Developing device

Abstract

The utility model discloses a developing device. The developing device comprises an operation box; the liquid tank is arranged in the operation box and is used for placing a developing liquid; the power assembly is connected with a bearing part used for placing a to-be-processed chip, and the power assembly is at least used for driving the bearing part to move, so that the to-be-processed chip extends into or moves out of the liquid tank; the controller is arranged on the operation box, is in signal connection with the power assembly and is used for controlling movement of the bearing piece. According to the developing device, the difference of chip developing results caused by mechanical operation instead of manual operation can be realized, so that the developing process of irregular chips can be uniformly controlled, the precision is improved, and the error-tolerant rate is increased.

Description

Technical Field

[0001] This utility model relates to the field of chip developing technology, and more specifically, to a developing device. Background Technology

[0002] In the chip manufacturing process, post-photolithography development is a crucial step, which involves dissolving and removing the exposed photoresist to form the desired circuit pattern.

[0003] In related technologies, for irregularly shaped chips, operations such as wafer movement, immersion, spin coating, and painting are performed manually. This manual approach is prone to many uncertainties and is highly uncontrollable. For a series of irregularly shaped chips, manual operations can lead to differences in the development results of each chip, resulting in low development accuracy.

[0004] In summary, ensuring the consistency of development results for irregular chips is a problem that urgently needs to be solved by those skilled in the art. Utility Model Content

[0005] In view of this, the purpose of this utility model is to provide a developing device that can ensure the consistency of the developing results of irregular chips by mechanically controlling the chip developing process.

[0006] To achieve the above objectives, this utility model provides the following technical solution:

[0007] A developing apparatus, comprising:

[0008] Control box;

[0009] A liquid tank, located inside the operation box, is used to hold the developing solution;

[0010] A power assembly is connected to a carrier for placing a chip to be processed. The power assembly is at least used to move the carrier so that the chip to be processed extends into or is removed from the liquid tank.

[0011] A controller, located in the control box and signal-connected to the power assembly, is used to control the movement of the carrier.

[0012] Preferably, the operating box is equipped with a cleaner, the outlet of which is oriented toward the liquid tank for spraying cleaning fluid onto the chip to be processed, and the controller is connected to the cleaner to control its start and stop.

[0013] Preferably, the controller is located on the outside of the control box, and the controller is equipped with a display screen for at least displaying the movement path of the carrier.

[0014] Preferably, the power assembly includes a first power assembly that drives the carrier to move and a second power assembly that drives the carrier to rotate, wherein the first power assembly is connected to the second power assembly, and the output end of the second power assembly is connected to the carrier.

[0015] Preferably, the first power assembly includes at least one lead screw motor assembly for driving the carrier to move along the height direction of the liquid tank, so as to move the chip to be processed into or out of the liquid tank.

[0016] Preferably, the first power component includes:

[0017] X-axis lead screw assembly, two sets of the X-axis lead screw assembly are located at the bottom of the operation box, used to realize the movement of the bearing component along the width direction of the liquid tank;

[0018] Z-axis lead screw assembly, two sets of Z-axis lead screw assemblies are respectively movably connected to the two corresponding X-axis lead screw assemblies, used to realize the movement of the bearing member along the height direction of the liquid tank;

[0019] The Y-axis lead screw assembly is movably connected to the two sets of Z-axis lead screw assemblies to enable the movement of the carrier along the length of the liquid tank.

[0020] Preferably, each of the X-axis lead screw assemblies, each of the Z-axis lead screw assemblies, and each of the Y-axis lead screw assemblies corresponds to a drive motor, and the controller signal is connected to each of the drive motors.

[0021] Preferably, the Y-axis lead screw assembly is movably provided with a connecting member, and the connecting member is connected to the bearing member through the second power assembly.

[0022] Preferably, a limiting part is provided on the end face of the carrier away from the liquid tank, and the limiting part is used to restrict the movement of the chip to be processed.

[0023] Preferably, the control box has an opening, and the opening is connected to a door, which is used to close or open the opening.

