Adjustable inductor structure for radio frequency matcher

Abstract

The utility model relates to an adjustable inductor structure for a radio frequency matcher. The adjustable inductor structure comprises an inductor unit and an adjusting unit, the inductor unit is a spirally-distributed air core inductor, and the adjusting unit is of a slip sheet adjusting structure. In the research and test process, compared with a vacuum adjustable capacitor, the cost is lower, the structure of the adjustable inductor avoids the repeated loading process aiming at different inductor demand values in the circuit test process, the controllability of the whole matching network is enhanced, different design demand ranges are met, and the working efficiency of practical application is improved.

Description

Technical Field

[0001] This utility model relates to the technical field of radio frequency matching devices, and in particular to an adjustable inductor structure for radio frequency matching devices. Background Technology

[0002] With the development of electronic technology, semiconductor manufacturing technology has received increasing attention. In semiconductor process equipment, radio frequency (RF) matching devices are used to achieve impedance matching between the RF power supply and the load cavity. The load impedance varies within a certain range due to factors such as operating time and the surrounding environment. Only by detecting changes in load impedance in real time and adjusting the parameters of the matching network can maximum transmission efficiency be achieved. Therefore, the research on automatic impedance matching devices is crucial.

[0003] Commonly used automatic impedance matching circuits employ adjustable vacuum capacitors and fixed inductors to form the matching network. Adjustable vacuum capacitors are relatively expensive. Furthermore, in actual operation, automatic impedance systems generate multiple parasitic capacitances and inductances, deviating from theoretical calculations. Therefore, the required fixed inductor in practical applications differs from the theoretical value. This necessitates the addition of different components to meet matching requirements in the field, making the process of adding and removing inductors quite cumbersome. This increases workload, reduces efficiency, and the changes in parasitic parameters caused by replacing different components further affect system stability.

[0004] In engineering applications, commonly used adjustable inductors are magnetic core inductors. Air-core inductors have lower self-inductance and are more sensitive to current changes, thus improving the sensitivity of automatic impedance matching systems. Iron-core inductors, on the other hand, have higher self-inductance and are relatively less sensitive to current changes. Air-core inductors can store and release energy more quickly, making them suitable for high-speed switching and fast-response applications. Iron-core inductors, due to the saturation and hysteresis effects of the magnetic core, store and release energy relatively slowly. In RF matching circuits, using magnetic core inductors has too significant an impact on the overall structure, hindering the adjustment of inductance values ​​during automatic impedance matching.

[0005] In view of the above-mentioned shortcomings, the designer actively researched and innovated in order to create an adjustable inductor structure for radio frequency matching devices, making it more valuable for industrial applications. Utility Model Content

[0006] To solve any of the above-mentioned technical problems, the purpose of this utility model is to provide an adjustable inductor structure for an RF matching unit.

[0007] To achieve the above objectives, the present invention adopts the following technical solution:

[0008] An adjustable inductor structure for an RF matching unit includes an inductor unit and an adjustment unit;

[0009] The inductor unit is a hollow inductor with a spiral distribution, and the adjustment unit is a slider adjustment structure;

[0010] A fixed base is provided on both the left and right sides of the air core inductor. Both sides of the air core inductor are mounted on the fixed base. A threaded shaft is provided on the inner side of the air core inductor along the left and right direction. Both sides of the threaded shaft are mounted on the fixed base through bearings.

[0011] The slider adjustment structure includes a shorting sub-shaft and a shorting female-shaft. The shorting sub-shaft at the bottom of the shorting female-shaft is connected to the threaded shaft. On the left and right sides of the slider fixing base plate at the top of the shorting female-shaft, there are edge sliders adapted to the air-core inductor.

[0012] As a further improvement of this utility model, both the left and right sides of the air-core inductor are mounted on the fixed base through fixing holes.

[0013] As a further improvement of this utility model, the air-core inductor is a copper bar inductor.

[0014] As a further improvement of this utility model, two edge-mounted sliders are respectively engaged on both sides of the air-core inductor.

[0015] As a further improvement of this utility model, the edge-mounted slider is rotatably mounted on the slider fixing base plate.

[0016] As a further improvement of this utility model, the edge-fitting slider is rotatably mounted on the slider fixing base plate via a rotating shaft.

