Liquid supply system and coating equipment

Abstract

The utility model discloses a liquid supply system and coating equipment, the liquid supply system comprises a liquid storage tank and a liquid inlet pipe, the liquid storage tank is used for storing coating liquid, two ends of the liquid inlet pipe are respectively communicated with the liquid storage tank and a coating head, the liquid inlet pipe is provided with a conveying unit and a filter, and the conveying unit is used for conveying the coating liquid from the liquid storage tank to the coating head. Wherein a first control valve and a second control valve are arranged on the two sides of the filter, and the first control valve and the second control valve are used for controlling the liquid inlet pipes on the two sides of the filter to be connected or disconnected. According to the liquid supply system, uniform coating liquid can be provided, so that the coating of the coating head is more uniform, the coating quality and the yield are improved, the filter is convenient to maintain, the operation difficulty is reduced, the downtime is shortened, the production efficiency of coating equipment is improved, and the production cost is reduced. Meanwhile, the waste of the coating liquid can be reduced, and the coating liquid is prevented from polluting the working environment.

Description

TECHNICAL FIELD

[0001] The utility model relates to coating equipment technical field especially relates to a liquid supply system and coating equipment. BACKGROUND

[0002] The coating equipment realizes uniform and efficient coating process through controlling the flow of liquid material on the substrate. Specifically, the coating equipment includes a liquid supply system and a coating head, the liquid supply system provides coating liquid for the coating head, and the coating head coats the coating liquid on the substrate. Among them, the coating liquid exists foreign matter, particle and the coating liquid will appear deposition, crystallization etc. and lead to the coating liquid uneven, not only easy to block the coating head and lead to the coating head unable to run, thereby reducing the production efficiency of the coating equipment, but also will lead to the coating head coating uneven, thereby reducing the coating quality and yield.

[0003] In the prior art, the filter is used to filter the coating liquid in the liquid supply system, but the filter needs to be cleaned or replaced after a period of use. During the cleaning or replacement of the filter, the coating liquid in the liquid inlet pipe of the liquid supply system will flow out, resulting in waste of coating liquid and pollution of the working environment.

[0004] Therefore, how to facilitate the replacement of the filter is a difficult problem that needs to be solved urgently. SUMMARY

[0005] The utility model discloses a liquid supply system and coating equipment, which can provide uniform coating liquid, make the coating of the coating head more uniform, improve the coating quality and yield, facilitate the maintenance of the filter, reduce the operation difficulty, shorten the downtime, improve the production efficiency of the coating equipment, reduce the waste of coating liquid and avoid the pollution of the working environment.

[0006] The utility model discloses a liquid supply system and coating equipment, which can provide uniform coating liquid, make the coating of the coating head more uniform, improve the coating quality and yield, facilitate the maintenance of the filter, reduce the operation difficulty, shorten the downtime, improve the production efficiency of the coating equipment, reduce the waste of coating liquid and avoid the pollution of the working environment.

[0007] A liquid supply system includes a liquid storage tank for storing coating liquid and a liquid inlet pipe, the two ends of the liquid inlet pipe are respectively communicated with the liquid storage tank and a coating head, a conveying unit and a filter are arranged on the liquid inlet pipe, the conveying unit is used to convey the coating liquid from the liquid storage tank to the coating head.

[0008] Among them, the filter is provided with a first control valve and a second control valve on both sides, and the first control valve and the second control valve are used to control the liquid inlet pipe on both sides of the filter to be conducted or closed.

[0009] Preferably, the liquid supply system further comprises a buffer tank, the liquid inlet pipe comprises a first liquid inlet pipe and a second liquid inlet pipe, two ends of the first liquid inlet pipe are respectively connected with the liquid storage tank and the buffer tank, and two ends of the second liquid inlet pipe are respectively connected with the buffer tank and the coating head.

[0010] The conveying unit comprises a first conveying unit arranged on the first liquid inlet pipe and a second conveying unit arranged on the second liquid inlet pipe, the first conveying unit is used for conveying the coating liquid from the liquid storage tank to the buffer tank, and the second conveying unit is used for conveying the coating liquid from the liquid storage tank to the coating head.

