Flower basket and cleaning equipment

Abstract

According to the flower basket and the cleaning equipment, multiple layers of containing spaces are formed by the connecting rods and the fixing plates in the flower basket, and the loading capacity in the unit area can be remarkably improved; the fixing plate is provided with at least two groups of lifting hooks located on the adjacent edges, so that the flower basket can be lifted through the at least two groups of lifting hooks no matter the flower basket is in a vertical state or a lying state, and subsequent circulation is facilitated; and moreover, the flower basket is controlled to be in a vertical state in a non-slow lifting process and in a flat state in a slow lifting process, so that the pollution problem that the lower-layer accommodating space is polluted by residual liquid medicine in the upper-layer accommodating space in the groove type cleaning process is effectively avoided.

Description

[0001] The present application claims priority to the Chinese patent application No. 202420829329.8, filed on April 19, 2024, and entitled "A flower basket and cleaning equipment", the whole content of which is incorporated herein by reference. TECHNICAL FIELD

[0002] The present application relates to the technical field of photovoltaic production, in particular to a flower basket and cleaning equipment. BACKGROUND

[0003] In the production process of solar cells, silicon wafers, cell pieces and the like often need to be transferred between different tank cleaning equipment to realize surface micro-processing and cleaning. In the prior art, flower baskets are generally used for centralized loading and transfer to improve production efficiency.

[0004] When cleaning silicon wafers, cell pieces and the like, the flower baskets loaded with silicon wafers, cell pieces and the like need to be vertically arranged in the tank cleaning equipment in an array arrangement for subsequent transfer. The above situation makes the prior art improve the equipment capacity by arranging more flower baskets in the tank body, but also increases the equipment floor area. UTILITY MODEL CONTENT

[0005] The technical problem to be solved by the present application is to provide a flower basket and cleaning equipment to solve the problem that the existing flower basket cannot effectively balance the capacity and floor area of the tank cleaning equipment.

[0006] To solve the above problems, the present application is realized by the following technical scheme:

[0007] A flower basket, comprising two fixed plates and a plurality of connecting rods; the plurality of connecting rods are arranged between the two fixed plates and form a plurality of containing spaces with the fixed plates; at least two groups of hooks for pulling are arranged on the fixed plates, and the at least two groups of hooks are arranged on at least two adjacent edges of the fixed plates.

[0008] Optionally, the edge of the fixed plate is provided with a groove, and the wall surface of the groove is provided with the hook.

[0009] Optionally, the groove is provided with a liquid leakage hole.

[0010] Optionally, the containing space has a feeding port, the at least two groups of hooks for pulling include first hooks and second hooks, the first hooks are arranged on the first edge of the fixed plate close to the feeding port, and the second hooks are arranged on the top edge of the fixed plate.

[0011] Optionally, the containing space has a feeding port, the at least two groups of hooks for pulling include first hooks and second hooks, the first hooks are arranged on the first edge of the fixed plate close to the feeding port, and the second hooks are arranged on the top edge of the fixed plate.

[0012] Optionally, two first hooks are arranged on each of the first side edges, and two second hooks are arranged on each of the top edges, the distance between two adjacent first hooks being greater than the distance between two adjacent second hooks.

[0013] Optionally, the first hook and the second hook are arranged on different wall surfaces of the same groove.

[0014] Optionally, the flower basket further comprises a pressing rod, which is detachably mounted at the feeding port.

[0015] Optionally, the surface of each of the two fixing plates is symmetrically provided with a mounting port near the feeding port, and the pressing rod is inserted into the mounting port.

[0016] Optionally, the surface of each of the connecting rods is provided with a plurality of teeth, and the distribution range of the teeth accounts for 60% to 99% of the total length of the connecting rod.

[0017] Optionally, the distance between the teeth at the end of the connecting rod and the fixing plate accounts for 0.5% to 30% of the total length of the connecting rod.

[0018] Optionally, the surface of each of the connecting rods is provided with a plurality of equidistantly distributed flower basket teeth.

[0019] Optionally, the region of the fixing plate where each of the containing spaces is located is provided with a positioning hole.

[0020] Optionally, the connecting rod comprises an inner rod and a coating layer wrapped on the surface of the inner rod, and the inner rod is provided with a first weight-reducing hole along the axial direction.

[0021] Optionally, the material of the inner rod is glass fiber, and the material of the coating layer is polyvinylidene fluoride.

[0022] Optionally, the fixing plate is provided with a positioning hole and / or a second weight-reducing hole.

[0023] Optionally, the positioning hole and / or the second weight-reducing hole is provided with a liquid leakage hole.

[0024] Optionally, the bottom edge and the second side edge opposite to the feeding port of the fixing plate are further provided with a second clamping groove, and the second clamping groove is used for clamping the fixing plate by a clamping mechanism.

[0025] A cleaning device comprises a cleaning tank and a turnover mechanism; the turnover mechanism is arranged in the cleaning tank and is used for carrying the flower basket and driving the flower basket to turn over.

[0026] Optionally, the cleaning device comprises a plurality of the turnover mechanisms and a translation mechanism, each of the turnover mechanisms is arranged in the cleaning tank in a spaced manner, and the translation mechanism is used for driving the turnover mechanisms to move laterally; the turnover mechanisms are arranged on the translation mechanism.