[0024] The developing device provided by this utility model specifically includes an operation box, a liquid tank, a power component, and a controller. The liquid tank is located inside the operation box and is used to hold the developing solution. The chip to be processed is immersed in the developing solution for a certain period of time for development. The power component is connected to a carrier for placing the chip to be processed. The power component is used to drive the carrier to move, so that the chip to be processed on the carrier is moved into or removed from the liquid tank. The chip to be processed moving into the liquid tank corresponds to the chip's development process. The controller is connected to the power component to control the movement of the carrier. For different chips to be processed, the movement of the carrier is uniformly controlled by the controller to control the development process of the chip to be processed. Compared with manual labor, the efficiency is effectively improved, the labor intensity is reduced, the development process of different chips to be processed is consistent, the accuracy is increased, the fault tolerance is increased, and a high degree of operational consistency is achieved.

[0025] The beneficial effects of this utility model are as follows: by setting a controller to control the power component, the power component realizes the automated movement of the chip to be processed, so as to achieve a high degree of consistency in the development process of different chips to be processed and improve the accuracy of the development process control. Attached Figure Description

[0026] To more clearly illustrate the technical solutions in the embodiments of this utility model or the prior art, the drawings used in the description of the embodiments or the prior art will be briefly introduced below. Obviously, the drawings described below are only embodiments of this utility model. For those skilled in the art, other drawings can be obtained based on the provided drawings without creative effort.

[0027] Figure 1 This is a schematic diagram of the developing apparatus provided by this utility model;

[0028] Figure 2 This is a schematic diagram of the internal structure of the developing apparatus provided by this utility model.

[0029] Figure 3 for Figure 2 The front view.

[0030] Figures 1-3 In the accompanying drawings, the reference numerals include:

[0031] 01-Power Components;

[0032] 1-Control box; 2-Liquid tank; 3-Bearing component; 4-X-axis lead screw assembly; 5-Z-axis lead screw assembly; 6-Y-axis lead screw assembly; 7-Slide rail; 8-Second power assembly; 9-Connector; 10-Controller. Detailed Implementation

[0033] The technical solutions of the present utility model will be clearly and completely described below with reference to the accompanying drawings of the embodiments. Obviously, the described embodiments are only some embodiments of the present utility model, and not all embodiments. Based on the embodiments of the present utility model, all other embodiments obtained by those of ordinary skill in the art without creative effort are within the protection scope of the present utility model.

[0034] The core of this invention is to provide a developing apparatus that enables automated movement of the chips to be processed, achieves high consistency in the developing process of different chips, and improves the precision of the developing process control. The different chips to be processed can be chips of regular shapes, chips of irregular shapes, or chips of both regular and irregular shapes.

[0035] The developing apparatus provided by this invention is used for developing chips after photolithography. Specifically, developing after photolithography refers to dissolving and removing the exposed photoresist by chemically reacting it with a developing solution to form the desired circuit pattern.

[0036] Please refer to Figure 1 , Figure 2 The developing apparatus specifically includes an operating box 1, a liquid tank 2, a power unit, and a controller 10. The operating box 1 is a sealed enclosure that allows the reaction between the chip to be processed and the developing solution in the liquid tank 2 to occur within a relatively enclosed space. However, since the chip to be processed needs to be replaced, the operating box 1 needs to be easily opened and closed. In this case, to ensure the airtightness of the operating box 1, corrosion-resistant sealing materials can be used to seal the openings and gaps of the enclosure, ensuring the reliability of the developing operation. The chip to be processed here is the chip that needs to be developed; its specific shape is not limited and can be circular or irregular, etc.

[0037] The liquid tank 2 is located inside the operation box 1 and is used to hold the developer. The developer can be supplied manually or by a liquid pump, which is not limited.

[0038] Taking one specific implementation as an example, a liquid pump is installed inside the control box 1. The outlet of the liquid pump is connected to the inlet of the liquid tank 2 via a pipeline. The controller 10 can control the start and stop of the liquid pump according to the processing status of the chip to be processed. If the chip to be processed is still in the initial position, the liquid pump starts to supply developing solution to the liquid tank 2. After the liquid volume in the liquid tank 2 reaches a certain level, the liquid pump stops, and the developing solution supply process stops. At this time, the controller 10 can control the chip to be processed to move into the liquid tank 2 to carry out a chemical reaction and achieve the developing effect. After the chip to be processed finishes the reaction and is removed from the liquid tank 2, the developing is completed. The developing solution in the liquid tank 2 is discharged through the outlet of the liquid tank 2. After discharge, the controller 10 controls the liquid pump to supply developing solution to the liquid tank 2 to wait for the developing operation of the next chip to be processed.

