Developing solution recycling device

Abstract

The utility model discloses a developing solution recycling device. The developing solution recycling device comprises a separation assembly and a concentration membrane filtering piece, by arranging the separation assembly, the separation assembly comprises at least one membrane separation piece, and the at least one membrane separation piece is connected in sequence, so that glue and metal ions in the waste developing solution can be circularly separated and removed in sequence, the developing solution which can be recycled is obtained, and waste of a large amount of resources is avoided; the separation and concentration product of the separation assembly is separated by arranging the concentration membrane filtering piece, the developing solution in the separation and concentration product can be further separated out, and the recovery rate of the developing solution can be further improved. According to the developing solution recycling device, the waste developing solution is circularly separated and reused, and meanwhile, the recycling rate of the developing solution is increased.

Description

TECHNICAL FIELD

[0001] The utility model relates to developing liquid recycling technical field, specifically, relate to a developing liquid recycling device. BACKGROUND

[0002] TMAH (tetramethylammonium hydroxide) developing liquid is a kind of wet electronic chemicals, is widely used in developing process in integrated circuit process, is indispensable key raw material in high-end integrated circuit production process.

[0003] The inventor finds that, after developing, TMAH developing liquid contains a large amount of glue and metal ions, is a kind of waste developing liquid with strong alkaline, poor biodegradability, and it is harmful to the environment.Meanwhile, TMAH is still contained in the TMAH developing liquid after developing, if directly as waste developing liquid processing, a large amount of resources will be wasted. UTILITY MODEL CONTENT

[0004] The utility model aims to provide a developing liquid recycling device, which can recycle, separate and reuse waste developing liquid, and has high recovery rate.

[0005] Embodiments of the utility model can be implemented as follows:

[0006] The utility model provides a developing liquid recycling device, which comprises:

[0007] A separation assembly for separating waste developing liquid into separated concentrated product and separated permeated product, the separation assembly comprises at least one membrane separation piece, each stage of the membrane separation piece comprises a separation inlet for receiving solution, a permeation outlet for outputting permeated product after separation, and a concentration outlet for outputting concentrated product after separation, when the separation assembly comprises multiple stages of membrane separation pieces, the multiple stages of membrane separation pieces are connected in sequence, the permeation outlet of the membrane separation piece at the upper stage is connected with the separation inlet of the membrane separation assembly at the adjacent lower stage, so that the membrane separation piece at the lower stage separates the permeated product of the membrane separation piece at the upper stage;

[0008] A concentration membrane filter piece is connected with the separation assembly, for separating the separated concentrated product into concentrated membrane permeated product and concentrated membrane concentrated product; the concentration membrane filter piece has a concentration membrane separation inlet, a concentration membrane permeation outlet and a concentration membrane concentration outlet, the concentration outlet of at least one stage of the membrane separation piece in the separation assembly is connected with the concentration membrane filter piece, and the concentration outlet of the membrane separation piece at the lower stage is connected with the separation inlet and / or the concentration membrane separation inlet of the membrane separation piece at any stage at the upper stage.

[0009] Optionally, the concentrated outlet of the membrane separation element at the lower level is connected to the separation inlet of the membrane separation element at the primary level, the concentrated outlet of the membrane separation element at the primary level is connected to the concentrated membrane separation inlet, and the concentrated membrane permeate outlet is connected to the separation inlet of the membrane separation element at the primary level.

[0010] Optionally, the membrane separation element at each level comprises a buffer tank, a delivery pump and a membrane separation unit connected in sequence, the separation inlet, the permeate outlet and the concentrated outlet are provided on the membrane separation unit, and the buffer tank is used to store the solution to be separated by the membrane separation element at each level and is connected to the separation inlet.

[0011] Optionally, the separation assembly comprises a primary membrane separation element and a secondary membrane separation element, the primary membrane separation element has a primary separation inlet, a primary permeate outlet and a primary concentrated outlet, the secondary membrane separation element has a secondary separation inlet, a secondary permeate outlet and a secondary concentrated outlet, the primary permeate outlet is connected to the secondary separation inlet, the primary concentrated outlet is connected to the concentrated membrane separation inlet, the secondary concentrated outlet is connected to the primary separation inlet, and the concentrated membrane permeate outlet is connected to the primary separation inlet.

[0012] Optionally, the primary membrane separation element comprises a primary buffer tank, a primary delivery pump and a primary membrane separation unit connected in sequence, the secondary membrane separation element comprises a secondary buffer tank, a secondary delivery pump and a secondary membrane separation unit connected in sequence, the primary separation inlet, the primary permeate outlet and the primary concentrated outlet are provided on the primary membrane separation unit, the secondary separation inlet, the secondary permeate outlet and the secondary concentrated outlet are provided on the secondary membrane separation unit, the secondary concentrated outlet and the concentrated membrane permeate outlet are connected to the primary buffer tank, and the primary permeate outlet is connected to the buffer tank.

[0013] Optionally, the concentrated membrane filtration element comprises a tertiary buffer tank, a tertiary delivery pump and a concentrated membrane unit connected in sequence, the concentrated membrane separation inlet, the concentrated membrane permeate outlet and the concentrated membrane concentrated outlet are provided on the concentrated membrane unit, the concentrated outlet of at least one membrane separation element is connected to the tertiary buffer tank, and the tertiary delivery pump is connected between the tertiary buffer tank and the concentrated membrane separation inlet.

[0014] Optionally, a concentration adjustment assembly and a medicine adding assembly are further included, the concentration adjustment assembly is connected to the permeate outlet of the membrane separation element at the last level of the separation assembly and the medicine adding assembly to receive the separation permeate product and the medicine and mix them to adjust the concentration of the permeate product.

[0015] Optionally, the concentration preparation component includes at least one mixing component. When the mixing component is multi-stage, the multiple mixing components are connected in sequence. Each mixing component includes a concentration meter and a mixing tube connected in sequence. The concentration meter is used to detect the concentration of the separation permeate flowing to the mixing tube. The mixing tube is connected to the drug addition component to mix the drug and the separation permeate flowing through it.

[0016] Optionally, the drug addition component includes a storage tank and at least one metering pump, the at least one metering pump being respectively configured to correspond to at least one mixing component, the storage tank being used to store the drug, and the metering pump being respectively connected to the storage tank and the mixing tube to deliver the drug to the mixing tube.