[0011] Preferably, the filter comprises a first filter, the first filter is arranged on the first liquid inlet pipe, and the first filter is arranged between the liquid storage tank and the first conveying unit; and / or,

[0012] The first filter is arranged between the first conveying unit and the buffer tank.

[0013] Preferably, the filter comprises a second filter, the second filter is arranged on the second liquid inlet pipe, the second filter is arranged between the buffer tank and the second conveying unit, and / or,

[0014] The second filter is arranged between the second conveying unit and the coating head.

[0015] Preferably, the liquid supply system further comprises a liquid outlet pipe, two ends of the liquid outlet pipe are respectively connected with the buffer tank and the coating head.

[0016] Preferably, a first liquid level sensor is arranged on the liquid storage tank, the first liquid level sensor is used for detecting the storage amount of the coating liquid in the liquid storage tank; and / or,

[0017] A second liquid level sensor is arranged on the buffer tank, the second liquid level sensor is used for detecting the storage amount of the coating liquid in the buffer tank.

[0018] Preferably, a flow sensor is arranged on one end of the liquid inlet pipe close to the coating head, the flow sensor is used for monitoring the flow of the coating liquid entering the coating head.

[0019] Preferably, the filter is made of a high polymer material, and the first control valve and the second control valve are pneumatic control valves.

[0020] Preferably, a filter hole is arranged on the filter, and the filter hole has a pore size of 0.1 μm-0.9 μm.

[0021] A coating device, comprising the liquid supply system, a coating head and a support as claimed in any one of the preceding claims, the coating head being arranged on the support, and the liquid supply system being configured to supply the coating head with a coating liquid.

[0022] Compared with the prior art, the coating device has at least the following beneficial effects:

[0023] The liquid supply system and the coating device have the following beneficial effects: the filter can filter out foreign matter, particles, precipitates, crystals and the like in the coating liquid, so that the coating liquid is more uniform, thereby ensuring that the coating head coats more uniformly, and further improving the coating quality and yield; the first control valve and the second control valve can control the liquid inlet pipes on both sides of the filter to be connected or closed; when the first control valve and the second control valve are opened, the coating liquid flows from the first control valve to the second control valve and is filtered by the filter; when the first control valve and the second control valve are closed, the coating liquid at both ends of the filter does not flow, so that the filter can be maintained, such as being cleaned or replaced, thereby facilitating the maintenance of the filter, reducing the operation difficulty, shortening the downtime, improving the production efficiency of the coating device, reducing the waste of the coating liquid and avoiding the pollution of the working environment by the coating liquid. BRIEF DESCRIPTION OF DRAWINGS

[0024] Fig. 1 is a structural schematic view of a first coating device according to an embodiment of the present application.

[0025] Fig. 2 is a structural schematic view of a second coating device according to an embodiment of the present application.

[0026] Fig. 3 is a structural schematic view of a third coating device according to an embodiment of the present application.

[0027] In the drawings: 100, coating device; 1, liquid supply system; 11, liquid storage tank; 111, first liquid level sensor; 12, liquid inlet pipe; 121, first liquid inlet pipe; 122, second liquid inlet pipe; 13, conveying unit; 131, first conveying unit; 132, second conveying unit; 14, filter; 141, first filter; 142, second filter; 15, first control valve; 16, second control valve; 17, buffer tank; 171, second liquid level sensor; 18, liquid outlet pipe; 19, flow sensor; 2, coating head; 3, support. DETAILED DESCRIPTION

[0028] Example implementations will now be described more fully with reference to the accompanying drawings. Example implementations can, however, be implemented in many different forms and should not be construed as limited to the implementations set forth herein; rather, these implementations are provided so that this disclosure will be thorough and complete, and will fully convey the concept of example implementations to those skilled in the art. Like reference numerals refer to like elements throughout the several views, and descriptions of them will not be repeated.

[0029] The words expressing position and direction described in the present application are illustrated by taking the drawings as an example, but changes can also be made as needed, and the changes made are included in the protection scope of the present application.