[0027] Compared with the prior art, the present application has the following advantages:

[0028] The wet tank cleaning flower basket in the present application comprises two fixed plates and a plurality of connecting rods; the plurality of connecting rods are arranged between the two fixed plates and form a plurality of layers of accommodation spaces with the fixed plates; at least two groups of hooks for lifting are arranged on the fixed plates, and the at least two groups of hooks are arranged on at least two adjacent edges of the fixed plates; wherein, the plurality of layers of accommodation spaces are formed by the connecting rods and the fixed plates, which can significantly improve the loading capacity per unit area; and the at least two groups of hooks for lifting arranged on the adjacent edges of the fixed plates can lift the flower basket through the at least two groups of hooks for lifting, regardless of whether the flower basket is in a vertical state or a horizontal state, which is convenient for subsequent circulation, and by controlling the flower basket to be in the vertical state in the non-slow lifting process and to be in the horizontal state in the slow lifting process, the pollution problem that the residual drug solution in the upper accommodation space pollutes the lower accommodation space during the tank cleaning process is effectively avoided.

[0029] It should be understood that the above general description and the following detailed description are only exemplary and explanatory, and cannot limit the present application. BRIEF DESCRIPTION OF DRAWINGS

[0030] Figure 1 The first angle schematic view of the flower basket provided by the first embodiment of the present application;

[0031] Figure 2 The second angle schematic view of the flower basket provided by the first embodiment of the present application;

[0032] Figure 3 The third angle schematic view of the flower basket provided by the first embodiment of the present application;

[0033] Figure 4 The fourth angle schematic view of the flower basket provided by the first embodiment of the present application;

[0034] Figure 5 The first angle schematic view of the flower basket provided by the second embodiment of the present application;

[0035] Figure 6 The second angle schematic view of the flower basket provided by the second embodiment of the present application;

[0036] Figure 7 The third angle schematic view of the flower basket provided by the second embodiment of the present application;

[0037] Figure 8 A fourth angle view of the flower basket according to the second embodiment of the present application;

[0038] Figure 9 A cross-sectional view of the flower basket according to the second embodiment of the present application;

[0039] Figure 10 A cross-sectional view of the connecting rod according to the first embodiment of the present application;

[0040] Figure 11 A schematic view of the tooth according to the embodiment of the present application;

[0041] Figure 12 A cross-sectional view of the connecting rod according to the second embodiment of the present application;

[0042] Figure 13 A first angle view of the flower basket when placed in the vertical state by the cleaning device according to the embodiment of the present application;

[0043] Figure 14 A second angle view of the flower basket when placed in the vertical state by the cleaning device according to the embodiment of the present application;

[0044] Figure 15 A first angle view of the flower basket when placed in the horizontal state by the cleaning device according to the embodiment of the present application;

[0045] Figure 16 A second angle view of the flower basket when placed in the horizontal state by the cleaning device according to the embodiment of the present application. DETAILED DESCRIPTION

[0046] The technical solutions in the embodiments of the present application will be described clearly and completely below with reference to the drawings in the embodiments of the present application. Obviously, the described embodiments are only some of the embodiments of the present application, rather than all the embodiments of the present application. Based on the embodiments in the present application, all the other embodiments obtained by those of ordinary skill in the art without creative work fall within the scope of protection of the present application.

[0047] It should be understood that the "one embodiment" or "an embodiment" mentioned throughout the specification means that the specific features, structures or characteristics related to the embodiment are included in at least one embodiment of the present application. Therefore, "in one embodiment" or "in an embodiment" appearing throughout the specification does not necessarily mean the same embodiment. In addition, these specific features, structures or characteristics can be combined in one or more embodiments in any suitable manner.

[0048] In the production process of solar cells, silicon wafers, cell wafers and the like often need to be transferred in different processes. For example, after the finished product is cut and delaminated, the silicon wafers need to be transported to the wafer insertion and cleaning process for wet cleaning and slow pulling treatment. During the cleaning and transportation process, the silicon wafers are generally loaded and transferred by flower baskets, and the flower baskets loaded with silicon wafers need to be arranged in an array and erected in the slot cleaning equipment, so as to facilitate subsequent transfer. The above situation makes the prior art need to increase the capacity of the equipment by arranging more flower baskets in the tank body, but also increases the equipment footprint.

[0049] To solve the above problems, the flower basket 10 provided by the embodiments of the present application includes two fixed plates 11 and a plurality of connecting rods 12, as shown in the drawings. Figures 1-9 The plurality of connecting rods 12 are arranged between the two fixed plates 11 and form a plurality of containing spaces 20 with the fixed plates 11. The fixed plate 11 is provided with at least two groups of hooks 13 for pulling, and the at least two groups of hooks 13 are arranged on at least two adjacent edges 111 of the fixed plate 11.

[0050] In the embodiments of the present application, the flower basket 10 described above can be used to carry wafer materials such as silicon wafers and cell wafers, i.e., it can be a silicon wafer flower basket, a cell wafer flower basket, etc.

[0051] The following will be described with the silicon wafer flower basket as an example.

