Single crystal clamping and lifting device for bonding single crystal silicon materials

Abstract

The utility model discloses a single crystal clamping and lifting device for bonding single crystal silicon materials. A device main body is composed of two L-shaped clamping force arms which are in mirror image with each other, and first arm parts of the two clamping force arms intersect with each other and are connected through a force arm bolt; the lower ends of the second arm parts of the two clamping force arms are respectively provided with a telescopic screw rod, and the two telescopic screw rods are oppositely arranged and are adjustable in front and back positions so as to clamp a monocrystalline silicon material; steel clamping planes are arranged on the inner sides of the clamping ends of the two telescopic screws respectively, limiting springs are installed on the clamping planes respectively, a spring limiting rod is arranged on the first arm portion of the clamping force arm, a limiting groove is formed in the spring limiting rod, and after the telescopic screws move back and forth to proper positions, the limiting springs are fixed to the limiting groove of the spring limiting rod. By adopting the single crystal silicon material bonding device, the one-time success rate and the bonded crystal yield of single crystal silicon material bonding can be improved, the operation safety is effectively ensured, the bonded crystal loss is reduced, and the economic benefit is improved.

Description

TECHNICAL FIELD

[0001] The utility model relates to a single crystal clamping hoisting device for single crystal silicon material bonding belongs to the semiconductor silicon material processing technical field. BACKGROUND

[0002] In the field of semiconductor single crystal silicon material processing, single crystal silicon material bonding is one of the common processing procedures. With the improvement of single crystal manufacturing technology and market demand, the increase of single crystal silicon rod diameter is the future development trend. Domestic 12-inch IC grade silicon single crystal has been mass-produced, and larger size single crystal silicon is being researched and developed. In comparison, the diameter of single crystal silicon for integrated circuit etching has reached 18 inches or more, and larger size single crystal silicon is also about to be successfully developed.

[0003] The bonding process of single crystal silicon material is an essential process for making semiconductor single crystal silicon wafers, and the bonding yield and safety of the bonding process are unavoidable topics. The traditional bonding method is for the operator to use a trolley to transport the single crystal silicon material to the crystal holder position and use manual labor to lift the crystal to the crystal holder to complete the bonding. With the increase of the weight and size of the crystal, the disadvantages of this method are particularly prominent, and there is a risk of crystal damage during transportation and bonding. If the crystal is damaged during the bonding process, it will cause cracks on the surface or inside the single crystal, and the extension of the cracks may cause great losses. In this process, if a person is injured, it is a more serious accident.

[0004] The utility model aims at changing the operation habit of the operator bonding large diameter single crystal, improving the success rate of single crystal silicon material bonding and the bonding yield, and effectively ensuring the safety of the operation, which is beneficial to popularization. SUMMARY

[0005] In order to solve the above problems in the existing single crystal silicon material bonding process, the purpose of the utility model is to provide a single crystal clamping hoisting device for single crystal silicon material bonding, which provides a safe and convenient auxiliary tool for the operator of the single crystal silicon material bonding process, improves the success rate of single crystal silicon material bonding and the bonding yield, improves the economic benefit while minimizing the incidence of production accidents, and contributes to the enterprise and the operator.

[0006] To achieve the above purpose, the utility model adopts the following technical scheme:

[0007] A single crystal clamping hoisting device for single crystal silicon material bonding, the device main part is composed of two mutually mirror image L-shaped clamping force arms, the first arm of the two clamping force arms is crossed and connected by force arm bolt;

[0008] The lower end of the second arm of the two clamping force arms is respectively provided with a telescopic screw rod, the two telescopic screw rods are oppositely arranged and the front and rear positions are adjustable, and the single crystal silicon material is clamped;

[0009] Steel clamping planes are arranged inside the clamping ends of the two telescopic screws, and limit springs are arranged on the clamping planes respectively, a spring limit rod is arranged on the first arm part of the clamping force arm, and a limit groove is arranged on the spring limit rod, and after the telescopic screw is moved to a suitable position, the limit spring is fixed on the limit groove of the spring limit rod.

[0010] Further, after the telescopic screw is moved to a suitable position, the clamping plane is fixed on the clamping force arm through a pair of locking nuts, and the clamping plane can move in a limited space relative to the telescopic screw, that is, the clamping plane and the telescopic screw are in active connection.

