Etching apparatus
By setting up multiple temperature control units and heat conduction pipelines in the etching device and using valves to control the flow of fluid, the problem of slow heating rate of etching solution was solved, rapid heating of etching solution was achieved, and production efficiency was improved.
Patent Information
- Application Number
- CN202422654709.5
- Authority / Receiving Office
- CN · China
- Patent Type
- Utility models(China)
- Current Assignee / Owner
- Filing Date
- 2024-11-01
- Publication Date
- 2025-12-09
- Estimated Expiration
- 2034-11-01
AI Technical Summary
The existing etching equipment has a slow heating rate of the etching solution, which affects production efficiency.
An etching apparatus is designed, comprising a first liquid storage tank, a first temperature control unit, and a second temperature control unit. By setting valves and heat-conducting pipes, rapid heating and cooling of the liquid can be achieved. The opening of the valves forms interconnected pipes, allowing fluids with preset temperatures to flow through multiple heat-conducting pipes simultaneously, thereby improving heating efficiency.
Rapid heating of the etching solution was achieved, improving production efficiency.
Smart Images
Figure CN223652453U_ABST
Abstract
Description
Technical Field
[0001] This utility model relates to the field of display panel processing technology, and more particularly to an etching device used in the display panel processing process. Background Technology
[0002] With the development of technology, the demand for display devices is increasing daily, and consumers are demanding increasingly thinner and lighter displays. Thinning etching equipment is one of the essential pieces of equipment for reducing the thickness of display panels. After the display panel is assembled, it enters the chamber of the thinning etching equipment. The chamber is equipped with a spraying component, which is connected via pipes to a storage container containing etching solution. The spraying component sprays the etching solution onto the upper and lower surfaces of the display panel to achieve the target thickness. The thinning etching equipment requires maintenance after a period of use. Before resuming production, the etching solution in the storage container needs to be heated to the target temperature before being used for spraying. Currently, the heating rate of the etching solution is slow, affecting production efficiency. Utility Model Content
[0003] Therefore, the purpose of this invention is to provide an etching apparatus to solve the above-mentioned problems.
[0004] To achieve the above objectives, this utility model proposes an etching device equipped with a spraying assembly. The etching device further includes a first liquid storage tank, a first temperature control unit, and a second temperature control unit. The first liquid storage tank is connected to the spraying assembly via a first inlet pipe. The first liquid storage tank contains a first heat-conducting pipe and a second heat-conducting pipe. The first heat-conducting pipe has opposing first and second ports, and the second heat-conducting pipe has opposing third and fourth ports. The first temperature control unit is connected to the first port via a first connecting pipe and to the second port via a second connecting pipe. The second temperature control unit is connected to the third port via a third connecting pipe and to the fourth port via a fourth connecting pipe. The third port is connected to the first connecting pipe via a first valve, and the fourth port is connected to the second connecting pipe via a second valve. The third connecting pipe is connected to the fourth connecting pipe via the third valve. The third connecting pipe is also equipped with a fourth valve, and the fourth connecting pipe is also equipped with a fifth valve. In the first operating mode, the first valve, the second valve, and the third valve are open, and the fourth valve and the fifth valve are closed. The first fluid with a first preset temperature in the first temperature control unit flows from the first connecting pipe through the first heat conduction pipe and the second heat conduction pipe and then returns to the first temperature control unit. The second fluid with a second preset temperature in the second temperature control unit flows from the third connecting pipe through the third valve and the fourth connecting pipe and then returns to the second temperature control unit.
[0005] As an optional technical solution, in the second usage mode, the first valve, the second valve, the fourth valve, and the fifth valve are closed, the third valve is open, the first fluid in the first temperature control unit flows from the first connecting pipe through the first heat-conducting pipe and the second connecting pipe in sequence and then returns to the first temperature control unit, and the second fluid in the second temperature control unit flows from the third connecting pipe through the third valve and the fourth connecting pipe and then returns to the second temperature control unit.