[0052] Among them, a plurality of connecting rods 12 are connected between two fixed plates 11 and form a plurality of containing spaces 20 for placing silicon wafers with the fixed plates 11, because each containing space 20 can place silicon wafers, so the design of the plurality of containing spaces 20 makes the flower basket 10 described above can place multiple layers of silicon wafers, which can significantly improve the loading capacity of silicon wafers per unit area of the flower basket.

[0053] Among them, at least two groups of hooks 13 for pulling are arranged on the adjacent edges 111 of the fixed plate 11, so that the flower basket 10 can be pulled by the at least two groups of hooks 13 for pulling regardless of whether it is in an upright state or a lying state, facilitating subsequent transfer, and by controlling the flower basket 10 to be in an upright state in a non-slow pulling process and in a lying state in a slow pulling process, the pollution problem of the upper containing space in the slot cleaning process is effectively avoided.

[0054] Optionally, at least two groups of hooks 13 for pulling can be arranged on the adjacent edges 111 of the two fixed plates 11 symmetrically to each other, which is convenient for processing and installation, and also facilitates positioning and pulling.

[0055] It can be understood that, in the embodiments of the present application, the flower basket 10 is in an upright state, and the multi-layer containing space 20 is in a stacked state from top to bottom; and in a lying state, the multi-layer containing space 20 is in a horizontally stacked state side by side. Among them, the fixed plate 11 is in a vertical state in the above two states; and when loading the silicon wafer, that is, when inserting the silicon wafer, the fixed plate 11 of the flower basket 10 should be placed in a horizontal state to facilitate the insertion operation.

[0056] It should be noted that, in the embodiments of the present application, the top edge 113, the side edge or the bottom edge 114 is based on the top edge 113, the side edge or the bottom edge 114 in the upright state of the flower basket 10.

[0057] Optionally, in an embodiment, the edge of the fixed plate 11 is provided with a groove 14, and the wall surface of the groove 14 is provided with the hook 13, that is, the hook 13 is formed by the edge of the fixed plate 11. The recess avoids the occupation of external space by the flower basket 10, and also reduces the collision of the hook 13 with the outside world, thereby improving the service life of the hook 13.

[0058] Optionally, in an embodiment, the groove is provided with a liquid leakage hole 25 to better realize the drainage function.

[0059] In the embodiments of the present application, the fixed plate 11 as a whole can be rectangular, which is convenient for processing and forming, and also makes the containing space 20 formed by the fixed plate 11 and the connecting rod 12 into a cuboid, thereby facilitating the automatic taking and placing of silicon wafers.

[0060] Optionally, in an embodiment, the containing space 20 has a feeding port for taking and placing silicon wafers, and the at least two groups of hooks 13 for lifting include first hooks 131 and second hooks 132, the first hooks 131 are arranged on the first side edge 112 of the fixed plate 11 close to the feeding port, and the second hooks 132 are arranged on the top edge 113 of the fixed plate 11. By arranging the first hooks 131 on the first side edge 112 close to the feeding port, the flower basket 10 can be lifted when it is in a lying state, and the second hooks 132 arranged on the top edge 113 of the fixed plate 11 can be lifted when the flower basket 10 is in an upright state.

[0061] Among them, one or more first hooks 131 can be arranged on each of the first side edges 112, and one or more second hooks 132 can be arranged on each of the top edges 113.

[0062] Optionally, in one embodiment, two first hooks 131 are arranged on each first side edge 112, and two second hooks 132 are arranged on each top edge 113. The distance between two adjacent first hooks 131 is greater than the distance between two adjacent second hooks 132. Since the fixing plate 11 has a rectangular structure with a height greater than a width, the distance between the first hooks 131 arranged on the first side edge 112 is greater than the distance between the second hooks 132 arranged on the top edge 113, which can improve the balance of the flower basket 10 when it is pulled in a flat state.

[0063] Optionally, in one embodiment, the adjacent first hook 131 and the second hook 132 are arranged on different wall surfaces of the same groove 14 arranged at a corner of the fixing plate 11, that is, the adjacent first hook 131 and the second hook 132 are formed by the same corner of the fixing plate 11. This can reduce the number of grooves 14 and ensure the structural strength of the fixing plate 11.

[0064] Optionally, the flower basket 10 provided by the embodiment of the application further includes a pressing rod 15 which is detachably installed at the feeding port. When it is necessary to take and place a silicon wafer, the pressing rod 15 is removed, so that the feeding port is opened to place the silicon wafer. After the silicon wafer is placed, the pressing rod 15 is installed at the feeding port, so that the feeding port is closed, thereby avoiding the silicon wafer from being displaced upward and drifting out due to the liquid buoyancy in the cleaning equipment when the flower basket 10 is turned to a flat state.

[0065] Optionally, in one embodiment, the surfaces of the two fixing plates 11 are symmetrically provided with mounting ports 16 near the feeding port, and the pressing rod 15 is inserted into the mounting port 16. In this embodiment, after the end of the pressing rod 15 is inserted into the mounting port 16, the pressing rod 15 is installed at the feeding port. Then

[0066] When the end of the pressing rod 15 is pulled out of the mounting port 16, the pressing rod 15 can be detached from the feeding port.

[0067] The mounting port 16 can be a pit, a through hole or a bayonet, and the end of the pressing rod 15 is adapted to the mounting port 16.

[0068] Optionally, the two ends of the pressing rod 15 are provided with convex shafts 151 which are matched with the stepped mounting port 16.