[0039] In another specific implementation example, the operating box 1 is an openable and closable box. When the chip to be processed is in its initial position, the liquid tank is already replenished with developer for the reaction. During the actual developing operation, the controller 10 controls the chip to be processed to move into the liquid tank 2 to carry out the chemical reaction and achieve the developing effect. After the chip to be processed finishes the reaction and is removed from the liquid tank 2, the liquid tank 2 is manually removed from the operating box 1 to drain the used developer. Then, new developer is manually added to the liquid tank 2 to prepare for the developing operation of the next chip to be processed.

[0040] The replacement of the chip to be processed can be done manually or with the aid of automated equipment. Manual operation involves manually picking up the processed chip from the carrier 3 after it has undergone reaction, or manually placing the unreacted chip onto the carrier 3. Automated operation involves using robotic arms to move the chip into or out of the carrier 3, thus automating the replacement and retrieval of the chip.

[0041] To achieve automated movement of the chips to be processed and to control their standardized path, a power assembly is connected to the controller 10. This allows the power assembly to move at least one chip into or out of the liquid tank 2, making the movement process controllable and ensuring good consistency. Regardless of whether the chip is regularly shaped, the corresponding movement path is controlled by the controller 10, which controls the power assembly. This ensures good consistency. This method replaces manual operation with mechanized operation, allowing for controllable and visualized adjustment of operation parameters in the research and development or operation of irregular chips, improving accuracy and increasing fault tolerance.

[0042] In this embodiment, the power component is used at least to move the carrier 3, which can be a movement in one direction, two directions, or three directions. In addition to moving the carrier 3, the power component can also rotate the carrier 3 to ensure that the chip to be processed and the developing solution on the carrier 3 react fully and uniformly.

[0043] In this embodiment, the carrier 3 mainly serves to reliably place the chip to be processed without being corroded by the developing solution. Specifically, it can be connected to the chip to be processed reliably through snap-fit ​​or crimping, ensuring the reliable stability of the chip throughout the entire developing process. Specifically, crimping can be achieved by pressing it onto the surface of the chip to be processed using an elastic element, while snap-fit ​​connects to the edge of the chip to be processed through a snap-fit ​​groove.

[0044] In this embodiment, the controller 10 is not limited to either a wireless connection for remote control of the power component or a wired connection for control of the power component, as long as it meets the desired effect.

[0045] Based on the above embodiment, a cleaner is provided in the operation box 1. The outlet of the cleaner is set towards the liquid tank 2 and is used to spray cleaning liquid onto the chip to be processed. The controller 10 is connected to the cleaner to control its start and stop.

[0046] For the development process of the chip to be processed, the controller 10 controls the operation of the power unit to control the time the chip to be processed is immersed in the developer solution. After a certain time is reached, when the power unit operates to remove the chip to be processed from the liquid tank 2, in order to avoid further reaction with the developer solution remaining on the chip to be processed, the controller 10 needs to control the cleaner to spray cleaning solution onto the chip to be processed, so as to clean the chip to be processed and prevent the chemical residue from continuing to react excessively.

[0047] After the cleaning solution rinses the surface of the chip to be treated, it will fall into the liquid tank 2 and then be discharged through the outlet of the liquid tank 2.

[0048] In this embodiment, there is no restriction on whether the outlet of the cleaner is a spray type or a spray type, as long as it can ensure that the outlet of the cleaner is set relative to the liquid tank 2 and can deliver the cleaning liquid to the chip to be processed on the surface of the carrier 3 for cleaning.

[0049] It should be noted that the controller 10 is connected to the cleaner and the power unit. In fact, the controller 10 can control the working sequence and working time of the cleaner and the power unit according to certain working logic, so as to meet the automated control of the developing process of the chip to be processed.

[0050] Based on any of the above embodiments, the controller 10 is located on the outside of the operation box 1, and the controller 10 is provided with a display screen for at least displaying the movement path of the carrier 3.

[0051] The controller 10 does not occupy the internal space of the control box 1 and can be directly installed on the outer surface of the control box 1 so that the operator can observe the operation process.

