fixedly connected to the end of the connecting block 51 away from the corresponding mounting plate 62. The receiving cylinder 4 has a connecting hole 43 corresponding to the unlocking rod 53 and communicating with the mounting groove 42. The unlocking rod 53 is slidably connected to the receiving cylinder 4 along the length direction of the connecting hole 43.

[0043] The receiving tube 4 is sleeved on the outside of the lower end of the mounting tube 32 and moves upward until the side wall of the mounting plate 62 abuts against the inclined surface of the connecting block 51. The receiving tube 4 continues to move upward. At this time, the mounting plate 62 presses the connecting block 51 along the inclined surface until the connecting block 51 can be fully inserted into the side wall of the receiving tube 4. The unlocking rod 53 moves along the length direction of the connecting hole 43 with the connecting block 51. The spring 52 is compressed, driving the sealing plate 6 to rotate to open the mounting tube 32. The receiving tube 4 continues to move upward until the connecting block 51 is aligned with the insertion groove 41. The spring 52 returns to its deformation and pushes the connecting block 51 to be inserted into the insertion groove 41, which facilitates the fixing of the mounting plate 62 and the receiving tube 4.

[0044] When the receiving tube 4 needs to be removed, the drive unlocking rod 53 drives the connecting block 51 to move away from the corresponding mounting plate 62 until the end of the connecting block 51 disengages from the insertion slot 41. At this time, the receiving tube 4 is separated from the mounting plate 62, making it easy to disassemble and install a new receiving tube 4.

[0045] Reference Figure 3 The rotating component includes a rotating rod 622 fixedly connected to the peripheral wall of one of the mounting plates 62. When the sealing plate 6 is horizontal and seals the mounting tube 32, the end of the rotating rod 622 away from the corresponding mounting plate 62 is downward and tilted to the side away from the axis of the mounting plate 62. The lower end of the rotating rod 622 is arc-shaped, and the end of the rotating rod 622 away from the corresponding mounting plate 62 can abut against the upper side wall of the receiving cylinder 4.

[0046] The fastener includes a fixed rod 54, one end of which passes through the rotating rod 622 away from the corresponding mounting plate 62 and is slidably connected to the rotating rod 622. When the receiving tube 4 is installed on the mounting plate 62, the sealing plate 6 rotates to the vertical position and opens the mounting tube 32. At this time, the rotating rod 622 rotates with the mounting plate 62 to tilt upward, and the end of the fixed rod 54 can pass through the rotating rod 622 and be inserted into the side wall of the mounting tube 32.

[0047] When the receiving tube 4 is sleeved on the outside of the lower end of the installation tube 32 and moved upward, the upper side wall of the receiving tube 4 first abuts against the side wall of the rotating rod 622. As the receiving tube 4 continues to move upward, the rotating rod 622, driven by the upper side wall of the receiving tube 4, drives the sealing plate 6 to rotate through the drive shaft 61 and opens the installation tube 32. The end of the fixing rod 54 passes through the rotating rod 622 and is inserted into the side wall of the installation tube 32, thereby fixing the sealing plate 6 and then fixing the receiving tube 4.

[0048] The shape of the end of the rotating rod 622 makes it easy for the rotating rod 622 to rotate under the drive of the receiving cylinder 4, reducing the possibility that the end of the rotating rod 622 will be pressed against the upper side wall of the receiving cylinder 4 and thus difficult to rotate.

[0049] The implementation principle of a quartz wafer detector according to an embodiment of this application is as follows: Defective products enter the guide frame 3 from the feed inlet 31 and enter the receiving cylinder 4 through the mounting tube 32. At this time, the lower end of the mounting tube 32 is connected to the receiving cylinder 4, reducing the possibility that the defective products will fall outside the receiving cylinder 4 after leaving the guide frame 3. When the receiving cylinder 4 needs to be replaced, the driving sealing plate 6 blocks the mounting tube 32, reducing the possibility that the defective products will leave the mounting tube 32. The guide frame 3 can still accommodate defective products, reducing the possibility that the detector body 11 needs to stop working when replacing the receiving cylinder 4. When the receiving cylinder 4 is sleeved on the mounting tube 32 and installed, the sealing plate 6 rotates with the movement of the receiving cylinder 4 and opens the mounting tube 32, which facilitates the feeding of materials into the receiving cylinder 4.