[0011] Further, a steel chain is connected to the upper end of the first arm part of the two clamping force arms, and the length of the steel chain between the two clamping force arms is adjustable. For example, one end of the steel chain is fixedly connected to the upper end of the first arm part of one clamping force arm, the other end of the steel chain is connected to a steel chain shuttle hole arranged on the upper end of the first arm part of the other clamping force arm through a steel chain limit bolt, and the length of the steel chain between the two clamping force arms is adjusted through the steel chain limit bolt. Alternatively, a steel chain shuttle hole is arranged on the upper end of the first arm part of each of the two clamping force arms, and the two ends of the steel chain are connected to the corresponding steel chain shuttle holes through steel chain limit bolts, and the length of the steel chain between the two clamping force arms is adjusted through the steel chain limit bolts.

[0012] Preferably, a steel chain limit safety device is connected to the steel chain behind the steel chain limit bolt, and the steel chain limit safety device can be a steel ring, a stop block or the like with a size greater than the steel chain shuttle hole.

[0013] Further, a soft buffer surface is arranged on the clamping plane.

[0014] The single crystal clamping and lifting device has the advantages that:

[0015] The single crystal clamping and lifting device improves the success rate of single crystal silicon material bonding and the yield of crystal bonding, effectively ensures the safety of operation, reduces the loss of crystal bonding, and improves the economic benefits. The single crystal clamping and lifting device is convenient to operate, simple in structure, beneficial to use by operators, does not increase the work burden, and is beneficial to batch production and promotion. BRIEF DESCRIPTION OF DRAWINGS

[0016] Figure 1 It is a front view of the single crystal clamping and lifting device.

[0017] REFERENCE NUMERALS

[0018] 1 clamping force arm, 2 force arm bolt, 3 telescopic screw, 4 clamping plane, 5 limit spring, 6 spring limit rod, 7 steel chain, 8 steel chain shuttle hole, 9 steel chain limit bolt, 10 steel chain limit safety device, 11 locking nut. DETAILED DESCRIPTION

[0019] The structure and operation of the utility model will be further explained in combination with the drawings of the device, but the implementation mode of the utility model is not limited to this.

[0020] Figure 1 The front view of the single crystal clamping hoisting device of the utility model, the single crystal clamping hoisting device main part is constituted by two mutually mirror image L-shaped clamping force arms 1, the first arm portion (long arm portion) of two clamping force arms 1 is crossed and is connected through force arm bolt 2;The second arm portion (short arm portion) of two clamping force arms 1 is provided with a drill hole in the lower end, and is provided with telescopic screw rod 3 in the drill hole respectively, two telescopic screw rods 3 are oppositely arranged, to clamp single crystal silicon material. The front and rear positions of two telescopic screw rods 3 are adjustable, by adjusting the front and rear distance of telescopic screw rod 3, and being fixed in position through a pair of locking nuts 11 respectively, the device is adapted to the clamping of single crystal silicon material of different lengths. Steel clamping plane 4 is arranged in the inside of the clamping end of two telescopic screw rods 3 respectively, limit spring 5 is installed on each steel clamping plane 4 respectively, is limited through limit spring 5 respectively, spring limit rod 6 is arranged on the first arm portion of clamping force arm 1, limit groove is arranged on spring limit rod 6, limit spring 5 can move back and forth with the position of telescopic screw rod 3, when telescopic screw rod 3 moves back and forth to the appropriate position, limit spring is fixed on the limit groove of spring limit rod.

[0021] As a preferred implementation mode, soft cushioning surface is arranged on the surface of two steel clamping planes respectively, which can prevent the damage of single crystal silicon material end face in the clamping process, and improve the yield of crystal sticking. The clamping plane can move in the limited space relative to the telescopic screw rod, that is, the clamping plane and the telescopic screw rod are actively connected. For example, the clamping plane 4 is connected on the telescopic screw rod 3 using the nut and the screw with smaller diameter than the hole diameter by setting the hole on the telescopic screw rod 3, and the activity space of the screw in the hole is the activity space of the clamping plane 4. In the process of clamping single crystal silicon material, the clamping plane is fixed in the direction by limit spring and spring limit rod, and such design can adapt to uneven or not completely vertical single crystal truncated end face, increase the clamping area, and prevent the fragmentation caused by the excessive concentration of force on some places of single crystal silicon material.