[0052] The display screen on the controller 10 is mainly used by operators to understand which step of the entire developing process is underway and whether there are any abnormalities. If any abnormalities occur, relevant measures can be taken in a timely manner to avoid damage to the device.

[0053] In this embodiment, the control box 1 can also be configured as a visual box to further facilitate the operator's observation of the operation status.

[0054] Based on any of the above embodiments, the power assembly includes a first power assembly that drives the carrier 3 to move and a second power assembly 8 that drives the carrier 3 to rotate. The first power assembly is connected to the second power assembly 8, and the output end of the second power assembly 8 is connected to the carrier 3.

[0055] Please refer to Figure 2 The first power assembly enables the movement of the carrier 3. The movement can be in one, two, or multiple directions, with at least three directions. For example, three directions could be up, down, or left.

[0056] During the developing process, the controller 10 controls the operation of the first power unit to control the movement of the carrier 3, thereby enabling the chip to be processed on the carrier 3 to be moved into or out of the liquid tank 2.

[0057] The second power component 8 can move with the first power component and can realize the rotation of the carrier 3. Specifically, after the chip to be processed is inserted into the liquid tank 2, the second power component 8 operates to drive the chip to be processed to rotate in the liquid tank 2, so that the chip to be processed and the developing solution can fully react chemically and ensure the developing effect.

[0058] In this embodiment, the specific forms of the first power component and the second power component 8 are not limited, as long as they can achieve translational and rotational effects respectively. For example, a linear module, a ball screw motor, or a gear and rack structure can achieve translational motion, while a motor can achieve rotation.

[0059] Based on any of the above embodiments, the first power assembly includes at least one lead screw motor assembly for driving the carrier 3 to move along the height direction of the liquid tank 2, so as to move the chip to be processed into or out of the liquid tank 2.

[0060] The lead screw motor assembly is a structure that converts the rotational motion of a motor into linear motion. The motor drives the lead screw to rotate, and as the lead screw rotates, the nut slides on the threads of the lead screw to achieve linear motion, thus converting rotation into translation. Connecting the carrier 3 to the nut allows the carrier 3 to move relative to the liquid tank 2 in the height direction, enabling the chip to be processed to be moved into or removed from the liquid tank 2.

[0061] like Figure 2 and Figure 3 As shown, the Z-axis is the height direction of the liquid tank 2. To achieve the movement of the carrier plate in two directions, the forward and reverse rotation of the motor can be used.

[0062] In this embodiment, the initial position of the chip to be processed is directly above the liquid tank 2. It can be moved into or removed from the liquid tank 2 simply by moving it vertically.

[0063] Based on any of the above embodiments, the first power assembly includes: an X-axis lead screw assembly 4, two sets of X-axis lead screw assemblies 4 are fixedly disposed at the bottom of the operation box 1, for realizing the movement of the carrier 3 along the width direction of the liquid tank 2; a Z-axis lead screw assembly 5, two sets of Z-axis lead screw assemblies 5 are respectively movably connected to the corresponding two X-axis lead screw assemblies 4, for realizing the movement of the carrier 3 along the height direction of the liquid tank 2; and a Y-axis lead screw assembly 6, movably connected to the two sets of Z-axis lead screw assemblies 5, for realizing the movement of the carrier 3 along the length direction of the liquid tank 2.

[0064] The first power assembly specifically includes an X-axis lead screw assembly 4, a Y-axis lead screw assembly 6, and a Z-axis lead screw assembly 5, wherein the XYZ directions are as follows: Figure 2 and Figure 3 As shown.

[0065] In this embodiment, the chip to be processed is moved in multiple directions by the X-axis lead screw assembly 4, the Y-axis lead screw assembly 6, and the Z-axis lead screw assembly 5. In this case, the initial position of the chip to be processed is not limited to any area of ​​the operation box 1, and can be a corner or the middle area.

[0066] In this embodiment, both sets of X-axis lead screw assemblies 4 can be controlled by one motor or by two motors. Specifically, two motors control means that each lead screw assembly corresponds to one motor to ensure the accuracy of the movement of the load-bearing component 3.

[0067] In this embodiment, the X-axis lead screw assembly 4, the Y-axis lead screw assembly 6, and the Z-axis lead screw assembly 5 are essentially motor lead screw assemblies, and their specific operating principles will not be elaborated here.