[0006] As an optional technical solution, the etching apparatus further includes a sixth valve and a seventh valve. The first connecting pipe is connected to the second connecting pipe via the sixth valve, and the seventh valve is disposed between the first connecting pipe and the first port. In the third operating mode, the first valve, the second valve, the third valve, and the seventh valve are closed, and the fourth valve, the fifth valve, and the sixth valve are open. The first fluid in the first temperature control unit returns to the first temperature control unit from the first connecting pipe via the sixth valve and the second connecting pipe, and the second fluid in the second temperature control unit returns to the second temperature control unit from the third connecting pipe via the second heat-conducting pipe and the fourth connecting pipe.
[0007] As an optional technical solution, the first valve, the second valve, the third valve, the fourth valve, and the fifth valve are pneumatic valves.
[0008] As an optional technical solution, the etching apparatus further includes a second liquid storage tank, which is connected to the spraying component via a second liquid delivery line. The second liquid storage tank contains a third and a fourth heat-conducting pipe. The third heat-conducting pipe has opposing fifth and sixth ports, and the fourth heat-conducting pipe has opposing seventh and eighth ports. The first temperature control unit is connected to the fifth port via a first connecting pipe and to the sixth port via a second connecting pipe. The etching apparatus also includes a third temperature control unit, which is connected to the seventh port via a fifth connecting pipe and to the eighth port via a sixth connecting pipe. The seventh port is connected to the first connecting pipe via a ninth valve, the eighth port is connected to the second connecting pipe via a tenth valve, and the fifth connecting pipe is connected to the sixth connecting pipe via an eleventh valve. The fifth connecting pipe and the seventh port are connected... A twelfth valve is also provided, and a thirteenth valve is also provided between the fourth connecting pipe and the eighth port. In the first usage mode, the first valve, the second valve, the third valve, the ninth valve, the tenth valve, and the eleventh valve are open, and the fourth valve, the fifth valve, the eleventh valve, and the twelfth valve are closed. The first fluid in the first temperature control unit flows from the first connecting pipe through the first heat-conducting pipe, the second heat-conducting pipe, the third heat-conducting pipe, the fourth heat-conducting pipe, and the second connecting pipe in sequence and then returns to the first temperature control unit. The second fluid in the second temperature control unit flows from the third connecting pipe through the third valve and the fourth connecting pipe and then returns to the second temperature control unit. The third fluid with a third preset temperature in the third temperature control unit flows from the fifth connecting pipe through the eleventh valve and the sixth connecting pipe and then returns to the third temperature control unit.
[0009] As an optional technical solution, in the second usage mode, the first valve, the second valve, the fourth valve, the fifth valve, the ninth valve, the tenth valve, the eleventh valve, and the twelfth valve are closed, and the third valve and the eleventh valve are open. The first fluid in the first temperature control unit flows from the first connecting pipe through the first heat-conducting pipe and the third heat-conducting pipe in sequence and then returns to the first temperature control unit. The second fluid in the second temperature control unit flows from the third connecting pipe through the third valve and the fourth connecting pipe and then returns to the second temperature control unit. The third fluid in the third temperature control unit flows from the fifth connecting pipe through the eleventh valve and the sixth connecting pipe and then returns to the second temperature control unit.
[0010] As an optional technical solution, in the third usage mode, the ninth valve, the tenth valve and the eleventh valve are closed, the twelfth valve and the thirteenth valve are open, and the third fluid in the third temperature control unit returns to the third temperature control unit from the fifth connecting pipe through the fourth heat-conducting pipe and the sixth connecting pipe.
[0011] As an optional technical solution, the ninth valve, the tenth valve, the eleventh valve, the twelfth valve, and the thirteenth valve are pneumatic valves.
[0012] As an optional technical solution, the etching apparatus includes a first chamber, and the spraying assembly includes a plurality of first nozzles disposed within the first chamber.
[0013] As an optional technical solution, the first temperature control unit is a heating unit, and the second temperature control unit is a cooling unit.
[0014] In the etching apparatus of this invention, both the first and second heat-conducting pipes in the liquid storage tank can be connected to the connecting pipes of the first temperature control unit. When it is necessary to rapidly heat the liquid in the liquid storage tank, the valve can be opened to form an interconnected pipe, so that the first fluid with a first preset temperature in the first temperature control unit can flow through the first and second heat-conducting pipes simultaneously to rapidly heat the liquid in the liquid storage tank, thereby increasing the production capacity.
