Gas distribution and control device for multi-frequency plasma treatment

Abstract

The utility model discloses a gas distribution and control device for multi-frequency plasma treatment, which comprises a loading box body, an adaptive jacking cylinder is fixedly mounted in the middle of the bottom of the loading box body, and positioning threaded hole mounting blocks are symmetrically and fixedly mounted on the sides of the outside of the loading box body. An output transition gas guide pipe is fixedly installed in the middle of the upper end of the loading box body, an internal thread butt joint guide pipe is fixedly installed in the middle of the upper end of the interior of the loading box body, an alignment assembly gas tank is movably installed in the loading box body, and a gas supply output pump is fixedly connected to the upper end of the output transition gas guide pipe. The upper end of the air supply output pump is fixedly connected with an output bent pipe, the output transition air guide pipe communicates with the interior of the output bent pipe through the air supply output pump, and an air flow adjusting box is fixedly installed at the end of the output bent pipe. According to the assembly type gas tank butt joint structure, the gas tank can be replaced more conveniently and stably in the normal use work of the device through the adoption of the assembly type gas tank butt joint structure in a threaded butt joint mode.

Description

TECHNICAL FIELD

[0001] The utility model relates to gas distribution technical field, especially a kind of gas distribution and control device for multi-frequency plasma processing. BACKGROUND

[0002] Gas distribution is the important auxiliary operation indispensable in multi-frequency plasma processing operation, can be according to the specific use demand in working process to carry out gas supply conveying operation inside reaction chamber.

[0003] However, the gas distribution device for multi-frequency plasma processing operation in the prior art mostly only has simple gas conveying effect, and does not have corresponding structure support for conveying and distribution of different gases, and the docking and replacement operation of the gas tank is troublesome, which affects the overall use effect, and the overall is not equipped with corresponding adjusting structure, so it is difficult to properly adjust the gas volume of gas distribution in use, so that the overall use functionality is limited to a certain extent, thereby causing the overall comprehensive use performance to be affected to a certain extent.

[0004] Based on this, the utility model provides a kind of gas distribution and control device for multi-frequency plasma processing to solve the above problems. SUMMARY

[0005] The purpose of this part is to outline some aspects of the embodiments of the utility model and briefly introduce some preferred embodiments. In this part, as well as the abstract of the specification and the utility model name, some simplification or omission may be made to avoid obscuring the purpose of this part, the abstract of the specification and the utility model name, and such simplification or omission cannot be used to limit the scope of the utility model.

[0006] In view of the above and / or existing problems in the design of gas distribution device for multi-frequency plasma processing, the utility model is proposed.

[0007] Therefore, one purpose of the utility model is to provide a kind of gas distribution and control device for multi-frequency plasma processing, which is equipped with gas volume adjusting structure by adopting screw thread docking assembly type gas tank docking structure, so that the device is more convenient and stable for gas tank replacement operation in normal use, and the device can properly adjust the gas volume of gas conveying operation in plasma processing operation to realize the control effect of gas distribution time, which helps to improve the overall use efficiency, and effectively enriches the overall use functionality.

[0008] In order to achieve the above effects, the utility model provides the following technical scheme: a gas distribution and control device for multi-frequency plasma treatment, including loading box, the middle position of loading box bottom is fixedly installed with adaptive jacking cylinder, the side position of loading box outside is fixedly installed with positioning screw hole mounting block, the middle position of loading box upper end is fixedly installed with output transition gas guide pipe, the middle position of loading box inside upper end is fixedly installed with internal thread butt joint guide pipe, the inside of loading box is movably installed with alignment assembly gas tank, the upper end of output transition gas guide pipe is fixedly connected with gas supply output pump, the upper end of gas supply output pump is fixedly connected with output elbow, the inside of output transition gas guide pipe and output elbow is communicated through gas supply output pump, the end of output elbow is fixedly installed with gas volume adjusting box.

[0009] As a preferred scheme of the gas distribution and control device for multi-frequency plasma treatment, the utility model discloses a gas tank replacement box door is movably installed on the front of the loading box, the side position of the loading box outside and the gas tank replacement box door is movably installed with an associated hinge, the gas tank replacement box door is rotatable around the associated hinge as the rotation center on the outside of the loading box, and the side position of the front of the gas tank replacement box door is fixedly installed with an opening auxiliary handle.