[0017] Optionally, the concentration dispensing assembly includes a concentration detection unit, which is communicatively connected to both the metering pump and the concentration meter.

[0018] The beneficial effects of the developer recycling device provided in this embodiment of the invention include:

[0019] By configuring a separation assembly, at least one membrane separation element is connected in sequence. This membrane separation element sequentially separates and removes colloids and metal ions from the waste developer, yielding a reusable developer and avoiding significant resource waste. Furthermore, by using a concentration membrane filter to separate the concentrated product, the developer can be further separated, further improving the developer recovery rate. This developer recycling device achieves the recycling and reuse of waste developer while simultaneously increasing its recovery rate.

[0020] The membrane separation unit primarily uses physical separation, without chemical separation, resulting in higher recovery rates, simpler operation, and greater safety. Attached Figure Description

[0021] To more clearly illustrate the technical solutions of the embodiments of this utility model, the drawings used in the embodiments will be briefly introduced below. It should be understood that the following drawings only show some embodiments of this utility model and should not be regarded as a limitation on the scope. For those skilled in the art, other related drawings can be obtained based on these drawings without creative effort.

[0022] Figure 1 This is a schematic diagram of the developer recycling device provided in this embodiment;

[0023] Figure 2 This is a schematic diagram of a developer recycling device including a two-stage membrane separation element provided in this embodiment;

[0024] Figure 3 A flowchart of the developer solution recycling device provided in the embodiment is shown in the figure;

[0025] Figure 4 A schematic diagram of the concentration adjustment assembly provided in the embodiment is shown in the figure;

[0026] Figure 5 A flowchart of the concentration adjustment assembly provided in the embodiment is shown in the figure;

[0027] Figure 6 A control schematic diagram of the concentration detection unit provided in the embodiment is shown in the figure.

[0028] Figure: 010-developer solution recycling device; 100-separation assembly; 110-first membrane separation part; 111-first buffer tank; 112-first conveying pump; 113-first membrane separation unit; 120-second membrane separation part; 121-second buffer tank; 122-second conveying pump; 123-second membrane separation unit; 200-concentration membrane filtration part; 210-third buffer tank; 220-third conveying pump; 230-concentration membrane unit; 300-concentration adjustment assembly; 310-first mixing assembly; 311-first concentration meter; 312-first mixing pipe; 320-second mixing assembly; 321-second concentration meter; 322-second mixing pipe; 323-third concentration meter; 330-conveying unit; 340-medicine adding assembly; 341-storage tank; 342-first metering pump; 343-second metering pump; 350-concentration detection unit; 400-collection assembly; 410-collection tank; 420-collection conveying pump; 500-discharge assembly. DETAILED DESCRIPTION

[0029] In view of the problems in the background art, the utility model provides a developer solution recycling device 010, which can recycle and separate waste developer solution for reuse, thereby improving the above problems.

[0030] To make the purpose, technical scheme and advantages of the utility model embodiment clearer, the technical scheme in the utility model embodiment will be described clearly and completely in combination with the drawings in the utility model embodiment. Obviously, the described embodiments are part of the embodiments of the utility model, not all the embodiments. The components of the utility model embodiments described and shown in the drawings can be arranged and designed in various different configurations.

[0031] Therefore, the following detailed description of the embodiments of the present application provided in the drawings is not intended to limit the scope of the claimed application, but merely represents selected embodiments of the application. Based on the embodiments of the present application, all other embodiments obtained by those of ordinary skill in the art without creative labor fall within the scope of the present application.

[0032] It should be noted that similar reference numbers and letters represent similar items in the following drawings, and therefore, once an item is defined in one drawing, it does not need to be further defined and explained in subsequent drawings.

[0033] In the description of the present application, it should be noted that if the terms "upper", "lower", "inner", "outer" and the like indicate the orientation or positional relationship based on the orientation or positional relationship shown in the drawings, or the orientation or positional relationship in which the product of the present application is usually placed, and are only for the convenience of describing the present application and simplifying the description, and therefore cannot be understood as indicating or implying that the device or element must have a particular orientation, be constructed and operated in a particular orientation, and therefore cannot be understood as limiting the present application.

[0034] In addition, if the terms "first", "second" and the like appear, they are only used to distinguish the description and cannot be understood as indicating or implying relative importance.

[0035] It should be noted that the features in the embodiments of the present application can be combined with each other without conflict.

[0036] The overall structure, working principle and technical effects of the developing solution circulating and recycling device 010 provided by the present application will be described in detail below through embodiments and in conjunction with the drawings.

[0037] Please refer to Figures 1-3 The developing solution circulating and recycling device 010 provided by the present application is applied to the recycling separation and reuse of waste developing solution.

[0038] Please refer to Figure 1The utility model provides a kind of developing solution circulation recovery device 010, including the separating assembly 100 for separating waste developing solution into separation concentrated product and separation permeation product and concentration membrane filter piece 200;Separating assembly 100 includes at least one membrane separation piece, each stage membrane separation piece includes the separation inlet of receiving solution, the permeation outlet of output separation permeation product after separation and the concentrated outlet of output separation concentrated product after separation, when separating assembly 100 includes multistage membrane separation piece, multistage membrane separation piece is connected in turn, the permeation outlet of the membrane separation piece in upper level is connected with the separation inlet of adjacent lower level separating assembly 100, to make the membrane separation piece in lower level separate the separation permeation product of the membrane separation piece in upper level;Concentration membrane filter piece 200 is connected with separating assembly 100, to be used for separating separation concentrated product into concentrated membrane permeation product and concentrated membrane concentrated product;Concentration membrane filter piece 200 has concentrated membrane inlet, concentrated membrane permeation outlet and concentrated membrane concentrated outlet, the concentrated outlet of at least one stage membrane separation piece in separating assembly 100 is connected with concentration membrane filter piece 200, the concentrated outlet of the membrane separation piece in lower level is connected with the separation inlet and / or concentrated membrane inlet of the membrane separation piece in upper level in any stage.

[0039] It can be understood that the membrane separation piece of separating assembly 100 processes waste developing solution, and the waste developing solution is preliminarily separated into separation permeation product and separation concentrated product, the separating assembly 100 includes one or more membrane separation pieces, wherein the membrane separation pieces are multiple, the multiple membrane separation pieces are connected in turn and sequentially perform multistage separation on the waste developing solution, to improve waste developing solution recovery quality and recovery efficiency.

