Dismounting device for electrostatic chuck

Abstract

The dismounting device comprises a bottom plate, a first fixing plate and a second fixing plate are fixed to the top of the bottom plate, a first vacuum suction cup is fixed to the interior of the first fixing plate in a penetrating mode, and a first pipeline is arranged at the end of the first vacuum suction cup; and first vacuum equipment is arranged at the end of the first pipeline, the first vacuum equipment is installed at the top of the bottom plate, a first air cylinder is fixed to one side of the second fixing plate, and a first movable plate is fixed to the end of the first air cylinder. Due to the fact that the electric heating wires are distributed in the mounting frame at equal intervals from top to bottom, the number of the electric heating wires is increased, when the multiple electric heating wires pass through the electrostatic chucks, glue between the ceramic plate and the base can be melted, the glue between the ceramic plate and the base is prevented from being solidified in advance, and the service life of the ceramic plate is prolonged. And separation between the ceramic plate and the base is facilitated.

Description

TECHNICAL FIELD

[0001] The utility model relates to electrostatic chuck technical field, concretely is a kind of dismounting device for electrostatic chuck. BACKGROUND

[0002] Electrostatic chuck includes ceramic plate and pedestal, ceramic plate and pedestal are generally connected using the form of bonding, when needing to maintain or replace component of electrostatic chuck, ceramic plate and pedestal need to be separated.

[0003] As the authorized announcement No.CN218194902U of Chinese utility model patent, discloses a kind of electrostatic chuck split device, belong to electrostatic chuck technical field, including rack, the clamping device and split component are equipped on the rack, the clamping device includes clamping component, the clamping component is located the top of the split component, the split component includes split fine steel wire, the split fine steel wire is connected with heating component, can improve separation speed, will not cause damage to ceramic plate or pedestal.

[0004] The above-mentioned authorized patent is through the heating electric heating wire of ceramic plate and pedestal connecting place, the glue of both connecting places is melted, so that both are separated, since electric heating wire only has one, leading to the small melting area of glue between both, the situation that the glue after melting re-solidifies can appear, it is not conducive to the separation between ceramic plate and pedestal.

[0005] In view of the above problems, it is urgent to make innovative design on the basis of the original electrostatic chuck dismounting device. UTILITY MODEL CONTENT

[0006] The utility model is to provide a kind of dismounting device for electrostatic chuck, to solve the problems raised in the above background art.

[0007] To achieve the above object, the utility model provides the following technical scheme: a kind of dismounting device for electrostatic chuck, including bottom plate, the top of the bottom plate is respectively fixed with first fixed plate and second fixed plate, first vacuum chuck is fixed in the inside of the first fixed plate, and the end of the first vacuum chuck is provided with first pipeline, and the end of the first pipeline is provided with first vacuum equipment, and the first vacuum equipment is installed on the top of bottom plate, one side of the second fixed plate is fixed with first cylinder, and the end of the first cylinder is fixed with first movable plate, and second vacuum chuck is fixed in the inside of the first movable plate, and one end of the second vacuum chuck is provided with second pipeline, and one end of the second pipeline is provided with second vacuum equipment, and the outer wall of the second vacuum equipment is fixed to one side of the first movable plate by mounting plate, and the inside of the first fixed plate is fixed with second cylinder, and the top of the second cylinder is fixed with second movable plate, and third cylinder is fixed in the inside of the second movable plate, and the end of the third cylinder is fixed with mounting bracket, and the inside of the mounting bracket is provided with electric heating wire.

[0008] Preferably, the central axis of the first vacuum chuck coincides with the central axis of the second vacuum chuck.

[0009] Preferably, the first cylinder is provided with two, and the first cylinder is symmetrically distributed about the central axis of the first movable plate.

[0010] Preferably, the second cylinder is provided with two, and the second cylinder is symmetrically distributed about the central axis of the second movable plate.

[0011] Preferably, the mounting bracket is designed as a "U" structure.

[0012] Preferably, the electric heating wire is equally spaced from top to bottom inside the mounting bracket.