[0015] The present invention will be described in detail below with reference to the accompanying drawings and specific embodiments, but this is not intended to limit the present invention. Attached Figure Description
[0016] Figure 1 This is a partial schematic diagram of an embodiment of the etching apparatus of the present invention in a first usage mode;
[0017] Figure 2 This is a partial schematic diagram of an embodiment of the etching apparatus of this utility model in a second usage mode;
[0018] Figure 3 This is a partial schematic diagram of an embodiment of the etching apparatus of the present invention in a third usage mode;
[0019] Figure 4 This is a partial schematic diagram of another embodiment of the etching apparatus of this utility model in a first usage mode;
[0020] Figure 5 This is a partial schematic diagram of another embodiment of the etching apparatus of this utility model in a second usage mode;
[0021] Figure 6 This is a partial schematic diagram of another embodiment of the etching apparatus of this utility model in a third usage mode;
[0022] Figure 7 This is a partial schematic diagram of another embodiment of the etching apparatus of this utility model. Detailed Implementation
[0023] The following descriptions of the embodiments are with reference to the accompanying drawings, illustrating specific embodiments in which the present invention can be implemented. Directional terms used in this invention, such as "up," "down," "front," "back," "left," "right," and "side," are merely directional references to the accompanying drawings. Therefore, the directional terms used are for illustrative and understanding purposes only, and not for limiting the present invention.
[0024] Please refer to Figures 1 to 3 , Figure 1 This is a partial schematic diagram of an embodiment of the etching apparatus of this utility model in a first usage mode. Figure 2 This is a partial schematic diagram of an embodiment of the etching apparatus of this utility model in a second usage mode. Figure 3 This is a partial schematic diagram of an embodiment of the etching apparatus of this utility model in a third mode of use.
[0025] like Figures 1 to 3 As shown, an etching apparatus 10 according to an embodiment of the present invention includes a spraying assembly (not shown), a first liquid storage tank 100, a first temperature control unit 200, and a second temperature control unit 300. The first liquid storage tank 100 is connected to the spraying assembly via a first infusion line (not shown). The first liquid storage tank 100 has a first heat-conducting pipe 110 and a second heat-conducting pipe 120 inside. The first heat-conducting pipe 110 has a first port and a second port, and the second heat-conducting pipe 120 has a third port and a fourth port. The first temperature control unit 200 is connected to the first port via a first connecting pipe 210 and to the second port via a second connecting pipe 220. The second temperature control unit 300 is connected to the third port via a third connecting pipe 310 and to the fourth port via a fourth connecting pipe 320.
[0026] Furthermore, the third port is connected to the first connecting pipe 210 via the first valve 410, and the fourth port is connected to the second connecting pipe 220 via the second valve 420. The third connecting pipe 310 is connected to the fourth connecting pipe 320 via the third valve 430. A fourth valve 440 is also provided on the third connecting pipe 310, and a fifth valve 450 is also provided on the fourth connecting pipe 320.
[0027] like Figure 1As shown, in the first usage mode, the first valve 410, the second valve 420, and the third valve 430 are open, while the fourth valve 440 and the fifth valve 450 are closed. The first fluid with a first preset temperature in the first temperature control unit 200 flows from the first connecting pipe 210 through the first heat-conducting pipe 110, the second heat-conducting pipe 120, and the second connecting pipe 220 in sequence and then returns to the first temperature control unit 200. The second fluid with a second preset temperature in the second temperature control unit 300 flows from the third connecting pipe 310 through the third valve 430 and the fourth connecting pipe 320 and then returns to the second temperature control unit 300.
[0028] In one embodiment, the etching apparatus 10 includes a first chamber (not shown), and the spraying assembly includes a plurality of first nozzles (not shown), which are disposed within the first chamber. The first storage tank 100 may be an etching solution storage tank. In use, the object to be etched (e.g., a plate-shaped element) enters the first chamber, and the plurality of first nozzles within the first chamber spray etching solution towards the object to be etched, thereby etching and thinning the object. In actual operation, the etching apparatus 10 requires maintenance after a period of use. When it is put back into production after maintenance, the liquid (e.g., etching solution) in the first storage tank 100 needs to be heated, and the liquid is only used for production after reaching the target temperature.