[0040] Concentration membrane filter piece 200 is connected with separating assembly 100, and the concentration membrane filter piece 200 re-separates the separation concentrated product and separates into concentrated membrane permeation product and concentrated membrane concentrated product, and the concentration membrane filter piece 200 outputs and discharges the concentrated membrane concentrated product, and re-transport the concentrated membrane permeation product into the separating assembly 100 to be separated again, to realize the cyclic separation and reuse of waste developing solution.

[0041] The separation permeation product is the developing solution separated after passing through the separating assembly 100, and the separation concentrated product is the gel, metal ions and part of developing solution that cannot pass through the separating assembly 100. By setting the concentration membrane filter piece 200, the separation concentrated product is further filtered, so that part of the developing solution remaining in the separation concentrated product can be separated again, to further improve the recovery rate.

[0042] Specifically, each membrane separation element includes a separation inlet, a permeate outlet and a concentrate outlet, and each membrane separation element is capable of separating the solution flowing in to produce a separation permeate product and a separation concentrate product, wherein the separation inlet is used to receive the solution, and it should be noted that the separation inlet is only used to receive the solution to be separated, for example, waste developer or other membrane separation element separation concentrate product and concentrated membrane concentrate permeate product, etc., the separation permeate product after the separation of each membrane separation element flows out from the separation permeate outlet, and the separation concentrate product flows out from the concentrate outlet. Each membrane separation element can separate the developer and the gel, carbonate ions and impurity metal ions in the waste developer, wherein most of the gel, carbonate ions and impurity metal ions and other impurities cannot permeate the membrane separation element, so they are separated into the separation concentrate product, and a small amount of developer in the separation concentrate product is transported to the concentrated membrane filter 200 for recycling.

[0043] When the membrane separation element is one, the separation inlet of the membrane separation element is connected to the waste developer source. For example, as shown in the waste developer collection tank 410, the concentrate outlet is connected to the concentrate separation inlet of the concentrated membrane filter 200 and outputs the separation concentrate product, and the permeate outlet is used to output the separation permeate product. Figure 3

[0044] When the membrane separation element is multiple, the multiple membrane separation elements are connected in sequence, the permeate outlet of the upper membrane separation element is connected to the separation inlet of the next level membrane separation element, and the separation permeate product of the upper membrane separation element is transported to the next level membrane separation element for further separation, and so on, so that multi-stage separation can be realized, and the developer recovery quality is improved.

[0045] Among them, each membrane separation element produces a separation permeate product and a separation concentrate product, and the concentrate outlet of at least one membrane separation element in the multi-stage membrane separation element is connected to the concentrate membrane separation inlet of the concentrated membrane filter 200, and in some examples, the concentrate outlet of one membrane separation element in the separation assembly 100 is connected to the concentrate membrane separation inlet, and preferably, the primary membrane separation element in the separation assembly 100 is connected to the concentrated membrane filter 200, that is, as shown in the first membrane separation element connected to the concentrated membrane filter 200, the separation concentrate product of the primary filtration has more developer residues, which can further improve the recovery rate; in other examples, the concentrate outlets of multiple membrane separation elements in the separation assembly 100 are connected to the concentrate membrane separation inlet, which can transport the multi-stage separation concentrate product to the concentrated membrane filter 200 for further separation. Figure 1

[0046] ​​Meanwhile, the concentrated outlet of the membrane separation element at the lower level is connected to the separation inlet and / or the concentrated membrane separation inlet of any membrane separation element at the upper level, i.e., the multi-level concentrated outlet of the multi-level separation membrane assembly can be connected to the separation inlet of any membrane separation element at the upstream or the concentrated membrane separation inlet of the concentrated membrane filtration element 200, or can be connected to the separation inlet of any membrane separation element at the upstream or the concentrated membrane separation inlet of the concentrated membrane filtration element 200 at the same time; in this way, the separation and concentrated product of the membrane separation element at the lower level in the multi-level separation membrane can be transported to the concentrated membrane filtration element 200 for further separation, or can be transported to any membrane separation element at the upper level for further separation;

[0047] Preferably, the concentrated outlet of the membrane separation element at the lower level is connected to the separation inlet of the membrane separation element at the primary level, the concentrated outlet of the membrane separation element at the primary level is connected to the concentrated membrane separation inlet, and the concentrated membrane permeate outlet is connected to the separation inlet of the membrane separation element at the primary level; in this way, since the membrane separation element at the lower level is used to separate the separation permeate product of the membrane separation element at the primary level, the impurity content of the separation permeate product is low, the separation and concentrated product of all the membrane separation elements at the lower level can be transported to the membrane separation element at the primary level for separation, the separation and concentrated product with a high impurity content after the separation of the membrane separation element at the primary level is transported to the concentrated membrane filtration element 200 for further separation, the structure is simple, the pipeline connection is convenient, and the recovery efficiency is high.

[0048] Therefore, by arranging the separation assembly 100, at least one membrane separation element is connected in sequence, and at least one membrane separation element can sequentially separate and remove the gel and metal ions in the waste developer liquid, so that the developer liquid can be reused, and a large amount of resource waste is avoided; by arranging the concentrated membrane filtration element 200 to further separate the separation and concentrated product, the residual developer liquid in the separation and concentrated product can be further separated, and the recovery rate of the developer liquid can be further improved. In this way, the developer liquid recycling device 010 arranged in this way realizes the cyclic separation and reuse of the waste developer liquid, and the recovery rate of the developer liquid is improved.

[0049] In an embodiment, please refer to Figure 2 The separation assembly 100 includes two membrane separation elements, specifically, the separation assembly 100 includes a primary membrane separation element 110 and a secondary membrane separation element 120.

[0050] It is worth mentioning that most of the gel, carbonate ions and impurity metal ions are removed from the primary membrane separation permeate product of the primary membrane separation element 110, but a small amount of gel, carbonate ions and impurity metal ions still remain in the primary membrane separation permeate product. Therefore, the secondary membrane separation element 120 can be added on the basis of the primary membrane separation element 110 to further separate the primary membrane separation permeate product and improve the recovery rate.