[0013] Compared with the prior art, the utility model has the beneficial effects that: the dismounting device for electrostatic chuck, since the electric heating wire is equally spaced from top to bottom inside the mounting bracket, the number of electric heating wires is increased, so that when the electric heating wires pass between the electrostatic chuck, more area of the glue between the ceramic plate and the base can be melted, preventing the glue between the ceramic plate and the base from solidifying in advance, which is beneficial to the separation of the ceramic plate and the base, by starting the first vacuum equipment and the second vacuum equipment, the first vacuum chuck and the second vacuum chuck can generate adsorption force at the end, and the electrostatic chuck can be fixed on the left and right sides, respectively, ensuring that when the first cylinder drives the second vacuum chuck to move to the right, the ceramic plate and the base on the electrostatic chuck can be separated, and the dismounting of the electrostatic chuck is completed. BRIEF DESCRIPTION OF DRAWINGS

[0014] Fig. 1 It is a front view of the utility model;

[0015] Fig. 2 It is the side view sectional structure schematic diagram of the utility model;

[0016] Fig. 3 It is the second air cylinder overhead installation structure schematic diagram of the utility model.

[0017] In the drawing: 1, bottom plate; 2, first fixed plate; 3, first vacuum chuck; 4, first pipeline; 5, first vacuum equipment; 6, second fixed plate; 7, first air cylinder; 8, first movable plate; 9, second vacuum chuck; 10, second vacuum equipment; 11, second pipeline; 12, second air cylinder; 13, second movable plate; 14, third air cylinder; 15, mounting bracket; 16, electric heating wire. DETAILED DESCRIPTION

[0018] The technical scheme in the embodiments of the utility model will be described clearly and completely below in conjunction with the drawings in the embodiments of the utility model. Obviously, the described embodiments are only part of the embodiments of the utility model, not all the embodiments. Based on the embodiments in the utility model, all other embodiments obtained by those skilled in the art without creative labor belong to the scope of protection of the utility model.

[0019] Please refer to Figs. 1-3 The utility model provides a kind of technical scheme: a kind of dismounting device for electrostatic chuck, including bottom plate 1, the top of bottom plate 1 is respectively fixed with first fixed plate 2 and second fixed plate 6, first fixed plate 2 is fixed with first vacuum chuck 3 in the inside, and the end of first vacuum chuck 3 is provided with first pipeline 4, and the end of first pipeline 4 is provided with first vacuum equipment 5, and first vacuum equipment 5 is installed on the top of bottom plate 1, and one side of second fixed plate 6 is fixed with first air cylinder 7, and the end of first air cylinder 7 is fixed with first movable plate 8, and the inside of first movable plate 8 is fixed with second vacuum chuck 9, and one end of second vacuum chuck 9 is provided with second pipeline 11, and one end of second pipeline 11 is provided with second vacuum equipment 10, and the center axis of first vacuum chuck 3 and the center axis of second vacuum chuck 9 coincide with each other, and the outer wall of second vacuum equipment 10 is fixed to one side of first movable plate 8 by mounting plate, and the inside of first fixed plate 2 is fixed with second air cylinder 12, and the top of second air cylinder 12 is fixed with second movable plate 13, and the inside of second movable plate 13 is fixed with third air cylinder 14, and the end of third air cylinder 14 is fixed with mounting bracket 15, and the inside of mounting bracket 15 is provided with electric heating wire 16.

[0020] First air cylinder 7 is provided with two, and first air cylinder 7 is symmetrically distributed about the center axis of first movable plate 8, under the action of two first air cylinders 7, first movable plate 8 can move left and right stably, so that second vacuum chuck 9 can move left and right stably.

[0021] The second cylinder 12 is provided with two, the second cylinder 12 about the center axis of the second movable plate 13 is symmetrically distributed, under the action of two second cylinder 12, make the second movable plate 13 can move smoothly up and down, so that the third cylinder 14, mounting bracket 15 and electric heating wire 16 can move smoothly up and down.