[0029] In this embodiment, under the first usage mode, both the first heat-conducting pipe 110 and the second heat-conducting pipe 120 within the first liquid storage tank 100 participate in the operation to improve heat conduction efficiency. In one embodiment, the first temperature control unit 200 is a heating unit, and the second temperature control unit 300 is a cooling unit. At this time, the first preset temperature is much higher than the second preset temperature. Under the first usage mode, the first fluid in the first temperature control unit 200 flows simultaneously through both the first heat-conducting pipe 110 and the second heat-conducting pipe 120, resulting in high heating efficiency for the first liquid storage tank 100. Therefore, the first usage mode can be considered a high-efficiency heating mode. Under this mode, the second temperature control unit 300 is in a self-circulating state via the third valve 430. In actual operation, when the temperature difference between the liquid in the first liquid storage tank 100 and the target temperature is large, the first usage mode can be used to ensure that the liquid in the first liquid storage tank 100 reaches the target temperature as quickly as possible, thereby ensuring production efficiency.
[0030] like Figure 2As shown, in the second usage mode, the first valve 410, the second valve 420, the fourth valve 440 and the fifth valve 450 are closed, and the third valve 430 is open. The first fluid in the first temperature control unit 200 flows from the first connecting pipe 210 through the first heat conduction pipe 110 and the second connecting pipe 220 and then returns to the first temperature control unit 200. The second fluid in the second temperature control unit 300 flows from the third connecting pipe 310 through the third valve 430 and the fourth connecting pipe 320 and then returns to the second temperature control unit 300. When the first temperature control unit 200 is a heating unit and the second temperature control unit 300 is a cooling unit, in the second usage mode, the first fluid in the first temperature control unit 200 flows only through the first heat conduction pipe 110 in the first heat conduction pipe 110 and the second heat conduction pipe 120, so as to achieve a certain heating efficiency for the first liquid storage tank 100. Thus, the second usage mode can be regarded as a general heating mode. At this time, the second temperature control unit 300 is in a self-circulation state through the setting of the third valve 430, the fourth valve 440 and the fifth valve 450.
[0031] like Figures 1 to 3 As shown, the etching apparatus 10 also includes a sixth valve 460 and a seventh valve 470. The first connecting pipe 210 is connected to the second connecting pipe 220 via the sixth valve 460, and the seventh valve 470 is disposed between the first connecting pipe 210 and the first port. In the third operating mode, the first valve 410, the second valve 420, the third valve 430, and the seventh valve 470 are closed, and the fourth valve 440, the fifth valve 450, and the sixth valve 460 are open. The first fluid in the first temperature control unit 200 returns to the first temperature control unit 200 from the first connecting pipe 210 via the sixth valve 460 and the second connecting pipe 220. The second fluid in the second temperature control unit 300 returns to the second temperature control unit 300 from the third connecting pipe 310 via the second heat-conducting pipe 120 and the fourth connecting pipe 320. When the first temperature control unit 200 is a heating unit and the second temperature control unit 300 is a cooling unit, in the third operating mode, the second fluid in the second temperature control unit 300 can flow through the second heat-conducting pipe 120 to cool the first liquid storage tank 100. Therefore, the third operating mode can be considered a cooling mode. At this time, the first temperature control unit 200 is in a self-circulating state via the sixth valve 460 and the seventh valve 470. In actual operation, corresponding to the seventh valve 470 on the first connecting pipe 210, an eighth valve can also be installed on the second connecting pipe 220 for self-circulation.
[0032] In one embodiment, the first valve 410, the second valve 420, the third valve 430, the fourth valve 440, and the fifth valve 450 are pneumatic valves. The sixth valve 460 and the seventh valve 470 may also be pneumatic valves, but are not limited thereto.
[0033] In the etching apparatus 10 of this invention, both the first heat-conducting pipe 110 and the second heat-conducting pipe 120 in the first liquid storage tank 100 can be connected to the connecting pipe of the first temperature control unit 200. When it is necessary to rapidly heat the liquid in the first liquid storage tank 100, the valve can be opened to form an interconnected pipe, so that the first fluid with a first preset temperature in the first temperature control unit 200 can flow through the first heat-conducting pipe 110 and the second heat-conducting pipe 120 at the same time, so as to rapidly heat the liquid in the first liquid storage tank 100, thereby increasing the production capacity.