[0051] In the present embodiment, please refer to Figure 2 The separation assembly 100 comprises a primary membrane separation member 110 and a secondary membrane separation member 120. The primary membrane separation member 110 and the secondary membrane separation member 120 are connected in sequence. The primary membrane separation member 110 has a primary separation inlet, a primary permeate outlet and a primary concentrate outlet. The secondary membrane separation member 120 has a secondary separation inlet, a secondary permeate outlet and a secondary concentrate outlet. The primary permeate outlet is connected to the secondary separation inlet. The primary concentrate outlet is connected to the concentrate membrane separation inlet. The secondary concentrate outlet is connected to the primary separation inlet. The concentrate membrane permeate outlet is connected to the primary separation inlet.

[0052] The primary separation inlet of the primary membrane separation member 110 inputs the waste developer. The primary membrane separation member 110 separates the waste developer into a primary membrane separation permeate product and a primary membrane separation concentrate product. The primary permeate outlet of the primary membrane separation member 110 outputs the primary membrane separation permeate product and is connected to the secondary separation inlet of the secondary membrane separation member 120. The primary concentrate outlet of the primary membrane separation member 110 outputs the primary membrane separation concentrate product and is connected to the concentrate membrane separation inlet of the concentrate membrane filtration member 200. The primary permeate outlet of the concentrate membrane filtration member 200 is connected to the secondary separation inlet of the primary membrane separation member 110. The secondary membrane separation member 120 separates the primary membrane separation permeate product into a secondary membrane separation permeate product and a secondary membrane separation concentrate product. The secondary permeate outlet of the secondary membrane separation member 120 outputs the secondary membrane separation permeate product. The secondary concentrate outlet of the secondary membrane separation member 120 outputs the secondary membrane separation concentrate product and is connected to the primary separation inlet of the primary membrane separation member 110.

[0053] It can be understood that, on the one hand, the primary membrane separation permeate product is transported into the secondary membrane separation member 120. The primary membrane separation permeate product is separated again by the secondary membrane separation member 120. The anions such as glue, carbonate ions and impurity metal ions in the primary membrane separation permeate product are further removed. The primary separation permeate product can meet the requirements of recycling.

[0054] Correspondingly, the main purpose of the secondary membrane separation member 120 is to further remove trace amounts of glue, carbonate ions and other anions, and impurity metal ions in the primary membrane separation permeate product. Among them, the secondary membrane separation member 120 separates the primary membrane separation permeate product into a secondary membrane separation permeate product and a secondary membrane separation concentrate product; correspondingly, the glue, carbonate ions and other anions, and impurity metal ions in the primary membrane separation permeate product cannot permeate the secondary membrane separation member 120, so they are intercepted in the secondary membrane separation concentrate product, and the secondary membrane separation concentrate product is transported to the primary membrane separation member 110 for recycling separation; correspondingly, the primary membrane separation permeate product passes through the secondary membrane separation member 120 and separates out the secondary membrane separation permeate product, and the remaining trace amounts of glue, carbonate ions and other anions, and impurity metal ions are removed from the secondary membrane separation permeate product, which is then output.

[0055] On the other hand, the primary membrane separation concentrate product is transported to the concentration membrane filtration member 200, and the primary membrane separation concentrate product is separated again by the concentration membrane filtration member 200, and the developer in the concentration membrane permeate product separated from the primary membrane separation concentrate product is transported to the primary membrane separation member 110 for recycling separation and utilization.

[0056] Correspondingly, the main purpose of the concentration membrane filtration member 200 is to further recover the developer in the primary membrane separation concentrate product, thereby improving the recovery rate of the entire system. Among them, the concentration membrane filtration member 200 separates the primary membrane separation concentrate product into a concentration membrane permeate product and a concentration membrane concentrate product; correspondingly, the glue, carbonate ions and other anions, and impurity metal ions in the primary membrane separation concentrate product cannot permeate the concentration membrane member, so they are enriched in the concentration membrane concentrate product, and the concentration membrane concentrate product is discharged as waste developer and is correspondingly transported to the discharge assembly 500. Correspondingly, the primary membrane separation concentrate product passes through the concentration membrane member and separates out the concentration membrane permeate product, and the remaining trace amounts of glue, carbonate ions and other anions, and impurity metal ions in the primary membrane separation concentrate product are further removed, and then the concentration membrane permeate product is transported to the primary membrane separation member 110 for recycling separation.

[0057] Optionally, the membrane separation member and the concentration membrane filtration member 200 can be one or a combination of reverse osmosis separation membrane units, microfiltration separation membrane units, ultrafiltration separation membrane units, and nanofiltration separation membrane units.

[0058] Optionally, the membrane separation member and the concentration membrane filtration member 200 can be one or a combination of a roll-type membrane, a tube-type membrane, a flat plate membrane, and a hollow fiber membrane.

[0059] Optionally, the membrane separation member and the concentration membrane filtration member 200 can be one or a combination of inorganic membranes, organic membranes, and organic-inorganic composite membranes.

[0060] In the present embodiment, please refer to Figure 2 and Figure 3 The primary membrane separation unit 110 includes a primary buffer tank 111, a primary transfer pump 112 and a primary membrane separation unit 113, and the secondary membrane separation unit 120 includes a secondary buffer tank 121, a secondary transfer pump 122 and a secondary membrane separation unit 123; the concentration membrane filtration unit 200 includes a tertiary buffer tank 210, a tertiary transfer pump 220 and a concentration membrane unit 230.

[0061] Further, the primary separation inlet, the primary permeate outlet and the primary concentration outlet are all provided on the primary membrane separation unit 113, the secondary separation inlet, the secondary permeate outlet and the secondary concentration outlet are all provided on the secondary membrane separation unit 123, the secondary concentration outlet and the concentration membrane permeate outlet are both connected to the primary buffer tank 111, and the primary permeate outlet is connected to the secondary buffer tank 121.

[0062] Further, the concentration membrane separation inlet, the concentration membrane permeate outlet and the concentration membrane concentration outlet are all provided on the concentration membrane unit 230, the primary membrane concentration outlet is connected to the tertiary buffer tank 210, and the tertiary transfer pump 220 is connected between the tertiary buffer tank 210 and the concentration membrane separation inlet.

[0063] Wherein, please refer to Figure 2 and Figure 3 The first input end of the primary buffer tank 111 inputs the waste developer, the output end of the primary buffer tank 111 is communicated with the input end of the primary transfer pump 112, the output end of the primary transfer pump 112 is communicated with the primary separation inlet of the primary membrane separation unit 113, the primary membrane separation unit 113 separates the waste developer into a primary membrane separation permeate product and a primary membrane separation concentration product, the primary permeate outlet of the primary membrane separation unit 113 outputs the primary membrane separation permeate product and is communicated with the input end of the secondary buffer tank 121, and the primary concentration outlet of the primary membrane separation unit 113 outputs the primary membrane separation concentration product and is communicated with the input end of the tertiary buffer tank 210 of the concentration membrane filtration unit 200.