[0030] Referring to Figs. 1 to 3 The present application provides a kind of coating equipment 100, comprising: liquid supply system 1, coating head 2 and support 3, coating head 2 can be set in support 3, liquid supply system 1 is used to provide coating liquid for coating head 2.Coating head 2 is provided with discharge slit (not shown) to the side of substrate (not shown), coating liquid can be applied to substrate by discharge slit.Coating head 2 is provided with support 3, support 3 can be portal frame, coating head 2 is set to the side of substrate of support 3.

[0031] Specifically, liquid supply system 1 can include: a storage tank 11 for storing coating liquid and a liquid inlet pipe 12, the two ends of the liquid inlet pipe 12 can be communicated with the storage tank 11 and the coating head 2 respectively, and a conveying unit 13 and a filter 14 can be provided on the liquid inlet pipe 12, the conveying unit 13 is used to convey the coating liquid from the storage tank 11 to the coating head 2. The conveying unit 13 is, for example, a delivery pump, which can pump out the coating liquid in the storage tank 11, the coating liquid can flow along the liquid inlet pipe 12, and be filtered through the filter 14 on the liquid inlet pipe 12, and finally flow into the coating head 2. The filter 14 can filter out foreign matter, particles, precipitates, crystals and the like in the coating liquid, so that the coating liquid is more uniform, ensuring that the coating liquid entering the coating head 2 is more uniform, thereby ensuring that the coating head 2 coats more uniformly, and thus improving the coating quality and yield.

[0032] The filter 14 is provided with filter holes, which can not only filter out impurities such as foreign matter in the coating liquid, but also prevent the coating head 2 from being blocked by impurities, ensuring the normal operation of the coating head 2, preventing downtime due to blockage of the coating head 2, thereby improving the working efficiency and coating yield of the coating equipment 100, and preventing impurities from affecting the quality of the coating on the surface of the substrate, ensuring the coating quality of the substrate. Moreover, the filter holes can also stir or cut the coating liquid to make the concentration of the coating liquid more uniform, thereby ensuring the uniformity of the coating. The pore size of the filter holes can be 0.1 μm-0.9 μm, of course, the pore size of the filter holes can also be other sizes, and the pore size of the filter holes can be set according to actual needs.

[0033] As a preferred mode, the liquid storage tank 11 can be provided with a first liquid level sensor 111, which is used to detect the storage amount of the coating liquid in the liquid storage tank 11. When the liquid level of the coating liquid in the liquid storage tank 11 is lower than the first preset value, the user can be reminded in time to add the coating liquid to the liquid storage tank 11, so as to ensure that the coating head 2 can obtain sufficient coating liquid, thereby ensuring the continuous operation of the coating device 100, and further improving the working efficiency and yield of the coating device 100. The inlet pipe 12 is located at one end of the liquid storage tank 11, and preferably below the first preset value of the liquid level of the coating liquid in the liquid storage tank 11. When the liquid level of the coating liquid in the liquid storage tank 11 is higher than the second preset value, which is greater than the first preset value, the user can be reminded in time to stop adding the coating liquid to the liquid storage tank 11, so as to prevent the coating liquid from overflowing from the liquid storage tank 11.

[0034] The end of the inlet pipe 12 close to the coating head 2 can be provided with a flow sensor 19, which is used to monitor the flow of the coating liquid entering the coating head 2. The conveying unit 13 can be adjusted according to the detection data of the flow sensor 19, so as to control the flow of the coating liquid. When the flow of the coating liquid reaches the preset value of the flow sensor 19 and stabilizes, the conveying unit 13 can maintain the current conveying power, so as to provide continuous and stable coating liquid for the coating head 2, thereby ensuring that the coating head 2 can continuously coat, and also ensuring the uniformity of the coating of the coating head 2.