[0017] By means of the above solution, this utility model has at least the following advantages:

[0018] 1. In the research and testing process, this utility model has a lower cost compared to vacuum adjustable capacitors. The adjustable inductor structure avoids the repeated loading process for different inductance values ​​during circuit testing, enhances the controllability of the overall matching network, meets different design requirements, and improves the work efficiency of practical applications.

[0019] 2. Air-core inductors constructed using copper bars have large inductance, small size, are easy to install, and have anti-magnetic shielding. They are suitable for high-power applications in RF matching circuits. Moreover, in space-constrained situations, using copper bars can achieve a larger cross-sectional area, reduce resistance, reduce copper losses, reduce skin effect, and enhance the overall stability of the matching circuit structure.

[0020] 3. The adjustable inductor structure uses a threaded shaft as a motor interface. The rotation of the threaded shaft controls the change of the sliding contact plate to achieve the purpose of adjusting the inductance. Using a motor to adjust the inductor makes it easy to assemble the adjustable inductor into an automatic impedance matching system to achieve different inductance values ​​as required, increasing the adjustability of the matching network.

[0021] The above description is only an overview of the technical solution of this utility model. In order to better understand the technical means of this utility model and to implement it in accordance with the contents of the specification, the following are the preferred embodiments of this utility model and are described in detail with reference to the accompanying drawings. Attached Figure Description

[0022] To more clearly illustrate the technical solutions of the embodiments of this utility model, the drawings used in the embodiments will be briefly introduced below. It should be understood that the following drawings only show some embodiments of this utility model and should not be regarded as a limitation on the scope. For those skilled in the art, other related drawings can be obtained based on these drawings without creative effort.

[0023] Figure 1 This is a schematic diagram of an adjustable inductor structure for an RF matching unit according to the present invention.

[0024] Figure 2 yes Figure 1 Side view;

[0025] Figure 3 yes Figure 1 A schematic diagram of the middle sliding plate structure.

[0026] The meanings of the labels in the figures are as follows.

[0027] 1. Fixed base; 2. Hollow inductor; 3. Threaded shaft; 4. Bearing; 5. Sliding adjustment structure; 6. Fixed hole position;

[0028] Shortening sub-shaft 51, edge-mounted slider 52, shorting female shaft 53, slider fixing base plate 54. Detailed Implementation

[0029] The specific embodiments of this utility model will be described in further detail below with reference to the accompanying drawings and examples. The following examples are used to illustrate this utility model, but are not intended to limit its scope.

[0030] To enable those skilled in the art to better understand the present invention, the technical solutions of the present invention will be clearly and completely described below with reference to the accompanying drawings of the embodiments of the present invention. Obviously, the described embodiments are only a part of the embodiments of the present invention, and not all of them. The components of the embodiments of the present invention described and shown in the accompanying drawings can generally be arranged and designed in various different configurations. Therefore, the following detailed description of the embodiments of the present invention provided in the accompanying drawings is not intended to limit the scope of the claimed invention, but merely to illustrate selected embodiments of the present invention. All other embodiments obtained by those skilled in the art based on the embodiments of the present invention without inventive effort are within the scope of protection of the present invention.

[0031] Example

[0032] like Figures 1-3 As shown,

[0033] An adjustable inductor structure for an RF matching unit includes an inductor unit and an adjustment unit. The purpose of this invention is to provide an adjustable inductor structure for an RF matching unit, which has the advantages of low cost, strong controllability, high efficiency, and good stability.

[0034] 1. The inductor unit is a hollow inductor with a spiral distribution. 2.

[0035] A mounting base 1 is provided on both the left and right sides of the air-core inductor 2. The air-core inductor 2 is mounted on the mounting base 1 on both sides via mounting holes 6. A threaded shaft 3 is provided along the left-right direction on the inner side of the air-core inductor 2. The threaded shaft 3 is mounted on the mounting base 1 on both sides via bearings 4. The air-core inductor 2 is a copper strip inductor.

[0036] 2. The adjustment unit is a slider adjustment structure 5:

[0037] The slider adjustment structure 5 includes a shorting sub-shaft 51 and a shorting female shaft 53. The shorting sub-shaft 51 at the bottom of the shorting female shaft 53 is connected to the threaded shaft 3. On the left and right sides of the slider fixing base plate 54 at the top of the shorting female shaft 53, there are edge-fitting sliders 52 adapted to the air-core inductor 2. Specifically, the two edge-fitting sliders 52 are respectively snapped onto both sides of the air-core inductor 2.