[0064] Wherein, please refer to Figure 2 and Figure 3 The output end of the secondary buffer tank 121 is communicated with the input end of the secondary transfer pump 122, the output end of the secondary transfer pump 122 is communicated with the secondary separation inlet of the secondary membrane separation unit 123, the secondary membrane separation unit 123 separates the primary membrane separation permeate product into a secondary membrane separation permeate product and a secondary membrane separation concentration product, the secondary membrane separation unit 123 separates the primary membrane separation permeate product into a secondary membrane separation permeate product and a secondary membrane separation concentration product, the secondary permeate outlet of the secondary membrane separation unit 123 outputs the secondary membrane separation permeate product into the concentration adjustment assembly 300 for concentration adjustment, and the secondary concentration outlet of the secondary membrane separation unit 123 outputs the secondary membrane separation concentration product and is communicated with the second input end of the primary buffer tank 111.

[0065] Wherein, referring to Figure 2 and Figure 3 , the separation inlet of the third buffer tank 210 is communicated with the first concentration outlet of the first membrane separation unit 110, the output end of the third buffer tank 210 is communicated with the separation inlet of the third delivery pump 220, the output end of the third delivery pump 220 is communicated with the separation inlet of the concentration membrane unit 230, the concentration membrane unit 230 separates the first membrane separation concentrated product into a concentration membrane permeate product and a concentration membrane concentrated product, the concentration membrane permeate outlet of the concentration membrane unit 230 outputs the concentration membrane permeate product and is communicated with the third input end of the first buffer tank 111, and the concentration membrane concentrated outlet of the concentration membrane unit 230 outputs the concentration membrane concentrated product and is discharged into the discharge assembly 500.

[0066] In other embodiments, the concentration membrane permeate outlet of the concentration membrane unit 230 can also be directly connected with the first separation inlet of the first membrane separation unit 110 and output the concentration membrane permeate product into the first membrane separation unit 110 for separation.

[0067] Wherein, the first delivery pump 112, the second delivery pump 122 and the third delivery pump 220 can provide a stable pressure source, and the liquid in the tank is pumped to the next unit under the driving of the delivery pump pressure.

[0068] Wherein, the working principle of the first membrane separation unit 113, the second membrane separation unit 123 and the concentration membrane unit 230 is that under the pressure driving action of the delivery pump, different components in the solution input by the separation inlet are enriched on both sides of the first membrane separation unit 113, the second membrane separation unit 123 and the concentration membrane unit 230; wherein, the gel, carbonate ions and impurity metal ions cannot pass through the membrane unit, and the liquid on one side of the membrane unit becomes the separation concentrated product; wherein, the separation permeate product permeates through the membrane unit and permeates to the other side of the membrane unit.

[0069] It can be understood that the waste developer enters the first membrane separation unit 110 for preliminary separation. Wherein, under the pressure driving action of the first delivery pump 112, the waste developer is sent from the output end of the first buffer tank 111 into the first membrane separation unit 113 for separation, and then the waste developer is separated into a first membrane separation permeate product and a first membrane separation concentrated product.

[0070] In one aspect, the first membrane separation permeate enters the second membrane separation component 120 for further separation. In this aspect, the first membrane separation permeate enters the second buffer tank 121, and under the pressure driving action of the second delivery pump 122, the first membrane separation permeate is sent from the output end of the second buffer tank 121 to the second membrane separation unit 123 for separation, and the first membrane separation permeate is separated into the second membrane separation permeate and the second membrane separation concentrate. Further, the second membrane separation concentrate is delivered from the second concentrate outlet of the second membrane separation unit 123 to the first buffer tank 111, and the second membrane separation concentrate is mixed with the waste developer and then recycled for separation. Further, the second membrane separation permeate is delivered to the concentration adjustment assembly 300 for concentration adjustment.

[0071] In another aspect, the first membrane separation concentrate enters the concentration membrane filtration component 200 for further separation and recycling. In this aspect, the first membrane separation concentrate enters the third buffer tank 210, and under the pressure driving action of the third delivery pump 220, the first membrane separation concentrate is sent from the output end of the third buffer tank 210 to the concentration membrane unit 230 for separation, and the first membrane separation concentrate is separated into the concentration membrane permeate and the concentration membrane concentrate. Further, the concentration membrane permeate is delivered from the concentration membrane permeate outlet of the concentration membrane unit 230 to the first buffer tank 111, and the concentration membrane permeate is mixed with the waste developer and then recycled for separation. Further, the concentration membrane concentrate is discharged, and the concentration membrane concentrate can be discharged into the discharge assembly 500.

[0072] Optionally, the delivery pump is not limited to a metering pump, a pneumatic diaphragm pump, and a centrifugal pump.

[0073] Optionally, the first membrane separation unit 113 in the first membrane separation component 110 can be a pretreatment unit and a nanofiltration separation membrane unit. In this aspect, the pretreatment unit is one or a combination of microfiltration, ultrafiltration, and nanofiltration.

[0074] Optionally, the second membrane separation unit 123 in the second membrane separation component 120 can be a nanofiltration or reverse osmosis separation membrane unit.

[0075] Optionally, the concentration membrane unit 230 in the concentration membrane filtration component 200 can be one or a combination of ultrafiltration, nanofiltration, and ultrafiltration nanofiltration.

[0076] In this aspect, the buffer tank has a high-purity N2 protection function to ensure that it is isolated from air during operation.

[0077] In optional embodiments, the separation assembly 100 can further include three, four, or more membrane separation units, with the membrane separation units being connected in series, and the permeate outlet of a higher-level membrane separation unit being connected to the separation inlet of an adjacent lower-level membrane separation assembly 100, so that the lower-level membrane separation unit separates the permeate product of the higher-level membrane separation unit.