[0034] Please refer to Figures 4 to 6 , Figure 4 This is a partial schematic diagram of another embodiment of the etching apparatus of this utility model in a first usage mode. Figure 5 This is a partial schematic diagram of another embodiment of the etching apparatus of this utility model in a second usage mode. Figure 6 This is a partial schematic diagram of another embodiment of the etching apparatus of this utility model in a third mode of use.
[0035] like Figures 4 to 6 As shown, the etching apparatus 20 also includes a second liquid storage tank 600, which is connected to a spraying assembly via a second inlet pipe (not shown). The second liquid storage tank 600 contains a third heat-conducting pipe 610 and a fourth heat-conducting pipe 620. The third heat-conducting pipe 610 has a fifth and a sixth port, and the fourth heat-conducting pipe 620 has a seventh and an eighth port. A first temperature control unit 200 is connected to the fifth port via a first connecting pipe 210 and to the sixth port via a second connecting pipe 220. The etching apparatus 20 also includes a third temperature control unit 700, which is connected to the seventh port via a fifth connecting pipe 710 and to the eighth port via a sixth connecting pipe 720. A ninth valve 490 is provided between the first connecting pipe 110 and the seventh port, and a tenth valve 500 is provided between the second connecting pipe 120 and the eighth port. The fifth connecting pipe 710 is connected to the sixth connecting pipe 720 via the eleventh valve 510. A twelfth valve 520 is also provided between the fifth connecting pipe 710 and the seventh port, and a thirteenth valve 530 is also provided between the sixth connecting pipe 720 and the eighth port.
[0036] like Figure 4As shown, in the first usage mode, the first valve 410, the second valve 420, the third valve 430, the ninth valve 490, the tenth valve 500, and the eleventh valve 510 are open, while the fourth valve 440, the fifth valve 450, the twelfth valve 520, and the thirteenth valve 530 are closed. The first fluid in the first temperature control unit 200 flows from the first connecting pipe 210 through the first heat-conducting pipe 110, the second heat-conducting pipe 120, the third heat-conducting pipe 610, the fourth heat-conducting pipe 620, and the second heat-conducting pipe 120 before returning to the first temperature control unit 200. The second fluid in the second temperature control unit 300 flows from the third connecting pipe 310 through the third valve 430 and the fourth connecting pipe 320 before returning to the second temperature control unit 300. The third fluid with a third preset temperature in the third temperature control unit 700 flows from the fifth connecting pipe 710 through the eleventh valve 510 and the sixth connecting pipe 720 before returning to the third temperature control unit.
[0037] In one embodiment, the etching apparatus 20 further includes a second chamber (not shown), in which a portion of the plurality of first nozzles of the spraying assembly are disposed in the first chamber and another portion in the second chamber. A second liquid storage tank 600 is connected to the plurality of first nozzles disposed in the second chamber via a second liquid delivery line. However, this is not a limitation; the first liquid storage tank 100 and the second liquid storage tank 500 may also be connected to nozzles in the same chamber. In actual operation, the etching apparatus 20 requires maintenance after a period of use. When it is put back into production after maintenance, the liquid (e.g., etching solution) in the first liquid storage tank 100 and the liquid (e.g., etching solution) in the second liquid storage tank 600 need to be heated, and the liquid is only used for production after reaching the target temperature.