[0022] The single crystal clamping and hoisting device needs to be used in cooperation with a lifting vehicle, in this case, a steel chain 7 is fixed on the upper end of the clamping arm, the steel chain 7 can be hung on the lifting vehicle, and the clamping and hoisting are completed through the lifting vehicle. One end of one of the clamping arms is provided with a steel chain shuttle hole 8, the steel chain 7 can pass through the steel chain shuttle hole 8, and is fixed through a steel chain limiting bolt 9. The effective length of the steel chain can be controlled through the design, and the lifting height is convenient to adjust. Further, the upper end of the first arm part of the two clamping arms is connected with a steel chain, and the length of the steel chain between the two clamping arms is adjustable. For example, one end of the steel chain can be fixedly connected to the upper end of the first arm part of one clamping arm, the other end of the steel chain is connected to the steel chain shuttle hole arranged on the upper end of the first arm part of the other clamping arm through a steel chain limiting bolt, and the length of the steel chain between the two clamping arms is adjusted through the steel chain limiting bolt. The two ends of the steel chain can also be connected to the corresponding steel chain shuttle holes through the steel chain limiting bolts respectively, and the length of the steel chain between the two clamping arms is adjusted through the steel chain limiting bolts.

[0023] The steel chain limiting safety device 10 is installed behind the steel chain limiting bolt 9, and can effectively prevent the crystal from falling when the steel chain limiting bolt 9 fails. As the steel chain limiting safety device, a steel ring, a stop block and the like with a size larger than the steel chain shuttle hole can be selected.

Claims

1. A single-crystal clamping and lifting device for bonding single-crystal silicon materials, characterized in that, The main body of the device consists of two L-shaped clamping arms that are mirror images of each other. The first arms of the two clamping arms cross each other and are connected by arm bolts. The lower ends of the second arms of the two clamping arms are respectively provided with telescopic screws. The two telescopic screws are arranged opposite each other and their front and rear positions are adjustable to clamp the monocrystalline silicon material. Steel clamping planes are provided on the inner sides of the clamping ends of the two telescopic screws, and limit springs are installed on each clamping plane. A spring limit rod is provided on the first arm of the clamping lever, and a limit groove is provided on the spring limit rod. After the telescopic screws move back and forth to the appropriate position, the limit springs are fixed on the limit grooves of the spring limit rods.

2. The single-crystal clamping and lifting device for bonding single-crystal silicon material according to claim 1, characterized in that, After the telescopic screw moves back and forth to a suitable position, it is fixed to the clamping arm by a pair of locking nuts. The clamping plane can move relative to the telescopic screw within a limited space.

3. The single-crystal clamping and lifting device for bonding single-crystal silicon material according to claim 1 or 2, characterized in that, The upper ends of the first arm of the two clamping arms are connected to steel chains, and the length of the steel chains between the two clamping arms is adjustable.

4. The single-crystal clamping and lifting device for bonding single-crystal silicon material according to claim 3, characterized in that, One end of the steel chain is fixedly connected to the upper end of the first arm of a clamping arm, and the other end of the steel chain is connected to the steel chain shuttle hole set at the upper end of the first arm of another clamping arm through a steel chain limiting bolt. The length of the steel chain between the two clamping arms is adjusted by the steel chain limiting bolt.

5. The single-crystal clamping and lifting device for bonding single-crystal silicon material according to claim 3, characterized in that, Steel chain shuttle holes are respectively provided at the upper end of the first arm of the two clamping arms. The two ends of the steel chain are respectively connected to the corresponding steel chain shuttle holes by steel chain limiting bolts. The length of the steel chain between the two clamping arms is adjusted by the steel chain limiting bolts.

6. The single-crystal clamping and lifting device for bonding single-crystal silicon material according to claim 4 or 5, characterized in that, A chain limit safety device is connected to the chain behind the chain limit bolt.

7. The single-crystal clamping and lifting device for bonding single-crystal silicon material according to claim 6, characterized in that, The steel chain limit safety is a steel ring or stop block with a size larger than the steel chain shuttle hole.

8. The single-crystal clamping and lifting device for bonding single-crystal silicon material according to claim 1 or 2, characterized in that, The clamping plane is equipped with a soft buffer surface.

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