[0078] It is worth mentioning that the actual concentration of the final separation permeate product separated by the separation assembly 100 is usually lower than the required value, and therefore the concentration adjustment assembly 300 needs to add 25% TMAH as a supplement to make the final separation permeate product meet the use requirements at the machine end. Therefore, the developer recycling device 010 further includes a concentration adjustment assembly 300 and a chemical adding assembly 340, the concentration adjustment assembly 300 is connected to the permeate outlet of the last membrane separation unit 110 of the separation assembly 100 and the chemical adding assembly 340, for receiving the separation permeate product and chemicals and mixing to adjust the concentration of the permeate product, wherein the chemicals are used to adjust the concentration of the final separation permeate product to meet the use requirements of the developer.

[0079] In the present embodiment, when the separation assembly 100 includes a first membrane separation unit 110 and a second membrane separation unit 120, the second permeate outlet of the second membrane separation unit 123 outputs a second separation permeate product and is connected to the input end of the concentration adjustment assembly 300, and the output end of the concentration adjustment assembly 300 is connected to the machine end, and the second separation permeate product is transported into the concentration adjustment assembly 300 for concentration adjustment, so that the concentration of the adjusted second separation permeate product can meet the use requirements at the machine end.

[0080] Of course, in other embodiments, when the separation assembly 100 includes a first membrane separation unit 110, the first permeate outlet of the first membrane separation unit 110 outputs a first separation permeate product and is connected to the separation inlet of the concentration adjustment assembly 300, and the output end of the concentration adjustment assembly 300 outputs the first separation permeate product to the machine end. The concentration adjustment assembly 300 is used to adjust the concentration of the first separation permeate product.

[0081] In other embodiments, when the separation assembly 100 includes multiple membrane separation units, the concentration adjustment assembly 300 is connected to the permeate outlet of the last membrane separation unit 110 of the separation assembly 100 and the chemical adding assembly 340.

[0082] In the embodiment, the concentration adjustment assembly 300 comprises at least one mixing assembly 310, and the mixing assemblies are connected in sequence when there are multiple mixing assemblies. Each mixing assembly comprises a concentration meter and a mixing pipe connected in sequence. The concentration meter is used to detect the concentration of the separated permeate flowing into the mixing pipe. The mixing pipe is connected to the medicine adding assembly 340 to mix the medicine and the separated permeate. The separated permeate of the separation assembly 100 can be adjusted multiple times through the multiple mixing assemblies to improve the adjustment accuracy, so that the adjusted developer can meet the requirements.

[0083] In the embodiment, the medicine adding assembly 340 comprises a storage tank 341 and at least one metering pump 342. The at least one metering pump 342 is arranged corresponding to the at least one mixing assembly 310. The storage tank 341 is used to store the medicine. The metering pump is connected to the storage tank 341 and the mixing pipe to deliver the medicine to the mixing pipe.

[0084] In the embodiment, please refer to Figure 4 The mixing assembly comprises two mixing assemblies 310 and 320. The mixing assembly 310 preliminarily adjusts the concentration of the second separated permeate to control the concentration of the second separated permeate within a first concentration range. The mixing assembly 320 controls the concentration of the second separated permeate within a second concentration range. For example, the target concentration value of the final developer can be set to meet the use requirements. The first mixing assembly 310 can adjust the second separated permeate to the target concentration value ±0.02%. The second mixing assembly 320 can adjust the second separated permeate to the target concentration value ±0.001%.

[0085] The two or more mixing assemblies ensure that the adjustment accuracy of the second separated permeate can reach the target value ±0.001% (mass concentration). The medicine adding assembly 340 is used to add 25% TMAH and pure water. The delivery unit 330 is responsible for delivering the final product to the machine end. In summary, the concentration adjustment assembly 300 can be continuously mixed and has a small footprint, a simple structure, and easy maintenance.

[0086] In the embodiment, please refer to Figure 4 and Figure 5 The first mixing assembly 310 comprises a first concentration meter 311 and a first mixing pipe 312. The second mixing assembly 320 comprises a second concentration meter 321, a second mixing pipe 322, and a third concentration meter 323. The medicine adding assembly 340 comprises a storage tank 341, a first metering pump 342, and a second metering pump 343.

[0087] Please refer to Figure 5The secondary permeate outlet of the secondary membrane separation unit 123 of the separation component 100 is connected to the first input end of the primary mixing tube 312. The output end of the primary mixing tube 312 is connected to the first input end of the secondary mixing tube 322. The output end of the secondary mixing tube 322 is connected to the input end of the machine through the conveying unit 330. The primary concentration meter 311 is installed on the pipeline connecting the separation component 100 and the primary mixing tube 312. The secondary concentration meter 321 is installed on the pipeline connecting the primary mixing tube 312 and the secondary mixing tube 322. The tertiary concentration meter 323 is installed on the pipeline connecting the secondary mixing tube 322 and the conveying unit 330.

[0088] Please refer to Figure 5 The separation inlet of the primary metering pump 342 is connected to the first output end of the storage tank 341, the output end of the primary metering pump 342 is connected to the second input end of the primary mixing pipe 312, the input end of the secondary metering pump 343 is connected to the second output end of the storage tank 341, and the output end of the secondary metering pump 343 is connected to the second input end of the secondary mixing pipe 322.

[0089] Further, please refer to Figure 4 In order to monitor the concentration of the product permeated by the secondary separation and to calculate the amount of 25% TMAH added, the concentration preparation component 300 in this embodiment also includes a concentration detection unit 350.

[0090] Please refer to Figure 6 The concentration detection unit 350 can be a controller, etc., and is communicatively connected to the primary metering pump 342, the secondary metering pump 343, the primary concentration meter 311, the secondary concentration meter 321, and the tertiary concentration meter 323. The concentration detection unit 350 is used to monitor the primary concentration meter 311, the secondary concentration meter 321, and the tertiary concentration meter 323, and adjust the flow rates of the primary metering pump 342 and the secondary metering pump 343 according to preset values.

[0091] In this embodiment, the mixer, through its special internal structure, such as a sudden narrowing or the addition of internal barriers, increases the turbulence of the liquid, allowing the two liquid streams to come into close contact and mix thoroughly. Optionally, the primary mixing tube 312 and the secondary mixer include, but are not limited to, static mixers, Venturi mixers, and jet mixers.