[0069] Optionally, in one embodiment, the mounting port 16 includes a first clamping groove arranged on the first side edge 112, and the two ends of the pressing rod 15 are clamped in the first clamping groove. In this embodiment, the first clamping groove which is a semi-open bayonet is used as the mounting port 16, and the two ends of the pressing rod 15 are fixed by clamping, so that the pressing rod 15 can be quickly installed at the feeding port.

[0070] Optionally, in another specific embodiment, the mounting hole 16 is arranged on the opposite side of the two fixing plates 11, the pressing rod 15 is a telescopic rod, and the pressing rod 15 is inserted into the mounting hole 16 in a compressed state. In this specific embodiment, the mounting hole 16 is a recess arranged on the opposite side of the two fixing plates 11, which can be circular, square or other shapes. The telescopic pressing rod 15 is inserted into the mounting hole 16 by the plug-in mode, so that the pressing rod 15 can be quickly installed at the feeding port. Optionally, the mounting hole 16 is a stepped mounting hole 16, and the two ends of the pressing rod 15 are provided with convex shafts 151 which are matched with the stepped mounting hole 16.

[0071] In the embodiment of the application, the adjacent two layers of accommodation spaces 20 can share a plurality of connecting rods 12, that is, the connecting rod 12 in the middle part is both the bottom of the upper layer of accommodation spaces 20 and the top of the lower layer of accommodation spaces 20, which not only effectively saves the amount of connecting rods 12, but also reduces the occupation of the connecting rod 12 itself to the accommodation space 20.

[0072] Optionally, in the flower basket 10 provided in the embodiment of the application, the surface of each connecting rod 12 is provided with a plurality of flower basket teeth L, and the plurality of teeth L can be equidistantly or unequidistantly distributed, and the teeth L can be sharp teeth or blunt teeth, which are convenient for the insertion of the silicon wafer on the flower basket. The spacing of the teeth L is matched with the thickness of the silicon wafer.

[0073] In the embodiment of the application, the plurality of connecting rods 12 can be provided with teeth L on one side or both sides.

[0074] Optionally, in one embodiment, the adjacent two layers of accommodation spaces 20 can share a plurality of connecting rods 12, and the upper and lower surfaces of the connecting rods 12 are provided with teeth L.

[0075] Optionally, as shown in Figures 10-11

[0076] The teeth L are axially left-right symmetrical and upper-lower asymmetrical, or axially left-right asymmetrical and upper-lower symmetrical, in the shape of a triangular pyramid, a quadrangular pyramid, a triangular prism, a quadrangular prism, a shark fin, etc., which not only facilitates the guiding effect when the silicon wafer is installed, but also increases the strength of the tooth root, so that when the silicon wafer 70 is clamped between the adjacent teeth, the edge is in contact with the silicon wafer, which is beneficial to the circulation of liquid between the teeth and the silicon wafer, is beneficial to the reaction, and can reduce the tooth groove mark.

[0077] ​Optionally, in the case that the toothed L is left-right symmetrical along the axial direction of the connecting rod 12 and up-down asymmetrical, or left-right asymmetrical along the axial direction of the connecting rod 12 and up-down symmetrical, the center distance between adjacent toothed L is 5-6 mm, the bottom distance between adjacent toothed L is 0.8-1.5 mm, and the distance between the tooth tip of the toothed L and the edge of the toothed L along the axial direction of the connecting rod 12 is 2.8-4 mm, which not only facilitates the guiding of the feeding and discharging, but also fully guarantees the overall structural strength of the toothed L. In some embodiments, the center distance between adjacent toothed L can be one of 5 mm, 5.44 mm, 6 mm or a range value between any two of them, the bottom distance between adjacent toothed L can be one of 0.8 mm, 1 mm, 1.2 mm, 1.5 mm or a range value between any two of them, and the distance between the tooth tip of the toothed L and the edge of the toothed L along the axial direction of the connecting rod 12 can be one of 2.8 mm, 3 mm, 3.85 mm, 4 mm or a range value between any two of them.

[0078] Optionally, in a specific embodiment, the toothed L is in the shape of a four-pronged pyramid, which can play a better guiding role, while increasing the strength at the tooth root, facilitating the circulation of liquid between the teeth and the silicon wafer, facilitating the reaction, and reducing the tooth groove mark.

[0079] Optionally, in an embodiment, the distribution range of the toothed L accounts for 60%-99% of the total length of the connecting rod 12, which not only facilitates the feeding and discharging of the silicon wafer, but also fully utilizes the connecting rod to hold the silicon wafer. In some specific embodiments, the distribution range of the toothed L can account for one of 60%, 65%, 70%, 75%, 80%, 85%, 90%, 91%, 92%, 93%, 94%, 95%, 96%, 97%, 98%, 99% of the total length of the connecting rod 12 or a range value between any two of them.