[0038] The edge-attaching slider 52 is rotatably mounted on the slider fixing base plate 54. Specifically, the edge-attaching slider 52 is rotatably mounted on the slider fixing base plate 54 via a rotating shaft.

[0039] To avoid the problem of repeated inductor removal during circuit debugging, an adjustable air-core inductor structure was designed and placed in the matching system. This structure adapts to changes in load impedance, meeting design requirements at a low cost. It eliminates the increased workload caused by adding and removing inductors in field applications. Furthermore, the adjustable inductor can be controlled by a motor, digitizing the overall structure. Compared to manual adjustments based on experience, the mechanically controlled inductor structure enhances work efficiency, maintains overall system stability, and maximizes power transmission through inductor adjustment.

[0040] Using the above technical solution, the overall structure is fixed using a fixed base 1, and the hollow inductor 2 is also fixed on the fixed base 1, which facilitates both fixation and connection of the output node. The center of the fixed base 1 is the mounting position of the bearing 4, and one end of the threaded shaft 3 extends out as a motor connection port, which facilitates the control of the overall inductor structure by the motor. The external motor structure can also drive the motor to change by connecting the control module. The control module can be controlled using a computer structure to realize the digital processing of the overall structure. The threaded shaft 3 is connected to the edge slider 52 through a shorting sub-shaft 51. As the threaded shaft 3 rotates, the edge slider 52 slides along the copper strip inductor inside the hollow inductor 2, adjusting the number of inductor turns in the circuit. The larger the number of turns, the larger the inductance value, realizing the adjustable structure of the inductor. One end of the adjustable inductor is connected to the inductor through the shorting sub-shaft 51 on the threaded shaft 3 and the edge slider 52 as the inductor port, and the other connection port is the connection position of the inductor on the fixed base 1. The maximum value of the overall adjustable inductor is the maximum value of the designed copper strip inductance, and the minimum value is the inductance when shorted in the circuit, similar to a connecting piece in the circuit, which has a tiny value when the circuit is working. This adjustable structure can be designed with different ranges of adjustable inductance to meet the diversity of design requirements and achieve adaptation to multiple scenarios.

[0041] The first embodiment of this utility model:

[0042] like Figures 1-2 As shown, the adjustable inductor structure includes two fixed bases 1, an air-core inductor 2 fixed to the bases, fixing holes 6 at both ends of a copper strip inductor, a threaded shaft 3, a bearing 4 for mounting the threaded shaft 3, and a slider adjustment structure 5 for adjusting the inductance. The fixed bases 1 are made of PTFE (polytetrafluoroethylene) and provide support for the overall adjustable inductor structure, ensuring that the inductor structure has no electrical connection to other components except for the connection port. The two ends of the air-core inductor 2 are fixed to the fixed bases 1 through the fixing holes 6. One fixing hole serves as the connection port for the overall adjustable inductor, and the other port is the threaded shaft 3. The slider adjustment structure 5, fixed to the threaded shaft, is connected to the air-core inductor 2. At this point, the inductance value is the inductance value between the position of the inductor connected to the slider adjustment structure 5 and the other external connection port.

[0043] like Figure 3 As shown, the slider adjustment structure 5 consists of a shorting sub-shaft 51 sleeved with the threaded shaft 3, an edge-mounted slider 52 in direct contact with the air-core inductor 2, an edge-mounted slider 52 for mounting the edge-mounted slider 52, and a shorting female shaft 53 connecting the slider fixing base plate 54 and the shorting sub-shaft 51.

[0044] During operation, the threaded shaft 3 is extended via a connector to serve as the input terminal of the inductor, connected to the circuit structure, and connected to an external motor to adjust the inductor. The threaded shaft 3 is connected to the entire slider adjustment structure 5 via a shorting sub-shaft 51, and directly connected to the hollow inductor 2 via a shorting female shaft 53 to the slider fixing base plate 54. The inductor position is fixed using the edge-mounted slider 52 to ensure that the slider adjustment structure 5 does not deviate from the inductor track position. The fixing hole 6 on the fixing base 1, which fixes the inductor, is connected to the circuit as the output port of the inductor via a connector. During operation, the motor is controlled by the control module, and the rotation of the motor controls the threaded shaft 3 of the adjustable inductor structure. The shorting sub-shaft 51 on the threaded shaft 3 rotates along the inductor via the thread, controlling the number of turns of the overall adjustable inductor connected to the circuit, adjusting the inductance value, and achieving the purpose of digitally adjusting the inductor.