[0092] It can be understood that the secondary permeate outlet of the secondary membrane separation unit 123 outputs the secondary membrane separation permeate product into the concentration adjustment assembly 300 for concentration adjustment. First, the secondary membrane separation permeate product is output from the secondary permeate outlet of the secondary membrane separation unit 123 into the primary mixing pipe 312, and the primary metering pump 342 delivers 25% TMAH into the primary mixing pipe 312, and the 25% TMAH is mixed with the secondary membrane separation permeate product in the primary mixing pipe 312 to perform the first concentration adjustment on the secondary membrane separation permeate product; wherein the primary concentration meter 311 measures the actual TMAH concentration value in the secondary membrane separation permeate product and feeds back to the concentration detection system, and the concentration detection system sends a signal to the primary metering pump 342 to adjust the output flow of the primary metering pump 342, thereby controlling the addition amount of 25% TMAH of the primary mixing assembly 310.

[0093] Then, the secondary membrane separation permeate product is output from the output end of the primary mixing pipe 312 into the secondary mixing pipe 322, and the secondary metering pump 343 delivers 25% TMAH into the secondary mixing pipe 322 to perform the second concentration adjustment on the secondary membrane separation permeate product; wherein the secondary concentration meter 321 measures the actual TMAH concentration value in the secondary membrane separation permeate product and feeds back to the concentration detection system, and the concentration detection system sends a signal to the secondary metering pump 343 to adjust the output flow of the secondary metering pump 343, thereby controlling the addition amount of 25% TMAH of the secondary mixing assembly 320.

[0094] Finally, the tertiary concentration meter 323 mainly detects the final concentration of the TMAH concentration value in the secondary membrane separation permeate product; if unqualified, the product is delivered into the primary mixing pipe 312 for re-adjustment of the concentration; if qualified, it is delivered to the machine end by the delivery unit 330.

[0095] In this embodiment, the developer recycling device 010 comprises a collection assembly 400.

[0096] Wherein, please refer to Figures 1-3 The collection assembly 400 is used to collect the waste developer generated in the circuit production process.

[0097] In this embodiment, please refer to Figure 3 The collection assembly 400 comprises a collection tank 410 and a collection delivery pump 420, the collection tank 410 is used to collect the waste developer; the separation inlet of the collection delivery pump 420 is in communication with the output end of the collection tank 410, and the output end of the collection delivery pump 420 is in communication with the primary separation inlet of the primary buffer tank 111 of the separation assembly 100.

[0098] In this embodiment, the developer recycling device 010 further comprises a discharge assembly 500.

[0099] Wherein, please refer to Figures 1-3The discharge assembly 500 is used to collect, safely handle, and discharge the concentrated membrane concentrated product.

[0100] The working principle and process of the developing solution recycling device 010 are as follows:

[0101] The collection delivery pump 420 pumps the waste developing solution in the collection tank 410 from the first input end of the first buffer tank 111 into the first buffer tank 111.

[0102] In the first step, the waste developing solution is separated. Under the pressure driving action of the first delivery pump 112, the waste developing solution is sent from the output end of the first buffer tank 111 into the first membrane separation unit 113 for separation, and then the waste developing solution is separated into the first membrane separation permeate product and the first membrane separation concentrated product.

[0103] On the one hand, the first membrane separation permeate product enters the second membrane separation unit 120 for further separation. The first membrane separation permeate product enters the second buffer tank 121, and under the pressure driving action of the second delivery pump 122, the first membrane separation permeate product is sent from the output end of the second buffer tank 121 into the second membrane separation unit 123 for separation, and then the first membrane separation permeate product is separated into the second membrane separation permeate product and the second membrane separation concentrated product. Further, the second membrane separation concentrated product is delivered from the second concentration outlet of the second membrane separation unit 123 into the first buffer tank 111, and the second membrane separation concentrated product is mixed with the waste developing solution for recycling separation again. Further, the second membrane separation permeate product is delivered from the second separation outlet of the second membrane separation unit 123 into the concentration adjustment assembly 300 for concentration adjustment.

[0104] On the other hand, the first membrane separation concentrated product enters the concentrated membrane filtration unit 200 for further separation and recycling. The first membrane separation concentrated product enters the third buffer tank 210, and under the pressure driving action of the third delivery pump 220, the first membrane separation concentrated product is sent from the output end of the third buffer tank 210 into the concentrated membrane unit 230 for separation, and then the first membrane separation concentrated product is separated into the concentrated membrane permeate product and the concentrated membrane concentrated product. Further, the concentrated membrane permeate product is delivered from the concentrated membrane permeate outlet of the concentrated membrane unit 230 into the first buffer tank 111, and the concentrated membrane permeate product is mixed with the waste developing solution for recycling separation again. Further, the concentrated membrane concentrated product is discharged and delivered into the discharge assembly 500.

[0105] Secondly, the second membrane separation permeate is output from the second membrane separation unit 123 to the first mixing pipe 312, the first metering pump 342 delivers 25% TMAH to the first mixing pipe 312, and the 25% TMAH is mixed with the second membrane separation permeate in the first mixing pipe 312, so as to adjust the concentration of the second membrane separation permeate for the first time; wherein the first concentration meter 311 measures the actual TMAH concentration value in the second membrane separation permeate and feeds back to the concentration detection system, the concentration detection system sends a signal to the first metering pump 342, adjusts the output flow of the first metering pump 342, and thus controls the 25% TMAH addition amount of the first mixing assembly 310.

[0106] Then, the second membrane separation permeate is output from the output end of the first mixing pipe 312 to the second mixing pipe 322, the second metering pump 343 delivers 25% TMAH to the second mixing pipe 322, so as to adjust the concentration of the second membrane separation permeate for the second time; wherein the second concentration meter 321 measures the actual TMAH concentration value in the second membrane separation permeate and feeds back to the concentration detection system, the concentration detection system sends a signal to the second metering pump 343, adjusts the output flow of the second metering pump 343, and thus controls the 25% TMAH addition amount of the second mixing assembly 320.

[0107] Finally, the third concentration meter 323 mainly detects the final concentration of the TMAH concentration value in the second membrane separation permeate; if unqualified, the product is delivered to the first mixing pipe 312 for re-adjustment of the concentration; if qualified, the product is delivered to the machine end by the delivery unit 330.

[0108] In summary, the developing solution recycling device 010 provided by the embodiment of the present application can realize the recycling separation and reuse of waste developing solution, and improve the recycling rate of the developing solution, by the following means. The separation assembly 100 is arranged, and at least one membrane separation piece is connected in sequence, so that the gel and metal ions in the waste developing solution can be recycled separated and removed in sequence, and the developing solution that can be reused is obtained, so as to avoid a large amount of resource waste. The concentrated membrane filter 200 is arranged to separate the separation concentrated product, so that the developing solution in the separation concentrated product can be further separated, and the recycling rate of the developing solution can be further improved. The developing solution recycling device 010 arranged in this way realizes the recycling separation and reuse of the waste developing solution, and improves the recycling rate of the developing solution.