[0035] The two sides of the filter 14 can be provided with a first control valve 15 and a second control valve 16, which are used to control the conduction or closing of the inlet pipe 12 on both sides of the filter 14. When the first control valve 15 and the second control valve 16 are closed, the coating liquid at both ends of the filter 14 does not flow, so that the filter 14 can be maintained, the operation difficulty is reduced, and the downtime is shortened, thereby improving the production efficiency of the coating device 100. Since the first control valve 15 and the second control valve 16 are arranged adjacent to the filter 14, the size of the inlet pipe 12 between the first control valve 15 and the second control valve 16 and the filter 14 is small, and only a small amount of coating liquid flows out when the filter 14 is maintained, which can reduce the waste of the coating liquid and avoid the pollution of the working environment. The first control valve 15 and the second control valve 16 can both be pneumatic control valves, such as pneumatic double-pass ball valves.

[0036] As a preferred manner, the filter 14 is made of a polymer material, such as polytetrafluoroethylene, which has strong chemical inertness and almost no reaction with any chemical substance. This makes the filter 14 particularly reliable when filtering highly corrosive solutions or chemicals. Polytetrafluoroethylene has excellent high-temperature resistance and can maintain its physical and chemical properties in high-temperature environments. For high-temperature processes, the filter 14 can effectively withstand high-temperature operation without deformation or performance degradation due to excessive temperature, thus ensuring stable operation at higher process temperatures. The surface tension of polytetrafluoroethylene is very low, which makes it have very good anti-adhesion performance. The filter 14 surface almost does not adsorb impurities or particles in the coating liquid, which helps to prevent the accumulation of pollutants, maintain the cleanliness and efficiency of the filter 14, and reduce the need for maintenance and replacement. Polytetrafluoroethylene has very high wear resistance and anti-aging ability. Even after long-term use, the filter 14 can maintain good filtering performance and have a long service life, reducing the cost of frequent replacement and maintenance. The polytetrafluoroethylene filter 14 usually has a small pore size, which can effectively remove small particles, impurities or precipitates in the coating liquid, providing high-precision filtering effect. This is very important for processes that require high purity and consistency. Polytetrafluoroethylene has poor wettability with water and is not easy to absorb water, so it can maintain good filtering performance in environments with high humidity. This makes the filter 14 not to be affected by moisture absorption when used in various coating liquids, which can cause performance degradation or reduce filtering precision. Because the surface of polytetrafluoroethylene is smooth and not easy to adhere to pollutants, the filter 14 can be easily cleaned even if it accumulates impurities during use, restoring its normal filtering function and extending the service life.

[0037] In the present application, by providing the filter 14 on the liquid inlet pipe 12, the filter 14 can filter out foreign matter, particles, precipitates, crystals and the like in the coating liquid, making the coating liquid more uniform, thereby ensuring that the coating head 2 coats more uniformly, and further improving the coating quality and yield. By providing the first control valve 15 and the second control valve 16 on both sides of the filter 14, the first control valve 15 and the second control valve 16 can control the conduction or closing of the liquid inlet pipe 12 on both sides of the filter 14. When the first control valve 15 and the second control valve 16 are open, the coating liquid flows from the first control valve 15 to the second control valve 16 and passes through the filter 14 for filtering. When the first control valve 15 and the second control valve 16 are closed, the coating liquid at both ends of the filter 14 does not flow, at which time the filter 14 can be maintained, such as cleaning or replacing the filter 14. This not only facilitates the maintenance of the filter 14, reduces the operation difficulty, shortens the downtime, and thus improves the production efficiency of the coating equipment 100, but also reduces the waste of coating liquid and avoids the pollution of the working environment.