[0045] In some testing applications, to reduce the complexity of the initial process, the threaded shaft connection port can be modified to a manual contact mode, allowing for inductance adjustment by manually rotating the threaded shaft. This mode is suitable for testing applications with various structures. After testing, a suitable fixed inductor can be used to fix the circuit structure, enabling testing in multiple scenarios and with multiple structures. This reduces the installation and calculation of digital control modules, but it lowers accuracy and efficiency compared to motor control, falling within the scope of coarse adjustments.

[0046] In the description of this utility model, it should be understood that the terms "center," "longitudinal," "lateral," "upper," "lower," "front," "rear," "left," "right," "vertical," "horizontal," "top," "bottom," "inner," and "outer," etc., indicating orientation or positional relationships, are based on the orientation or positional relationships shown in the accompanying drawings and are only for the convenience of describing this utility model and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation, and therefore should not be construed as a limitation of this utility model. Furthermore, the terms "first," "second," etc., are used for descriptive purposes only and should not be construed as indicating or implying relative importance or implying the number of indicated technical features. Thus, features defined with "first," "second," etc., may explicitly or implicitly include one or more of that feature. In the description of this utility model, unless otherwise stated, "a plurality of" means two or more.

[0047] In the description of this utility model, it should be noted that, unless otherwise explicitly specified and limited, the terms "installation," "connection," and "joining" should be interpreted broadly. For example, they can refer to a fixed connection, a detachable connection, or an integral connection; they can refer to a mechanical connection or an electrical connection; they can refer to a direct connection or an indirect connection through an intermediate medium; and they can refer to the internal connection of two components. Those skilled in the art can understand the specific meaning of the above terms in this utility model based on the specific circumstances.

[0048] The above description is only a preferred embodiment of the present utility model and is not intended to limit the present utility model. It should be noted that for those skilled in the art, several improvements and modifications can be made without departing from the technical principles of the present utility model, and these improvements and modifications should also be considered within the protection scope of the present utility model.

Claims

1. An adjustable inductor structure for an RF matching unit, comprising an inductor unit and an adjustment unit; Its features are: The inductor unit is a hollow inductor (2) with a spiral distribution, and the adjustment unit is a slider adjustment structure (5); Fixed bases (1) are provided on both the left and right sides of the hollow inductor (2). Both the left and right sides of the hollow inductor (2) are mounted on the fixed bases (1). A threaded shaft (3) is provided on the inner side of the hollow inductor (2) along the left and right direction. Both the left and right sides of the threaded shaft (3) are mounted on the fixed bases (1) through bearings (4). The slider adjustment structure (5) includes a shorting sub-shaft (51) and a shorting female shaft (53). The shorting sub-shaft (51) at the bottom of the shorting female shaft (53) is connected to the threaded shaft (3). On the left and right sides of the slider fixing base plate (54) at the top of the shorting female shaft (53), there are edge sliders (52) that are compatible with the air core inductor (2).

2. The adjustable inductor structure for an RF matching unit as described in claim 1, characterized in that, The air-core inductor (2) is mounted on the fixed base (1) on both the left and right sides through fixing holes (6).

3. The adjustable inductor structure for an RF matching unit as described in claim 1, characterized in that, The air-core inductor (2) is a copper strip inductor.

4. The adjustable inductor structure for an RF matching unit as described in claim 1, characterized in that, The two edge-mounted sliders (52) are respectively snapped onto both sides of the air-core inductor (2).

5. The adjustable inductor structure for an RF matching unit as described in claim 1, characterized in that, The edge-attaching slider (52) is rotatably mounted on the slider fixing base plate (54).

6. The adjustable inductor structure for an RF matching unit as described in claim 5, characterized in that, The edge-attaching slider (52) is rotatably mounted on the slider fixing base plate (54) via a rotating shaft.

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