[0050] The above are all preferred embodiments of this application, and are not intended to limit the scope of protection of this application. Therefore, all equivalent changes made in accordance with the structure, shape and principle of this application should be covered within the scope of protection of this application.

Claims

1. A quartz wafer testing instrument, characterized in that: The instrument includes a detector body (11) and a turntable (2). A baffle (21) and an air blowing pipe adapted to the defective product are installed on one side of the turntable (2). A guide frame (3) adapted to the defective product is inserted and fixedly connected to the baffle (21). A feed port (31) facing the turntable (2) is opened on the side of the guide frame (3) near the turntable (2). An installation tube (32) communicating with the inside of the guide frame (3) is fixedly connected to the lower side of the guide frame (3). A receiving cylinder (4) for receiving defective products is sleeved on the outer side of the lower end of the installation tube (32). A connecting component (5) connecting the two is provided between the receiving cylinder (4) and the installation tube (32). A sealing plate (6) for sealing the installation tube (32) is rotatably connected in the installation tube (32).

2. The quartz wafer detector according to claim 1, characterized in that: A drive shaft (61) is inserted and fixedly connected to the middle of the sealing plate (6). Both ends of the drive shaft (61) pass through the side wall of the mounting tube (32) and are rotatably connected to the mounting tube (32). The ends of the drive shaft (61) are fixedly connected to mounting plates (62) with a diameter larger than the cross-sectional diameter of the drive shaft (61). The upper ends of the receiving cylinder (4) are provided with insertion slots (41) that are adapted to the mounting plates (62). The connecting assembly (5) includes connecting blocks (51) located on one side of the mounting plate (62) and corresponding to the mounting plates (62). The connecting blocks (51) face the corresponding mounting plates (62). The mounting plate (62) is inserted into and slidably connected to the side wall of the receiving tube (4). A spring (52) is installed between the connecting block (51) and the side wall of the receiving tube (4). The connecting block (51) can be fully inserted into the receiving tube (4). The mounting plate (62) has a fixing groove (621) adapted to the connecting block (51). When the sealing plate (6) is rotated to open the mounting tube (32), the connecting block (51) is inserted into the corresponding fixing groove (621). The mounting plate (62) is provided with a fixing member to fix the relative position of the mounting plate (62) and the mounting tube (32).

3. A quartz wafer detector according to claim 2, characterized in that: The end of the connecting block (51) near the corresponding mounting plate (62) is provided with an inclined surface that is upward and away from the corresponding mounting plate (62), and the receiving cylinder (4) is provided with an unlocking component that drives the connecting block (51) to disengage from the corresponding mounting plate (62).

4. A quartz wafer detector according to claim 3, characterized in that: The unlocking component includes an unlocking rod (53) corresponding to the connecting block (51) and located on the side of the connecting block (51) away from the mounting tube (32). The end of the unlocking rod (53) passes through the side wall of the receiving cylinder (4) and is fixed to one end of the connecting block (51) away from the corresponding mounting plate (62). The unlocking rod (53) is slidably connected to the receiving cylinder (4) in a direction close to or away from the mounting plate (62).

5. A quartz wafer detector according to claim 4, characterized in that: A torsion spring (63) is installed between the mounting plate (62) and the outer wall of the mounting tube (32) to connect the two. One of the mounting plates (62) is provided with a rotating component that drives the sealing plate (6) to rotate. When the receiving cylinder (4) is installed on the mounting tube (32), the sealing plate (6) is parallel to the height direction of the mounting tube (32).

6. A quartz wafer detector according to claim 5, characterized in that: The rotating component includes a rotating rod (622) with one end fixedly connected to the outer peripheral wall of one of the mounting plates (62). When the sealing plate (6) seals the mounting tube (32), the rotating rod (622) is located on the lower side of the corresponding mounting plate (62) and is inclined. The height of the lower end of the rotating rod (622) is lower than the height of the lower side of the mounting plate (62). The rotating rod (622) can abut against the upper side wall of the receiving cylinder (4).

7. A quartz wafer detector according to claim 6, characterized in that: The end of the rotating rod (622) away from the corresponding mounting plate (62) is set as an arc.

8. A quartz wafer detector according to claim 7, characterized in that: The fixing component includes a fixing rod (54) that passes through the rotating rod (622) and is slidably connected to the rotating rod (622). When the sealing plate (6) opens the mounting tube (32), the fixing rod (54) passes through the rotating rod (622) and is inserted into the side wall of the mounting tube (32).

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