[0038] In this embodiment, under the first usage mode, both the first heat-conducting pipe 110 and the second heat-conducting pipe 120 in the first liquid storage tank 100 participate in the operation, as do the third heat-conducting pipe 610 and the fourth heat-conducting pipe 620 in the second liquid storage tank 600, to improve heat conduction efficiency. When the first temperature control unit 200 is a heating unit, and the second temperature control unit 300 and the third temperature control unit 700 are cooling units, the second preset temperature can be the same as the third preset temperature, but is not limited thereto. The first fluid in the first temperature control unit 200 simultaneously flows through the first heat-conducting pipe 110 and the second heat-conducting pipe 120, improving the heating efficiency of the first liquid storage tank 100. The first fluid also simultaneously flows through the third heat-conducting pipe 610 and the fourth heat-conducting pipe 620, improving the heating efficiency of the second liquid storage tank 600. Therefore, the first operating mode can be considered a high-efficiency heating mode. In this mode, the second temperature control unit 300 is in a self-circulating state via the third valve 430, the fourth valve 440, and the fifth valve 450, and the third temperature control unit 700 is in a self-circulating state via the eleventh valve 510, the twelfth valve 520, and the thirteenth valve 530. In actual operation, when the temperature difference between the liquid in the first liquid storage tank 100 and the liquid in the second liquid storage tank 600 and the target temperature is large, the first operating mode can be used to ensure that the liquid in the first liquid storage tank 100 and the liquid in the second liquid storage tank 600 reaches the target temperature as quickly as possible, thus ensuring production efficiency.
[0039] like Figure 5As shown, in the second operating mode, the first valve 410, the second valve 420, the fourth valve 440, the fifth valve 450, the ninth valve 490, the tenth valve 500, the twelfth valve 520, and the thirteenth valve 530 are closed, while the third valve 430 and the tenth valve 500 are open. The first fluid in the first temperature control unit 200 flows from the first connecting pipe 210 through the first heat-conducting pipe 110 and the second connecting pipe 220 and then returns to the first temperature control unit 200. The second fluid in the second temperature control unit 300 flows from the third connecting pipe 310 through the third valve 430 and the fourth connecting pipe 320 and then returns to the second temperature control unit 300. The third fluid in the third temperature control unit 700 flows from the fifth connecting pipe 710 through the eleventh valve 510 and the sixth connecting pipe 720 and then returns to the third temperature control unit 700. When the first temperature control unit 200 is a heating unit and the second temperature control unit 300 and the third temperature control unit 700 are cooling units, in the second usage mode, the first fluid in the first temperature control unit 200 flows only through the first heat conduction pipe 110 in the first liquid storage tank 100 to achieve a certain heating efficiency for the first liquid storage tank 100, and the first fluid flows only through the third heat conduction pipe 610 in the second liquid storage tank 600 to achieve a certain heating efficiency for the second liquid storage tank 600. Thus, the second usage mode can be regarded as a general heating mode. At this time, the second temperature control unit 300 is in a self-circulation state through the setting of the third valve 430, the fourth valve 440 and the fifth valve 450, and the third temperature control unit 700 is in a self-circulation state through the setting of the eleventh valve 510, the twelfth valve 520 and the thirteenth valve 530.
[0040] like Figures 4 to 6As shown, in the third operating mode, the first valve 410, the second valve 420, the third valve 430, the seventh valve 470, the ninth valve 490, the tenth valve 500, and the eleventh valve 510 are closed, while the fourth valve 440, the fifth valve 450, the sixth valve 460, the twelfth valve 520, and the thirteenth valve 530 are open. The first fluid in the first temperature control unit 200 returns to the first temperature control unit 200 after passing through the first connecting pipe 210, the sixth valve 460, and the second connecting pipe 220. The second fluid in the second temperature control unit 300 returns to the second temperature control unit 300 after passing through the third connecting pipe 310, the second heat-conducting pipe 120, and the fourth connecting pipe 320. The third fluid in the third temperature control unit 700 returns to the third temperature control unit 700 after passing through the fifth connecting pipe 710, the fourth heat-conducting pipe 620, and the sixth connecting pipe. When the first temperature control unit 200 is a heating unit and the second temperature control unit 300 is a cooling unit, in the third usage mode, the second fluid in the second temperature control unit 300 can flow through the second heat conduction pipe 120 to cool the first liquid storage tank 100, and the third fluid in the third temperature control unit 700 can flow through the fourth heat conduction pipe 620 to cool the second liquid storage tank 600. Thus, the third usage mode can be regarded as a cooling mode. At this time, the first temperature control unit 200 is in a self-circulation state through the setting of the sixth valve 460 and the seventh valve 470.