[0080] Optionally, in an embodiment, the distance between the toothed L at the end of the connecting rod 17 and the fixed plate 11 is 0.5%-30% of the total length of the connecting rod, so as to leave a gap for automatic feeding and discharging, while reducing the contact space between the silicon wafer and the toothed L under the condition that the tooth spacing remains unchanged, which is more conducive to the flow of liquid, facilitates cleaning and etching, and facilitates the etching of the silicon wafer. In some specific embodiments, the distance between the toothed L at the end of the connecting rod 17 and the fixed plate 11 is one of 0.5%, 0.8%, 1%, 2%, 3%, 4%, 5%, 6%, 7%, 8%, 9%, 10%, 12%, 15%, 17%, 20%, 22%, 25%, 28%, 30% of the total length of the connecting rod or a range value between any two of them.

[0081] 2%, 3%, 4%, 5%, 6%, 7%, 8%, 9%, 10%, 12%, 15%, 17%, 20%, 22%, 25%, 28%, 30% of the total length of the connecting rod or a range value between any two of them.

[0082] Optionally, the distance between the toothed L at the end of the connecting rod 12 and the fixed plate 11 is 5-60mm, preferably 25-30mm, so as to facilitate automatic feeding and discharging at the end tooth groove. In some embodiments, the distance between the toothed L at the end of the connecting rod 12 and the fixed plate 11 can be one of 5mm, 6mm, 8mm, 10mm, 15mm, 20mm, 25mm, 30mm, 40mm, 50mm, 60mm or a range value between any two of them.

[0083] Optionally, in the embodiments of the present application, the toothed L grooves on different connecting rods 12 are aligned, which facilitates the vertical loading of the silicon wafer.

[0084] Optionally, in the embodiments of the present application, the toothed L on both sides of the connecting rod 12 is symmetrically arranged. By symmetrically arranging the toothed L on both sides of the connecting rod 12, it is convenient to keep the weight balance on both sides after loading the silicon wafer.

[0085] In actual application, when automatic feeding and discharging is performed, the flower basket 10 is placed vertically in a stacked state of multiple layers of accommodation spaces 20, a flat belt tongue is extended to between the toothed L and the fixed plate 11, the silicon wafer 70 is transmitted by the belt into the tooth groove, the flower basket 10 is lifted and lowered, the next silicon wafer is transmitted by the belt into the next tooth groove, and the cycle is repeated until the silicon wafer 70 is filled in the flower basket 10.

[0086] In the flower basket provided by the embodiments of the present application, the plurality of connecting rods 12 can be provided to include a top rod 121, an intermediate rod 122 and a bottom rod 123. In one embodiment, the top rod 121 is arranged at the top edge 113 of the fixed plate 11, the bottom rod 123 is arranged at the bottom edge 114 of the fixed plate 11, and the intermediate rod 122 is a connecting rod 12 shared by two adjacent layers of accommodation spaces 20, i.e. the intermediate rod 122 is arranged between the top edge 113 and the bottom edge 114 of the fixed plate 11. By arranging and cooperating the bottom rod 123, the intermediate rod 122 and the top rod 121 in different spaces, the contact area between the silicon wafer and the connecting rod 12 can be reduced, and the space between the silicon wafer and the connecting rod 12 can be increased, which is more conducive to the flow of liquid.

[0087] When the flower basket 10 has two layers of accommodation spaces 20, i.e. the flower basket is a double-layer flower basket, the top rod 121, the intermediate rod 122 and the bottom rod 123 are each provided with two rods, and each accommodation space is provided with two side rods 125.

[0088] Optionally, in an embodiment, the outer contour of the connecting rod 12 can be provided in the shape of an elliptical cylinder, and the long axis of the ellipse of the cross section of the connecting rod 12 is directed towards the accommodation space 20. Wherein, because in the material mechanics theory, when the circular cross section beam / rod is subjected to a uniform load perpendicular to the axis direction, the stress distribution trend of the cross section is that the stress at the center is the smallest, and the stress at the upper and lower surfaces near the stress direction is the largest, therefore, by using the connecting rod with an elliptical outer contour, and by setting the long axis of the ellipse of the cross section of the connecting rod to be directed towards the accommodation space, the structural strength of the connecting rod can be significantly enhanced.

[0089] Optionally, in an embodiment, as shown in Figure 12 The connecting rod 12 includes an inner rod 21 and a coating layer 22 wrapped on the surface of the inner rod 21. By wrapping the coating layer 22 on the outer side of the inner rod 21, the functions of acid and alkali resistance and corrosion resistance can be achieved. Wherein, the material of the coating layer 22 is polyvinylidene fluoride glass.

[0090] Optionally, the material of the inner rod 21 is glass fiber, which can effectively reduce the cost under the premise of ensuring the structural strength of the connecting rod 12.

[0091] In the embodiment of the application, the diameter of the connecting rod 12 is 12-22mm, for example, 12mm, 15mm, 18mm, 20mm, 22mm, or any range between any two of them, which can effectively balance the carrying capacity and the manufacturing cost.

[0092] Optionally, considering that the flower basket 10 provided in the embodiment of the application has multiple accommodation spaces 20, the self-weight is large, and the density of the glass fiber is large, the first weight-reducing hole 23 is provided in the inner rod 21 in the axial direction to reduce the weight of the connecting rod 12.

[0093] Optionally, in a specific embodiment, the shape of the first weight-reducing hole 23 is a racetrack shape, an oblong hole shape, a square shape, a circular shape, an ellipse or a rhombus. Optionally, the shape of the first weight-reducing hole 23 is a racetrack shape, which not only can achieve a better weight-reducing effect, but also, through simulation verification, compared with the solid circular cross section tooth rod, the tooth rod with the racetrack-shaped weight-reducing hole only increases the uniform load bending deformation amount by 14% under the condition of reducing the weight by 25%.