[0010] By adopting the box door structure, the operation difficulty of the alignment assembly gas tank replacement operation in normal use is greatly simplified.

[0011] As a preferred scheme of the gas distribution and control device for multi-frequency plasma treatment, the utility model discloses that the output end of the adaptive jacking cylinder is fixedly installed with an anti-falling extrusion pad through the bottom of the loading box, the middle position of the upper end of the alignment assembly gas tank is provided with a threaded assembly interface, the alignment assembly gas tank is threadedly connected with the internal thread butt joint guide pipe through the threaded assembly interface, the internal thread specification of the internal thread butt joint guide pipe corresponds to the external thread specification of the threaded assembly interface, and the output transition gas guide pipe is communicated with the alignment assembly gas tank through the internal thread butt joint guide pipe.

[0012] By adopting the threaded butt joint structure, the assembly operation of the alignment assembly gas tank in the loading box is more rapid and stable, and the setting of the anti-falling extrusion pad can provide the reinforcement guarantee effect for the installation operation of the alignment assembly gas tank in the loading box.

[0013] As a preferred scheme of the gas distribution and control device for multi-frequency plasma treatment, the utility model discloses that the other side position of the gas volume adjusting box is fixedly connected with an output associated guide pipe, the gas volume adjusting box is a hollow box structure as a whole, and the inside of the output elbow and the output associated guide pipe is communicated through the gas volume adjusting box.

[0014] By additionally adding the gas amount adjusting box, the pipeline communication between the output elbow pipe and the output associated conduit is not affected, and the device also has the adjusting effect of the gas amount.

[0015] As a preferred scheme of the gas distribution and control device for multi-frequency plasma processing, an external maintenance cover plate is pre-set on the gas amount adjusting box, a gas amount adjusting cylinder is fixedly installed at the middle position of the upper end of the gas amount adjusting box, a gas amount adjusting pad is fixedly installed on the output end of the gas amount adjusting cylinder through the upper end of the gas amount adjusting box, the cross-sectional dimension of the gas amount adjusting pad can cover the cross-sectional dimension of the output elbow pipe and the output associated conduit, and the width dimension of the gas amount adjusting pad and the width dimension of the inside of the gas amount adjusting box are matched with each other.

[0016] By additionally adding the maintenance cover plate, the inside of the gas amount adjusting box can be regularly maintained in the long-term normal use of the device, and the service life of the device as a whole is prolonged.

[0017] As a preferred scheme of the gas distribution and control device for multi-frequency plasma processing, a butt joint hose is fixedly connected to the end of the output associated conduit, the inside of the butt joint hose and the inside of the output associated conduit are in communication with each other, and a gas output butt joint port is pre-set at the end of the butt joint hose.

[0018] By adopting the butt joint hose, the butt joint hose is stably butt jointed with any position of the gas inlet port according to the specific use demand in the actual application, and the use functionality of the device as a whole is enriched.

[0019] The device is more convenient and stable in the replacement of the gas tank in the normal use, is also provided with the gas amount adjusting structure, can appropriately adjust the gas amount in the gas delivery in the plasma processing, can control the gas distribution time, can improve the use efficiency, can effectively enrich the use functionality, can ensure the use stability of the gas tank after assembly through the setting of the anti-falling extrusion pad, can prevent the gas tank from falling and affecting the use effect, and can prolong the service life through the maintenance structure added to the gas amount adjusting structure. BRIEF DESCRIPTION OF DRAWINGS

[0020] In order to more clearly illustrate the technical scheme of the embodiments of the present application, the drawings needed to be used in the embodiment description will be briefly introduced as follows. Obviously, the drawings in the following description are only some embodiments of the present application, and for those skilled in the art, other drawings can be obtained without creative labor on the basis of these drawings. Among them:

[0021] Figure 1 It is a cover opening state structure schematic diagram of the present application.

[0022] Figure 2 It is a whole structure schematic diagram of the present application.

[0023] Figure 3 It is a front structure schematic diagram of the present application.

[0024] Figure 4 It is a front internal structure schematic diagram of the present application.

[0025] Figure 5 It is a side view structure schematic diagram of the present application.

[0026] Figure 6 It is a top view structure schematic diagram of the present application.