[0041] In one embodiment, the ninth valve 490, the tenth valve 500, the eleventh valve 510, the twelfth valve 520 and the thirteenth valve 530 are pneumatic valves, but are not limited thereto.
[0042] The etching apparatus 20 of this invention has a first heat-conducting pipe 110 and a second heat-conducting pipe 120 in the first liquid storage tank 100, and a third heat-conducting pipe 610 and a fourth heat-conducting pipe 620 in the second liquid storage tank 600, all of which can be connected to the connecting pipes of the first temperature control unit 200. When it is necessary to rapidly heat the liquid in the first liquid storage tank 100 and the liquid in the second liquid storage tank 200, the valves can be opened to form interconnected pipes, so that the first fluid with a first preset temperature in the first temperature control unit 200 can simultaneously flow through the first heat-conducting pipe 110, the second heat-conducting pipe 120, the third heat-conducting pipe 610, and the fourth heat-conducting pipe 640 to rapidly heat the liquid in the first liquid storage tank 100 and the liquid in the second liquid storage tank 600, thereby increasing the production capacity.
[0043] In other embodiments, the number of liquid storage tanks is not... Figures 1 to 6 The embodiments shown are limited; for example, please refer to [reference needed]. Figure 7 , Figure 7 This is a partial schematic diagram of another embodiment of the etching apparatus of this utility model. Figure 7 As shown, there are four storage tanks, and the relevant piping connections are as follows. Figures 1 to 6 The embodiments shown are not described in detail elsewhere.
[0044] In the etching apparatus of this invention, both the first and second heat-conducting pipes in the liquid storage tank can be connected to the connecting pipes of the first temperature control unit. When it is necessary to rapidly heat the liquid in the liquid storage tank, the valve can be opened to form an interconnected pipe, so that the first fluid with a first preset temperature in the first temperature control unit can flow through the first and second heat-conducting pipes simultaneously to rapidly heat the liquid in the liquid storage tank, thereby increasing the production capacity.
[0045] The detailed description of the preferred embodiments above is intended to more clearly describe the features and spirit of this utility model, and is not intended to limit the scope of protection of this utility model by means of the preferred embodiments disclosed above. On the contrary, the aim is to cover various modifications and equivalent arrangements within the scope of protection of the claims of this utility model. Therefore, the scope of protection of the claims of this utility model should be interpreted in the broadest possible sense based on the foregoing description, so as to cover all possible modifications and equivalent arrangements.
Claims
1. An etching apparatus, comprising a spraying component, characterized in that, The etching apparatus also includes, The first liquid storage tank is connected to the spraying assembly via a first liquid delivery pipeline. The first liquid storage tank is provided with a first heat conduction pipeline and a second heat conduction pipeline. The first heat conduction pipeline has a first port and a second port, and the second heat conduction pipeline has a third port and a fourth port. The first temperature control unit is connected to the first port via a first connecting pipe and to the second port via a second connecting pipe; as well as The second temperature control unit is connected to the three ports via a third connecting pipe and to the fourth port via a fourth connecting pipe. The third port is connected to the first connecting pipe via a first valve, the fourth port is connected to the second connecting pipe via a second valve, the third connecting pipe is connected to the fourth connecting pipe via a third valve, the third connecting pipe is also provided with a fourth valve, and the fourth connecting pipe is also provided with a fifth valve. In the first operating mode, the first valve, the second valve, and the third valve are open, and the fourth valve and the fifth valve are closed. The first fluid with a first preset temperature in the first temperature control unit flows from the first connecting pipe through the first heat-conducting pipe and the second heat-conducting pipe in sequence and then returns to the first temperature control unit. The second fluid with a second preset temperature in the second temperature control unit flows from the third connecting pipe through the third valve and the fourth connecting pipe and then returns to the second temperature control unit.
2. The etching apparatus according to claim 1, characterized in that, In the second operating mode, the first valve, the second valve, the fourth valve, and the fifth valve are closed, the third valve is open, the first fluid in the first temperature control unit flows from the first connecting pipe through the first heat conduction pipe and the second connecting pipe and then returns to the first temperature control unit, and the second fluid in the second temperature control unit flows from the third connecting pipe through the third valve and the fourth connecting pipe and then returns to the second temperature control unit.