[0038] In an embodiment, the liquid supply system 1 can further comprise a buffer tank 17, the liquid inlet pipe 12 can comprise a first liquid inlet pipe 121 and a second liquid inlet pipe 122, two ends of the first liquid inlet pipe 121 can be in communication with the liquid storage tank 11 and the buffer tank 17 respectively, and two ends of the second liquid inlet pipe 122 can be in communication with the buffer tank 17 and the coating head 2 respectively. The delivery unit 13 can comprise a first delivery unit 131 arranged on the first liquid inlet pipe 121 and a second delivery unit 132 arranged on the second liquid inlet pipe 122, the first delivery unit 131 is used to deliver the coating liquid from the liquid storage tank 11 to the buffer tank 17, and the second delivery unit 132 is used to deliver the coating liquid from the liquid storage tank 11 to the coating head 2. The coating liquid in the liquid storage tank 11 is driven by the first delivery unit 131 and flows into the buffer tank 17 through the first liquid inlet pipe 121, and the coating liquid in the buffer tank 17 can be driven by the second delivery unit 132 and enter the coating head 2 through the second liquid inlet pipe 122. When the filter 14 located on the first liquid inlet pipe 121 needs to be maintained, the first liquid inlet pipe 121 needs to be closed at this time, and the coating liquid in the liquid storage tank 11 cannot be extracted, and since the buffer tank 17 can store a certain amount of coating liquid, the second delivery unit 132 can deliver the coating liquid in the buffer tank 17 to the coating head 2, thereby providing continuous and stable coating liquid for the coating head 2, and ensuring that the coating head 2 can continuously coat.

[0039] The buffer tank 17 can be provided with a second liquid level sensor 171 for detecting the storage amount of the coating liquid in the buffer tank 17. When the liquid level of the coating liquid in the buffer tank 17 is lower than a preset value, the user can be reminded in time to add the coating liquid to the liquid storage tank 11, so as to ensure that the coating head 2 can obtain sufficient coating liquid, thereby ensuring that the coating equipment 100 can continuously operate, and further improving the working efficiency and yield of the coating equipment 100. The end of the liquid inlet pipe 12 located in the liquid storage tank 11 can be located below the preset value of the liquid level of the coating liquid in the liquid storage tank 11.

[0040] The second liquid level sensor 171 can be arranged on the buffer tank 17, and is configured to detect the amount of coating liquid in the buffer tank 17. When the liquid level of the coating liquid in the buffer tank 17 is lower than a first preset value, the power of the first conveying unit 131 can be increased to accelerate the flow of the coating liquid from the liquid storage tank 11 into the buffer tank 17, so as to ensure that the coating head 2 can obtain sufficient coating liquid, thereby ensuring the continuous operation of the coating device 100, and further improving the working efficiency and yield of the coating device 100. The first liquid inlet pipe 121 and the second liquid inlet pipe 122 arranged at one end of the buffer tank 17 can be arranged below the first preset value of the liquid level of the coating liquid in the buffer tank 17. When the liquid level of the coating liquid in the buffer tank 17 is higher than a second preset value, the power of the first conveying unit 131 can be reduced to reduce the flow of the coating liquid from the liquid storage tank 11 into the buffer tank 17, so as to prevent the coating liquid from overflowing from the buffer tank 17.

[0041] As a preferred mode, the filter 14 can include a first filter 141, which can be arranged on the first liquid inlet pipe 121 and between the liquid storage tank 11 and the first conveying unit 131. In this way, the coating liquid is filtered by the first filter 141 before being conveyed by the first conveying unit 131, so as to prevent impurities in the coating liquid from adversely affecting the first conveying unit 131, and ensure the stable operation and prolong the service life of the first conveying unit 131. In some embodiments, the first filter 141 can also be arranged between the first conveying unit 131 and the buffer tank 17.

[0042] The filter 14 can include a second filter 142, which can be arranged on the second liquid inlet pipe 122 and between the buffer tank 17 and the second conveying unit 132. The second filter 142 can filter the coating liquid flowing out of the buffer tank 17 before being conveyed by the second conveying unit 132, so as to further ensure the uniformity of the coating liquid, and prevent impurities in the coating liquid from adversely affecting the second conveying unit 132, and ensure the stable operation and prolong the service life of the second conveying unit 132. In some embodiments, the second filter 142 can also be arranged between the second conveying unit 132 and the coating head 2.

[0043] More preferably, the liquid supply system 1 is provided with both the first filter 141 and the second filter 142, so that the coating liquid can be filtered twice, thereby ensuring that the coating liquid is more uniform. Preferably, the pore size of the filter holes of the second filter 142 is smaller than the pore size of the filter holes of the first filter 141. Of course, the pore size of the filter holes of the first filter 141 and the pore size of the filter holes of the second filter 142 can also be set according to actual needs.