[0027] Figure 7 It is a gas tank thread butt joint structure schematic diagram of the present application.

[0028] The figure mark: 1, loading box; 2, gas tank replacement box door; 3, associated hinge; 4, adaptive jacking cylinder; 5, positioning threaded hole mounting block; 6, output transition guide pipe; 7, door opening auxiliary handle; 8, alignment assembly gas tank; 9, anti-falling extrusion pad; 10, internal thread butt joint guide pipe; 11, gas supply output pump; 12, output elbow; 13, gas volume regulating box; 14, gas volume regulating cylinder; 15, output associated guide pipe; 16, gas volume regulating pad; 17, butt joint hose; 18, threaded assembly interface; 19, maintenance cover plate; 20, gas supply output butt joint port. DETAILED DESCRIPTION

[0029] In order to make the above-mentioned purposes, features and advantages of the present application more apparent and easy to understand, the specific embodiments of the present application will be described in detail below with reference to the drawings of the specification.

[0030] In the following description, many specific details are set forth in order to provide a thorough understanding of the present application, but the present application can also be implemented in other ways different from those described herein, and those skilled in the art can make similar generalizations without departing from the connotation of the present application, therefore the present application is not limited by the specific implementation schemes disclosed below.

[0031] Second, the utility model in combination with the schematic diagram is described in detail, when the utility model implementation scheme is described in detail, for the convenience of explanation, the sectional view of the device structure will be partially enlarged without the general proportion, and the schematic diagram is only an example, which should not limit the range of the utility model protection here. In addition, the three-dimensional space size of length, width and depth should be included in actual production.

[0032] Please refer to Figures 1-7The utility model provides a technical scheme: a gas distribution and control device for multi -frequency plasma processing, including loading box 1, gas tank replacement box door 2, associated hinge 3, adapt to jacking air cylinder 4, positioning screw hole mounting block 5, output transition gas guide pipe 6, open door auxiliary handle 7, alignment assembly gas tank 8, prevent falling extrusion pad 9, internal thread butt joint guide pipe 10, gas supply output pump 11, output elbow 12, gas volume regulating box 13, gas volume regulating cylinder 14, output associated guide pipe 15, gas volume regulating pad 16, butt joint hose 17, threaded assembly interface 18, access cover 19 and gas supply output butt joint port 20, loading box 1, the middle position fixed mounting of loading box 1 bottom has adapted to jacking air cylinder 4, the edge side position symmetry fixed mounting of loading box 1 outside has positioning screw hole mounting block 5, the middle position fixed mounting of loading box 1 upper end has output transition gas guide pipe 6, the middle position fixed mounting of loading box 1 inside upper end has internal thread butt joint guide pipe 10, the inside movable mounting of loading box 1 has alignment assembly gas tank 8, the upper end fixed connection of output transition gas guide pipe 6 has gas supply output pump 11, the upper end fixed connection of gas supply output pump 11 has output elbow 12, and output transition gas guide pipe 6 and output elbow 12 inside pass through gas supply output pump 11 and communicate with each other, and the end of output elbow 12 is fixedly installed with gas volume regulating box 13, and the outside movable installation of loading box 1 has gas tank replacement box door 2, and the edge side position movable installation of loading box 1 outside and gas tank replacement box door 2 has associated hinge 3, and gas tank replacement box door 2 is in the outside of loading box 1 with associated hinge 3 as the center of rotation, and the edge side position fixed installation of gas tank replacement box door 2 outside front has open door auxiliary handle 7, and the output end of adapted to jacking air cylinder 4 passes through the fixed installation of loading box 1 bottom and has prevent falling extrusion pad 9, and the middle position of alignment assembly gas tank 8 upper end is provided with threaded assembly interface 18, and alignment assembly gas tank 8 is mutually screwed between threaded assembly interface 18 and internal thread butt joint guide pipe 10 through threaded assembly interface 18, and the inside thread specification of internal thread butt joint guide pipe 10 and the outside thread specification of threaded assembly interface 18 correspond with each other, and output transition gas guide pipe 6 communicates with each other between internal thread butt joint guide pipe 10 and alignment assembly gas tank 8 inside, and the other side position fixed connection of gas volume regulating box 13 has output associated guide pipe 15, and the whole of gas volume regulating box 13 is hollow box body structure, and output elbow 12 and output associated guide pipe 15 communicate with each other through gas volume regulating box 13 inside, and the outside of gas volume regulating box 13 is provided with access cover 19, and the middle position fixed installation of gas volume regulating box 13 upper end has gas volume regulating cylinder 14, and the output end of gas volume regulating cylinder 14 passes through the fixed installation of gas volume regulating box 13 upper end and has gas volume regulating pad 16, and the cross section size of gas volume regulating pad 16 can cover the cross section size of output elbow 12 and output associated guide pipe 15, and the width size of gas volume regulating pad 16 and the width size of gas volume regulating box 13 inside correspond with each other, and the end of output associated guide pipe 15 is fixedly connected with butt joint hose 17,The end of the docking hose 17 is provided with a gas output docking port 20 for intercommunication between the interior of the docking hose 17 and the interior of the output associated conduit 15.