[0094] Optionally, in an embodiment, the region of the fixed plate 11 where each layer of the accommodation space 20 is located is provided with a positioning hole 18, which facilitates the insertion of the sheet after positioning the accommodation space 20 of each layer of the flower basket. Wherein, the positioning hole 18 can be provided with one or more, and the positioning hole 18 can be circular, square, triangular or other shapes.

[0095] Optionally, in an embodiment, the bottom edge 114 and the second side edge 115 opposite to the feeding port of the fixed plate 11 are further provided with a second clamping groove 19 for clamping the fixed plate 11 by a clamping mechanism to facilitate the operation of overturning and transferring the flower basket.

[0096] In the embodiment, the thickness of the fixed plate 11 is 10-16 mm. In consideration of the application of the fixed plate 11, the thickness of the top corner region 116 without the hook is less than the thickness of other regions of the fixed plate 11, i.e. the top corner region without the hook is locally thinned.

[0097] The flower basket 10 provided by the embodiment has multiple accommodation spaces 20, and the self-weight is large. The thickness of the top corner region 116 without the hook is less than the thickness of other regions of the fixed plate 11, i.e. the top corner region without the hook is locally thinned.

[0098] Optionally, in an embodiment, the region of the fixed plate 11 where the accommodation space 20 is located is further provided with a second weight-reducing hole 24 to further reduce the weight of the flower basket 10 while maintaining the bearing capacity of the fixed plate 11. The second weight-reducing hole 24 can be one or more, and the second weight-reducing hole 24 can be circular, square, triangular, etc.

[0099] Optionally, in a specific embodiment, the positioning hole 18 and the second weight-reducing hole 24 are both provided with a liquid leakage hole 25, which faces the bottom edge 114 or the second side edge 115 of the fixed plate 11 to better achieve the water leakage function. Optionally, the liquid leakage hole 25 at the positioning hole 18 and the second weight-reducing hole 24 can be one or more.

[0100] Optionally, in an embodiment, the edge of the fixed plate 11 is provided with a chamfer 117 to further enhance the dehydration capacity. The width of the chamfer can be 2-5 mm.

[0101] Optionally, in an embodiment, the first side edge 112 and the top edge 113 of the fixed plate 11 are both provided with multiple inclined edges with an inclination of 3-6° to facilitate the flow of water along the inclined edges.

[0102] Optionally, a liquid leakage hole 25 is provided at the connection between the two inclined edges to better achieve the drainage function.

[0103] In the embodiment of the present application, the surface of the fixed plate 11 and the connecting rod 12 is treated by shot blasting, which has hydrophobicity, wear resistance and corrosion resistance. The shot blasting technology is a surface treatment technology that changes the physical properties of an object by high-speed spraying of abrasive or fluid on the surface of the object; after shot blasting, the surface of the material forms a concave-convex structure, which helps to increase the roughness of the surface, and the increase in roughness can reduce the contact area between the liquid droplets and the solid surface, so that more gas-solid composite interfaces are formed between the liquid and the solid, thereby enhancing the hydrophobicity of the surface. At the same time, high-energy shot blasting can refine the surface grains to the nanometer level and improve the surface energy, although this is conducive to the improvement of wettability, but the significant increase in surface roughness will lead to the enhancement of hydrophobicity.

[0104] In actual application, when the flower basket 10 provided by the embodiment of the present application is used to perform wet tank cleaning on the silicon wafer, the cleaning process may, for example, include multiple process treatments such as feeding, alkali cleaning, acid cleaning, ozone cleaning, water washing, slow lifting, drying and discharging, wherein the alkali cleaning, acid cleaning and ozone cleaning can be performed multiple times, and the water washing is performed after the alkali cleaning and the acid cleaning, and the ozone cleaning can be performed between two acid cleanings.

[0105] For example, the cleaning process can pass through the feeding table, the alkali cleaning tank, the water tank, the alkali cleaning tank, the alkali cleaning tank, the water tank, the alkali cleaning tank, the water tank, the mixed acid tank, the water tank, the ozone cleaning tank, the ozone cleaning tank, the mixed acid tank, the water tank, the slow lifting tank, the drying tank and the discharging table in turn.

[0106] Among them, the above-mentioned alkali cleaning, acid cleaning, ozone cleaning and water washing are performed in the corresponding cleaning tank, the depth of each cleaning tank matches the height of the flower basket 10 in the vertical state, that is, compared with the prior art, each cleaning tank should be treated to be higher, that is, it can accommodate the flower basket 10 provided by the embodiment of the present application to clean the silicon wafer.

[0107] Among them, in order to reduce the appearance of water marks and other appearance defects caused by the residual liquid medicine on the upper layer of the flower basket flowing to the lower layer of the silicon wafer during dehydration and drying, the flower basket needs to be lifted in a flat state during slow lifting, that is, the flower basket needs to be rotated by 90° from the vertical state to the flat state in the water washing tank before slow lifting, so that the silicon wafer is placed in a single layer, and then it can enter the slow lifting tank and be lifted in a vertical state. Therefore, compared with the prior art, the water washing tank before slow lifting and the slow lifting tank should be widened to accommodate the flower basket 10 in a flat state.