[0022] The mounting bracket 15 is designed as a "U" structure, and the electric heating wires 16 are distributed at equal intervals from top to bottom inside the mounting bracket 15. The number of electric heating wires 16 is increased, so that the several electric heating wires 16 can melt more area of glue between the ceramic plate and the base when passing between the electrostatic chuck, prevent the glue between the ceramic plate and the base from solidifying in advance, and facilitate the separation between the ceramic plate and the base.

[0023] Working principle: when using the dismounting device for the electrostatic chuck, first, one side of the electrostatic chuck is attached to the end of the first vacuum chuck 3, then the first vacuum device 5 is started, the first vacuum device 5 generates suction force at the end of the first vacuum chuck 3, and the electrostatic chuck is fixed, then the first cylinder 7 is started, the first movable plate 8 and the second vacuum chuck 9 are driven to move to the left side, until the end of the second vacuum chuck 9 is in close contact with the right side of the electrostatic chuck, then the third cylinder 14 is started to drive the mounting bracket 15 and the electric heating wire 16 to move left and right, until the electric heating wire 16 is above the glue layer between the electrostatic chuck, at the same time, the electric heating wire 16 is powered on, so that the electric heating wire 16 is heated, then the second cylinder 12 is started, the second movable plate 13, the third cylinder 14, the mounting bracket 15 and the electric heating wire 16 are driven to move downward, and the several electric heating wires 16 enter the glue layer between the electrostatic chuck, complete the melting of the glue layer between the electrostatic chuck, then the second vacuum device 10 is started, the end of the second vacuum chuck 9 is adsorbed to the right side of the electrostatic chuck, then the first cylinder 7 is started, the second vacuum chuck 9 moves to the right side, so that the ceramic plate and the base on the electrostatic chuck are separated, and the dismounting of the electrostatic chuck is completed.

[0024] Although the utility model has been described in detail with reference to the foregoing embodiments, those skilled in the art can still modify the technical solutions recorded in the foregoing embodiments, or make equivalent replacement to part of the technical features, any modification, equivalent replacement, improvement, etc. within the spirit and principles of the utility model should be included in the protection scope of the utility model.

Claims

1. A disassembly device for an electrostatic chuck, comprising a base plate (1), characterized in that: The top of the base plate (1) is fixed with a first fixing plate (2) and a second fixing plate (6). A first vacuum suction cup (3) is fixed through the inside of the first fixing plate (2). A first pipe (4) is provided at the end of the first vacuum suction cup (3). A first vacuum device (5) is provided at the end of the first pipe (4). The first vacuum device (5) is installed on the top of the base plate (1). A first cylinder (7) is fixed on one side of the second fixing plate (6). A first movable plate (8) is fixed at the end of the first cylinder (7). A second vacuum suction cup (9) is fixed through the inside of the first movable plate (8). A second pipe (11) is provided at one end of the second vacuum suction cup (9), and a second vacuum device (10) is provided at one end of the second pipe (11). The outer wall of the second vacuum device (10) is fixed to one side of the first movable plate (8) by a mounting plate. A second cylinder (12) is fixed inside the first fixed plate (2). A second movable plate (13) is fixed at the top of the second cylinder (12). A third cylinder (14) is fixed through the inside of the second movable plate (13). A mounting bracket (15) is fixed at the end of the third cylinder (14). An electric heating wire (16) is provided inside the mounting bracket (15).

2. The disassembly device for an electrostatic chuck according to claim 1, characterized in that: The central axis of the first vacuum chuck (3) coincides with the central axis of the second vacuum chuck (9).

3. The disassembly device for an electrostatic chuck according to claim 1, characterized in that: There are two first cylinders (7), and the first cylinders (7) are symmetrically distributed about the central axis of the first movable plate (8).

4. The disassembly device for an electrostatic chuck according to claim 1, characterized in that: There are two second cylinders (12), which are symmetrically distributed about the central axis of the second movable plate (13).

5. The disassembly device for an electrostatic chuck according to claim 1, characterized in that: The mounting bracket (15) is designed as a "U" shaped structure.

6. The disassembly device for an electrostatic chuck according to claim 1, characterized in that: The electric heating wires (16) are evenly distributed from top to bottom inside the mounting bracket (15).

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