[0068] In this embodiment, two sets of X-axis lead screw assemblies 4 and two sets of X-axis lead screw assemblies 4 can be symmetrically arranged on both sides of the liquid tank 2 to ensure better operational stability and reliability.

[0069] In this embodiment, each X-axis lead screw assembly 4, each Z-axis lead screw assembly 5, and each Y-axis lead screw assembly 6 can be equipped with a slide rail 7. The slide rail 7 further ensures the reliability of the nut's translation and the accuracy and reliability of the carrier 3's movement in three directions.

[0070] For example, please refer to one specific method. Figure 2 , Figure 3 Slides 7 are provided on the two inner walls of the control box 1 that are opposite to each other. The top of the Y-axis lead screw assembly 6 is slidably connected to the slide 7, and the bottom of the Y-axis lead screw assembly 6 is slidably connected to the X-axis lead screw assembly 4 to ensure the accuracy and reliability of the movement path of the bearing 3 along the X-axis direction.

[0071] Based on any of the above embodiments, each X-axis lead screw assembly 4, each Z-axis lead screw assembly 5, and each Y-axis lead screw assembly 6 corresponds to a drive motor, and the controller 10 is connected to each drive motor via a signal.

[0072] Please refer to Figure 2 and Figure 3 Based on the requirement for high precision in the movement control of the chip to be processed, two sets of X-axis lead screw assemblies 4 are moved synchronously by two drive motors respectively, so that the movement of the carrier 3 in the width direction of the liquid tank 2 has good control precision; two sets of Z-axis lead screw assemblies 5 are moved synchronously by two drive motors respectively, so that the movement of the carrier 3 in the height direction of the liquid tank 2 has good control precision.

[0073] The Z-axis lead screw assembly 5 is set between two Z-axis lead screw assemblies 5, and only one drive motor is required. The controller 10 controls each drive motor, that is, controls the movement process of the carrier 3.

[0074] Based on any of the above embodiments, a connecting member 9 is movably provided on the Y-axis lead screw assembly 6, and the Y-axis lead screw assembly 6 can drive the connecting member 9 to move along the length direction of the liquid tank 2 to realize the movement of the bearing member 3.

[0075] Please refer to Figure 3 A connector 9 is movably mounted on the Y-axis lead screw assembly 6. The connector 9 is essentially an adapter and is connected to the carrier 3 via the second power assembly 8. When the second power assembly 8 is in operation, the connector 9 remains stationary, while the second power assembly 8 rotates relative to the connector 9 to rotate the carrier 3, ensuring that the chip to be processed and the developer on the carrier 3 react fully and evenly.

[0076] The specific structure of connector 9 is not limited, as long as it avoids interference with the bearing 3, and its specific shape is not limited.

[0077] Based on any of the above embodiments, a limiting part is provided on the end face of the carrier 3 away from the liquid tank 2. The limiting part is used to restrict the movement of the chip to be processed. Specifically, the limiting part can be in the form of a limiting groove, and one, two or more can be provided. The specific depth can be designed according to the thickness of the chip to be processed, and no specific limitation is made here.

[0078] The limiting groove on the carrier 3 can limit one chip to be processed or two chips to be processed, and can be flexibly designed according to actual operation requirements.

[0079] Based on any of the above embodiments, the operation box 1 is provided with an opening, and the opening is connected to a door, which is used to close or open the opening.

[0080] In this embodiment, to ensure the overall airtightness of the control box 1, a sealing element can be provided on the opening or the door. When the opening and the door are sealed together, the sealing element can further seal the gap between them.

[0081] In this embodiment, the size of the opening can be adaptively set according to the specific working scenario, without any restrictions.

[0082] In this embodiment, the form of the openable connection can be achieved by means of hinges or pull-out sliding structures, etc., without specific limitations.

[0083] The control process of the developing apparatus in the above embodiments will be described in further detail below:

[0084] S1: The device is in the initialization state. Place multiple chips to be processed into the limiting slot on the carrier 3.