[0108] Because the flower basket 10 provided by the embodiment of the application has multiple layers of containing spaces 20, for example, N layers of containing spaces 20, the N can be 2, 3 or 4, etc., which can realize the silicon wafer loading capacity of N single-layer flower baskets, so that when the silicon wafer is subjected to wet tank cleaning, the number of flower baskets placed in a single cleaning tank is expanded to N times under the condition that the cleaning tank area remains unchanged, which not only can realize the great improvement of the equipment capacity, but also can effectively reduce the consumption of chemicals.

[0109] For example, for the case that 8 baskets per tank, 6 baskets per tank, 4 baskets per tank can be placed in the existing cleaning tank, under the condition that the area remains unchanged, through the upper and lower two layers of containing spaces 20, the cleaning tank can correspondingly realize the loading effect of 16 baskets per tank, 12 baskets per tank, 8 baskets per tank.

[0110] The embodiment of the application also provides a cleaning device 100, wherein, as Figures 13-16 , comprising a cleaning tank 30 and a turnover mechanism 50; the turnover mechanism 50 is arranged in the cleaning tank 30 and is used for carrying the flower basket 10 as described above and driving the flower basket 10 to turn over.

[0111] The flower basket 10 is carried on the turnover mechanism 50, and the turnover of the turnover mechanism 50 drives the flower basket to turn over 90°, that is, the flower basket 10 can be changed from lying to standing or from standing to lying, and because the fixed plate 11 of the flower basket 10 is provided with at least two groups of hooks 13 for lifting on the adjacent side 111, no matter the flower basket 10 is in the standing state or the lying state, there is a usable hook 13

[0112] The flower basket 10 is lifted, which can effectively meet the direction requirement of the silicon wafer processing.

[0113] Optionally, in an embodiment, the cleaning device comprises a plurality of turnover mechanisms 50 and a translation mechanism 40, the turnover mechanisms 50 are arranged in the cleaning tank 30 at intervals, the translation mechanism 40 is used for driving the turnover mechanisms 50 to move laterally, and the turnover mechanisms 50 are arranged on the translation mechanism 40 and are used for driving the flower baskets 10 to turn over.

[0114] In this embodiment, in order to improve the loading capacity and improve the cleaning efficiency, a plurality of turnover mechanisms are arranged in the cleaning tank at intervals, a plurality of flower baskets can be carried, and the silicon wafer cleaning amount of a single cleaning process can be significantly improved.

[0115] In order to occupy a smaller area, before the slow lifting process, each flower basket 10 is in the standing state and has a small interval; when the slow lifting process is performed, the flower basket 10 needs to be turned over to the lying state, and in view of the small interval between the flower baskets, the translation mechanism 40 is used to drive the flower baskets to translate, so as to expand the interval between the flower baskets, then the flower baskets are turned over, and then the slow lifting is performed.

[0116] In the embodiment, the cleaning device can be a wet tank cleaning device. Alternatively, the cleaning tank 30 can be a water tank or a slow pull tank. Because the fixing plate 11 of the flower basket 10 is provided with at least two groups of hooks 13 for pulling on the adjacent edges 111, the flower basket 10 can be pulled by the available hooks 13 regardless of the vertical state or the lying state, so that the flower basket 10 can be flipped to the lying state by the flipping mechanism 50 before slow pulling, and then the slow pulling operation is performed in the lying state in the slow pulling process, effectively avoiding the pollution problem that the residual chemical solution on the upper silicon wafer pollutes the lower silicon wafer in the tank cleaning process.

[0117] Alternatively, in an embodiment, the flipping mechanism 50 includes a flower basket seat 51 and a bracket 52, the bracket 52 is arranged on the translation mechanism 40, and the flower basket seat 51 is arranged on the bracket 52 through a rotating shaft 53. Alternatively, the flower basket seat 51 is a bucket shape, which is convenient for changing the flower basket 10 from the lying state to the vertical state or from the vertical state to the lying state, and the pulling device can smoothly pull the flower basket 10 regardless of the vertical state or the lying state.

[0118] Alternatively, in an embodiment, the cleaning device further includes a driving mechanism 60, the output end of the driving mechanism 60 is in transmission connection with the rotating shaft 53, the rotating shaft 53 can be driven to rotate by the driving mechanism 60, and the flower basket seat 51 is flipped. The driving mechanism 60 can be a motor, and the output end of the motor is in transmission connection with the rotating shaft 53 through a belt.

[0119] In summary, in the embodiment, the flower basket 10 in the application includes two fixing plates 11 and a plurality of connecting rods 12; the plurality of connecting rods 12 are arranged between the two fixing plates 11 and form a plurality of layers of accommodating spaces 20 with the fixing plates 11; the fixing plate 11 is provided with at least two groups of hooks 13 for pulling, and the at least two groups of hooks 13 are arranged on at least two adjacent edges 111 of the fixing plate 11; wherein the plurality of layers of accommodating spaces 20 are formed by the connecting rods 12 and the fixing plates 11, which can significantly improve the loading capacity per unit area; and the at least two groups of hooks 13 for pulling are arranged on the adjacent edges 111 of the fixing plate 11, so that the flower basket 10 can be pulled by the at least two groups of hooks 13 for pulling regardless of the vertical state or the lying state, which is convenient for subsequent circulation, and by controlling the flower basket 10 to be in the vertical state in the non-slow pulling process and to be in the lying state in the slow pulling process, the pollution problem that the residual chemical solution on the upper silicon wafer pollutes the lower silicon wafer in the tank cleaning process is effectively avoided.