[0033] By adopting the box door structure, the operation difficulty of the replacement operation of the alignment assembled gas tank 8 in the normal use is greatly simplified. By adopting the threaded docking structure, the assembly operation of the alignment assembled gas tank 8 in the loading box 1 is more stable and fast. The setting of the anti-falling extrusion pad 9 can provide the reinforcement guarantee effect for the installation operation of the alignment assembled gas tank 8 in the loading box 1. By additionally setting the gas amount adjusting box 13, the device also has the adjusting effect of the supplied gas amount, and the pipeline connectivity between the output elbow pipe 12 and the output associated conduit 15 is not affected. By additionally setting the maintenance cover plate 19, the device can regularly perform the component maintenance operation on the interior of the gas amount adjusting box 13 in the long-term normal use, which is beneficial to prolong the service life of the device as a whole. By adopting the docking hose 17, the device can be stably docked with any position of the gas inlet port according to the specific use demand in the actual application, which enriches the overall use functionality.

[0034] Working principle:

[0035] According to the actual use requirements in the specific use of plasma processing work can be equipped with load different gas alignment assembly gas tank 8 loading box 1, through the positioning screw hole installation block 5 corresponding positioning installation in the corresponding position outside the plasma processing equipment, and then through the docking hose 17 using gas output docking port 20 and the plasma processing equipment reaction chamber gas inlet port between stable associated docking, using the structure characteristics of associated hinge 3, by pulling the door auxiliary handle 7, open the gas tank replacement door 2, replace the alignment assembly gas tank 8 operation, the alignment assembly gas tank 8 from the internal thread on the interface 18 and the inner thread on the interface 10 between the thread connection, to realize the replacement of the alignment assembly gas tank 8, adapt to the lifting cylinder 4, gas output pump 11 and gas volume adjustment cylinder 14 are electrically connected between the plasma processing equipment control box, so that the plasma processing equipment control box can be set according to the system to adapt to the lifting cylinder 4, gas output pump 11 and gas volume adjustment cylinder 14 control operation in the normal plasma processing operation, by controlling the start of the adaptive lifting cylinder 4, can drive the anti falling extrusion pad 9 to the loading box 1 inside the stable assembly of alignment assembly gas tank 8 upward extrusion operation, to ensure the assembly stability of the alignment assembly gas tank 8 in the loading box 1, prevent the alignment assembly gas tank 8 only through the thread assembly interface 18 and the inner thread on the interface 10 between the alignment assembly of the thread connection structure in the normal use of the work will appear loose fall use case, by controlling the start of the gas output pump 11, can be assembled inside the gas tank 8 through the output transition guide tube 6 along the output elbow pipe 12 and output associated guide pipe 15 pipeline communication path from the docking hose 17 to the plasma processing equipment in the gas supply conveying operation, the docking hose 17 itself hose structure, so that the device and the plasma processing equipment between the docking operation is more convenient and stable, can adapt to the gas inlet port in the plasma processing equipment on each position of the opening structure, in the gas supply process, through the gas volume adjustment cylinder 14 can drive the gas volume adjustment pad 16 in the gas volume adjustment box 13 inside the appropriate adjustment of position, using the gas volume adjustment pad 16 between the output elbow pipe 12 and the output associated guide pipe 15 pipeline orifice plugging, to realize the whole gas volume adjustment operation, effectively enrich the overall use functionality, while the maintenance cover plate 19, so that the device in the long-term use of the work of the internal components of the gas volume adjustment box 13 regular inspection and repair work, is beneficial to prolong the overall service life of the device.