[0085] S2: When the controller 10 presses the start button, the X-axis lead screw assembly 4 moves according to the preset parameters and program, and sends the carrier 3 to the top of the liquid tank 2. Then, the Z-axis lead screw assembly 5 moves and moves the carrier 3 into the liquid tank 2. When the carrier 3 contacts the liquid surface, the second power assembly 8 operates and drives the chip to be processed on the carrier 3 to rotate below the chemical liquid surface at the set speed to carry out a full chemical reaction.

[0086] S3: After the predetermined development time is over, the Z-axis lead screw assembly 5 moves upward, and the rotation of the carrier 3 does not stop. When the carrier 3 leaves the liquid surface, the cleaner starts to work and sprays cleaning fluid onto the carrier 3 to start cleaning.

[0087] S4: After the scheduled cleaning time is over, the X-axis lead screw assembly 4 moves, and the carrier 3 stops rotating, sending the carrier 3 to its initial position; the operation logic ends, the chip to be processed after development is removed, and the device returns to standby mode.

[0088] The various embodiments in this specification are described in a progressive manner, with each embodiment focusing on the differences from other embodiments. The same or similar parts between the various embodiments can be referred to each other.

[0089] The developing apparatus provided by this utility model has been described in detail above. Specific examples have been used to illustrate the principle and implementation of this utility model. The descriptions of the embodiments above are only for the purpose of helping to understand the method and core idea of ​​this utility model. It should be noted that those skilled in the art can make various improvements and modifications to this utility model without departing from its principle, and these improvements and modifications also fall within the protection scope of the claims of this utility model.

Claims

1. A developing apparatus, characterized in that, include: Operation box (1); Liquid tank (2), located inside the operation box (1), is used to hold developing solution; A power assembly (01) is connected to a carrier (3) for placing a chip to be processed. The power assembly is at least used to drive the carrier (3) to move so that the chip to be processed extends into or is removed from the liquid tank (2). A controller (10), located in the operation box (1) and signal-connected to the power assembly (01), is used to control the movement of the carrier (3).

2. The developing apparatus according to claim 1, characterized in that, The operation box (1) is equipped with a cleaner, the outlet of which is directed toward the liquid tank (2) and is used to spray cleaning liquid onto the chip to be processed. The controller (10) is connected to the cleaner to control its start and stop.

3. The developing apparatus according to claim 2, characterized in that, The controller (10) is located on the outside of the operation box (1), and the controller (10) is provided with a display screen for displaying at least the movement path of the carrier (3).

4. The developing apparatus according to claim 1 or 2, characterized in that, The power assembly includes a first power assembly that moves the carrier (3) and a second power assembly (8) that rotates the carrier (3). The first power assembly is connected to the second power assembly (8), and the output end of the second power assembly (8) is connected to the carrier (3).

5. The developing apparatus according to claim 4, characterized in that, The first power assembly includes at least one lead screw motor assembly for driving the carrier (3) to move along the height direction of the liquid tank (2) to move the chip to be processed into or out of the liquid tank (2).

6. The developing apparatus according to claim 5, characterized in that, The first power assembly includes: X-axis lead screw assembly (4), two sets of the X-axis lead screw assembly (4) are located at the bottom of the operation box (1) to realize the movement of the bearing (3) along the width direction of the liquid tank (2); Z-axis lead screw assembly (5), the two sets of Z-axis lead screw assemblies (5) are respectively movably connected to the corresponding two X-axis lead screw assemblies (4) to realize the movement of the bearing (3) along the height direction of the liquid tank (2); The Y-axis lead screw assembly (6) is movably connected to the two sets of Z-axis lead screw assemblies (5) to enable the carrier (3) to move along the length direction of the liquid tank (2).

7. The developing apparatus according to claim 6, characterized in that, Each set of X-axis lead screw assembly (4), each set of Z-axis lead screw assembly (5), and each set of Y-axis lead screw assembly (6) corresponds to a drive motor, and the controller (10) is connected to each drive motor.

8. The developing apparatus according to claim 7, characterized in that, The Y-axis lead screw assembly (6) is movably provided with a connector (9), which is connected to the bearing (3) through the second power assembly (8).

9. The developing apparatus according to claim 1, characterized in that, The support member (3) has a limiting part on its end face away from the liquid tank (2), and the limiting part is used to restrict the movement of the chip to be processed.

10. The developing apparatus according to claim 1, characterized in that, The operation box (1) is provided with an opening, and the opening is connected to a door, which is used to close or open the opening.

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