[0109] The separation process of the first membrane separation piece 110, the second membrane separation piece 120 and the concentrated membrane unit 230 is mainly physical separation, and does not include chemical separation, so that the recycling rate is higher, the operation is simple, and the safety is higher.

[0110] The above merely illustrates the specific implementation of the present application, but the protection scope of the present application is not limited to this, any person skilled in the art can easily think of the changes or replacements within the technical range disclosed by the present application, which should be covered in the protection scope of the present application.

Claims

1. A developer recycling device, characterized in that, The application relates to a separation assembly (100) for separating waste developer into a separation concentrated product and a separation permeated product, wherein the separation assembly (100) comprises at least one membrane separation element, each of the membrane separation elements comprises a separation inlet for receiving a solution, a permeated outlet for outputting a separation permeated product after separation, and a concentrated outlet for outputting a separation concentrated product after separation, and when the separation assembly (100) comprises multiple membrane separation elements, the multiple membrane separation elements are connected in sequence, the permeated outlet of the membrane separation element at an upper level is connected with the separation inlet of the separation assembly (100) at an adjacent lower level, so that the membrane separation element at the lower level separates the separation permeated product of the membrane separation element at the upper level. A concentrated membrane filter (200) is connected with the separation assembly (100) for separating the separation concentrated product into a concentrated membrane permeated product and a concentrated membrane concentrated product. The concentrated membrane filter (200) has a concentrated membrane separation inlet, a concentrated membrane permeated outlet, and a concentrated membrane concentrated outlet, the concentrated outlet of at least one membrane separation element in the separation assembly (100) is connected with the concentrated membrane filter (200), the concentrated outlet of the membrane separation element at the lower level is connected with the separation inlet and / or the concentrated membrane separation inlet of the membrane separation element at any level at the upper level. The concentrated outlet of the membrane separation element at the lower level is connected with the separation inlet of the membrane separation element at the primary level, the concentrated outlet of the membrane separation element at the primary level is connected with the concentrated membrane separation inlet, and the concentrated membrane permeated outlet is connected with the separation inlet of the membrane separation element at the primary level.

2. The developing solution recycling apparatus according to claim 1, wherein Each of the membrane separation elements comprises a buffer tank, a delivery pump, and a membrane separation unit connected in sequence, the separation inlet, the permeated outlet, and the concentrated outlet are arranged on the membrane separation unit, and the buffer tank is used for storing the solution to be separated by each of the membrane separation elements and is connected with the separation inlet.

3. The developing solution recycling apparatus according to claim 1, wherein The separation assembly (100) comprises a first-level membrane separation element (110) and a second-level membrane separation element (120), the first-level membrane separation element (110) has a first-level separation inlet, a first-level permeated outlet, and a first-level concentrated outlet, the second-level membrane separation element (120) has a second-level separation inlet, a second-level permeated outlet, and a second-level concentrated outlet, the first-level permeated outlet is connected with the second-level separation inlet, the first-level concentrated outlet is connected with the concentrated membrane separation inlet, the second-level concentrated outlet is connected with the first-level separation inlet, and the concentrated membrane permeated outlet is connected with the first-level separation inlet.

4. The developing solution recycling apparatus according to claim 2, wherein ​ 5. The developing solution recycling apparatus according to claim 4, wherein The primary membrane separation component (110) comprises a primary buffer tank (111), a primary delivery pump (112) and a primary membrane separation unit (113) connected in sequence, the secondary membrane separation component (120) comprises a secondary buffer tank (121), a secondary delivery pump (122) and a secondary membrane separation unit (123) connected in sequence, the primary separation inlet, the primary permeate outlet and the primary concentrate outlet are all arranged on the primary membrane separation unit (113), the secondary separation inlet, the secondary permeate outlet and the secondary concentrate outlet are all arranged on the secondary membrane separation unit (123), the secondary concentrate outlet and the concentrate membrane permeate outlet are both connected with the primary buffer tank (111), and the primary permeate outlet is connected with the buffer tank.

6. The developing solution recycling apparatus according to claim 1, wherein The concentrate membrane filtration component (200) comprises a tertiary buffer tank (210), a tertiary delivery pump (220) and a concentrate membrane unit (230) connected in sequence, the concentrate membrane separation inlet, the concentrate membrane permeate outlet and the concentrate membrane concentrate outlet are all arranged on the concentrate membrane unit (230), the concentrate outlet of at least one of the membrane separation components is connected with the tertiary buffer tank (210), and the tertiary delivery pump (220) is connected between the tertiary buffer tank (210) and the concentrate membrane separation inlet.

7. The developing solution recycling apparatus according to claim 1, wherein A concentration adjustment assembly (300) and a medicine adding assembly (340) are further included, the concentration adjustment assembly (300) is connected with the permeate outlet of the last stage of the membrane separation component of the separation assembly (100) and the medicine adding assembly (340) to receive the separation permeate product and medicine and mix them to adjust the concentration of the separation permeate product.

8. The developing solution recycling apparatus according to claim 7, wherein The concentration adjustment assembly (300) comprises at least one mixing assembly, when the mixing assemblies are multiple stages, the multiple stages of the mixing assemblies are connected in sequence, each mixing assembly comprises a concentration meter and a mixing pipe connected in sequence, the concentration meter is used to detect the concentration of the separation permeate product flowing to the mixing pipe, and the mixing pipe is connected with the medicine adding assembly (340) to mix the medicine and the separation permeate product flowing therethrough.

9. The developing solution recycling apparatus according to claim 8, wherein The medicine adding assembly (340) comprises a storage tank (341) and at least one metering pump, the at least one metering pump is respectively arranged corresponding to at least one of the mixing assemblies, the storage tank (341) is used to store medicine, and the metering pump is connected with the storage tank (341) and the mixing pipe respectively to deliver the medicine to the mixing pipe.

10. The developing solution recycling apparatus according to claim 9, wherein The concentration adjustment assembly (300) comprises a concentration detection unit (350), and the concentration detection unit (350) is communicatively connected with the metering pump and the concentration meter respectively.

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