[0036] It should be noted that the above embodiments are only used to illustrate the technical solutions of the present application and are not limiting. Although the present application has been described in detail with reference to the preferred embodiments, it should be understood by those skilled in the art that the technical solutions of the present application can be modified or replaced equivalently without departing from the spirit and scope of the technical solutions of the present application, and they should be covered in the scope of the claims of the present application.

Claims

1. A gas distribution and control apparatus for multi-frequency plasma processing comprising a load chamber (1), characterized in that: The middle position of the bottom of the loading box (1) is fixedly installed with an adaptive jacking cylinder (4), the edge side position of the outside of the loading box (1) is symmetrically fixedly installed with a positioning threaded hole mounting block (5), the middle position of the upper end of the loading box (1) is fixedly installed with an output transition air pipe (6), the middle position of the inside upper end of the loading box (1) is fixedly installed with an internal thread butt joint pipe (10), the inside of the loading box (1) is movably installed with a positioning assembly gas tank (8), the upper end of the output transition air pipe (6) is fixedly connected with a gas supply output pump (11), the upper end of the gas supply output pump (11) is fixedly connected with an output elbow pipe (12), the inside of the output transition air pipe (6) and the output elbow pipe (12) are in communication with each other through the gas supply output pump (11), and the end of the output elbow pipe (12) is fixedly installed with a gas volume adjusting box (13).

2. The gas distribution and control apparatus for multi-frequency plasma processing of claim 1, wherein: The outside front of the loading box (1) is movably installed with a gas tank replacement box door (2), the edge side position of the outside of the loading box (1) and the gas tank replacement box door (2) is movably installed with an associated hinge (3), the gas tank replacement box door (2) is rotatable about the associated hinge (3) as the center on the outside of the loading box (1), and the edge side position of the outside front of the gas tank replacement box door (2) is fixedly installed with an opening door auxiliary handle (7).

3. The gas distribution and control apparatus for multi-frequency plasma processing of claim 2, wherein: The output end of the adaptive jacking cylinder (4) penetrates through the bottom of the loading box (1) and is fixedly installed with an anti-falling extrusion pad (9), the middle position of the upper end of the positioning assembly gas tank (8) is provided with a threaded assembly interface (18), the positioning assembly gas tank (8) is threadedly connected with the internal thread butt joint pipe (10) through the threaded assembly interface (18), the internal thread specification of the internal thread butt joint pipe (10) and the external thread specification of the threaded assembly interface (18) correspond to and match each other, and the inside of the output transition air pipe (6) is in communication with the positioning assembly gas tank (8) through the internal thread butt joint pipe (10).

4. The gas distribution and control apparatus for multi-frequency plasma processing of claim 3, wherein: The other side of the gas volume adjusting box (13) is fixedly connected with an output associated pipe (15), the gas volume adjusting box (13) is a hollow box structure as a whole, and the inside of the output elbow pipe (12) and the output associated pipe (15) are in communication with each other through the gas volume adjusting box (13).

5. The gas distribution and control apparatus for multi-frequency plasma processing of claim 4, wherein: The outside of the gas volume adjusting box (13) is provided with a maintenance cover plate (19), the middle position of the upper end of the gas volume adjusting box (13) is fixedly installed with a gas volume adjusting cylinder (14), the output end of the gas volume adjusting cylinder (14) penetrates through the upper end of the gas volume adjusting box (13) and is fixedly installed with a gas volume adjusting pad (16), the cross-sectional dimension of the gas volume adjusting pad (16) can cover the cross-sectional dimension of the output elbow pipe (12) and the output associated pipe (15), and the width dimension of the gas volume adjusting pad (16) and the width dimension of the inside of the gas volume adjusting box (13) correspond to and match each other.

6. The gas distribution and control apparatus for multi-frequency plasma processing of claim 5, wherein: The end of the output associated conduit (15) is fixedly connected with a docking hose (17), the inside of the docking hose (17) and the inside of the output associated conduit (15) are in communication with each other, and a gas output docking port (20) is preset at the end of the docking hose (17).

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