[0044] The liquid supply system 1 can further comprise a liquid outlet pipe 18, two ends of the liquid outlet pipe 18 can be in communication with the buffer tank 17 and the coating head 2 respectively. The excess coating liquid in the coating head 2 can flow into the buffer tank 17 through the liquid outlet pipe 18, which can ensure that the conveying unit 13 maintains stable power, thereby ensuring the stability of the flow of the coating liquid in the coating head 2, and further providing the coating head 2 with continuous and stable coating liquid, ensuring that the coating head 2 can continuously coat, and also ensuring the uniformity of the coating of the coating head 2. The end of the liquid outlet pipe 18 located in the buffer tank 17 can be located below the first preset value of the liquid level of the coating liquid in the buffer tank 17.

[0045] Although the embodiments of the utility model have been shown and described above, it can be understood that the above-mentioned embodiments are exemplary and cannot be understood as limiting the utility model, and the ordinary skilled in the art can change, modify, replace and transform the above-mentioned embodiments within the scope of the utility model without departing from the principles and purposes of the utility model, and all these changes should belong to the protection scope of the utility model claim.

Claims

1. A liquid supply system, characterized in that, The application relates to a liquid supply system for a coating head. The liquid supply system comprises a liquid storage tank and a liquid inlet pipe, two ends of the liquid inlet pipe being respectively connected with the liquid storage tank and the coating head, a conveying unit and a filter being arranged on the liquid inlet pipe, the conveying unit being used for conveying coating liquid from the liquid storage tank to the coating head. The filter is provided with a first control valve and a second control valve on two sides, the first control valve and the second control valve being used for controlling the liquid inlet pipe on the two sides of the filter to be conducted or closed.

2. The liquid supply system according to claim 1, wherein The liquid supply system further comprises a buffer tank, the liquid inlet pipe comprises a first liquid inlet pipe and a second liquid inlet pipe, two ends of the first liquid inlet pipe being respectively connected with the liquid storage tank and the buffer tank, two ends of the second liquid inlet pipe being respectively connected with the buffer tank and the coating head. The conveying unit comprises a first conveying unit arranged on the first liquid inlet pipe and a second conveying unit arranged on the second liquid inlet pipe, the first conveying unit being used for conveying coating liquid from the liquid storage tank to the buffer tank, and the second conveying unit being used for conveying coating liquid from the liquid storage tank to the coating head.

3. The liquid supply system according to claim 2, wherein The filter comprises a first filter, the first filter being arranged on the first liquid inlet pipe and between the liquid storage tank and the first conveying unit; and / or, The first filter is arranged between the first conveying unit and the buffer tank.

4. The liquid supply system according to claim 2, wherein The filter comprises a second filter, the second filter being arranged on the second liquid inlet pipe and between the buffer tank and the second conveying unit; and / or, The second filter is arranged between the second conveying unit and the coating head.

5. The liquid supply system according to claim 2, wherein The liquid supply system further comprises a liquid outlet pipe, two ends of the liquid outlet pipe being respectively connected with the buffer tank and the coating head.

6. The liquid supply system according to claim 2, wherein The liquid storage tank is provided with a first liquid level sensor, the first liquid level sensor being used for detecting the storage amount of coating liquid in the liquid storage tank; and / or, The buffer tank is provided with a second liquid level sensor, the second liquid level sensor being used for detecting the storage amount of coating liquid in the buffer tank.

7. The liquid supply system according to claim 1, wherein The liquid inlet pipe is provided with a flow sensor at a position close to the coating head, the flow sensor being used for monitoring the flow of coating liquid entering the coating head.

8. The liquid supply system according to claim 1, wherein The filter is made of a high polymer material, and the first control valve and the second control valve are pneumatic control valves.

9. The liquid supply system according to claim 1, wherein The filter is provided with filter holes, the filter holes having a pore size of 0.1-0.9 microns.

10. A coating apparatus characterized by comprising: The application further relates to a liquid supply system, a coating head and a support, the coating head being arranged on the support, and the liquid supply system being used for supplying coating liquid to the coating head. ​

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