3. The etching apparatus according to claim 2, characterized in that, The etching apparatus also includes a sixth valve and a seventh valve. The first connecting pipe is connected to the second connecting pipe via the sixth valve, and the seventh valve is disposed between the first connecting pipe and the first port. In the third operating mode, the first valve, the second valve, the third valve, and the seventh valve are closed, and the fourth valve, the fifth valve, and the sixth valve are open. The first fluid in the first temperature control unit returns to the first temperature control unit from the first connecting pipe via the sixth valve and the second connecting pipe, and the second fluid in the second temperature control unit returns to the second temperature control unit from the third connecting pipe via the second heat-conducting pipe and the fourth connecting pipe.
4. The etching apparatus according to claim 1, characterized in that, The first valve, the second valve, the third valve, the fourth valve, and the fifth valve are pneumatic valves.
5. The etching apparatus according to claim 1, characterized in that, The etching apparatus also includes a second liquid storage tank, which is connected to the spraying assembly via a second liquid delivery line. The second liquid storage tank contains a third and a fourth heat-conducting pipe. The third heat-conducting pipe has a fifth and a sixth port, and the fourth heat-conducting pipe has a seventh and an eighth port. The first temperature control unit is connected to the fifth port via a first connecting pipe and to the sixth port via a second connecting pipe. The etching apparatus also includes a third temperature control unit, which is connected to the seventh port via a fifth connecting pipe and to the eighth port via a sixth connecting pipe. The seventh port is connected to the first connecting pipe via a ninth valve, the eighth port is connected to the second connecting pipe via a tenth valve, and the fifth connecting pipe is connected to the sixth connecting pipe via an eleventh valve. A twelfth valve is also provided between the fifth connecting pipe and the seventh port, and a thirteenth valve is also provided between the fourth connecting pipe and the eighth port. In the first operating mode, the first valve, the second valve, the third valve, the ninth valve, the tenth valve, and the eleventh valve are open, and the fourth valve, the fifth valve, the eleventh valve, and the twelfth valve are closed. The first fluid in the first temperature control unit flows from the first connecting pipe through the first heat-conducting pipe, the second heat-conducting pipe, the third heat-conducting pipe, the fourth heat-conducting pipe, and the second connecting pipe in sequence and then returns to the first temperature control unit. The second fluid in the second temperature control unit flows from the third connecting pipe through the third valve and the fourth connecting pipe and then returns to the second temperature control unit. The third fluid with a third preset temperature in the third temperature control unit flows from the fifth connecting pipe through the eleventh valve and the sixth connecting pipe and then returns to the third temperature control unit.
6. The etching apparatus according to claim 5, characterized in that, In the second operating mode, the first valve, the second valve, the fourth valve, the fifth valve, the ninth valve, the tenth valve, the eleventh valve, and the twelfth valve are closed, while the third valve and the eleventh valve are open. The first fluid in the first temperature control unit flows from the first connecting pipe through the first heat-conducting pipe and the third heat-conducting pipe in sequence and then returns to the first temperature control unit. The second fluid in the second temperature control unit flows from the third connecting pipe through the third valve and the fourth connecting pipe and then returns to the second temperature control unit. The third fluid in the third temperature control unit flows from the fifth connecting pipe through the eleventh valve and the sixth connecting pipe and then returns to the second temperature control unit.
7. The etching apparatus according to claim 6, characterized in that, In the third operating mode, the ninth valve, the tenth valve, and the eleventh valve are closed, and the twelfth valve and the thirteenth valve are open. The third fluid in the third temperature control unit returns to the third temperature control unit from the fifth connecting pipe through the fourth heat-conducting pipe and the sixth connecting pipe.
8. The etching apparatus according to claim 5, characterized in that, The ninth valve, the tenth valve, the eleventh valve, the twelfth valve, and the thirteenth valve are pneumatic valves.
9. The etching apparatus according to claim 1, characterized in that, The etching apparatus includes a first chamber, and the spraying assembly includes a plurality of first nozzles disposed within the first chamber.
10. The etching apparatus according to claim 1, characterized in that, The first temperature control unit is a heating unit, and the second temperature control unit is a cooling unit.