[0120] It should be noted that the various embodiments in this specification are described in a progressive manner, with each embodiment focusing on the differences from other embodiments. The same or similar parts between the various embodiments can be referred to each other.

[0121] Although optional embodiments of the present application have been described, those skilled in the art, upon learning the basic inventive concept, can make other changes and modifications to these embodiments. Therefore, the appended claims are intended to be interpreted as including the optional embodiments as well as all changes and modifications falling within the scope of the embodiments of the present application.

[0122] Finally, it should be noted that in this document, relational terms such as "first" and "second" are used merely to distinguish one entity from another, and do not necessarily require or imply any such actual relationship or order between these entities. Furthermore, the terms "comprising," "including," or any other variations thereof are intended to cover non-exclusive inclusion, such that an article or terminal device that comprises a list of elements includes not only those elements but also other elements not expressly listed, or elements inherent to such an article or terminal device. Without further limitations, an element defined by the phrase "comprising one..." does not exclude the presence of other identical elements in the article or terminal device that includes that element.

[0123] The technical solutions provided in this application have been described in detail above. Specific examples have been used to illustrate the principles and implementation methods of this application. At the same time, for those skilled in the art, there will be changes in the specific implementation methods and application scope based on the principles and implementation methods of this application. Therefore, the content of this specification should not be construed as a limitation of this application.

Claims

1. A flower basket, characterized in that, It includes two fixed plates and multiple connecting rods; the multiple connecting rods are arranged between the two fixed plates and form a multi-layer accommodating space with the fixed plates; at least two sets of lifting hooks are provided on the fixed plates, and at least two sets of hooks are arranged on at least two adjacent sides of the fixed plates.

2. The flower basket according to claim 1, characterized in that, The edge of the fixing plate is provided with a groove, and the wall of the groove is provided with the hook.

3. The flower basket according to claim 2, characterized in that, The groove is provided with a leakage hole.

4. The flower basket according to claim 2, characterized in that, The accommodating space has a feed inlet, and the at least two sets of lifting hooks include a first hook and a second hook. The first hook is disposed on a first side of the fixed plate near the feed inlet, and the second hook is disposed on the top edge of the fixed plate.

5. The flower basket according to claim 4, characterized in that, Each of the first side edges is provided with two first hooks, and each of the top edges is provided with two second hooks, wherein the distance between two adjacent first hooks is greater than the distance between two adjacent second hooks.

6. The flower basket according to claim 4, characterized in that, The first hook and the second hook are adjacent to each other and are disposed on different wall surfaces of the same groove.

7. The flower basket according to claim 4, characterized in that, The flower basket also includes a pressure rod, which is detachably installed at the feed inlet.

8. The flower basket according to claim 7, characterized in that, The surfaces of the two fixing plates are symmetrically provided with mounting ports near the feed inlet, and the pressure rod is inserted into the mounting port.

9. The flower basket according to claim 1, characterized in that, Each of the connecting rods has multiple teeth on its surface, and the distribution range of the teeth is 60% to 99% of the total length of the connecting rod.

10. The flower basket according to claim 9, characterized in that, The distance between the toothed section at the end of the connecting rod and the fixing plate is 0.5% to 30% of the total length of the connecting rod.

11. The flower basket according to claim 1, characterized in that, Each of the connecting rods has multiple equally spaced basket teeth on its surface.

12. The flower basket according to claim 1, characterized in that, Each of the aforementioned accommodating spaces is provided with positioning holes in the area of ​​the fixed plate.

13. The flower basket according to claim 1, characterized in that, The connecting rod includes an inner rod and a coating covering the surface of the inner rod, and the inner rod has a first weight-reducing hole extending through it axially.

14. The flower basket according to claim 13, characterized in that, The inner rod is made of glass fiber, and the coating is made of polyvinylidene fluoride.

15. The flower basket according to claim 1, characterized in that, The fixing plate is provided with positioning holes and / or second weight reduction holes.

16. The flower basket according to claim 15, characterized in that, The positioning hole and / or the second weight reduction hole are provided with a leakage hole.

17. The flower basket according to any one of claims 4 to 8, characterized in that, The bottom edge of the fixing plate and the second side opposite to the feed port are also provided with a second slot, which is used for the clamping mechanism to clamp the fixing plate.

18. A cleaning device, characterized in that, It includes a washing tank and a flipping mechanism; the flipping mechanism is disposed in the washing tank and is used to carry the flower basket as described in any one of claims 1 to 17 and drive the flower basket to flip.

19. The cleaning equipment according to claim 18, characterized in that, The cleaning equipment includes multiple flipping mechanisms and translation mechanisms. Each flipping mechanism is spaced apart in the cleaning tank. The translation mechanism is used to drive the flipping mechanism to move laterally. The flipping mechanism is mounted on the translation mechanism.

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